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JPH06105800B2 - Electrostrictive effect element - Google Patents

Electrostrictive effect element

Info

Publication number
JPH06105800B2
JPH06105800B2 JP61105914A JP10591486A JPH06105800B2 JP H06105800 B2 JPH06105800 B2 JP H06105800B2 JP 61105914 A JP61105914 A JP 61105914A JP 10591486 A JP10591486 A JP 10591486A JP H06105800 B2 JPH06105800 B2 JP H06105800B2
Authority
JP
Japan
Prior art keywords
effect element
internal electrode
layer
electrostrictive
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61105914A
Other languages
Japanese (ja)
Other versions
JPS62262472A (en
Inventor
栄壽 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP61105914A priority Critical patent/JPH06105800B2/en
Publication of JPS62262472A publication Critical patent/JPS62262472A/en
Publication of JPH06105800B2 publication Critical patent/JPH06105800B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/87Electrodes or interconnections, e.g. leads or terminals
    • H10N30/872Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/87Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/88Mounts; Supports; Enclosures; Casings
    • H10N30/883Additional insulation means preventing electrical, physical or chemical damage, e.g. protective coatings

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Description

【発明の詳細な説明】 産業上の利用分野 本発明は電歪効果素子に関し、更に詳述するならば、縦
効果を利用した積層形の電歪効果素子の電極構造に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrostrictive effect element, and more specifically, to an electrode structure of a laminated electrostrictive effect element utilizing a vertical effect.

従来の技術 振動や外力を電気的な信号に変換する電歪効果素子は、
現在、音響製品あるいは圧電スイッチなど我々の身近な
様々な分野で使用されている。
Conventional technology Electrostrictive effect elements that convert vibrations and external forces into electrical signals
Currently, it is used in various fields familiar to us, such as audio products and piezoelectric switches.

このような電歪効果素子は、第2図(a)の斜視図、及
び(b)の断面図に示すように複数の電歪材層1と内部
電極層2とが上下端に位置する内部電極層2a及び2bの間
で交互に積層され、積層体を形成している。該電歪材層
1は、複合ペロブスカイト構造を有するチタン酸ジルコ
ニウム酸鉛等のセラミックから成り、内部電極層2は銀
−パラジウム合金等から成る。
Such an electrostrictive effect element has an internal structure in which a plurality of electrostrictive material layers 1 and internal electrode layers 2 are located at upper and lower ends as shown in a perspective view of FIG. 2A and a sectional view of FIG. The electrode layers 2a and 2b are alternately laminated to form a laminated body. The electrostrictive material layer 1 is made of a ceramic such as lead zirconate titanate having a composite perovskite structure, and the internal electrode layer 2 is made of a silver-palladium alloy.

更に、上下端の内部電極層2a及び2bには、電歪材より成
る保護層3a及び3bが接し配設されている。
Further, protective layers 3a and 3b made of an electrostrictive material are disposed in contact with the internal electrode layers 2a and 2b at the upper and lower ends.

また、図示の電歪効果素子の側壁面において、前記内部
電極層2の端面は、1層おきに絶縁性物質4a及び4bによ
り被覆し絶縁され、第2図(b)に示すように、該被覆
は、該電歪効果素子の両側壁で1層ごとに互い違いにな
るように設けられている。前記絶縁性物質4a及び4bによ
る被覆の上には、該電歪効果素子の各内部電極層2をそ
れぞれ1層おきに電気的に接続するための外部電極層5a
及び5bが被着し配設されている。更に、前記各外部電極
層5a及び5bと、前記電歪材料による保護層3a及び3bの上
下表面に配設される端面電極層6a及び6bとが、それぞれ
前記保護層3a及び3bの角部で導電材を被着することによ
り電気的に接続されている。
Further, on the side wall surface of the electrostrictive effect element shown in the drawing, the end surface of the internal electrode layer 2 is covered and insulated by every other layers by the insulating substances 4a and 4b, as shown in FIG. 2 (b). The coating is provided on both side walls of the electrostrictive effect element so as to be staggered layer by layer. An external electrode layer 5a for electrically connecting every other internal electrode layer 2 of the electrostrictive effect element is provided on the coating of the insulating materials 4a and 4b.
And 5b are attached and arranged. Furthermore, each of the external electrode layers 5a and 5b, and the end face electrode layers 6a and 6b disposed on the upper and lower surfaces of the protective layers 3a and 3b made of the electrostrictive material are at corners of the protective layers 3a and 3b, respectively. It is electrically connected by depositing a conductive material.

従って、電歪効果素子の各内部電極層2には、1層ごと
に電荷が印加されるようになされている。
Therefore, charges are applied to each internal electrode layer 2 of the electrostrictive effect element layer by layer.

通常、かかる電歪効果素子は端面電極6a、6bに該電歪み
効果素子の取付け部材7、8を半田付けで接続して取り
付け、取付け部材7、8間に所定の電圧を印加すると端
面の外部電極層5a、5bを通してすべての内部電極層2に
電圧が印加された素子全体が縦効果で図中矢印で示した
X、Y方向に歪む。
Normally, such an electrostrictive effect element is attached by attaching the mounting members 7 and 8 of the electrostrictive effect element to the end surface electrodes 6a and 6b by soldering, and applying a predetermined voltage between the mounting members 7 and 8 causes the external surface of the end surface to be removed. When the voltage is applied to all the internal electrode layers 2 through the electrode layers 5a and 5b, the entire element is distorted in the X and Y directions indicated by the arrows in the figure due to the vertical effect.

発明が解決しようする問題点 しかし、上述のような従来の電歪効果素子は、外部電極
層5a及び5bの被着工程以外に端面電極層6a及び6bを被着
する工程が必要であることから、製造コスト高となる欠
点がある。
Problems to be Solved by the Invention However, the conventional electrostrictive effect element as described above requires the step of depositing the end face electrode layers 6a and 6b in addition to the step of depositing the external electrode layers 5a and 5b. However, there is a drawback that the manufacturing cost becomes high.

また、前記外部電極層5a及び5bと端面電極層6a及び6bを
保護層3a及び3bの角部で印刷により電極層を重ね合せて
電気的に接続しているが、多量に付着すると端面電極層
の平面状態が悪くなり、第2図(b)に参照符号Aで示
すにように取り付け部材が傾き、所望の歪効果が得られ
なくなるという問題もある。
Further, the external electrode layers 5a and 5b and the end face electrode layers 6a and 6b are electrically connected by overlapping the electrode layers by printing at the corners of the protective layers 3a and 3b, but if a large amount is attached, the end face electrode layers are formed. There is also a problem in that the flat state becomes worse and the mounting member tilts as shown by reference numeral A in FIG. 2 (b), and the desired distortion effect cannot be obtained.

また、印刷による電極層の付着量が少ないと、接続部の
電気的な信頼性が低下する。
In addition, if the amount of the electrode layer adhered by printing is small, the electrical reliability of the connection portion is reduced.

そこで、本発明は、上記のような問題を解決して、電歪
効果素子の製造コストの低減を図ると共に、良好な効果
の得られる安定構造の電歪効果素子を提供せんとするも
のである。
Therefore, the present invention is intended to solve the above problems, to reduce the manufacturing cost of the electrostrictive effect element, and to provide an electrostrictive effect element having a stable structure that can obtain good effects. .

問題点を解決するための手段 即ち、本発明によれば、上下端がそれぞれ内部電極層と
なるように、複数の電歪材層と内部電極層とを交互に積
層し、前記上下端に位置する内部電極層に接するように
配設された保護層とにより形成される積層体と、前記積
層体の1側面の内部電極層の露出部分に1層おきに絶縁
性物質を塗布した上から一方の保護層壁面上まで延長配
設した第1の外部電極層と、前記積層体の他の側面の前
記絶縁性物質が塗布されていない内部電極層の露出部分
に絶縁性物質を塗布した上から他方の保護層壁面上まで
延長配設した第2の外部電極層とを具備する電歪効果素
子において、前記第1及び第2の外部電極層に前記保護
層の側壁面上で接続するように、それぞれ積層体の上部
および下部に冠着した導電性の金属キャップを更に設け
られる。
Means for Solving the Problems That is, according to the present invention, a plurality of electrostrictive material layers and internal electrode layers are alternately laminated so that the upper and lower ends are internal electrode layers, and the upper and lower ends are positioned. And a protective layer disposed so as to be in contact with the internal electrode layer, and an insulating material is applied to the exposed portion of the internal electrode layer on one side surface of the laminated body every other layer from above. Of the first external electrode layer extended to the wall surface of the protective layer and the exposed portion of the internal electrode layer on the other side surface of the laminate where the insulating substance is not applied, from above. In the electrostrictive effect element including a second external electrode layer extended to the wall surface of the other protective layer, the electrostrictive effect element is connected to the first and second external electrode layers on the side wall surface of the protective layer. , Conductive metal caps on top and bottom of the stack, respectively Is further provided.

作用 以上のように電歪効果素子の側壁に配設される外部電極
層が、積層体の上下端に冠着した導電性の金属キャップ
と保護層の側壁面上でそれぞれ接続されていることで、
該電歪効果素子の製造時において、端面電極層を配設す
るための製造工程が不必要となり、製造コストの低減化
が図れるばかりでなく、該電歪効果素子の取り付け部材
を上下端面に安定に良好な状態で配設することができ
る。
Action As described above, the external electrode layers arranged on the side walls of the electrostrictive effect element are connected to the conductive metal caps capped on the upper and lower ends of the laminate and the side wall surfaces of the protective layer, respectively. ,
At the time of manufacturing the electrostrictive effect element, a manufacturing process for disposing the end face electrode layer is not required, which not only reduces the manufacturing cost but also stabilizes the mounting member of the electrostrictive effect element on the upper and lower end surfaces. It can be arranged in a good condition.

実施例 次に本発明による電歪効果素子の実施例を図面を参照し
て説明する。
EXAMPLES Next, examples of the electrostrictive effect element according to the present invention will be described with reference to the drawings.

第1図(a)は、本発明の電歪効果素子の一実施例の斜
視図であり、第1図(b)は第1図(a)の断面図であ
る。
FIG. 1 (a) is a perspective view of an embodiment of the electrostrictive effect element of the present invention, and FIG. 1 (b) is a sectional view of FIG. 1 (a).

本発明による電歪効果素子の実施例は、電歪効果の積層
体の上部および下部に冠着させた導電性の金属キャップ
9a及び9bに外部電極層5a及び5bの1端をそれぞれ接続し
ている点を除くその他の構造は、第2図に示す従来の電
歪効果素子の構造と同一であるので、同一部分について
は同一の参照番号を付して、その説明を省略する。
An embodiment of the electrostrictive effect element according to the present invention is a conductive metal cap capped on the upper and lower parts of the electrostrictive effect laminate.
Other structures except that one ends of the external electrode layers 5a and 5b are connected to 9a and 9b are the same as the structure of the conventional electrostrictive effect element shown in FIG. The same reference numerals are given and the description thereof is omitted.

かかる電歪効果素子の製作方法としては、まず、チタン
酸鉛などからなるセラミックの仮焼粉末を準備し、少量
のポリブチラール樹脂などの有機バインダー及びフタル
酸ジオクチルなどの可塑剤と共にエチルセロソルブなど
の有機溶媒中に分散させ、泥漿をつくる。この泥漿をド
クターブレードを用いたスリップキャスティング法によ
り厚さ100μmのポリエステルフィルム上に流動塗布し
厚さ70μmのグリーンシートの形に被着して電歪材料層
1を形成する。次に該グリーンシート上に銀−パラジウ
ムペーストなどの導体ペーストをスクリーン印刷により
被着し、内部電極層2を形成する。その後、内部電極層
2を印刷した部分のグリーンシートを所定の大きさに切
断しポリエステルフィルムから剥離する。このグリーン
シートを所望の枚数だけ積み重ね、熱プレスで上下から
圧着して電歪材料層1と内部電極層2とが交互に配設さ
れた積層体を形成する。また、このグリーンシートの積
層工程時において、上下端の内部電極層2の上下面にそ
れぞれ20〜30枚の内部電極層の形成されていないグリー
ンシートを積み重ねてダミー層としての絶縁性の保護層
9a、9bを形成する。
As a method of manufacturing such an electrostrictive effect element, first, a calcined powder of a ceramic made of lead titanate or the like is prepared, and a small amount of an organic binder such as polybutyral resin and a plasticizer such as dioctyl phthalate are mixed with ethyl cellosolve or the like. Disperse in organic solvent to make sludge. This sludge is fluid-coated on a polyester film having a thickness of 100 μm by a slip casting method using a doctor blade and adhered in the form of a green sheet having a thickness of 70 μm to form an electrostrictive material layer 1. Next, a conductor paste such as a silver-palladium paste is applied onto the green sheet by screen printing to form the internal electrode layer 2. Then, the green sheet in the portion where the internal electrode layer 2 is printed is cut into a predetermined size and peeled from the polyester film. A desired number of the green sheets are stacked and pressure-bonded from above and below by a hot press to form a laminated body in which the electrostrictive material layers 1 and the internal electrode layers 2 are alternately arranged. In addition, in the step of stacking the green sheets, 20 to 30 green sheets on which the internal electrode layers are not formed are stacked on the upper and lower surfaces of the internal electrode layers 2 at the upper and lower ends, respectively, to form an insulating protective layer as a dummy layer.
9a and 9b are formed.

次にこの積層体に含有する有機バインダーを高温分解す
ることにより蒸発させ除去してから、例えば上昇スピー
ド5℃/分で温度1120℃まで上昇させ、温度1120℃の状
態を2時間保持して焼結を行なう。次に焼結後の積層物
を格子状に切断することにより、内部電極層2の端面が
露出した積層体が得られる。該積層体の一方の側面には
内部電極層2の端面に一層おきに電気泳動法よりガラス
等の絶縁性物質4aを被着し、他方の側面には、絶縁性物
質4aを被着しなかった内部電極層2の逆側になる端面に
絶縁性物質4bを被着する。絶縁性物質4a、4bの各上面か
らは、絶縁性物質を被着しなかった内部電極層2を電気
的に接続するために、銀ペーストなどの導電ペーストを
スクリーン印刷により、それぞれ一方の保護層9aまたは
9bの壁面上に延長して印刷し、第1の外部電極層5aと第
2の外部電極層5bを形成する。
Next, the organic binder contained in this laminate is decomposed at a high temperature to be evaporated and removed, and then the temperature is raised to 1120 ° C. at a rising speed of 5 ° C./min. Make a conclusion. Next, the laminated body after sintering is cut into a lattice shape to obtain a laminated body in which the end faces of the internal electrode layers 2 are exposed. An insulating substance 4a such as glass is deposited on the end faces of the internal electrode layers 2 on every one side face of the laminate by electrophoresis, and the other side face is not coated with the insulating substance 4a. The insulating material 4b is applied to the opposite end surface of the internal electrode layer 2. A conductive paste such as a silver paste is screen-printed on each of the upper surfaces of the insulating materials 4a and 4b by screen printing in order to electrically connect the internal electrode layers 2 not covered with the insulating material. 9a or
The first external electrode layer 5a and the second external electrode layer 5b are formed by extending and printing on the wall surface of 9b.

次に該積層体の上部および下部に保護層3a、3bの高さの
約半分の深さを有する黄銅などの導電性の金属キャップ
9a、9bを圧入し、該金属キャップ9aおよび9bの端部と、
前記外部電極層5a、5bとを保護層3aおよび3bの壁面上で
半田付け等により電気的に接続することにより完成でき
る。
Next, a conductive metal cap such as brass having a depth of about half the height of the protective layers 3a and 3b is formed on the upper and lower portions of the laminated body.
9a, 9b is press-fitted, the ends of the metal caps 9a and 9b,
This can be completed by electrically connecting the external electrode layers 5a and 5b to the wall surfaces of the protective layers 3a and 3b by soldering or the like.

発明の効果 以上説明したように本発明によれば、端面電極層を被着
する工程が不要となり製造コストの低減化が図れる。ま
た、電歪効果素子を取付け部材に垂直にかつ安定に取り
付けることができ所望の縦効果歪が得られる。更には、
導電性金属キャップと外部電極層との接続の信頼性が確
保され電歪効果素子の品質が大幅に向上する。
EFFECTS OF THE INVENTION As described above, according to the present invention, the step of depositing the end face electrode layer is unnecessary, and the manufacturing cost can be reduced. Further, the electrostrictive effect element can be vertically and stably attached to the attaching member, and a desired longitudinal effect strain can be obtained. Furthermore,
The reliability of the connection between the conductive metal cap and the external electrode layer is secured, and the quality of the electrostrictive effect element is significantly improved.

本発明による電歪効果素子の電極構造は積層方向の断面
が方形状のもののみに限らず円または多角形の断面でも
使用できる。
The electrode structure of the electrostrictive effect element according to the present invention is not limited to a rectangular cross section in the stacking direction, and may be used in a circular or polygonal cross section.

【図面の簡単な説明】[Brief description of drawings]

第1図(a)、(b)は、本発明の電歪効果素子の斜視
図およびその縦方向の断面図、 第2図(a)、(b)は、従来の電歪効果素子の斜視図
およびその縦方向の断面図である。 (主な参照番号) 1……電歪材料層、2……内部電極層、3a、3b……保護
層、4a、4b……絶縁性物質、5a、5b……外部電極層、6
a、6b……端面電極層、7、8……取り付け部材、9a、9
b……金属キャップ
1 (a) and 1 (b) are a perspective view of an electrostrictive effect element of the present invention and a longitudinal sectional view thereof, and FIGS. 2 (a) and 2 (b) are perspective views of a conventional electrostrictive effect element. It is a figure and the sectional view of the longitudinal direction. (Main reference numbers) 1 ... Electrostrictive material layer, 2 ... Internal electrode layer, 3a, 3b ... Protective layer, 4a, 4b ... Insulating material, 5a, 5b ... External electrode layer, 6
a, 6b ... End surface electrode layer, 7,8 ... Mounting member, 9a, 9
b …… Metal cap

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】上下端がそれぞれ内部電極層となるよう
に、複数の電歪材層と内部電極層とを交互に積層し、前
記上下端に位置する内部電極層に接するように配設され
た保護層とにより形成される積層体と、前記積層体の1
側面の内部電極層の露出部分に1層おきに絶縁性物質を
塗布した上から一方の保護層壁面上まで延長配設した第
1の外部電極層と、前記積層体の他の側面の前記絶縁性
物質が塗布されていない内部電極層の露出部分に絶縁性
物質を塗布した上から他方の保護層壁面上まで延長配設
した第2の外部電極層とを具備する電歪効果素子におい
て、 前記第1及び第2の外部電極層に前記保護層の側壁面上
で接続するように、それぞれ積層体の上部および下部に
冠着した導電性の金属キャップを更に具備することを特
徴とする電歪効果素子。
1. A plurality of electrostrictive material layers and internal electrode layers are alternately laminated so that the upper and lower ends are internal electrode layers, and the electrostrictive material layers and the internal electrode layers are arranged in contact with the internal electrode layers located at the upper and lower ends. A laminate formed by a protective layer, and 1 of the laminate.
A first external electrode layer, which is formed by applying an insulating material every other layer on the exposed portion of the internal electrode layer on the side surface and extending from the wall surface of one protective layer to the insulating material on the other side surface of the laminate. In the electrostrictive effect element, the second external electrode layer is formed by applying an insulating substance to the exposed portion of the internal electrode layer not coated with the conductive substance and extending the second external electrode layer on the wall surface of the other protective layer. An electrostrictive device further comprising conductive metal caps capped on the upper and lower portions of the laminate so as to be connected to the first and second external electrode layers on the sidewall surface of the protective layer. Effect element.
JP61105914A 1986-05-08 1986-05-08 Electrostrictive effect element Expired - Lifetime JPH06105800B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61105914A JPH06105800B2 (en) 1986-05-08 1986-05-08 Electrostrictive effect element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61105914A JPH06105800B2 (en) 1986-05-08 1986-05-08 Electrostrictive effect element

Publications (2)

Publication Number Publication Date
JPS62262472A JPS62262472A (en) 1987-11-14
JPH06105800B2 true JPH06105800B2 (en) 1994-12-21

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US7241263B2 (en) 2004-09-30 2007-07-10 Scimed Life Systems, Inc. Selectively rotatable shaft coupler
US7413543B2 (en) 2003-04-01 2008-08-19 Scimed Life Systems, Inc. Endoscope with actively cooled illumination sources
US7479106B2 (en) 2004-09-30 2009-01-20 Boston Scientific Scimed, Inc. Automated control of irrigation and aspiration in a single-use endoscope
US7578786B2 (en) 2003-04-01 2009-08-25 Boston Scientific Scimed, Inc. Video endoscope
US7597662B2 (en) 2004-09-30 2009-10-06 Boston Scientific Scimed, Inc. Multi-fluid delivery system
JP2011003574A (en) * 2009-06-16 2011-01-06 Kyocera Corp Laminated piezoelectric element, injection device using the same, and fuel injection system
US9439557B2 (en) 2005-08-30 2016-09-13 Boston Scientific Scimed, Inc. Articulation joint

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JPH0273750U (en) * 1988-11-25 1990-06-05
JPH0828539B2 (en) * 1988-12-28 1996-03-21 日本電気株式会社 Electrostrictive effect element
JPH0296758U (en) * 1989-01-20 1990-08-01
US5168189A (en) * 1991-09-18 1992-12-01 Caterpillar Inc. Solderless connector for a solid state motor stack
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US7413543B2 (en) 2003-04-01 2008-08-19 Scimed Life Systems, Inc. Endoscope with actively cooled illumination sources
US7578786B2 (en) 2003-04-01 2009-08-25 Boston Scientific Scimed, Inc. Video endoscope
US7241263B2 (en) 2004-09-30 2007-07-10 Scimed Life Systems, Inc. Selectively rotatable shaft coupler
US7479106B2 (en) 2004-09-30 2009-01-20 Boston Scientific Scimed, Inc. Automated control of irrigation and aspiration in a single-use endoscope
US7597662B2 (en) 2004-09-30 2009-10-06 Boston Scientific Scimed, Inc. Multi-fluid delivery system
US9439557B2 (en) 2005-08-30 2016-09-13 Boston Scientific Scimed, Inc. Articulation joint
JP2011003574A (en) * 2009-06-16 2011-01-06 Kyocera Corp Laminated piezoelectric element, injection device using the same, and fuel injection system

Also Published As

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