JPH0580147B2 - - Google Patents
Info
- Publication number
- JPH0580147B2 JPH0580147B2 JP20019181A JP20019181A JPH0580147B2 JP H0580147 B2 JPH0580147 B2 JP H0580147B2 JP 20019181 A JP20019181 A JP 20019181A JP 20019181 A JP20019181 A JP 20019181A JP H0580147 B2 JPH0580147 B2 JP H0580147B2
- Authority
- JP
- Japan
- Prior art keywords
- value
- series
- output
- diagnosis target
- input
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 claims description 62
- 238000009826 distribution Methods 0.000 claims description 31
- 238000003745 diagnosis Methods 0.000 claims description 23
- 230000001066 destructive effect Effects 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 9
- 238000005259 measurement Methods 0.000 claims description 6
- 238000002405 diagnostic procedure Methods 0.000 claims description 5
- 230000006870 function Effects 0.000 description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 239000013598 vector Substances 0.000 description 7
- 230000005684 electric field Effects 0.000 description 6
- 238000013500 data storage Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000007689 inspection Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000005315 distribution function Methods 0.000 description 1
- 238000000572 ellipsometry Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20019181A JPS58102534A (ja) | 1981-12-14 | 1981-12-14 | 非破壊診断方式 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20019181A JPS58102534A (ja) | 1981-12-14 | 1981-12-14 | 非破壊診断方式 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58102534A JPS58102534A (ja) | 1983-06-18 |
| JPH0580147B2 true JPH0580147B2 (zh) | 1993-11-08 |
Family
ID=16420304
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20019181A Granted JPS58102534A (ja) | 1981-12-14 | 1981-12-14 | 非破壊診断方式 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58102534A (zh) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2594956B2 (ja) * | 1987-07-10 | 1997-03-26 | 株式会社日立製作所 | 半導体装置不良解析方法 |
| US6272468B1 (en) * | 1997-12-01 | 2001-08-07 | John Peter Melrose | Clinical, heoristic, adminstrative, research & teaching (CHART) java-web-object information system for medical record management predicated on human body anatomy and physiology multi-media modeling |
| JP2009067586A (ja) * | 2007-09-18 | 2009-04-02 | Toppan Forms Co Ltd | 紙捌き装置 |
-
1981
- 1981-12-14 JP JP20019181A patent/JPS58102534A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58102534A (ja) | 1983-06-18 |
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