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JPH0552702A - Light detecting apparatus - Google Patents

Light detecting apparatus

Info

Publication number
JPH0552702A
JPH0552702A JP23731691A JP23731691A JPH0552702A JP H0552702 A JPH0552702 A JP H0552702A JP 23731691 A JP23731691 A JP 23731691A JP 23731691 A JP23731691 A JP 23731691A JP H0552702 A JPH0552702 A JP H0552702A
Authority
JP
Japan
Prior art keywords
optical fiber
light
optical
laser beam
photodetector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP23731691A
Other languages
Japanese (ja)
Other versions
JP2773998B2 (en
Inventor
Kazuyoshi Hasegawa
和義 長谷川
Masayuki Kubota
雅之 久保田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP3237316A priority Critical patent/JP2773998B2/en
Publication of JPH0552702A publication Critical patent/JPH0552702A/en
Application granted granted Critical
Publication of JP2773998B2 publication Critical patent/JP2773998B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/42Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/52PV systems with concentrators

Landscapes

  • Photovoltaic Devices (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

PURPOSE:To measure spectrum characteristics and optical-output characteristics by moving an optical fiber based on each photovoltaic force of a plurality of light receiving regions of a photoelectric converting part, and making an emitting light axis agree with the optical fiber. CONSTITUTION:Laser beam emitted from a semiconductor laser diode 1 is condensed through a lens 3. The light is detected with four photodetectors 6 (6a-6d). The light is monitored with photovoltaic forces 7 (78-7d). At this time, the photodetectors 6 are scanned in the directions (x) and (y) so that the four photovoltaic forces 7 become equal. The axis of the fiber 4 agrees with the axis of the laser 2b. The direction (z) is also scanned, and the fiber 4 is aligned with a focal point 5, where the input of the laser beam 26 into the fiber 4 becomes the maximum value. As a result, the optical fiber can be made to agree with the optical axis of the emitted light quickly and positively. Furthermore, the measurements of the optical output characteristics of the laser beam and the spectrum characteristics can be performed at the same time by adding the photovoltaic forces 7 obtained from the photodetectors 6 during the scanning of the photodetector.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は発光素子の検査または
位置検出用に使用される光検知装置に関し、特に出射光
を光ファイバに導く構成を有するものに関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a photodetector used for inspecting or detecting the position of a light emitting element, and more particularly to a photodetector having a structure for guiding emitted light to an optical fiber.

【0002】[0002]

【従来の技術】図3は従来の光ファイバを用いた光検知
装置の光の入力方法を示す概略図であり、図において、
1は半導体レーザダイオード(以下LDと略す)、2は
LD1より外部へ出射されたレーザ光であり、2aは集
光前のものであり、2bはレンズ3にて集光されたもの
を示す。5は集光されたレーザ光2の焦点であり、4は
レンズ3によって集光されたレーザ光2bを取り込む光
ファイバであり、その後段には図示しない光検出器が配
置されている。また、x,y,zは光ファイバ4に取り
込まれるレーザ光2bの入力が最大になるように光ファ
イバ4を走査する方向である。
2. Description of the Related Art FIG. 3 is a schematic diagram showing a light input method of a conventional photodetector using an optical fiber.
Reference numeral 1 is a semiconductor laser diode (hereinafter abbreviated as LD), 2 is a laser beam emitted from the LD 1 to the outside, 2a is a laser beam before being condensed, and 2b is a laser beam condensed by a lens 3. Reference numeral 5 is a focus of the condensed laser light 2, reference numeral 4 is an optical fiber for taking in the laser light 2b condensed by the lens 3, and a photodetector (not shown) is arranged in the subsequent stage. Further, x, y, and z are directions in which the optical fiber 4 is scanned so that the input of the laser beam 2b taken into the optical fiber 4 is maximized.

【0003】次に動作について説明する。LD1より出
射されたレーザ光2aはレンズ3によって集光される。
この集光されたレーザ光2bを光ファイバ4に最大限入
力できるように、光ファイバ4をx,y,z方向に走査
させ、レーザ光2の焦点5に位置合わせをする。そして
光ファイバ4に入力した光は図示しない光検出器にてそ
の光量等が検出される。
Next, the operation will be described. The laser light 2 a emitted from the LD 1 is condensed by the lens 3.
The optical fiber 4 is scanned in the x, y, z directions so that the focused laser beam 2b can be input to the optical fiber 4 to the maximum extent, and the laser beam 2 is aligned with the focal point 5. Then, the light input to the optical fiber 4 is detected in its light amount and the like by a photodetector (not shown).

【0004】[0004]

【発明が解決しようとする課題】従来の光検知装置は以
上のように構成されており、光ファイバへの光の入力
は、集光されたレーザ光の焦点位置に光ファイバを位置
調整するのに多くの時間を要するなどの問題点があっ
た。
The conventional photo-detecting device is constructed as described above, and the light input to the optical fiber adjusts the position of the optical fiber to the focal position of the focused laser light. There was a problem that it took a lot of time.

【0005】この発明は上記のような問題点を解消する
ためになされたもので、光ファイバと入射する光の光軸
合わせが短時間でできるとともに、スペクトル特性だけ
でなく光出力特性等の測定も行うことができる光検知装
置を得ることを目的とする。
The present invention has been made in order to solve the above problems, and the optical axis of the incident light can be aligned with the optical fiber in a short time, and not only the spectral characteristics but also the optical output characteristics can be measured. It is an object of the present invention to obtain a light detection device that can also perform the above.

【0006】[0006]

【課題を解決するための手段】この発明に係る光検知装
置は、複数の受光領域を有する光電変換部と、該光電変
換部を貫通して固定された光ファイバとを備えたもので
ある。
A photodetector according to the present invention comprises a photoelectric conversion section having a plurality of light receiving regions, and an optical fiber fixed through the photoelectric conversion section.

【0007】[0007]

【作用】この発明においては、光電変換部の複数の受光
領域の各光起電力に基づいて光ファイバを移動させて、
光ファイバへの光の入力が最大となるように位置決めす
るようにしたから、迅速に光源からの出射光の光軸を見
出し、光軸合わせを行うことができる。
In the present invention, the optical fiber is moved on the basis of each photovoltaic force of the plurality of light receiving regions of the photoelectric conversion section,
Since the positioning is performed so that the light input to the optical fiber is maximized, it is possible to quickly find the optical axis of the light emitted from the light source and perform the optical axis alignment.

【0008】また、光軸を合わせる際に、上記光電変換
部の各受光領域で生じた光起電力から光出力特性を検出
することができる。
Further, when the optical axes are aligned, the light output characteristic can be detected from the photoelectromotive force generated in each light receiving region of the photoelectric conversion section.

【0009】[0009]

【実施例】以下、この発明の一実施例による光検出装置
を図について説明する。図1において、図3と同一符号
は同一または相当部分を示し、6は4分割光検知器であ
り、4分割された光検知部6a,6b,6c,6dから
構成されており、それぞれの検知部でO/E変換された
光起電力7a,7b,7c,7dが得られるようになっ
ている。また上記4分割された光検知部6a,6b,6
c,6dの中心部には光ファイバ4が配置されている。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A photodetector according to an embodiment of the present invention will be described below with reference to the drawings. In FIG. 1, the same reference numerals as those in FIG. 3 denote the same or corresponding parts, and 6 is a four-division photodetector, which is composed of four-division photodetection units 6a, 6b, 6c, 6d. The photoelectromotive force 7a, 7b, 7c, 7d which is O / E converted in the section is obtained. In addition, the above-mentioned four divided light detection units 6a, 6b, 6
An optical fiber 4 is arranged at the center of c and 6d.

【0010】次に動作について説明する。LD1から出
射されたレーザ光2aはレンズ3で集光される。集光さ
れたレーザ光2bは光検知器6の4つの光検知部6a,
6b,6c,6dで検知され、各々の光検知部より得ら
れる光起電力7a,7b,7c,7dによりモニタされ
る。このとき、7a=7b=7c=7dとなるように、
光検知器6をx,y方向に走査させて、光ファイバ4と
レーザ光2bの光軸を合わせ、さらにz方向に走査させ
て光ファイバ4へのレーザ光2bの入力が最となる焦点
5に合わせるようにしてアライメントする。
Next, the operation will be described. The laser light 2 a emitted from the LD 1 is condensed by the lens 3. The focused laser beam 2b is supplied to the four photo detectors 6a of the photo detector 6,
6b, 6c and 6d are detected and monitored by the photoelectromotive force 7a, 7b, 7c and 7d obtained from each photodetector. At this time, so that 7a = 7b = 7c = 7d,
The photodetector 6 is scanned in the x and y directions to align the optical axes of the optical fiber 4 and the laser beam 2b, and is further scanned in the z direction so that the laser beam 2b is input to the optical fiber 4 at the focal point 5. Align to fit.

【0011】このようにして、アライメント後に光ファ
イバ4から取り込まれたレーザ光2のスペクトルが光フ
ァイバ4の他端に接続される図示しない光検知器により
測定される。またアライメント中に各光検知部の出力の
合計光起電力(7a+7b+7c+7d)により全光出
力の測定がされる。
In this way, the spectrum of the laser beam 2 taken from the optical fiber 4 after alignment is measured by a photodetector (not shown) connected to the other end of the optical fiber 4. Further, during the alignment, the total light output is measured by the total photoelectromotive force (7a + 7b + 7c + 7d) of the outputs of the respective light detection units.

【0012】このように本実施例によれば、4分割され
た光検知部6a,6b,6c,6dから構成された光検
知器6の中心に光ファイバ4を貫通固定して配置し、各
光検知部における光起電力7a〜7dが等しくなるよう
に、光検知器6をx,y方向に走査し、次いで光ファイ
バ4への入射光が最大となるように光検知器6をz方向
に走査することで、レーザ光の焦点5に光ファイバ4を
アライメントするようにしたから、迅速かつ確実に出射
光の光軸に光ファイバを合致させることができる。
As described above, according to this embodiment, the optical fiber 4 is arranged through the optical detector 4 at the center of the photodetector 6 which is composed of the photodetectors 6a, 6b, 6c and 6d divided into four parts. The photodetector 6 is scanned in the x and y directions so that the photoelectromotive forces 7a to 7d in the photodetector are equal, and then the photodetector 6 is moved in the z direction so that the incident light on the optical fiber 4 is maximized. Since the optical fiber 4 is aligned with the focal point 5 of the laser light by scanning at, the optical fiber can be quickly and surely aligned with the optical axis of the emitted light.

【0013】また、光検知器6を走査する際に、各光検
知部より得られる光起電力7a,7b,7c,7dを合
計することで、レーザ光の光出力特性の測定をスペクト
ル特性の測定と同時に行うことができる。
Further, when the photodetector 6 is scanned, the photoelectromotive forces 7a, 7b, 7c, 7d obtained from the photodetectors are summed to measure the optical output characteristic of the laser light as a spectral characteristic. It can be done at the same time as the measurement.

【0014】なお上記実施例では光検知器6を4分割さ
れた光検知部から構成したが、光検知部の数はこれに限
られるものではなく、少なくとも3つ以上あればよい。
In the above-described embodiment, the photodetector 6 is composed of the photodetector sections divided into four, but the number of photodetector sections is not limited to this, and at least three or more are sufficient.

【0015】次に本発明の第2の実施例について説明す
る。本実施例では光検知器6に代えてCCD8を用いた
ものである。すなわち図2に示すようにCCD8の中心
を貫通させて光ファイバ4を配置し、CCD8の図示し
ない各出力端子の起電力をモニターして、各端子の値が
等しくなる位置に光ファイバ4を移動させることで、光
ファイバ4にレーザ光2bの光軸を合わせる。このよう
に構成することで、上記実施例と同様の効果を得ること
ができる。
Next, a second embodiment of the present invention will be described. In this embodiment, a CCD 8 is used instead of the photodetector 6. That is, as shown in FIG. 2, the optical fiber 4 is arranged so as to penetrate the center of the CCD 8, the electromotive force of each output terminal (not shown) of the CCD 8 is monitored, and the optical fiber 4 is moved to a position where the value of each terminal is equal. By doing so, the optical axis of the laser beam 2b is aligned with the optical fiber 4. With this configuration, the same effect as that of the above embodiment can be obtained.

【0016】なお上記各実施例では、光検知器6または
CCD8の中心に光ファイバ4を配置するようにした
が、光ファイバ4は必ずしも上記部材の中心に配置する
必要はなく、光検知器6またはCCD8の中心と光ファ
イバ4の位置を補正するように信号処理することで、光
ファイバ4をレーザ光2bの光軸と一致させることがで
きる。
In each of the above embodiments, the optical fiber 4 is arranged at the center of the photodetector 6 or the CCD 8. However, the optical fiber 4 does not necessarily have to be arranged at the center of the above member, and the photodetector 6 is not necessary. Alternatively, the optical fiber 4 can be aligned with the optical axis of the laser beam 2b by performing signal processing so as to correct the position of the center of the CCD 8 and the position of the optical fiber 4.

【0017】また各実施例ではレーザ光2をレンズ3を
用いて集光させるようにしたが、広がり角が小さい光等
を測定する場合は、レンズを用いて集光することなくそ
の光軸を光ファイバ4に導入するようにしてもよい。
In each embodiment, the laser beam 2 is focused by using the lens 3. However, when measuring light having a small divergence angle, the optical axis of the laser beam 2 is not focused by the lens. It may be introduced into the optical fiber 4.

【0018】[0018]

【発明の効果】以上のように、この発明に係る光検出装
置によれば、光電変換部の複数の受光領域の各光起電力
に基づいて光ファイバを移動させて、光ファイバへの光
の入力が最大となるように位置決めするようにしたか
ら、迅速に光ファイバと光軸のアライメントを行うこと
ができ、また、光軸を合わせる際に、上記光電変換部の
各受光領域で生じた光起電力から光出力特性を検出する
ことができるという効果がある。
As described above, according to the photodetector of the present invention, the optical fiber is moved on the basis of the respective photoelectromotive forces of the plurality of light receiving regions of the photoelectric conversion unit, and the light to the optical fiber is moved. Since the positioning is performed so that the input is maximized, the optical fiber and the optical axis can be quickly aligned, and when the optical axis is aligned, the light generated in each light receiving area of the photoelectric conversion unit can be aligned. There is an effect that the light output characteristic can be detected from the electromotive force.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明の一実施例による光検知装置の構成を
示す概略図である。
FIG. 1 is a schematic diagram showing a configuration of a photodetector according to an embodiment of the present invention.

【図2】この発明の他の実施例による光検知装置の構成
を示す概略図である。
FIG. 2 is a schematic diagram showing the structure of a photodetector according to another embodiment of the present invention.

【図3】従来の光ファイバ入力方式による光検知装置の
構成を示す概略図である。
FIG. 3 is a schematic diagram showing a configuration of a conventional optical detection device using an optical fiber input method.

【符号の説明】[Explanation of symbols]

1 LD 2 レーザ光 3 レンズ 4 光ファイバ 6 光検知器 8 CCD 1 LD 2 Laser light 3 Lens 4 Optical fiber 6 Photodetector 8 CCD

【手続補正書】[Procedure amendment]

【提出日】平成4年4月17日[Submission date] April 17, 1992

【手続補正1】[Procedure Amendment 1]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0010[Correction target item name] 0010

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【0010】次に動作について説明する。LD1から出
射されたレーザ光2aはレンズ3で集光される。集光さ
れたレーザ光2bは光検知器6の4つの光検知部6a,
6b,6c,6dで検知され、各々の光検知部より得ら
れる光起電力7a,7b,7c,7dによりモニタされ
る。このとき、7a=7b=7c=7dとなるように、
光検知器6をx,y方向に走査させて、光ファイバ4と
レーザ光2bの光軸を合わせ、さらにz方向に走査させ
て光ファイバ4へのレーザ光2bの入力が最となる焦
点5に合わせるようにしてアライメントする。
Next, the operation will be described. The laser light 2 a emitted from the LD 1 is condensed by the lens 3. The focused laser beam 2b is supplied to the four photo detectors 6a of the photo detector 6,
6b, 6c and 6d are detected and monitored by the photoelectromotive force 7a, 7b, 7c and 7d obtained from each photodetector. At this time, so that 7a = 7b = 7c = 7d,
The optical detector 6 x, by scanning in the y-direction, combined optical axis of the optical fiber 4 and the laser beam 2b, by further scanning in the z-direction input of the laser beam 2b in the optical fiber 4 becomes maximum focal Align as in 5.

【手続補正2】[Procedure Amendment 2]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0015[Correction target item name] 0015

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【0015】次に本発明の第2の実施例について説明す
る。本実施例では光検知器6に代えてCCD8を用いた
ものである。すなわち図2に示すようにCCD8の中心
を貫通させて光ファイバ4を配置し、CCD8の図示し
ない各出力端子の起電力をモニターして、x及びy方向
で、光強度の最大となる位置を検出し、その位置に光フ
ァイバ4を移動させることで、光ファイバ4にレーザ光
2bの光軸を合わせる。このように構成することで、上
記実施例と同様の効果を得ることが可能で、かつFFP
特性の測定もできる。
Next, a second embodiment of the present invention will be described. In this embodiment, a CCD 8 is used instead of the photodetector 6. That is, as shown in FIG. 2, the optical fiber 4 is arranged so as to penetrate the center of the CCD 8 and the electromotive force of each output terminal (not shown) of the CCD 8 is monitored to determine the x and y directions.
Then, the position where the light intensity is maximum is detected, and the optical fiber 4 is moved to that position, so that the optical axis of the laser beam 2b is aligned with the optical fiber 4. With this configuration, it is possible to obtain the same effect as that of the above-described embodiment , and the FFP
It is also possible to measure the characteristics .

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 光源からの出射光の光軸に光ファイバを
合致させて出射光を導入し、光検知を行う光検知装置に
おいて、 複数の受光領域を有する光電変換部と、 該光電変換部を貫通して固定された光ファイバとを備
え、 上記光電変換部の各受光領域における光起電力に基づい
て上記光ファイバを移動させ、該光ファイバに上記出射
光の光軸を合致させるようにしたことを特徴とする光検
知装置。
1. A photoelectric conversion unit having a plurality of light receiving regions in a light detection device for detecting light by introducing an emitted light by matching an optical fiber with an optical axis of the emitted light from a light source, and the photoelectric conversion unit. And an optical fiber fixed through the optical fiber, and the optical fiber is moved based on the photoelectromotive force in each light receiving region of the photoelectric conversion unit so that the optical axis of the emitted light is aligned with the optical fiber. An optical detection device characterized by the above.
JP3237316A 1991-08-22 1991-08-22 Light detection device Expired - Fee Related JP2773998B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3237316A JP2773998B2 (en) 1991-08-22 1991-08-22 Light detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3237316A JP2773998B2 (en) 1991-08-22 1991-08-22 Light detection device

Publications (2)

Publication Number Publication Date
JPH0552702A true JPH0552702A (en) 1993-03-02
JP2773998B2 JP2773998B2 (en) 1998-07-09

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JP3237316A Expired - Fee Related JP2773998B2 (en) 1991-08-22 1991-08-22 Light detection device

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8026439B2 (en) 2009-11-20 2011-09-27 International Business Machines Corporation Solar concentration system
US8490619B2 (en) * 2009-11-20 2013-07-23 International Business Machines Corporation Solar energy alignment and collection system

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112197712B (en) * 2020-09-30 2021-12-07 中国科学院长春光学精密机械与物理研究所 Beam waist radius measuring method and system based on Z scanning

Citations (3)

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Publication number Priority date Publication date Assignee Title
JPS5694943U (en) * 1979-12-24 1981-07-28
JPH02203307A (en) * 1989-01-31 1990-08-13 Ando Electric Co Ltd Mechanism for aligning optical axes of light emitting element and optical fiber
JPH0377903A (en) * 1989-08-21 1991-04-03 Fujio Aramaki Method and device for condensing sunlight

Patent Citations (3)

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Publication number Priority date Publication date Assignee Title
JPS5694943U (en) * 1979-12-24 1981-07-28
JPH02203307A (en) * 1989-01-31 1990-08-13 Ando Electric Co Ltd Mechanism for aligning optical axes of light emitting element and optical fiber
JPH0377903A (en) * 1989-08-21 1991-04-03 Fujio Aramaki Method and device for condensing sunlight

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8026439B2 (en) 2009-11-20 2011-09-27 International Business Machines Corporation Solar concentration system
US8490619B2 (en) * 2009-11-20 2013-07-23 International Business Machines Corporation Solar energy alignment and collection system
US8569616B2 (en) 2009-11-20 2013-10-29 International Business Machines Corporation Method of concetrating solar energy

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