JPH0547732U - Fan / filter unit - Google Patents

Abstract

(57) [Summary] (Correction) [Purpose] To provide a quiet fan / filter unit that suppresses the increase in size of the entire unit as much as possible and that produces low noise. A horizontal partition wall 23 is provided in a casing 11 having a suction wall 21 on a top wall and a blowout wall 22 on a bottom wall, and an upper blowing chamber 24 and a lower blowing chamber 25 are formed above and below the horizontal partition wall 23. Centrifugal fan 12 with its upward impeller 31 suction port
It is arranged so as to face 21 and to be positioned in the upper part of the upper blowing chamber 24. The filter 13 is arranged so that the plenum chamber 41 is formed in the upper portion of the lower blowing chamber 25.
Place it in the lower part. The casing 11 is formed in a rectangular shape having a long side longer than the outer diameter of the impeller 31 when viewed from above. The partition wall (23) is formed with a pair of communication ports (42) opened at positions outside the impeller (31) when viewed from above. Upper blowing chamber
Inside the 24, insert the impeller 31 from both sides and the communication port on the same side
A pair of vertical cross-section generally inverted L-shaped wind passages extending up to 42
Forming 45.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a fan / filter unit used in a clean room of a semiconductor factory or a food factory.

[0002]

[Prior Art]

 As shown in FIG. 4, a fan / filter unit of this type has a horizontal partition wall 64 provided in a casing 63 having a suction port 61 on a top wall and a blowout port 62 on a bottom wall. An upper blow-out chamber 65 and a lower blow-out chamber 66 are formed above and below it, a centrifugal fan 67 is arranged so that its impeller 68 is located above the upper blow-out chamber 65, and a filter 69 is arranged in the lower blow-out chamber 66. The partition wall 64 is made of punching metal with a constant opening ratio, and is formed as a communicating hole 72. The partition wall 64 is formed in the lower part of the lower blowing chamber 66 so as to form a plenum chamber 71 in the inner upper part. Things are known.

[0003]

[Problems to be solved by the device]

 The fan / filter unit attempts to equalize the flow by allowing the air to pass through the communication holes 72. If it is too fast, it will be difficult to make it uniform, and noise will be generated due to the generation of eddy currents and vibration of the partition wall 64. The size of the plenum chamber 71 may be increased to make the size uniform, but this is not preferable because the size of the casing 63 becomes large and the unit becomes bulky.

An object of the present invention is to provide a quiet fan / filter unit that suppresses the increase in size of the entire unit as much as possible and that produces less noise.

[0005]

[Means for Solving the Problems]

 In the fan / filter unit according to the present invention, a horizontal partition wall is provided in a casing having a suction port on a top wall and a blowout port on a bottom wall, and an upper blow chamber and a lower blow chamber are formed above and below the horizontal partition wall. The centrifugal fan is arranged so that its upward impeller faces the suction port and is located in the upper part of the upper blow chamber, and the filter is formed in the lower part of the lower blow chamber so as to form a plenum chamber in the upper part of the lower blow chamber. In the fan / filter unit that is placed in the, the casing is formed into a rectangle with a long side that is longer than the outer diameter of the impeller when viewed from the plane, and the casing is located outside the impeller when viewed from the top. A pair of communication ports that open at the position are formed, and a pair of vertical ports that extend from both sides of the impeller to the communication ports on the same side are inserted in the upper blow chamber. It is characterized in that Menryakugyaku L-shaped air passage is formed.

[0006]

[Action]

 In the fan / filter unit according to the present invention, the casing is formed in a rectangular shape having a long side longer than the outer diameter of the impeller when viewed from the plane, and the casing is provided on the partition wall at positions respectively outside the vane wheel when viewed from the plane. A pair of open communication ports are formed, and a pair of vertical cross-section L-shaped air passages extending from both sides of the impeller to the communication ports on the same side are formed in the upper outlet chamber. , The wind sent out from the impeller is guided to the communication port through the air passage and is opened to the plenum chamber from the communication port, but the wind flow in the air passage is unidirectional, so turbulence is involved. It is not smooth.

[0007]

【Example】

 An embodiment of this invention will be described below with reference to FIGS.

The fan / filter unit includes a casing 11, a centrifugal fan 12 and a filter 13 housed in the casing 11.

The casing 11 has a rectangular shape in which a short side extends in the front-rear direction and a long side extends in the left-right direction when viewed in a plan view. Double the length of the short side is approximately equal to the length of the long side. At the center of the top wall of the casing 11, a circular suction port 21 having a length substantially equal to the length of the short side of the casing 11 is provided. The bottom wall of the casing 11 is almost entirely opened to serve as an outlet 22. A horizontal partition wall 23 is provided in the casing 11, and an upper blowing chamber 24 and a lower blowing chamber 25 are formed above and below the horizontal partition wall 23.

The fan 12 includes an upward impeller 31 and a motor 32. The impeller 31 is located in the upper part of the upper blow-out chamber 24 with its upper suction side facing the suction port 21. The motor 32 is attached via a bracket 34 to a cross member 33 that is attached to the front and rear side walls of the casing 11.

The filter 13 is a plate-like member having a thickness of about two-thirds of the height of the lower blowing chamber 25 and a peripheral surface that substantially matches the inner surface of the casing 11. A plenum chamber 41 is formed in the upper part of the lower part of the lower outlet chamber 25 so as to cover the entire outlet 22.

A pair of communication ports 42 are provided near the left and right ends of the partition wall 23 over substantially the entire length of the partition wall 23 in the left-right direction. A pair of air passage forming plates 43 and 44, which are paired inside and outside, are provided on the left and right sides of the impeller 31 in the lower blowing chamber 25, whereby the impeller 31 is inserted into the upper blowing chamber 25. Therefore, a pair of air passages 45 that are curved in a substantially inverted L-shape in vertical section and extend from both sides to the communication port 42 on the same side are formed. That is, the inner and outer air passage forming plates 43 and 44 are both formed of punching metal in a vertical L-shaped cross section, and face each other across the air passage 45 and are formed on the inner and outer walls of the casing 11. It is arranged to straddle. Specifically, the inner passage forming plate 43 extends from the lower end level of the impeller 31 to the inner edge of the communication port 42, and the outer passage forming plate 44 extends from the upper end level of the impeller 31 to the outer edge of the communication port 42. Further, a drooping wind shield plate 46 is integrally provided on the inner edge of the inner passage forming plate 43.

A sound absorbing material 47 is packed between the inner passage forming plate 43 and the partition wall 23 facing the inner passage forming plate 43, and between the outer passage forming plate 44 and the top wall and the side wall of the casing 11 facing the outer passage forming plate 44. Packed with sound absorbing material 48. Further, a sound absorbing material 49 is laid on the partition wall 23 below the impeller 31.

Further, right below the communication port 42, horizontal punching metal straightening plates 51 are arranged so as to cover the upper surface of the filter 13 near the left and right ends.

The wind sucked into the casing 11 from the suction port 21 by the drive of the fan 12 is discharged from the impeller 31 in the radial direction thereof, but since there is no place in the front-back direction of the impeller 31, Most of the wind is split into the left and right air passages 45, introduced, guided to the communication port 42 in the air passage 45, and opened to the plenum chamber 41 from the communication port 42. When the wind flows in the wind passage 45, the noise accompanying the flow is absorbed by the sound absorbing materials 47 and 48 and attenuated. Also, because the wind passage 45 is curved and relatively long (compared to, for example, a straight wind passage formed in a casing of the same size), the same damping action is effectively performed and the wind passage 45 Since the flow inside is unidirectional, the wind flows smoothly without turbulence. Then, the wind that has flowed into the plenum chamber 41 collides with the straightening vanes 51, a part of which passes through the straightening vanes 51 and is passed through the filter 13 as it is, but the rest of the wind has a flow direction inward. It is turned to pass through the portion of the filter 13 that is not covered with the flow straightening plate 51. As a result, there is no risk that the wind will pass through the entire filter 13 and local variations in pressure and turbulence will occur.

[0016]

[Effect of the device]

 According to this invention, the wind sent out from the impeller is guided to the communication port through the air passage and is opened to the plenum chamber from the communication port, but the air flow in the air passage is unidirectional. Since it is smooth without turbulence, it is possible to provide a quiet fan / filter unit that suppresses the increase in size of the entire unit as much as possible and that produces less noise.

[Brief description of drawings]

FIG. 1 is a vertical vertical sectional view of a fan filter unit according to the present invention.

FIG. 2 is a vertical cross-sectional view of the fan / filter unit.

FIG. 3 is a plan view including a crushed cross section of the fan / filter unit.

FIG. 4 is a vertical longitudinal sectional view of a conventional fan filter unit.

[Explanation of symbols]

 11 Casing 12 Fan 13 Filter 21 Suction port 22 Outlet 23 Partition wall 24 Upper outlet chamber 25 Lower outlet chamber 31 Impeller 41 Plenum chamber 42 Communication port 45 Air passage

Claims (1)

[Scope of utility model registration request] 1. A horizontal partition wall 23 is provided in a casing 11 having a suction port 21 on a top wall and a blowout port 22 on a bottom wall, and an upper blow chamber 24 and a lower blow chamber are provided above and below the horizontal partition wall 23.
25 is formed, the centrifugal fan 12 has its upward impeller 31
Is arranged so as to face the suction port 21 and is positioned in the upper part of the upper blowing chamber 24.
In the fan / filter unit arranged in the lower inner part of the lower outlet chamber 25 so as to form the plenum chamber 41 in the inner upper part, the casing 11 is formed into a rectangular shape having a long side longer than the outer diameter of the impeller 31 when viewed from above. The partition wall 23 is formed with a pair of communication ports 42 that are open at positions outside the impeller 31 when viewed from the top, and the impeller 31 is sandwiched in the upper blowing chamber 24 from both sides thereof. A fan / filter unit, characterized in that a pair of air passages 45 each having a substantially inverted L-shaped vertical cross section extending to the side communication port 42 are formed.