JPH05312900A - Positioning device for test head - Google Patents

Abstract

PURPOSE:To make small a pad on a DUT board to be brought into contact with a probe so as to cope with increase in the number of probes by increasing the positioning accuracy of the DUT board onto a test board. CONSTITUTION:A positioning member 2 is provided on a DUT board mounting part of a test head. This member 2 has block receiving parts 3A, 3B into which a terminal block 6 of a pin board 5 is fitted and has a positioning pin to which a DUT board 10 is fitted. With such a constitution, the positioning between the DUT board 10 and the probe 7 of the terminal block 6, and thereby no influence is given to the accuracy, assembling condition of other components of the test head.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a test system and a device under test (DU) for testing semiconductor devices and the like.
The present invention relates to a positioning device for a DUT board with respect to a test head which is an interface with T).

[0002]

2. Description of the Related Art A large number of pin boards equipped with contact probes are mounted on a test head, and the contact probes make contact with a DUT board equipped with a DUT. That is, by connecting the conductive pad formed on the DUT board to the tip of the contact probe, the connection between the DUT and the test head is realized. In this case, the contact probe and the conductive pad are sufficiently positioned. There is a need.

In a conventional test head, as shown in FIG. 11, a pinboard 22 is fixed to a cylindrical cylinder 21 fixed to a test head housing 20, and the housing 20 is fixed.
The positioning pin 2 is attached to the upper cover 23 attached to the upper surface.
4 is provided. On the other hand, the DUT board 10 is mounted on the DUT board adapter 25 and mounted on the test head.
a is formed and is fitted to the positioning pin 24, thereby realizing the positioning between the contact probe and the DUT board.

[0004]

In the above conventional structure, the positional accuracy of the contact probe (commonly known as pogo pin) tip and the conductive pad is affected by the design dimensional error and the assembly dimensional error of each of the above parts, It will be determined by the dimensional error. Therefore, in the past, sufficient positional accuracy could not be obtained, and this was dealt with by increasing the diameter of the conductive pad. However, due to the increase in the number of contact probe pins accompanying the recent increase in density of LSIs, the distance between the pins of each contact probe has become narrower, and it has become necessary to reduce the diameter of the conductive pad. On the other hand, when testing a semiconductor device, it is necessary to give a high-frequency analog signal or a digital signal depending on the application of the device, so that the pinboard probe arrangement and the number are different ( It was necessary to set the type of probe in advance according to the purpose according to its purpose (for single wire or coaxial wire, etc.), or to attach and install more than necessary various kinds of probes in advance in order to make them compatible.

The present invention has been made to solve the above-mentioned conventional problems, and provides a test head capable of increasing the mounting position accuracy of the DUT board with respect to the test head and coping with the increase in the pin count of the contact probe. It is an object. Another object of the present invention is to provide a test head that facilitates probe replacement with a simple structure and facilitates appropriate probe attachment depending on the intended use of the semiconductor device to be measured. I am trying.

[0006]

In order to achieve the above object, a positioning device for a test head according to the present invention is (a)
A positioning member for receiving the DUT board is fixed to the DUT board mounting portion of the test head, and (b) the positioning member is fitted with the terminal block connected to the pin board, and the contact probe is attached to the DUT board mounting surface side. (C) The positioning member has a positioning pin protruding from the mounting surface side of the DUT board.
(D) It is characterized in that a fitting hole for fitting the positioning pin is formed at a position corresponding to the positioning pin on the DUT board side.

In this case, (a) the terminal block has a guide protrusion along the insertion direction into the block receiving portion, and the block receiving portion has a guide groove that engages with the guide protrusion. (B) The terminal block may have an engaging piece that elastically engages with the block receiving portion, and may be detachably engaged with the block receiving portion.

[0008]

An embodiment of the present invention will be described in detail below with reference to the drawings. 1 to 4 relate to one embodiment of the present invention, FIG. 1 is a perspective view showing a positioning device according to the present invention, and FIGS. 2A to 2C are plan views, side views and cross-sections taken along the line AA of the positioning member. 3 and 4 are enlarged perspective views of the main parts showing the engagement structure of the positioning member and the terminal block, and FIG. 4 is an exploded perspective view of the test head.

As shown in the above figures, in this embodiment, the DUT board mounting portion of the test head 1 is provided with a rectangular frame-shaped positioning member 2 having a size corresponding to the DUT board 10. The positioning member 2 is provided for positioning and supporting a large number of pin boards 5 mounted on the test head 1 and has a large number of block receiving portions 3A and 3B for supporting the terminal blocks 6. The terminal block 6 positioned by the positioning member 2 has a large number of probes 7 protruding from the upper surface thereof. The probe 7 is supported by a spring in a retractable manner as in the conventional configuration. DUT
The board 10 is removably mounted on the positioning member 2, and the pad on the back side thereof is brought into contact with the probe 7 to
Enables measurement of UT.

Cylindrical holes 3 are formed at the four corners of the positioning member 2, and cam mechanisms 12 are provided therein. As shown in FIG. 1, the cam mechanism is connected via a timing belt 8a and is rotated in synchronization with the power of an actuator 9 provided via the timing belt 8b. Then, the engaged portion of the rotated cam mechanism engages with the hole of the reinforcing plate 11 integrated with the DUT board 10, and D
The UT board 10 is fixed on the test head 1 in a pressed state.

The test head 1 is a main frame 1
An upper cover 1b having an opening for the mounting portion of the DUT board 10 is provided on the upper part of a, and a lower cover 1c is provided on the lower part. As shown in FIGS. 5 and 6, a large number of pinboards 5 are arranged and mounted in the main frame 1a which is divided into nine partitions by partition walls 1d, and the pinboards 5 are housed in the left and right partitions adjacent to the central partition. Is the terminal block 6
The UT board 10 is projected on the mounting part. That is, a part of each of these pinboards 5 is extended to form a terminal block mounting portion, and a terminal block 6 having a large number of probes 7 is mounted at the tip thereof. Explaining the ventilation structure of the test head 1, a large number of pinboards 5 are guided by the main frame 1a and the partition wall 1d on both sides thereof, and are held with an appropriate gap between adjacent pinboards 5. Many ventilation slits 1e are formed in the main frame 1a and each partition wall 1d. In FIG. 5, the central compartment and the compartment (space a) below it are made into a space, and the ventilation pipe 13 is connected to the outdoor side thereof. Ventilation tube 1
The air in the test head 1 is sucked in via 3 and the cooling air is supplied from the outside through each ventilation slit 1e,
It is discharged to the ventilation pipe 13 side along the arrow b through the pinboards 5. Such a ventilation path is advantageous not only in improving ventilation efficiency but also in reducing the overall thickness of the test head 1 as compared with the conventional vertical ventilation path. It also leads to improvement in sex (Figs. 7 to 10). Further, the space a makes it easier to attach and detach the connector 14 as compared with the conventional case.

Next, the positioning member 2 which is an essential part of the present invention will be described in detail. The positioning member 2 is molded by aluminum die casting or the like, and the DU of the test head 1 is
It is attached to the mounting portion of the T-board 10, and a flange portion 2a is formed on the inner peripheral side of the frame-shaped main body, and this is firmly fixed to the main frame 1a by eight screws. As described above, the positioning member 2 has the cam mechanisms 12 at its four corners, and has two types of block receiving portions 3A and 3B over almost the entire area.

The one block receiving portion 3A is composed of an elliptical hole penetrating from the upper side to the lower side. In the embodiment, eight block receiving portions 3A are formed on opposite sides of the positioning member 2, and each of them corresponds to the pin board 5 mounted on the test head 1. The block receiving portion 3A is for fitting the terminal block 6 attached to the pin board 5, receives the terminal block 6 from the lower side, and holds the probe 7 on the upper surface side in a protruding manner. As shown in FIG. 3, the other block receiving portion 3B is formed by a groove having an opening on the upper surface side and the side surface side, and is formed in a large number on the side adjacent to the side on which the block receiving portion 3A is formed. Unlike the terminal block 6 fitted in the block receiving portion 3A, the terminal block 15 fitted in the block receiving portion 3B is configured separately from the pin board 5.
It is connected to the pinboard 5 via the cable 16. Then, several types of pin arrangements (for coaxial line and single line, for example) are prepared.

The terminal block 15 is inserted into the block receiving portion 3B from the side, and has a guide projection 6b along the inserting direction and an engaging piece 6a extending forward at the tip side. Be done. On the other hand, the block receiving portion 3B has a guide groove 3 through which the guide protrusion 6b is inserted.
1 is formed and has an engaging edge 32 for receiving the engaging piece 6a. Therefore, the terminal block 15 is inserted into the block receiving portion 3B while being guided by the side wall and the guide groove 31, and when its front surface abuts on the engaging edge 32, the engaging piece 6a is elastically attached to the engaging edge 32. Engage. The thickness of the engaging edge 32 is substantially equal to the distance from the front surface of the terminal block 15 to the claw portion of the engaging piece 6a, and the positioning in the insertion direction is ensured in the engaged state of the terminal block 15. It. With such a configuration, the terminal block 15 can be easily attached / detached / replaced. In the embodiment, two types of block receiving portions 3B having different widths are used.
And the terminal block 15 is made by milling.

The terminal block 15 is installed in the required number by arbitrarily selecting the one for the coaxial line, the one for the single line, etc. according to the application of the DUT to be measured. A positioning pin 4 is further provided on the positioning member 2 so as to project from the mounting surface side of the DUT board 10. In the embodiment, two pieces are provided on the diagonal side of the positioning member 2. On the other hand, a frame-shaped reinforcing plate 11 is fixed to the DUT board 10 in order to satisfy its strength. A fitting hole 10a for inserting and fitting the positioning pin 4 is provided on the DUT board 10 side.
Has been drilled. Due to the relationship between the positioning pin 4 and the fitting hole 10a, the DUT board 10 is mounted on the positioning member 2 in a positioned state. When the cam mechanism 12 is operated to fix the DUT board 10, the pads 10b of the DUT board 10 come into contact with the probes 7 of the terminal blocks 6 and 15, and the connection is completed.

In the present embodiment, the present invention has been described by using the positioning member 2 having a rectangular frame shape, but the shape of the positioning member 2 is not limited to this, and various shapes such as circular shapes can be used. Can be used.

[0017]

As described above, according to the present invention,
The positioning error of the DUT board is not affected by the design error and assembly error of each component of the test head, and is due only to the accuracy of the positioning member, and the mounting position accuracy of the DUT board with respect to the test head can be improved. As a result, the pad area of the DUT board can be minimized and the number of pins of the contact probe can be increased. Further, according to the present invention, since the probe can be easily replaced with a simple structure, the probe can be removed / replaced or added at any time depending on the application of the semiconductor device to be measured. Various specifications such as coaxial, differential or Kelvin can be supported.

[Brief description of drawings]

FIG. 1 is a perspective view showing a positioning device according to an embodiment of the present invention.

2A is a plan view of the positioning member of FIG. 1. FIG.

2B is a side view of the positioning member of FIG. 1. FIG.

FIG. 2C is a sectional view taken along line AA of FIG. 2A.

FIG. 3 is an enlarged perspective view of an essential part showing an engaging structure of a positioning member and a terminal block.

FIG. 4 is an exploded perspective view of a test head.

FIG. 5 is a schematic plan view showing a cooling structure of a test head.

6 is a schematic side view of FIG.

FIG. 7 is a diagram showing a usage state of the test head.

FIG. 8 is a diagram showing a conventional test head in use.

FIG. 9 is a schematic plan view showing a cooling structure of a conventional test head.

10 is a schematic side view of FIG.

FIG. 11 is a perspective view of a conventional test head.

[Explanation of symbols]

 1: Test head 2: Positioning member 3: Block receiving portion 31: Guide groove 32: Engagement edge 4: Positioning pin 5: Pin board 6: Terminal block 6a: Engaging piece 6b: Guide protrusion 7: Probe 10: DUT board 10a: Fitting hole 10b: Pad 11: Reinforcing plate

Claims (2)

[Claims] 1. A large number of pin boards connected to a terminal block supporting a contact probe in a retractable manner are mounted, and pads of a DUT board to be mounted are brought into contact with the contact probe to enable DUT measurement. Positioning device for the test head, which has the following configuration. (A) Fix the positioning member that receives the DUT board to the DUT board mounting part of the test head. (B) The positioning member is fitted with the terminal block connected to the pin board and the contact probe is attached to the DUT.
It has a block receiving portion that projects toward the board mounting surface side. (C) In the positioning member, positioning pins are provided so as to project on the DUT board mounting surface side. (D) A fitting hole for fitting the positioning pin is formed at a position corresponding to the positioning pin on the DUT board side. 2. The test head positioning device according to claim 1, which has the following configuration. (A) The terminal block has a guide protrusion along the insertion direction into the block receiving portion, and the block receiving portion has a guide groove that engages with the guide protrusion. (B) The terminal block has an engaging piece that elastically engages with the block receiving portion, and is detachably engaged with the block receiving portion.