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JPH05203833A - Manufacturing equipment for optical waveguide components - Google Patents

Manufacturing equipment for optical waveguide components

Info

Publication number
JPH05203833A
JPH05203833A JP1225292A JP1225292A JPH05203833A JP H05203833 A JPH05203833 A JP H05203833A JP 1225292 A JP1225292 A JP 1225292A JP 1225292 A JP1225292 A JP 1225292A JP H05203833 A JPH05203833 A JP H05203833A
Authority
JP
Japan
Prior art keywords
holder
overlapping
light beam
optical
optical fiber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1225292A
Other languages
Japanese (ja)
Inventor
Shigeru Hirai
茂 平井
Shinji Ishikawa
真二 石川
Hiroshi Suganuma
寛 菅沼
Masahide Saito
眞秀 斎藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP1225292A priority Critical patent/JPH05203833A/en
Publication of JPH05203833A publication Critical patent/JPH05203833A/en
Pending legal-status Critical Current

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  • Optical Integrated Circuits (AREA)
  • Mechanical Coupling Of Light Guides (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

(57)【要約】 【目的】 光導波路型部品を構成する第1ホルダ、第2
ホルダ及び第3ホルダの重合部に隙間が生じたり、相対
位置がずれるのを防止する。 【構成】 光ファイバ7で光線を照射伝送する第1ホル
ダ4、導波路で光線を中継する第2ホルダ5及び光ファ
イバ7Aで光線を受光する第3ホルダ6を縦列に連接重
合して各重合部の重合面を光学系定盤9の上面に水平に
対向させる。また、最上位の第3ホルダ6を把持したア
ーム15を下降させて各重合部の重合面に加圧力を垂直
に強く作用させる。
(57) [Abstract] [Purpose] 1st holder, 2nd which constitutes an optical waveguide type component
A gap is prevented from being generated in the overlapping portion of the holder and the third holder, and the relative position is prevented from being displaced. A first holder 4 for irradiating and transmitting a light beam through an optical fiber 7, a second holder 5 for relaying the light beam through a waveguide, and a third holder 6 for receiving a light beam through an optical fiber 7A are concatenated and polymerized in series. The overlapping surface of the part is horizontally opposed to the upper surface of the optical system surface plate 9. Further, the arm 15 that holds the uppermost third holder 6 is lowered to exert a strong vertical force on the overlapping surface of each overlapping portion.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、光導波路のホルダと光
ファイバのホルダとをレーザ溶接して光導波路型部品を
製造する光導波路型部品の製造装置に関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical waveguide type component manufacturing apparatus for laser-welding an optical waveguide holder and an optical fiber holder to manufacture an optical waveguide type component.

【0002】[0002]

【従来の技術】近年、光通信や光情報処理などの技術分
野における技術の発達に伴い、単一モード伝送用光ファ
イバと、光結合回路や光分岐回路などを構成する光導波
路とを高い信頼性を持って実装することが切望されてい
る。周知の如く、単一モード伝送光ファイバのコア部の
径は数μm〜10μm程度なので、単一モード伝送用光
ファイバと上記光導波路とを接続する場合には、これら
の相対的な位置ずれを1μm程度以下に抑制して接続損
失の増加を防止する必要がある。
2. Description of the Related Art In recent years, with the development of technology in the technical fields of optical communication and optical information processing, optical fibers for single-mode transmission and optical waveguides forming optical coupling circuits and optical branch circuits are highly reliable. It is earnestly desired to implement it properly. As is well known, the diameter of the core portion of a single-mode transmission optical fiber is about several μm to 10 μm. Therefore, when connecting the single-mode transmission optical fiber and the above-mentioned optical waveguide, there is a relative positional deviation between them. It is necessary to suppress the thickness to about 1 μm or less to prevent an increase in connection loss.

【0003】図2は特開平3−35205号公報等に開
示された従来の光導波路型部品の製造装置を示すもの
で、所定の間隔をおいて水平に隣接対向する支台1,2
の間には、角棒形のコラム3が同位して垂直に介在立設
され、支台1には第1ホルダ4が、、コラム3の頂部に
は第2ホルダ5が、そして支台2には第3ホルダ6が、
それぞれ配置されている。
FIG. 2 shows a conventional optical waveguide type component manufacturing apparatus disclosed in Japanese Patent Laid-Open No. 3-35205, etc., in which abutments 1 and 2 horizontally adjacent to each other at a predetermined interval are provided.
Between them, square bar-shaped columns 3 are arranged vertically in parallel with each other, with a first holder 4 on the abutment 1, a second holder 5 on the top of the column 3, and an abutment 2 Has a third holder 6,
Each is arranged.

【0004】上記第1ホルダ4は、光ファイバ7が内部
に長手方向に挿着され、第2ホルダ5の端面に重合する
対向端面が研磨形成されており、光ファイバ7で図示し
ない光線を第2ホルダに照射伝送する機能を有してい
る。また、第2ホルダ5は、内部の長手方向に光線を伝
送する導波路が配設され、第1ホルダ4の端面と第3ホ
ルダ6の端面に重合する対向両端面がそれぞれ研磨形成
されており、第1ホルダ4から伝送されてきた光線を導
波路で中継して第3ホルダ6に伝送する機能を有してい
る。また、第3ホルダ6は、第1ホルダ4と同様に光フ
ァイバ7Aが内部の長手方向に挿着され、第2ホルダ5
の端面に重合する対向は端面が研磨形成されており、光
ファイバ7Aで第2ホルダ5から伝送されてきた光線を
受光して図示しない箇所に伝送する機能を有している。
The first holder 4 has an optical fiber 7 inserted therein in the longitudinal direction, and an opposite end face which overlaps with the end face of the second holder 5 is formed by polishing, so that the optical fiber 7 allows light rays not shown It has a function of transmitting irradiation to two holders. In addition, the second holder 5 is provided with a waveguide for transmitting light rays in the inner longitudinal direction, and the opposite end surfaces that overlap the end surface of the first holder 4 and the end surface of the third holder 6 are formed by polishing. , And has a function of relaying the light beam transmitted from the first holder 4 to the third holder 6 by relaying it through a waveguide. Further, in the third holder 6, as in the first holder 4, the optical fiber 7A is inserted in the inner longitudinal direction, and the second holder 5 is inserted.
The opposite end that overlaps with the end face has a polished end face, and has a function of receiving the light beam transmitted from the second holder 5 by the optical fiber 7A and transmitting it to a location not shown.

【0005】一方、上記コラム3の両側には、上下左右
方向に(矢印参照)に移動するレーザヘッド8がそれぞ
れ対向配置され、この一対のレーザヘッド8が同期して
移動しつつレーザ光(矢印参照)を照射することによ
り、第1ホルダ4、第2ホルダ5及び第3ホルダ6の各
重合部がレーザ溶接されるようになっている。
On the other hand, on both sides of the column 3, laser heads 8 which move vertically (see arrow) are opposed to each other, and the pair of laser heads 8 move in synchronization with each other to emit laser light (arrow). By irradiating each of the first holder 4, the second holder 5, and the third holder 6, the overlapping portion is laser-welded.

【0006】従って、第1ホルダ4、第2ホルダ及び第
3ホルダ6をレーザ溶接するには、所定の間隔をおいて
並んだ第1ホルダ4、第2ホルダ及び第3ホルダ6を横
列に連接重合し、第1ホルダ4から第2ホルダ5及び第
3ホルダ6に伝送される光線の受光量が第3ホルダ6で
最大になるように位置決めした後、一対のレーザヘッド
8で第1ホルダ4と第2ホルダ5の重合部をレーザ溶接
するとともに、第2ホルダ5と第3ホルダ6の重合部を
同様にレーザ溶接すればよい。
Therefore, in order to laser-weld the first holder 4, the second holder and the third holder 6, the first holder 4, the second holder and the third holder 6 arranged at a predetermined interval are connected in a row. After positioning so that the amount of light received by the third holder 6 that is overlapped and transmitted from the first holder 4 to the second holder 5 and the third holder 6 is maximized, the pair of laser heads 8 are used to position the first holder 4 Then, the overlapping portion of the second holder 5 may be laser-welded, and the overlapping portion of the second holder 5 and the third holder 6 may be similarly laser-welded.

【0007】[0007]

【発明が解決しようとする課題】従来の光導波路型部品
の製造装置は以上のように構成され、第2ホルダ5と光
線を受光する第3ホルダ6とを単に突き合わせて横列に
連接重合しているので、ホルダ形状の不完全やホルダを
固定保持する位置のばらつき等により、第2ホルダ5と
第3ホルダ6の重合部に図3に示す隙間が生じ易かっ
た。また、レーザ溶接に伴う照射部の熱膨張や表面張力
作用により、第1ホルダ4、第2ホルダ5及び第3ホル
ダ6の相対位置がずれてしまうという問題点があった。
このため、伝送光の損失が生じるという解決すべき課題
が生じていた。
The conventional apparatus for manufacturing an optical waveguide type component is constructed as described above, and the second holder 5 and the third holder 6 for receiving a light ray are simply butted and connected and polymerized in a row. Therefore, the gap shown in FIG. 3 is likely to be formed in the overlapping portion between the second holder 5 and the third holder 6 due to the imperfect shape of the holder or the variation in the position where the holder is fixed and held. Further, there is a problem that the relative positions of the first holder 4, the second holder 5, and the third holder 6 are displaced due to the thermal expansion and surface tension action of the irradiation portion associated with the laser welding.
Therefore, there is a problem to be solved that a loss of transmitted light occurs.

【0008】本発明は、上記に鑑みなされたもので、隙
間の発生や相対位置のずれに伴う接続損失を制御防止す
ることのできる光導波路型部品の製造装置を提供するこ
とを目的としている。
The present invention has been made in view of the above, and an object of the present invention is to provide an apparatus for manufacturing an optical waveguide type component capable of controlling and preventing connection loss due to generation of a gap and displacement of a relative position.

【0009】[0009]

【課題を解決するための手段】本発明においては、上述
の目的を達成するため、光学系定盤に動作可能に配設さ
れた自動ステージと、この自動ステージの保持用治具に
垂直に支持され光線を伝送する光ファイバを保持する第
1ホルダと、該保持用治具に垂直に支持されて第1ホル
ダの上端面に縦列に連接重合され、伝送されてくる光線
を中継する導波路を保持する第2ホルダと、この第2ホ
ルダの上端面に縦列に連接重合され光線を伝送する光フ
ァイバを保持する第3ホルダと、把持した該第3ホルダ
を第2ホルダの上端面に圧接する動作可能なアームと、
第1ホルダ、第2ホルダ及び第3ホルダの各重合部をレ
ーザ溶接するレーザヘッドとを備え、しかも該光学系定
盤の上面に該重合部の重合面を対向させることを特徴と
している。
According to the present invention, in order to achieve the above object, an automatic stage operably arranged on an optical system surface plate and a jig for holding the automatic stage are vertically supported. A first holder that holds an optical fiber that transmits a light beam, and a waveguide that is vertically supported by the holding jig and is continuously connected to the upper end surface of the first holder in a cascade connection to relay the transmitted light beam. A second holder for holding, a third holder for holding an optical fiber for transmitting light rays that is serially connected to the upper end surface of the second holder, and the held third holder is pressed against the upper end surface of the second holder. With an operable arm,
A laser head for laser-welding the overlapping portions of the first holder, the second holder, and the third holder is provided, and the overlapping surface of the overlapping portion faces the upper surface of the optical system surface plate.

【0010】[0010]

【作用】本発明によれば、第1ホルダ、第2ホルダ及び
第3ホルダを縦列に連接重合して各重合部の重合面を光
学系定盤の上面に水平に対向させ、しかも、最上位の第
3ホルダを把持したアームを下降させて各重合部の重合
面に加圧力を垂直に作用させるので、隙間の発生や相対
位置のずれに伴う光の接続損失を抑制防止することがで
きる。
According to the present invention, the first holder, the second holder, and the third holder are connected in series so as to overlap each other so that the overlapping surface of each overlapping portion is horizontally opposed to the upper surface of the optical system surface plate, and further Since the arm holding the third holder is lowered and the pressing force is vertically applied to the overlapping surface of each overlapping portion, it is possible to prevent the optical connection loss due to the generation of the gap and the shift of the relative position.

【0011】[0011]

【実施例】以下、図1に示す実施例に基づき本発明を詳
述すると、光学系定盤9には、自動ステージ10が動作
可能に配設され、この自動ステージ10には、保持用治
具11が垂直に立設されており、この保持用治具11に
は、縦列に連接重合した第1ホルダ4と第2ホルダ5と
が着脱自在に挟持されるようになっている。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail below based on the embodiment shown in FIG. 1. An optical system base 9 is provided with an automatic stage 10 so as to be operable. The tool 11 is vertically installed, and the holding jig 11 is configured such that the first holder 4 and the second holder 5 which are continuously connected in series in a column are detachably held.

【0012】上記自動ステージ10は、光学系定盤9の
上面に敷設された一対のガイドレール100と、この一
対のガイドレール100に案内されつつX方向(図1の
斜め左右方向)に摺動するX方向自動駆動ステージ10
1と、このX方向自動駆動ステージ101の上面に敷設
された一対のガイドレール102と、この一対のガイド
レール102に案内されつつY方向(図1の斜め上下方
向)に摺動するY方向自動駆動ステージ103と、この
Y方向自動駆動ステージ103上に回動可能に配設され
た平面略円板形の回転方向自動ステージ104とから積
層構成され、図示しないコントローラの制御に基づき摺
動又は回転する機能を有している。また、上記保持用治
具11は、略凹字形に構成され、回転方向自動ステージ
104に立設されている。
The automatic stage 10 slides in the X direction (obliquely left and right direction in FIG. 1) while being guided by the pair of guide rails 100 laid on the upper surface of the optical system surface plate 9. X-direction automatic drive stage 10
1, a pair of guide rails 102 laid on the upper surface of the X-direction automatic drive stage 101, and a Y-direction automatic sliding in the Y-direction (oblique vertical direction in FIG. 1) while being guided by the pair of guide rails 102. The driving stage 103 and a rotation direction automatic stage 104 having a substantially disk shape in plan view, which is rotatably disposed on the Y direction automatic driving stage 103, are laminated and are slid or rotated under the control of a controller (not shown). It has a function to do. Further, the holding jig 11 is formed in a substantially concave shape and is erected on the rotation direction automatic stage 104.

【0013】一方、上記光学系定盤9には、支柱12が
垂直に立設され、この支柱12の自動ステージ10側の
立面には、一対のガイドレール13が垂設されており、
この一対のガイドレール13には、昇降体14が上下方
向に摺動自在に嵌合されている。
On the other hand, a column 12 is erected vertically on the optical system surface plate 9, and a pair of guide rails 13 are vertically provided on an elevation surface of the column 12 on the side of the automatic stage 10.
An elevating body 14 is slidably fitted in the pair of guide rails 13 in the vertical direction.

【0014】上記昇降体14には、上下左右方向に微調
整移動するアーム15が水平に装着され、このアーム1
5の先端の把持部16には、第2ホルダ5の上端面に連
接重合する第3ホルダ6が着脱自在に把持されるように
なっている。また、昇降体14の下部には、ワイヤ17
を介して錘18が吊着されている。また、支柱12の側
部近傍には、昇降体14の下部にストッパ19aを係止
する停止機溝19が配設され、該ストッパ19aが昇降
体14の下部から外れることにより、昇降体14が一対
のガイドレール13に案内されつつ下降移動して、第2
ホルダ5の上端面に位置決め重合した第3ホルダ6が強
く圧接されるようになっている。
An arm 15 for fine adjustment movement in the vertical and horizontal directions is horizontally mounted on the elevating body 14, and the arm 1
The third holder 6, which is continuously superposed on the upper end surface of the second holder 5, is detachably held by the holding portion 16 at the tip of the fifth holder 5. In addition, a wire 17 is attached to the lower part of the lifting body 14.
A weight 18 is hung via the. In addition, a stopper groove 19 that locks a stopper 19a at the lower portion of the lifting body 14 is provided near the side of the column 12, and the stopper 19a is disengaged from the lower portion of the lifting body 14 so that the lifting body 14 moves. While being guided by the pair of guide rails 13 to move downward, the second
The third holder 6, which is positioned and superposed on the upper end surface of the holder 5, is strongly pressed.

【0015】他方、保持用治具11の上方の近傍には、
第1ホルダ4、第2ホルダ5及び第3ホルダ6を臨むよ
うに一対のレーザヘッド8が上下方向に移動可能に対向
配置され、この一対のレーザヘッド8が同期して移動し
つつレーザ光(矢印参照)を照射することにより、第1
ホルダ4、第2ホルダ5及び第3ホルダ6の各重合部が
水平横方向からレーザ溶接されるようになっている。
On the other hand, in the vicinity above the holding jig 11,
A pair of laser heads 8 are vertically movably opposed to each other so as to face the first holder 4, the second holder 5, and the third holder 6, and the laser light ( By irradiating (see arrow)
The overlapping portions of the holder 4, the second holder 5, and the third holder 6 are laser welded from the horizontal lateral direction.

【0016】従って、接続損失を防止しつつ第1ホルダ
4、第2ホルダ5及び第3ホルダ6をレーザ溶接するに
は、保持用治具11の開口上部に、縦列に連接重合した
第1ホルダ4及び第2ホルダ5を挟持させるとともに、
アームの把持部16に第3ホルダ6を把持させ、第2ホ
ルダ5の上端面に第3ホルダ6を縦に連接重合した後コ
ントローラを動作させる。すると、コントローラの制御
に基づき、自動ステージ10のX方向自動駆動ステージ
101、Y方向自動駆動ステージ103、又は回転方向
自動ステージ104が摺動又は回転するとともに、アー
ム15が上下左右方向に微調整移動し、最下位の第1ホ
ルダ4側の光ファイバ7から第2ホルダ5の導波路を経
由して最上位の第3ホルダ6の光ファイバ7Aに伝送さ
れる光の受光量が、第3ホルダ6側の光ファイバ7aで
最大になるように第1ホルダ4、第2ホルダ5及び第3
ホルダ6が位置決めされる。
Therefore, in order to prevent the connection loss and to laser-weld the first holder 4, the second holder 5, and the third holder 6, the first holders which are serially connected and polymerized in cascade are formed on the upper opening of the holding jig 11. 4 and the second holder 5 are sandwiched,
After the third holder 6 is held by the holding portion 16 of the arm and the third holder 6 is vertically connected and superposed on the upper end surface of the second holder 5, the controller is operated. Then, under the control of the controller, the X-direction automatic drive stage 101, the Y-direction automatic drive stage 103, or the rotation-direction automatic stage 104 of the automatic stage 10 slides or rotates, and the arm 15 moves finely in the vertical and horizontal directions. Then, the amount of light received from the optical fiber 7 of the lowermost first holder 4 to the optical fiber 7A of the uppermost third holder 6 via the waveguide of the second holder 5 is the third holder. The first holder 4, the second holder 5, the third holder 3
The holder 6 is positioned.

【0017】第1ホルダ4、第2ホルダ5及び第3ホル
ダ6が位置決めされると、停止機構19のストッパ19
aが昇降体14の下部から外れ、昇降体14が錘18の
自重で一対のガイドレール13に案内されつつ下降移動
し、アーム15が下降して第2ホルダ5の上端面に位置
決めされた第3ホルダ6を強く圧下・圧接する。そし
て、自動ステージ10及びアーム15が再び動作して第
1ホルダ4、第2ホルダ5及び第3ホルダ6を最終的に
位置決め調整する。
When the first holder 4, the second holder 5 and the third holder 6 are positioned, the stopper 19 of the stop mechanism 19 is positioned.
a is disengaged from the lower portion of the lifting body 14, the lifting body 14 is moved downward while being guided by the pair of guide rails 13 by the weight of the weight 18, and the arm 15 is lowered to be positioned on the upper end surface of the second holder 5. 3 Press down the holder 6 strongly. Then, the automatic stage 10 and the arm 15 operate again to finally adjust the positioning of the first holder 4, the second holder 5, and the third holder 6.

【0018】然して、第1ホルダ4、第2ホルダ5及び
第3ホルダ6の位置決めが最終的に完了すると、一対の
レーザーヘッド8が第1ホルダ4と第2ホルダ5の重合
部を水平横方向からレーザ溶接するとともに、第2ホル
ダ5と第3ホルダ6の重合部を同様にレーザ溶接する。
However, when the positioning of the first holder 4, the second holder 5 and the third holder 6 is finally completed, the pair of laser heads 8 horizontally crosses the overlapping portion of the first holder 4 and the second holder 5. The laser welding is performed from the above, and the overlapping portions of the second holder 5 and the third holder 6 are similarly laser welded.

【0019】上記構成によれば、第1ホルダ4、第2ホ
ルダ5及び第3ホルダ6を縦列に連接重合して各重合部
の重合面を光学系定盤9の上面に水平対向させるととも
に、第1ホルダ4、第2ホルダ5及び第3ホルダ6の各
重合面に加圧力を垂直に作用させて密着度を増大させる
ので、第2ホルダ5と第3ホルダ6の重合部に隙間が発
生するのを確実に排除して光の接続損失を抑制防止する
ことができる。また、レーザ溶接にともなう照射部の熱
膨張や表面張力作用が第1ホルダ4、第2ホルダ5及び
第3ホルダ6の垂直方向に作用する加重で抑制防止され
るので、第1ホルダ4、、第2ホルダ5及び第3ホルダ
6の相対位置のずれを確実に防止することが可能とな
る。
According to the above construction, the first holder 4, the second holder 5, and the third holder 6 are connected in series in a cascade manner so that the overlapping surface of each overlapping portion is horizontally opposed to the upper surface of the optical system surface plate 9. Since pressure is applied vertically to each overlapping surface of the first holder 4, the second holder 5, and the third holder 6 to increase the degree of adhesion, a gap is generated between the overlapping portions of the second holder 5 and the third holder 6. It is possible to reliably eliminate the above-mentioned problem and prevent the optical connection loss from being suppressed. Further, the thermal expansion and the surface tension action of the irradiation part due to the laser welding are prevented from being suppressed by the weight acting on the first holder 4, the second holder 5, and the third holder 6 in the vertical direction. It is possible to reliably prevent the relative positions of the second holder 5 and the third holder 6 from being displaced.

【0020】なお、上記実施例では最下位に第1ホルダ
4を、、最上位に第3ホルダ6を配置したものを示した
が、上下逆に配置しても良いのは言うまでもない。
In the above embodiment, the first holder 4 is arranged at the lowest position and the third holder 6 is arranged at the highest position, but it goes without saying that they may be arranged upside down.

【0021】[0021]

【発明の効果】以上のように本発明によれば、第1ホル
ダ、第2ホルダ及び第3ホルダを縦列に連接重合して各
重合部の重合面を光学系定盤の上面に水平に対向させ、
しかも、第3ホルダを把持したアームを下降させて各重
合部の重合面に加圧力を垂直に強く作用させるので、隙
間の発生や相対位置のずれに伴う接続損失を大幅に抑制
防止することができるという顕著な効果がある。
As described above, according to the present invention, the first holder, the second holder and the third holder are concatenated and polymerized in tandem so that the overlapping surface of each overlapping portion is horizontally opposed to the upper surface of the optical system surface plate. Let
Moreover, since the arm holding the third holder is lowered and the pressing force is strongly exerted vertically on the overlapping surface of each overlapping portion, it is possible to significantly suppress and prevent the connection loss due to the generation of the gap and the displacement of the relative position. There is a remarkable effect that it can be done.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係る光導波路型部品の製造装置の一実
施例を示す全体斜視図である。
FIG. 1 is an overall perspective view showing an embodiment of an optical waveguide type component manufacturing apparatus according to the present invention.

【図2】従来における光導波路型部品の製造装置を示す
要部斜視図である。
FIG. 2 is a perspective view of an essential part showing a conventional optical waveguide type component manufacturing apparatus.

【図3】従来における光導波路型部品の製造装置の第2
ホルダと第3ホルダの重合部に隙間が生じた不良状態を
示す斜視図である。
FIG. 3 is a second conventional manufacturing apparatus for an optical waveguide type component.
FIG. 9 is a perspective view showing a defective state in which a gap is formed between the holder and the overlapping portion of the third holder.

【符号の説明】[Explanation of symbols]

4…第1ホルダ、5…第2ホルダ、6…第3ホルダ、7
…光ファイバ、7A…光ファイバ、8…レーザヘッド、
9…光学系定盤、10…自動ステージ、11…保持用治
具、15…アーム。
4 ... 1st holder, 5 ... 2nd holder, 6 ... 3rd holder, 7
... optical fiber, 7A ... optical fiber, 8 ... laser head,
9 ... Optical surface plate, 10 ... Motorized stage, 11 ... Holding jig, 15 ... Arm.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 斎藤 眞秀 神奈川県横浜市栄区田谷町1番地 住友電 気工業株式会社横浜製作所内 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Masahide Saito 1 Taya-cho, Sakae-ku, Yokohama-shi, Kanagawa Sumitomo Electric Industries, Ltd. Yokohama Works

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 光学系定盤に動作可能に配置された自動
ステージと、この自動ステージの保持用治具に垂直に支
持され光線を伝送する光ファイバを保持する第1ホルダ
と、該保持用治具に垂直に支持されて第1ホルダの上端
面に縦列に連接重合され、伝送されてくる光線を中継す
る導波路を保持する第2ホルダと、この第2ホルダの上
端面に縦列に連接重合され光線を伝送する光ファイバを
保持する第3ホルダと、把持した該第3ホルダを第2ホ
ルダの上端面に圧接する動作可能なアームと、前記第1
ホルダ、第2ホルダ及び第3ホルダの各重合部をレーザ
溶接するレーザヘッドとを備え、該光学系定盤の上面に
該重合部の重合面を対向させることを特徴とする光導波
路型部品の製造装置。
1. An automatic stage operably arranged on an optical system surface plate, a first holder vertically supported by a jig for holding the automatic stage and holding an optical fiber for transmitting a light beam, and the holding unit. A second holder that is vertically supported by a jig and is connected in series to the upper end surface of the first holder in a column to hold a waveguide that relays the transmitted light beam, and is connected in parallel to the upper end surface of the second holder in a column. A third holder that holds an optical fiber that is overlapped and transmits a light beam, an operable arm that presses the gripped third holder against the upper end surface of the second holder, and the first holder
And a laser head for laser-welding each overlapping portion of the holder, the second holder, and the third holder, wherein the overlapping surface of the overlapping portion faces the upper surface of the optical system surface plate. Manufacturing equipment.
JP1225292A 1992-01-27 1992-01-27 Manufacturing equipment for optical waveguide components Pending JPH05203833A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1225292A JPH05203833A (en) 1992-01-27 1992-01-27 Manufacturing equipment for optical waveguide components

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1225292A JPH05203833A (en) 1992-01-27 1992-01-27 Manufacturing equipment for optical waveguide components

Publications (1)

Publication Number Publication Date
JPH05203833A true JPH05203833A (en) 1993-08-13

Family

ID=11800176

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1225292A Pending JPH05203833A (en) 1992-01-27 1992-01-27 Manufacturing equipment for optical waveguide components

Country Status (1)

Country Link
JP (1) JPH05203833A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08201650A (en) * 1995-01-27 1996-08-09 Ngk Insulators Ltd Device for adjusting parallelism of end surface of optical substrate
EP1067417A1 (en) * 1999-04-26 2001-01-10 Corning Incorporated Automated Optical Chip Holder in a Pigtailing System

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08201650A (en) * 1995-01-27 1996-08-09 Ngk Insulators Ltd Device for adjusting parallelism of end surface of optical substrate
EP1067417A1 (en) * 1999-04-26 2001-01-10 Corning Incorporated Automated Optical Chip Holder in a Pigtailing System

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