JPH05196038A - Magnetic bearing device - Google Patents
Magnetic bearing deviceInfo
- Publication number
- JPH05196038A JPH05196038A JP4028843A JP2884392A JPH05196038A JP H05196038 A JPH05196038 A JP H05196038A JP 4028843 A JP4028843 A JP 4028843A JP 2884392 A JP2884392 A JP 2884392A JP H05196038 A JPH05196038 A JP H05196038A
- Authority
- JP
- Japan
- Prior art keywords
- coil
- bearing device
- yoke
- magnetic
- magnetic bearing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000013016 damping Methods 0.000 claims description 3
- 238000005339 levitation Methods 0.000 abstract description 14
- 238000006073 displacement reaction Methods 0.000 description 8
- 239000003990 capacitor Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0459—Details of the magnetic circuit
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明はターボ機械や工作機械等
に用いられる磁気軸受装置に係り、より詳細には、被支
持体に磁性材料製のターゲットを取付け、ケーシングに
取付けられたヨークにコイルを巻いた電磁石固定子を備
え、被支持体ターゲットと電磁石固定子との間隙を任意
の一定間隔とするようにし、被支持体と電磁石固定子間
の相対変位を測定する変位センサを設け、その変位セン
サからの出力信号に基づいてコイルに電流を流し、被支
持体ターゲットと電磁石固定子間に磁気吸引力を作用さ
せ、被支持体を目標位置に非接触で支承する磁気軸受装
置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic bearing device used in a turbo machine, a machine tool or the like, and more particularly, a target made of a magnetic material is attached to a supported body, and a coil is attached to a yoke attached to a casing. Equipped with an electromagnet stator, the gap between the supported target and the electromagnet stator is set to an arbitrary constant distance, and a displacement sensor for measuring the relative displacement between the supported body and the electromagnet stator is provided. The present invention relates to a magnetic bearing device that applies a current to a coil based on an output signal from a displacement sensor to apply a magnetic attraction force between a supported target and an electromagnet stator to support the supported target at a target position in a non-contact manner.
【０００２】[0002]
【従来の技術】図２は従来の磁気軸受装置を示すもので
ある。図２において、ケーシング１３には励磁コイル２
が巻回されたヨーク１を具備する電磁石固定子１１が固
定されている。一方、被支持体１２にはターゲット５が
固着されている。そして、被支持体１２に隣接して変位
センサ６が配設されており、７はセンサアンプである。
安定浮上用制御回路８と電力増幅器９によって、センサ
アンプ７からの出力信号と目標値との差分の信号に基づ
いてコイル２に電流を流し、被支持体１２のターゲット
５と電磁石固定子１１間に磁気吸引力を作用させるよう
に構成されている。2. Description of the Related Art FIG. 2 shows a conventional magnetic bearing device. In FIG. 2, the casing 13 has an exciting coil 2
An electromagnet stator 11 having a yoke 1 wound around is fixed. On the other hand, the target 5 is fixed to the supported body 12. The displacement sensor 6 is disposed adjacent to the supported body 12, and 7 is a sensor amplifier.
By the control circuit 8 for stable levitation and the power amplifier 9, a current is caused to flow through the coil 2 based on the signal of the difference between the output signal from the sensor amplifier 7 and the target value, and the target 5 of the supported body 12 and the electromagnet stator 11 are connected. It is configured to exert a magnetic attraction force on.
【０００３】係る従来の磁気軸受装置においては、安定
浮上用制御回路８に、予め設定された被支持体の支承位
置目標値に対して、変位センサ６により検出された被支
持体１２の位置との差分に基づいて、コイル２の励磁を
強めること、又は、弱めることにより、被支持体１２を
電磁石固定子１１より浮上した目標位置に非接触で支承
する。In such a conventional magnetic bearing device, the position of the supported body 12 detected by the displacement sensor 6 is set with respect to the preset supporting position target value of the supported body in the stable levitation control circuit 8. By increasing or decreasing the excitation of the coil 2 based on the difference of the above, the supported body 12 is supported in a non-contact manner at the target position above the electromagnet stator 11.
【０００４】従って、従来の磁気軸受装置においては、
被支持体１２を電磁石固定子１１の磁気力によって制御
する際の軸受剛性や、ダンピング剛性は、安定浮上用制
御回路８のみによって、制御される。しかしながら、制
御対象の特性によっては、安定浮上用制御回路８のみに
よっては、被支持体を安定浮上する良好な磁気軸受装置
を提供することは、難しい場合がある。例えば、比較的
低い１Hz以下などの振動の固有値をもつ被支持体の浮上
制御を行うためには、制御回路の時定数は大きくなり、
コンデンサ容量が大きくなり、取扱いにくいものとなっ
ていた。Therefore, in the conventional magnetic bearing device,
Bearing rigidity and damping rigidity when the supported body 12 is controlled by the magnetic force of the electromagnet stator 11 are controlled only by the stable levitation control circuit 8. However, depending on the characteristics of the controlled object, it may be difficult to provide a good magnetic bearing device that stably levitates the supported body only by the stable levitation control circuit 8. For example, in order to perform levitation control of a supported object having a relatively low eigenvalue such as 1 Hz or less, the time constant of the control circuit becomes large,
The capacity of the capacitor was large, making it difficult to handle.
【０００５】[0005]
【発明が解決しようとする課題】本発明は、係る従来技
術の問題点に鑑み、安定浮上用制御回路のみによって
は、制御の困難な制御対象に対して、安定な浮上制御を
可能ならしめる磁気軸受装置を提供する。SUMMARY OF THE INVENTION In view of the problems of the prior art, the present invention provides a magnetic control system capable of performing stable levitation control for a control target that is difficult to control only by a stable levitation control circuit. A bearing device is provided.
【０００６】[0006]
【課題を解決するための手段】本発明は、磁気力によ
り、被支持体を非接触で支持する磁気軸受装置におい
て、前記磁気力を発生する電磁石固定子のヨークに巻回
されたコイルを、該ヨークに対して摺動可能に、且つ位
置決め可能に支持することを特徴とする。According to the present invention, in a magnetic bearing device for supporting a supported body by a magnetic force in a non-contact manner, a coil wound around a yoke of an electromagnet stator for generating the magnetic force is provided. It is characterized in that it is slidably and positionably supported with respect to the yoke.
【０００７】[0007]
【作用】係る、本発明の構成により、磁気軸受装置の制
御手段が広がり、新しい制御手法の導入が可能となり、
従来の安定浮上用制御回路のみによっては、制御の困難
な制御対象に対して、安定な浮上制御を可能ならしめ
る。With the structure of the present invention, the control means of the magnetic bearing device is expanded, and a new control method can be introduced.
Only the conventional control circuit for stable levitation enables stable levitation control for a control target that is difficult to control.
【０００８】[0008]
【実施例】図１は、本発明の一実施例の磁気軸受装置の
説明図である。ケーシング１３には、励磁コイル２が巻
回されたヨーク１を具備する電磁石固定子１１が固定さ
れており、被支持体１２には、ターゲット５が固着され
ており、電磁石固定子１１の磁気吸引力により、被支持
体１２を固定子１１より離隔した目標位置に非接触浮上
させ支承する基本的な構成は従来の技術と同じである。1 is an explanatory view of a magnetic bearing device according to an embodiment of the present invention. An electromagnet stator 11 including a yoke 1 around which an exciting coil 2 is wound is fixed to a casing 13, and a target 5 is fixed to a supported body 12, and magnetic attraction of the electromagnet stator 11 is performed. The basic configuration for supporting and supporting the supported body 12 in a non-contact floating manner at a target position separated from the stator 11 by force is the same as the conventional technique.
【０００９】制御回路系も、被支持体１２に隣接して変
位センサ６が配設されており、その出力はセンサアンプ
７に接続される。安定浮上用制御回路８と電力増幅器９
によって、センサアンプ７からの出力信号と目標値との
差分の信号に基づいてコイル２に励磁電流を流し、ター
ゲット５と電磁石固定子１１間に磁気吸引力を作用させ
るようにフィードバック制御が為される基本的な構成
は、従来と同様である。Also in the control circuit system, the displacement sensor 6 is arranged adjacent to the supported body 12, and the output thereof is connected to the sensor amplifier 7. Stable levitation control circuit 8 and power amplifier 9
Thus, feedback control is performed so that an exciting current is caused to flow through the coil 2 based on the signal of the difference between the output signal from the sensor amplifier 7 and the target value, and a magnetic attraction force is applied between the target 5 and the electromagnet stator 11. The basic configuration is the same as the conventional one.
【００１０】本発明の磁気軸受装置においては、被支持
体１２を非接触で支承する磁気力を発生する電磁石固定
子１１のヨーク１に巻回されたコイル２を、ヨークに対
して摺動可能に、且つ位置決め可能に支持する位置決め
機構４を具備する。ヨーク１に巻回されたコイル２は、
コイル支持治具３に搭載され、ヨーク１に沿って、滑ら
かに摺動可能である。そして、位置決め機構４により、
ヨーク１に沿って、移動、停止即ち、位置決めを行うこ
とが可能である。In the magnetic bearing device of the present invention, the coil 2 wound around the yoke 1 of the electromagnet stator 11 for supporting the supported body 12 in a non-contact manner and generating a magnetic force is slidable with respect to the yoke. In addition, a positioning mechanism 4 that supports the positioning is provided. The coil 2 wound around the yoke 1 is
It is mounted on the coil supporting jig 3 and can slide smoothly along the yoke 1. Then, by the positioning mechanism 4,
It is possible to move, stop, or position along the yoke 1.
【００１１】ヨーク１に沿って、コイル２を位置決め可
能に支持する位置決め機構４は、摺動する方向にばね力
及び減衰力を作用させるバネ１６及びダッシュポット７
を備えている。又、位置決め要素１５により、コイル２
を搭載したコイル支持治具３をヨーク１に沿った任意の
位置に機械的に固定することが可能である。係る位置決
め機構４を構成する、バネ１５、ダッシュポット１７、
位置決め要素１５は、それぞれを機械的な手段で実現す
ることもできるが、例えば、エアシリンダなどのよう
に、一体的に構成することも可能である。The positioning mechanism 4, which supports the coil 2 so that the coil 2 can be positioned along the yoke 1, has a spring 16 and a dashpot 7 which exert a spring force and a damping force in a sliding direction.
Is equipped with. Also, the positioning element 15 allows the coil 2
It is possible to mechanically fix the coil support jig 3 on which is mounted at an arbitrary position along the yoke 1. The spring 15, the dashpot 17, which constitute the positioning mechanism 4
The positioning elements 15 can each be realized by mechanical means, but they can also be integrally configured, for example as an air cylinder.
【００１２】又、位置決め機構４は、電気的な操作信号
により、コイル支持治具に搭載されたヨーク１に沿って
摺動自在なコイルを、ヨーク１に対して任意の位置に移
動、停止、即ち、位置決めする位置決め機構の駆動装置
１０を具備する。これは、例えば、エアシリンダの駆動
装置等である。Further, the positioning mechanism 4 moves a coil which is slidable along the yoke 1 mounted on the coil supporting jig to an arbitrary position with respect to the yoke 1 by an electric operation signal, and stops the coil. That is, the drive device 10 of the positioning mechanism for positioning is provided. This is, for example, an air cylinder drive device or the like.
【００１３】位置決め機構４の駆動装置１０の入力を、
変位センサ６のセンサアンプの出力に接続することによ
り、被支持体１２の変位に対応して、ヨーク１に巻回さ
れたコイル２をヨーク１に沿って摺動（移動）させるこ
とができる。この際、位置決め機構４におけるばね力に
よるコイル２の固有振動数を、電磁石固定子１１の磁気
力による非接触で支持された被支持体の固有振動数と一
致させ、且つ、双方の振動が逆相となるようにすること
により、被支持体に生ずる外乱等に基づく振動を速やか
に吸収することが可能となる。The input of the drive unit 10 of the positioning mechanism 4 is
By connecting to the output of the sensor amplifier of the displacement sensor 6, the coil 2 wound around the yoke 1 can be slid (moved) along the yoke 1 according to the displacement of the supported body 12. At this time, the natural frequency of the coil 2 due to the spring force in the positioning mechanism 4 is made equal to the natural frequency of the supported body supported by the magnetic force of the electromagnet stator 11 in a non-contact manner, and both vibrations are opposite. By setting the phases, it becomes possible to quickly absorb the vibration caused by the disturbance or the like generated in the supported body.
【００１４】特に、従来の技術で述べたように、１Hz以
下などの遅い振動に対して、安定浮上用制御回路８のみ
で制御しようとすると、時定数が大きすぎて、コンデン
サ容量が大きくなり過ぎ制御が困難であるような場合な
どに有用である。In particular, as described in the prior art, when it is attempted to control slow vibrations of 1 Hz or less with only the stable levitation control circuit 8, the time constant becomes too large and the capacitor capacity becomes too large. This is useful when control is difficult.
【００１５】又、位置決め機構４の駆動装置１０の入力
を、図１に示すようなフィードバック制御系に接続しな
いで、オープンとし、電気的な操作信号を手動で入力す
ることも可能である。例えば、４個の電磁石固定子が、
平板状の被支持体を四隅で非接触支持するような場合
に、それぞれの電磁石固定子のヨーク１に沿ったコイル
２の位置を調整することにより、四隅において、磁気吸
引力、ばね剛性等を合わせることが可能となり、安定動
作する磁気軸受装置を実現することができる。It is also possible to open the input of the drive unit 10 of the positioning mechanism 4 without connecting it to the feedback control system as shown in FIG. 1 and manually input the electric operation signal. For example, four electromagnet stators
When a flat plate-shaped supported body is supported at four corners in a non-contact manner, by adjusting the position of the coil 2 along the yoke 1 of each electromagnet stator, the magnetic attraction force, spring rigidity, etc. at the four corners can be improved. Therefore, it is possible to realize a stable magnetic bearing device.
【００１６】[0016]
【発明の効果】以上に説明したように、本発明によれ
ば、コイルをヨークに沿って、摺動可能、位置決め可能
とすることにより、安定浮上用制御回路のみでは、制御
の難しかった領域の制御を可能ならしめ、広範な領域で
安定に浮上動作する磁気軸受装置を提供することができ
る。As described above, according to the present invention, by making the coil slidable and positionable along the yoke, it is possible to control the area which is difficult to control only by the stable levitation control circuit. It is possible to provide a magnetic bearing device which enables control and stably levitates in a wide range.
【図１】本発明の一実施例の磁気軸受装置の説明図。FIG. 1 is an explanatory diagram of a magnetic bearing device according to an embodiment of the present invention.
【図２】従来の磁気軸受装置の説明図。FIG. 2 is an explanatory view of a conventional magnetic bearing device.
１ ヨーク ２ コイル ３ コイル支持治具 ４ 位置決め機構 ５ ターゲット ６ 位置センサ ７ センサアンプ ８ 安定浮上用制御回路 ９ 電力増幅器 １０ 駆動装置 １１ 電磁石固定子 １２ 被支持体 1 yoke 2 coil 3 coil supporting jig 4 positioning mechanism 5 target 6 position sensor 7 sensor amplifier 8 stable levitation control circuit 9 power amplifier 10 driving device 11 electromagnet stator 12 supported body
Claims (4)
する磁気軸受装置において、前記磁気力を発生する電磁
石固定子のヨークに巻回されたコイルを、該ヨークに対
して摺動可能に、且つ位置決め可能に支持することを特
徴とする磁気軸受装置。1. In a magnetic bearing device that supports a supported body in a non-contact manner by a magnetic force, a coil wound around a yoke of an electromagnet stator that generates the magnetic force is slidable with respect to the yoke. A magnetic bearing device, which is supported so as to be positionable.
決め可能に支持する位置決め機構は、摺動する方向にば
ね力及び減衰力を作用させる手段を具備することを特徴
とする請求項１の磁気軸受装置。2. The magnetic mechanism according to claim 1, wherein the positioning mechanism that supports the coil so that the coil can be positioned with respect to the yoke includes a unit that applies a spring force and a damping force in a sliding direction. Bearing device.
前記ヨークに巻回されたコイルを、前記ヨークに対して
摺動させ、任意の位置に移動、位置決めする位置決め機
構の駆動装置を具備することを特徴とする請求項２の磁
気軸受装置。3. The positioning mechanism, in response to an operation signal,
3. The magnetic bearing device according to claim 2, further comprising a drive device of a positioning mechanism that slides the coil wound around the yoke with respect to the yoke, and moves and positions the coil at an arbitrary position.
ばね力による固有振動数は、前記電磁石固定子の磁気力
により非接触で支持された被支持体の固有振動数と一致
していることを特徴とする請求項３の磁気軸受装置。4. The natural frequency of the positioning mechanism due to the spring force of the coil coincides with the natural frequency of a supported body supported in a non-contact manner by the magnetic force of the electromagnet stator. The magnetic bearing device according to claim 3.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4028843A JPH05196038A (en) | 1992-01-20 | 1992-01-20 | Magnetic bearing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4028843A JPH05196038A (en) | 1992-01-20 | 1992-01-20 | Magnetic bearing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05196038A true JPH05196038A (en) | 1993-08-06 |
Family
ID=12259652
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4028843A Pending JPH05196038A (en) | 1992-01-20 | 1992-01-20 | Magnetic bearing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05196038A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6121704A (en) * | 1997-07-30 | 2000-09-19 | Nsk Ltd. | Magnetic bearing |
| DE102015200904A1 (en) | 2014-10-16 | 2016-04-21 | Mitsubishi Electric Corporation | Control device for internal combustion engine |
-
1992
- 1992-01-20 JP JP4028843A patent/JPH05196038A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6121704A (en) * | 1997-07-30 | 2000-09-19 | Nsk Ltd. | Magnetic bearing |
| DE102015200904A1 (en) | 2014-10-16 | 2016-04-21 | Mitsubishi Electric Corporation | Control device for internal combustion engine |
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