JPH05162035A - XY-θ axis fine adjustment mechanism - Google Patents

Abstract

(57) [Abstract] [Purpose] Even with a small size, it can withstand a large load, is easy to control, and is stable after adjustment. [Structure] Four stages 2 for XY axis adjustment in which an object supporter 10 is arranged at a position of a virtual quadrangle.
1, 22, 23, 24 to move the support 10 in the X-axis or Y-axis direction, a pair of drive points 11, 13 or drive points 12, 14 on the diagonal of the quadrangle are moved in the same direction. It is adjusted by moving it, and when it is moved in the θ-axis direction, it is adjusted by moving a pair of driving points on the diagonal of the rectangle in opposite directions.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an XY-.theta.-axis adjusting mechanism, and more particularly, to an XY-.theta. The present invention relates to a fine adjustment mechanism for the shaft.

[0002]

2. Description of the Related Art A fine adjustment mechanism for the XY-.theta. Axes is used, for example, in the process of manufacturing a printed circuit board, as a pattern of a screen plate frame or a pattern of an original film attached to an acrylic or glass transparent plate. , Is used for fine adjustment of the position and orientation in order to match the work (substrate).

A conventional XY-θ axis adjusting mechanism is an X table for adjusting the X axis, a Y table mounted on the X table for adjusting the Y axis, and a Y table mounted on the Y table for rotation. A structure including a θ table having a center is known. Further, as another XY-θ axis adjustment mechanism, one drive source for driving the table in the X axis direction and two drive sources for driving the table in the Y axis direction are used not only in the XY axis direction but also in the θ axis direction. It is also known to have a structure for driving.

[0004]

However, the former mechanism in which the XY table and the θ table having the center of rotation are sequentially superposed on each other, the center of rotation of the θ table is determined when a large table is placed on the mechanism. A large bending load is applied to the supporting part that supports it. If this support is designed to withstand a large bending load, the mechanism will be large and
There is a problem that the friction increases and the fast operation cannot be performed.

On the other hand, the latter mechanism that can be driven in the XY-axis direction and the θ-axis direction by one X-axis drive source and two drive sources is the same drive amount of the drive source when the θ-axis is finely adjusted. On the other hand, there is a problem in that the rotation angle is greatly different between the one closer to the driving source group of the table and the one farther from the driving source group, so that the accuracy is deteriorated and the fixing after the fine adjustment is unstable.

The object of the present invention is to solve the above problems, and even though it is small, a large bending load is not applied to the supporting portion even if a large table is placed, and the drive control in the θ axis direction is simple. , XY- which stabilizes the table after adjustment
A fine adjustment mechanism for the θ axis is provided.

[0007]

In order to achieve the above object, a fine adjustment mechanism for XY-θ axes according to the present invention is provided with an X-axis and a Y-axis.
A support body that supports an object to be adjusted about the axis and the θ axis, and the support at the first, second, third, and fourth drive points that are sequentially arranged around the apex of a virtual quadrangle. First, second, third and fourth driving bodies which are rotatably coupled to the body and can freely slide in one direction of the X-axis direction or the Y-axis direction and can be driven in the other direction with respect to the respective driving points; ，
When the support body is moved in the X-axis direction, the first drive body and the third drive body are moved in the same X-axis direction while freely sliding the second drive body and the fourth drive body. When moving the support body in the Y-axis direction, the second drive body and the fourth drive body are moved in the Y direction while freely sliding the first drive body and the third drive body. When the support body is driven in the same axis direction and the support body is rotated in the θ axis direction, the first drive body and the third drive body are in the Y axis direction and the second drive body and the fourth drive body are in the Y axis direction. Driving the first driving body and the third driving body in mutually opposite directions of the X axis while freely sliding the driving body in the X-axis direction, and the second driving body and the fourth driving body. Drive control means for simultaneously driving the Y-axis in mutually opposite directions.

The fine adjustment mechanism for the XY-θ axes according to the present invention includes a support for supporting an object to be adjusted about the X-axis, the Y-axis and the θ-axis, and a first driving point for the support. A rotatably coupled with a first drive body that can freely slide in one direction of the X-axis direction or the Y-axis direction and can be driven in the other direction, and rotatably coupled to the support body at a second drive point, Second that can be driven independently in the X-axis direction and the Y-axis direction
Of the first drive body and / or the second drive body while freely sliding the first drive body when moving the drive body and the support body in the X-axis direction or the Y-axis direction. Is driven in the X-axis direction or the Y-axis direction and the support is rotated in the θ-axis direction, the first drive body and the second drive body are driven in opposite directions of the X-axis or the Y-axis. The second drive body may be configured to include drive control means for driving the second drive body in the Y-axis direction or the X-axis direction.

In this case, at least one XY support is provided, which is rotatably coupled to the support at a point other than the first and second drive points and is freely slidable in the X-axis direction and the Y-axis direction. Can be characterized.

[0010]

According to the present invention, a support body for supporting a work whose fine adjustment of positioning is performed with respect to the XY-θ axes is driven by a drive point located at the apex of a quadrangle, and a stage for driving this drive point. There are two pairs, one that can drive the X-axis and slides freely on the Y-axis and one that can drive the Y-axis and slides freely on the X-axis, and the same ones are arranged diagonally. is doing. Therefore,
It is possible to drive one opposing stage in the same direction to adjust the X-axis and drive another opposing stage in the same direction to adjust the Y-axis. Further, by driving the pair of stages in opposite directions, the θ axis can be adjusted accurately with simple control. Since this mechanism is supported at four points, it is possible to mount a large table even if it is smaller than conventional ones, and it is highly stable even when it is fixed after adjustment.

[0011]

The present invention will be described in detail below with reference to the drawings and the like. FIG. 1 shows an XY-θ according to the present invention.
It is a perspective view showing a 1st example of a fine adjustment mechanism of a shaft. In FIG. 1, the frame 10 is a support that supports the work to be adjusted. First, second, third and fourth drive points 1
Reference numerals 1, 12, 13, 14 are points for driving the frame 10, respectively, and are arranged at respective vertices of a virtual quadrilateral (square in the embodiment of FIG. 1).

The stages 21, 22, 23 and 24 are driving bodies for supporting and driving the frame 10 at each of the driving points 11 to 14. The stage 21 and the stage 23 can drive the frame 10 in the X-axis direction and can freely slide in the Y-axis direction. The stage 22 and the stage 24 can drive the frame 10 in the Y-axis direction and can freely slide in the X-axis direction. The stages 21 to 24 are driven by motors 31, 32, 33 and 34, respectively.

FIG. 2 is a sectional view showing the structure of the stage of the XY-.theta. Axis fine adjustment mechanism according to the embodiment. In FIG. 2, a block A is fixed to a base 1 that fixes the entire mechanism of this embodiment, and a block B can slide freely with respect to the block A in the front-back direction of the paper surface of FIG. C can be driven to the left and right in the figure by the motor 31 with respect to the block B. Motor 31
Are fixed to the block B, drive the block C, and the block C supports the frame 10 by the pin of the driving point 11. The frame 10 and the block C are rotatably connected to each other.

FIG. 3 is a block diagram showing an example of a system for controlling the motor of the fine adjustment mechanism for the XY-θ axes according to the embodiment. In FIG. 3, CCD cameras 51 and 52 detect the position of a reference mark provided on a pattern of a work such as a printed circuit board (not shown), and the output thereof is output from the central processing unit 3.
It is connected to 0. Based on the inputs from the CCD cameras 51 and 52, the central processing unit 30 performs calculation for adjusting the reference mark to a predetermined position and sends a signal to the driver circuits 41, 42, 43 and 44. Driver circuit 4
1 to 44 drive the motors 31 to 34 to drive the stage 2
Move 1-24.

According to this embodiment, when finely adjusting the XY-θ axes, the motors 31 and 33 are rotated in the same direction as shown in FIG. 1 to adjust the X axis. At this time, the movements of the stages 22 and 24 are freely restrained and free. Also, rotate the motors 32 and 34 in the same direction to
Adjust the axis. At this time, the movements of the stages 21 and 23 are freely restrained and free. Further, when adjusting the θ axis, the motors 31 and 33 are simultaneously driven so that the rotations of the motors 31 and 33 are in the opposite directions and the rotations of the motors 32 and 34 are in the opposite directions. At this time, the driving points 11 to 14 move in the same clockwise or counterclockwise direction, and the frame 10 makes a rotational motion.

FIG. 4 is a plan view showing a second embodiment of the XY-.theta. Axis fine adjustment mechanism according to the present invention. The second embodiment is applied when the arrangement of the stages 21 to 24 is different from the driving direction of the motor of the embodiment shown in FIG.
In this case, when the X axis is adjusted, the motor 31,
When the Y-axis is adjusted by rotating the motors 33 in opposite directions, the motors 32, 34 are rotated in opposite directions,
When adjusting the θ axis, all the motors 31 to 34 may be rotated in the same direction.

FIG. 5 is a plan view showing a third embodiment of the XY-.theta. Axis fine adjustment mechanism according to the present invention. In the third embodiment, the same stage 21 as that used in the second embodiment is used, and the stages 22 ′ and 23 ′ have a structure in which the motors 32 and 33 are removed from the stages 22 and 23 in the second embodiment. The stage 24 ′ has a structure in which, in addition to the motor 34 that drives in the Y direction, a motor 34 ′ that drives in the Y direction is attached.

In this case, both or one of the motors 31 and 34 'is rotated when adjusting the X axis, and the motor 34 is rotated when adjusting the Y axis. Also, θ
When adjusting the shaft, the motors 31 and 34 'may be rotated in opposite directions and the motor 34 may be rotated in either direction. At this time, the center of rotation deviates,
In the same manner as shown in FIG. 3, the calculation for adjusting the rotation center to a predetermined position is performed based on the input from the CCD camera that detects the reference mark and the like, and the motors 31, 3 are
It suffices to drive 4'and 34.

As in the third embodiment, the stage 2
When using 1 and 24 ', it is not always necessary to place the stages at the four corners of the support, and the two stages 21 and 24' may be arranged at positions symmetrical with respect to the center of rotation. Even in this case, it is possible to withstand a large bending load as compared with the structure in which one table in which the θ table is stacked on the XY table is placed at the center of rotation described as the conventional technique.

The present invention is not limited to the embodiments described above, and various modifications and changes can be made, which are also within the scope of the present invention. In the embodiment of FIGS. 1 and 4,
The support on which the object to be adjusted is placed has a square frame shape,
The support may be a flat table. However, when the support is frame-shaped, the suction means or the like can be arranged in the center of the support, so that the height of the entire apparatus can be reduced and the size can be reduced. Further, although the stage for adjusting the XY axes is arranged at the four corners of the support, it may be arranged on each side. Further, the frame (or table) may be rectangular or other shapes other than square. In these variants,
If the drive point that drives the support is located at the apex of a rectangle, it may be that the pitch of the drive feed screw, the gear ratio of the drive motor, or the drive pulse is inversely proportional to the side length ratio. Good.

[0021]

As described above in detail, according to the present invention, four XY-axis adjusting stages are arranged so that the driving points are located at the vertices of a virtual quadrangle on the support, and the stages are arranged in pairs. Since the X-axis or the Y-axis is adjusted by driving the driving points on the corners in the same direction, and the θ-axis is adjusted by driving the driving points on the diagonals in different directions, the center of rotation is adjusted. Compared with the conventional θ table stacking mechanism, it is possible to mount a sufficiently small table despite its small size. In addition, compared to the conventional three-point drive mechanism that drives one X-axis and two Y-axes, the stage can be controlled more easily and the adjustment can be performed accurately. There is no stability.

[Brief description of drawings]

FIG. 1 is a perspective view showing a first embodiment of a fine adjustment mechanism for XY-θ axes according to the present invention.

FIG. 2 is a cross-sectional view showing the structure of the stage according to the embodiment of FIG.

FIG. 3 is a configuration diagram showing an example of a system for controlling a motor according to the embodiment of FIG.

FIG. 4 is a plan view showing a second embodiment of the XY-θ axis fine adjustment mechanism according to the present invention.

FIG. 5 is a plan view showing a third embodiment of the XY-θ axis fine adjustment mechanism according to the present invention.

[Explanation of symbols]

 10 frames 11, 12, 13, 14 drive points 21, 22, 23, 24 stage 30 central processing unit 31, 32, 33, 34 motor 41, 42, 43, 44 driver circuit 51, 52 CCD

Claims (3)

[Claims] 1. A support for supporting an object to be adjusted about the X-axis, the Y-axis and the θ-axis; first, second, third and sequentially arranged around the apex of an imaginary quadrangle. A fourth driving point is rotatably coupled to the support body and can freely slide in one direction of the X-axis direction or the Y-axis direction and can be driven in the other direction with respect to each of the driving points. Third
And a fourth drive body; when the support body is moved in the X-axis direction, the first drive body and the third drive body are moved while freely sliding the second drive body and the fourth drive body. When the driving body is driven in the same direction of the X axis and the supporting body is moved in the Y axis direction, the first driving body and the third driving body are freely slid and the second driving body is moved. When the fourth driving body is driven in the same Y-axis direction and the support body is rotated in the θ-axis direction, the first driving body and the third driving body are moved in the Y-axis direction and the second driving body is rotated. Driving the first driving body and the third driving body in opposite directions of the X-axis while freely sliding the driving body and the fourth driving body in the X-axis direction, and the second driving Body and drive control means for simultaneously driving the fourth drive body in opposite directions of the Y-axis. Fine-tuning mechanism of XY-θ axis and butterflies. 2. A support for supporting an object to be adjusted about X-axis, Y-axis and θ-axis;
A first drive member that is rotatably coupled at a drive point and is slidable in one direction of the X-axis direction or the Y-axis direction and can be driven in the other direction; A second driving body that is coupled and can be driven independently in the X-axis direction and the Y-axis direction; and when moving the support body in the X-axis direction or the Y-axis direction, freely slide the first driving body. However, when driving either or both of the first driving body and the second driving body in the X-axis direction or the Y-axis direction and rotating the support body in the θ-axis direction, the first driving body and the second driving body XY including: driving the second driving body in opposite directions of the X-axis or the Y-axis; and driving control means for driving the second driving body in the Y-axis direction or the X-axis direction. -Theta axis fine adjustment mechanism. 3. At least one XY support body is provided which is rotatably coupled to the support body at a point other than the first and second drive points and is freely slidable in the X-axis direction and the Y-axis direction. XY-θ according to claim 2.
Fine adjustment mechanism of the axis.