JPH05164927A - Waveguide type directional coupler and its manufacture - Google Patents
Waveguide type directional coupler and its manufactureInfo
- Publication number
- JPH05164927A JPH05164927A JP3332218A JP33221891A JPH05164927A JP H05164927 A JPH05164927 A JP H05164927A JP 3332218 A JP3332218 A JP 3332218A JP 33221891 A JP33221891 A JP 33221891A JP H05164927 A JPH05164927 A JP H05164927A
- Authority
- JP
- Japan
- Prior art keywords
- directional coupler
- core
- refractive index
- clad
- waveguide type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 239000002019 doping agent Substances 0.000 claims description 11
- 239000011162 core material Substances 0.000 description 40
- 238000005253 cladding Methods 0.000 description 17
- 239000000758 substrate Substances 0.000 description 8
- 230000008878 coupling Effects 0.000 description 6
- 238000010168 coupling process Methods 0.000 description 6
- 238000005859 coupling reaction Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Optical Integrated Circuits (AREA)
Abstract
(57)【要約】
【目的】 容易に任意の分岐比を得ることができ広い波
長域に亘って波長依存性の少ない導波路型方向性結合器
を実現する。
【構成】 クラッド１１内に２本のコア２，３を互いに
平行に近接させて形成し、一方のコア２の周囲のクラッ
ド１１´の屈折率と他方のコア３の周囲のクラッド１１
の屈折率を相異ならせて構成したことを特徴とする。
(57) [Summary] [Objective] To realize a waveguide type directional coupler which can easily obtain an arbitrary branching ratio and has little wavelength dependence over a wide wavelength range. [Structure] Two cores 2 and 3 are formed in a clad 11 in parallel and close to each other, and a refractive index of a clad 11 ′ around one core 2 and a clad 11 around the other core 3 are formed.
It is characterized in that the refractive index of each is different.
Description
【０００１】[0001]
【産業上の利用分野】本発明は、石英系ガラスを用いた
導波路型方向性結合器及びその製造方法に関するもので
ある。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a waveguide type directional coupler using silica glass and a method for manufacturing the same.
【０００２】[0002]
【従来の技術】従来の方向性結合器として、結合部の２
本のコアをそれぞれ屈折率の異なる材料を用いて構成す
ることにより所望の分岐比が得られるようにしたものが
知られている（例えば、特開昭63-309906 号公報）。2. Description of the Related Art As a conventional directional coupler, there are two
It is known that a desired branching ratio can be obtained by constructing the core of the book by using materials having different refractive indexes (for example, JP-A-63-309906).
【０００３】[0003]
【発明が解決しようとする課題】しかし、上記従来の方
向性結合器は、(1) 通常プレ−ナ型導波路で構成される
導波路型方向性結合器において、同一平面内に一括形成
されるコアにそれぞれ異なった材料を用いることは困難
である、(2) 適当な屈折率のコア材料が見つからない場
合は得たい分岐比が実現できない、等、製造上の問題が
あった。However, the above-mentioned conventional directional coupler is (1) a waveguide type directional coupler which is usually composed of a planar waveguide, and is formed in the same plane all together. It is difficult to use different materials for the cores, and (2) the desired branching ratio cannot be achieved if a core material with an appropriate refractive index cannot be found.
【０００４】本発明の目的は、従来技術の問題点を解消
し、容易に任意の分岐比を得ることができ広い波長域に
亘って波長依存性の少ない導波路型方向性結合器を提供
することにある。An object of the present invention is to solve the problems of the prior art and provide a waveguide type directional coupler which can easily obtain an arbitrary branching ratio and has a small wavelength dependence over a wide wavelength range. Especially.
【０００５】[0005]
【課題を解決するための手段】上記目的を達成するため
本発明に係る方向性結合器においては、クラッド内に２
本のコアを互いに平行に近接させて形成して成る導波路
型方向性結合器の一方のコアの周囲のクラッドの屈折率
と他方のコアの周囲のクラッドの屈折率を相異ならせて
構成したものである。In order to achieve the above-mentioned object, in the directional coupler according to the present invention, two layers are provided in the cladding.
A waveguide type directional coupler formed by arranging two cores in parallel and close to each other is constructed by making the refractive index of the cladding around one core different from the refractive index of the cladding around the other core. It is a thing.
【０００６】また、本発明に係る方向性結合器の製造方
法においては、屈折率制御用ド−パントが添加されたク
ラッド内に２本のコアを互いに平行に近接させて形成し
た後、一方のコアの周囲のクラッドにＣＯ2 レ−ザ光を
照射してそのド−パントを蒸発させるようにしたもので
ある。Further, in the method for manufacturing a directional coupler according to the present invention, two cores are formed in parallel with each other in a clad to which a dopant for controlling a refractive index is added, and then one of the cores is formed. The cladding around the core is irradiated with CO 2 laser light to evaporate the dopant.
【０００７】[0007]
【作用】方向性結合器型光分岐素子において、結合領域
における２本の光導波路の伝搬定数に差を持たせると分
岐比が波長広帯域化することは広く知られている。上記
構成による本発明の方向性結合器によれば、一方のコア
の周囲のクラッドの屈折率と他方のコアの周囲のクラッ
ドの屈折率を相異ならせることにより２本のコアの伝搬
定数に差を持たせることができ、それによって分岐比の
波長広帯域化が実現される。In the directional coupler type optical branching element, it is widely known that when the propagation constants of the two optical waveguides in the coupling region are made different, the branching ratio widens the wavelength band. According to the directional coupler of the present invention having the above configuration, the refractive index of the clad around one core is made different from the refractive index of the clad around the other core, so that the propagation constants of the two cores are different from each other. Can be provided, thereby realizing a wavelength broadening of the branching ratio.
【０００８】本発明の製造方法によれば、フォトリソグ
ラフィや反応性イオンエッチング等の一般的な微細加工
技術（プレ−ナ技術）によってクラッドに屈折率制御用
ド−パントが添加されている方向性結合器を作成した
後、ＣＯ2 レ−ザ光照射により一方のコアの周囲のクラ
ッド内のド−パントを蒸発させクラッド屈折率を変化
（低下）させればよく、素子作成が非常に容易である。
この方法によれば、ド−パント量を調整すればクラッド
の屈折率を自在に変えることができ、任意の分岐比を持
った波長無依存性の方向性結合器を容易に製造すること
ができる。According to the manufacturing method of the present invention, the directionality in which the refractive index controlling dopant is added to the clad by a general fine processing technique (planar technique) such as photolithography or reactive ion etching. After forming the coupler, CO 2 laser irradiation may be used to evaporate the dopant in the clad around one of the cores to change (decrease) the clad refractive index. is there.
According to this method, the refractive index of the clad can be freely changed by adjusting the dopant amount, and a wavelength-independent directional coupler having an arbitrary branching ratio can be easily manufactured. ..
【０００９】[0009]
【実施例】次に、本発明の実施例について説明する。EXAMPLES Next, examples of the present invention will be described.
【００１０】図１(a) は本発明に係る方向性結合器の一
実施例を示す平面図、(b) は(a) のＡ−Ａ線断面図であ
る。同図(a) に示すように、方向性結合器を構成する２
本のコア２，３の一方のコア２は直線状に、他方のコア
３はその中間部のみを上記一方のコア２に平行に近接さ
せるべく湾曲させて形成されており、このようにコア
２，３が近接配置されることにより基板１の中央部に方
向性結合器の結合部４が構成されている。コア２，３は
基板１をその長手方向に横断するようにして形成され、
同図(b) に示すように基板１上に形成されたコア２，３
よりも屈折率の低いクラッド１１内に埋め込まれてい
る。基板１はシリコン、コア２，３はＳｉＯ2 −ＴｉＯ
2 、クラッド１１はＳｉＯ2 −Ｂ2 Ｏ5 −Ｐ2 Ｏ3 で構
成されている。上記結合部４の一方のコア２の周囲のク
ラッド１１´は、プレーナ技術により基板１上にコア
２，３及びクラッド１１から成る導波路が形成されたの
ち、図２に示すようにＣＯ2 レ−ザ光１２が照射される
ことによりその中の屈折率制御用ド−パントＰ2 Ｏ3 が
蒸発除去され、他方のコア３の周囲のクラッド１１より
も屈折率が小さくなっている。FIG. 1A is a plan view showing an embodiment of a directional coupler according to the present invention, and FIG. 1B is a sectional view taken along the line AA of FIG. As shown in (a) of the same figure, 2
One of the cores 2 and 3 of the book is formed in a linear shape, and the other core 3 is formed by curving only an intermediate portion thereof so as to approach the one core 2 in parallel. , 3 are arranged close to each other, so that the coupling portion 4 of the directional coupler is formed in the central portion of the substrate 1. The cores 2 and 3 are formed so as to traverse the substrate 1 in the longitudinal direction,
Cores 2 and 3 formed on the substrate 1 as shown in FIG.
It is embedded in the clad 11 having a lower refractive index. Substrate 1 is silicon, cores 2 and 3 are SiO 2 --TiO 2.
2, the cladding 11 is composed of SiO 2 -B 2 O 5 -P 2 O 3. Cladding 11 'around the one of the core 2 of the coupling portion 4, after which the waveguide comprising a core 2 and a cladding 11 on the substrate 1 is formed by planar technology, CO 2 les as shown in FIG. 2 The irradiation with the light 12 evaporates and removes the refractive index control dopant P 2 O 3 therein, and the refractive index is smaller than that of the cladding 11 around the other core 3.
【００１１】この方向性結合器を構成する際にコア２，
３の幅並びに高さ、結合部４のコア間隔、コア２，３の
屈折率、クラッド１１の屈折率、基板１の屈折率、等を
適当な値に設定することにより、図１に示すようにコア
３の入射ポ−ト７に挿入した光Ｐｉｎをコア２，３の出
射ポ−ト９，１０から、ある広い波長帯域に亘って所望
の一定の分岐比Ｐｔ：Ｐｃで出力させることができる。
例えば、コア２，３の高さ並びに幅を8 μｍ、結合部４
の長さを900 μｍ、結合部４のコア間隔を4 μｍ、コア
２，３の屈折率を1.4624、クラッド１１の屈折率を1.45
5 、基板１の屈折率を1.458 とした石英ガラスで構成し
た導波路型方向性結合器において、結合部４の一方のコ
ア周囲のクラッド１１´にＣＯ2 レ−ザ光を照射してド
−パント（リン）を蒸発させてその部位のクラッド１１
の屈折率を1.458 にしたところ、高性能な広帯域方向性
結合器を実現することができた。その方向性結合器の分
岐比の波長無依存性評価結果を図３に示しておく。When constructing this directional coupler, the core 2,
As shown in FIG. 1, the width and height of 3, the core interval of the coupling portion 4, the refractive index of the cores 2 and 3, the refractive index of the cladding 11, the refractive index of the substrate 1, etc. are set to appropriate values. The light Pin inserted into the entrance port 7 of the core 3 can be output from the exit ports 9 and 10 of the cores 2 and 3 at a desired constant branching ratio Pt: Pc over a wide wavelength band. it can.
For example, the height and width of the cores 2 and 3 are 8 μm, and the connecting portion 4 is
Is 900 μm, the core spacing of the coupling part 4 is 4 μm, the refractive index of the cores 2 and 3 is 1.4624, and the refractive index of the clad 11 is 1.45.
5. In the waveguide type directional coupler made of silica glass with the substrate 1 having a refractive index of 1.458, the cladding 11 'around the core of the coupling portion 4 is irradiated with CO 2 laser light to reduce the dose. Evaporate the panto (phosphorus) and clad 11
By setting the index of refraction to 1.458, we were able to realize a high-performance broadband directional coupler. FIG. 3 shows the evaluation result of the wavelength independence of the branching ratio of the directional coupler.
【００１２】[0012]
【発明の効果】以上要するに、本発明は次の如き優れた
効果を奏するものである。In summary, the present invention has the following excellent effects.
【００１３】(1) クラッド内に２本のコアを互いに平行
に近接させて形成した方向性結合器の一方のコアの周囲
のクラッドの屈折率と他方のコアの周囲のクラッドの屈
折率を相異ならせるという簡単な構成で、波長に無依存
に結合する広帯域方向性結合器を実現できる。(1) The refractive index of the cladding around one core of the directional coupler formed by placing two cores close to each other in parallel in the cladding and the refractive index of the cladding around the other core are matched. It is possible to realize a wideband directional coupler that couples wavelength-independently with a simple configuration that is different.
【００１４】(2) 屈折率制御用ド−パントが添加された
クラッド内に２本のコアを互いに平行に近接させて形成
したのち、一方のコアの周囲のクラッドにＣＯ2 レ−ザ
光を照射してそのド−パントを蒸発させクラッド屈折率
を変化させるようにしたので、コア部にそれぞれ屈折率
の異なる材料を用いる従来技術の方法に比べて遥かに容
易に広帯域方向性結合器を製造することができる。(2) Two cores are formed close to each other in parallel in the cladding to which the dopant for controlling the refractive index is added, and then CO 2 laser light is applied to the cladding around one core. Since the dopant is evaporated and the dopant is evaporated to change the cladding refractive index, it is much easier to manufacture a broadband directional coupler as compared with the prior art method in which materials having different refractive indexes are used for the core. can do.
【図１】本発明に係る導波路型方向性結合器の一実施例
を示す図であり、(a) は平面図、(b) は(a) のＡ−Ａ線
断面図である。1A and 1B are diagrams showing an embodiment of a waveguide type directional coupler according to the present invention, in which FIG. 1A is a plan view and FIG. 1B is a sectional view taken along the line AA of FIG.
【図２】本発明に係る製造方法の一実施例を示す図であ
る。FIG. 2 is a diagram showing an embodiment of a manufacturing method according to the present invention.
【図３】分岐比の波長無依存性を示す図である。FIG. 3 is a diagram showing wavelength independence of a branching ratio.
１ 基板 ２ コア ３ コア ４ 結合部 １１ クラッド １１´ 一方のコアの周囲のクラッド（レ−ザ照射部
位） １２ ＣＯ2 レ−ザ光1 substrate 2 core 3 core 4 bonded portion 11 clad 11 'of one of the around the core cladding (Les - The irradiated portion) 12 CO 2 Le - laser light
Claims (2)
近接させて形成してなる導波路型方向性結合器におい
て、一方のコアの周囲のクラッドの屈折率と他方のコア
の周囲のクラッドの屈折率が相異なっていることを特徴
とする導波路型方向性結合器。1. A waveguide type directional coupler having two cores formed in a clad so as to be parallel to and close to each other, wherein a refractive index of the clad around one core and a clad around the other core. A waveguide type directional coupler characterized in that the refractive indices of the two are different.
ラッド内に２本のコアを互いに平行に近接させて形成し
たのち、一方のコアの周囲のクラッドにＣＯ2 レ−ザ光
を照射してそのド−パントを蒸発させるようにしたこと
を特徴とする導波路型方向性結合器の製造方法。2. After forming two cores in parallel to each other in a clad to which a dopant for controlling the refractive index is added, the clad around one core is irradiated with CO 2 laser light. A method of manufacturing a waveguide type directional coupler, characterized in that the dopant is evaporated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3332218A JPH05164927A (en) | 1991-12-16 | 1991-12-16 | Waveguide type directional coupler and its manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3332218A JPH05164927A (en) | 1991-12-16 | 1991-12-16 | Waveguide type directional coupler and its manufacture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05164927A true JPH05164927A (en) | 1993-06-29 |
Family
ID=18252496
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3332218A Pending JPH05164927A (en) | 1991-12-16 | 1991-12-16 | Waveguide type directional coupler and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05164927A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0753786A1 (en) * | 1995-07-04 | 1997-01-15 | PIRELLI GENERAL plc | Optical structures with two optical guidance paths |
| WO2014030122A1 (en) * | 2012-08-22 | 2014-02-27 | Telefonaktiebolaget L M Ericsson (Publ) | Radiation scribed waveguide coupling for photonic circuits |
| JP2015090450A (en) * | 2013-11-06 | 2015-05-11 | 株式会社フジクラ | Mode conversion element and optical waveguide element |
| JP2018101004A (en) * | 2016-12-19 | 2018-06-28 | 富士通株式会社 | Optical branching waveguide and optical module |
-
1991
- 1991-12-16 JP JP3332218A patent/JPH05164927A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0753786A1 (en) * | 1995-07-04 | 1997-01-15 | PIRELLI GENERAL plc | Optical structures with two optical guidance paths |
| WO2014030122A1 (en) * | 2012-08-22 | 2014-02-27 | Telefonaktiebolaget L M Ericsson (Publ) | Radiation scribed waveguide coupling for photonic circuits |
| US9329341B2 (en) | 2012-08-22 | 2016-05-03 | Telefonaktiebolaget L M Ericsson (Publ) | Radiation scribed waveguide coupling for photonic circuits |
| JP2015090450A (en) * | 2013-11-06 | 2015-05-11 | 株式会社フジクラ | Mode conversion element and optical waveguide element |
| JP2018101004A (en) * | 2016-12-19 | 2018-06-28 | 富士通株式会社 | Optical branching waveguide and optical module |
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