JPH05157076A - Scroll type fluid machine - Google Patents
Scroll type fluid machineInfo
- Publication number
- JPH05157076A JPH05157076A JP34020191A JP34020191A JPH05157076A JP H05157076 A JPH05157076 A JP H05157076A JP 34020191 A JP34020191 A JP 34020191A JP 34020191 A JP34020191 A JP 34020191A JP H05157076 A JPH05157076 A JP H05157076A
- Authority
- JP
- Japan
- Prior art keywords
- scroll
- main shaft
- fluid machine
- type fluid
- casing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000012530 fluid Substances 0.000 title claims abstract description 24
- 239000000919 ceramic Substances 0.000 claims description 12
- 239000011261 inert gas Substances 0.000 claims description 7
- 231100000331 toxic Toxicity 0.000 abstract description 3
- 230000002588 toxic effect Effects 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 19
- 238000001816 cooling Methods 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 239000002360 explosive Substances 0.000 description 2
- 238000005524 ceramic coating Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
- F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
- F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
- F04C18/0223—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving with symmetrical double wraps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
- F04C27/005—Axial sealings for working fluid
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Rotary Pumps (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は真空ポンプ等に適用され
るスクロール型流体機械に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scroll type fluid machine applied to a vacuum pump or the like.
【０００２】[0002]
【従来の技術】例えば、従来のスクロール型真空ポンプ
においては、図２縦断面図に示すように、旋回スクロー
ル１を公転させるのに、主軸５を前後１対の固定スクロ
ール２，３からなるケーシングの中心孔から外部へ露出
し、これをモーター１０’とカップリング８で連結して
いる。2. Description of the Related Art For example, in a conventional scroll type vacuum pump, as shown in a vertical sectional view of FIG. 2, a casing composed of a pair of front and rear fixed scrolls 2 with a main shaft 5 for revolving the orbiting scroll 1. It is exposed to the outside from the center hole of the motor and is connected to the motor 10 ′ by the coupling 8.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、このよ
うな構造では、下記の問題がある。 （１）主軸５が１対の固定スクロール２，３からなるケ
ーシングを貫通しているので、ケーシング内の流体が軸
受孔のすきまから外部に漏れる。 （２）扱う流体が有害ガスや爆発性ガスの場合、これが
外部に漏れると大変危険であるので、各種の軸シールが
検討されているが、完全なものがないため、従来この種
の構造のものはクリーンガス以外に適用できない。However, such a structure has the following problems. (1) Since the main shaft 5 penetrates the casing composed of the pair of fixed scrolls 2 and 3, the fluid in the casing leaks out from the clearance of the bearing hole. (2) If the fluid to be handled is harmful gas or explosive gas, it will be very dangerous if it leaks to the outside, so various shaft seals have been studied, but there is no perfect one. Things can only be applied to clean gas.
【０００４】本発明はこのような事情に鑑みて提案され
たもので、取扱う流体が外部に漏れることがなく、毒性
流体をも扱うことが可能な安全かつ高効率のスクロール
型流体機械を提供することを目的とする。The present invention has been proposed in view of such circumstances, and provides a safe and highly efficient scroll type fluid machine capable of handling a toxic fluid without leaking the fluid to be handled to the outside. The purpose is to
【０００５】[0005]
【課題を解決するための手段】そのために請求項１の発
明は、主軸に支承され軸方向両面にそれぞれスクロール
羽根を設けてなる旋回スクロールと、前記スクロール羽
根に両面からかみ合せた前後１対の固定スクロールから
なり、上記旋回スクロールを自転することなく公転可能
に構成したスクロール型流体機械において、前記主軸に
モーターローターを取り付け、同主軸がケーシング内に
密封され、主軸の軸方向位置を面シール自体で保つこと
を特徴とする。また請求項２の発明は、ケーシング内に
不活性ガスを流す導入孔を付設したことを特徴とする。
さらに請求項３の発明は、旋回スクロール，固定スクロ
ール，軸受をそれぞれセラミックスでつくるか、あるい
はその表面をそれぞれセラミックスコーティングするこ
とを特徴とする。To this end, the invention of claim 1 is directed to a revolving scroll supported by a main shaft and provided with scroll blades on both axial surfaces, respectively, and a pair of front and rear wheels engaged with the scroll blade from both sides. In a scroll type fluid machine composed of a fixed scroll and revolving without rotating the orbiting scroll, a motor rotor is attached to the main shaft, the main shaft is sealed in a casing, and the axial position of the main shaft is a surface seal itself. It is characterized by keeping at. Further, the invention of claim 2 is characterized in that an introduction hole for flowing an inert gas is provided in the casing.
Furthermore, the invention of claim 3 is characterized in that the orbiting scroll, the fixed scroll, and the bearing are made of ceramics or the surfaces thereof are respectively coated with ceramics.
【０００６】[0006]
【作用】このような構成によれば、下記の作用が行われ
る。 （１）主軸の軸シール９Ｃ，９Ｄがないので、１対の固
定スクロール２，３及びフランジ１１からなるケーシン
グの内部は、完全な密封状態にできる。 （２）ここで、主軸５は面シール４Ａ自体、あるいは面
シール４Ａのバックアップばね４Ｂで軸方向位置が保た
れるので、熱影響等での主軸５の伸縮があっても無理な
く軸受９Ａ，９Ｂで支承できる。According to this structure, the following actions are performed. (1) Since the shaft seals 9C and 9D of the main shaft are not provided, the inside of the casing including the pair of fixed scrolls 2 and 3 and the flange 11 can be completely sealed. (2) Here, since the main shaft 5 is kept in the axial position by the face seal 4A itself or the backup spring 4B of the face seal 4A, even if the main shaft 5 expands or contracts due to thermal influence, the bearing 9A, We can support with 9B.
【０００７】[0007]
【実施例】本発明の一実施例を図面について説明する
と、図１はその全体縦断面図で、図２と同一の符号はそ
れぞれ同図と同一の部材を示す。図１において、１は軸
方向の前後面にそれぞれうずまき羽根が突設されてなる
旋回スクロール，２はモーターステーター１０Ｂの支持
台２Ｃを軸方向に円筒状に突出してなるモーター側固定
スクロール，３は他方の固定スクロールである。５は主
軸で、両端を軸受９Ａ，９Ｂで支承され、モーターロー
ター１０Ａが取り付けられ、偏心したクランク部５Ａに
軸受７を介して旋回スクロール１を支持駆動する。旋回
スクロール１は、固定スクロール２，３との間で周方向
に、１２０°ピッチで設けられた自転規制用の偏心回転
軸６により公転する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to the drawings. FIG. 1 is an overall longitudinal sectional view thereof, and the same reference numerals as those in FIG. In FIG. 1, 1 is an orbiting scroll in which front and rear surfaces in the axial direction are provided with spiral blades, 2 is a motor-side fixed scroll in which a support base 2C of a motor stator 10B is cylindrically projected in the axial direction, and 3 is It is the other fixed scroll. Reference numeral 5 is a main shaft, both ends of which are supported by bearings 9A and 9B, a motor rotor 10A is attached, and the orbiting scroll 1 is supported and driven by an eccentric crank portion 5A via a bearing 7. The orbiting scroll 1 revolves in the circumferential direction between the fixed scrolls 2 and 3 by an eccentric rotation shaft 6 for rotation regulation, which is provided at a pitch of 120 °.
【０００８】このような構造においては、主軸５が固定
スクロール３及びフランジ１１に取り付けられた軸受９
Ａ，９Ｂで支承されているので、吸気口２Ｄから入った
流体は、排気口２Ｅへ出るまで、固定スクロール２，３
及びフランジ１１で構成されるケーシング内に完全に密
封されて外部へ流出することがない。主軸５の軸方向位
置は、旋回スクロール羽根１の先端凹溝１Ｂ，固定スク
ロール羽根２Ａ，３Ａの先端に形成されたうずまき状凹
溝２Ｂ，３Ｂにシール４Ａとバックアップばね４Ｂを挿
入し、これらのばね力のつり合う位置に保持される。軸
受９Ａ，９Ｂは、軸方向に拘束しない構成としているの
で、旋回スクロール１，モーターローター１０Ａからの
発熱によって主軸５が伸縮しても、旋回スクロール１と
固定スクロール２，３との軸方向位置は常に適正な位置
に保たれる。In such a structure, the main shaft 5 has a bearing 9 attached to the fixed scroll 3 and the flange 11.
Since it is supported by A and 9B, the fluid that has entered from the intake port 2D is fixed scrolls 2 and 3 until it exits to the exhaust port 2E.
Further, it is completely sealed in the casing constituted by the flange 11 and does not flow out. The axial position of the main shaft 5 is determined by inserting the seal 4A and the backup spring 4B into the spiral groove 1B of the orbiting scroll blade 1 and the spiral groove 2B, 3B formed at the tips of the fixed scroll blades 2A, 3A. It is held in a position that balances the spring forces. Since the bearings 9A and 9B are not constrained in the axial direction, even if the main shaft 5 expands and contracts due to the heat generated from the orbiting scroll 1 and the motor rotor 10A, the axial positions of the orbiting scroll 1 and the fixed scrolls 2 and 3 remain. Always kept in proper position.
【０００９】フランジ１１には、ガスシールができるモ
ーター電源用の導入端子１１Ｂ及び不活性ガス導入用の
孔１１Ａが設けられている。モーターローター１０Ａ，
モーーターステーター１０Ｂを腐食するようなガスを吸
入排気する場合には、孔１１Ａから大気圧より若干高い
圧力でＮ2 などの不活性ガスを導入すれば、不活性ガス
はモーター部を通って排気口２Ｅから吸入ガス腐食性ガ
スと共に排気される。この不活性ガスは、モーターのみ
ならず、軸受９Ａ，９Ｂ及び７も保護しながら排気口２
Ｅに流れてゆくので、これらの部材を腐食性ガスから保
護することができる。The flange 11 is provided with an introduction terminal 11B for introducing a motor power source capable of gas sealing and a hole 11A for introducing an inert gas. Motor rotor 10A,
When a gas that corrodes the motor stator 10B is taken in and exhausted, if an inert gas such as N 2 is introduced from the hole 11A at a pressure slightly higher than the atmospheric pressure, the inert gas will pass through the motor section. Exhaust gas is exhausted together with the corrosive gas from the exhaust port 2E. This inert gas protects not only the motor but also the bearings 9A, 9B and 7 and the exhaust port 2
Since they flow to E, these members can be protected from corrosive gas.
【００１０】固定スクロール２，３には水室２Ｆ，３Ｃ
を設けてスクロール部及びモーター部からの発熱を吸収
し、旋回スクロール１と固定スクロール２，３との半径
方向ギャップ等を適性に保つ。なお、空冷ファン等での
冷却も可能であるが、クリーンルーム内に設置する場合
には、雰囲気を乱さない水冷が好適である。扱う流体
が、半導体製造装置で用いるような腐食性の強いもので
ある場合には、旋回スクロール１及び固定スクロール
２，３の全部あるいは接ガス部をセラミックスで作る。
さらに、場合によっては接ガス部をセラミックコーティ
ングし、また、使用している軸受６Ａ，６Ｂ，６Ｃ，
７，９Ａ，９Ｂのすべてあるいは一部をグリース封入型
のセラミックス軸受とし、腐食性ガスに対する耐食性を
向上することもできる。なお、セラミックス軸受を使用
すれば、軸受寿命も長くなる。The fixed scrolls 2 and 3 have water chambers 2F and 3C, respectively.
Is provided to absorb heat generated from the scroll portion and the motor portion and appropriately maintain the radial gap between the orbiting scroll 1 and the fixed scrolls 2 and 3. Note that cooling with an air-cooling fan or the like is also possible, but when installing in a clean room, water cooling that does not disturb the atmosphere is suitable. When the fluid to be handled is one that is highly corrosive as used in a semiconductor manufacturing apparatus, the orbiting scroll 1 and the fixed scrolls 2 and 3 or the gas contact portions are made of ceramics.
Further, in some cases, the gas contact part is ceramic-coated, and the bearings 6A, 6B, 6C,
It is also possible to use all or part of 7, 9A, 9B as a grease-filled ceramic bearing to improve the corrosion resistance against corrosive gas. If a ceramic bearing is used, the bearing life will be extended.
【００１１】このような実施例によれば、下記の効果が
奏せられる。 （１）処理流体が有害ガスや爆発性ガスであっても、こ
のガスはケーシングから外部へ漏れることがなく、扱う
ガスをクリーンガスに限定されない真空ポンプが実現で
きる。 （２）モーターを内蔵しても、主軸は無理なく支承され
不具合が生じない。 （３）ケーシング内に不活性ガスを流すことにより、モ
ーター，軸受，偏心軸受等を腐食性の強いガスから保護
することができる。 （４）冷却水での冷却であれば、空冷ファンのように雰
囲気を乱すことがなく、半導体製造装置等のクリーンル
ームでの使用が可能となる。 （５）非常に腐食性の強いガスを流す場合には、セラミ
ックス部材の使用，セラミックスコーティング及びセラ
ミックス軸受の採用により、耐食性のある真空ポンプが
実現できる。 （６）上記のように半導体製造装置等では、近年特に油
回転式真空ポンプに代わるドライで安全な真空ポンプが
望まれており、その分野へ大きく寄与できる。According to such an embodiment, the following effects can be obtained. (1) Even if the processing fluid is a harmful gas or an explosive gas, this gas does not leak from the casing to the outside, and a vacuum pump in which the gas to be handled is not limited to a clean gas can be realized. (2) Even if a motor is built in, the spindle will be supported comfortably and no problems will occur. (3) By flowing an inert gas in the casing, the motor, bearing, eccentric bearing, etc. can be protected from highly corrosive gas. (4) Cooling with cooling water can be used in a clean room such as a semiconductor manufacturing apparatus without disturbing the atmosphere unlike an air cooling fan. (5) When a highly corrosive gas is passed, a vacuum pump having corrosion resistance can be realized by using a ceramic member, a ceramic coating and a ceramic bearing. (6) As described above, in the semiconductor manufacturing apparatus and the like, a dry and safe vacuum pump has recently been desired, which is an alternative to the oil rotary vacuum pump, and it can greatly contribute to the field.
【００１２】[0012]
【発明の効果】請求項１の発明によれば、主軸に支承さ
れ軸方向両面にそれぞれスクロール羽根を設けてなる旋
回スクロールと、前記スクロール羽根に両面からかみ合
せた前後１対の固定スクロールからなり、上記旋回スク
ロールを自転することなく公転可能に構成したスクロー
ル型流体機械において、前記主軸にモーターローターを
取り付け、同主軸がケーシング内に密封され、主軸の軸
方向位置を面シール自体で保つことにより、取扱う流体
が外部に漏れることがなく、毒性流体をも扱うことが可
能な安全かつ高効率のスクロール型流体機械を得るか
ら、本発明は産業上極めて有益なものである。According to the invention of claim 1, the orbiting scroll is supported by the main shaft and provided with scroll blades on both sides in the axial direction, and a pair of front and rear fixed scrolls engaged with the scroll blade from both sides. In a scroll type fluid machine configured to revolve the orbiting scroll without rotating, a motor rotor is attached to the main shaft, the main shaft is sealed in a casing, and the axial position of the main shaft is maintained by a surface seal itself. Since the fluid to be handled does not leak to the outside and a safe and highly efficient scroll type fluid machine capable of handling a toxic fluid is obtained, the present invention is extremely useful industrially.
【００１３】請求項２の発明によれば、ケーシング内に
不治性ガスを流す導入孔を付設したことにより、請求項
１の発明による効果のほか、モーターを強腐食性流体か
ら保護することができるので、本発明は産業上極めて有
益なものである。According to the second aspect of the present invention, by providing the introduction hole through which the incurable gas flows in the casing, in addition to the effect of the first aspect of the invention, the motor can be protected from the strongly corrosive fluid. Therefore, the present invention is extremely useful in industry.
【００１４】請求項３の発明によれば、旋回スクロー
ル，固定スクロール，軸受をそれぞれセラミックスでつ
くるか、あるいはその表面をそれぞれセラミックスコー
ティングすることにより、請求項１の発明による効果の
ほか、旋回スクロール，固定スクロール，軸受をそれぞ
れ強腐食性流体から保護することができるので、本発明
は産業上極めて有益なものである。According to the invention of claim 3, the orbiting scroll, the fixed scroll, and the bearing are made of ceramics or the surfaces thereof are respectively coated with ceramics. In addition to the effect of the invention of claim 1, the orbiting scroll, Since the fixed scroll and the bearing can be protected from the strongly corrosive fluid, the present invention is extremely useful in industry.
【図１】本発明の一実施例を示す縦断面図である。FIG. 1 is a vertical sectional view showing an embodiment of the present invention.
【図２】公知のスクロール型真空ポンプを示す縦断面図
である。FIG. 2 is a vertical sectional view showing a known scroll type vacuum pump.
１ 旋回スクロール １Ｂ 凹溝 ２ 固定スクロール ２Ａ 固定スクロール羽根 ２Ｂ 凹溝 ２Ｃ 支持台 ２Ｄ 吸気口 ２Ｅ 排気口 ２Ｆ 水室 ３ 固定スクロール ３Ａ 固定スクロール羽根 ３Ｂ 凹溝 ３Ｃ 水室 ４Ａ 面シール ４Ｂ バックアップばね ５ 主軸 ５Ａ クランク部 ６Ａ，６Ｂ，６Ｃ 軸受 ７ 軸受 ９Ａ，９Ｂ 軸受 ９Ｃ，９Ｄ 軸エール １０Ａ モーターローター １０Ｂ モーターステーター １１ フランジ １１Ａ 孔 １１Ｂ 導入端子 1 orbiting scroll 1B concave groove 2 fixed scroll 2A fixed scroll blade 2B concave groove 2C support base 2D intake port 2E exhaust port 2F water chamber 3 fixed scroll 3A fixed scroll blade 3B concave groove 3C water chamber 4A face seal 4B backup spring 5 spindle 5A Crank part 6A, 6B, 6C Bearing 7 Bearing 9A, 9B Bearing 9C, 9D Shaft Yale 10A Motor rotor 10B Motor stator 11 Flange 11A Hole 11B Introduction terminal
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.5 識別記号 庁内整理番号 ＦＩ 技術表示箇所 Ｆ０４Ｃ 29/00 Ｕ 6907−3Ｈ Ｓ 6907−3Ｈ ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 5 Identification number Office reference number FI technical display location F04C 29/00 U 6907-3H S 6907-3H
Claims (3)
クロール羽根を設けてなる旋回スクロールと、前記スク
ロール羽根に両面からかみ合せた前後１対の固定スクロ
ールからなり、上記旋回スクロールを自転することなく
公転可能に構成したスクロール型流体機械において、前
記主軸にモーターローターを取り付け、同主軸がケーシ
ング内に密封され、主軸の軸方向位置を面シール自体で
保つことを特徴とするスクロール型流体機械。1. An orbiting scroll supported by a main shaft and provided with scroll vanes on both axial surfaces, and a pair of front and rear fixed scrolls engaged with the scroll vanes from both sides, without rotating the orbiting scroll. A scroll-type fluid machine configured to be orbitable, wherein a motor rotor is attached to the main shaft, the main shaft is sealed in a casing, and the axial position of the main shaft is maintained by a face seal itself.
を付設したことを特徴とする請求項１のスクロール型流
体機械。2. The scroll type fluid machine according to claim 1, wherein an introduction hole for flowing an inert gas is provided in the casing.
をそれぞれセラミックスでつくるか、あるいはその表面
をそれぞれセラミックスコーティングすることを特徴と
する請求項１のスクロール型流体機械。3. The scroll type fluid machine according to claim 1, wherein the orbiting scroll, the fixed scroll and the bearing are made of ceramics or the surfaces thereof are coated with ceramics.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34020191A JPH05157076A (en) | 1991-11-29 | 1991-11-29 | Scroll type fluid machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34020191A JPH05157076A (en) | 1991-11-29 | 1991-11-29 | Scroll type fluid machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05157076A true JPH05157076A (en) | 1993-06-22 |
Family
ID=18334678
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP34020191A Withdrawn JPH05157076A (en) | 1991-11-29 | 1991-11-29 | Scroll type fluid machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05157076A (en) |
Cited By (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5556269A (en) * | 1994-03-18 | 1996-09-17 | Hitachi, Ltd. | Scroll-type compressor and method of assembling the same |
| US6439864B1 (en) * | 1999-01-11 | 2002-08-27 | Air Squared, Inc. | Two stage scroll vacuum pump with improved pressure ratio and performance |
| JP2003222088A (en) * | 2002-01-31 | 2003-08-08 | Kawasaki Precision Machinery Ltd | Oilless scroll compressor |
| JP2003227488A (en) * | 2002-02-04 | 2003-08-15 | Ishigaki Co Ltd | Full-water holding device for horizontal pump |
| JP2005163713A (en) * | 2003-12-04 | 2005-06-23 | Toyota Industries Corp | Fluid compressor |
| JP2007270696A (en) * | 2006-03-31 | 2007-10-18 | Hitachi Ltd | Positive displacement compressor |
| WO2019039575A1 (en) * | 2017-08-25 | 2019-02-28 | 三菱重工業株式会社 | Twin rotary scroll type compressor |
| US10508543B2 (en) | 2015-05-07 | 2019-12-17 | Air Squared, Inc. | Scroll device having a pressure plate |
| US10519815B2 (en) | 2011-08-09 | 2019-12-31 | Air Squared, Inc. | Compact energy cycle construction utilizing some combination of a scroll type expander, pump, and compressor for operating according to a rankine, an organic rankine, heat pump or combined organic rankine and heat pump cycle |
| US10683865B2 (en) | 2006-02-14 | 2020-06-16 | Air Squared, Inc. | Scroll type device incorporating spinning or co-rotating scrolls |
| US10865793B2 (en) | 2016-12-06 | 2020-12-15 | Air Squared, Inc. | Scroll type device having liquid cooling through idler shafts |
| US20210148360A1 (en) * | 2019-05-23 | 2021-05-20 | Zhejiang University | Oil-Free Scroll Air Compressor with Double Parallel Grooves on Both Sides |
| US11047389B2 (en) | 2010-04-16 | 2021-06-29 | Air Squared, Inc. | Multi-stage scroll vacuum pumps and related scroll devices |
| US11067080B2 (en) | 2018-07-17 | 2021-07-20 | Air Squared, Inc. | Low cost scroll compressor or vacuum pump |
| US11454241B2 (en) | 2018-05-04 | 2022-09-27 | Air Squared, Inc. | Liquid cooling of fixed and orbiting scroll compressor, expander or vacuum pump |
| US11473572B2 (en) | 2019-06-25 | 2022-10-18 | Air Squared, Inc. | Aftercooler for cooling compressed working fluid |
| US11530703B2 (en) | 2018-07-18 | 2022-12-20 | Air Squared, Inc. | Orbiting scroll device lubrication |
| US11885328B2 (en) | 2021-07-19 | 2024-01-30 | Air Squared, Inc. | Scroll device with an integrated cooling loop |
| US11898557B2 (en) | 2020-11-30 | 2024-02-13 | Air Squared, Inc. | Liquid cooling of a scroll type compressor with liquid supply through the crankshaft |
| US11933299B2 (en) | 2018-07-17 | 2024-03-19 | Air Squared, Inc. | Dual drive co-rotating spinning scroll compressor or expander |
-
1991
- 1991-11-29 JP JP34020191A patent/JPH05157076A/en not_active Withdrawn
Cited By (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5556269A (en) * | 1994-03-18 | 1996-09-17 | Hitachi, Ltd. | Scroll-type compressor and method of assembling the same |
| US6439864B1 (en) * | 1999-01-11 | 2002-08-27 | Air Squared, Inc. | Two stage scroll vacuum pump with improved pressure ratio and performance |
| JP2003222088A (en) * | 2002-01-31 | 2003-08-08 | Kawasaki Precision Machinery Ltd | Oilless scroll compressor |
| JP2003227488A (en) * | 2002-02-04 | 2003-08-15 | Ishigaki Co Ltd | Full-water holding device for horizontal pump |
| JP2005163713A (en) * | 2003-12-04 | 2005-06-23 | Toyota Industries Corp | Fluid compressor |
| US10683865B2 (en) | 2006-02-14 | 2020-06-16 | Air Squared, Inc. | Scroll type device incorporating spinning or co-rotating scrolls |
| JP2007270696A (en) * | 2006-03-31 | 2007-10-18 | Hitachi Ltd | Positive displacement compressor |
| US11047389B2 (en) | 2010-04-16 | 2021-06-29 | Air Squared, Inc. | Multi-stage scroll vacuum pumps and related scroll devices |
| US10519815B2 (en) | 2011-08-09 | 2019-12-31 | Air Squared, Inc. | Compact energy cycle construction utilizing some combination of a scroll type expander, pump, and compressor for operating according to a rankine, an organic rankine, heat pump or combined organic rankine and heat pump cycle |
| US10774690B2 (en) | 2011-08-09 | 2020-09-15 | Air Squared, Inc. | Compact energy cycle construction utilizing some combination of a scroll type expander, pump, and compressor for operating according to a rankine, an organic rankine, heat pump, or combined organic rankine and heat pump cycle |
| US10508543B2 (en) | 2015-05-07 | 2019-12-17 | Air Squared, Inc. | Scroll device having a pressure plate |
| US10865793B2 (en) | 2016-12-06 | 2020-12-15 | Air Squared, Inc. | Scroll type device having liquid cooling through idler shafts |
| US11692550B2 (en) | 2016-12-06 | 2023-07-04 | Air Squared, Inc. | Scroll type device having liquid cooling through idler shafts |
| WO2019039575A1 (en) * | 2017-08-25 | 2019-02-28 | 三菱重工業株式会社 | Twin rotary scroll type compressor |
| US11454241B2 (en) | 2018-05-04 | 2022-09-27 | Air Squared, Inc. | Liquid cooling of fixed and orbiting scroll compressor, expander or vacuum pump |
| US11067080B2 (en) | 2018-07-17 | 2021-07-20 | Air Squared, Inc. | Low cost scroll compressor or vacuum pump |
| US11933299B2 (en) | 2018-07-17 | 2024-03-19 | Air Squared, Inc. | Dual drive co-rotating spinning scroll compressor or expander |
| US11530703B2 (en) | 2018-07-18 | 2022-12-20 | Air Squared, Inc. | Orbiting scroll device lubrication |
| US20210148360A1 (en) * | 2019-05-23 | 2021-05-20 | Zhejiang University | Oil-Free Scroll Air Compressor with Double Parallel Grooves on Both Sides |
| US11578721B2 (en) * | 2019-05-23 | 2023-02-14 | Zhejiang University | Oil-free scroll air compressor with double parallel grooves on both sides |
| US11473572B2 (en) | 2019-06-25 | 2022-10-18 | Air Squared, Inc. | Aftercooler for cooling compressed working fluid |
| US12044226B2 (en) | 2019-06-25 | 2024-07-23 | Air Squared, Inc. | Liquid cooling aftercooler |
| US11898557B2 (en) | 2020-11-30 | 2024-02-13 | Air Squared, Inc. | Liquid cooling of a scroll type compressor with liquid supply through the crankshaft |
| US11885328B2 (en) | 2021-07-19 | 2024-01-30 | Air Squared, Inc. | Scroll device with an integrated cooling loop |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19990204 |