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JPH05129108A - Manufacture of varistor - Google Patents

Manufacture of varistor

Info

Publication number
JPH05129108A
JPH05129108A JP3315382A JP31538291A JPH05129108A JP H05129108 A JPH05129108 A JP H05129108A JP 3315382 A JP3315382 A JP 3315382A JP 31538291 A JP31538291 A JP 31538291A JP H05129108 A JPH05129108 A JP H05129108A
Authority
JP
Japan
Prior art keywords
varistor
manufacturing
temperature
reducing atmosphere
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3315382A
Other languages
Japanese (ja)
Other versions
JP2990627B2 (en
Inventor
Kazuyoshi Nakamura
和敬 中村
Yasunobu Yoneda
康信 米田
Koji Hattori
康次 服部
Kenjirou Mihara
賢二良 三原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP3315382A priority Critical patent/JP2990627B2/en
Publication of JPH05129108A publication Critical patent/JPH05129108A/en
Application granted granted Critical
Publication of JP2990627B2 publication Critical patent/JP2990627B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Thermistors And Varistors (AREA)

Abstract

PURPOSE:To provide the method for manufacturing a varistor by which life characteristics and a surge resistance can be increased, the manufacturing process can be shortened and the productivity can be increased. CONSTITUTION:When manufacturing a varistor by heating and baking a ceramic compact to form a sintered body and then diffusing a univalent metal oxide or a chemical compound into the sintered body, the temperature of the compact is increased to 1000 deg.C-1450 deg.C in the air and then the air is replaced with a reducing atmosphere and the compact is kept in the reducing atmosphere for 30 minutes or over.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、例えばノイズ吸収素子
として採用されるSrTiO3 系バリスタの製造方法に
関し、特に寿命特性,及びサージ耐量を向上できるとと
もに、製造工程を短縮して生産性を向上できるようにし
た製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an SrTiO 3 varistor, which is used as a noise absorbing element, and in particular, it can improve the life characteristics and surge resistance and shorten the manufacturing process to improve the productivity. The present invention relates to a manufacturing method made possible.

【0002】[0002]

【従来の技術】電圧非直線性特性を利用してノイズを吸
収するようにしたSrTiO3 系バリスタは、主成分と
してSrTiO3 及びSrを一部Ca,Baと置換して
なるペロブスカイト系多結晶焼結体を電子価制御や還元
焼成により半導体化し、これにNa,K,あるいはLi
のような1価金属酸化物又はそれらの化合物を拡散させ
ることによってセラミックの結晶粒界に電気的障壁を形
成し、これにより高い誘電率とバリスタ特性を得てい
る。このようなバリスタを製造する場合、従来、セラミ
ック成形体を空気中で焼成してバインダを燃焼させた
後、昇温保持し、この後冷却し、これを還元性雰囲気中
で再度焼成して焼結体を形成する。この後、焼結体に金
属酸化剤を塗布し、これを熱処理することによってこの
酸化剤を拡散させる。
2. Description of the Related Art A SrTiO 3 varistor designed to absorb noise by utilizing a voltage non-linear characteristic is a perovskite polycrystal calcination obtained by partially replacing SrTiO 3 and Sr as main components with Ca and Ba. The compound is converted into a semiconductor by controlling the electron valence and reducing firing, and Na, K, or Li is added to this.
By diffusing a monovalent metal oxide or a compound thereof as described above, an electric barrier is formed at the crystal grain boundaries of the ceramic, and thereby high dielectric constant and varistor characteristics are obtained. In the case of manufacturing such a varistor, conventionally, a ceramic molded body is fired in air to burn a binder, then kept at a temperature rise, then cooled, and then fired again in a reducing atmosphere for firing. Form a union. After that, a metal oxidant is applied to the sintered body and heat-treated to diffuse the oxidant.

【0003】[0003]

【発明が解決しようとする課題】しかしながら上記従来
の製造方法により得られるバリスタでは、電気的特性が
劣化し易く、寿命特性が低いとともに、サージ耐量が小
さいという問題点がある。これは、結晶粒界に拡散した
1価金属酸化物や化合物はイオン化傾向が高いことから
安定性に劣り、しかもこれらを拡散させた後も環境の変
化やバイアスによってイオン化し易いことから粒界の電
気的障壁が変化し、その結果電気的特性の劣化につなが
っており、この点での改善が要請されている。また、上
記従来の製造方法では、成形体を空気中で焼成してバイ
ンダを燃焼させる工程と、還元性雰囲気中で再度焼成す
る工程との2工程を必要としていることから、生産性が
低く、コストが上昇するという問題点もある。
However, the varistor obtained by the above-mentioned conventional manufacturing method has problems that the electrical characteristics are easily deteriorated, the life characteristics are short, and the surge resistance is small. This is because the monovalent metal oxides or compounds diffused in the crystal grain boundaries have poor ion stability and are therefore inferior in stability, and even after they are diffused, they are likely to be ionized due to environmental changes or biases. The electrical barrier is changed, resulting in deterioration of electrical characteristics, and improvement in this respect is required. In addition, in the above-described conventional manufacturing method, since the two steps of the step of firing the molded body in air to burn the binder and the step of firing it again in a reducing atmosphere are required, the productivity is low, There is also the problem of increased costs.

【0004】本発明は上記従来の状況に鑑みてなされた
もので、寿命特性,及びサージ耐量を改善できるととも
に、製造工程を短縮して生産性を向上できるバリスタの
製造方法を提供することを目的としている。
The present invention has been made in view of the above conventional circumstances, and an object of the present invention is to provide a method of manufacturing a varistor, which can improve the life characteristics and surge withstand capability and shorten the manufacturing process to improve the productivity. I am trying.

【0005】[0005]

【課題を解決するための手段】本件発明者らは、寿命特
性やサージ耐量の低下が生じる原因について検討したと
ころ、セラミック成形体の焼成プロセスに関係している
ことを見出した。即ち、上記成形体を空気中で一旦焼成
した後、冷却し、この後還元雰囲気で再度焼成して焼結
体を得るという従来の工程では、粒子が異常成長して粒
径にばらつきが生じ易く、その結果サージ耐量が低下す
るとともに、上記焼結体の粒界への金属酸化物の拡散が
スムーズに行われず、かつ酸素の供給が不十分となって
いる。このような問題を解消するためにさらに検討を重
ねたところ、空気中にて昇温焼結する途中で還元性雰囲
気に置換することによって、上述の問題点を改善できる
ことに想到し、本発明を成したものである。そこで本発
明は、セラミック成形体を加熱焼成して焼結体を形成
し、該焼結体に1価金属酸化物又は化合物を拡散させる
ことによって電圧非直線性特性を得るようにしたバリス
タの製造方法において、上記成形体を、空気中で1000℃
〜1450℃まで昇温し、この後還元性雰囲気に置換して30
分以上保持したことを特徴としている。ここで、上記30
分以上としたのは、この時間より短くすると還元が十分
にできず、サージ耐量の改善効果が得られなくなるから
である。また上記空気中にて昇温する場合、一旦200 〜
600 ℃で30分以上保持するのが望ましい。さらにまた、
本発明の製造方法は、単板状,角板状のバリスタ,ある
いはセラミック層と内部電極とを交互に積層してなる積
層型バリスタ等に適用でき、特に限定するものではな
い。
Means for Solving the Problems The inventors of the present invention have investigated the cause of the deterioration of the life characteristics and surge withstand capability, and have found that it is related to the firing process of the ceramic molded body. That is, in the conventional process in which the molded body is once fired in the air, cooled, and then fired again in a reducing atmosphere to obtain a sintered body, particles are abnormally grown and the particle size is likely to vary. As a result, the surge resistance is lowered, the metal oxide is not smoothly diffused to the grain boundaries of the sintered body, and the oxygen supply is insufficient. As a result of further studies to solve such a problem, it was conceived that the above problems can be improved by substituting a reducing atmosphere in the middle of temperature-elevated sintering in air, and the present invention is realized. It was made. Therefore, the present invention is directed to the production of a varistor in which a ceramic molded body is heated and fired to form a sintered body, and a voltage non-linear characteristic is obtained by diffusing a monovalent metal oxide or compound into the sintered body. In the method, the molded body is heated to 1000 ° C in air.
The temperature is raised to ~ 1450 ° C, and then replaced with a reducing atmosphere for 30
It is characterized by holding for more than a minute. Where the above 30
The reason for setting the time longer than this is that if the time is shorter than this time, the reduction cannot be sufficiently performed and the effect of improving the surge resistance cannot be obtained. If the temperature is raised in the above air, once 200-
It is desirable to keep at 600 ℃ for 30 minutes or more. Furthermore,
The manufacturing method of the present invention can be applied to a single-plate or square-plate varistor, a laminated varistor in which ceramic layers and internal electrodes are alternately laminated, or the like, and is not particularly limited.

【0006】[0006]

【作用】本発明に係るバリスタの製造方法によれば、空
気中で1000℃〜1450℃まで昇温した後、還元性雰囲気に
置換したので、これにより結晶粒子の異常成長を抑制し
て粒径を均一化でき、しかも結晶粒界に適度なポアが発
生することから、金属酸化物の拡散をスムーズに行うこ
とができるとともに、酸素を十分に供給することができ
る。その結果、結晶粒内の抵抗が低下することから、サ
ージ耐量を向上でき、しかも金属酸化物の反応性が高ま
って安定化することから、電気的特性の劣化を回避で
き、寿命特性を向上できる。また、本発明の製造方法で
は、空気中にて昇温焼結する途中で還元性雰囲気に置換
したので、1つの工程で済むことから、従来の2工程必
要であった場合に比べて生産性を向上できるとともに、
コストを低減できる。
According to the method of manufacturing a varistor according to the present invention, after the temperature was raised to 1000 ° C to 1450 ° C in the air, the atmosphere was replaced with a reducing atmosphere. Can be made uniform, and appropriate pores are generated at the crystal grain boundaries, so that the metal oxide can be smoothly diffused and oxygen can be sufficiently supplied. As a result, the resistance in the crystal grains is reduced, so that the surge resistance can be improved, and since the reactivity of the metal oxide is increased and stabilized, the deterioration of electrical characteristics can be avoided and the life characteristics can be improved. .. Further, in the manufacturing method of the present invention, since the reducing atmosphere is substituted during the temperature-elevated sintering in the air, only one step is required. Therefore, the productivity is higher than that in the case where two conventional steps are required. While improving
The cost can be reduced.

【0007】[0007]

【実施例】以下、本発明の実施例を図について説明す
る。図1は本発明の一実施例によるバリスタの製造方法
を説明するための図である。本実施例では、本発明の製
造方法によりバリスタを作成し、これの効果を確認する
ために行った試験について説明する。まず、本実施例の
バリスタの製造方法について説明する。SrCO3 ,C
aCO3 ,TiO2 ,及びEr2 3 の各原料粉をそれ
ぞれSr0.9 Ca0.1 Er0.003 TiO3 となるよう配
合し、これに純水を加えてボールミルで混合する。これ
をフィルタで脱水,乾燥させるとともに、メッシュで造
粒した後、1200℃で2時間仮焼成する。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram for explaining a varistor manufacturing method according to an embodiment of the present invention. In this example, a test performed to confirm the effect of a varistor produced by the manufacturing method of the present invention will be described. First, a method for manufacturing the varistor of this embodiment will be described. SrCO 3 , C
Raw material powders of aCO 3 , TiO 2 , and Er 2 O 3 are mixed so as to be Sr 0.9 Ca 0.1 Er 0.003 TiO 3, and pure water is added thereto and mixed by a ball mill. This is dehydrated and dried with a filter, granulated with a mesh, and then calcined at 1200 ° C for 2 hours.

【0008】次に、上記仮焼成体を乾式粉砕した後、こ
の仮焼成粉末にSiO2 を0.5 wt%の割合で添加し、こ
れにポリビニルアルコールをバインダとして5%加え、
さらに純水を加えてボールミルで混合してスラリーを形
成する。次いで、このスラリーをスプレードライヤで乾
燥,造粒し、この造粒粉からプレスにより2ton/cm2
圧力を加えて直径10mmφ, 厚さ1.5mm φのセラミック成
形体を形成する。
Next, after dry pulverizing the calcinated body, SiO 2 is added to the calcinated powder at a rate of 0.5 wt%, and polyvinyl alcohol is added as a binder in an amount of 5%.
Further, pure water is added and mixed by a ball mill to form a slurry. Then, this slurry is dried and granulated by a spray dryer, and a pressure of 2 ton / cm 2 is applied from the granulated powder by a press to form a ceramic compact having a diameter of 10 mmφ and a thickness of 1.5 mmφ.

【0009】そして、上記成形体を、図1に示す焼成パ
ターンに沿って加熱焼成する。まず、空気中にて200 〜
600 ℃のTa温度まで4℃/minの昇温速度で加熱し、2
時間保持してバインダを燃焼する。続いて、同じく空気
中にて4℃/minの昇温速度で1000〜1450℃のTc温度ま
で加熱し、このTc温度に達した時点で還元性雰囲気に
置換する。この還元性雰囲気中にて1350〜1450℃のTb
温度まで、0 〜100minのtA時間をかけて加熱する。続
いて、上記Tb温度に達した時点で30〜120minのtB時
間保持し、しかる後冷却して焼結体を得る。なお、上記
Tc温度=Tb温度の場合、tA時間はTc温度に達し
てから空気中で保持する時間となる。
Then, the molded body is heated and fired according to the firing pattern shown in FIG. First, in the air 200 ~
Heat to a Ta temperature of 600 ° C at a heating rate of 4 ° C / min, and
Hold the time and burn the binder. Subsequently, it is also heated in air at a temperature rising rate of 4 ° C./min to a Tc temperature of 1000 to 1450 ° C., and when this Tc temperature is reached, the atmosphere is replaced with a reducing atmosphere. Tb at 1350 to 1450 ℃ in this reducing atmosphere
Heat to temperature over a tA time of 0-100 min. Subsequently, when the temperature reaches the above Tb temperature, it is held for 30 hours to 120 minutes for tB, and then cooled to obtain a sintered body. When the above Tc temperature = Tb temperature, the tA time is the time for holding in the air after reaching the Tc temperature.

【0010】次に、Na2 CO3 ,TiO2 を2:1の
mol 比で混合してなる粉末にワニスを加えてペースト状
の金属酸化剤を形成し、この酸化剤を上記焼結体に1wt
%塗布し、1200℃で3時間熱処理を施す。これにより上
記酸化剤が焼結体の結晶粒界に拡散されて電気的障壁が
形成されることとなる。
Next, Na 2 CO 3 and TiO 2 were added in a ratio of 2: 1.
Add varnish to the powder mixed in mol ratio to form a paste-like metal oxidizer, and add 1 wt% of this oxidizer to the above sintered body.
%, And heat treated at 1200 ° C. for 3 hours. As a result, the oxidizer is diffused into the crystal grain boundaries of the sintered body to form an electrical barrier.

【0011】このようにして得られた焼結体の両主面に
直径7mmφのAgペーストを塗布し、これを800 ℃で10
分間焼き付けて電極を形成する。これにより本実施例の
ディスク型バリスタが製造される。
On both principal surfaces of the thus obtained sintered body, Ag paste having a diameter of 7 mm is applied, and the paste is applied at 800 ° C. for 10 minutes.
Bake for minutes to form electrodes. As a result, the disc type varistor of this embodiment is manufactured.

【0012】[0012]

【表1】 [Table 1]

【0013】[0013]

【表2】 [Table 2]

【0014】表1及び表2は、上記製造方法により得ら
れたバリスタの効果を確認するために行った試験結果を
示す。この試験は、表1に示すように、Ta温度を500
℃とし、Tc温度,及びTb温度をそれぞれ1000〜1450
℃, 及び1350〜1450℃の範囲で変化させ、さらにtA時
間, 及びtB時間をそれぞれ0〜100 分, 及び30〜120
分の範囲で変化させて本実施例試料No. 1〜No. 9を作
成した。そして、この各試料No. 1〜9の静電容量,t
anδ,バリスタ電圧,非直線係数を測定した。また、
2000A サージ後のバリスタ電圧の変化率を測定した。こ
の2000A サージは8×20μsec の三角電流波を5分間隔
で2回印加し、印加前と印加後の特性を比較した。さら
に、150 ℃の温度でバリスタ電圧の85%の直流電圧を10
0 時間印加し、この負荷前後のバリスタ電圧, 及び静電
容量の変化率を測定した。また、比較するために還元性
雰囲気中での保持時間,つまりTb時間を10,20分とし
た比較試料No. 10,No. 11を作成した。さらに、従
来の製造方法による従来試料Mを作成し、これらについ
ても同様の測定を行った。なお、この従来試料Mは、空
気中にて500 ℃で2時間加熱してバインダを燃焼させ、
さらに1200℃で2時間焼成して冷却し、この後還元性雰
囲気中にて再度1400℃で2時間焼成した。
Tables 1 and 2 show the results of tests conducted to confirm the effect of the varistor obtained by the above manufacturing method. This test was conducted at a Ta temperature of 500 as shown in Table 1.
℃, Tc temperature and Tb temperature are 1000 to 1450 respectively
℃, and 1350 〜 1450 ℃ range, tA time, and tB time 0 to 100 minutes, and 30 to 120, respectively
Samples No. 1 to No. 9 of this example were prepared by changing the range of minutes. Then, the capacitance of each of the sample Nos. 1 to 9, t
An δ, varistor voltage, and nonlinear coefficient were measured. Also,
The change rate of varistor voltage after 2000A surge was measured. For this 2000A surge, a triangular current wave of 8 × 20 μsec was applied twice at 5-minute intervals, and the characteristics before and after application were compared. Furthermore, at a temperature of 150 ° C, a DC voltage of 85% of the varistor voltage is
After applying for 0 hours, the varistor voltage before and after this load and the rate of change of capacitance were measured. Further, for comparison, Comparative Samples No. 10 and No. 11 in which the holding time in the reducing atmosphere, that is, Tb time was set to 10 and 20 minutes, were prepared. Furthermore, a conventional sample M was prepared by a conventional manufacturing method, and the same measurement was performed for these. The conventional sample M was heated in air at 500 ° C. for 2 hours to burn the binder,
Further, it was baked at 1200 ° C. for 2 hours and cooled, and then again baked at 1400 ° C. for 2 hours in a reducing atmosphere.

【0015】表2からも明らかなように、従来試料Mの
場合、2000A サージ後のバリスタ電圧の変化率は−7.6
%と大きく、150 ℃/100時間後のバリスタ電圧, 静電容
量の変化率はそれぞれ−2.3 %, −13.4%と大きく、サ
ージ耐量, 寿命特性とも満足できる値が得られていな
い。一方、比較試料No. 10, No. 11の場合は、還元
性雰囲気での保持時間が短いことから還元が不十分とな
り、バリスタ電圧の変化率が−9.6 %,13.6 %と大きく
なっている。これに対して本実施例試料No. 1〜No. 9
の場合は、いずれも2000A サージ後のバリスタ電圧の変
化率が−2.3 〜+1.0 %と小さく、また150 ℃/100時間
後のバリスタ電圧, 静電容量の変化率はそれぞれ+2.1
〜+0.7 %, −5.6 〜−1.6 %と小さくなっており、こ
のことからも空気中における昇温焼成の途中で還元性雰
囲気に置換することによって、サージ耐量, 寿命特性と
も向上できることがわかる。
As is clear from Table 2, in the case of the conventional sample M, the change rate of the varistor voltage after the 2000 A surge was -7.6.
%, The rate of change in varistor voltage and capacitance after 150 ° C / 100 hours is large at -2.3% and -13.4%, respectively, and values that satisfy surge resistance and life characteristics have not been obtained. On the other hand, in the case of Comparative Samples No. 10 and No. 11, the reduction was insufficient due to the short holding time in the reducing atmosphere, and the change rate of the varistor voltage was large at -9.6% and 13.6%. On the other hand, sample Nos. 1 to 9 of this example
In both cases, the change rate of varistor voltage after 2000A surge was small at -2.3 to + 1.0%, and the change rate of varistor voltage and capacitance after 150 ° C / 100 hours were + 2.1% respectively.
It is as small as ~ + 0.7%, -5.6 ~ -1.6%. From this, it can be seen that the surge withstand capability and life characteristics can be improved by substituting a reducing atmosphere during the heating process in air. ..

【0016】[0016]

【発明の効果】以上のように本発明に係るバリスタの製
造方法によれば、セラミック成形体を、空気中で1000℃
〜1450℃まで昇温した後、還元性雰囲気に置換して30分
以上保持するようにしたので、粒径を均一化できるとと
もに、結晶粒界に適度なポアを形成でき、その結果サー
ジ耐量を向上できるとともに、電気的特性の劣化を回避
して寿命特性を向上できる効果があり、さらに1工程で
済むことから、生産性を向上できるとともに、コストを
低減できる効果がある。
As described above, according to the varistor manufacturing method of the present invention, the ceramic molded body is heated to 1000 ° C. in air.
After heating up to ~ 1450 ° C, it was replaced with a reducing atmosphere and held for 30 minutes or more, so that the grain size can be made uniform and appropriate pores can be formed at the grain boundaries, resulting in a surge withstand capability. In addition to the effects of improving electrical characteristics, life characteristics can be improved by avoiding deterioration of electrical characteristics. Further, since only one step is required, productivity can be improved and cost can be reduced.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例によるバリスタの製造方法に
おける焼成パターンを説明するための特性図である。
FIG. 1 is a characteristic diagram for explaining a firing pattern in a varistor manufacturing method according to an embodiment of the present invention.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 三原 賢二良 京都府長岡京市天神2丁目26番10号 株式 会社村田製作所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Kenjira Mihara 2-26-10 Tenjin Tenjin, Nagaokakyo, Kyoto Prefecture Murata Manufacturing Co., Ltd.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 セラミック成形体を加熱焼成して焼結体
を形成し、該焼結体に1価金属酸化物又は化合物を拡散
させることによって電圧非直線特性を得るようにしたバ
リスタの製造方法において、上記成形体を、空気中で10
00℃〜1450℃まで昇温し、この後還元性雰囲気に置換し
て30分以上保持したことを特徴とするバリスタの製造方
法。
1. A method of manufacturing a varistor in which a voltage non-linear characteristic is obtained by forming a sintered body by heating and firing a ceramic molded body and diffusing a monovalent metal oxide or compound into the sintered body. In the above,
A method for producing a varistor, which comprises heating to 00 ° C to 1450 ° C, replacing the atmosphere with a reducing atmosphere, and holding the atmosphere for 30 minutes or more.
JP3315382A 1991-11-01 1991-11-01 Varistor manufacturing method Expired - Fee Related JP2990627B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3315382A JP2990627B2 (en) 1991-11-01 1991-11-01 Varistor manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3315382A JP2990627B2 (en) 1991-11-01 1991-11-01 Varistor manufacturing method

Publications (2)

Publication Number Publication Date
JPH05129108A true JPH05129108A (en) 1993-05-25
JP2990627B2 JP2990627B2 (en) 1999-12-13

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP3315382A Expired - Fee Related JP2990627B2 (en) 1991-11-01 1991-11-01 Varistor manufacturing method

Country Status (1)

Country Link
JP (1) JP2990627B2 (en)

Also Published As

Publication number Publication date
JP2990627B2 (en) 1999-12-13

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