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JPH05126805A - Phase velocity curve measuring method and its measuring device - Google Patents

Phase velocity curve measuring method and its measuring device

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Publication number
JPH05126805A
JPH05126805A JP3286729A JP28672991A JPH05126805A JP H05126805 A JPH05126805 A JP H05126805A JP 3286729 A JP3286729 A JP 3286729A JP 28672991 A JP28672991 A JP 28672991A JP H05126805 A JPH05126805 A JP H05126805A
Authority
JP
Japan
Prior art keywords
frequency
velocity
ultrasonic
subject
ultrasonic wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3286729A
Other languages
Japanese (ja)
Other versions
JP2626361B2 (en
Inventor
Yukimichi Iizuka
幸理 飯塚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Engineering Corp
Original Assignee
NKK Corp
Nippon Kokan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NKK Corp, Nippon Kokan Ltd filed Critical NKK Corp
Priority to JP3286729A priority Critical patent/JP2626361B2/en
Publication of JPH05126805A publication Critical patent/JPH05126805A/en
Application granted granted Critical
Publication of JP2626361B2 publication Critical patent/JP2626361B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

(57)【要約】 【目的】 本発明は、超音波探触子を含む測定系の構成
を簡単に実現し、かつ、一回の超音波励起検出だけで被
検体の速度分散性超音波の位相速度曲線を正確に測定す
ることにある。 【構成】 速度分散性を有する被検体11に対し、適宜
な入射角で超音波を入射し、かつ、前記被検体中を伝搬
してくる超音波を超音波探触子で受信する手段12b,
13b,17と、この受信信号に対して周波数特性補正
を行うフィルタ19と、この周波数特性補正後の速度分
散性超音波信号の周波数スペクトラムを求める周波数解
析手段20と、この周波数スペクトラムに現れるピーク
の周波数からピーク周波数を求める周波数検出手段21
と、このピーク周波数から位相速度曲線測定手段22と
を備えた位相速度曲線測定装置である。
(57) [Summary] [Object] The present invention easily realizes a configuration of a measurement system including an ultrasonic probe, and detects velocity dispersive ultrasonic waves of an object by only one ultrasonic excitation detection. Accurately measuring the phase velocity curve. A means 12b for injecting ultrasonic waves into a subject 11 having velocity dispersion at an appropriate incident angle and receiving ultrasonic waves propagating in the subject with an ultrasonic probe.
13b and 17, a filter 19 that corrects the frequency characteristic of the received signal, a frequency analysis unit 20 that obtains the frequency spectrum of the velocity dispersive ultrasonic signal after the frequency characteristic correction, and a peak that appears in this frequency spectrum. Frequency detecting means 21 for obtaining the peak frequency from the frequency
And a phase velocity curve measuring device 22 based on this peak frequency.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、各種の板体や層状媒体
などの材料(以下、被検体と総称する)中を伝搬する速
度分散性超音波の位相速度曲線を測定し、かつ、この位
相速度曲線を利用して当該被検体の特性例えば弾性定数
などを測定する位相速度曲線測定法およびその測定装置
に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention measures the phase velocity curve of velocity dispersive ultrasonic waves propagating in various materials such as plates and layered media (collectively referred to as "subjects" hereinafter), and The present invention relates to a phase velocity curve measuring method for measuring a characteristic of an object, for example, an elastic constant using a phase velocity curve, and a measuring apparatus therefor.

【0002】[0002]

【従来の技術】一般に、圧延鋼板製造ラインを移動する
圧延鋼板その他の種々の板体,層状媒体などの被検体に
超音波を入射したとき、その被検体中を伝搬する超音波
は速度分散性を有しているが、この速度分散性は板厚,
周波数および位相速度と一定の関係をもっている。すな
わち、この速度分散性とは、ある板厚,ある位相速度の
とき、ある周波数でしか伝搬しないという性質をもって
いることをいう。
2. Description of the Related Art Generally, when an ultrasonic wave is incident on an object to be inspected, such as a rolled steel sheet or other various plates or a layered medium moving in a rolled steel sheet production line, the ultrasonic wave propagating in the object is velocity dispersive. However, this velocity dispersibility has a plate thickness,
It has a certain relationship with frequency and phase velocity. That is, the velocity dispersibility means that it has the property of propagating only at a certain frequency at a certain plate thickness and a certain phase velocity.

【0003】例えば図4はかかる関係を表す位相速度曲
線を示す図であって、その横軸は板厚dと周波数fとの
積(以下、fd値と呼ぶ)、縦軸は位相速度、θi は超
音波の入射角を示している。つまり、この図4には位相
速度曲線が示されているが、速度分散性超音波はかかる
曲線近傍で伝搬する。なお、この速度分散性超音波には
複数種類あり、板体を伝搬する板波またはラム波と、層
状媒体の薄い層を伝搬するラブ波とが代表的なものであ
る。
For example, FIG. 4 is a diagram showing a phase velocity curve representing such a relationship, the horizontal axis of which is the product of the plate thickness d and the frequency f (hereinafter referred to as the fd value), and the vertical axis is the phase velocity, θi. Indicates the incident angle of ultrasonic waves. That is, although the phase velocity curve is shown in FIG. 4, the velocity dispersive ultrasonic wave propagates in the vicinity of this curve. There are plural kinds of velocity dispersive ultrasonic waves, and a plate wave or a Lamb wave propagating in a plate body and a Love wave propagating in a thin layer of a layered medium are typical.

【0004】しかして、以上のような位相速度曲線は、
被検体の弾性定数によって位置が異なるので、この位相
速度曲線を求めることにより被検体の弾性定数を測定で
きる。今、例えば弾性等方体である被検体の板波の位相
速度曲線としては下記する(1)式および(2)式で表
されるので、実際に位相速度曲線を測定した後、この
(1)式および(2)式を用いて縦波音速CLと横波音
速CSを求めることにより、(3)式および(4)式か
ら板体の弾性定数を求めることができる。 tan(K1b )/tan(K2b ) =−(KP2 −K22 2 /(4KP2 K1K2)…(1) tan(K1b )/tan(K2b ) =−(4KP2 K1K2)/(KP2 −K22 2 …(2) 但し、K1={(ω/CL)2 −(ω/CP)2 1/2 K2={(ω/CS)2 −(ω/CP)2 1/2 ω=2πf(ω:角周波数,f:周波数) b=d/2(d:板厚) CL:縦波音速、CS:横波音速、CP:位相速度、KP=ω/CP E=μ(3λ+2μ)/(λ+μ) ……(3) σ=λ/{2(λ+μ)} ……(4) 但し、Eはヤング率、σはポアソン比、λ=ρCL2 −2
ρCS2 、μ=ρCS2 、ρは密度である。
However, the above phase velocity curve is
Since the position varies depending on the elastic constant of the subject, this phase
The elastic constant of the object can be measured by obtaining the velocity curve.
Wear. Now, for example, the phase of the plate wave of the subject, which is an elastic isotropic body
The speed curve is expressed by the following equations (1) and (2).
Therefore, after actually measuring the phase velocity curve, this
The longitudinal wave sound velocity CL and the transverse wave sound are calculated using the equations (1) and (2).
Equation (3) and (4) can be obtained by determining the speed CS.
The elastic constant of the plate can be obtained. tan (K1b) / tan (K2b) =-(KP2 −K22 )2 / (4KP2 K1K2) ... (1) tan (K1b) / tan (K2b) =-(4KP2 K1K2) / (KP2 −K22 )2 (2) However, K1 = {(ω / CL)2 − (Ω / CP)2 }1/2  K2 = {(ω / CS)2 − (Ω / CP)2 }1/2  ω = 2πf (ω: angular frequency, f: frequency) b = d / 2 (d: plate thickness) CL: longitudinal wave sound velocity, CS: transverse wave sound velocity, CP: phase velocity, KP = ω / CP E = μ (3λ + 2μ ) / (Λ + μ) ・ ・ ・ (3) σ = λ / {2 (λ + μ)} ・ ・ ・ (4) where E is Young's modulus, σ is Poisson's ratio, and λ = ρCL2 -2
ρCS2 , Μ = ρCS2 , Ρ is the density.

【0005】ところで、従来、接触式超音波探触子を用
いて速度分散性超音波を励起検出するに際し、図10に
示すような原理構成のものが採用されている。同図にお
いて、1aは超音波励起用探触子、1bは超音波検出用
探触子、2a,2bはくさび、3は被検体、4は発振
器、5は電圧計である。これら超音波励起用探触子1a
による超音波入射角と超音波検出用探触子1bの超音波
受信角とは同じθi に設定される。さらに、同図では2
個の探触子を使う透過法の原理を示したが、1個の探触
子を用いた反射法でも原理的には同じである。
By the way, heretofore, in the case of exciting and detecting velocity dispersive ultrasonic waves using a contact type ultrasonic probe, a principle structure as shown in FIG. 10 has been adopted. In the figure, 1a is an ultrasonic wave excitation probe, 1b is an ultrasonic wave detection probe, 2a and 2b are wedges, 3 is a subject, 4 is an oscillator, and 5 is a voltmeter. These ultrasonic wave excitation probes 1a
The angle of incidence of the ultrasonic wave due to and the angle of reception of the ultrasonic wave of the ultrasonic wave detecting probe 1b are set to the same θi. Furthermore, in the figure, 2
The principle of the transmission method using one probe is shown, but the principle is the same for the reflection method using one probe.

【0006】従って、以上のような接触式超音波探触子
を用いたものでは、位相速度と超音波の入射角とは一定
の関係をもっているので、超音波の周波数と入射角との
関係を求めることにより、fd値と位相速度の関係を求
めることができる。
Therefore, in the above-mentioned contact type ultrasonic probe, since the phase velocity and the incident angle of the ultrasonic wave have a constant relationship, the relationship between the frequency of the ultrasonic wave and the incident angle is shown. By obtaining it, the relationship between the fd value and the phase velocity can be obtained.

【0007】そこで、従来、かかる原理構成を用いてf
d値と位相速度との関係を求める方法として、次の2つ
の方法を見い出した特許出願が提案されている(特公昭
63−29220号公報)。
Therefore, conventionally, by using such a principle configuration, f
As a method for obtaining the relationship between the d value and the phase velocity, a patent application has been proposed which has found the following two methods (Japanese Patent Publication No. 63-29220).

【0008】その第1の方法は、超音波の周波数を一定
にした状態で超音波の入射角を可変とする方法である。
具体的には、発振器4の周波数を一定とした状態で超音
波の入射角を可変しながら超音波を被検体3に入射し、
このとき被検体3を伝搬されてくる速度分散性超音波を
検出しその検出強度を電圧計5で測定する。
The first method is a method in which the incident angle of ultrasonic waves is variable while the frequency of ultrasonic waves is constant.
Specifically, while the frequency of the oscillator 4 is constant, the ultrasonic wave is incident on the subject 3 while changing the incident angle of the ultrasonic wave,
At this time, velocity dispersive ultrasonic waves propagating through the subject 3 are detected, and the detected intensity is measured by the voltmeter 5.

【0009】このようにして超音波の入射角と被検体中
を伝搬する速度分散性超音波の強度との関係を調べる
と、その周波数に対応した位相速度すなわち入射角の時
に強度が最大になる。そこで、速度分散性超音波の強度
が最大になる入射角θi を用いて下記する(5)式から
位相速度CPを求めることにより、fd値と位相速度CPと
の関係を求めることができる。 CP=CW/sinθi ……(5) 但し、CWはくさび2a,2bの音速を表す。
When the relationship between the incident angle of the ultrasonic wave and the intensity of the velocity dispersive ultrasonic wave propagating in the subject is examined in this way, the intensity becomes maximum at the phase velocity corresponding to the frequency, that is, at the incident angle. .. Therefore, the relationship between the fd value and the phase velocity CP can be obtained by obtaining the phase velocity CP from the following equation (5) using the incident angle θi that maximizes the intensity of the velocity dispersive ultrasonic wave. CP = CW / sin θi (5) where CW represents the speed of sound of the wedges 2a and 2b.

【0010】第2の方法は、第1の方法とは全く逆の方
法であって、超音波の入射角を一定にした状態で周波数
を可変する方法である。すなわち、この方法は、超音波
の入射角を一定とした状態で発振器4の周波数を可変し
ながら超音波を被検体3に入射し、このとき被検体3を
伝播されてくる速度分散性超音波の強度を電圧計5で測
定する。
The second method is a method which is completely opposite to the first method, and is a method of varying the frequency while keeping the incident angle of the ultrasonic wave constant. That is, according to this method, the ultrasonic wave is incident on the subject 3 while varying the frequency of the oscillator 4 with the incident angle of the ultrasonic wave being constant, and the velocity dispersive ultrasonic wave propagated through the subject 3 at this time. Is measured with a voltmeter 5.

【0011】このようにして周波数と被検体中を伝搬さ
れてくる速度分散性超音波の強度との関係を調べると、
入射角すなわち位相速度に対応した周波数の時に強度が
最大になる。そこで、前記(5)式から位相速度CPを求
めることにより、fd値と位相速度CPとの関係を求める
ことができる。
When the relationship between the frequency and the intensity of velocity dispersive ultrasonic waves propagated in the subject is examined in this way,
The intensity becomes maximum at the frequency corresponding to the incident angle, that is, the phase velocity. Therefore, the relationship between the fd value and the phase speed CP can be calculated by calculating the phase speed CP from the equation (5).

【0012】[0012]

【発明が解決しようとする課題】しかしながら、以上の
ような2つの方法には次のような問題点がある。
However, the above two methods have the following problems.

【0013】第1の方法では、入射角を連続的に変えな
がら速度分散性超音波の強度を測定すると同時にその入
射角を正確に読み取り、入射角と被検体中を伝搬されて
くる速度分散性超音波の強度との関係を求める必要があ
る。しかし、実際上、入射角を連続的に変えるためには
可変角度型探触子を用いる必要があるばかりでなく、入
射角を正確に読み取るための機構が必要であり、探触子
構造が非常に複雑になる。また、入射角を連続的に変え
ながら強度を測定するので、測定時間が長くかかる問題
がある。このことは、例えば圧延鋼板の製造ラインなど
のように移動する被検体をオンラインで測定する場合に
は不向きであり、ある一点の測定ができないという問題
がある。
In the first method, the intensity of velocity dispersive ultrasonic waves is measured while the incident angle is continuously changed, and at the same time the incident angle is accurately read to determine the incident angle and the velocity dispersiveness propagating through the object. It is necessary to find the relationship with the intensity of ultrasonic waves. However, in practice, in order to continuously change the incident angle, it is not only necessary to use a variable-angle probe, but also a mechanism for accurately reading the incident angle is required, which makes the probe structure extremely difficult. Becomes complicated. Moreover, since the intensity is measured while continuously changing the incident angle, there is a problem that the measurement time is long. This is not suitable for online measurement of a moving object such as a rolled steel plate production line, and there is a problem that a certain point cannot be measured.

【0014】第2の方法では、周波数を連続的に変えな
がら測定しなければならない。周波数を連続的に変えな
がら測定するためには、第1の方法と同様に測定時間が
長くかかる。そのため、第1の方法と同様にオンライン
測定には不向きである。
In the second method, it is necessary to measure while continuously changing the frequency. In order to measure while continuously changing the frequency, the measurement time is long as in the first method. Therefore, like the first method, it is not suitable for online measurement.

【0015】本発明は上記実情に鑑みてなされたもの
で、一回の超音波励起検出だけで正確、かつ、短時間に
被検体の速度分散性超音波の位相速度曲線を測定し、オ
ンラインの測定にも十分に適用できる位相速度曲線測定
法を提供することを目的とする。
The present invention has been made in view of the above-mentioned circumstances, and the phase-velocity curve of the velocity dispersive ultrasonic wave of the subject is measured accurately and in a short time by only one ultrasonic excitation detection, and the on-line measurement is performed. It is an object of the present invention to provide a phase velocity curve measuring method that can be sufficiently applied to measurement.

【0016】また、本発明の他の目的は、超音波探触子
を含む測定系の構成を簡単に実現でき、かつ、被検体の
位相速度曲線を正確に測定可能な位相速度曲線測定装置
を提供することにある。
Another object of the present invention is to provide a phase velocity curve measuring device capable of easily realizing the configuration of a measurement system including an ultrasonic probe and capable of accurately measuring a phase velocity curve of a subject. To provide.

【0017】[0017]

【課題を解決するための手段】先ず、請求項1に対応す
る発明は上記課題を解決するために、速度分散性を有す
る被検体に対し、超音波探触子から適宜な入射角で広周
波数帯域のパルス超音波を入射し、前記被検体中を伝搬
してくる速度分散性超音波を前記超音波探触子と同一ま
たは別体の超音波探触子で受信し、この受信信号から周
波数スペクトラムを求めるとともに、この周波数スペク
トラムのピーク値の現れる周波数を求めることにより、
前記速度分散性超音波の位相速度曲線を測定する位相速
度曲線測定法である。
First, in order to solve the above-mentioned problems, the invention corresponding to claim 1 applies a wide frequency at an appropriate incident angle from an ultrasonic probe to an object having velocity dispersion. A pulsed ultrasonic wave in a band is incident, and velocity dispersive ultrasonic waves propagating in the subject are received by an ultrasonic probe that is the same as or different from the ultrasonic probe, and the frequency is received from this received signal. By obtaining the spectrum and the frequency at which the peak value of this frequency spectrum appears,
It is a phase velocity curve measuring method for measuring a phase velocity curve of the velocity dispersive ultrasonic wave.

【0018】次に、請求項2に対応する発明は、速度分
散性を有する被検体に対し、超音波探触子から適宜な入
射角で広周波数帯域のパルス超音波を入射し、かつ、前
記被検体中を伝搬してくる速度分散性超音波を前記超音
波探触子と同一または別体の超音波探触子で受信する超
音波送・受信手段の他、この超音波受信手段によって受
信された信号に対して前記超音波送・受信手段の周波数
特性を補正するためのフィルタと、このフィルタによる
周波数特性補正後の速度分散性超音波信号の周波数スペ
クトラムを求める周波数解析手段と、この周波数解析手
段によって求めた周波数スペクトラムに現れるピークの
周波数から速度分散性超音波の周波数を求めるピーク周
波数検出手段と、このピーク周波数検出手段の速度分散
性超音波の周波数から位相速度曲線を求める位相速度曲
線測定手段とを設けた位相速度曲線測定装置である。
Next, in the invention according to claim 2, a pulse ultrasonic wave in a wide frequency band is made incident on an object having velocity dispersion from an ultrasonic probe at an appropriate incident angle, and The ultrasonic wave transmitting / receiving means for receiving velocity dispersive ultrasonic waves propagating through the subject by the ultrasonic probe which is the same as or different from the ultrasonic probe, and is also received by this ultrasonic wave receiving means. A filter for correcting the frequency characteristic of the ultrasonic wave transmitting / receiving means with respect to the generated signal, frequency analysis means for obtaining the frequency spectrum of the velocity dispersive ultrasonic signal after the frequency characteristic correction by this filter, and this frequency Peak frequency detecting means for obtaining the frequency of the velocity dispersive ultrasonic wave from the frequency of the peak appearing in the frequency spectrum obtained by the analyzing means, and the frequency of the velocity dispersive ultrasonic wave of the peak frequency detecting means A phase velocity curve measuring apparatus provided with a phase velocity curve measurement means for obtaining a Luo phase velocity curves.

【0019】[0019]

【作用】従って、請求項1に対応する発明は以上のよう
な手段を講じたことにより、速度分散性を有する被検体
に対し、超音波探触子から適宜な入射角で超音波を入射
し、前記被検体から伝搬してくる速度分散性超音波を受
信し、周波数スペクトラムを求めれば、その入射角と既
知音速から位相速度が得られ、また被検体の厚さと周波
数スペクトラムのピーク周波数とから位相速度曲線を求
めることができる。
Therefore, according to the invention corresponding to claim 1, by taking the above-mentioned means, the ultrasonic wave is incident on the object having the velocity dispersion property from the ultrasonic probe at an appropriate incident angle. , The velocity dispersive ultrasonic wave propagating from the subject is received, and if the frequency spectrum is obtained, the phase velocity can be obtained from the incident angle and the known sound velocity, and from the thickness of the subject and the peak frequency of the frequency spectrum. The phase velocity curve can be determined.

【0020】従って、超音波探触子から1つの入射角を
定めて超音波を入射するだけであるので、短時間に被検
体の位相速度曲線、さらには被検体の弾性定数を測定で
き、オンラインの測定にも好適なものとなる。
Therefore, since only one incident angle is determined from the ultrasonic probe and the ultrasonic wave is incident, the phase velocity curve of the subject and the elastic constant of the subject can be measured in a short time, It is also suitable for measurement of.

【0021】また、請求項2に対応する発明は、超音波
探触子から被検体に適宜な入射角で超音波を入射し、こ
の被検体から伝搬してくる速度分散性超音波を受信し、
この受信信号の周波数スペクトラムを周波数解析手段で
測定した後、ピーク周波数検出手段にて周波数スペクト
ラムに現れるピークの周波数から位相速度曲線を求める
ので、特別な可変角度型探触子を用いたり、複雑な探触
子構造を採ることなく短時間に測定できる。
In the invention according to claim 2, ultrasonic waves are incident on the subject from the ultrasonic probe at an appropriate incident angle, and velocity dispersive ultrasonic waves propagating from the subject are received. ,
After the frequency spectrum of the received signal is measured by the frequency analysis means, the phase frequency curve is obtained by the peak frequency detection means from the frequency of the peak appearing in the frequency spectrum, so that a special variable angle probe or a complicated variable angle probe is used. It is possible to measure in a short time without using a probe structure.

【0022】[0022]

【実施例】以下、位相速度曲線測定法の一実施例につい
て説明する。先ず、所定の測定位置に超音波の速度分散
性を有する被検体を設置する。しかる後、この被検体上
にくさびを介して超音波探触子を設置した後、パルス発
生器から電気パルスを超音波探触子に印加する。その結
果、この超音波探触子から広帯域超音波パルスが送波さ
れるが、このときの広帯域超音波パルスを前記くさびを
介して予め知りうる適宜な入射角で被検体に入射する
と、被検体中に速度分散性超音波が励起できる。
EXAMPLE An example of the phase velocity curve measuring method will be described below. First, a subject having ultrasonic velocity dispersion is installed at a predetermined measurement position. After that, an ultrasonic probe is installed on the subject via a wedge, and then an electric pulse is applied to the ultrasonic probe from a pulse generator. As a result, a wideband ultrasonic pulse is transmitted from this ultrasonic probe, but when the wideband ultrasonic pulse at this time is incident on the subject at an appropriate incident angle that can be known in advance via the wedge, the subject Velocity dispersive ultrasound can be excited therein.

【0023】そこで、この被検体中の速度分散性超音波
を検出し、この検出信号のスペクトラムを周波数解析す
ることにより、被検体中を伝搬する速度分散性超音波の
周波数を求めることができる。そして、周波数と被検体
中を伝搬する速度分散性超音波の強度の関係から、位相
速度に対応する周波数のときに強度最大となる。ゆえ
に、前記周波数から前記(5)式を用いて位相速度CPを
求めることにより、fd値と位相速度との関係、つまり
位相速度曲線を測定できる。そして、例えば弾性等方性
の被検体に対しての位相速度曲線を測定し、前記(3)
式および(4)式を用いて演算をすれば、被検体の弾性
定数を求めることができる。よって、この測定法によれ
ば、超音波の入射角や周波数を連続的に可変することな
く、位相速度曲線を測定でき、ひいては被検体の弾性定
数を測定できる。
Therefore, the frequency of the velocity dispersive ultrasonic wave propagating in the subject can be obtained by detecting the velocity dispersive ultrasonic wave in the subject and analyzing the spectrum of the detection signal. Then, from the relationship between the frequency and the intensity of the velocity dispersive ultrasonic wave propagating in the subject, the intensity becomes maximum at the frequency corresponding to the phase velocity. Therefore, by obtaining the phase velocity CP from the frequency using the equation (5), the relationship between the fd value and the phase velocity, that is, the phase velocity curve can be measured. Then, for example, the phase velocity curve for the elastic isotropic object is measured, and the (3)
The elastic constant of the subject can be obtained by performing calculations using the equation and the equation (4). Therefore, according to this measuring method, the phase velocity curve can be measured without continuously changing the incident angle and frequency of the ultrasonic wave, and by extension, the elastic constant of the subject can be measured.

【0024】次に、以上のような測定法を用いた弾性定
数測定装置について図1を参照しながら説明する。同図
において11は板厚dの被検体であって、この被検体1
1の被検体面部に互いに反対側に適宜な傾斜角度の傾斜
面をもった台形状のくさび12a,12bが設定されて
いる。これらくさび12a,12bの各傾斜面にはそれ
ぞれ超音波を励起するための超音波探触子13aおよび
超音波を検出するための超音波探触子13bが設置され
ている。前記くさび12aは超音波探触子13aにて励
起された超音波を被検体11に伝達する役割を有し、一
方、くさび12baは被検体11中を伝搬されてくる超
音波を超音波探触子13bに伝達する役割を有し、さら
に各超音波探触子13a,13bでの超音波入射角およ
び受信角は同一の角度θi に設定されているものとす
る。14は音響的結合を行う接触媒質である。
Next, an elastic constant measuring device using the above measuring method will be described with reference to FIG. In the figure, reference numeral 11 denotes a subject having a plate thickness d.
Trapezoidal wedges 12a and 12b having inclined surfaces with appropriate inclination angles are provided on opposite sides of one subject surface portion. An ultrasonic probe 13a for exciting ultrasonic waves and an ultrasonic probe 13b for detecting ultrasonic waves are provided on the inclined surfaces of the wedges 12a, 12b, respectively. The wedge 12a has a role of transmitting the ultrasonic waves excited by the ultrasonic probe 13a to the subject 11, while the wedge 12ba ultrasonically detects the ultrasonic waves propagated in the subject 11. The ultrasonic wave is transmitted to the child 13b, and the ultrasonic wave incident angle and the ultrasonic wave reception angle of each ultrasonic probe 13a, 13b are set to the same angle θi. Reference numeral 14 is a contact medium for acoustic coupling.

【0025】15は適宜、或いは所定の周期ごとにトリ
ガ信号を発生するトリガ回路であって、このトリガ回路
15から発生されるトリガ信号はパルス発生器16に送
出される。このパルス発生器16はトリガ信号に同期し
ながら電気パルスを超音波探触子13aに印加する。従
って、この超音波探触子13aからは広帯域な周波数成
分を有する超音波パルスが送波され、前記くさび12a
および接触媒質14を介して被検体11に入射される。
Reference numeral 15 is a trigger circuit for generating a trigger signal appropriately or at predetermined intervals. The trigger signal generated by the trigger circuit 15 is sent to the pulse generator 16. The pulse generator 16 applies an electric pulse to the ultrasonic probe 13a in synchronization with the trigger signal. Therefore, an ultrasonic pulse having a wide band frequency component is transmitted from the ultrasonic probe 13a, and the wedge 12a
Then, the light enters the subject 11 via the contact medium 14.

【0026】17は超音波探触子13bで受信された超
音波の電気信号を増幅する広帯域増幅器であって、ここ
で得られた増幅信号はゲート回路18に送られる。この
ゲート回路18はトリガ回路15からのトリガ信号に同
期して被検体中の速度分散性超音波の信号を取り込んで
出力する。19は測定系の周波数特性を補正するための
フィルタ、20はフィルタ19からの出力信号の周波数
スペクトラムを求める周波数解析手段、21は周波数ス
ペクトラムから受信された速度分散性超音波のピーク周
波数を求めるピーク周波数検出手段、22はピーク周波
数検出手段21によって求めたピーク周波数から前記
(5)式を用いて位相速度を求め、かつ、位相速度曲線
および前記(3)式,(4)式から弾性定数を演算する
弾性定数演算手段である。23はピーク周波数の値や位
相速度曲線、さらには弾性定数を表示する表示部であ
る。
Reference numeral 17 is a wide band amplifier for amplifying the electric signal of the ultrasonic wave received by the ultrasonic probe 13b, and the amplified signal obtained here is sent to the gate circuit 18. The gate circuit 18 captures and outputs a signal of velocity dispersive ultrasonic waves in the subject in synchronization with the trigger signal from the trigger circuit 15. Reference numeral 19 is a filter for correcting the frequency characteristic of the measurement system, 20 is frequency analysis means for obtaining the frequency spectrum of the output signal from the filter 19, and 21 is a peak for obtaining the peak frequency of the velocity dispersive ultrasonic waves received from the frequency spectrum. The frequency detecting means 22 obtains the phase velocity from the peak frequency obtained by the peak frequency detecting means 21 using the equation (5), and the elastic constant is obtained from the phase velocity curve and the equations (3) and (4). This is an elastic constant calculating means for calculating. Reference numeral 23 is a display unit for displaying the value of the peak frequency, the phase velocity curve, and the elastic constant.

【0027】次に、以上のように構成された装置の動作
について説明する。パルス発生器16では、トリガ回路
15からのトリガ信号に同期して超音波探触子13aに
パルス信号を印加すると、当該超音波探触子13aから
超音波パルスが送出され、くさび12aおよび接触媒質
14を介して被検体11に入射する。このとき、超音波
パルスは、広帯域な周波数成分をもっており、くさび1
2aの角度θi に基づき前記(5)式で求められる位相
速度CPで伝搬し、かつ、被検体11中で速度分散性のた
めに特定の周波数成分だけしか伝搬しない。
Next, the operation of the apparatus configured as above will be described. In the pulse generator 16, when a pulse signal is applied to the ultrasonic probe 13a in synchronization with the trigger signal from the trigger circuit 15, an ultrasonic pulse is sent from the ultrasonic probe 13a, and the wedge 12a and the contact medium. It is incident on the subject 11 via 14. At this time, the ultrasonic pulse has a broadband frequency component, and the wedge 1
It propagates at the phase velocity CP calculated by the above equation (5) based on the angle θi of 2a, and only the specific frequency component propagates in the subject 11 due to velocity dispersion.

【0028】従って、以上のような特性をもって被検体
11中を伝搬されてくる速度分散性超音波が接触媒質1
4およびくさび12bを介して超音波探触子13bで受
信され、ここで電気信号に変換される。ここで、くさび
12bの角度θi はくさび12aと同じであるので、超
音波探触子13aにて励起された位相速度CPの超音波が
超音波探触子13bで受信される。この超音波探触子1
3bの電気信号は広帯域増幅器17で増幅されゲート回
路18に送られる。
Therefore, the velocity dispersive ultrasonic waves propagating through the object 11 having the above characteristics are contact medium 1.
4 and the wedge 12b to be received by the ultrasonic probe 13b, where it is converted into an electric signal. Since the angle θi of the wedge 12b is the same as that of the wedge 12a, the ultrasonic wave having the phase velocity CP excited by the ultrasonic probe 13a is received by the ultrasonic probe 13b. This ultrasonic probe 1
The electric signal 3b is amplified by the wide band amplifier 17 and sent to the gate circuit 18.

【0029】このゲート回路18では、トリガ回路15
から発生するトリガ信号に同期してゲートを開き、被検
体中から伝搬されてくる速度分散性超音波の信号を選択
してフィルタ19に与える。ここで、パルス発生器16
の電気パルス、超音波探触子13a,13bおよび広帯
域増幅器17などの測定系はそれぞれ周波数特性をもっ
ているので、各周波数の増幅出力の強度は正確でない。
そこで、フィルタ19では、ゲート回路18の出力に対
して前述した測定系の周波数特性を補正し、後続の周波
数解析手段20に送出する。
In the gate circuit 18, the trigger circuit 15
The gate is opened in synchronism with the trigger signal generated from, and the signal of the velocity dispersive ultrasonic wave propagated from the inside of the subject is selected and given to the filter 19. Here, the pulse generator 16
Since the measuring systems such as the electric pulse, the ultrasonic probes 13a and 13b, and the broadband amplifier 17 have frequency characteristics, the intensity of the amplified output at each frequency is not accurate.
Therefore, the filter 19 corrects the frequency characteristic of the measurement system described above with respect to the output of the gate circuit 18, and sends it to the subsequent frequency analysis means 20.

【0030】この周波数解析手段20ではフィルタ19
の出力信号の周波数スペクトラムを求める。そして、ピ
ーク周波数検出手段21では、周波数解析手段20で得
られた周波数スペクトラムからピーク周波数を求めるこ
とにより、被検体中を伝搬してくる速度分散性超音波の
周波数を測定できる。
In this frequency analysis means 20, the filter 19 is used.
Obtain the frequency spectrum of the output signal of. Then, the peak frequency detecting means 21 can measure the frequency of the velocity dispersive ultrasonic wave propagating through the subject by obtaining the peak frequency from the frequency spectrum obtained by the frequency analyzing means 20.

【0031】なお、フィルタ19と周波数解析手段20
の順序はフィルタの方法により異なる。例えば電気信号
そのものに対してフィルタリングする場合、フィルタ1
9、周波数解析手段20の順序となる。一方、スペクト
ラムをFFT(Fast FourierTransform)分析器の計算
で求める場合は、スペクトラム計算後にそれぞれの周波
数でフィルタ特性を掛け算してフィルタリングできる。
この場合には周波数解析手段20、フィルタ19の順序
となる。
The filter 19 and the frequency analysis means 20
The order of depends on the filtering method. For example, when filtering the electric signal itself, the filter 1
9 and the frequency analysis means 20 in this order. On the other hand, when the spectrum is obtained by the calculation of the FFT (Fast Fourier Transform) analyzer, it is possible to perform filtering by multiplying the filter characteristic at each frequency after the spectrum calculation.
In this case, the frequency analysis means 20 and the filter 19 are arranged in this order.

【0032】因みに、図2は超音波を43°の入射角θ
i をもって厚さ1mmのアルミニウム板に入射し、この
アルミニウム板中を板波にて伝搬させたときの受信波形
である。図3は図2の波形をFFT分析器にて周波数解
析して得られた図であり、この図から明らかなように増
幅器出力には3つのピークが現れている。これらのピー
ク値を示す周波数はそれぞれ2.87MHz、6.02
MHz、9.24MHzである。さらに、前記アルミニ
ウム板の縦波音速を6500m/s、横波音速を310
0m/sとし、このときの位相速度曲線は図4に示すと
うりである。
Incidentally, FIG. 2 shows that the ultrasonic wave is incident at an incident angle θ of 43 °.
It is a received waveform when it is incident on an aluminum plate having a thickness of 1 mm with i and is propagated as a plate wave in the aluminum plate. FIG. 3 is a diagram obtained by frequency-analyzing the waveform of FIG. 2 with an FFT analyzer, and as is apparent from this diagram, three peaks appear in the amplifier output. The frequencies showing these peak values are 2.87 MHz and 6.02, respectively.
MHz and 9.24 MHz. Furthermore, the longitudinal wave sound velocity of the aluminum plate is 6500 m / s, and the transverse wave sound velocity is 310.
0 m / s, and the phase velocity curve at this time is as shown in FIG.

【0033】従って、この図4から角度θi =43°、
CW=2453m/sのとき、位相速度は3597m/s
であり、しかも板厚が1mmであることからfd値はそ
れぞれ2.87MHz・mm、6.02MHz・mm、
9.24MHz・mmであり、図4に(イ)〜(ハ)に
示すごとくプロットすると曲線上にのっていることが分
かる。よって、以上の結果から明白なように、本発明装
置によって位相速度曲線が求められ、前記弾性定数演算
手段22にて前記(3)式および(4)式を用いて弾性
定数を測定することができる。
Therefore, from FIG. 4, the angle θi = 43 °,
When CW = 2453m / s, the phase velocity is 3597m / s
Since the plate thickness is 1 mm, the fd values are 2.87 MHz · mm, 6.02 MHz · mm,
It is 9.24 MHz · mm, and when plotted as shown in (a) to (c) of FIG. 4, it can be seen that it is on the curve. Therefore, as is apparent from the above results, the phase velocity curve is obtained by the device of the present invention, and the elastic constant can be measured by the elastic constant calculating means 22 using the expressions (3) and (4). it can.

【0034】次に、図5は超音波を20°の入射角θi
をもって厚さ1mmのアルミニウム板に入射し、このア
ルミニウム板中を板波にて伝搬させたときの受信波形で
ある。図6は図5の波形をFFT分析器にて周波数解析
して得られた図であり、増幅器出力には顕著な4つのピ
ークが現れている。このピーク周波数はそれぞれ2.5
0MHz、3.15MHz、6.05MHz、8.21
MHzであり、さらに入射角θi =20°から位相速度
は7172m/sであり、同じく図4に(ニ)〜(ト)
のごとくプロットすると同じく曲線上にのっていること
が分かる。
Next, FIG. 5 shows an ultrasonic wave with an incident angle θi of 20 °.
Is a received waveform when it is incident on an aluminum plate having a thickness of 1 mm and is propagated as a plate wave in the aluminum plate. FIG. 6 is a diagram obtained by frequency-analyzing the waveform of FIG. 5 with an FFT analyzer, and four remarkable peaks appear in the amplifier output. This peak frequency is 2.5 each
0MHz, 3.15MHz, 6.05MHz, 8.21
MHz, and the phase velocity is 7172 m / s from the incident angle θi = 20 °.
If you plot like, you can see that it is also on the curve.

【0035】次に、図7は1個の超音波探触子を用いて
超音波を透過させて位相速度曲線、ひいては弾性定数を
測定する例を示す図である。同図において11は被検
体、12はくさび、13は超音波探触子、14は接触媒
質である。その他、超音波探触子13から超音波を入射
し、被検体11の端面で反射されて伝搬されてくる速度
分散性超音波を同一の超音波探触子13で受信し、高帯
域増幅器17に送出するものであり、その後の処理につ
いては図1と同様であり、そのため図1と同一部分には
同一番号を付してその説明は省略する。
Next, FIG. 7 is a diagram showing an example in which an ultrasonic wave is transmitted using one ultrasonic probe to measure a phase velocity curve, and thus an elastic constant. In the figure, 11 is a subject, 12 is a wedge, 13 is an ultrasonic probe, and 14 is a contact medium. In addition, ultrasonic waves are incident from the ultrasonic probe 13, the velocity dispersive ultrasonic waves reflected and propagated by the end face of the subject 11 are received by the same ultrasonic probe 13, and the high bandwidth amplifier 17 is used. Since the subsequent processing is the same as that in FIG. 1, the same parts as those in FIG. 1 are designated by the same reference numerals and the description thereof will be omitted.

【0036】従って、トリガ回路15から発生するトリ
ガ信号に同期してパルス発生器16から超音波探触子1
3にパルス信号を印加すると、この超音波探触子13か
ら超音波パルスが出力され、くさび12および接触媒質
14を経て被検体11に入射される。この超音波パルス
は、広帯域な周波数成分をもっており、くさび12の角
度θi に基づき前記(5)式で求められる位相速度CPで
伝搬し、かつ、被検体11中で速度分散性のために特定
の周波数成分だけしか伝搬しない。
Therefore, in synchronization with the trigger signal generated from the trigger circuit 15, the pulse generator 16 causes the ultrasonic probe 1 to move.
When a pulse signal is applied to 3, an ultrasonic pulse is output from this ultrasonic probe 13 and is incident on the subject 11 via the wedge 12 and the contact medium 14. This ultrasonic pulse has a broadband frequency component, propagates at the phase velocity CP obtained by the above equation (5) based on the angle θi of the wedge 12, and is specific to the subject 11 for velocity dispersion. Only frequency components propagate.

【0037】従って、以上のような特性をもって超音波
が被検体11に入射するが、当該被検体11中に入射さ
れて伝搬する板波の速度分散性超音波は、被検体端面1
1Aに達してここで反射され、同一の構成体である接触
媒質14およびくさび12を経て超音波探触子13に受
信され、電気信号に変換される。この電気信号に変換後
は前記図1の実施例と同様に処理され、被検体11を伝
搬されてくる速度分散性超音波の周波数を求めることが
できる。
Therefore, although the ultrasonic wave is incident on the subject 11 with the above characteristics, the velocity dispersive ultrasonic wave of the plate wave that is incident and propagates in the subject 11 is the end face 1 of the subject.
It reaches 1 A, is reflected here, is received by the ultrasonic probe 13 through the couplant 14 and the wedge 12 which are the same structure, and is converted into an electric signal. After conversion into this electric signal, the same processing as in the embodiment of FIG. 1 is performed, and the frequency of the velocity dispersive ultrasonic wave propagated through the subject 11 can be obtained.

【0038】因みに、図8は超音波を20°の入射角θ
i をもって厚さ0.5mmのアルミニウム板に入射し、
このアルミニウム板中を板波にて伝搬させたときの受信
波形である。この図8中、Aの部分は図7に示すくさび
12内で反射されてきた受信波であり、Bの部分は被検
体11を伝搬して反射して戻ってきた板波である。
Incidentally, FIG. 8 shows that the ultrasonic wave is incident at an incident angle θ of 20 °.
incident on a 0.5 mm thick aluminum plate with i,
This is a received waveform when propagating as a plate wave in this aluminum plate. In FIG. 8, the portion A is the received wave reflected in the wedge 12 shown in FIG. 7, and the portion B is the plate wave propagated through the subject 11 and reflected back.

【0039】図9は図8の受信波BについてFFT分析
器にて周波数解析して得られた図であり、その増幅器出
力には2つのピークが現れている。このピーク時の周波
数はそれぞれ5.00MHz、6.30MHzである。
ここで、前述したように板厚dが0.5mmであるの
で、fd値はそれぞれ2.50MHz・mm、3.15
MHz・mmであり、前記図5と同様の結果が得られ、
図4の(ニ)、(ホ)のごとくプロットすると曲線上に
のっていることが分かる。よって、以上の結果から明白
なように、本発明装置によって位相速度曲線が求めら
れ、前記弾性定数演算手段22にて前記(3)式および
(4)式を用いて弾性定数を測定することができる。
FIG. 9 is a diagram obtained by frequency-analyzing the received wave B of FIG. 8 with an FFT analyzer, and two peaks appear in the output of the amplifier. The frequencies at this peak are 5.00 MHz and 6.30 MHz, respectively.
Since the plate thickness d is 0.5 mm as described above, the fd values are 2.50 MHz · mm and 3.15, respectively.
MHz · mm, the same results as in FIG. 5 are obtained,
When plotted as (d) and (e) in FIG. 4, it can be seen that they are on the curve. Therefore, as is apparent from the above results, the phase velocity curve is obtained by the device of the present invention, and the elastic constant can be measured by the elastic constant calculating means 22 using the expressions (3) and (4). it can.

【0040】従って、以上のような実施例の構成によれ
ば、超音波探触子13a(13)から適宜に定めた既知
入射角θi で超音波を既知板厚dの被検体11に入射
し、この被検体11中を伝搬してくる板波の速度分散性
超音波信号を受信する。そして、この受信信号を周波数
解析手段20で周波数スペクトルを求めた後、このスペ
クトルのピークの現れている周波数を測定することによ
り、既知入射角θi とくさびの既知音速CWとから位相速
度を把握でき、かつ、既知板厚dと前記ピーク時の周波
数とからfd値を把握でき、これによって位相速度曲線
を得ることができる。
Therefore, according to the configuration of the above embodiment, the ultrasonic wave is incident on the subject 11 having the known plate thickness d from the ultrasonic probe 13a (13) at the known incident angle θi which is appropriately determined. , And receives the velocity dispersive ultrasonic signal of the plate wave propagating through the subject 11. Then, the frequency spectrum of the received signal is obtained by the frequency analysis means 20, and the frequency at which the peak of this spectrum appears is measured, so that the phase velocity can be grasped from the known incident angle θi and the known sound velocity CW of the wedge. Moreover, the fd value can be grasped from the known plate thickness d and the frequency at the peak, and thus the phase velocity curve can be obtained.

【0041】しかも、超音波の入射角θi や周波数など
を連続的に変えながらピークの強度を測定する必要がな
く、一回の超音波励起検出のみでピーク強度の周波数を
測定でき、従来のように測定時間を必要としない。ま
た、超音波の入射角θi を変える必要がないので、探触
子の構造および探触子の走査に係わる構造も非常に簡単
に実現でき、既知入射角θi の下に正確に位相速度を求
めることができる。
Moreover, it is not necessary to measure the intensity of the peak while continuously changing the incident angle θi or frequency of the ultrasonic wave, and the frequency of the peak intensity can be measured by only one ultrasonic excitation detection. Does not need measurement time. Further, since it is not necessary to change the incident angle θi of the ultrasonic wave, the structure of the probe and the structure related to the scanning of the probe can be realized very easily, and the phase velocity can be accurately obtained under the known incident angle θi. be able to.

【0042】なお、上記2つの実施例では、被検体11
として板体を用いたが、これに限定されるものでなく、
超音波の伝搬が速度分散性を有する媒体であれば同様に
適用できる。かかる媒体として例えば薄い層と厚い層と
からなる2層構造の試料のうち薄い層の媒体を伝達する
ラブ波が上げられる。また、前記実施例では、弾性等方
性の被検体の弾性定数を求めたが、多方向の位相速度曲
線を本方法で測定することにより、弾性異方性の被検体
の弾性定数を求めることも可能である。さらに、前記実
施例では、超音波の励起検出に接触型の超音波探触子を
用いたが、渦電流を利用して電磁誘導的に超音波を励起
検出する電磁超音波法やレーザーの熱により被検体に超
音波を励起し干渉計で検出するレーザー超音波法などの
非接触超音波計測法を用いても容易に実施できる。その
他、本発明はその要旨を逸脱しない範囲で種々変形して
実施できる。
In the above two embodiments, the subject 11
Although a plate was used as the above, it is not limited to this.
The same applies to any medium in which the propagation of ultrasonic waves has velocity dispersion. As such a medium, for example, a Love wave that propagates a medium of a thin layer of a sample having a two-layer structure including a thin layer and a thick layer is raised. Further, in the above example, the elastic constant of the elastic isotropic object was obtained, but by measuring the phase velocity curves in multiple directions by this method, the elastic constant of the elastic anisotropic object can be obtained. Is also possible. Furthermore, in the above-mentioned embodiment, the contact type ultrasonic probe was used for the ultrasonic wave excitation detection, but the electromagnetic ultrasonic method for exciting and detecting the ultrasonic wave by the electromagnetic induction using the eddy current or the laser heat. Thus, it can be easily carried out even by using a non-contact ultrasonic measurement method such as a laser ultrasonic method in which ultrasonic waves are excited on a subject and detected by an interferometer. Besides, the present invention can be variously modified and implemented without departing from the scope of the invention.

【0043】[0043]

【発明の効果】以上説明したように本発明によれば、次
のような種々の効果を奏する。
As described above, according to the present invention, the following various effects are exhibited.

【0044】請求項1の発明では、一回の超音波励起検
出だけで正確、かつ、短時間に被検体の速度分散性超音
波の位相速度曲線を測定でき、オンラインの測定にも十
分に対処できる。また一回の超音波励起検出だけで正
確、かつ、短時間に被検体の弾性定数を測定できる。さ
らに、請求項2の発明は、超音波探触子を含む測定系の
構成を簡単に実現でき、しかも一回の超音波励起検出だ
けで被検体の弾性定数を正確に測定できる。
According to the first aspect of the present invention, the phase velocity curve of the velocity dispersive ultrasonic wave of the subject can be measured accurately and in a short time by only one ultrasonic excitation detection, and the online measurement is sufficiently dealt with. it can. Further, the elastic constant of the subject can be measured accurately and in a short time by only detecting the ultrasonic wave excitation once. Further, according to the invention of claim 2, the configuration of the measurement system including the ultrasonic probe can be easily realized, and the elastic constant of the subject can be accurately measured by only one ultrasonic excitation detection.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明に係わる弾性定数測定装置の第1の実
施例を示す構成図。
FIG. 1 is a configuration diagram showing a first embodiment of an elastic constant measuring device according to the present invention.

【図2】 第1の実施例の装置を用いてある入射角で被
検体に超音波を入射したときの被検体の速度分散性超音
波の受信波形図。
FIG. 2 is a received waveform diagram of velocity dispersive ultrasonic waves of the subject when the ultrasonic waves are incident on the subject at a certain incident angle using the apparatus of the first embodiment.

【図3】 図2の受信波形の周波数スペクトラム図。FIG. 3 is a frequency spectrum diagram of the reception waveform of FIG.

【図4】 被検体の位相速度曲線図。FIG. 4 is a phase velocity curve diagram of a subject.

【図5】 第1の実施例の装置を用いて図2とは異なる
入射角で被検体に超音波を入射したときの被検体の速度
分散性超音波の受信波形図。
5 is a reception waveform diagram of velocity dispersive ultrasonic waves of the subject when the ultrasonic waves are incident on the subject at an incident angle different from that of FIG. 2 using the apparatus of the first embodiment.

【図6】 図5の受信波形の周波数スペクトラム図。6 is a frequency spectrum diagram of the reception waveform of FIG.

【図7】 本発明に係わる弾性定数測定装置の第2の実
施例を示す構成図。
FIG. 7 is a configuration diagram showing a second embodiment of the elastic constant measuring device according to the present invention.

【図8】 第2の実施例の装置を用いてある入射角で被
検体に超音波を入射したときの被検体の速度分散性超音
波の受信波形図。
FIG. 8 is a reception waveform diagram of velocity dispersive ultrasonic waves of the subject when the ultrasonic waves are incident on the subject at a certain incident angle using the apparatus of the second embodiment.

【図9】 図8の受信波形の周波数スペクトラム図。9 is a frequency spectrum diagram of the reception waveform of FIG.

【図10】 従来装置の測定原理を説明する構成図。FIG. 10 is a configuration diagram illustrating a measurement principle of a conventional device.

【符号の説明】[Explanation of symbols]

11…被検体、12a,12b,12…くさび、13
a,13b,13…超音波探触子、14…接触媒質、1
5…トリガ回路、16…パルス発生器、17…広帯域増
幅器、18…ゲート回路、19…フィルタ、20…周波
数解析手段、21…ピーク周波数検出手段、22…弾性
定数演算手段、23…表示器。
11 ... Subject, 12a, 12b, 12 ... Wedge, 13
a, 13b, 13 ... Ultrasonic probe, 14 ... Contact medium, 1
5 ... Trigger circuit, 16 ... Pulse generator, 17 ... Wide band amplifier, 18 ... Gate circuit, 19 ... Filter, 20 ... Frequency analysis means, 21 ... Peak frequency detection means, 22 ... Elastic constant calculation means, 23 ... Display device.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 速度分散性を有する被検体に対し、超音
波探触子から適宜な入射角で広周波数帯域のパルス超音
波を入射し、前記被検体中を伝搬してくる速度分散性超
音波を前記超音波探触子と同一または別体の超音波探触
子で受信し、この受信信号から周波数スペクトラムを求
めた後、この周波数スペクトラムのピーク値の現れる周
波数を求めることにより、前記速度分散性超音波の位相
速度曲線を測定することを特徴とする位相速度曲線測定
法。
1. A velocity-dispersive ultrasonic wave that propagates through a subject by injecting pulsed ultrasonic waves in a wide frequency band from an ultrasonic probe at an appropriate incident angle to the subject having velocity dispersiveness. The ultrasonic wave is received by the ultrasonic probe which is the same as or different from the ultrasonic probe, the frequency spectrum is obtained from this received signal, and the frequency at which the peak value of this frequency spectrum appears A method for measuring a phase velocity curve, which comprises measuring a phase velocity curve of dispersive ultrasonic waves.
【請求項2】 速度分散性を有する被検体に対し、超音
波探触子から適宜な入射角で広周波数帯域のパルス超音
波を入射し、かつ、前記被検体中を伝搬してくる速度分
散性超音波を前記超音波探触子と同一または別体の超音
波探触子で受信する超音波送・受信手段と、この超音波
受信手段によって受信された速度分散性超音波信号の周
波数スペクトラムを求める周波数解析手段と、この周波
数解析手段によって求めた周波数スペクトラムに現れる
ピークの周波数から速度分散性超音波の周波数を求める
ピーク周波数検出手段と、このピーク周波数検出手段の
速度分散性超音波の周波数から位相速度曲線を求める位
相速度測定手段とを備えたことを特徴とする位相速度曲
線測定装置。
2. A velocity dispersion in which a pulsed ultrasonic wave in a wide frequency band is incident from an ultrasonic probe at an appropriate incident angle to a subject having velocity dispersion and is propagated in the subject. Ultrasonic wave transmitting / receiving means for receiving the ultrasonic wave by the ultrasonic wave probe which is the same as or different from the ultrasonic wave probe, and the frequency spectrum of the velocity dispersive ultrasonic wave signal received by the ultrasonic wave receiving means. A frequency analysis means for obtaining the frequency dispersion means, a peak frequency detection means for obtaining the frequency of the velocity dispersive ultrasonic wave from the frequency of the peak appearing in the frequency spectrum obtained by the frequency analysis means, and the frequency of the velocity dispersive ultrasonic wave of the peak frequency detection means. And a phase velocity measuring means for obtaining a phase velocity curve from the phase velocity curve measuring device.
JP3286729A 1991-10-31 1991-10-31 Ultrasonic phase velocity curve determination method and apparatus Expired - Lifetime JP2626361B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3286729A JP2626361B2 (en) 1991-10-31 1991-10-31 Ultrasonic phase velocity curve determination method and apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3286729A JP2626361B2 (en) 1991-10-31 1991-10-31 Ultrasonic phase velocity curve determination method and apparatus

Publications (2)

Publication Number Publication Date
JPH05126805A true JPH05126805A (en) 1993-05-21
JP2626361B2 JP2626361B2 (en) 1997-07-02

Family

ID=17708264

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JP2626361B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7047809B2 (en) * 2003-01-21 2006-05-23 Applied Sonics, Incorporated Ultrasonic monitor of material composition and particle size
JP2010223635A (en) * 2009-03-19 2010-10-07 Nippon Steel Corp Apparatus and method for measuring phase transformation rate of material
JP2016525686A (en) * 2013-07-22 2016-08-25 アザリー Ultrasonic method and apparatus for displaying ultrasonic propagation in a guide whose thickness varies linearly

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7047809B2 (en) * 2003-01-21 2006-05-23 Applied Sonics, Incorporated Ultrasonic monitor of material composition and particle size
JP2010223635A (en) * 2009-03-19 2010-10-07 Nippon Steel Corp Apparatus and method for measuring phase transformation rate of material
JP2016525686A (en) * 2013-07-22 2016-08-25 アザリー Ultrasonic method and apparatus for displaying ultrasonic propagation in a guide whose thickness varies linearly

Also Published As

Publication number Publication date
JP2626361B2 (en) 1997-07-02

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