JPH0481665B2 - - Google Patents
Info
- Publication number
- JPH0481665B2 JPH0481665B2 JP61074604A JP7460486A JPH0481665B2 JP H0481665 B2 JPH0481665 B2 JP H0481665B2 JP 61074604 A JP61074604 A JP 61074604A JP 7460486 A JP7460486 A JP 7460486A JP H0481665 B2 JPH0481665 B2 JP H0481665B2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- piezoelectric element
- chamber
- valve body
- inlet port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000008602 contraction Effects 0.000 claims description 11
- 238000005192 partition Methods 0.000 claims description 5
- 230000006835 compression Effects 0.000 description 15
- 238000007906 compression Methods 0.000 description 15
- 238000000638 solvent extraction Methods 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000005347 demagnetization Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
Landscapes
- Electrically Driven Valve-Operating Means (AREA)
Description
【発明の詳細な説明】
発明の目的
(産業上の利用分野)
この発明は各種弁においてその通路開閉用可動
機構の改良に関するものである。DETAILED DESCRIPTION OF THE INVENTION Object of the Invention (Field of Industrial Application) This invention relates to improvements in movable mechanisms for opening and closing passages in various valves.
(従来の技術)
弁は流体を通したり止めたり制御したりするた
めに通路を開閉することができる可動機構を持つ
機器の総称であり、特に流れの形を変えたり圧力
または流量を制御したりする制御弁は機能上方向
制御弁、圧力制御弁、流量制御弁に大別されてい
る。(Prior art) A valve is a general term for equipment with a movable mechanism that can open and close a passage to pass, stop, or control fluid, and in particular to change the shape of flow or control pressure or flow rate. Functionally, control valves are broadly classified into directional control valves, pressure control valves, and flow control valves.
従来、弁体の可動機構としては比例ソレノイド
方式が多く利用されている。その一例として第3
図に示す圧力制御弁においては、弁室2に弁座3
が設けられ、入口ポート4側の通路5と出口ポー
ト6側の通路7とがこの弁座3及び弁室2を介し
て連通されている。弁室2内には可動子25が移
動可能に嵌め込まれ、この可動子25の外周には
ソレノイド26が配設されている。可動子25の
弁体保持部25aには弁体27が圧縮コイルばね
28を介して取付けられ、この弁体27が弁座3
に対し開閉可能に圧接されている。そして、ソレ
ノイド26に電流が印加されると、可動子25が
移動して圧縮コイルばね28が圧縮され、弁座3
に対する弁体27の圧接力が増加する。この電流
値に応じてソレノイド推力は比例的に変化する。
このソレノイド推力と圧縮コイルばね28とが釣
り合つたところで可動子25が停止して圧縮コイ
ルばね28の撓み量が決まり、弁座3に対する弁
体27の圧接力も決まる。入口ポート4側の圧力
が上昇して弁体27に働く力が圧縮コイルばね2
8の弾性力に打ち勝つと、弁体27が弁座3を開
いて入口ポート4側と出口ポート6側とが連通
し、入口ポート4側の圧力が下がる。従つて、入
口ポート4側の過度な昇圧を防止する。弁体27
に働く力と圧縮コイルばね28の弾性力が釣り合
つたところで弁体27は弁座3を閉じる。この動
作が繰り返されて入口ポート4側の圧力がほぼ一
定になる。このようにして入口ポート4側の設定
圧力をソレノイド26の電流値の変更により調節
することができる。 Conventionally, a proportional solenoid system has been widely used as a mechanism for moving a valve body. As an example, the third
In the pressure control valve shown in the figure, the valve seat 3 is located in the valve chamber 2.
A passage 5 on the inlet port 4 side and a passage 7 on the outlet port 6 side are communicated via the valve seat 3 and the valve chamber 2. A movable element 25 is movably fitted into the valve chamber 2, and a solenoid 26 is disposed around the outer periphery of the movable element 25. A valve body 27 is attached to the valve body holding portion 25a of the mover 25 via a compression coil spring 28, and this valve body 27 is attached to the valve seat 3.
It is press-fitted so that it can be opened and closed. When a current is applied to the solenoid 26, the movable element 25 moves and the compression coil spring 28 is compressed, and the valve seat 3
The pressing force of the valve body 27 against the valve body 27 increases. The solenoid thrust changes proportionally according to this current value.
When the solenoid thrust and the compression coil spring 28 are balanced, the movable element 25 stops, the amount of deflection of the compression coil spring 28 is determined, and the pressing force of the valve body 27 against the valve seat 3 is also determined. The pressure on the inlet port 4 side increases and the force acting on the valve body 27 is applied to the compression coil spring 2.
When the elastic force of 8 is overcome, the valve body 27 opens the valve seat 3, the inlet port 4 side and the outlet port 6 side communicate with each other, and the pressure on the inlet port 4 side decreases. Therefore, excessive pressure increase on the inlet port 4 side is prevented. Valve body 27
The valve element 27 closes the valve seat 3 when the force acting thereon and the elastic force of the compression coil spring 28 are balanced. This operation is repeated and the pressure on the inlet port 4 side becomes approximately constant. In this way, the set pressure on the inlet port 4 side can be adjusted by changing the current value of the solenoid 26.
(発明が解決しようとする問題点)
ところが、この比例ソレノイド方式において
は、(イ)電流比例の推力を得るための構造上の原因
によりソレノイド推力が余り大きくなく、又ソレ
ノイドのインダクタンス等による消磁遅れのた
め、弁体の切換えが遅くなつて応答性が悪い、(ロ)
ソレノイドの推力特性は熱影響により変わり易い
ため、設定圧力にばらつきが生ずる、(ハ)ソレノイ
ドの吸引作用は可動子ばかりでなくボデイにも働
くため、ヒステリシス損が発生し、ソレノイド推
力が低下して可動子の動作遅れの原因になる、(ニ)
比例ソレノイドは磁気回路に特殊な加工が必要で
ある、等の特有の欠点がある。(Problems to be Solved by the Invention) However, in this proportional solenoid system, (a) the solenoid thrust is not very large due to the structural reasons for obtaining a thrust proportional to the current, and there is a demagnetization delay due to the solenoid's inductance, etc. Therefore, the switching of the valve body becomes slow and the response is poor (b)
Since the thrust characteristics of the solenoid are easily changed by thermal effects, variations occur in the set pressure. (c) The suction action of the solenoid acts not only on the mover but also on the body, causing hysteresis loss and reducing the solenoid thrust. (d) This will cause a delay in the movement of the mover.
Proportional solenoids have their own drawbacks, such as the need for special processing of the magnetic circuit.
そこで、このような種々の欠点を有する比例ソ
レノイド方式を採用せず、それらに代えて新規な
圧電素子方式を採用したものが本発明である。 Therefore, the present invention does not employ the proportional solenoid system which has such various drawbacks, but instead employs a novel piezoelectric element system.
発明の構成
(問題点を解決するための手段)
すなわち、この発明はボデイ内の弁室に弁座を
設けて入口ポート側の通路と出口ポート側の通路
とをこの弁座及び弁室を介して連通し、弁室には
弁座に対し開閉動作可能に弁体を設けた弁におい
て、前記弁室内には、弁体制御用圧電素子積層体
を備え、この弁体制御用圧電素子積層体への電圧
印加に基づき前記弁体の開閉動作方向へ伸縮可能
で且つその伸縮方向へ弁室内を移動可能な可動体
と、この可動体に取付けたばねにより弁座に対し
圧接される弁体と、前記可動体に弁体制御用圧電
素子積層体とは伸縮方向が異なるように取着され
たクランプ用圧電素子積層体を備え、このクラン
プ用圧電素子積層体への電圧印加に基づいて伸縮
し、その収縮時には可動体と共に弁室内を移動可
能であり、伸長時には弁室内面に圧接固定可能な
位置決め装置と、弁室内面に摺接し、前記可動体
又は位置決め装置と共に弁室内を移動可能な区画
部材とを設け、前記区画部材により弁室内に弁座
に対応する弁体収容室とその反対側の背圧室とを
形成し、前記背圧室と入口ポート側の通路とをパ
イロツト通路により連通したものである。Structure of the Invention (Means for Solving Problems) That is, the present invention provides a valve seat in the valve chamber in the body, and connects the passage on the inlet port side and the passage on the outlet port side through the valve seat and the valve chamber. In the valve, the valve chamber is provided with a valve body that can open and close with respect to the valve seat, and the valve chamber is provided with a piezoelectric element laminate for controlling the valve body, and the valve body is provided with a piezoelectric element laminate for controlling the valve body. a movable body that can expand and contract in the direction of opening and closing of the valve body based on voltage application and that can move within the valve chamber in the direction of expansion and contraction; a valve body that is pressed against the valve seat by a spring attached to the movable body; The piezoelectric element laminate for clamping is attached to the valve body so that the direction of expansion and contraction is different from that of the piezoelectric element laminate for controlling the valve body. A positioning device that is movable within the valve chamber together with the movable body and can be fixed to the inner surface of the valve chamber under pressure when extended; and a partition member that is in sliding contact with the inner surface of the valve chamber and is movable within the valve chamber together with the movable body or the positioning device. , a valve body housing chamber corresponding to the valve seat and a back pressure chamber on the opposite side are formed in the valve chamber by the partitioning member, and the back pressure chamber and the passage on the inlet port side are communicated by a pilot passage. .
(作用)
弁体制御用及びクランプ用圧電素子積層体に電
圧指令がない場合には、可動体と位置決め装置及
び区画部材は弁室内を移動可能であり、又、入口
ポートから供給される圧油は弁座と弁体との間を
通つて出口ポートへ流れる。(Function) When there is no voltage command for the piezoelectric element stack for controlling the valve body and for clamping, the movable body, the positioning device, and the partitioning member can move within the valve chamber, and the pressure oil supplied from the inlet port is It flows between the valve seat and the valve body to the outlet port.
まず、クランプ用圧電素子積層体に電圧を印加
すると、この圧電素子積層体の伸長に基づき位置
決め装置が弁室の内面に固定される。次いで、弁
体制御用圧電素子積層体に電圧を印加すると、こ
の圧電素子積層体は印加電圧に応じた寸法だけ伸
長と、この伸長寸法によりばねの弾性力が変わつ
て弁座に対する弁体の圧接力が決まる。 First, when a voltage is applied to the piezoelectric element stack for clamping, the positioning device is fixed to the inner surface of the valve chamber based on the expansion of the piezoelectric element stack. Next, when a voltage is applied to the piezoelectric element laminate for controlling the valve body, this piezoelectric element laminate expands by a dimension corresponding to the applied voltage, and the elastic force of the spring changes depending on this expansion dimension, thereby increasing the pressing force of the valve body against the valve seat. is decided.
クランプ用圧電素子積層体の印加電圧が短時間
切られると、入口ポート側からパイロツト通路を
通つて背圧室に流入された圧油により区画部材が
押圧されるため、可動体と収縮状態にある位置決
め装置及び区画部材は弁座側へ移動し、弁座に対
する弁体の圧接力が増大する。 When the voltage applied to the piezoelectric element laminate for clamping is cut off for a short time, the partition member is pressed by the pressure oil flowing into the back pressure chamber from the inlet port side through the pilot passage, so that it is in a contracted state with the movable body. The positioning device and the partitioning member move toward the valve seat, and the pressure of the valve body against the valve seat increases.
短時間の後、再びクランプ用圧電素子積層体に
電圧が印加されると、この圧電素子積層体の伸長
に基づき位置決め装置は前記移動後の位置で弁室
内面に圧接固定される。従つて、弁体制御用圧電
素子積層体の印加電圧の変更及びクランプ用圧電
素子積層体の印加電圧の入切調節により、入口ポ
ート側の圧力を任意の設定値に保つことが可能と
される。 After a short time, when voltage is applied again to the piezoelectric element stack for clamping, the positioning device is fixed to the inner surface of the valve chamber under pressure at the position after the movement based on the expansion of the piezoelectric element stack. Therefore, it is possible to maintain the pressure on the inlet port side at an arbitrary set value by changing the voltage applied to the valve body control piezoelectric element stack and adjusting the on/off of the applied voltage to the clamping piezoelectric element stack.
(実施例)
まず、この発明を圧力制御弁に具体化した第一
実施例を第1図に従つて説明する。(Example) First, a first example in which the present invention is embodied in a pressure control valve will be described with reference to FIG.
ボデイ1内には弁室2が設けられ、その左側に
弁座3が形成されている。ボデイ1の左側には入
口ポート4及び出口ポート6が設けられ、入口ポ
ート4側の通路5と出口ポート6側の通路7とは
弁座3及び弁室2を介して連通されている。 A valve chamber 2 is provided within the body 1, and a valve seat 3 is formed on the left side thereof. An inlet port 4 and an outlet port 6 are provided on the left side of the body 1, and a passage 5 on the inlet port 4 side and a passage 7 on the outlet port 6 side are communicated via the valve seat 3 and the valve chamber 2.
前記弁室2内には弁体制御用圧電素子積層体1
0からなる可動体9が配設されている。弁体制御
用圧電素子積層体10は1mm厚前後の圧電素子を
その伸縮方向が同一となるように積層したもので
あり、電圧印加に基づくその伸縮方向は弁座3に
対する弁体15の開閉動作方向と同じにされてい
る。従つて、可動体9は前記弁体制御用圧電素子
積層体10により伸縮可能であり、その伸縮方向
へ弁室2内を移動可能になつている。 Inside the valve chamber 2 is a piezoelectric element laminate 1 for controlling the valve body.
A movable body 9 consisting of 0 is disposed. The piezoelectric element laminate 10 for valve body control is made by laminating piezoelectric elements with a thickness of about 1 mm so that their expansion and contraction directions are the same, and the expansion and contraction direction based on voltage application is the opening/closing direction of the valve body 15 with respect to the valve seat 3. is made the same as Therefore, the movable body 9 can be expanded and contracted by the piezoelectric element laminate 10 for controlling the valve body, and can move within the valve chamber 2 in the direction of expansion and contraction.
前記可動体9の基端(第1図において右端)に
は位置決め装置8を構成するクランプ用圧電素子
積層体18が取着されている。このクランプ用圧
電素子積層体18は電圧印加に基づく伸縮方向が
前記弁体制御用圧電素子積層体10の伸縮方向と
直交するように配設されている。従つて、前記位
置決め装置8はクランプ用圧電素子積層体18の
収縮時には可動体9と共に弁室2内を移動可能で
あるが、その圧電素子積層体18の伸長時には弁
室2の内面に圧接固定されるようになつている。 A clamping piezoelectric element laminate 18 constituting the positioning device 8 is attached to the base end (right end in FIG. 1) of the movable body 9. This clamping piezoelectric element laminate 18 is arranged so that the direction of expansion and contraction based on voltage application is perpendicular to the expansion and contraction direction of the valve body control piezoelectric element laminate 10. Therefore, the positioning device 8 is movable within the valve chamber 2 together with the movable body 9 when the piezoelectric element laminate 18 for clamping is contracted, but is pressed and fixed to the inner surface of the valve chamber 2 when the piezoelectric element laminate 18 is expanded. It is becoming more and more common.
そして、前記可動体9と位置決め装置8とは区
画部材を構成する左右一対のガイド11,12に
より一体的に挟着されている。この両ガイド1
1,12は弁室2の内周面に摺接されて弁体制御
用圧電素子積層体10の伸縮方向へ移動可能にな
つている。弁座3に対応する左側ガイド11には
Oリング13が嵌め込まれ、このガイド11と弁
座3との間には弁体収容室2aが設けられてい
る。このガイド11には弁座3に向けて突起14
が突設され、この突起14と対応して弁体15に
も突起15aが設けられている。そして、弁体1
5と可動体9の左側ガイド11との間には前記両
突起14,15aを挿通する弁体用圧縮コイルば
ね19が介在され、このばね19により弁体15
を弁座3の方向へ付勢するようになつている。ま
た、弁体収容室2aにはその内面と左側ガイド1
1との間において可動体リターン用圧縮コイルば
ね20が介在されている。一方、右側ガイド12
にはOリング21が嵌め込まれ、前記弁体収容室
2aの反対側に背圧室2bが設けられている。こ
の背圧室2bと入口ポート4側の通路5とはパイ
ロツト通路22により連通され、このパイロツト
通路22と入口ポート4側との間において入口ポ
ーツト4側の通路5には絞り23が設けられてい
る。右側ガイド12に対応してボデイ1の右側に
は調節ねじ16が螺合され、その内端がこのガイ
ド12に当接し得るようになつている。 The movable body 9 and the positioning device 8 are integrally sandwiched between a pair of left and right guides 11 and 12 that constitute a partitioning member. Both guides 1
1 and 12 are in sliding contact with the inner peripheral surface of the valve chamber 2 and are movable in the direction of expansion and contraction of the piezoelectric element laminate 10 for controlling the valve body. An O-ring 13 is fitted into the left guide 11 corresponding to the valve seat 3, and a valve body housing chamber 2a is provided between the guide 11 and the valve seat 3. This guide 11 has a protrusion 14 extending toward the valve seat 3.
A protrusion 15a is provided on the valve body 15 corresponding to the protrusion 14. And valve body 1
5 and the left guide 11 of the movable body 9 is a compression coil spring 19 for the valve body inserted through both the protrusions 14 and 15a.
is biased towards the valve seat 3. In addition, the valve body housing chamber 2a has an inner surface and a left side guide 1.
1, a compression coil spring 20 for returning the movable body is interposed. On the other hand, the right guide 12
An O-ring 21 is fitted into the valve body, and a back pressure chamber 2b is provided on the opposite side of the valve body housing chamber 2a. This back pressure chamber 2b and the passage 5 on the inlet port 4 side are communicated by a pilot passage 22, and a throttle 23 is provided in the passage 5 on the inlet port 4 side between the pilot passage 22 and the inlet port 4 side. There is. An adjustment screw 16 is screwed onto the right side of the body 1 in correspondence with the right guide 12, and its inner end can come into contact with this guide 12.
この調節ねじ16は前記クランプ用圧電素子積
層体18の収縮時に弁体15が圧電素子積層体1
0の伸縮(矢印A方向)により弁座3を閉じる方
向へ動くときその反力を受けるように可動体9の
右方への移動を規制する。一方、前記クランプ用
圧電素子積層体18の伸長時には、位置決め装置
8が弁室2の内面に圧接固定されるため、この伸
長時には前記調節ねじ16に代わつて、このクラ
ンプ用圧電素子積層体18からなる位置決め装置
8によつて弁座3に対する圧接力の反力が受けら
れる。 This adjusting screw 16 is arranged such that the valve body 15 is fixed to the piezoelectric element laminate 1 when the piezoelectric element laminate 18 for clamping is contracted.
The movement of the movable body 9 to the right is restricted so that when the valve seat 3 moves in the direction of closing due to the expansion and contraction of 0 (in the direction of arrow A), the movable body 9 receives the reaction force. On the other hand, when the piezoelectric element laminate 18 for clamping is extended, the positioning device 8 is fixed to the inner surface of the valve chamber 2 under pressure. The reaction force of the pressing force against the valve seat 3 is received by the positioning device 8.
前記弁体制御用及びクランプ用の両圧電素子積
層体10,18の各圧電素子は圧力設定器17に
接続されている。この圧力設定器17は入口ポー
ト4側の圧力を検出する圧力センサ(図示せず)
からの入力に基づき所定の電圧指令を圧電素子に
出力するようになつている。なお、弁体制御用圧
電素子積層体10の一部を感圧センサとして用
い、前記圧力センサの代用とすることも可能であ
る。 Each piezoelectric element of both the piezoelectric element laminates 10 and 18 for controlling the valve body and for clamping is connected to a pressure setting device 17. This pressure setting device 17 is a pressure sensor (not shown) that detects the pressure on the inlet port 4 side.
A predetermined voltage command is output to the piezoelectric element based on the input from the piezoelectric element. Note that it is also possible to use a part of the piezoelectric element laminate 10 for valve body control as a pressure sensor in place of the pressure sensor.
さて、弁体制御用及びクランプ用圧電素子積層
体10,18に電圧指令がない場合には、可動体
9及び位置決め装置8は弁室2内を移動可能であ
り、弁体15は弁座3に対する圧接力がなく弁座
3に対して離れているか、又は離間可能な状態に
なつている。入口ポート4から供給される圧油は
弁座3と弁体15との間を通つて出口ポート6へ
流れる。 Now, when there is no voltage command for the piezoelectric element stacks 10 and 18 for controlling the valve body and for clamping, the movable body 9 and the positioning device 8 are movable within the valve chamber 2, and the valve body 15 is moved against the valve seat 3. There is no pressing force, and the valve seat 3 is separated from the valve seat 3, or is in a state where it can be separated. Pressure oil supplied from the inlet port 4 passes between the valve seat 3 and the valve body 15 and flows to the outlet port 6.
この状態から、まず調節ねじ16を操作して可
動体9の移動規制位置を決め、その後圧力設定器
17によりクランプ用圧電素子積層体18に電圧
を印加すると、クランプ用圧電素子積層体18が
伸長して位置決め装置8は弁室2の内面に圧接固
定される。次いで、圧力設定器17により弁体制
御用圧電素子積層体10に電圧を印加すると、弁
体制御用圧電素子積層体10は印加電圧に応じた
寸法だけA矢印方向へ伸ばされる。このとき、可
動体9は位置決め装置8により位置決めされてい
るため、可動体9はこの位置を中心にして弁座3
側へ伸長される。この伸長により、弁体用圧縮コ
イルばね19が圧縮され、弁体15が弁座3に圧
接される。弁体15により弁座3が閉じられる
と、入口ポート4側から出口ポーツト6側への流
れは遮断され、入口ポート4側の圧力は上昇す
る。 From this state, first operate the adjustment screw 16 to determine the movement restriction position of the movable body 9, and then apply a voltage to the clamping piezoelectric element laminate 18 using the pressure setting device 17, and the clamping piezoelectric element laminate 18 will expand. The positioning device 8 is fixed to the inner surface of the valve chamber 2 under pressure. Next, when a voltage is applied to the valve body control piezoelectric element stack 10 by the pressure setting device 17, the valve body control piezoelectric element stack 10 is expanded in the direction of arrow A by a dimension corresponding to the applied voltage. At this time, since the movable body 9 is positioned by the positioning device 8, the movable body 9 moves the valve seat 3 around this position.
Extended to the side. Due to this expansion, the valve body compression coil spring 19 is compressed, and the valve body 15 is pressed against the valve seat 3. When the valve seat 3 is closed by the valve body 15, the flow from the inlet port 4 side to the outlet port 6 side is blocked, and the pressure on the inlet port 4 side increases.
この状態で、クランプ用圧電素子積層体18の
印加電圧が短時間切られると、位置決め装置8に
よる弁室2内面への圧接固定状態が解除される。
すると、入口ポート4側からパイロツト通路22
を通つて背圧室2bに流入された圧油が右側ガイ
ド12に作用する。これにより、可動体9と位置
決め装置8及び両ガイド11,12は可動体リタ
ーン用圧縮コイルばね20の付勢力に抗して弁座
3側へ移動し、弁座3に対する弁体15の圧接力
が増大する。短時間の後再びクランプ用圧電素子
積層体18に電圧が印加されると、クランプ用圧
電素子積層体18が伸長して、この伸長により位
置決め装置8は弁室2の内面に圧接固定され、こ
の移動位置で位置決めされる。 In this state, when the voltage applied to the piezoelectric element laminate 18 for clamping is cut off for a short time, the press-fixed state of the positioning device 8 to the inner surface of the valve chamber 2 is released.
Then, the pilot passage 22 is opened from the inlet port 4 side.
Pressure oil flowing into the back pressure chamber 2b through the back pressure chamber 2b acts on the right guide 12. As a result, the movable body 9, the positioning device 8, and both guides 11, 12 move toward the valve seat 3 against the biasing force of the movable body return compression coil spring 20, and the pressure force of the valve body 15 against the valve seat 3 increases. When a voltage is applied to the piezoelectric element stack 18 for clamping again after a short time, the piezoelectric element stack 18 for clamping expands, and the positioning device 8 is fixed to the inner surface of the valve chamber 2 under pressure due to this expansion. Positioned at a moving position.
入口ポート4側の圧力は圧力センサにより検出
され、この検出圧力は圧力設定器17に入力され
る。この検出圧力が入口ポート4側の圧力の設定
値よりも高くなると、弁体15に働く力が弁体用
圧縮コイルばね19の弾性力に打ち勝ち、弁体1
5が弁座3を開いて入口ポート4側と出口ポート
6側とが連通し、入口ポート4側の圧力が下が
る。従つて、入口ポート4側の過度な昇圧を防止
し、入口ポート4側の圧力を任意の設定値に保つ
ことができる。 The pressure on the inlet port 4 side is detected by a pressure sensor, and this detected pressure is input to the pressure setting device 17. When this detected pressure becomes higher than the set value of the pressure on the inlet port 4 side, the force acting on the valve body 15 overcomes the elastic force of the valve body compression coil spring 19, and the valve body 1
5 opens the valve seat 3, the inlet port 4 side and the outlet port 6 side communicate with each other, and the pressure on the inlet port 4 side decreases. Therefore, excessive pressure rise on the inlet port 4 side can be prevented, and the pressure on the inlet port 4 side can be maintained at an arbitrary set value.
弁体制御用圧電素子積層体10の印加電圧が変
更されると、その印加電圧に応じて弁体制御用圧
電素子積層体10が伸縮し、弁体用圧縮コイルば
ね19の撓み量が変わる。この撓み量に応じて弁
座3に対する弁体15の圧接力が決まり、入口ポ
ート4側の設定圧力を変更することができる。 When the voltage applied to the valve body control piezoelectric element stack 10 is changed, the valve body control piezoelectric element stack 10 expands and contracts in accordance with the applied voltage, and the amount of deflection of the valve body compression coil spring 19 changes. The pressing force of the valve body 15 against the valve seat 3 is determined according to this amount of deflection, and the set pressure on the inlet port 4 side can be changed.
前記クランプ用圧電素子積層体18の切時間を
変更すると、パイロツト通路22を通つて背圧室
2bに流入した圧油の作用により位置決め装置8
の固定位置が変わる。従つて、弁体制御用圧電素
子積層体10による弁体15の圧接力の調節に加
えて、前記クランプ用圧電素子積層体18の切時
間変更によつても弁体15の圧接力を調節するこ
とができる。 When the cut-off time of the piezoelectric element laminate 18 for clamping is changed, the positioning device 8
The fixed position of changes. Therefore, in addition to adjusting the pressure contact force of the valve body 15 by the valve body control piezoelectric element stack 10, the pressure contact force of the valve body 15 can also be adjusted by changing the cut-off time of the clamping piezoelectric element stack 18. I can do it.
弁体制御用及びクランプ用圧電素子積層体1
0,18の印加電圧を切ると、弁体制御用圧電素
子積層体10が反A矢印方向へ収縮し、弁座3が
開いて入口ポート4側の圧油は出口ポート6側へ
流れる。この入口ポート4側の通路5には絞り2
3があるため、この絞り23と弁座3との間が低
圧になり、背圧室2bの圧油がパイロツト通路2
2を通つて入口ポート4側の通路5に逆流する。
これにより、可動体9と位置決め装置8及び両ガ
イド11,12は可動体リターン用圧縮コイルば
ね20により右方へ戻されて調節ねじ16に当接
したところで止まる。 Piezoelectric element laminate 1 for valve body control and clamping
When the applied voltages 0 and 18 are cut off, the piezoelectric element laminate 10 for controlling the valve body contracts in the direction opposite to the arrow A, the valve seat 3 opens, and the pressure oil on the inlet port 4 side flows to the outlet port 6 side. The passage 5 on this inlet port 4 side has a restriction 2.
3, the pressure between the throttle 23 and the valve seat 3 becomes low, and the pressure oil in the back pressure chamber 2b flows into the pilot passage 2.
2 and flows back into the passage 5 on the inlet port 4 side.
As a result, the movable body 9, the positioning device 8, and both guides 11, 12 are returned to the right by the movable body return compression coil spring 20 and stop when they come into contact with the adjustment screw 16.
第2図に示す第二実施例は前記第一実施例にお
ける可動体リターン用圧縮コイルばね20に代え
て、背圧室2bに可動体リターン用引張コイルば
ね24を設け、その両端を右側ガイド12及び背
圧室2bの内面に固着したものであり、この第二
実施例の作用は第一実施例の場合と同様である。 In the second embodiment shown in FIG. 2, a tension coil spring 24 for returning the movable body is provided in the back pressure chamber 2b in place of the compression coil spring 20 for returning the movable body in the first embodiment, and both ends of the tension coil spring 24 are connected to the right guide 12. and is fixed to the inner surface of the back pressure chamber 2b, and the operation of this second embodiment is the same as that of the first embodiment.
発明の効果
以上詳述したように、この発明によれば、可動
体に備えた弁体制御用圧電素子積層体による弁体
圧接力の調節に加えて、位置決め装置に備えたク
ランプ用圧電素子積層体及びパイロツト通路によ
る弁体圧接力の調節が行えるので、細かく広範囲
の圧力制御が可能となり弁の制御性が良くなると
いう優れた効果を奏する。Effects of the Invention As detailed above, according to the present invention, in addition to adjusting the pressure contact force of the valve body by the piezoelectric element laminate for controlling the valve body provided in the movable body, the piezoelectric element laminate for clamping provided in the positioning device In addition, since the pressure contact force of the valve body can be adjusted by the pilot passage, fine pressure control over a wide range is possible, and excellent controllability of the valve is achieved.
第1図は第一実施例に係る圧力制御弁を示す断
面図、第2図は第二実施例に係る圧力制御弁を示
す断面図、第3図は従来の圧力制御弁を示す断面
図である。
図中、2は弁室、2aは弁体収容室、2bは背
圧室、3は弁座、4は入口ポート、5は入口ポー
ト側通路、6は出口ポート、8は位置決め装置、
9は可動体、10は弁体制御用圧電素子積層体、
11,12は区画部材としての左右ガイド、15
は弁体、18はクランプ用圧電素子積層体、19
は弁体用圧縮コイルばね、22はパイロツト通
路、23は絞りである。
FIG. 1 is a sectional view showing a pressure control valve according to a first embodiment, FIG. 2 is a sectional view showing a pressure control valve according to a second embodiment, and FIG. 3 is a sectional view showing a conventional pressure control valve. be. In the figure, 2 is a valve chamber, 2a is a valve body storage chamber, 2b is a back pressure chamber, 3 is a valve seat, 4 is an inlet port, 5 is an inlet port side passage, 6 is an outlet port, 8 is a positioning device,
9 is a movable body, 10 is a piezoelectric element laminate for controlling a valve body,
11 and 12 are left and right guides as partition members; 15
is a valve body, 18 is a piezoelectric element laminate for clamping, 19
2 is a compression coil spring for the valve body, 22 is a pilot passage, and 23 is a throttle.
Claims (1)
の通路と出口ポート側の通路とをこの弁座及び弁
室を介して連通し、弁室には弁座に対し開閉動作
可能に弁体を設けた弁において、 前記弁室2内には、 弁体制御用圧電素子積層体10を備え、この弁
体制御用圧電素子積層体10への電圧印加に基づ
き前記弁体15の開閉動作方向へ伸縮可能で且つ
その伸縮方向へ弁室2内を移動可能な可動体9
と、 この可動体9に取付けたばね19により弁座3
に対し圧接される弁体15と、 前記可動体9に弁体制御用圧電素子積層体10
とは伸縮方向が異なるように取着されたクランプ
用圧電素子積層体18を備え、このクランプ用圧
電素子積層体18への電圧印加に基づいて伸縮
し、その収縮時には可動体9と共に弁室2内を移
動可能であり、伸長時には弁室2内面に圧接固定
可能な位置決め装置8と、 弁室2内面に摺接し、前記可動体9又は位置決
め装置8と共に弁室2内を移動可能な区画部材1
1,12とを設け、 前記区画部材11,12により弁室2内に弁座
3に対応する弁体収容室2aとその反対側の背圧
室2bとを形成し、前記背圧室2bと入口ポート
4側の通路5とをパイロツト通路22により連通
した圧電素子式弁。 2 パイロツト通路22と入口ポート4との間に
おいて入口ポート4側の通路5には絞り23が設
けられている特許請求の範囲第1項に記載の圧電
素子式弁。[Claims] 1. A valve seat is provided in the valve chamber in the body, and a passage on the inlet port side and a passage on the outlet port side are communicated via the valve seat and the valve chamber. On the other hand, in a valve provided with a valve body that can be opened and closed, a piezoelectric element stack 10 for controlling the valve body is provided in the valve chamber 2, and the valve body A movable body 9 that can expand and contract in the direction of the opening and closing operation of 15 and can move within the valve chamber 2 in the expansion and contraction direction.
And, the valve seat 3 is moved by the spring 19 attached to this movable body 9.
A valve body 15 is pressed against the movable body 9, and a piezoelectric element laminate 10 for controlling the valve body is attached to the movable body 9.
The clamping piezoelectric element laminate 18 is attached so that the direction of expansion and contraction is different from that of the clamping piezoelectric element laminate 18, which expands and contracts based on voltage application to the clamping piezoelectric element laminate 18, and when contracted, the valve chamber 2 along with the movable body 9. a positioning device 8 that is movable within the valve chamber 2 and can be fixed to the inner surface of the valve chamber 2 under pressure when extended; and a partition member that is in sliding contact with the inner surface of the valve chamber 2 and is movable within the valve chamber 2 together with the movable body 9 or the positioning device 8. 1
1 and 12, and the partition members 11 and 12 form within the valve chamber 2 a valve body storage chamber 2a corresponding to the valve seat 3 and a back pressure chamber 2b on the opposite side, and the back pressure chamber 2b and A piezoelectric element valve in which a pilot passage 22 communicates with a passage 5 on the inlet port 4 side. 2. The piezoelectric element valve according to claim 1, wherein a restriction 23 is provided in the passage 5 on the inlet port 4 side between the pilot passage 22 and the inlet port 4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7460486A JPS62233578A (en) | 1986-03-31 | 1986-03-31 | Piezoelectric element type valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7460486A JPS62233578A (en) | 1986-03-31 | 1986-03-31 | Piezoelectric element type valve |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62233578A JPS62233578A (en) | 1987-10-13 |
| JPH0481665B2 true JPH0481665B2 (en) | 1992-12-24 |
Family
ID=13551932
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7460486A Granted JPS62233578A (en) | 1986-03-31 | 1986-03-31 | Piezoelectric element type valve |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62233578A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW221491B (en) * | 1990-03-16 | 1994-03-01 | Matsushita Electric Industrial Co Ltd | |
| JPH0455607U (en) * | 1990-09-14 | 1992-05-13 | ||
| JP4247386B2 (en) * | 2003-11-28 | 2009-04-02 | 旭有機材工業株式会社 | Flow control valve |
| JP2008008356A (en) * | 2006-06-28 | 2008-01-17 | Noiberuku Kk | Piezoelectric drive mechanism, valve, and brake device |
| CN104879549A (en) * | 2015-04-10 | 2015-09-02 | 孟书芳 | Multi-head-control high-sensitive air valve |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3749537A (en) * | 1971-06-04 | 1973-07-31 | Schriever Design Co Inc | Mold base for injection molding apparatus |
| JPS6078179A (en) * | 1983-10-04 | 1985-05-02 | Shoketsu Kinzoku Kogyo Co Ltd | Hydraulic control valve |
| JPS60129481A (en) * | 1983-12-13 | 1985-07-10 | Nippon Denso Co Ltd | Piezoelectric element drive control valve |
| JPS60129482A (en) * | 1983-12-13 | 1985-07-10 | Nippon Denso Co Ltd | Piezoelectric element drive control valve |
-
1986
- 1986-03-31 JP JP7460486A patent/JPS62233578A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62233578A (en) | 1987-10-13 |
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