JPH047891A - Apparatus and method for drawing - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a manufacturing apparatus for precisely printing thick film resistors used in hybrid ICs and other paste-like fluids on substrates. It is.

[Conventional technology]

As described in Japanese Utility Model Application Publication No. 1-63170, a conventional jet printing device has a stopper for maintaining the distance between the nozzle and the substrate, or a sensor for measuring the distance installed in a position separate from the nozzle. In addition, the discharge amount was controlled by applying a constant air pressure.

[Problem to be solved by the invention]

In the above conventional technology, the position of the displacement sensor and the nozzle are far apart, so if there are irregularities with a short period on the substrate, the height of the substrate detected by the displacement sensor and the height of the substrate directly under the nozzle will be different. Unable to maintain constant spacing between substrates. Therefore, there was a problem that the amount of paste discharged from the nozzle within a unit time and the printing width on the substrate became unstable.

An object of the present invention is to maintain a constant distance between the substrate and the nozzle, and to make the amount of paste discharged from the nozzle and the cross-sectional shape of the paste printed (drawn) on the substrate constant.

[Means to solve the problem]

In order to achieve the above object, the first invention of the present application stores information regarding the unevenness of the object to be drawn measured by a displacement sensor in a temporary storage device, and stores this information on a holding table for fixing the object to be drawn (
and/or the nozzle and/or sensor holder), and the position of the nozzle and/or object to be drawn is read out in the vertical direction, and the position of the nozzle and/or object to be drawn reaches directly above the arbitrary point after a certain period of time of scanning with the displacement sensor. The distance between the object to be drawn and the nozzle is kept constant.

The second invention of the present application measures the capacitance or electrical resistance between the nozzle and the object to be drawn on which a conductive film is formed,
The distance between the object to be drawn and the nozzle can be maintained constant by directly making the unevenness of the object to be drawn directly under the nozzle.

Further, the third invention of the present application is such that the distance between the nozzle and the object to be drawn is determined by detecting the amount of light passing between the two, and the distance between the object to be drawn and the nozzle is kept constant. be.

The fourth invention of the present application is such that the nozzle is arranged so as to be in equilibrium at the position of contact with the object to be drawn, and the discharge pressure is kept constant by balancing the discharge pressure of the fluid and the positional restoring force of the nozzle. The distance between objects to be drawn is kept constant.

Further, the fifth invention of the present application is such that the discharge amount is controlled and kept constant by determining the fluid discharge amount per unit time from the weight reduction rate of the fluid holding container.

The sixth invention of the present application is such that the amount of fluid discharged is controlled and kept constant by driving a piston attached to the piezoelectric element through expansion and contraction of the piezoelectric element.

According to the seventh aspect of the present invention, a guide is provided on the side surface of the discharge port of the nozzle, so that the cross-sectional shape of the fluid during printing is made constant.

Furthermore, the eighth invention of the present application is to form a resistor with high precision and a perfect cross-sectional shape, thereby making it possible to manufacture a high-quality thermal head with small variations in heat generation amount.

It is preferable that the storage device is equipped with a shift register and a synchronizer with a variable period, and is connected to a drive control system to the nozzle.

Furthermore, it is within the scope of the present invention to move the nozzle and the sensor in addition to moving the drawing object fixing and holding table, or instead of moving the drawing object fixing and holding table. Any device that moves relatively to the sensor may be used.

[Operation] The nozzle and the displacement sensor are arranged in series in the moving direction of the object to be drawn, and in such a way that the displacement sensor first comes into contact with an arbitrary printing (drawing) point on the surface of the object to be drawn, and then the nozzle passes over it. It is being Data on the unevenness of the object to be drawn detected by the displacement sensor is stored in a temporary storage device, and is read out when the nozzle reaches directly above the point after passing the displacement sensor, and the nozzle and/or The object to be drawn moves up and down. As a result, the distance between the object to be printed and the nozzle is kept constant, and it becomes possible to print the fluid on the object in a stable pattern.

In addition, when moving the object to be drawn up and down, the sensor distance between objects to be drawn may be affected by fluctuations other than unevenness (that is, vertical movement of the object to be drawn). This can be easily handled by processing a correction to eliminate the influence of vertical movement within the control device, or by moving the sensor vertically in the same direction and distance at the same time as the vertical movement of the object to be drawn.

In addition, the capacitance or electrical resistance between the nozzle and the object to be drawn on which a conductive film is formed is measured, and the nozzle or the substrate (the object to be drawn) is moved up and down to keep it constant. The distance between the object to be drawn and the nozzle is kept constant, making it possible to apply the fluid onto the object in a stable pattern.

In addition, the distance between the nozzle and the object to be drawn is determined by detecting the amount of light passing through it, and by moving the nozzle or the substrate (the object to be drawn) up and down to keep the distance constant, the distance between the nozzle and the object to be drawn is determined. It becomes possible to keep the interval between the objects to be drawn constant and print the fluid in a stable pattern on the object to be drawn.

In addition, the nozzle is arranged so that it is in equilibrium at the contact position with the object to be drawn, and the distance between the nozzle and the object to be drawn is maintained by keeping the discharge pressure constant by balancing the discharge pressure of the fluid and the positional restoring force of the nozzle. It becomes possible to keep the fluid constant and print a stable pattern on the object.

In addition, by determining the amount of fluid discharged per unit time from the weight reduction rate of the fluid holding container and adjusting the amount of fluid discharged to keep it constant, the fluid can be printed on the object in a stable pattern. becomes possible.

Furthermore, by driving a piston attached to the piezoelectric element by expanding and contracting it, it is possible to adjust the amount of fluid discharged and print the fluid on the object in a stable pattern.

In addition, the guide provided on the side of the nozzle's discharge port makes it possible to keep the cross-sectional shape of the fluid constant during printing, thereby making it possible to print a stable pattern on the object to be drawn.

In addition, by forming the resistor with high precision and a uniform surface shape, it is possible to manufacture a high-quality thermal head with small variations in heat generation amount.

〔Example〕

An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is an explanatory diagram of a first embodiment of this embodiment.

Reference numeral 1 is a nozzle, and reference numeral 2 is a paste holding container. Paste 3 is discharged from the opening at the tip of the nozzle 1 by pressurizing the inside of the paste holding container 2.

It is printed on a substrate 10 which is an object to be drawn. The unevenness of the substrate surface 10 is detected by the vertical displacement of the contactor 5, and the displacement data converted into a potential difference in the differential transformer 6 is A/
It becomes digital data in D converter and becomes CP
The data is stored at a predetermined address in the digital memory 9 by U8.

The substrate 10 fixed to the substrate fixing holder 11 moves to the left in the drawing at a speed V, but the CPU'8 is moved by the contactor 5. The data detected by the differential transformer 6 is sequentially stored in the digital memory 9, and in accordance with (2), the unevenness data of the board directly above the nozzle is read out from the digital memory 9, and the amount of displacement of the nozzle 1 is calculated with respect to the step motor 4. The distance between the substrate 10 and the nozzle 1 is controlled to be constant at all times. When the tip of the nozzle 1 reaches the uneven portion detected by the contactor 5, the nozzle 1 follows the unevenness up and down.

The data read from the digital memory 9 is discarded at that point, and its storage area is replaced by a new contact 5. Data detected by the differential transformer 6 is stored.

According to this embodiment, the CPU 8 stores and reads the substrate unevenness data in the storage device and controls the nozzle displacement, so it can flexibly respond to changes in printing parameters such as the substrate movement speed V and the paste printing pattern. It has the effect of gaining.

FIG. 2 is an explanatory diagram of a second embodiment of the present invention.

In this embodiment, the CPU 8 and digital memory 9 of the first embodiment are replaced with a shift register 12 and a variable frequency clock 13. The data is stored in the n-bit part, and then the data is shifted to the left in the figure at every clock count, and the data in the last n-bit part is used by the data converter (D/A converter) 14 to determine the appropriate displacement amount of the nozzle 1. This value is converted to a value that is output to the step motor 4.

The frequency of the clock 13 is determined by the frequency of the contact 5. It is set so that the data detected by the contact 5° differential transformer 6 is read out from the shift register 12 when the nozzle 1 reaches just above the position where the unevenness of the board is detected by the differential transformer 6. Therefore, when the moving speed V of the substrate is changed, this is handled by changing the frequency of the clock 13.

According to this embodiment, a CPU is not required.

This has the effect of simplifying the control system of the device.

FIG. 3 is an explanatory diagram of a third embodiment of the present invention.

In this embodiment, a case is shown in which an insulating paste 3a is printed on a substrate 10 on which comb-shaped electrodes 15 are formed.

Each of the electrodes 15 is wired to be connected to a scanner 16.

When the electrode 15 directly below the conductive nozzle 1 is selected by the scanner 16 and the capacitance between the electrode 15 and the nozzle 1 is measured by the LCR meter 17, the distance d between the nozzle 1 and the electrode 15 is When d is constant, the value measured by the LCR meter 17 also shows a constant value, but when d changes, the value measured by the LCR meter 17 also changes. Therefore nozzle 1
As the scanner 16 moves, the capacitance between the nozzle 1 and the electrode 15 immediately below it is constantly measured, and the nozzle l is moved up and down so that the measured value remains constant.
paste 3 while keeping the distance d between and the substrate 10 constant.
A can be printed.

Note that if the electrode 15 is not comb-shaped but is formed on the entire substrate surface, the nozzle-substrate distance d can be measured by measuring the capacitance between the electrode 15, one location, and the nozzle 1. , the scanner 16 is not required.

According to this embodiment, it is possible to measure the distance between the substrate 10 directly under the nozzle and the nozzle 1 without using a storage device.
This has the advantage of simplifying the configuration of the device.

FIG. 4 is an explanatory diagram of a fourth embodiment of the present invention.

In this embodiment, the change in the distance between the nozzle 1 and the substrate 10 is detected by measuring the capacitance between the nozzle luminaires in the third embodiment, whereas the change in the distance between the nozzle 1 and the substrate 10 during printing of conductive paste is The distance between the nozzle 1 and the substrate 10 is detected by measuring electrical resistance.

In this embodiment, as the substrate moves, the electrode 1 directly below the nozzle 1
5 is selected by the scanner 16, and the electrical resistance value between the nozzle 1 and the electrode 15 is measured by the resistance measuring device 18. By moving the nozzle up and down to keep the measured value constant,
The paste 3b can be printed while keeping the distance between the nozzle 1 and the substrate 10 constant. When the electrode 15 is formed on the entire substrate surface, the nozzle-substrate distance d can be measured by measuring the electrical resistance between one location of the electrode 15 and the nozzle 1, and the scanner 16 is not required. .

According to this embodiment, it is possible to measure the distance between the substrate 10 directly under the nozzle and the nozzle 1 without using a storage device.
This has the advantage of simplifying the configuration of the device.

5 and 6 are explanatory diagrams of a fifth embodiment of the present invention.

In this embodiment, the nozzle 1 is provided with a light-emitting part and a light-receiving part that move up and down separately from the nozzle 1. A method is used to detect changes in intervals of 10.

The light emitting part consists of a light source part 19 and a reflection part 21a, and an LED, a laser diode, or the like is used as the light source. The reflecting mirror 21a is arranged so as to guide the light emitted from the light source section 19 to the light passing section 23 indicated by diagonal lines in the figure, and the light that is not blocked by the light shielding section 22 passes through the reflecting mirror 21b and reaches the light receiving section. 20. The distance between the substrate 10 and the nozzle 1 is made constant by moving the nozzle up and down so that the amount of light received is constant using a phototransistor or a photodiode as the light receiving section 20.

This embodiment has the advantage that the apparatus can be configured with a simpler configuration regardless of the type of paste to be printed.

FIGS. 7 and 8 are explanatory diagrams of a sixth embodiment of the present invention.

In this embodiment, the nozzle 1 and the paste holding container 2 are as follows:
Arm 24 .set to balance at the position where the nozzle 1 contacts the substrate surface. Fulcrum 25° Counterweight 2
6. A balance consisting of a support rod 27 is mounted.

During paste printing, the nozzle is lifted off the substrate due to the paste discharge pressure from the nozzle 1, and by keeping the discharge pressure constant, the distance between the nozzle and the substrate is kept constant. In order to set the interval to an arbitrary value, the discharge pressure is adjusted.

In order to balance the load on the nozzle, it is also effective to support the nozzle with a spring instead of a balance.

This embodiment has the advantage that no driving device is required to maintain a constant distance between the nozzle 1 and the substrate 10.

FIG. 9 is an explanatory diagram of a seventh embodiment of the present invention.

In this embodiment, the nozzle 1 and the paste holding container 2 are connected to a weight scale 28, and the weight scale 28 detects the discharge amount during paste printing as the amount of weight reduction of the paste holding container 2, and the control unit 30 controls the paste holding container 2. The solenoid valve 31 is controlled to adjust the gas pressure applied to the paste holding container so that the weight reduction rate of the paste holding container becomes constant, that is, the amount of paste discharged per unit time becomes constant. Also, the step motor 29
To maintain a constant distance between the nozzle and the substrate, the nozzle and paste holding container are moved up and down according to the unevenness of the substrate directly under the nozzle. Detection of irregularities on the surface of the substrate 10 is performed in the first step.
- carried out by the means described in the sixth embodiment.

According to this embodiment, since the amount of paste ejected per unit time is controlled, there is an advantage that printing can be performed with higher precision.

FIG. 10 is an explanatory diagram of an eighth embodiment of the present invention.

In this embodiment, in a paste holding container 2 with a cylindrical inner side attached to a nozzle 1, the paste 3 inside is in contact with the lower surface of a piston 32, and this piston is connected to a cylinder 36.
The paste 3 is pushed downward by the extension of the PZT actuator 33 held in the nozzle 1 as a result of being pressurized.
more discharged. The amount of displacement of the PZT actuator 33 is determined by the voltage applied to the electrode 34 from the power source 35.

In this embodiment, a voltage waveform is applied to the electrode 34 such that the amount of elongation of the PZT actuator 33 per unit time is constant, that is, the flow rate of the paste 3 discharged from the nozzle is constant. The nozzle 1 is driven up and down in accordance with the irregularities of the substrate detected by the means described in the first to sixth embodiments.

According to this embodiment, in order to adjust the amount of paste discharged by vertical movement of the piston, it is adjusted to match the short-period irregularities of the substrate. It has the advantage of being capable of high-speed control.

FIGS. 11, 12, and 13 are explanatory diagrams of a ninth embodiment of the present invention.

In this embodiment, in order to maintain a constant cross-sectional shape of the printed paste 3, a guide nozzle 37 is formed by forming a recess at the discharge port of the nozzle so that the end of the nozzle tip becomes a side wall. 37a (FIG. 12) and 37b (FIG. 13) are views of this nozzle 1 from below, and the arrows indicate the direction of movement of the substrate. The nozzle is maintained at a spacing just short of contact with the substrate 10 by the means described in the first to sixth embodiments.

According to this embodiment, by changing the cross-sectional shape of the nozzle,
Paste printing with arbitrary and constant cross-sectional shapes is possible.

FIG. 14 is an explanatory diagram of a tenth embodiment of the present invention.

In this embodiment, gas pressure is applied to the paste holding container 2 in which the resistor paste 38 made of a mixture of glass and ruthenium oxide is sealed, and the alumina substrate 39 on which the electrodes are formed is discharged from the nozzle 1. A resistor is drawn and printed on the substrate 39. The substrate fixing holder 11 moves at a constant speed in the direction of the arrow during drawing, and maintains the distance between the nozzle and the alumina substrate 39 by the means described in the first to sixth embodiments, thereby creating a resistor with a -electrical cross-sectional shape. Print body paste. By subjecting the printed substrate to heat treatment, a heating resistor for a thermal head is formed.

According to this embodiment, it is possible to manufacture a high-quality thermal head with small variations in heat generation distribution for a constant input.

FIG. 15 is a system block diagram of an eleventh embodiment of the present invention, and like the tenth embodiment, this embodiment shows an example of application to forming a resistor layer on a thermal head. This example shows a case where the positioning stage and the drawing table are separated.

This device automatically recognizes and positions the thermal printer head substrate on which an electrode pattern has been formed in advance, and then moves the drawing head filled with resistive paste while maintaining a certain clearance.
A resistor is formed by discharging a resistor paste.

In the figure, 40 is a θ-axis pulse stage, 41 is a Y-axis pulse stage, 42 is an X-axis pulse stage, and 43 is an X-axis stage.

First, the substrate 39 is manually mounted on the substrate guide, the substrate 39 is fixed on the θ-axis pulse stage 40 by vacuum suction, and the substrate is positioned by automatic recognition by the image processing device 46.
The resistance line drawing and table transfer are performed automatically, and after the paste drawing, the substrate 39 is taken out to be sent to the next process. In this example, the substrate material is alumina, and the maximum dimension is 30
The size is 0 (mm) x 25 (nn) x 1 (mm).

The drawing start position is determined by the pulse controller 47 when a start operation command is given from the computer 44.
The table moves, the position is recognized by the image processing device 46, and the drawing start position is automatically determined.

The drawing surface is on the ridgeline of the pinpoint glaze layer on which the gold electrode is formed, and the cross-sectional shape of the pinpoint glaze layer and the drawing pattern (■ pattern width, ■ pattern thickness (wet state), ■ drawing speed, ■ pattern cutting) Area, ■Side edge・
The terminal line (each column line) was set appropriately.

This device dispenses paste from a nozzle with a diameter of 100 to 200 μm to draw a thick film resistance pattern on a thermal head electrode formed on a ceramic substrate. , it is necessary to form a resistor pattern with a constant thickness. Therefore automatic positioning of the drawing starting point.

Film thickness constant control is performed during drawing. This device has no direction.

Paste discharge pressure, initial clearance between substrate and nozzle,
Free patterns can be drawn by changing the tape, tape movement speed, etc.

For evaluation of pattern drawing, drawing conditions are set by the personal computer 44, and various data during and after drawing are processed so that set values and actual values can be compared.

This device will be explained below by dividing it into elements.

(1) Automatic positioning device X, Y where the board 39 is mounted and moves one position.

A θ table 49, a camera 45 for image processing, and an image processing device 46. It is composed of controllers 47, 48, etc.

Automatic positioning table 4 mounted on the X-axis table
A thermal head substrate 39 is installed on the heat sensitive head 9 , and a recognition mark is recognized by an image processing device 46 through a camera 45 .

The deviation from the required position is automatically detected by the image processing device 4.
Correction was made using 6.

It is trained in advance by an image processing recognition device, and X o Y o
By moving the θ table, the recognition mark on the board 39 was aligned with the center position of the TV camera 45.

The XYθ table device uses side guides and vacuum suction.
The drive actuator is a multi-axis Fufu disassembly box 2111
11 DC servo motor system.

Reference numeral 51 is a vacuum pump (ejector) prepared for vacuum suction, and reference numeral 52 is an electromagnetic valve disposed in the preceding stage, which is connected to the DPPS controller 48.

(2) X-axis table 43 equipped with pattern drawing device positioning table 49.
It consists of a 50° Z-axis table that drives the nozzle 1, a compressed air control device that discharges the paste, a temperature control device that keeps the viscosity of the paste constant, and so on.

The nozzle head in this example is equipped with a mechanism that measures the undulations (irregularities) of the substrate 39 using a contact displacement type and moves the head up and down according to the amount of displacement to keep the gap between the nozzle 1 and the substrate 39 constant.

The paste discharging method of this example uses air pressure, sets the discharge timing, and suctions the paste by vacuum suction, thereby making it possible to reduce the dead line area at the beginning and end of the drawing pattern.

A pressure gauge 53 is connected to a DC amplifier 54. The Z-axis table 50 is the X-axis table 43
It is connected to the DDPSX and the Z-axis driver 84 as well as to the DC amplifier 56 via the load cell 55.
It is also connected to the DDPS controller 48 via the linear scale 57.

Reference numeral 58 denotes a constant temperature water supply unit constituting the temperature control device, which is connected to the nozzle 1 and paste holding container 2 units, and a HEIDENHAIN METRO 59 attached to this nozzle unit is connected to the DDPS controller 4.
8 is connected.

In addition to the above-mentioned connections, the DDPS controller 48 has C
PU44. DPPSX, Z-axis driver 85, laser type discrimination sensor 60. It is connected to the DC amplifier 56 and also to each electromagnetic valve 61, 62, 63 on the pressure gauge adjustment mechanism side. Incidentally, the laser type discrimination sensor 60 is for identifying the irregularities of the substrate in the nozzle 1.

Furthermore, numeral 64 is a pressure gauge, numeral 65 is an electropneumatic regulator,
Reference numerals 66 and 67 are respectively ACC1 and 68 are vacuum pumps. The pressure gauge 64 is connected to a DC amplifier 69, and the electropneumatic regulator 65 is connected to the CPU 44 via a DA interface port 70. The DC amplifiers 54 and 56 are also connected to the CPU 4 via the AD interface port 71.
Connected to 4.

(3) Nozzle, paste supply device, and discharge method A schematic cross-sectional view of the nozzle 1 used in this example is shown in FIG. 16. The cross-sectional shape of the nozzle is cylindrical, and the nozzle inner diameter is φ0.1 mm.
The outer diameter was φ0.4 mm. Also, the material is 5US304
And so. A hard material such as ruby or titanium nitride was used for the nozzle tip 1.

FIG. 17 shows a schematic cross-sectional view of the paste supply device (syringe unit) used in this example. Reference numeral 72 indicates a syringe, which corresponds to the paste container 2, and reference numeral 73 indicates a plunger.

Paste 3 can be supplied by replacing the syringe unit.
The volume was 3d. The material is polyethylene.

The discharge was performed using a plunger 73 using air pressure.

Automatic pressure setting was performed using an electropneumatic regulator 65 (see FIG. 15), and the primary pressure and secondary pressure were set appropriately. Next, the micro ejector 68 (see Fig. 15)
The paste 3 is suctioned by the pump, and the opening/closing timing of the solenoid valves 61 to 63 can be finely adjusted.

(4) Constant-temperature water supply device for temperature control FIG. 18 shows a sectional view of essential parts of the constant-temperature water supply device for temperature control used in this example. This device has a generally circular tube structure into which the syringe 72 of the paste supply device shown in FIG. 17 is fitted into the center.

The constant temperature water 75 is forced to circulate using a magnetic pump, and is equipped with a heater (not shown) to maintain the temperature within a predetermined range. The constant temperature water 75 flows through the water jacket 74.

(5) Driving nozzle 1 A DC servo motor was used as the drive actuator.

The nozzle position is detected using HEIDENHAIN contact displacement sensor 5.
9 and linear scale 57 were used together.

The nozzle sensing unit is shown in FIG.

The unit shown in FIG. 19 includes a self-weight supporting unit and a sensing unit for detecting substrate waviness (unevenness). The material of the sensor contactor 76 was polyethylene resin. Reference numeral 77 is the sensor arm fulcrum, and reference numeral 78 is the Z
It is an axial displacement sensor.

This example adopted the nozzle soft touch method. FIG. 20 shows a configuration diagram of a sensor for nozzle soft touch control according to this example. This figure explains both the load change detection system using the connection sensor 76 and the soft landing control using the laser type discrimination sensor 60 (see FIG. 15).

Reference numeral 79 indicates the laser beam width, which is measured. Reference numeral 60 is a laser type discrimination sensor, reference numeral 80 is a laser beam, and reference numeral 55 is a load cell that measures changes in load. Reference numeral 82 indicates a coil compression spring, which supports the load of the syringe unit. Reference numeral 81 is a screw stroke for adjusting the spring support force. Reference numeral 80 is a laser beam. Reference numeral 83 is a glass glazed substrate and corresponds to the substrate 39. This figure shows the nozzle in contact with the substrate.

(6) System control device Consists of a system control device that performs automatic positioning and controls the X and Z axis tables to draw a pattern with a constant film thickness.

A personal computer (CPU) 8 sets driving conditions and drawing conditions for the apparatus, and the set conditions are displayed on the display of the CPU 8.

The conditions set by the CPU 8 are transmitted to the controller and stored as control data. Also, control
- Start and stop pattern drawing by operating a switch on the front panel of the machine.

Various data during drawing are stored in the RAM of μmC0N in the controller, and after the operation is completed, they are transmitted to the PC again.
The results are displayed on the above display.

The initial value parameters were set from the CPU 5 before the start of operation, and the setting contents were the following five items.

(a) The distance between the substrate and the nozzle can be set after the sensor for controlling the initial gap two-axis table is switched to the Handenhain length measuring device using an analog switch.

(b) x-axis table speed It is now possible to set a constant speed in steady state.

To adjust the speed gain at startup, a dip switch was installed on the driver so that it could be adjusted in five steps.

(c) Drawing distance It is now possible to draw up to 300m.

(d) Discharge pressure setting The set value waveform of the discharge pressure can be set on the CPUa. At the same time as the operation starts, the discharge pressure is controlled according to this set value.

(e) Discharge timing The timing of discharge start is determined by the contact sensor 76 on the substrate 39.
The setting is now based on the contact start signal for (
(See Figure 19).

The embodiment described in detail above is an application of the first embodiment of the present invention. In this example, a good resistance layer that followed the unevenness of the thermal head could be formed.

In addition, each unit such as a nozzle using this example
It can also be applied to each of the embodiments.

〔Effect of the invention〕

According to the present invention, since the vertical position of the nozzle can be controlled based on the data of the unevenness of the substrate directly under the nozzle, the distance between the substrate and the nozzle can always be kept constant, and the discharge per unit time can be controlled. Since the amount can be made constant, the cross-sectional shape at the time of printing is the same in all parts, that is, it has the effect of printing in a constant pattern.

[Brief explanation of drawings]

FIG. 1 is a system block diagram of an apparatus according to a first embodiment of the invention, FIG. 2 is a system block diagram of an apparatus according to a second embodiment of the invention, and FIG. 3 is a system block diagram of an apparatus according to a third embodiment of the invention. FIG. 4 is a system block diagram of the device according to the fourth embodiment of the present invention. FIG. 5 is a diagram of the arrangement of parts near the nozzle of the device according to the fifth embodiment of the present invention. 6
The figure is an enlarged side view of the nozzle tip of the embodiment device of FIG. 5, FIG. 7 is an enlarged sectional view of the vicinity of the nozzle tip of the sixth embodiment of the present invention, and FIG. 8 is the operation of the embodiment device of FIG. 7. FIG. 9 is a system block diagram of the device according to the seventh embodiment of the present invention, FIG. 1o is a cross-sectional view of the nozzle and syringe unit used in the eighth embodiment of the present invention, and FIG. 11 is a parts layout diagram showing the principle. 12 is an enlarged sectional view of the nozzle tip used in the ninth embodiment of the present invention, FIG. 12 is a bottom view of the nozzle tip of the embodiment device of FIG. 11, and FIG. 14 is a perspective view of a thermal head manufacturing apparatus according to a tenth embodiment of the present invention, FIG. 15 is a block diagram of a system for manufacturing a thermal head according to an eleventh embodiment of the present invention, and FIG. 16 15 is a cross-sectional view of the nozzle applied to the embodiment device of FIG. 15, FIG. 17 is a cross-sectional view of the paste holding container, FIG. 18 is a cross-sectional view of the water jacket, FIG.
0 is a component layout diagram of the sensing unit of the same embodiment. 1... Nozzle, 3... Paste, 4... Step motor, 5... Contact, 6... Differential transformer, 7...
・A/D converter, 8...CPU, 9...digital memory, 10...board, 11...holding stand for fixing the board, 12...shift register, 13...clock, 14... ...D/A converter, 15...electrode, 16
...Scanner, 17...LCR meter, 18...
Resistance measuring device, 19... Light source section, 20... Light receiving section, 2
1a, 21b...reflecting mirror, 22...light shielding part, 23.
...Light passage part, 24... Arm, 25... Fulcrum. 26... Counterweight, 27... Support rod, 28
... Weight scale, 29 ... Step motor, 30 ...
control section. 31...Solenoid valve, 32...Piston, 33...P
ZT actuator, 34... Electrode, 35... Power supply, 36... Cylinder, 37... Nozzle with guide, 3
8...Resistor base, 39...Alumina substrate, 4
0...θ-axis pulse stage, 41...Y-axis pulse stage, 42...X-axis pulse stage, 43...X
Axis stage, 44... Computer, 45... Camera, 46... Image processing device, 47... Pulse controller, 48... Controller, 49... Automatic positioning table, 50... 2 axes Table, 51.68・
...Vacuum pump, 52゜6],,62.63...Solenoid valve, 53.64...Pressure gauge. 54.56.69... DC amplifier, 55... Load cell, 57... Linear scale, 58... Constant temperature water supply unit, 6o... Laser type discrimination sensor, 65...
・Electro-pneumatic regulator, 70...DA interface port, 71...AD interface port, 72
... Syringe, 73... Plunger, 74... Water jacket, 75... Constant temperature water, 76... Sensor contact, 77... Sensor arm fulcrum, 78...
Z-axis displacement sensor, yuzume factor/Δ figure

Claims (13)

[Claims] 1. A holder for fixing an object to be drawn that is movable in a horizontal plane, a nozzle for discharging a drawing fluid onto the object to draw, a container for holding the fluid, and a holder mounted in front of the nozzle. A drawing apparatus comprising a displacement sensor for detecting unevenness of the object to be drawn, comprising: a storage device for temporarily storing unevenness information of the object to be drawn detected by the displacement sensor; and movement of the holding base for fixing the object to be drawn. A drawing apparatus comprising: an interval control mechanism capable of vertically moving the nozzle and/or the object to be drawn when the nozzle reaches a point where unevenness information of the object to be drawn is detected by the sensor. 2. 2. The drawing apparatus according to claim 1, wherein the storage device includes a shift register and a synchronization device with a variable period, and is connected to a nozzle drive control system. 3. A holding table for fixing an object to be drawn that is movable in a horizontal plane, a nozzle for discharging and drawing an electrically insulating fluid onto the object to be drawn having a conductive film partially or entirely formed thereon, and a nozzle for holding the fluid. A drawing apparatus comprising a container, the nozzle tip being an electrode, a capacitance measurement circuit between the conductor film directly under the nozzle and the nozzle, and a drawing device configured to keep the capacitance constant. A drawing apparatus characterized by comprising:/or a mechanism that maintains a constant distance between the nozzle and the object to be drawn by moving the object to be drawn up and down. 4. A holding table for fixing a drawing object movable in a horizontal plane, a nozzle for discharging and drawing a conductive fluid onto the drawing object having a conductive film formed on a partial surface or the entire surface, and a nozzle for holding the fluid. A drawing device comprising a container, with a nozzle tip as an electrode, an electrical resistance measuring circuit between a conductive film directly under the nozzle and the nozzle, and the nozzle and the object to be drawn so that the electrical resistance value is constant. A drawing device comprising a mechanism that maintains a constant distance between the nozzle and the object to be drawn by moving the nozzle up and down. 5. In a drawing device comprising a holding table for fixing the object to be drawn that is movable in a horizontal plane, a nozzle for discharging fluid to draw on the object to be drawn, and a container for holding the fluid, the front part of the nozzle is A light shielding section is provided, and a light source and a light amount detector that move up and down separately from the nozzle are arranged on the object to be drawn so as to sandwich the nozzle blocking section, and the change in the distance between the nozzle and the object to be drawn is blocked. The method includes means for detecting changes in the amount of light reaching the light amount detector from the light source without being obstructed by the light source, and a mechanism that can move the nozzle and/or the object to be drawn up and down so as to keep the amount of light received by the light amount detector constant. A drawing device characterized by comprising: 6. In a drawing device comprising: a holding table for fixing the drawing object movable in a horizontal plane; a nozzle for discharging a fluid to draw on the drawing object; and a container for holding the fluid. The part is set to be in an equilibrium state at a position where it contacts the object to be drawn, and the nozzle is provided with a mechanism that lifts the nozzle by discharging the fluid at a constant pressure during drawing to maintain a constant distance from the object to be drawn. A drawing device characterized by: 7. 7. The drawing apparatus according to claim 1, wherein the fluid holding container is equipped with a weight measuring device, the weight reduction rate of the container is measured during fluid printing, and the discharge amount of the fluid is controlled so as to keep this constant. A drawing device characterized by: 8. 7. The drawing apparatus according to claim 1, wherein a piezoelectric element is attached to the fluid holding container, and the volume of the container is changed by expansion and contraction of the piezoelectric element to control the ejection speed of the fluid. Characteristic drawing device. 9. 9. The drawing apparatus according to claim 1, wherein a guide is provided on a side surface of the nozzle in a direction in which the discharge port of the nozzle moves, thereby making the cross-sectional shape of the fluid constant during drawing. drawing device. 10. 10. The drawing apparatus according to claim 1, wherein the object to be drawn is a heat-sensitive head, and the fluid is a resistor paste for forming a resistor. . 11. The drawing apparatus according to any one of claims 1 to 10, in place of the holding table for fixing the object to be drawn. A drawing apparatus characterized in that a holding table for fixing both the nozzle and the sensor is movable. 12. 11. The drawing apparatus according to claim 1, wherein in addition to the holding stand for fixing the object to be drawn, a holding stand for fixing both the nozzle and the sensor is movable. . 13. In claim 2, the storage device includes a shift register and a variable period synchronization device, the unevenness information detected by the displacement sensor is stored in the shift register in time series, and the nozzle is first detected by the displacement sensor. A drawing method characterized by transmitting corresponding information to a nozzle drive control system when the nozzle moves directly above the previous position.