JPH0447365B2 - - Google Patents
Info
- Publication number
- JPH0447365B2 JPH0447365B2 JP57101344A JP10134482A JPH0447365B2 JP H0447365 B2 JPH0447365 B2 JP H0447365B2 JP 57101344 A JP57101344 A JP 57101344A JP 10134482 A JP10134482 A JP 10134482A JP H0447365 B2 JPH0447365 B2 JP H0447365B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- magnetic pole
- thin film
- pole
- permalloy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Description
【発明の詳細な説明】
(1) 技術分野
本発明は薄膜磁気ヘツドの磁極形成法に関する
ものである。DETAILED DESCRIPTION OF THE INVENTION (1) Technical Field The present invention relates to a method of forming a magnetic pole of a thin film magnetic head.
(2) 背景技術
磁気デイスクや磁気テープ装置に搭載される磁
気ヘツドは高密度記録を達成するために記録再生
効率を高める必要がある。記録再生効率を高める
にはヘツドだけではなく記録媒体ヘツド媒体間隙
等をそれぞれ改善する必要がある。しかしなが
ら、磁気ヘツドに関して見ると、フエライト・コ
アを使用したヘツドはそのインダクタンスの大き
いことにより限界に近ずき近年パーマロイ薄膜を
磁極材料とした薄膜磁気ヘツドが開発されてい
る。パーマロイ薄膜は高周波透磁率が高く飽和磁
束密度もフエライトに比較し非常に大きく記録再
生を行う磁気ヘツド磁極材として有利である。(2) Background Art In order to achieve high-density recording, magnetic heads installed in magnetic disks and magnetic tape devices need to improve their recording and reproducing efficiency. In order to increase the recording and reproducing efficiency, it is necessary to improve not only the head but also the recording medium head, medium gap, etc. However, in terms of magnetic heads, heads using ferrite cores are approaching their limits due to their large inductance, and in recent years thin film magnetic heads using permalloy thin films as magnetic pole materials have been developed. Permalloy thin film has high high frequency magnetic permeability and saturation magnetic flux density which is much higher than that of ferrite, making it advantageous as a magnetic head pole material for recording and reproducing.
(3) 従来技術と問題点
従来のモノリシツクヘツドにおけるフエライト
の磁極の厚みは約100μｍ〜数mmであつたが薄膜
磁気ヘツドにおける例えはパーマロイ磁極の厚み
は数μｍと非常に薄くなつている。また媒体上の
情報記録密度は最近非常に向上し、その記録波長
は１〜2μｍとなつて来ている。(3) Prior Art and Problems The thickness of the ferrite magnetic pole in a conventional monolithic head is about 100 .mu.m to several mm, but in a thin film magnetic head, for example, the thickness of the permalloy magnetic pole is extremely thin, only a few .mu.m. Furthermore, the information recording density on media has recently improved significantly, and the recording wavelength has reached 1 to 2 μm.
第１図は薄膜磁気ヘツドと記録媒体とを説明す
るための概略図であり、第２図及び第３図は従来
の薄膜磁気ヘツドを用いて行なわれた情報の記録
過程、及び情報の再生過程を示す概略図をそれぞ
れ示す。 FIG. 1 is a schematic diagram for explaining a thin film magnetic head and a recording medium, and FIGS. 2 and 3 show an information recording process and an information reproduction process performed using a conventional thin film magnetic head. A schematic diagram showing each is shown.
第１図において薄膜磁気ヘツド１は80Ni−
20Feのパーマロイを蒸着或はスパツタリングに
よつて製造された磁極２と、コイル３とから形成
されている。磁極の間の磁気ギヤツプ部４から漏
れ磁束が生じ、磁気テープ、磁気デイスク等の記
録媒体５に情報磁化６が記録波長Ｌの情報として
記録される。しかしながら、従来の磁気ヘツドに
おいては情報記録過程を示す第２図によれば磁気
ギヤツプ部４近傍の磁極内側部２ａから発生する
磁場の方向７に対して、磁極２の外側部２ｂでは
逆向きの方向の磁場８が発生するために磁気ギヤ
ツプ部４で記録された情報を減衰させる働きをす
るという欠点があつた。 In Fig. 1, the thin film magnetic head 1 is made of 80Ni-
The magnetic pole 2 is made of 20Fe permalloy by vapor deposition or sputtering, and a coil 3. A leakage magnetic flux is generated from the magnetic gap portion 4 between the magnetic poles, and information magnetization 6 is recorded as information at a recording wavelength L on a recording medium 5 such as a magnetic tape or a magnetic disk. However, in the conventional magnetic head, as shown in FIG. 2 showing the information recording process, the direction 7 of the magnetic field generated from the inner side 2a of the magnetic pole near the magnetic gap 4 is reversed in the direction 7 at the outer side 2b of the magnetic pole 2. The disadvantage is that the generated magnetic field 8 in the same direction acts to attenuate the information recorded in the magnetic gap section 4.
更に又、情報の再生過程では磁極２の厚みが約
2μｍであり記録波長が約5μｍと近いため記録媒
体に記録された磁束を磁気ギヤツプ部４で磁束を
検知するのみでなく磁極側面でも磁束を検知して
しまう。そのために再生波形はギヤツプ部４の大
きなピーク７′と反対符号の再生出力８′が得られ
る。このようにしてピーク７′と反対符号の再生
出力８′が発生すると再生過程においてピークシ
フト、ノイズ等の原因となり特性の劣化をもたら
す。 Furthermore, during the information reproduction process, the thickness of magnetic pole 2 is approximately
2 μm and the recording wavelength is close to about 5 μm, so the magnetic flux recorded on the recording medium is not only detected by the magnetic gap part 4 but also by the side surface of the magnetic pole. Therefore, the reproduced waveform has a large peak 7' in the gap portion 4 and a reproduced output 8' having the opposite sign. In this way, when the reproduced output 8' having the opposite sign to the peak 7' occurs, it causes a peak shift, noise, etc. in the reproduction process, resulting in deterioration of the characteristics.
(4) 発明の目的
上記欠点を鑑み本発明は情報記録に高性能な薄
膜磁気ヘツドの磁極形成法を提供することを目的
とする。(4) Purpose of the Invention In view of the above-mentioned drawbacks, an object of the present invention is to provide a method for forming magnetic poles of a thin film magnetic head with high performance for information recording.
(5) 発明の構成
本発明の目的は電着法により磁極を形成する薄
膜磁気ヘツドの磁極形成法において前記磁極の外
側部の磁気特性（透磁率及び飽和磁束）が小さく
内側部の磁気特性（透磁率及び飽和磁束）が大き
くなるように磁極の形成時に、磁極電流密度を膜
厚方向に変化させる電着法により磁極を形成する
ことを特徴とする薄膜磁気ヘツドの磁極形成法に
よつて達成される。(5) Structure of the Invention The object of the present invention is to provide a magnetic pole forming method for a thin film magnetic head in which the magnetic pole is formed by electrodeposition, in which the magnetic properties (magnetic permeability and saturation magnetic flux) of the outer part of the magnetic pole are small and the magnetic properties (magnetic permeability and saturation magnetic flux) of the inner part are small. This is achieved by a magnetic pole forming method for a thin film magnetic head, which is characterized in that the magnetic pole is formed by an electrodeposition method that changes the magnetic pole current density in the film thickness direction when forming the magnetic pole so as to increase the magnetic permeability and saturation magnetic flux). be done.
(6) 発明の実施例
以下本発明の実施例を図面によつて詳述する。
第４図は本発明に係る方法で作られた薄膜磁気ヘ
ツドを示す概略図である。第４図において磁気ヘ
ツド部の磁極先端内側部Ａ及びA′には透磁率μ
及び飽和磁束Msは大きくそして該磁極先端外側
部Ｂ及びB′には透磁率μ、及び飽和磁束Msは小
さくなるようにパーマロイの組成を変えてメツキ
によつて形成する。メツキの方向はＣである。本
発明に係るメツキ方法として、従来から用いられ
ているパーマロイの磁気特性と電流密度（Ａ／ｄ
m2）との関係を示す第５図、及びパーマロイ中の
Ni％と電流密度（Ａ／ｄm2）との関係を示す第
６図を参考にする。第５図から明らかなように電
流密度が２〔Ａ／ｄm2）〕の時に磁気特性、すなわ
ち飽和磁束及び透磁率がほヾ最大となつている。
又第６図から電流密度が２〔Ａ／ｄm2〕の時のパ
ーマロイのNi％を求めると約80％であることが
わかる。また例えば電流密度が１〔Ａ／ｄm2〕の
時に、飽和磁束及び透磁率の値は小さくなつてお
り、この時の組成は第６図からパーマロイのNi
％は約85％であることがわかる。上記のように
種々の組成のパーマロイの電流密度依存性を利用
して、本発明の磁極を次のように形成する。まず
基板（図示せず）上に電流密度を１〔Ａ／ｄm2〕
流して85Ni−15Feの組成のパーマロイのメツキ
膜を厚みが約1μｍになるように形成し、第４図
に示したＢ部を形成し、次に電流密度を２〔Ａ／
ｄm2〕にして80Ni−20Feの組成のパーマロイの
メツキ膜を厚みが約1μｍになるように形成して
第４図に示したＡ部を形成する。次に磁極間隙及
びコイルを公知の方法で形成した後、磁極の
A′部をＡ部のメツキ時と同じ電流密度の２〔Ａ／
ｄm2〕でメツキを行ない、厚さ約1μｍの80Ni−
20Feの組成のパーマロイを形成し、更にその上
に上記のＢ部のメツキ時と同じ電流密度の１
〔Ａ／ｄm2〕でメツキを行ない、厚さ約1μｍの
85Ni−15Feの組成のパーマロイを形成した。こ
のようにして磁気ヘツドの磁極外側部（第４図
Ｂ、B′部）には飽和磁束及び透磁率が小さい、
すなわち、すなわち磁気特性の小さいパーマロイ
磁極が形成され、一方、磁極の内側部（第４図
Ａ、A′部）には飽和磁束及び透磁率が大きい、
すなわち磁気特性の大きいパーマロイ磁極が形成
される。このような方法によつて形成された本発
明に係る磁気ヘツドの磁極によれば記録過程にお
いて磁極のギヤツプ部で発生する磁場は従来通り
であるが磁極の外側部はその材質の磁気特性が小
さいことから、従来発生していたギヤツプ部での
磁場と反対符号の磁場の発生が解消され、ギヤツ
プ部で記録した情報の減衰を防ぐことが可能とな
り、しかも再生過程において、ギヤツプ部近傍の
磁束のみの検出がなされ磁極側面（外側部）の磁
束は検知されず従つてギヤツプ部の大きなピーク
と反対符号の再生出力は発生せず、ピークシフ
ト、周波数特性のうねり等の不具合が解消される
のである。(6) Examples of the invention Examples of the invention will be described in detail below with reference to the drawings.
FIG. 4 is a schematic diagram showing a thin film magnetic head made by the method according to the invention. In Fig. 4, the inner parts A and A' of the magnetic pole tips of the magnetic head have magnetic permeability μ.
The permalloy composition is changed and formed by plating so that the magnetic permeability μ and the saturation magnetic flux Ms are large, and the magnetic permeability μ and the saturation magnetic flux Ms are small at the outer portions B and B' of the magnetic pole tips. The plating direction is C. As a plating method according to the present invention, the magnetic properties and current density (A/d
Figure 5 shows the relationship between m2 ) and permalloy.
Refer to FIG. 6, which shows the relationship between Ni% and current density (A/dm 2 ). As is clear from FIG. 5, when the current density is 2 [A/dm 2 ], the magnetic properties, ie, the saturation magnetic flux and magnetic permeability, are almost at their maximum.
Also, from FIG. 6, it can be seen that the Ni% of permalloy when the current density is 2 [A/dm 2 ] is approximately 80%. For example, when the current density is 1 [A/dm 2 ], the values of saturation magnetic flux and magnetic permeability become small, and the composition at this time is as shown in Fig. 6.
It can be seen that the percentage is approximately 85%. As described above, the magnetic pole of the present invention is formed as follows by utilizing the current density dependence of permalloy having various compositions. First, a current density of 1 [A/dm 2 ] is applied to the substrate (not shown).
A plating film of permalloy having a composition of 85Ni-15Fe was formed to a thickness of about 1 μm to form part B shown in Fig. 4, and then the current density was set to 2 [A/
dm 2 ], a permalloy plating film having a composition of 80Ni-20Fe is formed to a thickness of about 1 μm to form part A shown in FIG. Next, after forming the magnetic pole gap and coil by a known method, the magnetic pole
2 [A/
dm 2 ] to a thickness of approximately 1 μm.
A permalloy with a composition of 20Fe is formed, and on top of that a permalloy with the same current density as when plating part B above is applied.
Plating is carried out at [A/dm 2 ], and the thickness is approximately 1 μm.
A permalloy with a composition of 85Ni-15Fe was formed. In this way, the outer part of the magnetic pole of the magnetic head (parts B and B' in Figure 4) has a small saturation magnetic flux and magnetic permeability.
That is, a permalloy magnetic pole with small magnetic properties is formed, while the inner part of the magnetic pole (parts A and A' in FIG. 4) has high saturation magnetic flux and magnetic permeability.
That is, a permalloy magnetic pole with great magnetic properties is formed. According to the magnetic pole of the magnetic head according to the present invention formed by such a method, the magnetic field generated at the gap part of the magnetic pole during the recording process is the same as before, but the magnetic properties of the material of the outer part of the magnetic pole are small. This eliminates the generation of a magnetic field with the opposite sign to the magnetic field at the gap, which previously occurred, making it possible to prevent information recorded at the gap from attenuating.Furthermore, during the playback process, only the magnetic flux near the gap is eliminated. is detected, and the magnetic flux on the side surface (outer side) of the magnetic pole is not detected.Therefore, a reproduced output with the opposite sign to the large peak in the gap region does not occur, and problems such as peak shifts and waviness in frequency characteristics are eliminated. .
本発明の磁極形成の際薄膜形成方法としてメツ
キ法を用いたがこの構造はその他の薄膜形成法で
も可能であり、また磁極の材質をパーマロイの２
種類のみの組成を用いたが磁極ギヤツプ近傍（内
側部）の磁気特性が大であり、一方磁極側面（外
側部）の磁気特性が小である組成になるならパー
マロイの２種の組成のみならず多種の組成にして
もよい。 Although the plating method was used as a thin film forming method when forming the magnetic pole of the present invention, this structure can also be formed using other thin film forming methods, and the magnetic pole material may be permalloy 2.
Although only one type of composition was used, if the magnetic properties near the magnetic pole gap (inner part) are large and the magnetic properties on the side face (outer part) of the magnetic pole are small, then not only the two types of permalloy compositions but also Various compositions may be used.
(7) 発明の効果
以上の説明から明らかなように本発明に係る方
法によつて形成された磁気ヘツドの磁極によれ
ば、記録媒体に記録する記録過程及び再生過程に
おいてギヤツプ近傍、（磁極内側部）で発生する
磁場と反対符号の磁場が発生せず高性能な薄膜磁
気ヘツドの磁極を得ることが出来る。(7) Effects of the Invention As is clear from the above explanation, the magnetic pole of the magnetic head formed by the method according to the present invention can be used near the gap (inner side of the magnetic pole) during the recording and reproducing processes of recording on a recording medium. Since a magnetic field with the opposite sign to the magnetic field generated in section 1) is not generated, it is possible to obtain a magnetic pole of a high-performance thin film magnetic head.
第１図は薄膜磁気ヘツドと記録媒体とを説明す
るための概略図であり、第２図及び第３図は従来
の薄膜磁気ヘツドを用いて行なわれた情報の記録
過程、及び情報の再生過程を示す概略図を示し、
第４図は本発明に係る方法で作られた薄膜磁気ヘ
ツド概略図であり、第５図はパーマロイの磁気特
性と電流密度との関係を示すグラフ、第６図はパ
ーマロイのNi％と電流密度との関係を示すグラ
フである。
１……磁気ヘツド、２……磁極、３……コイ
ル、４……磁気ギヤツプ、５……記録媒体、６…
…情報磁化、７……ギヤツプ近傍（磁極内側部）
で発生した磁場、８……磁極外側部で発生した反
対符号磁場。
FIG. 1 is a schematic diagram for explaining a thin film magnetic head and a recording medium, and FIGS. 2 and 3 show an information recording process and an information reproduction process performed using a conventional thin film magnetic head. shows a schematic diagram showing
Fig. 4 is a schematic diagram of a thin film magnetic head made by the method according to the present invention, Fig. 5 is a graph showing the relationship between permalloy's magnetic properties and current density, and Fig. 6 is a graph showing the relationship between permalloy's Ni% and current density. It is a graph showing the relationship between DESCRIPTION OF SYMBOLS 1... Magnetic head, 2... Magnetic pole, 3... Coil, 4... Magnetic gap, 5... Recording medium, 6...
...Information magnetization, 7...Near the gap (inner part of the magnetic pole)
8... Magnetic field of opposite sign generated at the outer part of the magnetic pole.
Claims (1)
の磁極形成法において、前記磁極の外側部の透磁
率及び飽和磁束密度が小さく、内側部の透磁率及
び飽和磁束密度が大きくなるように磁極の形成時
に、電気メツキ電流密度を膜厚方向に変化させる
電着法により磁極を形成することを特徴とする薄
膜磁気ヘツドの磁極形成方法。1. In a method of forming a magnetic pole of a thin film magnetic head in which the magnetic pole is formed by electrodeposition, the magnetic pole is formed so that the magnetic permeability and saturation magnetic flux density of the outer part of the magnetic pole are small, and the magnetic permeability and saturation magnetic flux density of the inner part are large. A method for forming a magnetic pole of a thin film magnetic head, characterized in that the magnetic pole is sometimes formed by an electrodeposition method in which the electroplating current density is varied in the film thickness direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10134482A JPS58220234A (en) | 1982-06-15 | 1982-06-15 | Formation of magnetic electrode for thin film magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10134482A JPS58220234A (en) | 1982-06-15 | 1982-06-15 | Formation of magnetic electrode for thin film magnetic head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58220234A JPS58220234A (en) | 1983-12-21 |
| JPH0447365B2 true JPH0447365B2 (en) | 1992-08-03 |
Family
ID=14298219
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10134482A Granted JPS58220234A (en) | 1982-06-15 | 1982-06-15 | Formation of magnetic electrode for thin film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58220234A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3420746A1 (en) * | 1984-06-04 | 1985-12-05 | Siemens AG, 1000 Berlin und 8000 München | MAGNETIC HEAD CONSTRUCTED IN LAYERS FOR A RECORDING MEDIUM TO BE MAGNETIZED |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2264350B1 (en) * | 1974-03-11 | 1978-09-29 | Cii | |
| JPS5724015A (en) * | 1980-07-17 | 1982-02-08 | Mitsubishi Electric Corp | Thin film magnetic head |
-
1982
- 1982-06-15 JP JP10134482A patent/JPS58220234A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58220234A (en) | 1983-12-21 |
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