JPH0422314Y2 - - Google Patents

Description

[Detailed description of the invention] [Field of industrial application] This invention relates to a burn-in processing device that performs burn-in processing of ICs, and in particular, a small-sized burn-in processing device that can uniformly heat the inside of a built-in constant temperature chamber to a predetermined temperature. The present invention relates to a burn-in processing device.

[Prior Art] Conventionally, for example, a double-sided burn-in processing device 1 capable of performing IC burn-in processing has a constant temperature oven 3 having an opening/closing door 2 on each of its front and rear sides, and a signal current supply section, as shown in FIG. 4.
The thermostatic chamber 3 is surrounded by a side wall 5 filled with a heat insulating material, a ceiling 6, and a bottom 7, and is surrounded by an outer surface of the side wall 5 on the opposite side to the one side wall 5 facing the signal current supply section 4. Attach heater 8, and
The heated air is supplied from the bottom part 7 into the thermostatic oven 3 through a ventilation pipe 10 containing a fan 9, and the heated air in this thermostatic oven 3 is supplied from the ceiling part 6 through the ventilation pipe 10. The heater 8
The thermostatic oven 3
It is designed to maintain a constant temperature inside.

Note that reference numeral 11 indicates casters that allow movement of this burn-in processing apparatus.

[Problems to be solved by the invention] However, in such conventional burn-in treatment equipment, a ventilation pipe is drawn out from the ceiling of the thermostatic oven and is connected to the bottom after running along the side wall of the thermostatic oven. Furthermore, since the heater is disposed on the side wall of the constant temperature oven, the width of the burn-in processing apparatus increases accordingly. Therefore, when a large number of burn-in processing devices are arranged, a loss occurs in the mounting space.

Furthermore, in the burn-in processing apparatus, since the ventilation fan is drawn out outside the thermostatic chamber, there is a loss of heat due to the ventilation fan, resulting in poor thermal efficiency.

Furthermore, in the burn-in processing apparatus, the damper on the ceiling exhausts excess hot air from inside the thermostatic chamber while sucking in cold outside air, making it impossible to uniformly maintain the inside of the thermostatic chamber at a predetermined temperature.

Therefore, it is an object of this invention to provide a burn-in processing device which can reduce the size of the burn-in processing device itself to improve the efficiency of its mounting space, maintain the inside of a thermostatic chamber at a predetermined temperature, and has good thermal efficiency. is a technical issue.

[Means for solving the problem] In order to solve the above-mentioned technical problem, this invention makes it possible to mount the DUT board from the front and the back, and to install the inside of this constant temperature chamber parallel to the front and back. In a double-sided burn-in treatment equipment that has a constant temperature chamber divided into a front constant temperature chamber and a rear constant temperature chamber, the upper and lower parts of which are connected by a partition material, a constant temperature is set at either the upper or lower part of the front constant temperature chamber or the rear constant temperature chamber. A blower fan and a heater are installed to blow heated gas into the tank, and a blower fan is installed at the top or bottom of the front thermostatic chamber or the lower thermostatic chamber to suck in the gas inside the thermostatic chamber. An intake pipe that supplies outside air to the front thermostatic chamber or rear thermostatic chamber is installed near the ventilation fan that blows air into the interior, and an intake pipe is installed near the ventilation fan that sucks the gas from the rear thermostatic chamber or the front thermostatic chamber. An exhaust pipe for discharging the hot air inside the thermostatic oven is provided, and an exhaust pipe for discharging the hot air inside the thermostatic oven is provided at the bottom or top of the front thermostatic oven or the rear thermostatic oven where a heater or blower fan is not installed. and an intake pipe for sucking outside air, and the gas in the constant temperature chamber heated by the heater is circulated between the front constant temperature chamber and the rear constant temperature chamber by the blower fan, and the exhaust pipe and The burn-in treatment apparatus is characterized in that the inside of the thermostatic chamber can be maintained at a predetermined temperature by exhausting superheated gas and sucking in movable gas through the intake pipe.

The burn-in processing device is a so-called double-sided burn-in processing device, and has a constant temperature chamber containing a built-in rack on which a large number of DUT substrates can be mounted. When the front door and rear door of this burn-in processing device are opened, The thermostatic chamber is opened and the DUT substrate can be mounted on the rack inside.

The entire body of the constant temperature oven is surrounded by a heat insulating material to prevent the internal heat from escaping easily.

The constant temperature chamber is divided into a front constant temperature chamber and a rear constant temperature chamber by plate-shaped partitions parallel to the front and back sides of the constant temperature chamber, and the upper and lower parts of the front constant temperature chamber and the rear constant temperature chamber are respectively communicate. A rack for mounting a large number of DUT boards is arranged in each of the front constant temperature chamber and the rear constant temperature chamber.

A heater and a blower fan are arranged in the thermostatic chamber to heat the gas, such as air, in the thermostatic chamber, and when the blower fan is driven, the air in the thermostatic chamber heated by the heater is transferred to the front thermostatic chamber. and the rear constant temperature bath. The purpose of circulating air within the thermostatic oven is to make the temperature of the air uniform within the thermostatic oven. The heater and the blower fan may be arranged in the thermostatic oven body at the upper and/or lower parts of the front thermostatic oven and/or the rear thermostatic oven. It is not preferable to arrange a heater and a blower fan in the front thermostatic chamber or the rear thermostatic chamber, since this impairs the efficient arrangement of the rack.

The number of ventilation fans to be arranged may be one or more. In order to ensure smooth and efficient air circulation within the thermostatic oven, it is preferable to arrange a blower fan at the top of each of the front thermostatic oven and the rear thermostatic oven, for example. In this way, for example, a blower fan placed at the top of the rear thermostatic chamber can send air into the rear thermostatic chamber, and a blower fan placed at the top of the front thermostatic chamber can suck in the air inside the front thermostatic chamber. As a result, air circulation between the front thermostatic chamber and the rear thermostatic chamber can be made extremely smooth.

As long as the blowing fan can blow gas such as air, an appropriate type can be used depending on the desired blowing speed of the gas to be blown to the front thermostatic chamber and the rear thermostatic chamber. A propeller fan can also be used as the blower fan, but a Shirotskov fan is particularly preferred. Sirotskovan is
This is because gas can be pumped.

The blower fan circulates the gas heated by the heater to the front constant temperature chamber and the rear constant temperature chamber.
Preferably, the heater is placed close to the blower fan. For example, if a blower fan is placed at the top of the front thermostatic chamber and at the top of the rear thermostatic chamber, the heater is placed between the pair of blowing fans, and one blower fan draws air from the front thermostatic chamber, for example. By sending the heated gas to the heater to heat it, and blowing the heated gas to, for example, the rear thermostat using the other blower fan, the entire thermostatic oven can be efficiently heated.

As the heater, a normal nichrome wire heater or the like can be used, and the temperature inside the thermostatic oven can be controlled by turning on and off the electricity depending on the temperature inside the thermostatic oven.

If the front or rear thermostatic chamber becomes overheated if heated gas is directly blown into the front or rear thermostatic chamber, the intake pipe will inside
If the heated gas is heated by the IC and sent directly to the other constant temperature chamber, and the other constant temperature chamber becomes overheated, the superheated gas can be mixed with cold air from outside to quickly remove the superheated gas. Provided for cooling. Therefore, as long as this intake pipe can suitably mix the heated gas supplied to the front thermostatic chamber and the rear thermostatic chamber with outside air, there are no particular limitations on its installation position or number; It can be determined as appropriate depending on the shape, structure, etc.

The exhaust pipe is provided to exhaust the superheated gas in the front constant temperature chamber and the rear constant temperature chamber to the outside of the constant temperature chamber. Therefore, it is preferable to install them on the leeward side of the airflow in the front thermostatic chamber and the rear thermostatic chamber.

The intake pipe and the exhaust pipe are used to quickly maintain the temperature inside the front thermostatic chamber and the rear thermostatic chamber at a predetermined temperature by sucking in cold air from outside and discharging superheated gas inside the thermostatic chamber to the outside of the constant temperature chamber. Therefore, it is preferable that the intake air amount and the exhaust air amount can be adjusted according to the temperature in the front constant temperature chamber and the rear constant temperature chamber. Therefore, the intake pipe and the exhaust pipe are provided with control valves, opening/closing lids, etc., and the amount of intake air is adjusted according to the temperature inside the thermostatic chamber detected by the temperature sensors placed inside the front thermostatic chamber and the rear thermostatic chamber. It is also preferable to provide a displacement adjustment mechanism.

[Function] With the above configuration, the constant temperature chamber is divided into the front constant temperature chamber and the rear constant temperature chamber by the partition material, and it is easy to attach the DUT board to each of the front constant temperature chamber and the rear constant temperature chamber. is placed. The partition wall material does not completely divide the inside of the thermostatic chamber into two, but communicates between the upper and lower parts, so that the gas, such as air, heated by the heater placed inside the thermostatic chamber is heated by a blower fan, for example, from the front section. It will circulate from the constant temperature chamber to the rear constant temperature chamber, and from the rear constant temperature chamber to the front constant temperature chamber. When the temperature inside the front constant temperature chamber or the rear constant temperature chamber becomes higher than a predetermined temperature, cold air from the outside is sucked in through the intake pipe, this cold air is mixed with superheated gas, and the superheated gas is discharged from the exhaust pipe. The temperature inside the front thermostatic chamber and the rear thermostatic chamber will drop. At this time, by adjusting the intake air amount and exhaust amount of the intake pipe and the exhaust pipe, the temperature drift inside the front thermostatic chamber and the rear thermostatic chamber becomes even smaller.
When the temperature inside the front thermostatic oven or the rear thermostatic oven falls below a predetermined temperature, the intake pipe and the exhaust pipe are closed and the heater is used to heat the oven, thereby increasing the temperature inside the thermostatic oven.

[Example] Next, an example of this invention will be described with reference to the drawings.

As shown in FIG. 1, a burn-in processing device 12
has a constant temperature bath 14 having an opening/closing door 13 on its front and back surfaces, respectively, and a signal current supply section 15. This constant temperature bath 14 is surrounded by side walls, a ceiling, and a bottom filled with a heat insulating material. This constant temperature chamber 14 is constructed by arranging a plate-shaped partition wall material 16 in parallel to the front and back surfaces of this burn-in processing device 12, thereby creating a front constant temperature chamber 17 and a rear constant temperature chamber 18.
Inside the constant temperature chamber 14, a blower chamber 19 is provided above the front constant temperature chamber 17 and rear constant temperature chamber 18, and a heater chamber 20 is provided further above the blower chamber 19.

Between the blower chamber 19 and the front constant temperature chamber 17 and rear constant temperature chamber 18, a blower fin 21 is arranged in a row, and the front constant temperature chamber 17 and rear constant temperature chamber 18 are communicated with each other by providing the blower fins 21 in a row. At the same time,
By changing the angle of the blower fins 21, the direction of air flow can be changed.

As shown in FIG. 2, the blower chamber 19 and the heater chamber 20 are separated by a horizontal plate 23 having a pair of openings 22 that communicate the blower chamber 19 and the heater chamber 20.

In this blower room 19, in the middle part between the left and right sides in FIG. 1, as shown in FIG. A second Sirotskov fan 25 is placed. This 1st Sirotskov fan 2
4 and the second Sirotskov fan 25 each have their rotating shafts passing through the heater chamber 20 and projecting to the upper surface of the ceiling of the burn-in processing apparatus 12, and as shown in FIG.
6, it is configured to rotate. This first Shirotsuko fan 24 sucks the air in the front thermostat 17 and passes it through the opening 22 to the heater chamber 2.
The second Shirotsuko fan 25 sucks the air in the heater chamber 20 and supplies it to the rear thermostatic chamber 1.
8.

A heater 27 is arranged in the heater chamber 20, and this heater 27 is connected to the signal current supply section 15.
Electric power controlled by a control unit is supplied from a power source inside the air conditioner, and the air blown by the first Sirotskov fan 24 is heated.

The lower part of the front thermostatic chamber 17 and the rear thermostatic chamber 18 is
As shown in FIG. 2, they communicate through a communication chamber 28,
The communication chamber 28, the front thermostatic chamber 17, and the rear thermostatic chamber 18 are partitioned by an air-permeable member such as a screen plate 29.

On the ceiling of the heater chamber 20, there are signs shown in FIGS.
As shown in FIG. 3, a first exhaust pipe 30 is provided above the front thermostatic chamber 17, and a first intake pipe 31 is disposed above the rear thermostatic chamber 18. . The outer openings of the first exhaust pipe 30 and the first intake pipe 31 are connected to the burn-in processing device 12.
openings in a line from the front to the back on the upper surface of the ceiling, guided by guide rails 32 arranged on both sides of each outer opening 22, and coupled to both ends of screw screws 34 driven by a motor 33. The lid 35 is opened and closed, and the exhaust volume of the first exhaust pipe 30 and the intake volume of the first intake pipe 31 are adjusted. Note that the motor 33
The driving amount of the constant temperature chamber 1 is determined by temperature sensors (not shown) placed at one or more locations in the front constant temperature chamber 17 and the rear constant temperature chamber 18.
4 The opening/closing lid 35 is determined according to the internal temperature.
Accordingly, the first exhaust pipe 30 and the first intake pipe 31
The amount of closure of the outer opening of is adjusted.

At the bottom of the communication chamber 28, a second exhaust pipe 36 located below the rear constant temperature chamber 18 and a front constant temperature chamber 17 are provided.
A second intake pipe 37 located below is arranged. The outer opening of this second exhaust pipe 36 and the second
The outer openings of the intake pipes 37 are openings in a line from the front to the back at the bottom of the thermostatic chamber 14,
Similarly to the first exhaust pipe 30 and the first intake pipe 31, the mechanism enables the opening and closing of their outer openings, and the displacement of the second exhaust pipe 36 and the intake volume of the second intake pipe 37 can be adjusted. I'm starting to be able to do it. In FIG. 4, 38 is a guide rail, 39 is a motor, 40 is a screw, and 4
1 is the opening/closing lid.

Next, the operation of the configuration of the above embodiment will be explained.

The DUT is placed in a rack (not shown) placed inside each of the front constant temperature chamber 17 and the rear constant temperature chamber 18.
After mounting the circuit board (not shown), close the front opening/closing door 13 and the rear opening/closing door 13, and open the constant temperature oven 14.
to be sealed. Next, the first and second Schorozhof fans 24 and 25 are driven, and the heater 27 is energized. Then, the air in the front constant temperature chamber 17 is sucked by the first Sirotskov fan 24 and sent into the heater chamber 20, and the air heated by the heater 27 in the heater chamber 20 is transferred to the rear by the second Sirotskov fan 25. It is discharged into a constant temperature bath 18. By driving the first Shirotsukou fan 24 and the second Shirotsukou fan 25, the thermostat 14
The air inside is transferred from the front thermostatic chamber 17 to the rear thermostatic chamber 18.
Then, it circulates from the rear constant temperature bath 18 to the front constant temperature bath 17. Moreover, the air heated by the heater 27 in the heater chamber 10 is blown to the rear thermostat 18.

Here, when a signal current is applied from the signal current supply unit 15 to the ICs mounted on the DUT board to perform a burn-in process on the ICs, the ICs generate heat.
Even if the amount of heat generated by each individual IC is small, the amount of heat generated by the large number of easily mounted ICs as a whole is enormous.

Therefore, the second exhaust pipe 36 and the second intake pipe 37
Open each outer opening and attach the rear thermostat 1.
A part of the air superheated by the IC in the IC 8 is discharged from the second exhaust pipe 36, and the cold air from the outside is sucked into the bottom of the front thermostatic chamber 14 from the second intake pipe 37, and the air is discharged from the rear thermostatic chamber 18. This cold air is mixed with air that has been superheated in the Therefore, even if heated air at a predetermined temperature is blown into the upper part of the rear thermostatic chamber 18 by the second Sirotskov fan 25, the air flowing through the rear thermostatic chamber 18 will be further heated by the heat generated by the IC, and its All the heated air is placed in a constant temperature chamber 14.
If the air was blown to the same temperature, the temperature inside the constant temperature chamber 14 would reach the predetermined temperature.
Since external cold air is taken in through the intake pipe 37 and heated air is mixed with this cold air, the entire inside of the thermostatic chamber 14 is cooled to a predetermined temperature. The amount of exhaust air from the second exhaust pipe 36 and the amount of intake from the second intake pipe 37 are adjusted by an opening/closing lid 35 that opens and closes according to the temperature inside the thermostatic oven 14 detected by a temperature sensor placed inside the thermostatic oven 14. Ru.

In addition, when the temperature of the upper part of the rear thermostat 18 rises above a predetermined temperature due to heat generation from the IC or overheating of the heater, cold air from the outside is sucked in from the first intake pipe 31 and the air heated by the heater 27 is heated by the cold air. The air, which has reached a predetermined temperature, is blown to the upper part of the rear thermostatic chamber 18 by the second Sirotskov fan 25. A part of the air that has been superheated by the IC while flowing through the rear constant temperature chamber 18 is discharged from the second exhaust pipe 36 and mixed with external cold air taken in from the second intake pipe 37 to keep the front constant temperature. Air is blown into the tank 17. The air, which has been adjusted to a predetermined temperature with the cold air taken in from the second intake pipe 37, is sucked in by the first Shirotsuko fan 24 and rises inside the front constant temperature chamber 17 from bottom to top, and as it rises, the IC generates heat. It becomes even more overheated, but
A portion of the superheated air is exhausted to the outside from the first exhaust pipe 30.

In this way, a part of the superheated air is discharged and external cold air is mixed with the superheated air, so even if the IC generates a large amount of heat, the inside of the front thermostatic chamber 17 and the rear thermostatic chamber 18 can be quickly removed. will reach a predetermined temperature.

Further, in this embodiment, the blower fin 21
By adjusting the angle of the blower fins 21, heated air can be uniformly blown into the front constant temperature chamber 17 and the rear constant temperature chamber 18.

Although one embodiment of this invention has been described above, it goes without saying that this invention is not limited to the above embodiment and can be implemented with appropriate modifications within the scope of the gist of this invention. do not have.

[Effects of the invention] According to this invention, the following effects can be achieved.

In other words, since the air heated by the heater placed inside the thermostatic oven is circulated within the thermostatic oven, there is no need to install a ventilation pipe outside the thermostatic oven or a heater outside the thermostatic oven, which is required in the past. Therefore, the width of the burn-in processing device can be reduced accordingly. Therefore, the burn-in processing device of this invention is compact with a small width, so that the installation space can be significantly saved.

In this design, an exhaust pipe is provided to discharge a portion of the superheated air inside the thermostatic oven, and an intake pipe is provided to mix the superheated air with cold air from outside, so even if the temperature inside the thermostatic oven rises above a predetermined temperature, In addition, the exhaust pipe discharges a portion of the superheated air, and the air is sucked in from the intake pipe to mix the superheated air and cold air, thereby quickly bringing the temperature inside the constant temperature chamber to the specified temperature.
Temperature drift within the thermostatic chamber can be reduced.

In this way, since the temperature within the thermostatic chamber can be maintained substantially constant, IC burn-in processing can be performed appropriately.

[Brief explanation of the drawing]

Fig. 1 is a front view showing an embodiment of this invention, Fig. 2 is a sectional view taken along line B-B in Fig. 1, and Fig. 3 is a sectional view taken along line B-B in Fig.
4 is a sectional view taken along line A--A in FIG. 1, and FIG. 5 is a front view showing a conventional burn-in processing apparatus. 12...Burn-in treatment device, 14...Thermostat, 16...Partition material, 17...Front thermostat, 18
... Rear constant temperature chamber, 27 ... Heater, 24 ... 1st
Sirotskovan, 25...Second Sirotskovan,
30...first exhaust pipe, 31...first intake pipe, 36
...Second exhaust pipe, 37...Second intake pipe.

Claims (1)

[Claims for Utility Model Registration] (1) The DUT board can be mounted from the front and back, and the front constant temperature chamber is connected to the upper and lower parts through partition walls parallel to the front and back sides. In a double-sided burn-in treatment equipment that has a constant temperature chamber divided into a bath and a rear constant temperature chamber, a blower fan and a heater that blow heated gas into the constant temperature chamber are installed either at the top or bottom of the front constant temperature chamber or the rear constant temperature chamber. At the same time, a blower fan is installed at the top or bottom of the front thermostatic chamber or the lower thermostatic chamber to suck in the gas in the thermostatic chamber. In addition to providing an intake pipe to supply outside air into the chamber or rear constant temperature chamber, an exhaust pipe is installed near the blower fan that sucks the gas in the rear constant temperature chamber or front constant temperature chamber to discharge hot air from within the constant temperature chamber. , An exhaust pipe for discharging hot air in the thermostatic oven and an intake pipe for sucking outside air into the thermostatic oven are provided at the bottom or top of the front thermostatic oven or the rear thermostatic oven where a heater and blower fan are not installed, The gas in this constant temperature bath heated by a heater is
The temperature inside the constant temperature chamber can be maintained at a predetermined temperature by circulating the air between the front constant temperature chamber and the rear constant temperature chamber by the blowing fan, and by exhausting superheated gas and sucking in outside air through the exhaust pipe and the intake pipe. A burn-in processing device featuring: (2) the blowing fan is a Shirotzko fan;
The burn-in treatment apparatus according to claim 1, wherein the burn-in treatment apparatus is provided above the thermostatic chamber. (3) The intake pipe and the exhaust pipe are capable of adjusting the amount of outside air taken in and the amount of superheated gas exhausted depending on the temperature in the thermostatic chamber. Or the burn-in processing device according to item 2.