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JPH04206867A - Semiconductor dynamic ram - Google Patents

Semiconductor dynamic ram

Info

Publication number
JPH04206867A
JPH04206867A JP2337442A JP33744290A JPH04206867A JP H04206867 A JPH04206867 A JP H04206867A JP 2337442 A JP2337442 A JP 2337442A JP 33744290 A JP33744290 A JP 33744290A JP H04206867 A JPH04206867 A JP H04206867A
Authority
JP
Japan
Prior art keywords
line
conductor
vss
power
supply voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2337442A
Other languages
Japanese (ja)
Inventor
Kiyoomi Oshikoshi
押越 清臣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2337442A priority Critical patent/JPH04206867A/en
Publication of JPH04206867A publication Critical patent/JPH04206867A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Memories (AREA)

Abstract

PURPOSE:To reduce the noise of an aluminium power conductor by a method wherein in a two layer aluminium process semiconductor device having a power- supply voltage conductor and a GND conductor, the power-supply voltage conductor is twisted. CONSTITUTION:A power-supply voltage conductor Vcc conductor 1 and a GND conductor Vss conductor 2 are made to twist and the noise of an aluminium power conductor is reduced utilizing the coupling of a Vcc-Vss parasitic capacitance which is formed at the time of this twist.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は半導体ダイナミックRAMにおける電源ノイ
ズの低減に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] This invention relates to reduction of power supply noise in semiconductor dynamic RAM.

〔従来の技術〕[Conventional technology]

第3図は従来のアルミ電源線(以下Vce線と呼ぶ)を
示したパターン図であり、vCC線fl)とGND線(
以下Vss線と呼ぶ)(2)は平行(a)図、または重
なっていた(b)図。
Fig. 3 is a pattern diagram showing a conventional aluminum power supply line (hereinafter referred to as Vce line), with a vCC line fl) and a GND line (
(hereinafter referred to as the Vss line) (2) is a parallel view (a) or an overlapping view (b).

Vce線(1)のノイズ対策はVce線(1)とVss
線(2)のアルミ幅を大きくすることによって行ってい
た。
Vce line (1) noise countermeasures are Vce line (1) and Vss
This was done by increasing the aluminum width of line (2).

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

従来の半導体ダイナミックRA、 Mは以上のようにア
ルミ線を太くしないといけないので、半導体集積回路(
以下ICと呼ぶ)のチップ面積が大きくなってしまい又
太くするtlけでは容易に、ノイズが消ぜないという問
題点があった。
Conventional semiconductor dynamic RA, M requires thick aluminum wire as described above, so semiconductor integrated circuits (
There is a problem in that the chip area (hereinafter referred to as IC) becomes large, and noise cannot be easily eliminated by increasing the thickness.

この発明は上記のような問題点を解決するためになされ
たもので、Vce線のノイズを低減することのできる半
導体ダイナミックRA、 Mを得ろ乙とを目的とする。
This invention was made to solve the above-mentioned problems, and its object is to obtain a semiconductor dynamic RA, M that can reduce noise on the Vce line.

し課題を解決するための手段〕 この発明に係る半導体ダイナミックRAMは、Vce線
とVss線をツイストしたものである。
Means for Solving the Problem] A semiconductor dynamic RAM according to the present invention has a twisted Vce line and a Vss line.

〔作用〕[Effect]

乙の発明におけるVce線またはVss線は、ノイズI
・させることによりVce線、Vss線間に寄生容量が
生し、その容量のカプリングによって電源ノイズを低減
することが出来る。
The Vce line or Vss line in B's invention is noise I
- By doing so, a parasitic capacitance is generated between the Vce line and the Vss line, and power supply noise can be reduced by coupling this capacitance.

〔実施例〕〔Example〕

以下、この発明一実施例を図について説明する。 An embodiment of this invention will be described below with reference to the drawings.

第1図はこの発明の一実施例であるVCc線Vss線の
パターン図で、図において、(1)ばアル5Vcc線、
(2)はアルミVss線、(31+コ′2つの異なるア
ルミを連結するコンタクト(以下スルホールと呼ぶ)で
ある。
FIG. 1 is a pattern diagram of a VCc line and a Vss line according to an embodiment of the present invention.
(2) is an aluminum Vss wire, (31+C') a contact (hereinafter referred to as a through hole) that connects two different aluminum wires.

次に動作について説明する。Next, the operation will be explained.

図に示すように、2層アルミパターン作成プロセス技術
を使い、Vce線(1)、Vss線(2)を図示の如く
ツイストさせ、この時に出来るVcc−Vss間寄生容
量のカプリングを利用して、電源ノイズを低減させるこ
とが出来る。
As shown in the figure, the Vce line (1) and Vss line (2) are twisted as shown in the figure using the two-layer aluminum pattern creation process technology, and the coupling of the parasitic capacitance between Vcc and Vss that is created at this time is used to Power supply noise can be reduced.

なお上記実施例では、Vce線(1)、Vss線(2)
のツイストを第1図のようにした場合を示したが、第2
図のようにしても同様の効果が得られる。
In the above embodiment, the Vce line (1) and the Vss line (2)
Figure 1 shows the case where the twist is as shown in Figure 1, but the second
A similar effect can be obtained by doing as shown in the figure.

〔発明の効果〕 以上のように乙の発明によれば、電源線(Vce線Vs
s線)をツイストさぜることによって電源ノイズを低減
することができろという効果がある。
[Effect of the invention] As described above, according to the invention of Party B, the power supply line (Vce line Vs
Twisting the S-line has the effect of reducing power supply noise.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の一実施例である電源のパターンを示
す平面図、第2図はこの発明の他の実施例を示す電源線
パターンの平面図、第3図(、)(b)は従来の電源線
パターンの平面図である。図において、(1)はアル5
Vcc線、f2] iJアルミVss線、(3)はスル
ーホールを示す。 なお、図中、同一符号は同一、または相当部分を示す。
Fig. 1 is a plan view showing a power supply pattern according to an embodiment of the present invention, Fig. 2 is a plan view showing a power supply line pattern showing another embodiment of the invention, and Figs. FIG. 3 is a plan view of a conventional power line pattern. In the figure, (1) is Al5
Vcc line, f2] iJ aluminum Vss line, (3) indicates a through hole. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.

Claims (1)

【特許請求の範囲】[Claims]  電源電圧線とGND線を有する2層アルミプロセス半
導体装置において、前記電源電圧線をツイストしたこと
を特徴とする半導体ダイナミックRAM。
1. A semiconductor dynamic RAM, characterized in that, in a two-layer aluminum process semiconductor device having a power supply voltage line and a GND line, the power supply voltage line is twisted.
JP2337442A 1990-11-30 1990-11-30 Semiconductor dynamic ram Pending JPH04206867A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2337442A JPH04206867A (en) 1990-11-30 1990-11-30 Semiconductor dynamic ram

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2337442A JPH04206867A (en) 1990-11-30 1990-11-30 Semiconductor dynamic ram

Publications (1)

Publication Number Publication Date
JPH04206867A true JPH04206867A (en) 1992-07-28

Family

ID=18308674

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2337442A Pending JPH04206867A (en) 1990-11-30 1990-11-30 Semiconductor dynamic ram

Country Status (1)

Country Link
JP (1) JPH04206867A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007533258A (en) * 2004-04-12 2007-11-15 ソニー エリクソン モバイル コミュニケーションズ, エービー A wireless communication device including a circuit board on which a partially superimposed conductor is mounted connected to a power source and a power amplifier system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007533258A (en) * 2004-04-12 2007-11-15 ソニー エリクソン モバイル コミュニケーションズ, エービー A wireless communication device including a circuit board on which a partially superimposed conductor is mounted connected to a power source and a power amplifier system

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