JPH0412804B2 - - Google Patents
Info
- Publication number
- JPH0412804B2 JPH0412804B2 JP60182962A JP18296285A JPH0412804B2 JP H0412804 B2 JPH0412804 B2 JP H0412804B2 JP 60182962 A JP60182962 A JP 60182962A JP 18296285 A JP18296285 A JP 18296285A JP H0412804 B2 JPH0412804 B2 JP H0412804B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- measured
- signal
- light source
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
- Automatic Focus Adjustment (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、非接触型の距離測定装置に関し、さ
らに詳しくは、距離測定装置による被測定物の表
面状態の特徴抽出方式の改良に関するものであ
る。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a non-contact distance measuring device, and more specifically, to an improvement in a method for extracting characteristics of the surface condition of a measured object using a distance measuring device. be.
第３図は、特公昭58−42411号公報に開示され
た従来の非接触型の距離計の一般的な構成図であ
る。図において、１は光源を強度変調点灯するた
めの変調駆動回路、２は光源、３は投光レンズ、
４は被測定物５に投射された光スポツト、６は受
光レンズ、７は受光器としてのPSD，８ａ，８
ｂはその電流出力、９ａ，９ｂは電流電圧変換回
路、１０は電流電圧変換回路９ａ，９ｂ出力の加
算回路、１１は誤差検知回路、１２は距離演算回
路、１３は距離演算回路１２の出力である。
FIG. 3 is a general configuration diagram of a conventional non-contact distance meter disclosed in Japanese Patent Publication No. 58-42411. In the figure, 1 is a modulation drive circuit for lighting a light source with intensity modulation, 2 is a light source, 3 is a light projection lens,
4 is a light spot projected onto the object to be measured 5, 6 is a light receiving lens, 7 is a PSD as a light receiver, 8a, 8
b is its current output, 9a and 9b are current-voltage conversion circuits, 10 is an addition circuit for the outputs of current-voltage conversion circuits 9a and 9b, 11 is an error detection circuit, 12 is a distance calculation circuit, and 13 is the output of the distance calculation circuit 12. be.
次に動作について説明する。変動駆動回路１に
より駆動される光源２から出た光は、投光レンズ
３により集光されて被測定物５に光スポツト４を
投射する。この光スポツト４はさらに受光レンズ
６により集光されて受光器７上に投射され、受光
器７上に結像する。受光器７として例えば半導体
位置検出素子（以下PSDと略す）を用いれば、
受光器７の両端より出力される電流値Ia，Ibは
PSD上における受光像の位置により変化する。
すなわち、受光像がPSDの中央にあるときはIa＝
Ibであるが、受光像がIa側にふれとIaが大きくな
るとともにIbは小さくなり、反対に受光像がIbの
方に移るとIbが大きくなりIaは小さくなる。従つ
て、被測定物５の変位すなわち光スポツト４の位
置の変化は、PSD７上における受光像のPSD７
の中心位置からの距離として、次の〔１〕式で計
算されるＰにある変換係数を乗じたものとして演
算することができる。 Next, the operation will be explained. Light emitted from a light source 2 driven by a variable drive circuit 1 is focused by a projection lens 3 and projects a light spot 4 onto an object 5 to be measured. This light spot 4 is further condensed by a light receiving lens 6, projected onto a light receiver 7, and formed into an image on the light receiver 7. For example, if a semiconductor position detection element (hereinafter abbreviated as PSD) is used as the light receiver 7,
The current values I a and I b output from both ends of the photoreceiver 7 are
It changes depending on the position of the received light image on the PSD.
In other words, when the received light image is at the center of the PSD, I a =
However, as the received light image shifts to the I a side and I a becomes larger, I b becomes smaller. Conversely, when the received light image moves toward I b , I b becomes larger and I a becomes smaller . Therefore, the displacement of the object to be measured 5, that is, the change in the position of the light spot 4, changes the PSD 7 of the received light image on the PSD 7.
The distance from the center position of P can be calculated by multiplying P calculated by the following equation [1] by a certain conversion coefficient.
Ｐ＝Ia−Ib／Ia＋Ib ……〔１〕
また、次の〔２〕又は〔３〕式によれば、
PSD７の各端部から受光像までの距離が求まる
から、同様に三角測量の原理で、これらを被測定
物までの距離に換算できる。 P=I a −I b /I a +I b ... [1] Also, according to the following formula [2] or [3],
Since the distances from each end of the PSD 7 to the received light image can be determined, these can be similarly converted to the distance to the object to be measured using the principle of triangulation.
PA＝Ia／Ia＋Ib ……〔２〕
PB＝IB／Ia＋Ib ……〔３〕
このとき、〔１〕〜〔３〕式の分母（Ia＋Ib）
を一定に保てば、Ｐ、PA、PBは近似的に
P′＝Ia−Ib 〔１〕′
PA′＝Ia 〔２〕′
PB′＝Ib 〔３〕′
となるので、これらをもとに距離に換算しても良
い。 P A = I a / I a + I b ... [2] P B = I B / I a + I b ... [3] At this time, the denominator of equations [1] to [3] (I a + I b )
If P, PA, and PB are kept constant, P′=I a −I b [1]′ PA′=I a [2]′ PB′=I b [3]′, so You may convert it into a distance based on these.
一方十分な精度を必要とするときには、〔１〕
〜〔３〕式のいずれかを用いて距離の演算を行な
うが、この場合にも被測定物の状態に応じて変化
する（Ia＋Ib）の値の変化が、距離の測定精度の
影響しないように光源の出力を制御して、（Ia＋
Ib）がおおむね一定となるようにする。 On the other hand, when sufficient accuracy is required, [1]
The distance is calculated using one of the formulas ~ [3], but in this case as well, the change in the value of (I a + I b ), which changes depending on the state of the object to be measured, will affect the accuracy of distance measurement. The output of the light source is controlled so that (I a +
I b ) should be approximately constant.
従来の距離計は以上のように構成されているの
で、被測定物上の光スポツト４からの光のもどり
量として得られる被測定物表面上の状態変化を光
源の変調駆動回路１によつて打ち消すのみで、何
ら積極的な信号処理をしておらず、距離以外の情
報を容易に得ることができなかつた。このため、
各種装置に装着して利用する場合には、被測定面
の特徴の抽出はもつぱら距離の情報のみに依存す
るため表面状態の判別ができなかつたり、また判
別ができる場合でも距離の測定値を用いた煩雑な
演算を制御装置側で行なう必要があつた。
Since the conventional distance meter is configured as described above, the state change on the surface of the object to be measured, which is obtained as the amount of light returned from the light spot 4 on the object to be measured, is detected by the modulation drive circuit 1 of the light source. There was no active signal processing, and it was not possible to easily obtain information other than distance. For this reason,
When used attached to various devices, the extraction of features of the surface to be measured depends solely on distance information, so it may be impossible to distinguish the surface condition, or even if it is possible to distinguish it, the measured distance value cannot be used. It was necessary to perform the complicated calculations used on the control device side.
本発明は、従来装置のかかる問題点を解消する
ためになされたもので、被測定面の表面状態変化
の情報を距離を測定しながら容易に出力すること
のできる非接触の距離測定装置を得ることを目的
としたものである。 The present invention has been made to solve the problems of conventional devices, and provides a non-contact distance measuring device that can easily output information on changes in the surface state of a surface to be measured while measuring distance. It is intended for this purpose.
本発明に係わる距離測定装置は、光源駆動部か
らの印加電圧に応じた強度の投射光を出力する光
源と、投射光を集光して被測定物に投射する第１
の光学系と、第１の光学系の光軸に対して所定の
角度で配置され、被測定物からの反射光を集光す
る第２の光学系と、所定の領域の受光面を有し
て、第２の光学系からの集光された反射光を受光
し、相対する端部における反射光の強度に対応す
る第１の出力信号及び第２の出力信号を出力する
受光素子と、第１の出力信号及び第２の出力信号
を加算して、被測定物の表面の変位を求め、その
変位に基づいて、受光素子から被測定物の表面ま
での距離を求めて出力する距離算出手段と、変位
に対応する信号量を求め、その信号量をフイード
バツク信号として光源駆動部に出力し、光源から
の投射光を一定にさせるフイードバツク手段と、
フイードバツク信号を入力し、そのフイードバツ
ク信号を微分し、その微分期間を被測定物の表面
における変化点として出力する変化点算出手段と
を備えたものである。
The distance measuring device according to the present invention includes a light source that outputs projected light with an intensity corresponding to an applied voltage from a light source drive section, and a first lens that collects the projected light and projects it onto an object to be measured.
an optical system, a second optical system arranged at a predetermined angle with respect to the optical axis of the first optical system and condensing reflected light from the object to be measured, and a light receiving surface in a predetermined area. a light receiving element that receives the focused reflected light from the second optical system and outputs a first output signal and a second output signal corresponding to the intensity of the reflected light at the opposing end; Distance calculation means that adds the first output signal and the second output signal to determine the displacement of the surface of the object to be measured, and based on the displacement, calculates and outputs the distance from the light receiving element to the surface of the object to be measured. and feedback means for determining a signal amount corresponding to the displacement and outputting the signal amount as a feedback signal to a light source driving section to keep the projected light from the light source constant;
The apparatus is equipped with change point calculation means for inputting a feedback signal, differentiating the feedback signal, and outputting the differential period as a change point on the surface of the object to be measured.
受光素子が集光された反射光を受光し、相対す
る端部における反射光の強度に対応する第１の出
力信号及び第２の出力信号を出力すると、距離算
出手段が第１の出力信号及び第２の出力信号に基
づいて被測定物の表面の変位を求め、その変位に
基づいて、受光素子から被測定物の表面までの距
離を求めて出力する。そして、フイードバツク手
段は距離算出手段の変位に対応する信号量を求
め、その信号量をフイードバツク信号として光源
駆動部に出力し、光源からの投射光を一定にさせ
る。
When the light receiving element receives the focused reflected light and outputs a first output signal and a second output signal corresponding to the intensity of the reflected light at the opposing ends, the distance calculation means outputs the first output signal and the second output signal. The displacement of the surface of the object to be measured is determined based on the second output signal, and the distance from the light receiving element to the surface of the object to be measured is determined and output based on the displacement. Then, the feedback means obtains a signal amount corresponding to the displacement of the distance calculation means, and outputs the signal amount as a feedback signal to the light source driving section, thereby making the projected light from the light source constant.
また、変化点算出手段はフイードバツク信号を
入力し、そのフイードバツク信号を微分し、該微
分期間を被測定物の表面における変化点として出
力する。 Further, the change point calculation means inputs the feedback signal, differentiates the feedback signal, and outputs the differential period as a change point on the surface of the object to be measured.
以下、この発明の一実施例を説明する。第１図
において、２〜９ａ，９ｂは従来装置と同一又は
相当部分である。１４は演算回路、１５はフイー
ドバツク処理器、１６はタイミング回路、１７は
光源の駆動回路、１８は光源出力制御信号、１９
は信号処理回路、２０は信号処理回路の出力、２
１は出力タイミングパルス、２２はフイードバツ
ク処理器１５の入力、２３はフイードバツク処理
器１５の出力、２４は距離出力である。
An embodiment of this invention will be described below. In FIG. 1, 2 to 9a and 9b are the same or equivalent parts as in the conventional device. 14 is an arithmetic circuit, 15 is a feedback processor, 16 is a timing circuit, 17 is a light source drive circuit, 18 is a light source output control signal, 19
is a signal processing circuit, 20 is an output of the signal processing circuit, 2
1 is an output timing pulse, 22 is an input of the feedback processor 15, 23 is an output of the feedback processor 15, and 24 is a distance output.
信号処理回路１９の第１例として第２図ａに微
分回路、同じく第２例として第２図ｂに差分回
路、同様に、第３例として第２図ｃに演算処理器
を用いたものを示す。なお、第２図ｄは各々の信
号処理回路を用いたときの信号の一例を示したも
のである。ａ〜ｄ図において５ａは表面状態の異
なる被測定物、２０′はレベル比較器出力、２
０″は演算処理器出力、２５は光源２、投光レン
ズ３、受光レンズ６及び受光器７等で構成された
測定ヘツド、２６は投光光軸、２７は遅延回路、
２８はレベル比較器、３０は演算処理器である。 As a first example of the signal processing circuit 19, FIG. 2a shows a differential circuit, as a second example, FIG. 2b shows a differential circuit, and as a third example, FIG. show. Incidentally, FIG. 2d shows an example of a signal when each signal processing circuit is used. In figures a to d, 5a is the object to be measured with different surface conditions, 20' is the level comparator output, and 2
0'' is the output of the arithmetic processor, 25 is the measurement head composed of the light source 2, the light projecting lens 3, the light receiving lens 6, the light receiving device 7, etc., 26 is the projecting optical axis, 27 is the delay circuit,
28 is a level comparator, and 30 is an arithmetic processor.
いま、第１図において、光源２、投光レンズ
３、受光レンズ６、受光器７と、被測定物５との
相対的位置関係が保ちながら、第２図ｄの最上段
に示す如くＸ方向に測定ヘツド２５を移動させた
とき、被測定物５の表面状態が変化すると、一定
出力の光源から得られる受光器７の表面での受光
量も変化する。フイードバツク処理器１５はこれ
を補正し、受光器７の表面の受光量が常に一定に
なるように駆動回路１７に演算回路１４を経て出
力を送るためのもので、例えば被測定物５の表面
状態変化により受光器７の表面における受光量が
減少すれば光源の出力を増大させ、受光量が増大
するような表面状態変化の場合は、逆に光源の出
力を減少させるように機能する。従つて被測定物
と測定ヘツド２５の距離及び相対姿勢を一定に保
ちながらこのような制御を行なうと、受光量はほ
ぼ一定に保たれ、かつ演算回路１４への入力信号
レベルも同様に制御されて、被測定物５の表面状
態の変化は、第２図ｄに示す如くフイードバツク
処理器１５の出力信号２３として検知される。こ
の出力信号２３を第２図ａの微分回路に入力する
と、その出力２０は第２図ｄの信号２０の様にな
り、表面状態の変化点を示すもととなる。また、
出力信号２３を第２図ｂの差分回路に入力する
と、遅延信号２９とのレベル比較により、第２図
ｄの信号２０′の如く、表面状態の変化点を検出
することができる。さらに上述した様な処理は、
第２図ｃに示す如く演算処理器３０を用いて積分
又は各種の演算を組合せて行ない、表面状態変化
の検出に必要とされる処理を適宜実施することが
できる。 Now, in FIG. 1, while maintaining the relative positional relationship between the light source 2, the light emitting lens 3, the light receiving lens 6, the light receiver 7, and the object to be measured 5, the direction of the When the measurement head 25 is moved, if the surface condition of the object to be measured 5 changes, the amount of light received on the surface of the light receiver 7 obtained from the light source with a constant output also changes. The feedback processor 15 corrects this and sends an output to the drive circuit 17 via the arithmetic circuit 14 so that the amount of light received on the surface of the light receiver 7 is always constant. If the amount of light received on the surface of the light receiver 7 decreases due to a change, the output of the light source is increased, and if the surface condition changes such that the amount of received light increases, the output of the light source is decreased. Therefore, if such control is performed while keeping the distance and relative posture between the object to be measured and the measuring head 25 constant, the amount of received light will be kept almost constant, and the input signal level to the arithmetic circuit 14 will also be controlled in the same way. Therefore, changes in the surface condition of the object to be measured 5 are detected as an output signal 23 of the feedback processor 15, as shown in FIG. 2d. When this output signal 23 is input to the differentiating circuit shown in FIG. 2a, the output 20 becomes like the signal 20 shown in FIG. 2d, which indicates the point of change in the surface condition. Also,
When the output signal 23 is input to the differential circuit shown in FIG. 2b, a change point in the surface condition can be detected by comparing the level with the delayed signal 29, as shown in the signal 20' shown in FIG. 2d. Furthermore, the above-mentioned processing is
As shown in FIG. 2c, an arithmetic processor 30 is used to perform integration or a combination of various calculations, and the processing necessary for detecting a change in surface state can be carried out as appropriate.
このようにフイードバツク処理器１５の出力信
号を処理することにより、被測定物の表面状態変
化の特徴を示す各種パラメータの抽出が行なえる
ので、例えば、第２図ｄに示す表面状態が異なる
５ａの部分、例えばけがき針によるけがき線や、
マーキングされた線等の両端の位置X1，X2が検
知できることから、その異なつた表面状態５ａの
中心位置X0や幅（X2−X1）等を、測定出力結果
から求めることが可能となる。 By processing the output signal of the feedback processor 15 in this manner, it is possible to extract various parameters indicating the characteristics of changes in the surface condition of the object to be measured. parts, such as scribing lines with a scribing needle,
Since the positions X 1 and X 2 of both ends of the marked line etc. can be detected, it is possible to determine the center position X 0 and width (X 2 −X 1 ) of the different surface states 5a from the measurement output results. becomes.
上記の実施例では受光器７にPSDを用いた例
を示したが、他のCCD又はフオトダイオードア
レー等を使用して、各々の素子に適合した前処理
を行なつて使用してもよい。 In the above embodiment, an example is shown in which a PSD is used as the light receiver 7, but other CCDs, photodiode arrays, etc. may be used, and pre-processing that is suitable for each element may be performed.
また、上記の実施例では、光源の駆動レベルを
フイードバツク処理器１５により制御する場合を
示したが、光源の駆動レベルを一定にして、受光
系に信号増幅度が可変の増幅器を設け、その増幅
度をフイードバツク処理器１５により制御しても
同じような機能が得られる。さらに光源の駆動レ
ベルによらず、光源の出力を直接測定してフイー
ドバツク量とみなし、同様の信号処理を行なつて
もよい。 Further, in the above embodiment, the driving level of the light source is controlled by the feedback processor 15, but the driving level of the light source is kept constant, and an amplifier with variable signal amplification is provided in the light receiving system, and the amplification is performed. A similar function can be obtained by controlling the speed by the feedback processor 15. Furthermore, regardless of the drive level of the light source, the output of the light source may be directly measured and regarded as the amount of feedback, and similar signal processing may be performed.
受信素子から第１の出力信号及び第２の出力信
号に基づいて、被測定物の表面における変位を求
め、その変位に対応する信号量をフイードバツク
信号として光源駆動部に出力して光源からの投射
光を一定にすると共に、フイードバツク信号を微
分し、その微分期間を被測定物の表面における変
化点として出力するようにしたので、例えばけが
き線の幅又はマーキング線の幅等を簡単な装置で
容易に知ることができるという効果が得られてい
る。
Determine the displacement on the surface of the object to be measured based on the first output signal and the second output signal from the receiving element, output the signal amount corresponding to the displacement as a feedback signal to the light source driver, and project it from the light source. In addition to keeping the light constant, the feedback signal is differentiated and the differential period is output as a change point on the surface of the object to be measured. Therefore, for example, the width of a scribing line or the width of a marking line can be measured using a simple device. This has the effect of being easy to understand.
第１図は本発明の一実施例を示す構成図、第２
図ａ〜ｃはそれぞれ信号処理回路の実施例を示す
ブロツク図、ｄはその作用説明図、第３図は従来
装置の距離計の構成図である。
図において、２は光源、３は投光レンズ、４は
光スポツト、５は被測定物、６は受光レンズ、７
は受光器、１４は演算回路、１５はフイードバツ
ク処理器、１９は信号処理回路、２５は測定ヘツ
ドを示す。なお、図中同一符号は同一又は相当部
分を示すものとする。
FIG. 1 is a configuration diagram showing one embodiment of the present invention, and FIG.
Figures a to c are block diagrams showing embodiments of the signal processing circuit, d is a diagram illustrating its operation, and Figure 3 is a block diagram of a conventional distance meter. In the figure, 2 is a light source, 3 is a light projecting lens, 4 is a light spot, 5 is an object to be measured, 6 is a light receiving lens, and 7 is a light source.
14 is a light receiver, 14 is an arithmetic circuit, 15 is a feedback processor, 19 is a signal processing circuit, and 25 is a measurement head. Note that the same reference numerals in the figures indicate the same or equivalent parts.
Claims (1)
射光を出力する光源と、 前記投射光を集光して被測定物に投射する第１
の光学系と、 前記第１の光学系の光軸に対して所定の角度で
配置され、前記被測定物からの反射光を集光する
第２の光学系と、 所定の領域の受光面を有して、前記第２の光学
系からの集光された反射光を受光し、相対する端
部における該反射光の強度に対応する第１の出力
信号及び第２の出力信号を出力する受光素子と、 前記第１の出力信号及び第２の出力信号を加算
して、前記被測定物の表面の変位を求め、その変
移に基づいて、前記受光素子から被測定物の表面
までの距離を求めて出力する距離算出手段と、 前記変位に対応する信号量を求め、その信号量
をフイードバツク信号として前記光源駆動部に出
力し、前記光源からの投射光を一定にさせるフイ
ードバツク手段と、 前記フイードバツク信号を入力し、そのフイー
ドバツク信号を微分し、該微分期間を前記被測定
物の表面における変化点として出力する変化点算
出手段と を有することを特徴とする距離測定装置。[Scope of Claims] 1. A light source that outputs projection light with an intensity that corresponds to the applied voltage from a light source drive unit, and a first light source that collects the projection light and projects it onto the object to be measured.
a second optical system arranged at a predetermined angle with respect to the optical axis of the first optical system and condensing reflected light from the object to be measured; and a light receiving surface in a predetermined area. a light receiver configured to receive the focused reflected light from the second optical system and output a first output signal and a second output signal corresponding to the intensity of the reflected light at opposing ends. the element, the first output signal, and the second output signal to determine the displacement of the surface of the object to be measured, and based on the displacement, calculate the distance from the light receiving element to the surface of the object to be measured. a distance calculation means for calculating and outputting a signal amount corresponding to the displacement; a feedback means for calculating a signal amount corresponding to the displacement and outputting the signal amount as a feedback signal to the light source driving section to make the projected light from the light source constant; 1. A distance measuring device comprising a change point calculation means for inputting a signal, differentiating the feedback signal, and outputting the differential period as a change point on the surface of the object to be measured.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18296285A JPS6244615A (en) | 1985-08-22 | 1985-08-22 | Distance measuring instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18296285A JPS6244615A (en) | 1985-08-22 | 1985-08-22 | Distance measuring instrument |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6244615A JPS6244615A (en) | 1987-02-26 |
| JPH0412804B2 true JPH0412804B2 (en) | 1992-03-05 |
Family
ID=16127371
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18296285A Granted JPS6244615A (en) | 1985-08-22 | 1985-08-22 | Distance measuring instrument |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6244615A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6412216A (en) * | 1987-07-06 | 1989-01-17 | Nissan Motor | Detection of position |
| JPH0711419B2 (en) * | 1988-03-28 | 1995-02-08 | 岩崎通信機株式会社 | Displacement meter using laser light |
| JPH01274010A (en) * | 1988-04-26 | 1989-11-01 | Mitsubishi Electric Corp | Optical displacement measuring device |
| JPH03148005A (en) * | 1989-11-06 | 1991-06-24 | Aoki Seiki Seisakusho:Kk | Non-contacting surface roughness measuring apparatus for on-machine measurement |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3119505A1 (en) * | 1981-05-15 | 1983-01-27 | Siemens AG, 1000 Berlin und 8000 München | Optical sensor for measuring three-dimensional objects |
| JPS6069539A (en) * | 1983-09-26 | 1985-04-20 | Toshiba Corp | Surface defect inspection equipment |
-
1985
- 1985-08-22 JP JP18296285A patent/JPS6244615A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6244615A (en) | 1987-02-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20030043362A1 (en) | Six dimensional laser tracking system and method | |
| JPH0412804B2 (en) | ||
| JPH0746052B2 (en) | Optical displacement meter | |
| JPS61104202A (en) | Optical displacement meter | |
| JPH07229967A (en) | Distance measuring device | |
| JPS63243709A (en) | distance measuring device | |
| JPH05333152A (en) | Inclination measuring device | |
| JPH0648190B2 (en) | Optical displacement measuring device | |
| JPS63243710A (en) | distance measuring device | |
| JPH06308234A (en) | Distance measuring device | |
| JPS6355409A (en) | Laser distance measuring instrument for vehicle | |
| JPH1062552A (en) | Distance measuring apparatus | |
| JPH062264U (en) | Distance measuring device | |
| JPH06230097A (en) | Moving body position detector | |
| JP2968423B2 (en) | Photoelectric sensor and method for correcting received light signal level | |
| JP2990545B2 (en) | Posture angle correction method for unmanned vehicles | |
| JP2655659B2 (en) | Distance sensor | |
| JPH0240505A (en) | Distance measuring apparatus | |
| JPH09196665A (en) | Distance measuring device | |
| JPS63252204A (en) | Distance and angle-of-inclination measuring device | |
| JPH0372208A (en) | Angle measuring apparatus | |
| JPS63150613A (en) | Distance measuring instrument | |
| JPH0584521B2 (en) | ||
| JPS6264904A (en) | Shape measuring device | |
| JPH0829422B2 (en) | Automatic teaching device for laser processing machine |