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JPH0412465B2 - - Google Patents

Info

Publication number
JPH0412465B2
JPH0412465B2 JP57110860A JP11086082A JPH0412465B2 JP H0412465 B2 JPH0412465 B2 JP H0412465B2 JP 57110860 A JP57110860 A JP 57110860A JP 11086082 A JP11086082 A JP 11086082A JP H0412465 B2 JPH0412465 B2 JP H0412465B2
Authority
JP
Japan
Prior art keywords
acid
color filter
composition
polyvinyl alcohol
receiving layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57110860A
Other languages
Japanese (ja)
Other versions
JPS592039A (en
Inventor
Masataka Myamura
Akira Miura
Kazuchika Oota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP57110860A priority Critical patent/JPS592039A/en
Publication of JPS592039A publication Critical patent/JPS592039A/en
Publication of JPH0412465B2 publication Critical patent/JPH0412465B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0388Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Filters (AREA)
  • Solid State Image Pick-Up Elements (AREA)

Description

【発明の詳細な説明】[Detailed description of the invention]

〔発明の技術分野〕 本発明は、色フイルタ染色受容層形成用組成物
に関し、更に詳しくは、分光特性が優れた撮像素
子を得ることが可能な色フイルタ染色受容層形成
用組成物に関する。 〔発明の技術的背景とその問題点〕 従来、カラーテレビジヨンカメラ等に使用され
る撮像素子用色フイルタは、例えば、ゼラチンや
カゼイン等の蛋白質或いはポリビニルアルコール
(PVA)に、重クロム酸アンモニウム(ADC)
を添加したフオトレジスト材料を用いて、光照射
により得たパターンを染色で染色することにより
製造されている。 しかし、上記したフオトレジスト材料を色フイ
ルタの染色受容層を形成するために使用すると、
ADCが含まれているために、パターンを現像し
た後に排出される現像廃液が大量のクロムを含有
するものとなる。そのため、廃棄前にクロムを回
収し、無公害化処理を施さねばならず、製造コス
トが上昇するという問題点を有している。 又、ADCを感光剤とする材料は、プリベーキ
ング温度により露光量が変化して、所謂、熱かぶ
り現象を呈するために、製造条件を厳密に管理し
なけらばならないという問題点を有している。 更に、ゼラチンやカゼイン等の蛋白質を基本ポ
リマーとして使用した場合には、天然物質である
ために品質が一定したものを得ることが困難であ
る。そのため、製造工程におけるパタンの制御が
困難であるという問題点を有している。 〔発明の目的〕 本発明の目的は、上記した問題点を解消し、そ
の製造時に現像廃液処理等を要さず、又、熱かぶ
り等が起こらず、分光特性が優れた色フイルタを
得ることが可能な色フイルタ受容層形成用組成物
を提供することにある。 〔発明の概要〕 本発明の色フイルタ受容層形成用組成物は、次
(式中、Rはメチル基又はエチル基を表わし、
X-は塩素、臭素、ヨウ素、過塩素酸、酢酸、メ
チル硫酸、硫酸、硝酸又はp−トルエンスルホン
酸のそれぞれのイオンを表わす。) で示されるポリビニルアルコール誘導体単位を構
成単位中0.1〜10モル%含有するポリビニルアル
コール又は部分ケン化ポリ酢酸ビニルである感光
性樹脂から成ることを特徴とするものである。 以下において、本発明を更に詳しく説明する。 本発明において使用される感光性樹脂は、例え
ば、ポリビニルアルコール又は部分ケン化ポリ酢
酸ビニルに、次式 (式中、R及びX-は前記と同意義である。) で示されるホルミルスチリルピリジニウム塩を反
応せしめることにより得ることが可能である。こ
のような感光性樹脂としては、例えば、特公昭56
−5761号公報等に記載されている感光性樹脂を適
宜使用することが可能である。 本発明の組成物は、前記スチリルピリジニウム
塩含有単位を、ポリビニルアルコールの構成単位
中0.1〜10モル%含有する。更に、ポリビニルア
ルコールないし部分ケン化ポリ酢酸ビニルのケン
化度は50〜100%であることが好ましい。 上記組成物を使用して、例えば、撮像素子用色
フイルタを製造する場合には、次のような方法を
採ることが可能である。 即ち、先ず、表面を平滑化した撮像素子上に、
本発明の組成物を、例えば、スピンナー、シルク
スクリーン法等を用いて、0.5〜5μm程度の厚さ
で形成する。次いで、40〜80℃、10〜60分間のプ
リベーキング処理を施した後、所望のパターンを
有するシヤドウマスクを介して露光する。露光に
際しては、例えば、水銀ランプを用いて、200〜
400nmの領域の波長を有する光を、50〜100m
J/cm2で1〜10秒間照射することが好ましい。次
いで、純水の中に5〜30秒間程度浸漬して現像処
理を施した後、メチルアルコール、エタノール、
イソプロピルアルコール等に5〜10秒間程度浸漬
してリンス処理を施し、60〜100℃で乾燥する。 上記処理により得た所望パターンを有する撮像
素子を、40〜80℃程度に保持した染料水溶液中
に、1〜10分間程度浸漬して染色し、水洗するこ
とにより、所望の色フイルタ層を得ることが可能
である。完成した色フイルタを得るためには、上
記処理を繰り返せばよい。 〔発明の効果〕 本発明の組成物を用いて形成される色フイルタ
は、優れたパターン性を有するものであり、鮮明
な画像を得ることが可能なものである。 又、本発明の組成物は、クロム等の有害な金属
元素を含有していないため、色フイルタの製造時
に排出される現像廃液の処理が容易であり、製造
差業者に対しても、衛生上何ら悪影響を及ぼすこ
とのないものである。 〔発明の実施例〕 以下において、本発明の実施例を記載する。 実施例 1 ポリイミド樹脂を用いてその表面を平滑化した
CCD撮像素子を用意した。このCCDの撮像素子
の平滑面上に、ケン化度87%、重合度2600を有す
るポリビニルアルコールにメチル−γ−スチリル
ピリジニウムメチル硫酸塩を0.7モル%導入した
樹脂を、スピンナーを用いて、1.0μmの厚さで形
成した。次いで、40℃で30分間プリベーキング処
理を施した後、365nmの水銀ランプ下で、所定
のパターンを有するマスクを介して、150mJ/
cm2の条件で露光した。このCCD撮像素子を、純
水中に20秒間浸漬して現像した後、メチルアルコ
ール中に10秒間浸漬してリンス処理を施し、80℃
で30分間乾燥した。 上記処理により得た所定のパターンを有する
CCD撮像素子を、50℃に保持したスミノールミ
ーリングイエロー(住友化学(株)製)の2重量%水
溶液から成る染色溶液中に3分間浸漬した後、水
洗した。その結果、均一、且つ、鮮明な黄色パタ
ーンを有するCCD撮像素子が得られた。 実施例 2〜5 染色受容層形成用組成物として、ケン化度87
%、重合度1700を有するポリビニルアルコールに
表に示すような量のメチル−γ−スチリルピリジ
ニウム塩を導入した組成物を使用した他は、実施
例1と同様の操作を施して色フイルタを得た。 比較例 1〜2 染色受容層形成用組成物として、実施例2〜5
で使用したポリビニルアルコールに導入するメチ
ル−γ−スチリルピリジニウム塩の量が少ないも
のを使用した他は、実施例1と同様の操作を施し
て色フイルタを作成した。その組成を実施例2〜
5と共に表に示す。
[Technical Field of the Invention] The present invention relates to a composition for forming a dyed receptor layer of a color filter, and more particularly to a composition for forming a dyed receptor layer of a color filter, which makes it possible to obtain an image sensor with excellent spectral characteristics. [Technical background of the invention and its problems] Conventionally, color filters for image sensors used in color television cameras, etc., have been made by adding ammonium dichromate ( ADC)
It is manufactured by dyeing a pattern obtained by light irradiation using a photoresist material to which is added. However, when the photoresist materials described above are used to form the dye-receiving layer of a color filter,
Because ADC is included, the waste developer solution discharged after developing the pattern contains a large amount of chromium. Therefore, the chromium must be recovered and treated to make it non-polluting before being disposed of, resulting in an increase in manufacturing costs. Furthermore, materials that use ADC as a photosensitizer have the problem that the exposure amount changes depending on the prebaking temperature, resulting in so-called heat fogging, so manufacturing conditions must be strictly controlled. There is. Furthermore, when proteins such as gelatin and casein are used as the basic polymer, it is difficult to obtain products of consistent quality because they are natural substances. Therefore, there is a problem in that it is difficult to control the pattern in the manufacturing process. [Object of the Invention] The object of the present invention is to solve the above-mentioned problems, and to obtain a color filter that does not require treatment of developer waste during its manufacture, does not cause heat fogging, and has excellent spectral characteristics. An object of the present invention is to provide a composition for forming a color filter receiving layer that is capable of forming a color filter receiving layer. [Summary of the Invention] The composition for forming a color filter receiving layer of the present invention has the following formula: (In the formula, R represents a methyl group or an ethyl group,
X - represents an ion of chlorine, bromine, iodine, perchloric acid, acetic acid, methyl sulfate, sulfuric acid, nitric acid or p-toluenesulfonic acid. ) It is characterized by consisting of a photosensitive resin which is polyvinyl alcohol or partially saponified polyvinyl acetate containing 0.1 to 10 mol% of the polyvinyl alcohol derivative units shown in the structural units. In the following, the invention will be explained in more detail. The photosensitive resin used in the present invention is, for example, polyvinyl alcohol or partially saponified polyvinyl acetate, with the following formula: (In the formula, R and X - have the same meanings as above.) It can be obtained by reacting a formylstyrylpyridinium salt represented by the following formula. As such a photosensitive resin, for example,
It is possible to appropriately use the photosensitive resins described in Publication No.-5761 and the like. The composition of the present invention contains the styrylpyridinium salt-containing unit in an amount of 0.1 to 10 mol % in the constituent units of polyvinyl alcohol. Furthermore, the degree of saponification of polyvinyl alcohol or partially saponified polyvinyl acetate is preferably 50 to 100%. For example, when manufacturing a color filter for an image sensor using the above composition, the following method can be used. That is, first, on the image sensor whose surface has been smoothed,
The composition of the present invention is formed to a thickness of about 0.5 to 5 μm using, for example, a spinner or silk screen method. Next, after performing a prebaking treatment at 40 to 80°C for 10 to 60 minutes, the film is exposed to light through a shadow mask having a desired pattern. For exposure, use a mercury lamp, for example, to
Light with a wavelength in the 400nm range is transmitted over 50 to 100m.
It is preferable to irradiate at J/cm 2 for 1 to 10 seconds. Next, after being immersed in pure water for about 5 to 30 seconds and subjected to development processing, methyl alcohol, ethanol,
Rinse by immersing in isopropyl alcohol for about 5 to 10 seconds, and dry at 60 to 100°C. The image sensor having the desired pattern obtained by the above processing is immersed in an aqueous dye solution maintained at about 40 to 80°C for about 1 to 10 minutes to dye it, and then washed with water to obtain a desired color filter layer. is possible. To obtain a completed color filter, the above process may be repeated. [Effects of the Invention] The color filter formed using the composition of the present invention has excellent patternability and is capable of obtaining clear images. In addition, since the composition of the present invention does not contain harmful metal elements such as chromium, it is easy to dispose of developer waste discharged during the production of color filters, and it is also convenient for manufacturing companies from a sanitary standpoint. It does not have any adverse effects. [Examples of the invention] In the following, examples of the invention are described. Example 1 The surface was smoothed using polyimide resin
A CCD image sensor was prepared. A resin prepared by introducing 0.7 mol% of methyl-γ-styrylpyridinium methyl sulfate into polyvinyl alcohol having a degree of saponification of 87% and a degree of polymerization of 2600 was placed on the smooth surface of the image sensor of this CCD using a spinner to a thickness of 1.0 μm. It was formed with a thickness of . Next, after pre-baking at 40°C for 30 minutes, 150mJ/m
Exposure was carried out under conditions of cm2 . This CCD image sensor was immersed in pure water for 20 seconds for development, and then immersed in methyl alcohol for 10 seconds for rinsing treatment at 80°C.
and dried for 30 minutes. It has a predetermined pattern obtained by the above processing.
The CCD image sensor was immersed for 3 minutes in a staining solution consisting of a 2% by weight aqueous solution of Suminol Milling Yellow (manufactured by Sumitomo Chemical Co., Ltd.) maintained at 50°C, and then washed with water. As a result, a CCD image sensor with a uniform and clear yellow pattern was obtained. Examples 2 to 5 A saponification degree of 87 as a composition for forming a dye-receiving layer
%, and a degree of polymerization of 1700, and a composition in which methyl-γ-styrylpyridinium salt was introduced in the amount shown in the table. . Comparative Examples 1-2 Examples 2-5 as dye-receiving layer forming compositions
A color filter was prepared in the same manner as in Example 1, except that a smaller amount of methyl-γ-styrylpyridinium salt was introduced into the polyvinyl alcohol used in Example 1. The composition is shown in Example 2~
5 is shown in the table.

【表】 上記比較例1及び2の組成の染色受容層形成用
組成物を使用したものは、基板上に形成した染色
受容層が染色時に基板より剥離しパターン化が不
可能であつた。これらに対し、実施例2〜5のそ
れぞれの組成物を用いて形成した色フイルタは、
顕微鏡により調べたところ、均一、且つ、鮮明な
パターンを有するものであることが確認された。
[Table] When the dye-receiving layer forming compositions of Comparative Examples 1 and 2 were used, the dye-receiving layer formed on the substrate was peeled off from the substrate during dyeing, and patterning was impossible. In contrast, the color filters formed using the respective compositions of Examples 2 to 5 were
When examined using a microscope, it was confirmed that the pattern was uniform and clear.

Claims (1)

【特許請求の範囲】 1 次式 (式中、Rはメチル基又はエチル基を表わし、
X-は塩素、臭素、ヨウ素、過塩素酸、酢酸、メ
チル硫酸、硫酸、硝酸又はp−トルエンスルホン
酸のそれぞれのイオンを表わす。) で示されるポリビニルアルコール誘導体単位を構
成単位中0.1〜10モル%含有するポリビニルアル
コール又は部分ケン化ポリ酢酸ビニルである感光
性樹脂から成ることを特徴とする色フイルタ染色
受容層形成用組成物。
[Claims] Linear formula (In the formula, R represents a methyl group or an ethyl group,
X - represents an ion of chlorine, bromine, iodine, perchloric acid, acetic acid, methyl sulfate, sulfuric acid, nitric acid or p-toluenesulfonic acid. 1. A composition for forming a dye-receiving layer of a color filter, comprising a photosensitive resin which is polyvinyl alcohol or partially saponified polyvinyl acetate, which contains 0.1 to 10 mol % of the polyvinyl alcohol derivative units shown in the following formula in the constituent units.
JP57110860A 1982-06-29 1982-06-29 Composition for forming dye receptive layer for color filter Granted JPS592039A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57110860A JPS592039A (en) 1982-06-29 1982-06-29 Composition for forming dye receptive layer for color filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57110860A JPS592039A (en) 1982-06-29 1982-06-29 Composition for forming dye receptive layer for color filter

Publications (2)

Publication Number Publication Date
JPS592039A JPS592039A (en) 1984-01-07
JPH0412465B2 true JPH0412465B2 (en) 1992-03-04

Family

ID=14546500

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57110860A Granted JPS592039A (en) 1982-06-29 1982-06-29 Composition for forming dye receptive layer for color filter

Country Status (1)

Country Link
JP (1) JPS592039A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5979246A (en) * 1982-10-29 1984-05-08 Toshiba Corp Resist composition for color filter
JPS61186954A (en) * 1985-02-15 1986-08-20 Sanyo Kokusaku Pulp Co Ltd Color image forming photosensitive material
JPS62109040A (en) * 1985-11-08 1987-05-20 Nippon Kayaku Co Ltd Photosensitive resin composition
JPH0713099B2 (en) 1988-12-14 1995-02-15 工業技術院長 Photosensitive polyvinyl alcohol derivative

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55135834A (en) * 1979-04-10 1980-10-23 Oriental Shashin Kogyo Kk Photosensitive peeling film
JPS5952549B2 (en) * 1981-08-12 1984-12-20 株式会社日立製作所 Color solid-state image sensor

Also Published As

Publication number Publication date
JPS592039A (en) 1984-01-07

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