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JPH04119966A - Production of reaction-sintering silicon carbide sintered body - Google Patents

Production of reaction-sintering silicon carbide sintered body

Info

Publication number
JPH04119966A
JPH04119966A JP2239432A JP23943290A JPH04119966A JP H04119966 A JPH04119966 A JP H04119966A JP 2239432 A JP2239432 A JP 2239432A JP 23943290 A JP23943290 A JP 23943290A JP H04119966 A JPH04119966 A JP H04119966A
Authority
JP
Japan
Prior art keywords
calcined
silicon carbide
bodies
molten metal
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2239432A
Other languages
Japanese (ja)
Inventor
Toshio Kobayashi
小林 俊男
Shinji Tanaka
信治 田中
Masahiko Kurisaki
栗崎 雅彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP2239432A priority Critical patent/JPH04119966A/en
Publication of JPH04119966A publication Critical patent/JPH04119966A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To mass-produce a reaction-sintering silicon carbide sintered body having excellent performance by molding a mixture powder of silicon carbide powder and carbon powder, calcining to obtain plural calcined bodies, gathering these calcined bodies into an assembly with a carbonaceous material provided among the bodies and impregnating this assembly with molten metal silicon. CONSTITUTION:An org. binder is added to a mixture powder of silicon carbide powder and carbon powder or org. material which can act as the carbon source, and then the mixture is molded and calcined. Plural number of these calcined bodies are gathered into one assemble and impregnated with a molten metal silicon while heating to effect the reaction of silicon and the carbon source in the calcined bodies to obtain the reaction-sintering silicon carbide sintered body. In this process, the following procedure is carried out. Namely, plural calcined bodies 2 are assembled with a carbonaceous material 4 provided among the calcined bodies 2 to form an assemble 1 (contained in a box 3 comprising a carbonaceous material which permeates molten metal silicon), and then the molten metal silicon 6 is made to permeate each calcined body 2 of the assembly 1 through the interposed carbonaceous material 4.

Description

【発明の詳細な説明】 及遠m引碩訪 本発明は、炭化ケイ素粉末と炭素粉末又は炭素源となり
有る有機物質とがら仮焼体を得、この仮焼体に溶融金属
ケイ素を浸透させて焼結を進行させる反応焼結炭化ケイ
素焼結体のfR造方法に関し。
DETAILED DESCRIPTION OF THE INVENTION The present invention involves obtaining a calcined body from silicon carbide powder and carbon powder or an organic substance that can serve as a carbon source, and infiltrating the calcined body with molten metal silicon to sinter it. This invention relates to a fR manufacturing method of a reaction-sintered silicon carbide sintered body that advances sintering.

特に複数個の仮焼体から構成された集合体の各仮焼体に
同時に、しかも効率よく溶融金属ケイ素を浸透させるこ
とができる反応焼結炭化ケイ素焼結体の製造方法に関す
る。
In particular, the present invention relates to a method for producing a reactively sintered silicon carbide sintered body, which allows molten metal silicon to simultaneously and efficiently penetrate into each calcined body of an aggregate composed of a plurality of calcined bodies.

従米久且且 炭化ケイ素焼結体は、1000℃を超える高温下におい
ても良好な耐熱性、耐熱衝撃性、耐摩耗性、耐腐食性等
を有することがら高温領域で使用可能な構造部材として
注目されている。
The silicon carbide sintered body has good heat resistance, thermal shock resistance, abrasion resistance, corrosion resistance, etc. even at high temperatures exceeding 1000°C, so it is attracting attention as a structural member that can be used in high-temperature areas. has been done.

ここで、炭化ケイ素は、製法により反応焼結炭化ケイ素
、常圧焼結炭化ケイ素、再結晶炭化ケイ素等に分けられ
、各々特徴ある物性を示す。これらの中で反応焼結炭化
ケイ素は、炭化ケイ素と金属ケイ素との2相から構成さ
れている炭化ケイ素であり、その焼結体は金属ケイ素の
融点である1400℃付近の高温まで強度の低下が認め
られないことから、常温では勿論、高温領域でも使用可
能な部材として非常に注目されている。
Here, silicon carbide is classified into reactive sintered silicon carbide, pressureless sintered silicon carbide, recrystallized silicon carbide, etc. depending on the manufacturing method, and each exhibits characteristic physical properties. Among these, reactive sintered silicon carbide is silicon carbide that is composed of two phases: silicon carbide and metallic silicon, and its sintered body loses its strength at high temperatures around 1400°C, which is the melting point of metallic silicon. Since this material is not observed, it is attracting a lot of attention as a member that can be used not only at room temperature but also in high temperature ranges.

この反応焼結炭化ケイ素焼結体を製造する方法としては
、まず炭化ケイ素粉末と炭素粉末又は炭素源になり得る
有機物質とを混合し、これを有機質バインダーで固めて
所望の形状に成形し、この成形体を加熱して成形体中の
有機物質及び有機質バインダーを分解し、その一部を成
形体から除去すると共に、一部を炭素源として残留させ
た仮焼体を製造する。次に、この仮焼体に溶融金属ケイ
素を浸透させて炭素粉末及び上記残留炭素源と反応させ
、炭化ケイ素を生成させる。これにより、この生成炭化
ケイ素によって成形体中に原料として最初から存在する
炭化ケイ素が包囲される。この場合、仮焼体に浸透させ
る溶融金属ケイ素は、炭素源と反応して炭化ケイ素を形
成するのに必要な量以上の量が常に供給されるようにさ
れる。このため、この金属ケイ素が成形体中の空隙を埋
めつくし、成形体中の炭化ケイ素粉末を包囲することは
勿論、生成した炭化ケイ素をも包囲する。しかも、金属
ケイ素には凝固時に約8%の体積膨張が生じるために気
孔のHzぬられない緻密な焼結体が得られる。また、こ
の方法によれば、仮焼体から焼結体への焼結過程で収縮
がほとんどないため、仮焼体を製造する時点で高い寸法
精度に成形しておけば、焼結後に切削加工等を施す必要
なく、寸法精度の高い焼結体を得ることができる。従っ
て、この製造方法は複雑な形状の部材や大型の部材の製
造に好適なものである。
The method for producing this reaction-sintered silicon carbide sintered body is to first mix silicon carbide powder and carbon powder or an organic substance that can be a carbon source, solidify this with an organic binder, and shape it into a desired shape. This molded body is heated to decompose the organic substance and organic binder in the molded body, a part of which is removed from the molded body, and a calcined body is produced in which a part of the organic substance and the organic binder are left as a carbon source. Next, molten silicon metal is infiltrated into this calcined body and reacted with the carbon powder and the residual carbon source to produce silicon carbide. As a result, silicon carbide that is originally present as a raw material in the molded body is surrounded by the generated silicon carbide. In this case, the molten metal silicon infiltrated into the calcined body is always supplied in an amount greater than the amount required to react with the carbon source to form silicon carbide. Therefore, this metallic silicon completely fills the voids in the compact and surrounds not only the silicon carbide powder in the compact but also the produced silicon carbide. Moreover, since metallic silicon undergoes a volumetric expansion of about 8% during solidification, a dense sintered body with no pores that are not wetted can be obtained. In addition, according to this method, there is almost no shrinkage during the sintering process from the calcined body to the sintered body, so if the calcined body is formed with high dimensional accuracy at the time of manufacturing, cutting can be performed after sintering. It is possible to obtain a sintered body with high dimensional accuracy without the need for carrying out other processes. Therefore, this manufacturing method is suitable for manufacturing members with complicated shapes and large-sized members.

が解決しようとする課題 この場合、このような反応焼結炭化ケイ素焼結体の製造
方法において、溶融金属ケイ素の浸透を容易かつ良好な
らしめるために従来より種々の方法が提案されている。
Problem to be Solved In this case, various methods have been proposed in the past in order to facilitate and improve the penetration of molten metal silicon in the method of producing such a reaction-sintered silicon carbide sintered body.

例えば、多孔性炭素質材料を介して溶融金属ケイ素を仮
焼体に浸透させる方法(特開昭55−67573号公報
参照)、多孔質の円筒状物に78融金属ケイ素を浸み込
ませ、この円筒状物から該溶融金属ケイ素を仮焼体に滴
下する方法(特開昭59−190267号公報参照)等
がある。
For example, there is a method in which molten metal silicon is infiltrated into a calcined body through a porous carbonaceous material (see JP-A-55-67573), a method in which 78 molten metal silicon is infiltrated into a porous cylindrical material, There is a method of dropping the molten metal silicon onto the calcined body from this cylindrical object (see Japanese Patent Application Laid-open No. 190267/1983).

しかしながら、このような方法で溶融金属ケイ素の浸透
を行なったとしても、特に複数個の仮焼体からなる集合
体の各仮焼体に同時に溶融金属ケイ素を浸透させる場合
には、溶融金属ケイ素の浸透が不十分となる場合がある
However, even if molten metal silicon is infiltrated by such a method, especially when molten metal silicon is infiltrated into each calcined body of an aggregate consisting of a plurality of calcined bodies at the same time, the molten metal silicon will be infiltrated. Penetration may be insufficient.

即ち、仮焼体が単体である場合には、浸透方法によって
浸透速度の遅速等があるものの、いずれの方法であって
も仮焼体に溶融金属ケイ素を浸透させることができるが
、複数の仮焼体がら集合体を構成した場合には、仮焼体
同士の接触箇所が抵抗となり、−の仮焼体がら溶融金属
ケイ素を浸透させ、この仮焼体全体に溶融金属ケイ素が
浸透しても、この溶融金属ケイ素の浸透が他の仮焼体と
の接触箇所で遅れたり、跡切れたりする場合が生じ、こ
のため集合体全体に溶融金属ケイ素を十分に供給できな
くなり、上述した優れた性能を有する焼結体が得られな
い場合が起こる。
That is, when the calcined body is a single body, molten metal silicon can be infiltrated into the calcined body by any method, although the penetration rate may be slow depending on the infiltration method. When an aggregate is formed from calcined bodies, the points of contact between the calcined bodies act as resistance, allowing molten metal silicon to penetrate through the calcined bodies, and even if the molten silicon metal permeates throughout this calcined body, , the penetration of this molten metal silicon may be delayed or traces may be cut off at points where it comes into contact with other calcined bodies, making it impossible to supply a sufficient amount of molten metal silicon to the entire aggregate, reducing the excellent performance described above. There may be cases where a sintered body having the following properties cannot be obtained.

本発明は、上記事情に鑑みなされたもので、複数個の仮
焼体がら構成された集合体の各仮焼体に同時にしかも効
率よく溶融金属ケイ素を浸透させることができ、優れた
性能を有する反応焼結炭化ケイ素焼結体を確実かつ生産
性よく製造することができる反応焼結炭化ケイ素焼結体
の製造方法を提供することを目的とする。
The present invention has been made in view of the above circumstances, and has excellent performance by allowing molten metal silicon to penetrate simultaneously and efficiently into each calcined body of an aggregate composed of a plurality of calcined bodies. It is an object of the present invention to provide a method for manufacturing a reaction-sintered silicon carbide sintered body that can reliably and efficiently manufacture the reaction-sintered silicon carbide sintered body.

課題を解決するための手段及び作用 本発明者は、上記目的を達成するため鋭意検討を重ねた
結果、炭化ケイ素粉末と炭素粉末又は炭素源となり得る
有機物質との混合粉末から常法に従って作製した仮焼体
の複数個の集合体に溶融金属ケイ素を浸透させる場合、
複数個の仮焼体を多孔質炭素材料等の炭素質物質を介し
て互いに接触させた状態で集合させて集合体を構成し、
この集合体の一部から上記炭素質物質を介して該集合体
を構成する各仮焼体に溶融金属ケイ素を浸透させること
により、集合体の各仮焼体間の浸透に対する抵抗が各仮
焼体間に介在した炭素質物質の作用で解消され、集合体
全体、即ち各仮焼体に速やかに十分量の溶融金屑ケイ素
が浸透供給されて速やかかつ良好に反応(焼結)が完結
し、優れた性能を有する反応焼結炭化ケイ素焼結体を生
産性よく量産し得ることを見い出し、本発明を完成した
ものである。
Means and Action for Solving the Problems In order to achieve the above object, the inventor of the present invention has conducted extensive studies, and as a result, has produced a mixture of silicon carbide powder and carbon powder or an organic substance that can be a carbon source according to a conventional method. When infiltrating molten metal silicon into multiple aggregates of calcined bodies,
Constructing an aggregate by assembling a plurality of calcined bodies in contact with each other via a carbonaceous material such as a porous carbon material,
By infiltrating molten metal silicon from a part of the aggregate into each calcined body constituting the aggregate through the carbonaceous material, the resistance to penetration between each calcined body of the aggregate can be reduced for each calcined body. This is resolved by the action of the carbonaceous material interposed between the bodies, and a sufficient amount of molten metal scrap silicon is quickly infiltrated and supplied to the entire aggregate, that is, each calcined body, and the reaction (sintering) is quickly and successfully completed. They discovered that it is possible to mass-produce reaction-sintered silicon carbide sintered bodies with excellent performance with good productivity, and completed the present invention.

従って、本発明は、炭化ケイ素粉末と炭素粉末又は炭素
源となり得る有機物質とからなる混合粉末に有機質バイ
ンダーを添加して成形し、得られた成形体を加熱して仮
焼体とし、該仮焼体の複数個を集合した集合体に溶融金
属ケイ素を加熱下に浸透させて各仮焼体中の炭素源と反
応させる反応焼結炭化ケイ素焼結体の製造方法において
、複数個の仮焼体をその各仮焼体間に炭素質物質を介在
させて集合させた集合体を構成し、溶融金属ケイ素を上
記介在炭素質物質を介して上記集合体の各仮焼体に浸透
させることを特徴とする反応焼結炭化ケイ素焼結体の製
造方法を提供する。
Therefore, the present invention involves adding an organic binder to a mixed powder consisting of silicon carbide powder and carbon powder or an organic substance that can serve as a carbon source, molding the mixture, heating the resulting molded body to form a calcined body, and In a method for producing a reaction-sintered silicon carbide sintered body, molten metal silicon is infiltrated into an aggregate of a plurality of calcined bodies under heating and reacts with the carbon source in each calcined body. A carbonaceous substance is interposed between the calcined bodies to form an aggregate, and molten silicon metal is infiltrated into each calcined body of the aggregate through the intervening carbonaceous substance. Provided is a method for producing a characteristic reaction-sintered silicon carbide sintered body.

以下、本発明につき更に詳しく説明する。The present invention will be explained in more detail below.

本発明の反応焼結炭化ケイ素焼結体の製造方法は、まず
炭化ケイ素粉末と炭素粉末又は炭素源となり得る有機物
質とからなる混合粉末に有機質バインダーを添加して圧
縮成形し、得られた成形体を加熱して仮焼体を製造する
In the method for producing a reactively sintered silicon carbide sintered body of the present invention, first, an organic binder is added to a mixed powder consisting of silicon carbide powder and carbon powder or an organic substance that can be a carbon source, and compression molding is performed. The body is heated to produce a calcined body.

この場合、炭化ケイ素粉末としては、特に制限されるも
のではないが、平均粒径0.1〜40声程度のものが好
適に用いられ、また焼結体の用途等に応じてα型、β型
又はこれらを混合したものを適宜選択して用いることが
できる。また、上記炭素粒末としては平均粒径0.1〜
30u程度のものが好適に用いられる。更に、炭素源と
なり得る有機物質としては、シリコーンレジン、フェノ
ールレジン等を挙げることができる。
In this case, the silicon carbide powder is not particularly limited, but those with an average particle size of about 0.1 to 40 tones are preferably used, and depending on the use of the sintered body, α type, β type, etc. A type or a mixture thereof can be appropriately selected and used. In addition, the average particle size of the carbon particles is 0.1 to
A material of about 30u is preferably used. Furthermore, examples of organic substances that can serve as carbon sources include silicone resin and phenol resin.

この炭化ケイ素と炭素粉末又は炭素源となり得る有機物
質との混合粉末に添加される有機質バインダーとしては
、熱分解により炭素源又は炭化ケイ素を生じる熱硬化性
のものであればよく、具体的には、フェノール樹脂、シ
リコーン樹脂などを挙げることができ、これらはエチル
アルコールやアセトン等の有機質溶剤に溶解して使用す
ることができる。
The organic binder added to the mixed powder of silicon carbide and carbon powder or an organic substance that can serve as a carbon source may be any thermosetting binder that produces a carbon source or silicon carbide through thermal decomposition. , phenolic resin, silicone resin, etc., and these can be used after being dissolved in an organic solvent such as ethyl alcohol or acetone.

ここで、上記炭化ケイ素粉末、炭素粉末又は有機物質の
炭素源及び有機質バインダーの混合割合は、炭化ケイ素
粉末100部(重量部、以下同じ)に対して炭素源粉末
は25〜70部、特に約4゜部、有機質バインダーは1
5〜50部、特に約20部とすることが好ましく、また
混合方法としては、アセトン等の有機溶剤を用いた湿式
混合とすることが好ましい。なお、この湿式混合を採用
した場合、混合した後これを乾燥して成形に供するが、
乾燥後の混合物は固まった状態となっているので、これ
をパルペライザー機等を用いて解砕することが好ましく
、その粒度は20メツシユ以下、特に40メツシユ以下
とすることが好ましい。
Here, the mixing ratio of the carbon source of the silicon carbide powder, carbon powder, or organic material and the organic binder is 25 to 70 parts of the carbon source powder, especially about 4 parts, 1 part organic binder
The amount is preferably 5 to 50 parts, particularly about 20 parts, and the mixing method is preferably wet mixing using an organic solvent such as acetone. In addition, when this wet mixing is adopted, after mixing, it is dried and used for molding.
Since the mixture after drying is in a solid state, it is preferable to crush it using a pulperizer or the like, and the particle size is preferably 20 mesh or less, particularly 40 mesh or less.

次に、この混合物を成形し、加熱して仮焼し、仮焼体を
作製するが、この場合成形法としては全形プレス、ラバ
ープレス等による圧縮成形法が好適に採用される。また
、仮焼温度としては、混合物中の有機物質、有機質バイ
ンダーが分解され、かつ良好に硬化する温度とされ、具
体的には、通常500〜1000℃程度とされる。なお
、仮焼中の雰囲気は、アルゴンガス等の不活性ガス雰囲
気とすることが好ましい。また、得られた仮焼体には、
必要により機械加工を施すことができる。
Next, this mixture is molded, heated and calcined to produce a calcined body. In this case, a compression molding method using a full-form press, a rubber press, etc. is suitably employed as the molding method. Further, the calcination temperature is set to a temperature at which the organic substance and organic binder in the mixture are decomposed and well cured, and specifically, it is usually about 500 to 1000°C. Note that the atmosphere during calcination is preferably an inert gas atmosphere such as argon gas. In addition, the obtained calcined body has
Machining can be performed if necessary.

次いで、本発明の製造方法は、上記仮焼体を複数個集合
させると共に、各仮焼体間に炭素質物質を介在させ、各
仮焼体が上記介在炭素質物質により連絡された集合体を
椅成し、この集合体の各仮焼体に溶融金属ケイ素を上記
炭素質物質を介して加熱下に浸透させて、複数個の仮焼
体を同時に焼結する。この場合、上記集合体の各仮焼体
同士が互いに接触する箇所には上述のように炭素質物質
を介在させるが、仮焼体同士が接触しない箇所、即ち集
合体中に形成される空間にも炭素質物質を配置し、この
炭素質物質により空間を埋めると共に、隣在する仮焼体
同士を連絡することが好ましい。この焼結工程により、
溶融金属ケイ素が上記介在炭素質物質を介して集合体の
各仮焼体に良好にかつ速やかに浸透し、優れた性能を有
する複数個の焼結体を一度に得ることができる。
Next, in the manufacturing method of the present invention, a plurality of the calcined bodies are assembled, a carbonaceous material is interposed between each calcined body, and each calcined body is an aggregate connected by the intervening carbonaceous substance. A plurality of calcined bodies are simultaneously sintered by infiltrating molten metal silicon into each calcined body of the aggregate under heating through the carbonaceous material. In this case, the carbonaceous material is interposed as described above in the areas where the calcined bodies of the aggregate contact each other, but the carbonaceous material is interposed in the areas where the calcined bodies do not contact each other, that is, the spaces formed in the aggregate. It is preferable that a carbonaceous material is disposed in the space, and that the space is filled with the carbonaceous material and that adjacent calcined bodies are connected to each other. Through this sintering process,
The molten metal silicon penetrates well and quickly into each calcined body of the aggregate through the intervening carbonaceous material, and a plurality of sintered bodies having excellent performance can be obtained at once.

この焼結工程について図面を参照して説明する。This sintering process will be explained with reference to the drawings.

第1図は1本発明の製造方法の焼結工程の一例を示すも
のである。図中1は複数個の仮焼体2.2・・・からな
る仮焼体集合体で、この集合体1は炭素質物質からなる
箱3に複数個(図では12個)の仮焼体2,2・・・を
収容すると共に、各仮焼体2,2・・・間に炭素質物質
からなる溶融金属ケイ素浸透案内材4,4・・・を隣在
する仮焼体と互いに接触した状態に介装することにより
構成されている。なお、箱3の周壁及び底壁と隣接する
位置に配置された各仮焼体はそれぞれ箱3の周壁及び底
壁と接触している。また、上記案内材4.4・・・の箱
3の周壁側及び底壁側の端部は、それぞれ該周壁及び底
壁と接触している。
FIG. 1 shows an example of the sintering process of the manufacturing method of the present invention. In the figure, 1 is a calcined body aggregate consisting of a plurality of calcined bodies 2, 2..., and this aggregate 1 is a box 3 made of carbonaceous material containing a plurality of calcined bodies (12 in the figure). 2, 2..., and the molten metal silicon penetration guide material 4, 4... made of a carbonaceous material is placed between each calcined body 2, 2... in contact with the adjacent calcined body. It is constructed by interposing the Note that each calcined body disposed adjacent to the peripheral wall and the bottom wall of the box 3 is in contact with the peripheral wall and the bottom wall of the box 3, respectively. Further, the ends of the guide members 4, 4, . . . on the peripheral wall side and the bottom wall side of the box 3 are in contact with the peripheral wall and the bottom wall, respectively.

ここで、上記箱3や案内材4を構成する炭素質物質とし
ては、多孔質炭素材や黒鉛質材料等が好適に使用され、
特に繊維状のものが好ましいが、これらに限定されるも
のではなく、溶融金属ケイ素が浸透し得るものであれば
いずれのものでもよい。
Here, as the carbonaceous material constituting the box 3 and the guide material 4, porous carbon material, graphite material, etc. are preferably used.
In particular, fibrous materials are preferred, but the material is not limited to these, and any material that can be penetrated by molten metal silicon may be used.

次に、この集合体1を1450〜2000℃、特に15
00〜1600℃に加熱しである焼結炉内に収容し、該
炉内において容器5内に収容した溶融金属ケイ素6にそ
の箱3の底壁部を接触させ、この箱3底壁部を介して箱
3内部の仮焼体2.2・・・に溶融金属ケイ素を浸透さ
せる。なお、この焼結時の雰囲気は、非酸化性雰囲気と
することが好ましい、この場合、第2図に示したように
箱3の底壁から溶融金属ケイ素が浸透可能な炭素質材料
からなる接触片7を数本型し、その先端部を溶融金属ケ
イ素5に接触させるようにすることもでき、また、この
接触片7の先端側を1本に束ねて、その先端を溶融金属
ケイ素に接触させるようにすることもできる。
Next, this aggregate 1 is heated to 1450 to 2000°C, especially at 15°C.
The box 3 is placed in a sintering furnace heated to 00 to 1600°C, and in the furnace the bottom wall of the box 3 is brought into contact with the molten metal silicon 6 placed in the container 5. Molten metal silicon is allowed to penetrate into the calcined bodies 2.2... inside the box 3 through the molten silicon. The atmosphere during this sintering is preferably a non-oxidizing atmosphere. In this case, as shown in FIG. It is also possible to mold several pieces 7 so that their tips come into contact with the molten metal silicon 5, or to bundle the tips of the contact pieces 7 into one piece and make the tips come into contact with the molten metal silicon. It is also possible to do so.

このように各仮焼体間に炭素質物質を介在させた仮焼体
の集合体に炭素質物質を介して溶融金属ケイ素を浸透さ
せることにより、速やかに集合体全体(各仮焼体)に溶
融金属ケイ素が浸透すると共に、該集合体中においては
各仮焼体間に介在された炭素質物質より各仮焼体間の浸
透に対する抵抗が解消されて速やかに集合体全体、即ち
各仮焼体に十分量の溶融金属ケイ素が浸透供給される。
By infiltrating the molten metal silicon through the carbonaceous material into the aggregate of calcined bodies with a carbonaceous substance interposed between each calcined body, the entire aggregate (each calcined body) is rapidly absorbed. As the molten metal silicon permeates, the carbonaceous material interposed between the calcined bodies in the aggregate eliminates the resistance to penetration between the calcined bodies, and the entire aggregate, that is, each calcined body, quickly dissolves. The body is infiltrated with a sufficient amount of molten metal silicon.

従って、−度に複数個の仮焼体を良好に焼結することが
でき、優れた性能を有する複数個の反応焼結炭化ケイ素
焼結体を同時に生産性よく、量産することができる。
Therefore, it is possible to satisfactorily sinter a plurality of calcined bodies at the same time, and it is possible to simultaneously mass-produce a plurality of reaction-sintered silicon carbide sintered bodies having excellent performance with good productivity.

なお、本発明の製造方法における集合体の構成及び溶融
金属ケイ素の浸透方法は、上記第1,2図に示した集合
体及び浸透方法に限定されるものではなく、各仮焼体間
に炭素質物質が介在されてなる集合体、及びこの集合体
に炭素質物質を介して溶融金属ケイ素を浸透させる方法
であればいずれの方法であってもよい、また、集合体に
介在させた炭素質物質は、反応焼結後、エツチング等の
仕上げ処理により容易に焼結体から除去することができ
る。
The structure of the aggregate and the method of infiltration of molten metal silicon in the manufacturing method of the present invention are not limited to the aggregate and the method of infiltration shown in FIGS. 1 and 2 above. Any method may be used as long as it is an aggregate in which a carbonaceous substance is interposed, and molten metal silicon is infiltrated into this aggregate through a carbonaceous substance. After reactive sintering, the material can be easily removed from the sintered body by finishing treatments such as etching.

充泄図り弧果 以上説明したように、本発明の製造方法によれば、集合
体を構成する各仮焼体に効率よく確実に溶融金属ケイ素
を浸透させることができ、優れた性能を有する複数個の
反応焼結炭化ケイ素焼結体を同時に確実かつ生産性よく
量産することが可能である。
As described above, according to the manufacturing method of the present invention, it is possible to efficiently and reliably infiltrate molten metal silicon into each calcined body constituting the aggregate, and to produce a plurality of particles having excellent performance. It is possible to simultaneously mass-produce several reaction-sintered silicon carbide sintered bodies reliably and with high productivity.

以下、実施例、比較例を示し1本発明をより具体的に説
明するが、本発明は下記実施例に限定されるものではな
い。
EXAMPLES Hereinafter, the present invention will be explained in more detail by showing examples and comparative examples, but the present invention is not limited to the following examples.

〔実施例1〕 α−5iC粉末(平均粒径5/J11)80部(重量部
、以下同様)に炭素粉末(平均粒径3I!m)20部及
びフェノール樹脂(レゾールタイプ)15部を添加し、
ボールミル中でアセトンを用い、10時時間式混合した
後、l torrの減圧下で乾燥した。
[Example 1] 20 parts of carbon powder (average particle size 3I!m) and 15 parts of phenol resin (resol type) were added to 80 parts (parts by weight, same below) of α-5iC powder (average particle size 5/J11). death,
After mixing for 10 hours using acetone in a ball mill, the mixture was dried under reduced pressure of 1 torr.

乾燥後、この混合物をパルペライザー機で解砕し。After drying, the mixture was pulverized using a pulperizer.

200〜325メツシユに整粒した。この整粒粉末を金
型プレス機を使用し、1.3t/alの成形圧で直径3
0 trm 、高さ50mmの円柱状成形体を50個成
形した。これらの成形体をアルゴンガス中500℃で1
時間加熱した後、冷却し、50個の仮焼体を得た。
The grains were sized to 200 to 325 mesh. Using a mold press machine, this sized powder was molded into a powder with a diameter of 3 mm at a molding pressure of 1.3 t/al.
0 trm and 50 cylindrical molded bodies with a height of 50 mm were molded. These molded bodies were heated at 500°C in argon gas for 1
After heating for a period of time, the mixture was cooled to obtain 50 calcined bodies.

次に、内径300m、高さ200mmの有底筒状の箱体
及び巾8〜1oIIll、長さ10〜30III11の
多孔質炭素材の案内材を用い、上記第1図に示した方法
に従って上記仮焼体50個に1500℃に加熱した焼結
炉内で溶融金属ケイ素を浸透させ、焼結を行なった。
Next, using a bottomed cylindrical box with an inner diameter of 300 m and a height of 200 mm, and a guide material made of porous carbon material with a width of 8 to 1 o IIll and a length of 10 to 30 III, the temporary Fifty sintered bodies were impregnated with molten metal silicon in a sintering furnace heated to 1500°C, and sintered.

1時間後、箱体内の焼結体を調べたところ、すべての焼
結体は完全に反応(焼結)が完了しており、未反応前は
発生していなかった。
One hour later, when the sintered bodies inside the box were examined, all the sintered bodies had completely reacted (sintered), and no unreacted material had been generated.

〔比較例1〕 実施例1の焼結工程において、箱体内の各仮焼体間に案
内材を介在させなかった以外は実施例1と同様にして反
応焼結炭化ケイ素焼結体を製造した。なお、焼結は2時
間行なった。
[Comparative Example 1] A reactively sintered silicon carbide sintered body was produced in the same manner as in Example 1, except that in the sintering process of Example 1, no guide material was interposed between each calcined body in the box. . Note that sintering was performed for 2 hours.

得られた焼結体を調べたところ、未反応(未焼結)品が
多数認められた。
When the obtained sintered body was examined, many unreacted (unsintered) products were found.

〔実施例2〕 実施例1と同様にして仮焼体を作製した。[Example 2] A calcined body was produced in the same manner as in Example 1.

次に内径300mm、高さ2000110の有底筒状の
黒鉛質箱体、黒鉛質ヤーンを8〜Loanの長さに切断
した案内材及び黒鉛質ヤーンの接触片を用い、上記第2
図に示した方法に従って上記仮焼体50個に1500℃
に加熱した焼結炉内で溶融金属ケイ素を浸透させ、焼結
を行なった。
Next, using a bottomed cylindrical graphite box body with an inner diameter of 300 mm and a height of 2000110 mm, a guide material made by cutting graphite yarn into lengths of 8 to 1000, and a contact piece of graphite yarn, the second
According to the method shown in the figure, 50 of the above calcined bodies were heated to 1500°C.
Sintering was performed by infiltrating molten metal silicon in a sintering furnace heated to .

1時間後、箱体内の焼結体を調べたところ、すべての焼
結体は完全に反応(焼結)が完了しており、未反応前は
発生していなかった。
One hour later, when the sintered bodies inside the box were examined, all the sintered bodies had completely reacted (sintered), and no unreacted material had been generated.

〔比較例2〕 実施例2の焼結工程において、箱体内の各仮焼体間に案
内材を介在させなかった以外は、実施例2と同様にして
反応焼結炭化ケイ素焼結体を製造した。なお、焼結は2
時間行なった。
[Comparative Example 2] A reaction-sintered silicon carbide sintered body was produced in the same manner as in Example 2, except that no guide material was interposed between each calcined body in the box in the sintering process of Example 2. did. In addition, sintering is 2
I did it for an hour.

得られた焼結体を調べたところ、未反応(未焼結)品が
多数認められた。
When the obtained sintered body was examined, many unreacted (unsintered) products were found.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明製造方法の一実施工程を説明する説明図
、第2図は同実施工程の他の例を説明する説明図である
。 1・・・集合体       2・・仮焼体3・・・箱
体(炭素質物質) 4・・・案内材(炭素質物質)6・
・・溶融金属ケイ素
FIG. 1 is an explanatory diagram for explaining one implementation step of the manufacturing method of the present invention, and FIG. 2 is an explanatory diagram for explaining another example of the same implementation step. 1... Aggregate 2... Calcined body 3... Box (carbonaceous material) 4... Guide material (carbonaceous material) 6.
・・Molten metal silicon

Claims (1)

【特許請求の範囲】[Claims] 1.炭化ケイ素粉末と炭素粉末又は炭素源となり得る有
機物質とからなる混合粉末に有機質バインダーを添加し
て成形し、得られた成形体を加熱して仮焼体とし、該仮
焼体の複数個を集合した集合体に溶融金属ケイ素を加熱
下に浸透させて各仮焼体中の炭素源と反応させる反応焼
結炭化ケイ素焼結体の製造方法において、複数個の仮焼
体をその各仮焼体間に炭素質物質を介在させて集合させ
た集合体を構成し、溶融金属ケイ素を上記介在炭素質物
質を介して上記集合体の各仮焼体に浸透させることを特
徴とする反応焼結炭化ケイ素焼結体の製造方法。
1. An organic binder is added to a mixed powder consisting of silicon carbide powder and carbon powder or an organic substance that can serve as a carbon source, the mixture is molded, the resulting molded body is heated to form a calcined body, and a plurality of the calcined bodies are combined. In a method for producing a reaction-sintered silicon carbide sintered body in which molten metal silicon is infiltrated into the aggregate under heating and reacts with the carbon source in each calcined body, a plurality of calcined bodies are calcined in each of the calcined bodies. Reactive sintering, characterized in that an aggregate is formed by interposing a carbonaceous material between the bodies, and molten metal silicon is infiltrated into each calcined body of the aggregate through the intervening carbonaceous substance. A method for producing a silicon carbide sintered body.
JP2239432A 1990-09-10 1990-09-10 Production of reaction-sintering silicon carbide sintered body Pending JPH04119966A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2239432A JPH04119966A (en) 1990-09-10 1990-09-10 Production of reaction-sintering silicon carbide sintered body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2239432A JPH04119966A (en) 1990-09-10 1990-09-10 Production of reaction-sintering silicon carbide sintered body

Publications (1)

Publication Number Publication Date
JPH04119966A true JPH04119966A (en) 1992-04-21

Family

ID=17044689

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2239432A Pending JPH04119966A (en) 1990-09-10 1990-09-10 Production of reaction-sintering silicon carbide sintered body

Country Status (1)

Country Link
JP (1) JPH04119966A (en)

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