JPH0410504Y2 - - Google Patents

Description

[Detailed description of the invention] [Industrial application field] This invention is used for electrical and electronic equipment, pharmaceuticals, precision machinery, and other production and processing applications, as well as for use in operating rooms and laboratories. related to clean rooms.

[Conventional technology]

A clean room that forms a clean space typically blows clean air across the entire width of the room in a substantially laminar flow style. The most popular type of clean room is a vertical flow type clean room in which air is blown vertically from the ceiling to the floor. Among these, vertical flow clean rooms are often used for industrial purposes. Typical examples of conventional vertical flow clean rooms are shown in FIGS. 6 and 7.

Figure 6 shows how the air conditioner 2 with sufficient capacity to cover the load of the clean room 1 is installed in the clean room 1.
The system is installed in the machine room outside of the clean room, and a return air duct 3 and a supply air duct 4 are installed to circulate air into the clean room 1. The back ceiling space 6 of 5 is used as a plenum chamber to the clean room 1.

In the example shown in FIG. 7, a large number of unit type blowers 8 are disposed above the HEPA filter 5 over the entire area of the HEPA filter 5, and conditioned air is supplied from outside the system. This example has the characteristic that a large amount of dynamic pressure can be taken.

[Problem that the invention attempts to solve]

In the conventional example shown in Figure 6, the air conditioning machine room is larger,
There is a problem that the duct is difficult to fit.
For this reason, there is also a problem that the initial cost becomes high. In the example shown in Figure 7, a high ceiling height is required, making maintenance inside the ceiling impossible.
There is also the problem of increased vibration and noise.

Not limited to these examples, conventional vertical flow clean rooms have the problem that the entire air within the system is processed by a specific air conditioner, which makes it difficult to finely adjust the temperature and humidity. Even when the area occupied by a large amount of space, the entire air in the room was treated, which led to the problem of wasted energy.

[Means to solve problems]

This invention uses HEPA that is stretched horizontally on the ceiling.
In a clean room in which clean air is blown into the room in a vertical flow manner through a filter, an air conditioner that can be operated independently is installed on each side wall, on the back side of one side wall of the room and on the back side of the other side wall opposite to this side wall. A large number of air conditioners are adjacent to each other along the HEPA filter, and the supply air outlet of each air conditioner is opened to the attic space on the suction side of the HEPA filter, and the return air intake of each air conditioner is opened to the space below the room. The above-mentioned problems are thereby solved.

In other words, the clean room of the present invention has a large number of adjacent small-capacity air conditioners that can be operated independently on both sides of the room, so that the total load of the clean room can be covered and the number of these units can be controlled. This makes it possible to cope with load fluctuations (lower air volume during non-working hours, increases and decreases in working capacity). By opening the supply air outlet from each air conditioner and the return air intake to each air conditioner to the top and bottom of the room (above the HEPA filter and under the perforated floor), the blower in each air conditioner can be This reduces the required static pressure and reduces the overall motor capacity. Each air conditioner is placed side by side, leaning against the back side of both walls.
For this purpose, each air conditioner has a width of, for example, approximately
3m in length, 0.5 to 2m in depth, and the height is almost the same as the ceiling (casing shape), and by adjoining them in the width direction, a long horizontal wall is formed. make it a thing. A heat exchange coil and a blower are housed in each casing, and the air conditioner is constructed such that return air is taken in from below each casing and supply air is supplied from above.

At this time, each of the air conditioners having a vertically long external shape is equipped with a suction side chamber, a mechanical box, and a discharge side chamber from below, and a heat exchange coil and a blower of the machine box are housed, and the blower's discharge port prevents backflow. A shutter will be provided.

The structure of the clean room of the present invention will be specifically explained below with reference to the drawings.

〔Example〕

FIG. 1 is a perspective view of a part of the clean room of the present invention. A large number of air conditioner units 12 having the same shape and structure and capable of independently operating are connected to both back sides (outside of the clean room) of one side wall 10 and the other side wall 11 opposite to this side wall 10 constituting this clean room. Ru. Entrances and exits are provided in the side walls (not visible in the figure) perpendicular to both side walls 10 and 11, forming a rectangular interior space 1 of the clean room as a whole. This is a double floor consisting of a perforated floor 15 provided above by opening an underfloor space 14, and a HEPA filter 5 is installed on the ceiling horizontally with a back ceiling board 16 leaving an attic space 17. There is. The return air intake port 18 of each air conditioner unit 12 is open so as to communicate with the underfloor space 14, and the air supply outlet 19 of each air conditioner unit 12 is open so as to communicate with the attic space 17. are doing. As described above, each air conditioner unit 12 has a substantially identical appearance, with a width of 1 to 3 m, a depth of 0.5 to 2 m, and a height almost to the ceiling. A heat exchange coil 20 and a blower 21 independent from the heat exchange coil 12 are installed.

FIG. 2 shows a vertical section of the clean room shown in FIG. 1, and FIG. 3 shows a plane view thereof.
As seen in these figures, each air conditioner unit 12 is a completely independent air conditioner, and these are adjacent to each other in the width direction so as to lean against the back side of each side wall 10,11. Openings provided at the top and bottom of the back plate of each air conditioner unit 12 are air supply and discharge ports provided at the top (above the HEPA filter 5) and bottom (below the porous floor 15) of both side walls 10, 11. 19 and the return air intake 18 by a very short flexible short duct.

4 and 5 are cross-sectional views showing the internal structure of each air conditioner unit 12. FIG. However, FIG. 5 is a cross section taken along the line -- in FIG. 4, and some parts (in the upper part) are viewed in the opposite direction. As seen in these figures, the air conditioner unit has a casing with an elongated vertical profile. The interior thereof is divided into approximately three stages, and a suction side chamber 23, a mechanical box 24, and a discharge side chamber 25 are formed in this order from the bottom. The front surface of the suction side chamber 23 slightly protrudes forward. A return air intake opening 27 is provided in the back plate 26 of the casing corresponding to the suction side chamber 23, and a supply air discharge opening 28 is provided in the back plate 26 corresponding to the discharge side chamber 25. It is connected to the return air intake 18 and the supply air outlet 19 by short ducts 29 and 30. Most of the inner surface of the casing is covered with sound-absorbing plates (which also serve as heat-insulating plates) to prevent noise.

As shown in FIG. 4, the suction side chamber 23 has a horizontal baffle plate 31 installed in the middle so that the return air taken in from the return air intake opening 29 rises in a meandering manner. A sound absorption cell 32 connected to the air intake opening 29 is installed. As seen in FIG. 5, this sound-absorbing cell 32 consists of two parallel passages, which are surrounded by a sound-absorbing material. By providing this cell 32, it is possible to prevent the noise of the air conditioner from propagating into the clean room through the return air intake opening 29 and the return air intake 18 immediately adjacent thereto. Further, a ventilation intake opening 33 is provided on the front surface of this suction side chamber 23 (above the baffle plate 31).
A duct with an opening adjustment damper (not shown) is connected to this, from which the necessary amount of ventilation is taken in.

A heat exchange coil 20 is installed in the middle machine box 24.
A blower 21 is installed. The heat exchange coil 20 is installed on the suction side of the blower 21, and cold water is passed through it. This flow rate of water is controlled by a control valve (not shown). In the illustrated example, two blowers 21 are installed in parallel, and these are installed on a vibration isolating member 36 together with a blower motor 35 . A muffler 37 is attached to the outlet of the blower 21. This muffler 37 is connected to the machine box 24.
and the discharge side chamber 25.
The perforated plate part is located in the discharge side chamber 25.

Inside the discharge side chamber 25, a discharge port 39 of this muffler 37 opens upward, and a backflow prevention shutter 40 is attached to this discharge port 39. This backflow prevention shutter 40 is a simple one in which the upward opening of the blower outlet 39 is closed with a single-supported blade as shown in the figure. When the blower is stopped, its own weight closes the opening and the blower is stopped. When it is being driven, it floats due to the wind pressure and air circulates. By providing this backflow prevention shutter 40, backflow of air through the stop unit is prevented when controlling the number of air conditioner units 12. A vertical baffle plate 41 is installed between the supply air discharge opening 28 and the discharge port 39 of the muffler, and the air discharged from the discharge port 39 collides with the top surface of the casing. After changing the direction with the baffle plate 41, the air flows into the supply air discharge opening 28, and this baffle plate 4
1 prevents the blower noise from propagating into the clean room via the air supply discharge opening 28 and the air supply discharge port 19 immediately adjacent thereto.

[Effect]

The clean room of this invention with the above configuration is
By controlling the number of a large number of air conditioner units 12, it is possible to respond to changes in load, allowing energy-saving operation and fine-grained control. Since each air conditioner unit 12 is installed directly behind both side walls of the clean room, the path of the circulating air flow takes the shortest distance, and the blower power can be kept to a minimum. In addition, by using the attic space as a plenum chamber for the clean room and arranging the air supply and discharge ports 19 evenly on both sides of this plenum chamber, air can be supplied evenly throughout the room, resulting in static pressure distribution. becomes good. Then, suppose air conditioner unit 1
The cleanliness of the clean room will not deteriorate significantly even if some of the machines in 2. break down or need maintenance. This clean room has a feature not found in conventional clean rooms in that it can immediately respond to changes in the number of air conditioner units 12 by increasing or decreasing the number of air conditioner units 12.

[Brief explanation of the drawing]

Figure 1 is a perspective conceptual diagram of a part of the clean room of the present invention, Figure 2 is a longitudinal sectional view of the clean room of the present invention, Figure 3 is a plan view of the clean room of Figure 2, and Figure 4 is the concept of the clean room of the present invention. Figure 5 is a vertical cross-sectional view of an air conditioner used in a clean room.
6 is a schematic sectional view showing a typical example of a conventional clean room, and FIG. 7 is a schematic sectional view showing another typical example of a conventional clean room. 1...Clean room space, 5...HEPA filter, 12...Air conditioner unit, 14...Underfloor space, 15...Porous floor, 17...Attic space,
18... Return air intake, 19... Supply air outlet, 20
... Heat exchange coil, 21 ... Blower, 31, 41
... Baffle plate, 32 ... Sound deadening cell, 33 ... Ventilation intake, 37 ... Muffler.

Claims (1)

[Scope of utility model registration request] In a clean room where clean air is blown into the room in a vertical flow through a HEPA filter stretched horizontally on the ceiling, a vertically long A large number of air conditioners, each capable of independent operation, are placed adjacent to each other along each side wall.
The suction side of the filter is opened to the attic space, and the return air intake of each air conditioner is opened to the lower space of the room, and each air conditioner is connected from below to the suction side chamber, the machine box, and the discharge side chamber. 1. A vertical flow clean room characterized in that a heat exchange coil and a blower are housed in the machine box, and a backflow prevention shutter is provided at the discharge port of the blower.