JP7649467B2 - Surface-coated cutting tools - Google Patents
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- 238000005520 cutting process Methods 0.000 title claims description 74
- 239000010410 layer Substances 0.000 claims description 125
- 239000002131 composite material Substances 0.000 claims description 38
- 239000011247 coating layer Substances 0.000 claims description 36
- 239000000758 substrate Substances 0.000 claims description 33
- 239000013078 crystal Substances 0.000 claims description 29
- 150000004767 nitrides Chemical class 0.000 claims description 22
- 239000000203 mixture Substances 0.000 claims description 21
- 238000002441 X-ray diffraction Methods 0.000 claims description 9
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims description 9
- 229910052757 nitrogen Inorganic materials 0.000 claims description 6
- 229910052799 carbon Inorganic materials 0.000 claims description 5
- 238000005755 formation reaction Methods 0.000 description 37
- 230000015572 biosynthetic process Effects 0.000 description 35
- 239000007789 gas Substances 0.000 description 32
- 238000000034 method Methods 0.000 description 19
- 238000005422 blasting Methods 0.000 description 15
- 238000006243 chemical reaction Methods 0.000 description 11
- 230000000052 comparative effect Effects 0.000 description 10
- 238000005229 chemical vapour deposition Methods 0.000 description 9
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 239000000843 powder Substances 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 7
- 238000000576 coating method Methods 0.000 description 7
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 6
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 239000012495 reaction gas Substances 0.000 description 6
- 229910017150 AlTi Inorganic materials 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 239000006061 abrasive grain Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 230000006911 nucleation Effects 0.000 description 4
- 238000010899 nucleation Methods 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- 239000011780 sodium chloride Substances 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 229910010037 TiAlN Inorganic materials 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 230000001747 exhibiting effect Effects 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910000069 nitrogen hydride Inorganic materials 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- -1 supply conditions Substances 0.000 description 2
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 1
- 229910018575 Al—Ti Inorganic materials 0.000 description 1
- 238000012935 Averaging Methods 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910001315 Tool steel Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000004453 electron probe microanalysis Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910001026 inconel Inorganic materials 0.000 description 1
- 229910000816 inconels 718 Inorganic materials 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 229910003470 tongbaite Inorganic materials 0.000 description 1
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- Cutting Tools, Boring Holders, And Turrets (AREA)
- Chemical Vapour Deposition (AREA)
Description
本発明は、連続高速切削加工に加え、断続切削加工においても、硬質被覆層がすぐれた耐欠損性と耐摩耗性とを備えることにより、すぐれた切削性能を発揮する表面被覆切削工具(以下、単に「被覆工具」ということがある)に関するものである。 The present invention relates to a surface-coated cutting tool (hereinafter sometimes simply referred to as a "coated tool") that exhibits excellent cutting performance not only in continuous high-speed cutting but also in intermittent cutting, due to the hard coating layer having excellent chipping resistance and wear resistance.
ステンレス鋼や溶断表面が残存する鋼材、あるいは、ニッケル基耐熱合金等の難削材の切削加工において、特に、CVD法によりAlTiNを被覆した切削工具においては、その皮膜硬さや耐酸化特性により、連続高速切削領域において、高い耐摩耗性を発揮することが知られている。
一方、被削材の靭性が高いステンレス鋼やニッケル基耐熱合金等の難削材、切り込み量が変動する溶断面の加工のような不安定加工、あるいは、断続性の高い切削領域での切削加工においては、その高い皮膜硬さのため、粒子の脱落が顕著に発生し、工具の欠損を伴う異常損傷が進行することで、本来の性能を発揮することができないという問題を有していた。
In cutting difficult-to-cut materials such as stainless steel, steels with remaining cut surfaces, and nickel-based heat-resistant alloys, cutting tools coated with AlTiN by CVD are known to exhibit high wear resistance in continuous high-speed cutting due to the hardness and oxidation resistance of the coating.
On the other hand, when the workpiece is a difficult-to-cut material such as stainless steel or nickel-based heat-resistant alloy, which has high toughness, or when cutting an unstable cutting surface where the cutting depth varies, or when cutting in a cutting region with high intermittency, the high hardness of the coating causes significant particle fall-off, leading to the progression of abnormal damage including tool breakage, and the original performance cannot be demonstrated.
これに対して、例えば、特許文献1では、基材表面に化学蒸着法により成膜された硬質被覆層が、TiおよびAlの複合窒化物(TiAlN)層または複合炭窒化物(TiAlCN)層からなり、少なくとも90体積%の面心立方構造を有し、X線回折を行った際に、(111)面における配向性指数TC(111)が最大であり、その値は、少なくとも1.5以上であり、前記複合窒化物層または複合炭窒化物層の残留応力値が、0MPa以下、-5000MPa以上の残留圧縮状態であるときに、工具としての耐亀裂性および耐摩耗性に改善がみられるとされている。
なお、(111)面の配向性指数TC(111)の導出にあたっては、Ti、Alの複合炭窒化物の(111)、(200)、(220)および(311)の各結晶面に対するX線回折ピーク強度の測定値を用いている。
In contrast, for example, in Patent Document 1, it is said that when a hard coating layer formed on a substrate surface by a chemical vapor deposition method is made of a composite nitride (TiAlN) layer or a composite carbonitride (TiAlCN) layer of Ti and Al, has a face-centered cubic structure of at least 90 volume %, has a maximum orientation index TC(111) in the (111) plane when subjected to X-ray diffraction and has a value of at least 1.5, and has a residual stress value of 0 MPa or less and -5000 MPa or more in a residual compression state, the crack resistance and wear resistance of the tool are improved.
In addition, the orientation index TC(111) of the (111) plane is derived using the measured values of the X-ray diffraction peak intensities for each of the (111), (200), (220) and (311) crystal planes of a Ti and Al complex carbonitride.
また、特許文献2では、すくい面および逃げ面を有し、それらの境界部分が切れ刃を成す表面被覆切削工具において、基材の表面にCVD法を用いて成膜された、特定組成のNaCl型結晶構造のTiAlN層の(111)面における配向性指数TC(111)が最大値を示し、その値が、1.0<TC(111)≦4.0を満たすときに、すぐれた耐摩耗性および耐欠損性を発揮する表面被覆切削工具が得られることが記載されている。
なお、ここでは、(111)面の配向性指数TC(111)の導出にあたっては、Ti、Alの複合炭窒化物の結晶成長優先方位である、(111)、(200)、(220)、(311)および(222)の各結晶面に対するX線回折ピーク強度の測定値を用いている。
Patent Document 2 also describes that in a surface-coated cutting tool having a rake face and a flank face, the boundary between them forming a cutting edge, when the orientation index TC(111) of the (111) plane of a TiAlN layer of a specific composition and NaCl type crystal structure formed on the surface of a substrate by a CVD method exhibits a maximum value and this value satisfies 1.0<TC(111)≦4.0, a surface-coated cutting tool exhibiting excellent wear resistance and chipping resistance can be obtained.
In this case, the orientation index TC(111) of the (111) plane is derived using the measured values of the X-ray diffraction peak intensities for each of the (111), (200), (220), (311), and (222) crystal planes, which are the preferred crystal growth orientations of Ti and Al composite carbonitrides.
近年の切削加工における省力化および省エネ化等の要求は強く、これに伴い、切削加工は一段と高速化、高効率化の傾向にあり、被覆工具では、粒子の脱落の発生により、工具の欠損を伴う異常損傷を生じることから、すぐれた耐欠損性が求められ、さらに、長期の使用に亘っては、すぐれた耐摩耗性が求められている。
そして、前記特許文献1および特許文献2では、被覆工具において、化学蒸着法を用いて硬質被覆層として形成される立方晶構造を有するAl、Ti複合炭窒化物の結晶粒の結晶面を(111)面に配向させることにより、すぐれた耐欠損性と耐摩耗性を兼ね備えた被覆工具が提案されている。
しかしながら、単に特定組成のNaCl型結晶構造のAl、Ti複合炭窒化物の結晶粒の結晶面を(111)面に配向させ、その配向性指数を特定の範囲に規定するのみでは、耐欠損性は向上するものの、耐摩耗性が低下するため、耐欠損性と耐摩耗性の両立を図ることはできず、その結果、長期の使用を実現することができないという問題を有していた。
In recent years, there has been a strong demand for labor-saving and energy-saving in cutting processing. Accordingly, there is a trend for cutting processing to become even faster and more efficient. Coated tools are required to have excellent resistance to chipping, since the shedding of particles can cause abnormal damage including tool breakage. Furthermore, for long-term use, excellent wear resistance is also required.
In addition, Patent Documents 1 and 2 propose a coated tool having both excellent fracture resistance and wear resistance, in which the crystal faces of the crystal grains of an Al, Ti composite carbonitride having a cubic crystal structure formed as a hard coating layer by a chemical vapor deposition method are oriented in the (111) plane.
However, simply orienting the crystal planes of the crystal grains of an Al, Ti composite carbonitride having a NaCl type crystal structure of a specific composition to the (111) plane and specifying the orientation index within a specific range improves the fracture resistance but reduces the wear resistance. As a result, there has been a problem in that it is not possible to achieve both fracture resistance and wear resistance, and long-term use cannot be realized.
そこで、本発明は、かかる課題を解決し、長期使用に際しても、早期の摩耗損傷を発生することなく耐摩耗性にすぐれ、あわせて高い耐欠損性を発揮する表面被覆切削工具を提供することを目的とする。 The present invention aims to solve these problems and provide a surface-coated cutting tool that has excellent wear resistance and high chipping resistance without early wear damage even when used for a long period of time.
本発明者らは、前述の観点から、AlとTiの複合炭窒化物からなる硬質被覆層を化学蒸着にて被覆形成した被覆工具の耐欠損性と耐摩耗性の改善および向上を両立して達成すべく、鋭意研究を重ねた結果、次のような知見を得た。 From the above viewpoint, the inventors have conducted extensive research to simultaneously improve and enhance the chipping resistance and wear resistance of a coated tool having a hard coating layer made of a composite carbonitride of Al and Ti formed by chemical vapor deposition, and have come to the following findings.
すなわち、本発明者らは、炭化タングステン基超硬合金基体に対し、CVD-AlTiNから成る硬質被覆層の下部層を成膜するにあたり、例えば、基体の切れ刃すくい面に対し、ウェットブラストやドライブラスト等の前処理を行うこと、あるいは、硬質被覆層の成膜後に後処理としてウェットブラストやドライブラストを行うこと、さらには、その両者を実施することにより、基体の切れ刃すくい面および逃げ面のそれぞれに対して意図的に適切な値の残留応力を付与し、耐摩耗性を低下させることなく、耐欠損性にすぐれた表面被覆切削工具が得られることを知見した。 In other words, the inventors discovered that when forming a lower layer of a hard coating layer made of CVD-AlTiN on a tungsten carbide-based cemented carbide substrate, for example, the cutting edge rake face of the substrate can be subjected to pretreatment such as wet blasting or dry blasting, or wet blasting or dry blasting can be performed as a post-treatment after the hard coating layer is formed, or even both can be performed to intentionally impart appropriate residual stresses to the cutting edge rake face and flank face of the substrate, thereby obtaining a surface-coated cutting tool with excellent chipping resistance without reducing wear resistance.
そして、具体的には、表面被覆工具の炭化タングステン基超硬合金基体の切れ刃すくい面における残留応力S2を、切れ刃逃げ面における残留応力S1より小さい値とし(S1>S2)、少なくとも-200MPa以下(S2≦-200MPa)の残留応力を付与し、前記基体の切れ刃逃げ面における残留応力S1を前記残留応力S2より大きな値(S1>S2)とし、S1とS2の差の絶対値を250MPaより大きい値とすること、さらに好ましくは、前記切れ刃すくい面における残留応力S2を、-850MPa以下(S2≦-850MPa)の残留応力、すなわち、850MPa以上の残留圧縮応力を付与するとともに、前記基体の切れ刃逃げ面における残留応力S1を前記S2より大きな値(S1>S2)とし、S1とS2の差の絶対値を500MPaより大きい値とすることにより、耐摩耗性を低下させることなく、耐欠損性にすぐれ、特に、旋削(ターニング)加工用に好適な表面被覆切削工具が得られることを知見してなされたものである。
なお、ここで、切れ刃すくい面における残留応力S2が、例えば、「-200MPa」であるとは、前記残留応力S2は、残留圧縮応力であって、残留圧縮応力値が200MPaであることをいい、また、「S2≦-200MPa」であるとは、「残留応力S2が、-200MPa以下」すなわち、「前記残留圧縮応力S2が、200MPa以上」であることをいう。
切れ刃逃げ面における残留応力S1においても同様である。
Specifically, the residual stress S2 on the cutting edge rake face of the tungsten carbide based cemented carbide substrate of the surface-coated tool is set to a value smaller than the residual stress S1 on the cutting edge flank (S1>S2), and a residual stress of at least -200 MPa or less (S2≦-200 MPa) is imparted, the residual stress S1 on the cutting edge flank of the substrate is set to a value larger than the residual stress S2 (S1>S2), and the absolute value of the difference between S1 and S2 is set to a value larger than 250 MPa , and more preferably, the residual stress S2 on the cutting edge rake face is set to a residual stress of -850 MPa or less (S2≦-850 MPa), that is, a residual compressive stress of 850 MPa or more, and the residual stress S1 on the cutting edge flank of the substrate is set to a value larger than the residual stress S2 (S1>S2), and the absolute value of the difference between S1 and S2 is set to 500 This was made on the basis of the finding that by setting the value to be greater than 100 MPa , a surface-coated cutting tool having excellent fracture resistance without decreasing wear resistance and particularly suitable for turning can be obtained.
Here, when the residual stress S2 on the cutting edge rake face is, for example, "-200 MPa," this means that the residual stress S2 is a residual compressive stress and has a residual compressive stress value of 200 MPa, and when "S2≦-200 MPa" this means that "the residual stress S2 is -200 MPa or less," or in other words, "the residual compressive stress S2 is 200 MPa or more."
The same is true for the residual stress S1 on the cutting edge flank.
本発明は、前記知見に基づいてなされたものであって、
「(1)炭化タングステン基超硬合金からなる工具基体の表面に、硬質被覆層を有してなる表面被覆切削工具において、
(a)前記硬質被覆層は、前記工具基体最表面に直接接してなる下部層と、該下部層に直接接してなる上部層との少なくとも二層を有し、前記硬質被覆層の全平均層厚は、0.6~21.0μmであり、
(b)前記下部層は、Tiの窒化物もしくは炭窒化物からなり、その平均層厚は、0.05~2.0μmであり、
(c)前記上部層は、AlとTiとの複合窒化物層または複合炭窒化物層であり、その平均層厚は、0.5~20.0μmであり、
組成式:(AlXTi1-X)(CYN1-Y)で表した場合、前記複合窒化物層または前記複合炭窒化物層のTiとAlとの合量に対してAlが占める平均含有割合Xavgおよび前記複合窒化物層または前記複合炭窒化物層のCとNの合量に対してCが占める平均含有割合Yavg(但し、Xavg、Yavg はいずれも原子比)が、それぞれ、0.70≦Xavg≦0.90、0≦Yavg<0.05を満足し、NaCl型の面心立方晶構造を有する複合窒化物層または複合炭窒化物層からなり、
(d)表面被覆工具の炭化タングステン基超硬合金の切れ刃逃げ面の残留応力をS1、切れ刃すくい面の残留応力S2としたとき、
α)S1>S2
β)S2≦-200MPa
γ)S1とS2の差の絶対値が250MPaより大きいこと
をそれぞれ満たす表面被覆切削工具。
(2)前記上部層において、X線回折を行った際に、立方晶(111)面の回折線強度値に対する立方晶(200)面における回折線強度値、I(111)/I(200)が、
1.0≦I(111)/I(200)の関係を満たすことを特徴とする(1)に記載された表面被覆切削工具。
(3)表面被覆工具の炭化タングステン基超硬合金の切れ刃逃げ面の残留応力S1、切れ刃すくい面の残留応力S2としたとき、
α)S1>S2
β)S2≦-850MPa
γ)S1とS2の差の絶対値が500MPaより大きいこと
をそれぞれ満たす(1)または(2)に記載された表面被覆切削工具。」
に特徴を有するものである。
なお、本明細書中において、数値範囲を示す際に、「~」あるいは「-」を用いる場合は、その数値範囲の下限および上限を含むことを意味する。
つぎに、本発明の被覆工具の工具基体および硬質被覆層について、具体的に説明する。
The present invention has been made based on the above findings,
"(1) A surface-coated cutting tool having a hard coating layer on the surface of a tool substrate made of a tungsten carbide-based cemented carbide,
(a) the hard coating layer has at least two layers, namely a lower layer directly contacting the outermost surface of the tool substrate and an upper layer directly contacting the lower layer, and the total average thickness of the hard coating layer is 0.6 to 21.0 μm;
(b) the lower layer is made of a Ti nitride or carbonitride and has an average layer thickness of 0.05 to 2.0 μm;
(c) the upper layer is a composite nitride layer or a composite carbonitride layer of Al and Ti, and the average layer thickness is 0.5 to 20.0 μm;
When expressed by a composition formula: (Al X Ti 1-X ) (C Y N 1-Y ), an average content ratio X avg of Al to the total amount of Ti and Al in said composite nitride layer or said composite carbonitride layer and an average content ratio Y avg of C to the total amount of C and N in said composite nitride layer or said composite carbonitride layer (wherein X avg and Y avg are both atomic ratios) satisfy 0.70≦X avg ≦0.90 and 0≦Y avg <0.05, respectively, and the composite nitride layer or composite carbonitride layer has a NaCl-type face-centered cubic crystal structure,
(d) When the residual stress on the flank of the cutting edge of the tungsten carbide based cemented carbide of the surface-coated tool is S1 and the residual stress on the rake face of the cutting edge is S2,
α) S1>S2
β) S2≦-200MPa
γ) The absolute value of the difference between S1 and S2 is greater than 250 MPa.
(2) When X-ray diffraction is performed on the upper layer, the ratio of the diffraction intensity value of the cubic (111) plane to the diffraction intensity value of the cubic (200) plane, I(111)/I(200), is
2. The surface-coated cutting tool according to claim 1, wherein the relationship of 1.0≦I(111)/I(200) is satisfied.
(3) When the residual stress on the flank of the cutting edge of the tungsten carbide-based cemented carbide of the surface-coated tool is S1 and the residual stress on the rake face of the cutting edge is S2,
α) S1>S2
β) S2≦-850MPa
γ) The absolute value of the difference between S1 and S2 is greater than 500 MPa.
It is characterized by the following.
In addition, when "to" or "-" is used in this specification to indicate a numerical range, it means that the lower and upper limits of the numerical range are included.
Next, the tool substrate and the hard coating layer of the coated tool of the present invention will be specifically described.
1.工具基体;
工具基体としては、炭化タングステン基超硬合金を用いる。本発明は、前記超硬合金基体の切れ刃すくい面において、-200MPa以下、より好ましくは、-850MPa以下の残留応力が付与されることにより、硬質被覆層との密着性が高まり、連続高速切削領域に加え、断続切削領域においても、耐欠損性および耐摩耗性にすぐれた切削性能を有する切削工具として用いることができる。
また、前記合金基体の切れ刃すくい面における残留応力値を-200MPa以下、より好ましくは、-850MPa以下とすることにより、加工中におけるクラックの進展を抑制し、高い耐欠損性を発揮させることができる。
他方、すくい面と同様に逃げ面における圧縮残留応力が高まり、すくい面の残留応力値と逃げ面の残留応力値の差の絶対値が250MPa以下になると、母材の塑性変形時に工具逃げ面を起点とした、皮膜剥離が発生しやすくなるため、すくい面における残留応力値に対する逃げ面における残留応力値の差の絶対値は、250MPaより大きい値、好ましくは500MPaより大きい値とすることが必要である。
前記工具基体への残留応力の付与は、ウェットブラストまたはドライブラストを用い、後記硬質被覆層の成膜前の前処理、あるいは、後記硬質被覆層の成膜後の後処理として行うことができる。
ウェットブラストまたはドライブラストを硬質被覆層の成膜前の前処理として行う場合には、成膜時の成膜温度を通常よりも低い温度とすることにより、残留応力の緩和を抑制できるため、工具の長寿命化を図ることができる。
例えば、ブラストによる基体への残留応力の付与は、硬質被覆層の成膜前もしくは成膜後に、アルミナや窒化ケイ素、ジルコニアの砥粒を用いたメディアにより、乾式または湿式のブラスト処理を工具表面へ投射することにより実施する。
ブラスト処理条件;
砥粒:ZrO2粒、Al2O3粒
砥粒形状:球形および/または多角形
砥粒サイズ(粒径):125-425μm(球形)/<125μm(多角形)
ブラスト圧力:0.1-0.4MPa
すくい面から70~90°にてブラスト投射
投射時間: 4-16秒
1. Tool base;
The tool substrate is made of a tungsten carbide-based cemented carbide. In the present invention, a residual stress of -200 MPa or less, more preferably -850 MPa or less is imparted to the cutting edge rake face of the cemented carbide substrate, thereby increasing adhesion with the hard coating layer, and the tool can be used as a cutting tool having excellent cutting performance in terms of chipping resistance and wear resistance not only in the continuous high-speed cutting region but also in the intermittent cutting region.
Furthermore, by setting the residual stress value on the cutting edge rake face of the alloy substrate to -200 MPa or less, more preferably -850 MPa or less, it is possible to suppress the development of cracks during machining and to exhibit high chipping resistance.
On the other hand, as with the cutting face, the compressive residual stress increases on the flank, and if the absolute value of the difference between the residual stress value on the rake face and the residual stress value on the flank falls below 250 MPa, coating peeling is likely to occur starting from the tool flank during plastic deformation of the base material. Therefore, it is necessary that the absolute value of the difference between the residual stress value on the rake face and the residual stress value on the flank be greater than 250 MPa, and preferably greater than 500 MPa.
The residual stress can be imparted to the tool substrate by wet blasting or dry blasting as a pretreatment before the formation of a hard coating layer described later, or as a posttreatment after the formation of a hard coating layer described later.
When wet blasting or dry blasting is performed as a pretreatment before the formation of a hard coating layer, the film formation temperature can be set lower than usual to suppress relaxation of residual stress, thereby extending the life of the tool.
For example, the application of residual stress to the substrate by blasting is carried out by projecting a dry or wet blasting treatment onto the tool surface using media containing alumina, silicon nitride, or zirconia abrasive grains before or after the formation of a hard coating layer.
Blasting conditions:
Abrasive grains: 2 grains of ZrO, 3 grains of Al 2 O Abrasive grain shape: spherical and/or polygonal Abrasive grain size (grain size): 125-425 μm (spherical) / <125 μm (polygonal)
Blasting pressure: 0.1-0.4MPa
Blast projection at 70-90° from the rake face. Projection time: 4-16 seconds
2.硬質被覆層;
硬質被覆層は、下部層と上部層を含んでなり、その他の層として、上部層の上に最上層を設けることができる。
硬質被覆層の平均層厚は、0.6μm未満では、密着性、耐摩耗性および耐欠損性を長期の使用に亘って十分に確保することはできないため、0.6μm以上とする。一方、その平均層厚が、21.0μmを超えると、剥離あるいは欠損が生じ易くなることから、21.0μm以下とすることが望ましい。
2. Hard coating layer;
The hardcoat layer comprises a bottom layer and a top layer, and further layers may include a top layer disposed on the top layer.
The average thickness of the hard coating layer is set to 0.6 μm or more because adhesion, wear resistance, and chipping resistance cannot be sufficiently ensured over a long period of use if the average thickness is less than 0.6 μm. On the other hand, if the average thickness exceeds 21.0 μm, peeling or chipping is likely to occur, so it is preferable to set the average thickness to 21.0 μm or less.
(a)下部層;
<平均層厚>
下部層は、Tiの窒化物もしくは炭窒化物からなり、工具基体の直上に直接接して設けられる。下部層の平均層厚は、0.05μm未満では、十分な密着性が得られないため、0.05μm以上とする。他方、2.0μmを超えると得られた硬質被覆層の変形が顕著となり、切削加工の早期段階にて工具基体からの剥離が生じ易くなるため、2.0μm以下とした。
(a) bottom layer;
<Average layer thickness>
The lower layer is made of a Ti nitride or carbonitride and is provided directly on the tool substrate. The average thickness of the lower layer is set to 0.05 μm or more because sufficient adhesion cannot be obtained if the average thickness is less than 0.05 μm. On the other hand, if the average thickness exceeds 2.0 μm, the deformation of the obtained hard coating layer becomes significant and peeling from the tool substrate occurs easily in the early stage of cutting, so the average thickness is set to 2.0 μm or less.
<成分組成>
下部層の成分組成は、Tiの窒化物もしくは炭窒化物であれば、本発明の目的を阻害するものではないので、特に限定されないが、例えば、組成式TiCZN1-Zにて表現した場合、0≦Z≦0.05である範囲が好ましい。
すなわち、Zが、0.05より多く含まれると下部層の硬度が過度に上昇し、下部層と基材界面からの剥離が生じやすくなるためである。
<Component Composition>
The composition of the lower layer is not particularly limited as long as it is a nitride or carbonitride of Ti, since it does not impede the object of the present invention. For example, when expressed by the composition formula TiC Z N 1-Z , the range of 0≦Z≦0.05 is preferable.
That is, if Z is contained in an amount greater than 0.05, the hardness of the lower layer increases excessively, and peeling from the interface between the lower layer and the substrate becomes more likely to occur.
(b)上部層
<平均層厚>
上部層は、TiとAlの複合窒化物または複合炭窒化物からなり、前記下部層の直上に直接接して設けられる。上部層の平均層厚は、0.5μm未満では、皮膜全体における硬質層が不十分であり、耐摩耗性に劣るため、0.5μm以上とする。他方、平均層厚が、20.0μmを超えると、硬質層の層厚が、過多となり加工中に剥離や欠損が生じ易くなるため、20.0μm以下とした。
(b) Upper layer <average layer thickness>
The upper layer is made of a composite nitride or composite carbonitride of Ti and Al, and is provided directly on the lower layer. The average thickness of the upper layer is set to 0.5 μm or more because if it is less than 0.5 μm, the hard layer in the entire coating is insufficient and the wear resistance is poor. On the other hand, if the average thickness exceeds 20.0 μm, the hard layer becomes too thick and peeling or chipping occurs easily during processing, so the average thickness is set to 20.0 μm or less.
<成分組成>
上部層は、AlとTiの複合窒化物層(AlTiN層)、または、複合炭窒化物層(AlTiCN層)にて構成され、層全体に亘り、均質な耐摩耗性や靱性を示し、Ti成分によって、高温強度を向上させ、Al成分によって、高温硬さと耐熱性を補完するため、高温切削条件下においても、低摩耗係数が維持され、すぐれた耐熱性を発揮することができる。
前記Al、Tiの複合窒化物層または複合炭窒化物層を構成する複合窒化物または複合炭窒化物は、具体的には、組成式:(AlXTi1-X)(CYN1-Y)にて表すことができるが、Alの平均含有割合Xavg(原子比)の値が0.70未満になると、高温硬さが不足し耐摩耗性が低下するようになり、一方、Xavg(原子比)の値が0.90を超えると、相対的なTi含有割合の減少により、(AlXTi1-X)(CYN1-Y)層自体の高温強度が低下し、チッピング、欠損を発生しやすくなるため、Alの平均含有割合Xavg(原子比)の値は、最大硬さに近く、特に高い効果が得られる、0.70以上0.90以下の範囲に規定した。
また、C成分には、硬さを向上させる作用があるが、C成分の平均含有割合Yavg(原子比)が0.05以上では、高温強度が低下するため、C成分の平均含有割合Yavg(原子比)は、0≦Yavg<0.05と規定した。
<Component Composition>
The upper layer is composed of an Al and Ti composite nitride layer (AlTiN layer) or a composite carbonitride layer (AlTiCN layer), and exhibits uniform wear resistance and toughness throughout the entire layer. The Ti component improves high-temperature strength, while the Al component complements high-temperature hardness and heat resistance, so that a low wear coefficient is maintained even under high-temperature cutting conditions, and excellent heat resistance can be demonstrated.
Specifically, the composite nitride or composite carbonitride constituting the Al, Ti composite nitride layer or composite carbonitride layer can be expressed by the composition formula: (Al x Ti 1-X ) (C Y N 1-Y ). When the value of the average Al content X avg (atomic ratio) is less than 0.70, the high-temperature hardness is insufficient and the wear resistance decreases, while when the value of X avg (atomic ratio) exceeds 0.90, the high-temperature strength of the (Al x Ti 1-X ) (C Y N 1-Y ) layer itself decreases due to the relative decrease in the Ti content, making chipping and damage more likely to occur. Therefore, the value of the average Al content X avg (atomic ratio) is specified to be in the range of 0.70 to 0.90, which is close to the maximum hardness and provides a particularly high effect.
In addition, the C component has the effect of improving hardness, but if the average content Y avg (atomic ratio) of the C component is 0.05 or more, the high-temperature strength decreases, so the average content Y avg (atomic ratio) of the C component is specified to be 0≦Y avg <0.05.
<結晶配向>
上部層を構成するAl、Tiの複合窒化物、または、複合炭窒化物(AlXTi1-X)(CYN1-Y)は、NaCl型の面心立方構造(以下、単に「立方晶構造」という場合もある。)をとることによって硬さを向上させることができる。
すなわち、立方晶構造の(111)面に高配向性を有する、Al、Tiの複合窒化物層、または、複合炭窒化物層とすることにより、高硬度化することができる。
また、上部層における(200)面の回折線強度値I(200)に対する(111)面の回折線強度値I(111)の比I(111)/I(200)が、1.0以上であるとき、加工中の結晶粒の脱落が発生しにくくなるため、I(111)/I(200)≧1.0とすることが望ましい。
<Crystal Orientation>
The Al or Ti composite nitride or composite carbonitride (Al x Ti 1-x ) (C y N 1-y ) constituting the upper layer can improve hardness by adopting a NaCl type face-centered cubic structure (hereinafter sometimes simply referred to as a "cubic structure").
That is, by forming an Al-Ti composite nitride layer or composite carbonitride layer having a high orientation in the (111) plane of a cubic crystal structure, it is possible to increase the hardness.
In addition, when the ratio I(111)/I(200) of the diffraction intensity value I(200) of the (111) plane to the diffraction intensity value I(200) of the (200) plane in the upper layer is 1.0 or more, crystal grains are less likely to fall off during processing, so it is desirable to make I(111)/I(200)≧1.0.
(c)最上層
本発明においては、上部層である前記AlTi複合窒化物層または前記AlTi複合炭窒化物層上に、耐摩耗性向上やより広い加工用途へ対応する等の観点により、必要に応じ、最上層を設けることができる。
具体的には、α-Al2O3やκ-Al2O3などのAl酸化物からなる層や、Tiの窒化物層または炭窒化物層などを4.5μm以下の範囲内にて設けることができる。
(c) Top layer
In the present invention, a top layer can be provided on the AlTi composite nitride layer or the AlTi composite carbonitride layer, which is the upper layer, as necessary, from the viewpoint of improving wear resistance and adapting to a wider range of processing applications.
Specifically, a layer made of an Al oxide such as α-Al 2 O 3 or κ-Al 2 O 3 , or a Ti nitride layer or carbonitride layer can be provided within the range of 4.5 μm or less.
3.硬質被覆層の成膜方法;
(a)工具基体への残留応力の付与方法
工具基体への残留応力の付与は、ブラスト処理(ウェットブラストまたはドライブラスト)を後記硬質被覆層の成膜前の前処理、あるいは、硬質被覆層の成膜後の後処理として行うことができる。
なお、ブラスト処理を後記硬質被覆層の成膜前の前処理として行う場合には、成膜温度を従来の処理温度よりも低温とすることにより、硬質被覆層の引張応力を抑制できるため、切削工具の長寿命化を図ることができる。
3. Method for forming a hard coating layer;
(a) Method of imparting residual stress to tool substrate Residual stress can be imparted to the tool substrate by blasting (wet blasting or dry blasting) as a pretreatment before the formation of a hard coating layer described below, or as a posttreatment after the formation of a hard coating layer.
When the blast treatment is performed as a pretreatment before the formation of a hard coating layer described later, the film formation temperature can be set lower than the conventional treatment temperature to suppress the tensile stress of the hard coating layer, thereby making it possible to extend the life of the cutting tool.
(b)下部層の成膜方法
硬質被覆層の下部層は、Tiと窒素から成る化合物層、もしくは、Tiと窒素および炭素から成る化合物層からなるものであり、第1工程として、化学蒸着法を用い、成膜する化合物層ごとに反応ガス組成(ガス群A)、および、圧力、温度等の反応雰囲気を適正範囲に調整することにより、密着性にすぐれたTiN層またはTiCN層を形成することができる。
[成膜条件]
1)TiN層;
処理方法;CVDを用いた成膜
反応ガス組成(容量%)
TiCl4:3.0~6.0%、N2:25.0~35.0%、H2:残、
反応雰囲気圧力:4.0~12.0kPa、
反応雰囲気温度:780~900℃
2)TiCN層;
処理方法;CVDを用いた成膜
反応ガス組成(容量%)
TiCl4:3.0~6.0%、N2:15.0~30.0%、
CH4またはCH3CN:0.6~2.0%,H2:残、
反応雰囲気圧力:7.0~12.0kPa、
反応雰囲気温度:780~900℃
(b) Method for forming the lower layer The lower layer of the hard coating layer is a compound layer made of Ti and nitrogen, or a compound layer made of Ti, nitrogen and carbon. In the first step, a chemical vapor deposition method is used, and the reaction atmosphere, such as the reaction gas composition (gas group A) and the pressure and temperature, are adjusted within appropriate ranges for each compound layer to be formed, thereby forming a TiN layer or TiCN layer with excellent adhesion.
[Film formation conditions]
1) TiN layer;
Processing method: CVD film formation Reaction gas composition (volume %)
TiCl 4 : 3.0 to 6.0%, N 2 : 25.0 to 35.0%, H 2 : balance,
Reaction atmosphere pressure: 4.0 to 12.0 kPa,
Reaction atmosphere temperature: 780 to 900°C
2) TiCN layer;
Processing method: CVD film formation Reaction gas composition (volume %)
TiCl 4 : 3.0 to 6.0%, N 2 : 15.0 to 30.0%,
CH4 or CH3CN : 0.6-2.0%, H2 : balance,
Reaction atmosphere pressure: 7.0 to 12.0 kPa,
Reaction atmosphere temperature: 780 to 900°C
(c)上部層の成膜方法
次いで、本発明に係る上部層の成膜方法では、AlTi複合窒化物層またはAlTi複合炭窒化物層の成膜条件について、例えば、加熱温度の異なる二種類のNH3ガスを用い、高温のアンモニアガスにより核形成を抑制し、結晶化を促進させることにより、粗粒を得ることができる。
すなわち、本発明に係るAlTiN層またはAlTiCN層の成膜方法は、第2工程(初期核形成工程)、すなわち、AlTiN膜またはAlTiCN膜を形成するための初期核となるAlTiN結晶またはAlTiCN結晶を形成する工程と、第3工程(結晶成長工程)、すなわち、初期核である、前記AlTiN結晶またはAlTiCN結晶を成長させ、AlTiN膜またはAlTiCN膜を形成するための工程とを交互に繰り返すことにより、成膜を行うものである。
以下に、各成膜工程における成膜条件の概要を示すが、特に、第2工程における、微細なAlTiN結晶またはAlTiCN結晶の初期核の形成工程では、以下のガス群Bとガス群Cとを位相差を設けて交互に反応器に供給し成膜を行なう際に、高温(例えば、300~450℃)で予熱されたアンモニアガスを用いることにより、核形成を促進し、引き続いて実施する第3工程においては、以下のガス群Dとガス群Eとを位相差を設けて交互に反応器に供給し成膜を行なう際に、用いるアンモニアガスを低温(例えば、50~250℃)で予熱されたアンモニアガスに変更することにより、核形成を抑制し結晶化を促進し、所望の結晶を得ることができる。
なお、前記第2工程と前記第3工程との繰り返し数は、目標膜厚に合わせて調整する。
(c) Method for forming upper layer Next, in the method for forming the upper layer according to the present invention, with regard to the conditions for forming the AlTi composite nitride layer or the AlTi composite carbonitride layer, for example, two types of NH3 gas having different heating temperatures are used, and nucleation is suppressed by high-temperature ammonia gas, and crystallization is promoted, thereby making it possible to obtain coarse grains.
That is, the method for forming an AlTiN layer or an AlTiCN layer according to the present invention performs film formation by alternately repeating the second step (initial nucleus formation step), i.e., a step of forming AlTiN crystals or AlTiCN crystals that serve as initial nuclei for forming an AlTiN film or an AlTiCN film, and the third step (crystal growth step), i.e., a step of growing the AlTiN crystals or AlTiCN crystals that are the initial nuclei to form an AlTiN film or an AlTiCN film.
The film formation conditions in each film formation step are outlined below. In particular, in the second step, which is the step of forming the initial nuclei of fine AlTiN or AlTiCN crystals, the following gas group B and gas group C are alternately supplied to the reactor with a phase difference to form a film, and ammonia gas preheated at a high temperature (e.g., 300 to 450° C.) is used to promote nucleation. In the subsequent third step, the following gas group D and gas group E are alternately supplied to the reactor with a phase difference to form a film, and the ammonia gas used is changed to ammonia gas preheated at a low temperature (e.g., 50 to 250° C.), thereby suppressing nucleation and promoting crystallization, and making it possible to obtain the desired crystals.
The number of times the second and third steps are repeated is adjusted according to the target film thickness.
[成膜条件]
1)第2工程(初期核形成工程)
処理方法;CVD法を用いた成膜
反応ガス組成(容量%):
ガス群B:TiCl4:0.01~0.04%、AlCl3:0.01~0.05%、
N2:0~10%、C2H4:0~0.5%、H2:残
ガス群C:NH3:0.1~0.8%、H2:25.0~35.0%、
反応雰囲気圧力:4.0~5.0kPa、
反応雰囲気温度:700~850℃
供給周期:1~5秒、
1周期当たりのガス供給時間:0.15~0.25秒、
ガス群Bの供給とガス群Cの供給の位相差:0.10~0.20秒
ガス群Cの予熱温度:300~450℃
[Film formation conditions]
1) Second step (initial nucleation step)
Treatment method: Deposition using CVD method Reaction gas composition (volume %):
Gas group B: TiCl 4 : 0.01 to 0.04%, AlCl 3 : 0.01 to 0.05%,
N 2 : 0 to 10%, C 2 H 4 : 0 to 0.5%, H 2 : Remaining gas group C: NH 3 : 0.1 to 0.8%, H 2 : 25.0 to 35.0%,
Reaction atmosphere pressure: 4.0 to 5.0 kPa,
Reaction atmosphere temperature: 700 to 850°C
Supply cycle: 1-5 seconds,
Gas supply time per cycle: 0.15 to 0.25 seconds,
Phase difference between the supply of gas group B and the supply of gas group C: 0.10 to 0.20 seconds Preheat temperature of gas group C: 300 to 450° C.
2)第3工程(結晶成長工程)
処理方法;CVD法を用いた成膜
反応ガス組成(容量%):
ガス群D:TiCl4:0.01~0.04%、AlCl3:0.01~0.05%、
N2:0~10%、C2H4:0~0.5%、H2:残、
ガス群E:NH3:0.1~0.8%、H2:25.0~35.0%、
反応雰囲気圧力:4.0~5.0kPa、
反応雰囲気温度:700~850℃
供給周期:1~5秒、
1周期当たりのガス供給時間:0.15~0.25秒、
ガス群Dの供給とガス群Eの供給の位相差:0.10~0.20秒
ガス群Eの予熱温度:50~250℃
なお、第2工程および第3工程のそれぞれの反応ガス組成(容量%)における、各ガス成分の容量%は、第2工程においては、ガス群Bとガス群Cとの合計を100容量%として算出される各成分の容量%を示し、第3工程においては、ガス群Dとガス群Eとの合計を100容量%として算出される各成分の容量%を示す。
2) Third step (crystal growth step)
Treatment method: Deposition using CVD method Reaction gas composition (volume %):
Gas group D: TiCl 4 : 0.01 to 0.04%, AlCl 3 : 0.01 to 0.05%,
N 2 : 0-10%, C 2 H 4 : 0-0.5%, H 2 : balance,
Gas group E: NH3 : 0.1-0.8%, H2 : 25.0-35.0%,
Reaction atmosphere pressure: 4.0 to 5.0 kPa,
Reaction atmosphere temperature: 700 to 850°C
Supply cycle: 1-5 seconds,
Gas supply time per cycle: 0.15 to 0.25 seconds,
Phase difference between the supply of gas group D and the supply of gas group E: 0.10 to 0.20 seconds Preheat temperature of gas group E: 50 to 250° C.
In addition, the volume percentage of each gas component in the reaction gas composition (volume percentage) in each of the second and third steps indicates the volume percentage of each component calculated with the sum of gas group B and gas group C being 100 volume % in the second step, and indicates the volume percentage of each component calculated with the sum of gas group D and gas group E being 100 volume % in the third step.
本発明に係る表面被覆切削工具は、工具基体のすくい面および逃げ面のそれぞれに所定範囲の残留応力を付与することにより、切削加工中における硬質被覆層の耐摩耗性を維持し、耐剥離効果を高めるとともに、クラックの進展を抑制し、耐欠損性、耐チッピング性を発揮させ、工具寿命の向上を図るものである。
特に、旋削加工(ターニング)においては、すくい面から逃げ面への亀裂の進展により欠損が発生するため、すくい面における残留応力を-200MPa以下、すなわち、高圧縮残留応力下に置くことにより、顕著な亀裂の進展抑制効果が発揮される。
他方、すくい面と同様に逃げ面における圧縮残留応力が高まり、すくい面の残留応力値と逃げ面の残留応力値の差の絶対値が250MPa以下になると、母材の塑性変形時に皮膜剥離が発生しやすくなるため、すくい面における残留応力値に対する逃げ面における残留応力値の差の絶対値は、250MPaより大きい値とすることが必要である。
The surface-coated cutting tool of the present invention imparts a predetermined range of residual stress to each of the rake face and flank face of the tool base, thereby maintaining the wear resistance of the hard coating layer during cutting, enhancing the peeling resistance, suppressing the progression of cracks, and exhibiting resistance to fracture and chipping, thereby improving the tool life.
In particular, in turning, defects occur due to the progression of cracks from the cutting face to the flank, so a significant effect of suppressing the progression of cracks is achieved by keeping the residual stress on the cutting face at -200 MPa or less, i.e., under high compressive residual stress.
On the other hand, as with the cutting face, compressive residual stress increases on the flank, and if the absolute value of the difference between the residual stress value on the rake face and the residual stress value on the flank becomes 250 MPa or less, coating peeling becomes more likely to occur during plastic deformation of the base material. Therefore, it is necessary that the absolute value of the difference between the residual stress value on the rake face and the residual stress value on the flank be greater than 250 MPa.
つぎに、本発明の被覆工具を実施例により具体的に説明する。 Next, the coated tool of the present invention will be specifically explained using examples.
原料粉末として、いずれも1~3μmの平均粒径を有するWC粉末、TiC粉末、TaC粉末、NbC粉末、Cr3C2粉末およびCo粉末を用意し、これら原料粉末を、表1に示される配合組成に配合し、さらにワックスを加えてアセトン中で24時間ボールミル混合し、減圧乾燥した後、98MPaの圧力で所定形状の圧粉体にプレス成形し、この圧粉体を5Paの真空中、1370~1470℃の範囲内の所定の温度に1時間保持の条件で真空焼結し、焼結後、ISO規格DNMG150408のインサート形状をもったWC基超硬合金製の工具基体A~Cをそれぞれ作製した。 As raw material powders, WC powder, TiC powder, TaC powder, NbC powder, Cr3C2 powder and Co powder, all of which have an average particle size of 1 to 3 μm, were prepared. These raw material powders were mixed to the composition shown in Table 1, wax was added and the mixture was ball milled in acetone for 24 hours. The mixture was then dried under reduced pressure and pressed into a green compact of a predetermined shape at a pressure of 98 MPa. This green compact was then vacuum sintered in a vacuum of 5 Pa at a predetermined temperature within the range of 1370 to 1470°C for 1 hour. After sintering, tool bases A to C made of WC-based cemented carbide having an insert shape according to ISO standard DNMG150408 were each produced.
ついで、これらの工具基体A~Cのそれぞれを化学蒸着装置に装入し、以下の手順にて本発明被覆工具1~8をそれぞれ製造した。
なお、前記したとおり、本発明においては、工具基体A~Cに対し、硬質被覆層の成膜前の前処理、および、または、硬質被覆層の成膜後の後処理として、すくい面にブラスト処理が行われることにより、基体のすくい面および逃げ面に残留応力が付与されることを前提とする(表2を参照)。
次いで、第1工程として、化学蒸着装置内に工具基体A~Cのいずれかを配置し、表3に示される形成条件(形成記号)A~Hに記載された、温度条件および圧力条件の下、表3に示される成分組成を有するガス群A(TiCl4、N2、CH4、CH3CNおよび残部H2)により、一定時間成膜を行なう。
Next, each of these tool substrates A to C was placed in a chemical vapor deposition apparatus, and coated tools 1 to 8 of the present invention were produced in the following manner.
As described above, in the present invention, it is assumed that the cutting faces of the tool substrates A to C are subjected to a blast treatment as a pretreatment before the formation of a hard coating layer and/or a posttreatment after the formation of a hard coating layer, thereby imparting residual stress to the cutting face and flank face of the substrate (see Table 2).
Next, in the first step, one of the tool substrates A to C is placed in a chemical vapor deposition apparatus, and film formation is performed for a certain period of time under the temperature and pressure conditions described in the formation conditions (formation symbols) A to H shown in Table 3 using gas group A (TiCl 4 , N 2 , CH 4 , CH 3 CN, and the remainder H 2 ) having the component composition shown in Table 3.
本発明被覆工具1~5については、前記第1工程に引き続き、第2工程(上部層初期核形成工程)として、表4に示される形成条件(形成記号)A~Eに記載された、ガス群Bとガス群Cのガス組成、供給条件、および、ガス反応条件(圧力、温度、工程時間(秒))に基づき、一定時間成膜を行ない、第3工程(上部層結晶成長工程)として、表5に示される形成条件(形成記号)A~Eに記載された、ガス群Dとガス群Eのガス組成、供給条件、および、ガス反応条件(圧力、温度、工程時間(秒))に基づき、一定時間成膜を行ない、表7に示す本発明被覆工具1~5を得た。
また、本発明被覆工具6~8については、前記第1工程(下部層成膜工程)に引き続き、第2工程(上部層初期核形成工程)にて、前記表4に示される形成条件(形成記号)F~Hにて成膜後、第3工程(上部層結晶成長工程)にて、前記表5に示される形成条件(形成記号)F~Hにて成膜した後、さらに、最上層として、それぞれ、κ-Al2O3層、l-TiCN層またはα-Al2O3層を表6に示される形成条件にて成膜することにより、表7に示す本発明被覆工具6~8として得た。
For coated tools 1 to 5 of the present invention, following the first step, in the second step (upper layer initial nucleus formation step), film formation was carried out for a certain period of time based on the gas compositions, supply conditions, and gas reaction conditions (pressure, temperature, process time (seconds)) of gas group B and gas group C described in the formation conditions (formation symbols) A to E shown in Table 4, and in the third step (upper layer crystal growth step), film formation was carried out for a certain period of time based on the gas compositions, supply conditions, and gas reaction conditions (pressure, temperature, process time (seconds)) of gas group D and gas group E described in the formation conditions (formation symbols) A to E shown in Table 5, to obtain coated tools 1 to 5 of the present invention shown in Table 7.
In addition, for the coated tools 6 to 8 of the present invention, following the first process (lower layer deposition process), in the second process (upper layer initial nucleus formation process), deposition was performed under the formation conditions (formation symbols) F to H shown in Table 4, and in the third process (upper layer crystal growth process), deposition was performed under the formation conditions (formation symbols) F to H shown in Table 5.Furthermore, as the top layer, a κ-Al 2 O 3 layer, an l-TiCN layer or an α-Al 2 O 3 layer was deposited under the formation conditions shown in Table 6, thereby obtaining coated tools 6 to 8 of the present invention shown in Table 7.
また、比較の目的で、比較被覆工具1~5については、表3、表4および表5に示される形成条件(形成記号)a~eにて成膜を行ない、表8に示す比較被覆工具1~5を得た。
また、比較被覆工具6~8については、表3、表4および表5に示される形成条件(形成記号)f~hにて成膜を行なった後、最上層として、表6に示される形成条件(形成記号)にて、それぞれ、κ-Al2O3層、l-TiCN層またはα-Al2O3層を成膜することにより、表8に示す比較被覆工具6~8を得た。
For comparison purposes, comparative coated tools 1 to 5 were formed under the formation conditions (formation symbols) a to e shown in Tables 3, 4 and 5, and comparative coated tools 1 to 5 shown in Table 8 were obtained.
In addition, for comparative coated tools 6 to 8, coating was performed under the forming conditions (forming symbols) f to h shown in Tables 3, 4 and 5, and then a κ-Al 2 O 3 layer, an l-TiCN layer or an α-Al 2 O 3 layer was formed as the uppermost layer under the forming conditions (forming symbols) shown in Table 6, thereby obtaining comparative coated tools 6 to 8 shown in Table 8.
表7には、本発明被覆工具1~8の工具基体における逃げ面およびすくい面の残留応力値、硬質被覆層の目標平均全層厚、下部層の目標平均層厚および形成膜の種類、上部層の目標平均層厚、平均Al含有割合(Xavg)、平均C含有割合(Yavg)、結晶構造および回折線強度比(I(111)/I(200))、および、最上層の目標平均層厚および形成膜を示す。
同様に、表8には、比較被覆工具1~8について、工具基体における逃げ面およびすくい面の残留応力、硬質被覆層の目標平均全層厚、下部層の目標平均層厚および形成膜の種類、上部層の目標平均層厚、平均Al含有割合(Xavg)、平均C含有割合(Yavg)、結晶構造および回折線強度比(I(111)/I(200))、最上層の目標平均層厚を同様に示す。
Table 7 shows the residual stress values of the flank and rake faces of the tool substrates of the coated tools 1 to 8 of the present invention, the target average total thickness of the hard coating layer, the target average thickness and type of film formed of the lower layer, the target average thickness of the upper layer, the average Al content (Xavg), the average C content (Yavg), the crystal structure and the diffraction line intensity ratio (I(111)/I(200)), and the target average thickness and film formed of the uppermost layer.
Similarly, Table 8 shows, for comparative coated tools 1 to 8, the residual stresses on the flank and rake faces of the tool substrate, the target average total thickness of the hard coating layer, the target average thickness and type of coating of the lower layer, the target average thickness of the upper layer, the average Al content (Xavg), the average C content (Yavg), the crystal structure and the diffraction ray intensity ratio (I(111)/I(200)), and the target average thickness of the uppermost layer.
なお、ここで、本発明被覆工具1~8、および、比較被覆工具1~8の硬質被覆層の膜厚の測定は、走査型電子顕微鏡(倍率5000倍)を用いて行った。
すなわち、工具基体に垂直な方向の断面が露出するように研磨を施し、5000~20000倍の視野にて各層を観察し、観察視野内の5点の層厚を測った平均値を平均層厚として、本発明被覆工具1~8については、表7に、比較被覆工具1~8については、表8に示した。
また、上部層のAlTiNまたはAlTiCNのAlの平均含有割合Xavg(原子比)およびC成分の平均含有割合Yavg(原子比)については、電子線マイクロアナライザ(EPMA,Electron-Probe-Micro-Analyser)を用い、表面を研磨した試料において、電子線を試料表面側から照射し、得られた特性X線の解析結果の10点平均から求めた。
本発明被覆工具1~8については表7に、比較被覆工具1~8については表8に、XavgおよびYavgの値を示す。
The thickness of the hard coating layer of each of the coated tools 1 to 8 according to the present invention and the comparative coated tools 1 to 8 was measured using a scanning electron microscope (magnification: 5000 times).
That is, the tool was polished so that the cross section perpendicular to the substrate was exposed, and each layer was observed at a magnification of 5,000 to 20,000 times. The layer thicknesses were measured at five points within the observed field of view, and the average value was taken as the average layer thickness. The results are shown in Table 7 for coated tools 1 to 8 of the present invention, and in Table 8 for comparative coated tools 1 to 8.
The average Al content X avg (atomic ratio) and the average C content Y avg (atomic ratio) of the AlTiN or AlTiCN in the upper layer were determined by irradiating a polished surface of a sample with an electron beam from the surface side of the sample using an electron probe microanalyzer (EPMA, Electron-Probe-Micro-Analyser) and averaging the 10-point analysis results of the obtained characteristic X-rays.
The values of X avg and Y avg are shown in Table 7 for the inventive coated tools 1-8 and in Table 8 for the comparative coated tools 1-8.
また、本発明被覆工具および比較被覆工具の硬質被覆層の上部層のAlTiN層、AlTiCN層の結晶構造については、X線回折装置を用い、Cu-Kα線を線源として測定範囲(2θ):20~120度、スキャンステップ:0.013度、1ステップ辺り測定時間:0.48sec/stepの条件にて、例えば、工具基体表面に対して平行な硬質被覆層表面において、X線回折を行い、JCPDS00-038-1420立方晶TiNとJCPDS00-046-1200立方晶AlN、各々に示される同一結晶面の回折角度の間(例えば、36.66~38.53°、43.59~44.77°、61.81~65.18°)に現れるX線回折ピークにより、確認することができる。
また、測定された、(200)面、および、(111)面におけるX線回折ピーク強度の測定値I(hkl)より、(200)面の回折ピーク強度I(200)に対する(111)面の回折ピーク強度I(111)の比であるI(111)/I(200)を得ることができる。
また、工具基体の残留応力は、sin2Ψ法を用い、Cuκαを用いたX線回折装置を用いて測定する。測定には、WC(211)面の回折ピークを用い、ヤング率として534GPa、ポアソン比として0.22を使用して計算を実施する。
The crystal structures of the AlTiN layer and the AlTiCN layer in the upper layers of the hard coating layer of the coated tool of the present invention and the comparative coated tool can be confirmed by performing X-ray diffraction on the surface of the hard coating layer parallel to the tool substrate surface, for example, using an X-ray diffractometer with Cu-Kα radiation as the radiation source under conditions of a measurement range (2θ): 20 to 120 degrees, a scan step: 0.013 degrees, and a measurement time per step: 0.48 sec/step, and by observing X-ray diffraction peaks that appear between the diffraction angles (e.g., 36.66 to 38.53°, 43.59 to 44.77°, 61.81 to 65.18°) of the same crystal plane shown in JCPDS00-038-1420 cubic TiN and JCPDS00-046-1200 cubic AlN.
In addition, from the measured X-ray diffraction peak intensity values I(hkl) of the (200) and (111) planes, the ratio I(111)/I(200) of the diffraction peak intensity I(111) of the (111) plane to the diffraction peak intensity I(200) of the (200) plane can be obtained.
The residual stress of the tool substrate is measured by the sin 2 Ψ method using an X-ray diffraction apparatus using Cu κα. The measurement uses the diffraction peak of the WC (211) plane, and calculations are performed using 534 GPa as the Young's modulus and 0.22 as the Poisson's ratio.
つぎに、前記各種の被覆工具を工具鋼製カッターの先端部に固定治具にてクランプした状態にて、本発明被覆工具1~8、比較例被覆工具1~8について、以下に示す、インコネルの湿式断続切削試験を実施し、工具欠損にいたるまでの最大加工時間に関する評価を実施し、結果を表9に示した。 Next, with the various coated tools clamped to the tip of a tool steel cutter using a fixture, wet intermittent cutting tests of Inconel were carried out for coated tools 1 to 8 of the present invention and comparative coated tools 1 to 8, as shown below, and the maximum machining time until tool chipping was evaluated. The results are shown in Table 9.
≪切削条件≫
切削試験 :湿式旋削外径断続、
被削材 :インコネル718 スリット材
外径200mm、長さ400mm(溝入り丸棒材)
(幅4mmのスリットが50mmピッチにて等間隔に存在)
回転速度 :80min-1、
切削速度 :50m/sec.、
切り込み :0.5mm、
一刃送り量:0.6mm/rev、
切削時間 :刃先が欠損に至るまで加工
<Cutting conditions>
Cutting test: Wet turning, intermittent cutting
Work material: Inconel 718 slit material
Outer diameter 200 mm, length 400 mm (grooved round bar material)
(4mm wide slits are evenly spaced at 50mm intervals)
Rotation speed: 80 min -1 ,
Cutting speed: 50m/sec. ,
Cutting depth: 0.5 mm,
Feed per blade: 0.6 mm/rev.
Cutting time: Processing until the cutting edge is chipped
表9に示される切削加工試験結果からも明らかなように、本発明被覆工具は、長期に亘ってすぐれた耐欠損性および耐摩耗性を発揮するものである。
As is apparent from the cutting test results shown in Table 9, the coated tool of the present invention exhibits excellent chipping resistance and wear resistance over a long period of time.
前述のとおり、本発明の表面被覆切削工具は、通常の鋼種の連続切削加工や断続切削加工に加え、特に、ステンレス鋼や溶断表面が残存する鋼材、あるいは、ニッケル合金等の難削材の断続切削加工に用いた場合においても、すぐれた耐摩耗性に加え、耐欠損性、耐チッピング性を発揮するものであるから、切削装置の高性能化並びに切削加工の省力化および省エネ化、さらには、低コスト化を十分満足するものである。
As described above, the surface-coated cutting tool of the present invention exhibits excellent wear resistance, fracture resistance and chipping resistance not only when used in continuous cutting or intermittent cutting of ordinary steels, but also when used in intermittent cutting of difficult-to-cut materials such as stainless steel, steels with remaining fused surfaces, or nickel alloys, and therefore fully satisfies the needs for high performance cutting equipment, labor-saving and energy-saving cutting, and cost reduction.
Claims (3)
(a)前記硬質被覆層は、前記工具基体最表面に直接接してなる下部層と、該下部層に直接接してなる上部層との少なくとも二層を有し、前記硬質被覆層の全平均層厚は、0.6~21.0μmであり、
(b)前記下部層は、Tiの窒化物もしくは炭窒化物からなり、その平均層厚は、0.05~2.0μmであり、
(c)前記上部層は、AlとTiとの複合窒化物層または複合炭窒化物層であり、その平均層厚は、0.5~20.0μmであり、
組成式:(AlXTi1-X)(CYN1-Y)で表した場合、前記複合窒化物層または前記複合炭窒化物層のTiとAlとの合量に対してAlが占める平均含有割合Xavgおよび前記複合窒化物層または前記複合炭窒化物層のCとNの合量に対してCが占める平均含有割合Yavg(但し、Xavg、Yavg はいずれも原子比)が、それぞれ、0.70≦Xavg≦0.90、0≦Yavg<0.05を満足し、NaCl型の面心立方晶構造を有する複合窒化物層または複合炭窒化物層からなり、
(d)表面被覆工具の炭化タングステン基超硬合金の切れ刃逃げ面の残留応力をS1、切れ刃すくい面の残留応力S2としたとき、
α)S1>S2
β)S2≦-200MPa
γ)S1とS2の差の絶対値が250MPaより大きいこと
をそれぞれ満たすことを特徴とする表面被覆切削工具。 A surface-coated cutting tool having a hard coating layer on a surface of a tool substrate made of a tungsten carbide-based cemented carbide,
(a) the hard coating layer has at least two layers, namely a lower layer directly contacting the outermost surface of the tool substrate and an upper layer directly contacting the lower layer, and the total average thickness of the hard coating layer is 0.6 to 21.0 μm;
(b) the lower layer is made of a Ti nitride or carbonitride and has an average layer thickness of 0.05 to 2.0 μm;
(c) the upper layer is a composite nitride layer or a composite carbonitride layer of Al and Ti, and the average layer thickness is 0.5 to 20.0 μm;
When expressed by a composition formula: (Al X Ti 1-X ) (C Y N 1-Y ), an average content ratio X avg of Al to the total amount of Ti and Al in said composite nitride layer or said composite carbonitride layer and an average content ratio Y avg of C to the total amount of C and N in said composite nitride layer or said composite carbonitride layer (wherein X avg and Y avg are both atomic ratios) satisfy 0.70≦X avg ≦0.90 and 0≦Y avg <0.05, respectively, and the composite nitride layer or composite carbonitride layer has a NaCl-type face-centered cubic crystal structure,
(d) When the residual stress on the flank of the cutting edge of the tungsten carbide based cemented carbide of the surface-coated tool is S1 and the residual stress on the rake face of the cutting edge is S2,
α) S1>S2
β) S2≦-200MPa
γ) the absolute value of the difference between S1 and S2 is greater than 250 MPa.
1.0≦I(111)/I(200)の関係を満たすことを特徴とする請求項1に記載された表面被覆切削工具。 When X-ray diffraction was performed on the upper layer, the ratio of the diffraction intensity value of the cubic (111) plane to the diffraction intensity value of the cubic (200) plane, I(111)/I(200), was:
2. The surface-coated cutting tool according to claim 1, wherein the relationship: 1.0≦I(111)/I(200) is satisfied.
α)S1>S2
β)S2≦-850MPa
γ)S1とS2の差の絶対値が500MPaより大きいこと
をそれぞれ満たす請求項1または請求項2に記載された表面被覆切削工具。 When the residual stress on the cutting edge flank of the tungsten carbide based cemented carbide of the surface-coated tool is S1 and the residual stress on the cutting edge rake face is S2,
α) S1>S2
β) S2≦-850MPa
γ) the absolute value of the difference between S1 and S2 is greater than 500 MPa .
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