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JP6538191B2 - 計測装置、計測方法及びコンピュータプログラム - Google Patents

計測装置、計測方法及びコンピュータプログラム Download PDF

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Publication number
JP6538191B2
JP6538191B2 JP2017551490A JP2017551490A JP6538191B2 JP 6538191 B2 JP6538191 B2 JP 6538191B2 JP 2017551490 A JP2017551490 A JP 2017551490A JP 2017551490 A JP2017551490 A JP 2017551490A JP 6538191 B2 JP6538191 B2 JP 6538191B2
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Prior art keywords
terahertz wave
sample
angle
irradiation
refractive index
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JP2017551490A
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Japanese (ja)
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JPWO2017085863A1 (ja
Inventor
義行 奧田
義行 奧田
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Pioneer Corp
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Pioneer Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
    • G01N21/3586—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation by Terahertz time domain spectroscopy [THz-TDS]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Toxicology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP2017551490A 2015-11-20 2015-11-20 計測装置、計測方法及びコンピュータプログラム Active JP6538191B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2015/082691 WO2017085863A1 (fr) 2015-11-20 2015-11-20 Dispositif de mesure, procédé de mesure et programme informatique

Publications (2)

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JPWO2017085863A1 JPWO2017085863A1 (ja) 2018-09-06
JP6538191B2 true JP6538191B2 (ja) 2019-07-03

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JP2017551490A Active JP6538191B2 (ja) 2015-11-20 2015-11-20 計測装置、計測方法及びコンピュータプログラム

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JP (1) JP6538191B2 (fr)
WO (1) WO2017085863A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210051865A (ko) * 2019-10-31 2021-05-10 주식회사 마인즈아이 테라헤르츠파 분광기술 기반 계측시스템

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109188105B (zh) * 2018-10-19 2020-10-13 北京环境特性研究所 适用于太赫兹频段高反射材料介电参数测量装置及方法
CN109211843B (zh) * 2018-10-19 2021-03-16 北京环境特性研究所 一种太赫兹波反射测量系统入射角确定方法及装置
CN109239015B (zh) * 2018-10-19 2024-02-06 北京环境特性研究所 一种太赫兹波段反射弓形架装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6731380B2 (en) * 2001-06-18 2004-05-04 Applied Optics Center Of Delaware, Inc. Method and apparatus for simultaneous measurement of the refractive index and thickness of thin films
JP4978515B2 (ja) * 2008-03-04 2012-07-18 ソニー株式会社 プローブ装置及びテラヘルツ分光装置
WO2010106589A1 (fr) * 2009-03-18 2010-09-23 株式会社村田製作所 Instrument de mesure optique et procédé de mesure optique
JP5418916B2 (ja) * 2010-06-04 2014-02-19 日本電気株式会社 反射型イメージング装置
JP5300915B2 (ja) * 2011-05-12 2013-09-25 株式会社アドバンテスト 電磁波測定装置、測定方法、プログラム、記録媒体
JP2013181929A (ja) * 2012-03-04 2013-09-12 Canon Inc 測定装置及び方法、トモグラフィ装置及び方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210051865A (ko) * 2019-10-31 2021-05-10 주식회사 마인즈아이 테라헤르츠파 분광기술 기반 계측시스템
KR102285056B1 (ko) * 2019-10-31 2021-08-04 주식회사 마인즈아이 테라헤르츠파 분광기술 기반 계측시스템

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Publication number Publication date
WO2017085863A1 (fr) 2017-05-26
JPWO2017085863A1 (ja) 2018-09-06

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