JP6168325B2 - Heating device - Google Patents

Description

  The present invention relates to a heating device used for heat treatment of various plate-like members such as glass substrates, semiconductor lead frames, other metal plates, and synthetic resin plates, which are constituent members of liquid crystal display panels and plasma display panels.

  As a device for heat-treating a glass substrate which is a constituent member such as a liquid crystal display panel, a heated gas circulation type clean oven has been conventionally used (for example, see Patent Document 1). This clean oven accommodates an object to be heat treated such as a glass substrate in a thermostat and heat-treats the object to be heated using a heated gas circulated by a fan in the thermostat.

  However, in the case of a heated gas circulation type clean oven, it is easy to adopt a structure in which heated objects such as glass substrates are accommodated in multiple stages, so it is excellent in space efficiency, but it is possible to make the heating temperature distribution uniform. It is difficult, and the cleanliness is likely to deteriorate due to the stirring of the heated gas. When the object to be heated is relatively light, the object to be heated may move from a predetermined position by circulating convection of the heated gas.

  In order to solve such a problem, both sides of a heat sink having a heating element inside are coated with a thin layer of far infrared radiation ceramics, and far-infrared infrared radiation that emits far infrared rays from both sides by heating this heat sink. A large number of shelf heaters composed of panel heaters are arranged in multiple stages in the furnace body at regular intervals in the vertical direction, and a heating furnace has been developed in which each space formed between these shelf heaters is a drying chamber. (For example, refer to Patent Document 2).

  In the case of the heating furnace described in Patent Document 2, a large number of shelf heaters composed of double-sided heating type far-infrared panel heaters are arranged, and thus each space portion (drying chamber) formed between these shelf heaters. Is superior in that it can be heated efficiently.

  However, in this heating furnace, heat generated from a large number of shelf heaters arranged in the vertical direction tends to rise in the heating furnace and collect in a region near the top wall in the furnace. The temperature in the upper region is higher than the temperature in the lower region in the furnace, and it is extremely difficult to eliminate such a temperature difference between the upper region in the furnace and the lower region in the furnace.

  Therefore, the present applicant has proposed a heating device that is excellent in uniformity of temperature distribution and stability of cleanliness (see, for example, Patent Document 3). This heating device has a distance between a plurality of heating walls disposed opposite to each other in a space surrounded by a heat insulating material, heating means provided on the heating wall, and the heating wall. A plurality of heat transfer walls disposed across the heat transfer wall, a plurality of heat radiation members disposed in a shelf shape between the heat transfer walls, and a heat radiation member provided between the heat radiation members adjacent in the vertical direction. And a storage space for a heated object.

JP 2001-56141 A JP 2001-317872 A JP-A-2005-352306

  Although the heating device described in Patent Document 3 is excellent in uniformity of temperature distribution and stability of cleanliness, the size of an object to be heated that can be accommodated in the accommodation space is limited. In fact, it is difficult to accommodate the object to be heated in the accommodation space.

  That is, the size (width, thickness) of the object to be heated in the heating device described in Patent Document 3 is set to a plurality of heat transfer wall bodies arranged at a distance between the plurality of heating wall bodies. Since it is determined by the facing interval and the vertical groove width of the formed horizontal holding grooves, the object to be heated whose width direction size is less than or exceeding the facing interval, and the thickness is the vertical groove width. The object to be heated cannot be accommodated in the accommodation space.

  Therefore, when the size (width, thickness) of the object to be heated is changed, the arrangement interval of the plurality of heat transfer wall bodies is changed to adjust the opposing interval of the holding grooves, or the holding groove It is necessary to change the vertical groove width. For this reason, it is difficult to respond quickly to the size change of the object to be heated.

  Therefore, the problem to be solved by the present invention is to provide a heating device that is excellent in uniformity of temperature distribution and stability of cleanliness and can easily cope with at least the change in size in the width direction of an object to be heated. It is in.

  The heating apparatus according to the present invention includes a plurality of heating walls arranged opposite to each other at a distance, a heat generating unit provided on the heating wall, and a vertical region in a facing region of the plurality of heating walls. A plurality of heat radiating members arranged in a shelf shape at a distance, a space to be heated to be provided between the plurality of heat radiating members, and a heated object to be accommodated in the accommodation space are predetermined. Holding means capable of holding in a posture and changing a holding range of the object to be heated, and a plurality of supporting members on which the object to be heated can be placed as the holding means, and between the supporting members An expansion / contraction mechanism capable of changing a gap, and the support member is a left support bar member arranged in a state of horizontally penetrating two left and right regions separated in the width direction in the accommodation space, and It is a right support bar material, the expansion / contraction mechanism is Front side of the left side of the storage space, front part of the left side support bar material protruding from the back side, left front side column attached to the back side, left back side column, and front side of the right side of the storage space, The front portion of the right support bar member protruding from the back, the right front column attached to the back portion, the right back column, the left front column and the left back column, It is a moving mechanism that expands or contracts the distance between the right front side support column and the right back side support column.

  With such a configuration, the space for storing the object to be heated has a structure in which heating walls are arranged on the left and right sides and heat radiating members are arranged on the upper and lower sides. Heat is radiated from the heated left and right heating walls and heat radiated up and down from the heat radiating member that generates heat by heat conduction from these heating walls. Is evenly heated and has excellent uniformity of temperature distribution.

  The heating means is provided only in the heating wall, and each storage space is partitioned by the heating wall positioned on the left and right and the heat radiation member positioned on the top and bottom, Not only is the temperature distribution uniform, it does not cause heat accumulation and overheating in the upper space due to the rise of hot air. Further, since the heated gas is not stirred or circulated by the fan, the stability of the cleanliness is excellent, and the heated object is not moved by the gas flow.

  In addition, since the holding range of the object to be heated by the holding unit can be changed according to the width of the object to be heated, it is possible to easily cope with at least a change in the size in the width direction of the object to be heated.

  Here, as the holding means, it is desirable to provide a plurality of support members on which an object to be heated can be placed and an expansion / contraction mechanism capable of changing the interval between the support members. With such a configuration, the object to be heated can be held in a supported state by the support member, so that even when the thickness of the object to be heated is changed, it can be easily handled.

  Further, in the heating device of the present invention, the support member includes a left support bar member and a right support member disposed in a state of horizontally penetrating two left and right regions separated in the width direction in the accommodation space. And the expansion / contraction mechanism includes a left front support column and a left back support column respectively attached to the front and back portions of the left support bar member protruding from the left front and back surfaces of the accommodation space. And the front side of the right side of the housing space, the front part of the right support bar member protruding from the back side, the right front side column attached to the back side, the right back side column, and the left front side It is a moving mechanism that expands and contracts the space between the support column and the left back side support column, and the right front side support column and the right back side support column. With such a configuration, it is possible to change the interval between the support bars simply by expanding or reducing the interval between the plurality of support columns by the moving mechanism. It is possible to form an adjusting means having excellent properties.

  Furthermore, it is possible to provide an operation mechanism capable of changing the holding range of the holding means from outside the opposed region of the plurality of heating walls. With such a configuration, it becomes possible to change the holding area of the holding means from the outside of the accommodation space for the object to be heated, so that the operability is further improved.

  On the other hand, it is also possible to provide an exhaust path through which the gas in the storage space can be discharged and an air supply path through which the gas can be introduced into the storage space. With such a configuration, it becomes possible to replace the air in the accommodation space with an inert gas or a specific gas, so that the object to be heated is prevented from being oxidized by the inert gas, or a reaction with the specific gas is used. Thus, the object to be heated can be subjected to a surface treatment.

  According to the present invention, it is possible to provide a heating device that is excellent in uniformity of temperature distribution and stability of cleanliness, and can at least quickly respond to a change in the width-direction size of an object to be heated.

It is a front view which shows the heating apparatus which is embodiment of this invention. FIG. 2 is a partially omitted front view of the heating device shown in FIG. 1. It is a right view of the heating apparatus shown in FIG. It is sectional drawing in the AA line in FIG. It is sectional drawing in the BB line in FIG. It is a rear view of the heating apparatus shown in FIG.

  Hereinafter, based on FIGS. 1-6, the heating apparatus 100 which is embodiment of this invention is demonstrated. As shown in FIG. 1 to FIG. 6, the heating device 100 is a plurality of heating wall bodies 10 </ b> L and 10 </ b> R arranged to face each other at a distance, and heating means provided on the heating wall bodies 10 </ b> L and 10 </ b> R. A plurality of heat radiating members 12, a plurality of heat radiating members 12 arranged in a shelf-like manner at a distance in the vertical direction in opposing regions of the plurality of heating walls 10L, 10R, and a heat radiating member 12 adjacent in the vertical direction. The space to be heated 13 and the object to be heated 13 accommodated in the space 14 can be held in a substantially horizontal posture, and the holding range of the object to be heated 13 can be changed. Holding means 30.

  The upper and lower ends of the heating walls 10L and 10R are connected by a top plate 19 and a bottom plate 20, respectively, and leg members 21L, 21R, 22L and 22R are attached to the lower surfaces of the heating walls 10L and 10R, respectively. The lower ends of these leg members 21L, 21R, 22L, and 22R are fixed to the base 23. A plurality of through holes 24 are opened in the horizontal direction from the front side to the back side of the heating walls 10L and 10R, and the electric heaters 11 are removably inserted into the through holes 24, respectively.

  In the heating device 100, the heating walls 10L and 10R are formed of stainless steel, and the top plate 19, the bottom plate 20, the leg members 21L, 21R, 22L, and 22R, and the base 23 are the same as the heating walls 10L and 10R. The heat radiating member 12 is made of an aluminum plate having a black plated surface. However, since it is not limited to these materials, the heating walls 10L, 10R, the top plate 19, the bottom plate 20, the leg members 21L, 21R, 22L, 22R, the base 23 and the like are made of aluminum or an aluminum alloy (or radiant heat diffusion). In order to suppress this, it can also be made of a non-glossy surface-treated aluminum or aluminum alloy). Further, since the surface treatment of the heat radiating member 12 is not limited to black plating, a surface treatment that can suppress the radiant heat divergence, for example, a surface treatment that is not glossy can be employed.

  As the holding means 30, a plurality of support bar members 17L and 17R, which are support members on which the article to be heated 13 can be placed, and an expansion / contraction mechanism 40 capable of changing the interval between the support bar members 17L and 17R are provided. . The expansion / contraction mechanism 40 moves the plurality of support bars 15L, 15R, 16L, 16R, which hold the plurality of support bar members 17L, 17R in a substantially horizontal posture, and the interval between the support columns 15L, 15R and the support columns 16L, 16R. And a mechanism 50.

  The support bar members 17L and 17R are strip-shaped members, and are arranged such that the longitudinal direction thereof is parallel to the depth direction D and the width direction thereof is perpendicular. That is, the plurality of support bar members 17L are attached to the support columns 15L and 16L in a state of horizontally passing through the accommodation space 14 in the depth direction D, and similarly, the plurality of support bar members 17R are disposed in the accommodation space 14 in the depth direction. It is attached to the pillars 15L and 16R in a state of passing through D horizontally.

  Locking grooves 15Lt, 16Lt, 15Rt, which are opened in the depth direction D, are directly above the mounting portions of the support bars 17L in the columns 15L, 16L and directly above the mounting portions of the support bars 17R in the columns 15R, 16R, respectively. 16Rt is provided. Further, a plurality of locking grooves 10Lt and 10Rt are provided at the same height as the locking grooves 15Lt, 16Lt, 15Rt and 16Rt on the inner side surfaces (surfaces facing the accommodation space 14) of the heating walls 10L and 10R, respectively. Formed in the vertical direction D.

The moving mechanism 50 horizontally connects the main sliders 51L and 51R connecting the upper ends of the columns 15L and 16L, the upper ends of the columns 15R and 16R, and the female screw holes 51La and 51Ra provided in the main sliders 51L and 51R in the horizontal direction. A male screw shaft 52 that is rotatably disposed in a state of being threaded through and an operation handle 53 attached to one end of the male screw shaft 52 is provided. The lower ends of the support columns 15L and 16L and the lower ends of the support columns 15R and 16R are connected by driven sliders 54L and 54R, respectively, and the support shafts penetrate the through holes 54La and 54Ra formed in the driven sliders 54L and 54R in the horizontal direction. 55 is arranged. The support shaft 55 is disposed in parallel with the male screw shaft 52, and both ends of the support shaft 55 are locked to the leg members 21L and 21R, respectively. The driven sliders 54L and 54R are slidable along the longitudinal direction of the support shaft 55.

  When the operation handle 53 is rotated forward and backward about the axis 52c center of the male screw shaft 52, the main sliders 51L and 51R move away from each other along the direction of the axis 52c, and in conjunction with this, the struts 15L, The interval of 15R and the interval of the columns 16L and 16R are separated and approached. Accordingly, the intervals between the plurality of support bar members 17L and 17R are separated and approached, so that the holding range of the object to be heated 13 is expanded and contracted in the width direction W of the accommodation space 14.

  In addition, an exhaust path 26 that can discharge the gas in the storage space 14 and a supply path 27 that can introduce the gas into the storage space 14 to the back wall members 25 respectively disposed on the back side of the plurality of storage spaces 14. And are provided. In the heating device 100, the air supply path 27 is disposed below the exhaust path 26 in each back wall member 25, but the present invention is not limited to this, and therefore the upper and lower sides can be disposed upside down.

  When the heating device 100 is used, the operation handle 53 is rotated in accordance with the width of the object 13 to be heated, and the intervals between the columns 15L and 15R and the intervals between the columns 16L and 16R are adjusted. Can be placed on the support bars 17L and 17R, respectively, and a part of the left and right side edges can be accommodated in the locking grooves 15Lt and 16Lt and the locking grooves 15Rt and 16Rt, respectively. . Thereafter, the left and right edges of the object to be heated 13 are placed on the support bars 17L and 17R, respectively, and a part of the left and right side edges are respectively engaged with the locking grooves 15Lt and 16Lt and the locking grooves. When accommodated in 15Rt and 16Rt, the setting of the object to be heated 13 is completed, so that when the electric heater 11 is energized, heat treatment can be performed according to a predetermined program.

  Heating walls 10L and 10R are disposed on the left and right sides of the accommodation space 14 of the article 13 to be heated, and the heat radiating members 12 are disposed on the upper and lower sides. Are heated by the heat radiated from the heating walls 10L and 10R and the heat radiated from the heat radiating member 12 that generates heat by heat conduction from these heating walls. The inside of 14 is heated evenly, and the uniformity of the temperature distribution in the entire heating device 100 is also good.

  The electric heater 11 is provided only in the heating wall bodies 10L and 10R, and each storage space 14 is partitioned by the heating wall bodies 10L and 10R located on the left and right sides and the heat radiation member 12 located on the top and bottom. Therefore, the uniformity of the temperature distribution in each accommodation space 14 is also excellent, and the heat accumulation phenomenon and the overheating phenomenon in the upper space due to the rise of hot air do not occur. Further, since the heated gas is not stirred or circulated by the fan, the stability of the cleanliness is excellent, and the heated object is not moved by the gas flow.

  In addition, since the holding range in the width direction W of the article to be heated 13 by the support bar members 17L and 17R can be changed according to the lateral width of the article to be heated 13, it is necessary to change at least the width direction size of the article to be heated 13. It can be easily handled. When the thickness of the article to be heated 13 is excessive, the left and right edges are placed on the support bars 17L and 17R without being accommodated in the locking grooves 15Lt and 16Lt and the locking grooves 15Rt and 16Rt. It is also possible to perform the heat treatment only in the state.

  Also, a plurality of support bar members 17L, 17R are arranged in the accommodation space 14, and a plurality of support columns 15L, 15R, 16L, 16R for supporting these support bar members 17L, 17R in a substantially horizontal posture, and a support column 15L. , 15R and the support mechanism 16L, 16R is provided with a moving mechanism 50 that expands or contracts the structure, since the distance between the support bar members 17L, 17R can be changed simply by rotating the operation handle 53. Is simple and has excellent operability and stability. In addition, as shown in FIG. 2, when heat-treating the to-be-heated object 13a wider than the to-be-heated object 13, the space | interval of support | pillars 15L and 15R and the space | interval of support | pillars 16L and 16R are made into the state greatly extended, The left and right side edges of 13a can be accommodated in the locking grooves 10Lt and 10Rt of the heating walls 10L and 10R, respectively.

  Further, since the operation handle 53 is disposed outside the opposed region of the plurality of heating walls 10L, 10R, the holding region of the holding bar members 17L, 17R is changed from the outside of the storage space 14 of the article 13 to be heated. The operability is also good. As shown in FIG. 1, the heating device 100 can be used in a state of being accommodated in a casing 18 having heat insulation properties, but can also be used without the casing 18.

  On the other hand, in the heating apparatus 100, the air in the accommodation space 14 can be replaced with an inert gas or a specific gas by providing the exhaust passage 26 and the air supply passage 27 communicating with the inside of each accommodation space 14. Therefore, oxidation of the article to be heated 13 can be prevented by introducing an inert gas, or surface treatment can be performed on the article to be heated 13 using a reaction with the introduced specific gas.

  In addition, the heating apparatus 100 mentioned above illustrates the heating apparatus which concerns on this invention, and this invention is not limited to the heating apparatus 100. FIG.

  The heating device according to the present invention can be widely used in industrial fields in which various plate-like members such as glass substrates, semiconductor lead frames, other metal plates, and synthetic resin plates are heat-treated.

10L, 10R heating wall
10Lt, 10Rt, 15Lt, 15Rt, 16Lt, 16Rt Locking groove
11 Electric heater
12 Heat radiation member
13, 13a Object to be heated
14 accommodation space
15L, 15R, 16L, 16R Prop
17L, 17R Support bar material
18 Casing
19 Top plate
20 Bottom plate
21L, 21R, 22L, 22R Leg member
23 base
24, 54La, 54Ra Through hole
25 Back wall member
26 Exhaust path
27 Air supply route
30 Holding means
40 Scale mechanism
50 Movement mechanism
51L, 51R Main slider
51La, 51Ra Female threaded hole
52 Male threaded shaft
52c Axle 53 Operation handle
54L, 54R Followed slider
55 Spindle
D Depth direction
W width direction

Claims (2)

A plurality of heating walls arranged opposite to each other at a distance;
Heat generating means provided on the heating wall, and a metal made of metal that conducts heat from the heating wall, arranged in a shelf-like manner at a distance in the vertical direction in opposing regions of the plurality of heating walls A plurality of heat conducting members, and
The plurality of heating walls and the plurality of heat conducting members define a plurality of storage spaces for storing the objects to be heated in the vertical direction, and the top and bottom of each of the plurality of storage spaces are opposed to each other. Defined by the heat conducting member;
Each of the plurality of heating wall bodies facing each other has a support surface that extends directly in the depth direction of the storage space and is formed directly at a position corresponding to each other on each wall surface facing the storage space. ,
The support surface can support the object to be heated in a substantially horizontal posture by receiving the back surface of each side edge in the width direction of the plate-like object to be heated. It is formed so as to be in full contact with the back surface of each side edge portion of the object to be heated and to transfer the heat of the heating wall directly to the back surface of each side edge portion of the object to be heated,
The heating means are respectively provided in a plurality of holes formed from the front side to the back side of the plurality of heating walls and arranged in the vertical direction,
The plurality of support surfaces respectively formed on the plurality of heating walls and the plurality of holes provided with the heat generating means are disposed at different positions in the vertical direction.
A heating device characterized by that. The plurality of opposing heating walls each have a groove portion that is formed directly in a position corresponding to each of the wall surfaces on the side facing each of the accommodation spaces and extends in the depth direction of the accommodation space,
A portion of the groove defines the support surface;
The groove portion receives each side edge in the width direction of the object to be heated that is moved in the depth direction toward the accommodation space in a substantially horizontal posture, and is heated to be supported in the substantially horizontal posture in the accommodation space. It is formed to allow the object to be moved in the depth direction toward the outside of the accommodation space in a substantially horizontal posture ,
The groove is formed only between the opposing heat conductive members of the wall surfaces of the plurality of heating walls,
The heating apparatus according to claim 1 .

Images