JP6099390B2 - Microscope and control method of microscope - Google Patents

Description

  The present invention relates to a microscope, a control program for a microscope, a method, and an ultrasonic motorized stage.

  Conventionally, a microscope is often used for observing a fine structure such as a semiconductor or a biological sample. When observing these specimens with a microscope, the specimens are placed on the stage. At this time, in order to align the specimen to be observed under the microscope observation, a stage (XY stage) that can move in two directions orthogonal to each other in a plane is used.

  The XY stage mainly includes a manual type and an electric type, and an electromagnetic motor is generally used as an actuator for the electric type stage. In recent years, it has also been proposed to use an ultrasonic motor capable of highly accurate positioning as an actuator of an electric stage (see, for example, Patent Document 1).

  Patent Literature 1 discloses a rectangular parallelepiped linear drive type ultrasonic actuator as an example of an ultrasonic motor employed in an electric stage. The linear drive ultrasonic actuator described in Patent Document 1 has a pair of vibrators arranged in parallel to the long side direction (stage movement direction) of the actuator. The pair of vibrators is pressed against a sliding member made of ceramics or the like provided on the side surface of the stage by a spring or the like. Further, the linear drive type ultrasonic actuator is composed of, for example, a laminated piezoelectric body having four bending vibration electrodes and one longitudinal vibration electrode inside, and includes a bending vibration electrode and a longitudinal vibration electrode. It is driven by applying a sine wave signal whose phase is shifted by 90 °. The piezoelectric body in the vicinity of the bending vibration electrode has the polarization direction set to be opposite to the left and right of the long side direction of the actuator with the longitudinal vibration electrode as the center, and when a drive signal is applied to the bending vibration electrode The left and right piezoelectric bodies expand and contract in opposite directions and in a direction perpendicular to the long sides. As a result, when one of the pair of vibrators moves in a direction away from the stage, the other moves in a direction to be pressed against the stage. When a drive signal is applied to the longitudinal vibration electrode, the piezoelectric body near the longitudinal vibration electrode expands and contracts in the long side direction of the actuator. Bending vibration and longitudinal vibration are combined, and each of the pair of vibrators draws an elliptical orbit when viewed from the top, and moves so as to repeatedly approach and separate from the sliding member, moving the stage in a predetermined direction Let

  When the electric stage is not driven (when no voltage is applied), the pair of vibrators are pressed against the side surfaces of the stage, so the stage is stationary due to the frictional force between the pair of vibrators and the stage. A strong force is required to move it manually. When an instruction to move the stage is input, a bending signal excited by the bending vibration electrode is applied and the pair of vibrators vibrate in opposite directions, reducing the frictional force between the stage and the vibrator. Then, the longitudinal vibration expanding and contracting in the long side direction of the actuator excited by the longitudinal vibration electrode applies a force in the long side direction of the actuator to the stage and moves the stage in the long side direction of the actuator.

JP 2010-60695 A

  In the electric stage described above, when the stage is stopped, both the pair of vibrators are pressed against the side surface of the stage, and manually moving the stage largely in any direction is between the pair of vibrators. It is very difficult due to frictional force. Further, when a drive signal is applied in response to an instruction to move the stage, control to move at a predetermined speed in the direction in which the movement is instructed is performed, and it is difficult for the user to manually move the stage freely. Therefore, if you want to move the stage over a large range, such as when exchanging specimens placed on the stage, even if fine positioning is not necessary, it must be moved in the electric mode, which takes time. .

  The present invention has been made in view of the above, and provides a microscope, a microscope control program, a method, and an ultrasonic motorized stage capable of manually moving an ultrasonic motorized stage in a large range in an arbitrary direction. The purpose is to do.

In order to solve the above-described problems and achieve the object, a microscope according to the present invention is a microscope including a main body and an ultrasonic electric stage installed on the main body, and the ultrasonic electric stage includes the A base fixed to the main body, a moving part attached to the base so as to be movable electrically or manually, an ultrasonic motor having a vibrator attached to the base and vibrating in response to an applied signal; Driving means for applying a first signal for exciting vibration in a direction parallel to the moving direction of the moving unit and a second signal for exciting vibration in a direction orthogonal to the moving direction of the moving unit to the ultrasonic motor And detecting means for detecting position information of the moving unit, and when the moving unit can be moved manually, the first signal is stopped and only the second signal is applied to the ultrasonic motor. As said drive means Controls, based on the position information detected by the detection means, and control means for calculating a moving speed of the mobile unit, when the movable said moving part manually, moving speed is given to the control means has calculated And a warning information presenting means for presenting warning information when the speed is exceeded .

  In the microscope according to the present invention, in the above invention, the control unit controls the characteristic of the second signal applied to the ultrasonic motor by the driving unit based on the position information detected by the detection unit. Features.

  In the microscope according to the present invention, in the above invention, the control unit calculates a moving speed of the moving unit based on position information detected by the detecting unit, and based on the calculated moving speed, the driving unit The characteristic of the second signal applied to the ultrasonic motor is controlled.

A method for controlling a microscope according to the present invention includes a base, a moving unit attached to the base so as to be electrically or manually movable, and a vibrator attached to the base and vibrating in response to an applied signal. A method for controlling a microscope including an ultrasonic electric stage having a sonic motor, wherein an input step for receiving an instruction to electrically move the moving unit or an instruction to enable manual movement, and the input step , When an instruction to enable manual movement of the moving unit is input, the first signal that excites vibration in a direction parallel to the moving direction of the moving unit is stopped, and the direction orthogonal to the moving direction of the moving unit based only the second signal to excite the vibration of the driving step of applying to the ultrasonic motor, the detection step and the detected position information in said detecting step of detecting the positional information of the movable portion When a calculation step for calculating the moving speed of the moving unit and an instruction to manually move the moving unit are input, and the moving speed calculated in the calculating step exceeds a predetermined speed And a warning information presenting step for presenting warning information .

  According to the present invention, it is possible to provide a microscope, a microscope control program, a method, and an ultrasonic motorized stage capable of manually moving the ultrasonic motorized stage in an arbitrary direction within a large range.

FIG. 1 is a diagram schematically showing an overall configuration and an internal configuration of an inverted microscope according to Embodiment 1 of the present invention. FIG. 2 is a diagram showing an overall configuration of the electric stage according to the first embodiment. FIG. 3A is a schematic plan view of the ultrasonic actuator according to the first embodiment. 3B is a schematic cross-sectional view taken along a line AB in FIG. 3A. FIG. 4 is a conceptual diagram showing the configuration of the ultrasonic motor according to the first embodiment. FIG. 5 is a diagram illustrating an example of a drive signal applied from the drive unit to the ultrasonic motor in the electric movement mode according to the first embodiment. FIG. 6 is a schematic plan view for explaining bending vibration of the ultrasonic motor according to the first embodiment. FIG. 7 is a schematic plan view for explaining the longitudinal vibration of the ultrasonic motor according to the first embodiment. FIG. 8 is a conceptual diagram for explaining a manual movement mode of the ultrasonic motor according to the first embodiment. FIG. 9 is a diagram illustrating an example of a drive signal applied from the drive unit to the ultrasonic motor in the manual movement mode according to the first embodiment. FIG. 10 is a flowchart showing a control process of the electric stage by the control unit shown in FIG. FIG. 11 is a diagram showing an overall configuration of the electric stage according to the second embodiment. FIG. 12 is a flowchart showing a control process of the electric stage by the control unit shown in FIG. FIG. 13 is a flowchart showing the electric stage control process according to the third embodiment. FIG. 14 is a diagram illustrating an example of a drive signal according to the third embodiment. FIG. 15 is a schematic plan view for explaining bending vibration of the ultrasonic motor according to the third embodiment. FIG. 16 is a flowchart showing an electric stage control process according to the fourth embodiment. FIG. 17 is a diagram showing another example of the electric stage according to the embodiment of the present invention.

  In the following description, an inverted microscope using a linear drive type ultrasonic actuator (ultrasonic motor) will be described as a mode for carrying out the present invention (hereinafter referred to as “embodiment”). Moreover, this invention is not limited by this embodiment. Furthermore, the same code | symbol is attached | subjected to the same part in description of drawing. Furthermore, the drawings are schematic, and it should be noted that the relationship between the thickness and width of each member, the ratio of each member, and the like are different from the actual ones. Moreover, the part from which a mutual dimension and ratio differ also in between drawings.

(Embodiment 1)
FIG. 1 is a diagram schematically showing an overall configuration and an internal configuration of an inverted microscope according to Embodiment 1 of the present invention. The inverted microscope 201 shown in the figure includes an electric stage 100 on which the specimen Sp is placed, a main body 33 that supports the electric stage 100, and a specimen Sp that is positioned above the main body 33 and placed on the electric stage 100. A transmissive illumination unit 34 that irradiates the transmissive illumination, and a control device 150 a that controls the electric stage 100.

  An objective lens 36 is attached to the main body 33 close to the lower side of the electric stage 100. A reflection mirror 37 that reflects the light that has passed through the objective lens 36 and an imaging optical system 38 that forms an image of the light reflected by the reflection mirror 37 are provided inside the main body 33. On the optical path of the imaging optical system 38, an eyepiece lens 39 that collects the light imaged by the imaging optical system 38 is attached to the lens barrel 31 of the main body 33.

  The transmitted illumination unit 34 includes an arm 42 extending from the upper end of the transmitted illumination support column 41 in a direction orthogonal to the direction in which the transmitted illumination support column 41 extends, and a light source provided on the opposite side of the upper end of the transmitted illumination support column 41 from the side on which the arm 42 extends. 43, a lamp house 44 that is mounted near the upper end of the transmission illumination column 41 and accommodates the light source 43, and is located above the electric stage 100. The illumination light emitted from the light source 43 is collected and connected to the sample Sp. A condenser lens 45 for imaging, and a condenser unit 46 that is attached to a substantially central portion of the transmission illumination column 41 and holds the condenser lens 45. Further, inside the arm 42, a collector lens 47 that collects light emitted from the light source 43, a field stop 48 that can adjust the amount of light that has passed through the collector lens 47, and light that has passed through the field stop 48. And a reflecting mirror 49 that is bent in the direction of the optical axis N1 of the condenser lens 45 (a direction orthogonal to the incident direction).

  FIG. 2 is a diagram showing an overall configuration of the electric stage 100 according to the first embodiment of the present invention. In the drawing, the X direction (first direction) is an arbitrary direction in a plane parallel to the upper surface of the electric stage 100, and the Y direction (second direction) is X in a plane parallel to the upper surface of the electric stage 100. It is a direction orthogonal to the direction (first direction). In the first embodiment of the present invention, an electric movement mode for moving the electric stage 100 to an arbitrary position in the XY direction or stopping at an arbitrary position by electric driving, and an electric stage 100 to an arbitrary position in the XY direction manually. And a manual movement mode for movement.

  The electric stage 100 includes, for example, a moving part (stage) 3 composed of a first member (base part) 1, a second member (X direction moving part) 3x, and a third member (Y direction moving part) 3y, and an X direction moving part 3x. And guide rails 2x and 2y for guiding the movement of the Y-direction moving unit 3y, an ultrasonic actuator 10 (10x and 10y), an encoder (displacement sensor) 18 (18x and 18y), and a control device 150a. . Note that an opening 30 corresponding to the optical axis N1 (FIG. 1) is formed in the base 1, the X-direction moving unit 3x, and the Y-direction moving unit 3y. In addition, in this specification, when describing with the moving part 3, it points out any one or both of the 2nd member (X direction moving part) 3x and the 3rd member (Y direction moving part) 3y.

  The base 1 is fixed to the microscope 201 shown in FIG. 1, and, for example, a ball circulation type guide rail 2x is attached to the upper surface along the X direction. Further, on the base 1, an ultrasonic actuator 10x for moving the X direction moving unit 3x and a displacement amount of the X direction moving unit 3x (relative positional relationship between the base 1 and the X direction moving unit 3x) are detected. The encoder 18x is fixed.

  The X direction moving part 3x is mounted on the base 1 so as to be able to reciprocate in the X direction (first direction) along the guide rail 2x. On the side surface parallel to the X direction of the X direction moving part 3x, for example, a sliding member 5x made of a hard material such as ceramics is provided. A scale 17x is provided on the side surface of the X-direction moving unit 3x that is parallel to the X direction. In FIG. 2, the sliding member 5x and the scale 17x are provided on the same side surface, but one may be provided on the opposite side surface.

  The encoder 18x on the base 1 detects a displacement amount of the X-direction moving unit 3x by detecting a pattern such as a scale provided on the scale 17x, and determines the relative position of the X-direction moving unit 3x with respect to the base 1. The expressed coordinate position information is supplied to the detection unit 21 in the control device 150a. The ultrasonic actuator 10x is fixed to the base 1 so as to contact and press the sliding member 5x, and a drive signal (bending vibration signal, longitudinal vibration signal) supplied from the drive unit 14 in the control device 150a. ) To move the X-direction moving unit 3x relative to the base 1.

  Further, for example, a ball circulation type guide rail 2y is attached to the upper surface of the X direction moving portion 3x along the Y direction. Furthermore, on the X-direction moving unit 3x, the ultrasonic actuator 10y for moving the Y-direction moving unit 3y and the displacement amount of the Y-direction moving unit 3y (relative to the X-direction moving unit 3x and the Y-direction moving unit 3y). The encoder 18y for detecting the target positional relationship) is fixed.

  The Y-direction moving unit 3y is attached on the X-direction moving unit 3x so as to be able to reciprocate in the Y direction (second direction) along the guide rail 2y. A sliding member 5y made of a hard material such as ceramics is provided on a side surface parallel to the Y direction of the Y direction moving unit 3y. A scale 17y is provided on the side surface of the Y-direction moving unit 3y that is parallel to the Y direction. In FIG. 2, the sliding member 5y and the scale 17y are provided on the same side surface, but one may be provided on the opposite side surface.

  The encoder 18y provided on the X-direction moving unit 3x detects the displacement amount of the Y-direction moving unit 3y by detecting the pattern of the scale 17y, and the Y-direction moving unit 3y is relative to the X-direction moving unit 3x. Position information representing the target position is supplied to the detection unit 21 in the control device 150a. Further, the ultrasonic actuator 10y is fixed to the X-direction moving unit 3x so as to contact and press the sliding member 5y, and a driving signal (flexural vibration signal, etc.) supplied from the driving unit 14 in the control device 150a. The Y-direction moving unit 3y is moved relative to the X-direction moving unit 3x.

  As described above, the X direction moving unit 3x reciprocates in the first direction (X direction) with respect to the base 1, and the Y direction moving unit 3y reciprocates in the second direction (Y direction) with respect to the X direction moving unit 3x. It is mounted movably. Therefore, the Y-direction moving unit 3y can move to an arbitrary position on the XY plane with respect to the base 1.

  The control device 150a includes, for example, a control unit 13, a drive unit 14, a manual movement instruction unit 15, an electric movement instruction unit 16, and a detection unit 21, and performs drive control of the electric stage 100. The electric movement instruction unit 16 is an input means for inputting movement start and stop of the electric stage 100 and a moving direction, and the user operates the electric movement instruction unit 16 to electrically move the electric stage 100 to an arbitrary position. In addition to the moving direction, a moving speed or the like may be designated. The electric movement instruction unit 16 includes, for example, a direction instruction switch and a joystick. As long as the electric movement instruction | indication part 16 can instruct | indicate the moving direction of the movement part 3 at least, what kind of thing may be sufficient as it. For example, a software switch displayed on a touch panel or a display screen may be used. Alternatively, a plurality of movement instructions may be recorded in advance as sequence data, and the recorded sequence data may be reproduced to automatically perform movement instructions. In the present embodiment, the end of movement is determined by interruption of input of the movement instruction. However, a switch or the like for instructing the end of movement may be provided separately.

  When the movement instruction is input from the electric movement instruction unit 16 in the electric movement mode in which the control unit 13 can be moved in the X and Y directions by electricity, the control unit 13 outputs a drive signal corresponding to the movement instruction to the driving unit 14. To control. For example, when the electric stage 100 is moved in a predetermined direction, the drive unit 14 is controlled so as to supply a drive signal (flexural vibration signal, longitudinal vibration signal) to the ultrasonic actuator 10 (10x and 10y). . When the electric stage 100 is stationary, the drive unit 14 is controlled to stop the supply of drive signals (flexural vibration signal, longitudinal vibration signal). In the present embodiment, switching to the electric movement mode is automatically performed by detecting an operation of the electric movement instruction unit 16, but a switch for switching to the electric movement mode may be provided separately. .

  The manual movement instructing unit 15 is an input unit that is operated to shift to the manual movement mode in which the electric stage 100 can be manually moved. When switching to the manual movement mode is instructed by the manual movement instructing unit 15, the control unit 13 controls the driving unit 14 so as to supply only the bending vibration signal to the ultrasonic actuator 10 (10x and 10y). . The manual movement instruction unit 15 includes, for example, a changeover switch, a button, and the like. As long as the manual movement instruction | indication part 15 can instruct | indicate the transition to manual mode and the return from manual mode at least, what kind of thing may be sufficient as it. For example, a software switch displayed on a touch panel or a display screen may be used.

  The detection unit 21 reads position information from the encoder 18 (18x and 18y), and obtains a relative positional relationship between the base 1 and the X direction moving unit 3x, and a relative positional relationship between the X direction moving unit 3x and the Y direction moving unit 3y. Each is detected, and the position coordinates of the X direction moving unit 3x and the Y direction moving unit 3y are detected. Information on the detected position coordinates is sent to the control unit 13. The detection unit 21 can also detect the moving speed, acceleration, and the like of the X direction moving unit 3x and the Y direction moving unit 3y. Moreover, you may provide the pressure sensor which detects the pressure applied to the X direction moving part 3x and the Y direction moving part 3y.

  3A is a schematic plan view of the ultrasonic actuator 10, and FIG. 3B is a schematic partial cross-sectional view taken along the line AB of FIG. 3A. Since the moving unit 3x and the moving unit 3y, the sliding member 5x and the sliding member 5y, and the ultrasonic actuator 10x and the ultrasonic actuator 10y have the same configuration, the moving unit 3, the sliding member 5 and the ultrasonic actuator are used here. 10 will be described.

  The ultrasonic actuator 10 is attached to the base 1 (or the moving unit 3x) of FIG. 2 and includes an ultrasonic motor 101 and a holding mechanism 102. The ultrasonic motor 101 is provided with vibrators 101 a and 101 b on the side surface facing the moving unit 3. The vibrators 101 a and 101 b are in contact with and pressed by the sliding member 5 provided on the side surface of the moving unit 3. The vibrators 101a and 101b are made of, for example, a material containing a resin having a relatively small friction coefficient including reinforcing fibers as a base material.

  The holding mechanism 102 is fixed to the base 1 (or the X direction moving portion 3x) by screws through the fixing screw holes 19a and 19b, and holds the ultrasonic motor 101 against the base 1 (or the X direction moving portion 3x). It is a member. The holding mechanism 102 is formed of a metal such as aluminum, for example, and includes a notch hole portion 22, a thin plate spring portion 104, and a coil spring 103. A thick portion 104 a is formed at the center of the thin plate spring portion 104, and the thick portion 104 a is bonded to the ultrasonic motor 101.

  A screw hole is formed in the center of the holding mechanism 102, and a coil spring 103 is inserted into the screw hole as shown in FIG. 3B. When the screw 20 is screwed into the screw hole with the coil spring 103 inserted, the coil spring 103 presses the thick portion 104a against the ultrasonic motor 101 with a pressing force corresponding to the screwing amount. A damping material 24 is inserted inside the coil spring 103. The damping material 24 is made of rubber, for example, and serves to suppress sound generated by resonance of the spring 103 when the vibrators 101a and 101b are vibrated.

  FIG. 4 is a conceptual diagram showing the configuration of the ultrasonic motor 101 according to the first embodiment of the present invention. The ultrasonic motor 101 according to the first embodiment of the present invention is composed of a rectangular parallelepiped laminated piezoelectric body, and has four bending vibration electrodes 105a to 105d and one longitudinal vibration electrode 105e therein. Vibrators 101 a and 101 b are provided on the side surface of the ultrasonic motor 101 facing the sliding member 5, and the vibrators 101 a and 101 b are in contact with the sliding member 5.

  As shown in FIG. 4, two of the four bending vibration electrodes 105a to 105d are arranged two by two along the longitudinal direction of the ultrasonic motor 101 (the moving direction of the moving unit 3) with the longitudinal vibration electrode 105e interposed therebetween. Arranged in a row. A bending vibration signal is applied from the drive unit 14 to the bending vibration electrodes 105a to 105d. A longitudinal vibration signal is applied from the drive unit 14 to the longitudinal vibration electrode 105e.

  In FIG. 4, the piezoelectric body near the electrodes of the bending vibration electrode 105a (electrode far from the sliding member 5) and 105c (electrode close to the sliding member 5) arranged on the left side of the longitudinal vibration electrode 105e, and the longitudinal vibration electrode The direction of polarization is set opposite to that of the piezoelectric body in the vicinity of the electrodes for bending vibration 105b (electrode far from the sliding member 5) and 105d (electrode close to the sliding member 5) disposed on the right side of the electrode 105e. When a positive voltage and a negative voltage are applied to the bending vibration electrodes 105a and 105c disposed on the left side of the longitudinal vibration electrode 105e, respectively, the bending vibration electrodes 105b and 105d disposed on the right side of the longitudinal vibration electrode 105e are applied. Are configured to be applied with a negative voltage and a positive voltage, respectively.

  FIG. 5 is a diagram illustrating an example of a drive signal applied from the drive unit 14 to the ultrasonic motor 101 in the electric movement mode according to the first embodiment of the present invention. The longitudinal vibration signal (first signal) and the bending vibration signal (second signal) are high-frequency sine wave signals as shown in FIG. 5, for example, and the longitudinal vibration signal and the bending vibration signal have a phase of 90. ° Different. In the electric movement mode, both the longitudinal vibration signal and the bending vibration signal are applied to the ultrasonic motor 101.

  FIG. 6 is a schematic plan view for explaining bending vibration of the ultrasonic motor 101 according to the first embodiment of the present invention. FIG. 7 is a schematic plan view for explaining the longitudinal vibration of the ultrasonic motor 101 according to the first embodiment of the present invention.

  While a positive voltage is applied to the flexural vibration electrodes 105a to 105d and the longitudinal vibration electrode 105e, the piezoelectric body of the electrode portion (the electrodes 105a, 105d, and 105e) with a “+” sign is deformed so as to expand. The piezoelectric body of the electrode portion (electrodes 105b and 105c) indicated by "" deforms so as to shrink. On the other hand, while a minus voltage is applied to the bending vibration electrodes 105a to 105d and the longitudinal vibration electrode 105e, the piezoelectric body of the electrode portions (+) sign (electrodes 105a, 105d, 105e) is deformed so as to contract. The piezoelectric body of the electrode part (-electrodes 105b and 105c) indicated by − is deformed so as to expand. Since all the vibration signals according to the present embodiment are high-frequency sine wave signals, these operations are repeated.

  Therefore, when a bending vibration signal shown in FIG. 5 is applied to the bending electrodes 105a to 105d, bending deformation vibration is excited as schematically shown in FIG. Specifically, when the vibrator 101a moves away from the moving unit 3 (sliding member 5), the vibrator 101b moves in a direction pressed against the moving unit 3 (sliding member 5), and then the vibrator 101b. Moves in a direction away from the moving part 3 (sliding member 5), the vibrator 101a repeats the movement of moving in the direction pressed against the moving part 3 (sliding member 5). When the longitudinal vibration signal shown in FIG. 5 is applied to the longitudinal vibration electrode 105e, the longitudinal vibration in which the ultrasonic motor 101 expands and contracts in the long side direction is excited as shown in FIG.

  As described above, when the phases of the two types of vibrations are simultaneously shifted by 90 °, the bending vibration shown in FIG. 6 and the longitudinal vibration shown in FIG. 7 are combined, and the vibrators 101a and 101b of the ultrasonic motor 101 are shown in FIG. Vibrates so as to draw a locus indicated by a dashed ellipse. That is, the vibrators 101a and 101b draw the same elliptical trajectory, and the displacement at the same time is shifted by half a circle, and are displaced so as to alternately approach and separate from the sliding member 5. In FIG. 4, the positions of the ellipse arrows schematically indicate that the displacements of the transducers 101 a and 101 b at the same time are shifted by half a circle on the same elliptical orbit.

  In addition, the bending force shown in FIG. 6 causes the vibrators 101a and 101b to reduce the frictional force generated when contacting the sliding member 5. Further, by applying the longitudinal vibration signal shown in FIG. 5 to the longitudinal vibration electrode 105e, as shown in FIG. 7, the ultrasonic motor 101 causes expansion and contraction along the longitudinal direction. This stretching motion and bending motion are combined to move the moving unit (stage) 3.

  In addition, after the positioning to the target position is completed, in order to place the moving unit 3 in a stopped (stationary) state, application of voltage (drive signal) to the ultrasonic motor 101 is stopped. By stopping the voltage application, the vibrators 101a and 101b of the ultrasonic motor 101 press the sliding member 5 with a constant pressure, and the moving unit 3 is stopped (stationary).

  FIG. 8 is a conceptual diagram for explaining the manual movement mode of the ultrasonic motor 101 according to the first embodiment of the present invention. FIG. 9 is a diagram illustrating an example of a drive signal applied from the drive unit 14 to the ultrasonic motor 101 in the manual movement mode according to the first embodiment of the present invention.

  In the manual movement mode, as shown in FIG. 8, the application of the longitudinal vibration signal to the longitudinal vibration electrode 105e is stopped, and only the application of the bending vibration signal to the bending electrodes 105a to 105d is executed. By doing so, the ultrasonic motor 101 is excited by the bending vibration shown in FIG. Accordingly, since the longitudinal vibration shown in FIG. 7 is not synthesized, the vibrators 101a and 101b of the ultrasonic motor 101 alternately approach and separate from the sliding member 5 as indicated by broken arrows in FIG. Displace as follows.

  In this case, since no voltage is applied to the longitudinal vibration electrode 105e, the longitudinal vibration shown in FIG. 7 does not occur, and only the bending vibration shown in FIG. 6 is excited. Since the bending vibration induces a force in the direction in which the vibrators 101a and 101b repel (separate) the sliding member 5, the sliding resistance becomes light. For this reason, in the manual movement mode, the sliding resistance is reduced, and the user can move the moving unit 3 by pushing it by hand.

  FIG. 10 is a flowchart showing a control process of electric stage 100 by control unit 13 shown in FIG. This control process is started, for example, when the power of the microscope 201 is turned on, and is ended when the power is turned off. Note that the initial state is the electric movement mode, no voltage is applied to the ultrasonic motor 101, and the moving unit 3 (the X direction moving unit 3x and the Y direction moving unit 3y) of the electric stage 100 is stopped. Shall.

  In step S101, the control unit 13 (the control device 150a) determines whether or not an electric movement instruction is input to the moving unit 3 (the X direction moving unit 3x and the Y direction moving unit 3y) of the electric stage 100. The electric movement instruction is, for example, an instruction of the moving direction of the moving unit 3 input by the user using the electric movement instructing unit 16 of FIG. When the control unit 13 determines that an electric movement instruction is input (step S101: Yes), the process proceeds to step S102, and when it is determined that an electric movement instruction is not input (step S101: No), the step is performed. The process proceeds to S104.

  In step S102, in accordance with the content (movement direction) of the electric movement instruction input in step S101, the control unit 13 applies a longitudinal vibration signal to the longitudinal vibration electrode 105e and sends a bending vibration signal to the bending electrodes 105a to 105d. The drive part 14 is controlled to apply. As a result, a bending vibration signal and a longitudinal vibration signal as shown in FIG. 5 are oscillated from the drive unit 14 to the bending electrodes 105a to 105d and the longitudinal vibration electrode 105e, and the bending vibration shown in FIG. 6 and the longitudinal vibration shown in FIG. Is excited to cause the vibrators 101a and 101b to generate an elliptical motion as shown in FIG. 4 and to move the moving unit 3 in an arbitrary direction.

  In step S <b> 103, the control unit 13 determines whether or not a stop (still) instruction for the moving unit 3 has been input. The stop instruction is performed, for example, by interrupting the input of the electric movement instruction by the electric movement instruction unit 16 of the user. That is, in the present embodiment, the moving unit 3 is moved in the specific direction while the user is instructing movement in a specific direction, and stops when the movement instruction is interrupted. Note that the method for inputting the stop instruction is not limited to this, and a switch dedicated to the stop instruction for movement may be provided. When the control unit 13 determines that the stop instruction is input (step S103: Yes), the process proceeds to step S107. When the control unit 13 determines that the stop instruction is not input (step S103: No), the process proceeds to step S102. Return.

  In step S107, the control unit 13 controls the drive unit 14 to stop both the application of the longitudinal vibration signal to the longitudinal vibration electrode 105e and the application of the bending vibration signal to the bending electrodes 105a to 105d. Thereby, both the longitudinal vibration and the bending vibration are stopped, and the vibrators 101 a and 101 b are pressed against the sliding member 5. When the bending vibration stops, the amount of sliding force increases and positioning is completed.

  In step S108, the control unit 13 determines whether or not an observation end instruction (control process end instruction) is input. The observation end instruction is input, for example, by turning off the main power supply of the microscope 201. If the control unit 13 determines that an end instruction has been input (step S108: Yes), the control process ends. If the control unit 13 determines that no termination instruction has been input (step S108: No), the process returns to step S101, and the subsequent processing is repeated.

  In step S <b> 104, the control unit 13 determines whether or not a manual movement instruction (manual movement mode start instruction) is input to the moving unit 3 (X direction moving unit 3 x and Y direction moving unit 3 y) of the electric stage 100. The manual movement instruction is input by, for example, the user operating the manual movement instruction unit 15 in FIG. If the control unit 13 determines that a manual movement instruction has been input (step S104: Yes), the process proceeds to step S105. If it is determined that a manual movement instruction has not been input (step S104: No), the process proceeds to step S105. The process proceeds to S107.

  In step S105, the control unit 13 stops the application of the longitudinal vibration signal to the longitudinal vibration electrode 105e and controls the driving unit 14 to apply the bending vibration signal to the bending electrodes 105a to 105d. As a result, a bending vibration signal as shown in FIG. 8 is oscillated from the drive unit 14, and only the bending vibration shown in FIG. 6 is excited without exciting the longitudinal vibration. Since bending vibration induces a force in the direction in which the vibrators 101a and 101b repel the sliding member 5, the sliding resistance is reduced. For this reason, when a voltage is applied only to the bending electrodes 105 a to 105 d of the ultrasonic actuator 10, the sliding resistance is reduced, and the user can move the moving unit 3 by lightly pushing it.

  In step S106, the control unit 13 determines whether or not an instruction to end manual movement (end of manual movement mode) is input. The end instruction is input, for example, when the user operates the manual movement instruction unit 15 in FIG. 2 again in the manual movement mode. When the control unit 13 determines that an end instruction is input (step S106: Yes), the process proceeds to step S107. When it is determined that no manual movement instruction is input (step S106: No), the process proceeds to step S105. Returning to step S105, the process of step S105 is repeated.

  It should be noted that the detection unit 21 gives position coordinate information to the control unit 13 every predetermined time, including when in the manual movement mode during the processing of steps S101 to S108. Therefore, since the coordinate position of the moving unit 3 is not lost, it is possible to smoothly switch between the manual movement mode and the electric movement mode.

  As described above, according to the first embodiment of the present invention, when in the manual movement mode, the application of the longitudinal vibration signal to the longitudinal vibration electrode 105e is stopped and the bending vibration signal is applied to the bending electrodes 105a to 105d. Therefore, when the frictional force between the vibrators 101a and 101b and the moving unit 3 is reduced and it is desired to move a large distance such as when exchanging the specimen, the moving unit 3 can be directly moved by hand. Therefore, the time required for sample exchange can be shortened.

(Embodiment 2)
FIG. 11 is a diagram showing an overall configuration of the electric stage 100 according to the second embodiment of the present invention. In the description of the electric stage according to the second embodiment, the same components as those of the electric stage according to the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the second embodiment, the electric stage 100 includes an electric movement mode for electrically moving or stationary the electric stage 100 in the XY directions and a manual movement mode for manually moving the electric stage 100 in the XY directions. . When the electric stage 100 is set to the manual mode and the moving speed of the electric stage 100 exceeds a predetermined speed, the warning information presenting unit 23 presents warning information to the user. As a result, it is possible to prevent the detection of position coordinates from occurring due to the impossible detection.

  In the second embodiment, in addition to the configuration of the control device 150a of the first embodiment, a warning information presenting unit 23 is provided as the control device 150b. The warning information presentation unit 23 includes at least one of a sound system for emitting a warning sound, a display device for performing warning display, and the like. When a display device for displaying a warning is used, the display device is arranged on or near the moving unit 3 of the electric stage 100 so that the user can easily move the moving unit 3 manually. It is preferable to be able to recognize the warning.

  In the second embodiment, the control unit 13 converts the position coordinate information from the detection unit 21 into speed information, and the moving speed of the moving unit 3 indicated by the converted speed information exceeds a threshold value (predetermined speed). The warning information presenting unit 23 is controlled to present warning information (pronunciation of warning sound, warning display). The presentation of the warning information is not limited to the case where the moving speed of the moving unit 3 exceeds a predetermined speed, and may be performed, for example, when the acceleration related to the movement of the moving unit 3 exceeds a predetermined value. In addition, a warning may be issued when the position of the moving unit 3 is out of a predetermined range, or when the moving distance exceeds a predetermined distance. Further, the pressure on the moving unit 3 may be detected, and a warning may be issued when the detected pressure is a predetermined value or more.

  FIG. 12 is a flowchart showing a control process of electric stage 100 by control unit 13 shown in FIG. The processes in steps S201 to S205 and steps S208 to S210 are the same as the processes in steps S101 to S105 and steps S106 to S108 in FIG. Only the difference from the control processing according to the first embodiment will be described.

  In step S206, the control unit 13 determines whether the moving speed of the moving unit 3 has exceeded a predetermined speed. The moving speed of the moving unit 3 is obtained by, for example, converting the coordinate position information of the moving unit 3 sent from the detecting unit 21 every predetermined time into speed information in the control unit 13 and expressing the moving unit 3 by the converted speed information. It is determined whether the moving speed of 3 exceeds a predetermined speed. When the control unit 13 determines that the speed exceeds the predetermined speed (step S206: Yes), the process proceeds to step S207, and when it is determined that the speed is equal to or lower than the predetermined speed (step S206: No), the process proceeds to step S208. Here, the predetermined speed is, for example, a speed at which the encoder 18 in FIG. 2 does not cause a count error (readable speed).

  In step S207, the control unit 13 controls the warning information presentation unit 23 to present the warning information. The warning information is presented, for example, when the warning information presentation unit 23 emits a warning sound or displays a warning display. Thereafter, the process proceeds to step S208.

  As described above, according to the second embodiment of the present invention, in addition to the effects of the first embodiment, when the moving speed of the moving unit 3 exceeds a predetermined speed, warning information is presented. It is possible to prevent an error caused by a count error or the like.

(Embodiment 3)
The overall configuration of the electric stage 100 according to the third embodiment is the same as the configuration shown in FIG. 2 or FIG. In the third embodiment, the electric stage 100 includes an electric movement mode for electrically moving the electric stage 100 in the XY directions or a stationary state, and a manual movement mode for manually moving the electric stage 100 in the XY directions. In the manual mode, when the moving speed of the electric stage 100 exceeds a predetermined speed, the amount of sliding force is changed by controlling the characteristic (for example, amplitude) of the bending vibration.

  FIG. 13 is a flowchart showing a control process of electric stage 100 according to the third embodiment. Since the processing of step S301 to step S305 and step S308 to step S310 is the same as the processing of step S101 to step S105 and step S106 to step S108 of FIG. Only the difference from the control processing according to the first embodiment will be described.

  In step S306, the control unit 13 determines whether the moving speed of the moving unit 3 has exceeded a predetermined speed. The moving speed of the moving unit 3 is obtained by, for example, converting the coordinate position information of the moving unit 3 sent from the detecting unit 21 every predetermined time into speed information in the control unit 13 and expressing the moving unit 3 by the converted speed information. It is determined whether the moving speed of 3 exceeds a predetermined speed. When the control unit 13 determines that the speed exceeds the predetermined speed (step S306: Yes), the process proceeds to step S307, and when it is determined that the speed is equal to or lower than the predetermined speed (step S306: No), the process proceeds to step S308. Here, the predetermined speed is, for example, a speed at which the encoder 18 in FIG. 2 does not cause a count error (readable speed).

  In step S307, the control unit 13 controls the drive unit 14 to change the characteristics of the bending vibration signal applied to the bending electrodes 105a to 105d. For example, as shown in FIG. 14, the amplitude of the bending vibration signal is switched from a large one to a small one. Thereby, as shown in FIG. 15, the amplitude of the bending vibration of the vibrators 101a and 101b can be reduced, and the amount of sliding force can be changed heavily. Thereafter, the process proceeds to step S308.

  The amplitude of the bending vibration may be gradually decreased in a plurality of stages instead of switching from a larger one to a smaller one, or may be continuously reduced. Further, after the amplitude is reduced, the bending vibration signal may be finally stopped to limit the movement of the moving unit 3. Further, the amplitude may be stopped without an operation for reducing the vibration.

  As described above, according to the third embodiment of the present invention, in addition to the effects of the first embodiment, when the moving speed of the moving unit 3 exceeds a predetermined speed, the amount of sliding force is changed heavily, and the moving unit 3 movement speed can be suppressed. This makes it possible to prevent errors caused by encoder count errors and the like.

  The control of the bending vibration signal is not limited to when the moving speed of the moving unit 3 exceeds a predetermined speed. For example, when the acceleration related to the movement of the moving unit 3 exceeds a predetermined value, or the position of the moving unit 3 May be performed when the movement distance exceeds a predetermined distance. Furthermore, the signal characteristic may be controlled by detecting the pressure with respect to the moving unit 3 and when the detected pressure is a predetermined value or more.

(Embodiment 4)
FIG. 16 is a flowchart showing a control process of electric stage 100 according to the fourth embodiment. Processes other than step S406 (steps S401 to S405 and steps S407 to S410) are the same as the processes of steps S301 to S305 and steps S307 to S310 in FIG. Only the difference from the control process according to the third embodiment in FIG. 13 will be described. In the fourth embodiment, the control unit 13 controls the drive unit 14 based on the coordinate position information sent from the detection unit 21.

  In step S406, the control unit 13 determines whether or not the coordinate position of the moving unit 3 indicated by the coordinate position information sent from the detection unit 21 is outside a predetermined range. When the control unit 13 determines that the coordinate position of the moving unit 3 is outside the predetermined range (step S406: Yes), the process proceeds to step S407 and controls the drive unit 14 to increase the amount of sliding force. . When the control unit 13 determines that the coordinate position of the moving unit 3 is within the predetermined range (step S406: No), the process proceeds to step S408.

  In the fourth embodiment as well, the amplitude of the bending vibration may be gradually reduced in a plurality of stages instead of switching from a larger one to a smaller one, or may be continuously reduced. . Further, after the amplitude is reduced, the bending vibration signal may be finally stopped to limit the movement of the moving unit 3. Further, the amplitude may be stopped without an operation for reducing the vibration.

  As described above, according to the fourth embodiment of the present invention, in addition to the effects of the first embodiment, when the coordinate position of the moving unit 3 goes out of the predetermined range, the amount of sliding force is changed significantly, and the moving unit 3 movement speed can be suppressed. Thereby, the amount of sliding force is increased just before hitting the stopper, so that the stopper and the moving part 3 can be prevented from colliding and suddenly stopping. Also, collisions with other units can be prevented.

(Embodiment 5)
FIG. 17 is a diagram showing an overall configuration of an electric stage 200 according to the fifth embodiment of the present invention. The electric stage 100 of the first to fourth embodiments described above can move in two directions orthogonal to each other, but can be replaced with the electric stage 200 that can move only in one direction according to the fifth embodiment. In each of the above-described embodiments, the moving unit 3 includes the moving unit 3x and the moving unit 3y. However, the electric stage 20 illustrated in FIG. 17 includes only one moving unit 3 and only in one direction. It can be moved to.

  The electric stage 200 includes, for example, a first member (base part) 1, a guide rail 2, a moving part (stage) 3, an ultrasonic actuator 10, a scale 17, an encoder (displacement sensor) 18, and a control device 150 (150a or 150b). It is comprised including. Each configuration is the same as that in the first to fourth embodiments.

  Note that any of the first to fifth embodiments described above can be applied to the inverted microscope 201 shown in FIG. Although the inverted microscope 201 is taken as an example, other types of microscopes such as an upright microscope can be used instead of the microscope 201 shown in FIG. In other words, any microscope capable of mounting a movable stage can be used with the electric stage according to each embodiment of the present invention.

  In addition, the above-described second embodiment can be combined with one or both of the third and fourth embodiments. Naturally, it is also possible to combine the third embodiment and the fourth embodiment.

1 base 2 guide rail 3 moving part (stage)
DESCRIPTION OF SYMBOLS 5 Sliding member 10 Ultrasonic actuator 13 Control part 14 Drive part 15 Manual movement instruction | indication part 16 Electric movement instruction | indication part 17 Scale 18 Encoder 19 Fixing screw hole 20 Screw 21 Detection part 22 Notch hole part 23 Warning information presentation part 24 Damping Material 30 Opening 31 Lens barrel 33 Main body 34 Transmitting illumination unit 36 Objective lens 37 Reflecting mirror 38 Imaging optical system 39 Eyepiece lens 41 Transmitting illumination column 42 Arm 43 Light source 44 Lamp house 45 Condenser lens 46 Condenser unit 47 Collector lens 48 Field stop 49 Reflecting mirror 100, 200 Electric stage 101 Ultrasonic motor 101a, 101b Vibrator 102 Holding mechanism 103 Coil spring 104 Thin plate spring 104a Thick part 105 Vibration electrode

Claims (4)

A microscope having a main body and an ultrasonic motorized stage installed in the main body,
The ultrasonic electric stage is:
A base fixed to the body;
A moving part attached to the base so as to be movable electrically or manually;
An ultrasonic motor having a vibrator attached to the base and vibrating in response to an applied signal;
Driving to apply to the ultrasonic motor a first signal for exciting vibration in a direction parallel to the moving direction of the moving unit and a second signal for exciting vibration in a direction orthogonal to the moving direction of the moving unit Means,
Detecting means for detecting position information of the moving unit;
When the moving unit is manually movable, the first signal is stopped, the driving unit is controlled to apply only the second signal to the ultrasonic motor, and the detection unit detects Control means for calculating the moving speed of the moving unit based on the positional information obtained ;
Warning information presenting means for presenting warning information when the moving speed calculated by the control means exceeds a predetermined speed when the moving section is manually movable. microscope. The control means, based on said position information detected by the detecting means according to claim 1 microscope according to the driving means and controlling the characteristics of said second signal applied to the ultrasonic motor. The control unit calculates a moving speed of the moving unit based on the position information detected by the detecting unit, and the second signal applied to the ultrasonic motor by the driving unit based on the calculated moving speed. The microscope according to claim 2 , wherein the characteristics of the microscope are controlled. An ultrasonic electric stage having a base, a moving part attached to the base so as to be electrically or manually movable, and an ultrasonic motor attached to the base and vibrating in response to an applied signal A method of controlling a microscope provided,
An input step of receiving an instruction to electrically move the moving unit or an instruction to enable manual movement;
In the input step , when an instruction to enable manual movement of the moving unit is input, the first signal that excites vibration in a direction parallel to the moving direction of the moving unit is stopped, and the moving unit A driving step of applying only a second signal for exciting vibration in a direction orthogonal to the moving direction to the ultrasonic motor ;
A detection step of detecting positional information of the moving unit;
A calculation step of calculating a moving speed of the moving unit based on the position information detected in the detection step;
A warning information presenting step for presenting warning information when an instruction to manually move the moving unit is input and the moving speed calculated in the calculating step exceeds a predetermined speed; A method for controlling a microscope, comprising:

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