JP5965776B2 - 傾斜膜形成用組成物およびこの組成物により形成される傾斜膜 - Google Patents
傾斜膜形成用組成物およびこの組成物により形成される傾斜膜 Download PDFInfo
- Publication number
- JP5965776B2 JP5965776B2 JP2012175218A JP2012175218A JP5965776B2 JP 5965776 B2 JP5965776 B2 JP 5965776B2 JP 2012175218 A JP2012175218 A JP 2012175218A JP 2012175218 A JP2012175218 A JP 2012175218A JP 5965776 B2 JP5965776 B2 JP 5965776B2
- Authority
- JP
- Japan
- Prior art keywords
- group
- silicon compound
- silicon
- hydrolyzate
- compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000203 mixture Substances 0.000 title claims description 126
- -1 acryloyloxy group Chemical group 0.000 claims description 209
- 150000003377 silicon compounds Chemical class 0.000 claims description 207
- NIHNNTQXNPWCJQ-UHFFFAOYSA-N o-biphenylenemethane Natural products C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 claims description 124
- 125000000217 alkyl group Chemical group 0.000 claims description 76
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 65
- 229910052731 fluorine Inorganic materials 0.000 claims description 42
- 238000006243 chemical reaction Methods 0.000 claims description 39
- 150000001875 compounds Chemical class 0.000 claims description 37
- 229910052710 silicon Inorganic materials 0.000 claims description 34
- 125000001153 fluoro group Chemical group F* 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 26
- 239000011737 fluorine Substances 0.000 claims description 25
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 23
- 150000002220 fluorenes Chemical class 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 15
- 125000003647 acryloyl group Chemical group O=C([*])C([H])=C([H])[H] 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 125000004171 alkoxy aryl group Chemical group 0.000 claims description 5
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 claims description 2
- 125000000524 functional group Chemical group 0.000 description 70
- 239000002904 solvent Substances 0.000 description 29
- 125000003545 alkoxy group Chemical group 0.000 description 27
- 238000006460 hydrolysis reaction Methods 0.000 description 27
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 27
- 239000011248 coating agent Substances 0.000 description 26
- 238000000576 coating method Methods 0.000 description 26
- 230000007062 hydrolysis Effects 0.000 description 25
- 125000002947 alkylene group Chemical group 0.000 description 23
- 125000003118 aryl group Chemical group 0.000 description 22
- 239000003054 catalyst Substances 0.000 description 22
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 22
- 238000009833 condensation Methods 0.000 description 20
- 150000002430 hydrocarbons Chemical group 0.000 description 20
- 238000006116 polymerization reaction Methods 0.000 description 20
- 239000000243 solution Substances 0.000 description 19
- 125000003983 fluorenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3CC12)* 0.000 description 18
- 125000003709 fluoroalkyl group Chemical group 0.000 description 17
- 238000006068 polycondensation reaction Methods 0.000 description 17
- 229910000077 silane Inorganic materials 0.000 description 17
- 230000005494 condensation Effects 0.000 description 16
- 230000003301 hydrolyzing effect Effects 0.000 description 16
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 15
- 238000006467 substitution reaction Methods 0.000 description 15
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 14
- 239000011347 resin Substances 0.000 description 14
- 229920005989 resin Polymers 0.000 description 14
- 230000015572 biosynthetic process Effects 0.000 description 12
- 125000005370 alkoxysilyl group Chemical group 0.000 description 11
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 10
- 125000001424 substituent group Chemical group 0.000 description 10
- 238000003786 synthesis reaction Methods 0.000 description 10
- 125000005843 halogen group Chemical group 0.000 description 9
- 125000001624 naphthyl group Chemical group 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 238000010521 absorption reaction Methods 0.000 description 8
- 125000003342 alkenyl group Chemical group 0.000 description 8
- 125000000753 cycloalkyl group Chemical group 0.000 description 8
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 8
- 150000003254 radicals Chemical class 0.000 description 8
- 239000010410 layer Substances 0.000 description 7
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 7
- 125000004178 (C1-C4) alkyl group Chemical group 0.000 description 6
- XDLMVUHYZWKMMD-UHFFFAOYSA-N 3-trimethoxysilylpropyl 2-methylprop-2-enoate Chemical compound CO[Si](OC)(OC)CCCOC(=O)C(C)=C XDLMVUHYZWKMMD-UHFFFAOYSA-N 0.000 description 6
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 6
- 239000007864 aqueous solution Substances 0.000 description 6
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 239000012071 phase Substances 0.000 description 6
- 239000003505 polymerization initiator Substances 0.000 description 6
- 230000035484 reaction time Effects 0.000 description 6
- 125000004169 (C1-C6) alkyl group Chemical group 0.000 description 5
- 239000002253 acid Substances 0.000 description 5
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 5
- 125000004104 aryloxy group Chemical group 0.000 description 5
- 229910052801 chlorine Inorganic materials 0.000 description 5
- 125000001309 chloro group Chemical group Cl* 0.000 description 5
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 5
- 125000005647 linker group Chemical group 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 230000002940 repellent Effects 0.000 description 5
- 239000005871 repellent Substances 0.000 description 5
- 150000004756 silanes Chemical class 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 5
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 5
- YCPMSWJCWKUXRH-UHFFFAOYSA-N 2-[4-[9-[4-(2-prop-2-enoyloxyethoxy)phenyl]fluoren-9-yl]phenoxy]ethyl prop-2-enoate Chemical compound C1=CC(OCCOC(=O)C=C)=CC=C1C1(C=2C=CC(OCCOC(=O)C=C)=CC=2)C2=CC=CC=C2C2=CC=CC=C21 YCPMSWJCWKUXRH-UHFFFAOYSA-N 0.000 description 4
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 4
- 125000005036 alkoxyphenyl group Chemical group 0.000 description 4
- 239000000460 chlorine Substances 0.000 description 4
- 238000006482 condensation reaction Methods 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 4
- 125000000816 ethylene group Chemical group [H]C([H])([*:1])C([H])([H])[*:2] 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical class I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 description 4
- 125000001841 imino group Chemical group [H]N=* 0.000 description 4
- 125000005010 perfluoroalkyl group Chemical group 0.000 description 4
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 4
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 229910052719 titanium Inorganic materials 0.000 description 4
- 238000011282 treatment Methods 0.000 description 4
- 125000003161 (C1-C6) alkylene group Chemical group 0.000 description 3
- 125000004209 (C1-C8) alkyl group Chemical group 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical group [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 244000028419 Styrax benzoin Species 0.000 description 3
- 235000000126 Styrax benzoin Nutrition 0.000 description 3
- 235000008411 Sumatra benzointree Nutrition 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 125000004414 alkyl thio group Chemical group 0.000 description 3
- 150000004946 bicyclic arenes Chemical group 0.000 description 3
- BTANRVKWQNVYAZ-UHFFFAOYSA-N butan-2-ol Chemical compound CCC(C)O BTANRVKWQNVYAZ-UHFFFAOYSA-N 0.000 description 3
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- 125000004093 cyano group Chemical group *C#N 0.000 description 3
- ISAOCJYIOMOJEB-UHFFFAOYSA-N desyl alcohol Natural products C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- 235000019382 gum benzoic Nutrition 0.000 description 3
- 239000003999 initiator Substances 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- QYZFTMMPKCOTAN-UHFFFAOYSA-N n-[2-(2-hydroxyethylamino)ethyl]-2-[[1-[2-(2-hydroxyethylamino)ethylamino]-2-methyl-1-oxopropan-2-yl]diazenyl]-2-methylpropanamide Chemical compound OCCNCCNC(=O)C(C)(C)N=NC(C)(C)C(=O)NCCNCCO QYZFTMMPKCOTAN-UHFFFAOYSA-N 0.000 description 3
- 150000007530 organic bases Chemical class 0.000 description 3
- 229920000620 organic polymer Polymers 0.000 description 3
- 125000005702 oxyalkylene group Chemical group 0.000 description 3
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- 125000005372 silanol group Chemical group 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 125000003944 tolyl group Chemical group 0.000 description 3
- IJROHELDTBDTPH-UHFFFAOYSA-N trimethoxy(3,3,4,4,5,5,6,6,6-nonafluorohexyl)silane Chemical compound CO[Si](OC)(OC)CCC(F)(F)C(F)(F)C(F)(F)C(F)(F)F IJROHELDTBDTPH-UHFFFAOYSA-N 0.000 description 3
- 125000003258 trimethylene group Chemical group [H]C([H])([*:2])C([H])([H])C([H])([H])[*:1] 0.000 description 3
- 125000004400 (C1-C12) alkyl group Chemical group 0.000 description 2
- NJWGQARXZDRHCD-UHFFFAOYSA-N 2-methylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(C)=CC=C3C(=O)C2=C1 NJWGQARXZDRHCD-UHFFFAOYSA-N 0.000 description 2
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 2
- KBQVDAIIQCXKPI-UHFFFAOYSA-N 3-trimethoxysilylpropyl prop-2-enoate Chemical compound CO[Si](OC)(OC)CCCOC(=O)C=C KBQVDAIIQCXKPI-UHFFFAOYSA-N 0.000 description 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical group [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 125000000882 C2-C6 alkenyl group Chemical group 0.000 description 2
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical class S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 2
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 2
- YNQLUTRBYVCPMQ-UHFFFAOYSA-N Ethylbenzene Chemical compound CCC1=CC=CC=C1 YNQLUTRBYVCPMQ-UHFFFAOYSA-N 0.000 description 2
- OFBQJSOFQDEBGM-UHFFFAOYSA-N Pentane Chemical compound CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 101100482220 Sulfurisphaera tokodaii (strain DSM 16993 / JCM 10545 / NBRC 100140 / 7) triC gene Proteins 0.000 description 2
- DKGAVHZHDRPRBM-UHFFFAOYSA-N Tert-Butanol Chemical compound CC(C)(C)O DKGAVHZHDRPRBM-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 239000003377 acid catalyst Substances 0.000 description 2
- 125000002252 acyl group Chemical group 0.000 description 2
- 125000005083 alkoxyalkoxy group Chemical group 0.000 description 2
- 125000004453 alkoxycarbonyl group Chemical group 0.000 description 2
- 125000005577 anthracene group Chemical group 0.000 description 2
- 150000004056 anthraquinones Chemical class 0.000 description 2
- 125000003710 aryl alkyl group Chemical group 0.000 description 2
- 125000005110 aryl thio group Chemical group 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 229960002130 benzoin Drugs 0.000 description 2
- 239000012965 benzophenone Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000008199 coating composition Substances 0.000 description 2
- 238000004132 cross linking Methods 0.000 description 2
- 125000004122 cyclic group Chemical group 0.000 description 2
- 125000002993 cycloalkylene group Chemical group 0.000 description 2
- 125000005366 cycloalkylthio group Chemical group 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 2
- 239000012954 diazonium Substances 0.000 description 2
- 150000001989 diazonium salts Chemical class 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 2
- XLLIQLLCWZCATF-UHFFFAOYSA-N ethylene glycol monomethyl ether acetate Natural products COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- 229910052740 iodine Inorganic materials 0.000 description 2
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 2
- 239000004611 light stabiliser Substances 0.000 description 2
- 229910001507 metal halide Inorganic materials 0.000 description 2
- 150000005309 metal halides Chemical class 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 2
- 239000011259 mixed solution Substances 0.000 description 2
- 238000000655 nuclear magnetic resonance spectrum Methods 0.000 description 2
- 150000002978 peroxides Chemical class 0.000 description 2
- 150000004714 phosphonium salts Chemical class 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 125000005575 polycyclic aromatic hydrocarbon group Chemical group 0.000 description 2
- 125000003367 polycyclic group Chemical group 0.000 description 2
- 230000000379 polymerizing effect Effects 0.000 description 2
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 150000003342 selenium Chemical class 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 2
- LFQCEHFDDXELDD-UHFFFAOYSA-N tetramethyl orthosilicate Chemical compound CO[Si](OC)(OC)OC LFQCEHFDDXELDD-UHFFFAOYSA-N 0.000 description 2
- 125000000383 tetramethylene group Chemical group [H]C([H])([*:1])C([H])([H])C([H])([H])C([H])([H])[*:2] 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- WEUBQNJHVBMUMD-UHFFFAOYSA-N trichloro(3,3,3-trifluoropropyl)silane Chemical compound FC(F)(F)CC[Si](Cl)(Cl)Cl WEUBQNJHVBMUMD-UHFFFAOYSA-N 0.000 description 2
- 125000005023 xylyl group Chemical group 0.000 description 2
- QEQBMZQFDDDTPN-UHFFFAOYSA-N (2-methylpropan-2-yl)oxy benzenecarboperoxoate Chemical compound CC(C)(C)OOOC(=O)C1=CC=CC=C1 QEQBMZQFDDDTPN-UHFFFAOYSA-N 0.000 description 1
- CVBASHMCALKFME-UHFFFAOYSA-N (4-methoxyphenyl)-diphenylsulfanium Chemical compound C1=CC(OC)=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 CVBASHMCALKFME-UHFFFAOYSA-N 0.000 description 1
- 125000004191 (C1-C6) alkoxy group Chemical group 0.000 description 1
- 125000006700 (C1-C6) alkylthio group Chemical group 0.000 description 1
- 125000006592 (C2-C3) alkenyl group Chemical group 0.000 description 1
- 125000006704 (C5-C6) cycloalkyl group Chemical group 0.000 description 1
- 125000006585 (C6-C10) arylene group Chemical group 0.000 description 1
- DSSYKIVIOFKYAU-XCBNKYQSSA-N (R)-camphor Chemical compound C1C[C@@]2(C)C(=O)C[C@@H]1C2(C)C DSSYKIVIOFKYAU-XCBNKYQSSA-N 0.000 description 1
- KDDKDGPEMJSGSK-UHFFFAOYSA-N 1,1,2,2,2-pentafluoroethyl-(1,1,2,2,3,3,4,4,5,5,6,6,6-tridecafluorohexoxy)-bis(trifluoromethoxy)silane Chemical compound FC(F)(F)O[Si](OC(F)(F)F)(C(F)(F)C(F)(F)F)OC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F KDDKDGPEMJSGSK-UHFFFAOYSA-N 0.000 description 1
- WRCCZTCQXKFWBB-UHFFFAOYSA-N 1,1,2,2,2-pentafluoroethyl-bis(trifluoromethoxy)-(1,1,2,2,3,3,4,4,5,5,5-undecafluoropentoxy)silane Chemical compound FC(F)(F)O[Si](OC(F)(F)F)(C(F)(F)C(F)(F)F)OC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F WRCCZTCQXKFWBB-UHFFFAOYSA-N 0.000 description 1
- CENJEWLNEQORKN-UHFFFAOYSA-N 1,1,2,2,3,3,4,4,4-nonafluorobutoxy-(1,1,2,2,2-pentafluoroethyl)-bis(trifluoromethoxy)silane Chemical compound FC(F)(F)O[Si](OC(F)(F)F)(C(F)(F)C(F)(F)F)OC(F)(F)C(F)(F)C(F)(F)C(F)(F)F CENJEWLNEQORKN-UHFFFAOYSA-N 0.000 description 1
- XKSUVRWJZCEYQQ-UHFFFAOYSA-N 1,1-dimethoxyethylbenzene Chemical compound COC(C)(OC)C1=CC=CC=C1 XKSUVRWJZCEYQQ-UHFFFAOYSA-N 0.000 description 1
- LZDKZFUFMNSQCJ-UHFFFAOYSA-N 1,2-diethoxyethane Chemical compound CCOCCOCC LZDKZFUFMNSQCJ-UHFFFAOYSA-N 0.000 description 1
- VPBZZPOGZPKYKX-UHFFFAOYSA-N 1,2-diethoxypropane Chemical compound CCOCC(C)OCC VPBZZPOGZPKYKX-UHFFFAOYSA-N 0.000 description 1
- LEEANUDEDHYDTG-UHFFFAOYSA-N 1,2-dimethoxypropane Chemical compound COCC(C)OC LEEANUDEDHYDTG-UHFFFAOYSA-N 0.000 description 1
- MSAHTMIQULFMRG-UHFFFAOYSA-N 1,2-diphenyl-2-propan-2-yloxyethanone Chemical compound C=1C=CC=CC=1C(OC(C)C)C(=O)C1=CC=CC=C1 MSAHTMIQULFMRG-UHFFFAOYSA-N 0.000 description 1
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 1
- DKEGCUDAFWNSSO-UHFFFAOYSA-N 1,8-dibromooctane Chemical compound BrCCCCCCCCBr DKEGCUDAFWNSSO-UHFFFAOYSA-N 0.000 description 1
- BOCJQSFSGAZAPQ-UHFFFAOYSA-N 1-chloroanthracene-9,10-dione Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C=CC=C2Cl BOCJQSFSGAZAPQ-UHFFFAOYSA-N 0.000 description 1
- 239000012956 1-hydroxycyclohexylphenyl-ketone Substances 0.000 description 1
- CERJZAHSUZVMCH-UHFFFAOYSA-N 2,2-dichloro-1-phenylethanone Chemical compound ClC(Cl)C(=O)C1=CC=CC=C1 CERJZAHSUZVMCH-UHFFFAOYSA-N 0.000 description 1
- GIMQKKFOOYOQGB-UHFFFAOYSA-N 2,2-diethoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCC)(OCC)C(=O)C1=CC=CC=C1 GIMQKKFOOYOQGB-UHFFFAOYSA-N 0.000 description 1
- KWVGIHKZDCUPEU-UHFFFAOYSA-N 2,2-dimethoxy-2-phenylacetophenone Chemical compound C=1C=CC=CC=1C(OC)(OC)C(=O)C1=CC=CC=C1 KWVGIHKZDCUPEU-UHFFFAOYSA-N 0.000 description 1
- BRKORVYTKKLNKX-UHFFFAOYSA-N 2,4-di(propan-2-yl)thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(C(C)C)=CC(C(C)C)=C3SC2=C1 BRKORVYTKKLNKX-UHFFFAOYSA-N 0.000 description 1
- BTJPUDCSZVCXFQ-UHFFFAOYSA-N 2,4-diethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC(CC)=C3SC2=C1 BTJPUDCSZVCXFQ-UHFFFAOYSA-N 0.000 description 1
- LCHAFMWSFCONOO-UHFFFAOYSA-N 2,4-dimethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(C)=CC(C)=C3SC2=C1 LCHAFMWSFCONOO-UHFFFAOYSA-N 0.000 description 1
- CCTFAOUOYLVUFG-UHFFFAOYSA-N 2-(1-amino-1-imino-2-methylpropan-2-yl)azo-2-methylpropanimidamide Chemical compound NC(=N)C(C)(C)N=NC(C)(C)C(N)=N CCTFAOUOYLVUFG-UHFFFAOYSA-N 0.000 description 1
- VZSRBBMJRBPUNF-UHFFFAOYSA-N 2-(2,3-dihydro-1H-inden-2-ylamino)-N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]pyrimidine-5-carboxamide Chemical group C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C(=O)NCCC(N1CC2=C(CC1)NN=N2)=O VZSRBBMJRBPUNF-UHFFFAOYSA-N 0.000 description 1
- AVTLBBWTUPQRAY-UHFFFAOYSA-N 2-(2-cyanobutan-2-yldiazenyl)-2-methylbutanenitrile Chemical compound CCC(C)(C#N)N=NC(C)(CC)C#N AVTLBBWTUPQRAY-UHFFFAOYSA-N 0.000 description 1
- XMNIXWIUMCBBBL-UHFFFAOYSA-N 2-(2-phenylpropan-2-ylperoxy)propan-2-ylbenzene Chemical compound C=1C=CC=CC=1C(C)(C)OOC(C)(C)C1=CC=CC=C1 XMNIXWIUMCBBBL-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- PFHOSZAOXCYAGJ-UHFFFAOYSA-N 2-[(2-cyano-4-methoxy-4-methylpentan-2-yl)diazenyl]-4-methoxy-2,4-dimethylpentanenitrile Chemical compound COC(C)(C)CC(C)(C#N)N=NC(C)(C#N)CC(C)(C)OC PFHOSZAOXCYAGJ-UHFFFAOYSA-N 0.000 description 1
- WYGWHHGCAGTUCH-UHFFFAOYSA-N 2-[(2-cyano-4-methylpentan-2-yl)diazenyl]-2,4-dimethylpentanenitrile Chemical compound CC(C)CC(C)(C#N)N=NC(C)(C#N)CC(C)C WYGWHHGCAGTUCH-UHFFFAOYSA-N 0.000 description 1
- ASAQRGCLIPUSEK-UHFFFAOYSA-N 2-[4-amino-n-(2-hydroxyethyl)-3-nitroanilino]ethanol;hydrochloride Chemical compound Cl.NC1=CC=C(N(CCO)CCO)C=C1[N+]([O-])=O ASAQRGCLIPUSEK-UHFFFAOYSA-N 0.000 description 1
- JTXMVXSTHSMVQF-UHFFFAOYSA-N 2-acetyloxyethyl acetate Chemical compound CC(=O)OCCOC(C)=O JTXMVXSTHSMVQF-UHFFFAOYSA-N 0.000 description 1
- HEQOJEGTZCTHCF-UHFFFAOYSA-N 2-amino-1-phenylethanone Chemical class NCC(=O)C1=CC=CC=C1 HEQOJEGTZCTHCF-UHFFFAOYSA-N 0.000 description 1
- UHFFVFAKEGKNAQ-UHFFFAOYSA-N 2-benzyl-2-(dimethylamino)-1-(4-morpholin-4-ylphenyl)butan-1-one Chemical compound C=1C=C(N2CCOCC2)C=CC=1C(=O)C(CC)(N(C)C)CC1=CC=CC=C1 UHFFVFAKEGKNAQ-UHFFFAOYSA-N 0.000 description 1
- ZCDADJXRUCOCJE-UHFFFAOYSA-N 2-chlorothioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(Cl)=CC=C3SC2=C1 ZCDADJXRUCOCJE-UHFFFAOYSA-N 0.000 description 1
- KMNCBSZOIQAUFX-UHFFFAOYSA-N 2-ethoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCC)C(=O)C1=CC=CC=C1 KMNCBSZOIQAUFX-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- SJEBAWHUJDUKQK-UHFFFAOYSA-N 2-ethylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC=C3C(=O)C2=C1 SJEBAWHUJDUKQK-UHFFFAOYSA-N 0.000 description 1
- XMLYCEVDHLAQEL-UHFFFAOYSA-N 2-hydroxy-2-methyl-1-phenylpropan-1-one Chemical compound CC(C)(O)C(=O)C1=CC=CC=C1 XMLYCEVDHLAQEL-UHFFFAOYSA-N 0.000 description 1
- HXDLWJWIAHWIKI-UHFFFAOYSA-N 2-hydroxyethyl acetate Chemical compound CC(=O)OCCO HXDLWJWIAHWIKI-UHFFFAOYSA-N 0.000 description 1
- BQZJOQXSCSZQPS-UHFFFAOYSA-N 2-methoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OC)C(=O)C1=CC=CC=C1 BQZJOQXSCSZQPS-UHFFFAOYSA-N 0.000 description 1
- RIWRBSMFKVOJMN-UHFFFAOYSA-N 2-methyl-1-phenylpropan-2-ol Chemical compound CC(C)(O)CC1=CC=CC=C1 RIWRBSMFKVOJMN-UHFFFAOYSA-N 0.000 description 1
- 125000000094 2-phenylethyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])C([H])([H])* 0.000 description 1
- YTPSFXZMJKMUJE-UHFFFAOYSA-N 2-tert-butylanthracene-9,10-dione Chemical compound C1=CC=C2C(=O)C3=CC(C(C)(C)C)=CC=C3C(=O)C2=C1 YTPSFXZMJKMUJE-UHFFFAOYSA-N 0.000 description 1
- PSLRXNFNXYNXEK-UHFFFAOYSA-N 2-triethoxysilylethyl prop-2-enoate Chemical compound CCO[Si](OCC)(OCC)CCOC(=O)C=C PSLRXNFNXYNXEK-UHFFFAOYSA-N 0.000 description 1
- BUJVPKZRXOTBGA-UHFFFAOYSA-N 2-trimethoxysilylethyl prop-2-enoate Chemical compound CO[Si](OC)(OC)CCOC(=O)C=C BUJVPKZRXOTBGA-UHFFFAOYSA-N 0.000 description 1
- HJIMAFKWSKZMBK-UHFFFAOYSA-N 3,3,4,4,5,5,6,6,7,7,8,8,9,9,10,10,10-heptadecafluorodecyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)CCC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F HJIMAFKWSKZMBK-UHFFFAOYSA-N 0.000 description 1
- UDWIZRDPCQAYRF-UHFFFAOYSA-N 3-[diethoxy(methyl)silyl]propyl prop-2-enoate Chemical compound CCO[Si](C)(OCC)CCCOC(=O)C=C UDWIZRDPCQAYRF-UHFFFAOYSA-N 0.000 description 1
- MCDBEBOBROAQSH-UHFFFAOYSA-N 3-[dimethoxy(methyl)silyl]propyl prop-2-enoate Chemical compound CO[Si](C)(OC)CCCOC(=O)C=C MCDBEBOBROAQSH-UHFFFAOYSA-N 0.000 description 1
- PNZVYZIRTOVNKZ-UHFFFAOYSA-N 3-[tris(2-methoxyethoxy)silyl]propyl prop-2-enoate Chemical compound COCCO[Si](OCCOC)(OCCOC)CCCOC(=O)C=C PNZVYZIRTOVNKZ-UHFFFAOYSA-N 0.000 description 1
- XDQWJFXZTAWJST-UHFFFAOYSA-N 3-triethoxysilylpropyl prop-2-enoate Chemical compound CCO[Si](OCC)(OCC)CCCOC(=O)C=C XDQWJFXZTAWJST-UHFFFAOYSA-N 0.000 description 1
- HGEKXQRHZRDGKO-UHFFFAOYSA-N 3-tripropoxysilylpropyl prop-2-enoate Chemical compound CCCO[Si](OCCC)(OCCC)CCCOC(=O)C=C HGEKXQRHZRDGKO-UHFFFAOYSA-N 0.000 description 1
- VFXXTYGQYWRHJP-UHFFFAOYSA-N 4,4'-azobis(4-cyanopentanoic acid) Chemical compound OC(=O)CCC(C)(C#N)N=NC(C)(CCC(O)=O)C#N VFXXTYGQYWRHJP-UHFFFAOYSA-N 0.000 description 1
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 1
- YDIYEOMDOWUDTJ-UHFFFAOYSA-N 4-(dimethylamino)benzoic acid Chemical compound CN(C)C1=CC=C(C(O)=O)C=C1 YDIYEOMDOWUDTJ-UHFFFAOYSA-N 0.000 description 1
- 125000004864 4-thiomethylphenyl group Chemical group 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 229910017008 AsF 6 Inorganic materials 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 239000004342 Benzoyl peroxide Substances 0.000 description 1
- OMPJBNCRMGITSC-UHFFFAOYSA-N Benzoylperoxide Chemical compound C=1C=CC=CC=1C(=O)OOC(=O)C1=CC=CC=C1 OMPJBNCRMGITSC-UHFFFAOYSA-N 0.000 description 1
- 125000005915 C6-C14 aryl group Chemical group 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 239000005046 Chlorosilane Substances 0.000 description 1
- 241000723346 Cinnamomum camphora Species 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 description 1
- OYYZEECQSTVVEY-UHFFFAOYSA-N FC(C(C(C(C(C(F)(F)F)(F)F)(F)F)(F)F)(F)F)(C(C(C(C(O[Si](C(C(F)(F)F)(F)F)(OC(F)(F)F)OC(F)(F)F)(F)F)(F)F)(F)F)(F)F)F Chemical compound FC(C(C(C(C(C(F)(F)F)(F)F)(F)F)(F)F)(F)F)(C(C(C(C(O[Si](C(C(F)(F)F)(F)F)(OC(F)(F)F)OC(F)(F)F)(F)F)(F)F)(F)F)(F)F)F OYYZEECQSTVVEY-UHFFFAOYSA-N 0.000 description 1
- IQQRIFGIZCSPOA-UHFFFAOYSA-N FC(C(C(C(F)(F)F)(F)F)(F)F)(C(C(C(F)(F)[Si](C(C(F)(F)F)(F)F)(F)F)(F)F)(F)F)F Chemical compound FC(C(C(C(F)(F)F)(F)F)(F)F)(C(C(C(F)(F)[Si](C(C(F)(F)F)(F)F)(F)F)(F)F)(F)F)F IQQRIFGIZCSPOA-UHFFFAOYSA-N 0.000 description 1
- NEGLCKNKIOEETO-UHFFFAOYSA-N FC(C(C(O[Si](C(C(F)(F)F)(F)F)(C(F)(F)F)C(F)(F)F)(F)F)(F)F)(C(C(F)(F)F)(F)F)F Chemical compound FC(C(C(O[Si](C(C(F)(F)F)(F)F)(C(F)(F)F)C(F)(F)F)(F)F)(F)F)(C(C(F)(F)F)(F)F)F NEGLCKNKIOEETO-UHFFFAOYSA-N 0.000 description 1
- VJOWZCOYIZACLB-UHFFFAOYSA-N FC(C(C(O[Si](C(C(F)(F)F)(F)F)(C(F)(F)F)OC(F)(F)F)(F)F)(F)F)(C(C(F)(F)F)(F)F)F Chemical compound FC(C(C(O[Si](C(C(F)(F)F)(F)F)(C(F)(F)F)OC(F)(F)F)(F)F)(F)F)(C(C(F)(F)F)(F)F)F VJOWZCOYIZACLB-UHFFFAOYSA-N 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- YIVJZNGAASQVEM-UHFFFAOYSA-N Lauroyl peroxide Chemical compound CCCCCCCCCCCC(=O)OOC(=O)CCCCCCCCCCC YIVJZNGAASQVEM-UHFFFAOYSA-N 0.000 description 1
- NQSMEZJWJJVYOI-UHFFFAOYSA-N Methyl 2-benzoylbenzoate Chemical compound COC(=O)C1=CC=CC=C1C(=O)C1=CC=CC=C1 NQSMEZJWJJVYOI-UHFFFAOYSA-N 0.000 description 1
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 1
- 101100284369 Neurospora crassa (strain ATCC 24698 / 74-OR23-1A / CBS 708.71 / DSM 1257 / FGSC 987) has-1 gene Proteins 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- SCKXCAADGDQQCS-UHFFFAOYSA-N Performic acid Chemical compound OOC=O SCKXCAADGDQQCS-UHFFFAOYSA-N 0.000 description 1
- 229920002319 Poly(methyl acrylate) Polymers 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- 150000001242 acetic acid derivatives Chemical class 0.000 description 1
- 150000008062 acetophenones Chemical class 0.000 description 1
- 125000002777 acetyl group Chemical group [H]C([H])([H])C(*)=O 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 1
- 125000004946 alkenylalkyl group Chemical group 0.000 description 1
- 125000002877 alkyl aryl group Chemical group 0.000 description 1
- 125000005907 alkyl ester group Chemical group 0.000 description 1
- 125000005037 alkyl phenyl group Chemical group 0.000 description 1
- 125000005529 alkyleneoxy group Chemical group 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 1
- 239000002518 antifoaming agent Substances 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 230000003078 antioxidant effect Effects 0.000 description 1
- 239000002216 antistatic agent Substances 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 125000004659 aryl alkyl thio group Chemical group 0.000 description 1
- 125000002102 aryl alkyloxo group Chemical group 0.000 description 1
- 125000000732 arylene group Chemical group 0.000 description 1
- 238000007611 bar coating method Methods 0.000 description 1
- 150000001558 benzoic acid derivatives Chemical class 0.000 description 1
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 1
- 150000008366 benzophenones Chemical class 0.000 description 1
- 235000019400 benzoyl peroxide Nutrition 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- 125000000051 benzyloxy group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])O* 0.000 description 1
- 125000002619 bicyclic group Chemical group 0.000 description 1
- WPKWPKDNOPEODE-UHFFFAOYSA-N bis(2,4,4-trimethylpentan-2-yl)diazene Chemical compound CC(C)(C)CC(C)(C)N=NC(C)(C)CC(C)(C)C WPKWPKDNOPEODE-UHFFFAOYSA-N 0.000 description 1
- CSXPRVTYIFRYPR-UHFFFAOYSA-N bis(ethenyl)-diethoxysilane Chemical compound CCO[Si](C=C)(C=C)OCC CSXPRVTYIFRYPR-UHFFFAOYSA-N 0.000 description 1
- ZPECUSGQPIKHLT-UHFFFAOYSA-N bis(ethenyl)-dimethoxysilane Chemical compound CO[Si](OC)(C=C)C=C ZPECUSGQPIKHLT-UHFFFAOYSA-N 0.000 description 1
- MQDJYUACMFCOFT-UHFFFAOYSA-N bis[2-(1-hydroxycyclohexyl)phenyl]methanone Chemical compound C=1C=CC=C(C(=O)C=2C(=CC=CC=2)C2(O)CCCCC2)C=1C1(O)CCCCC1 MQDJYUACMFCOFT-UHFFFAOYSA-N 0.000 description 1
- LBSPZZSGTIBOFG-UHFFFAOYSA-N bis[2-(4,5-dihydro-1h-imidazol-2-yl)propan-2-yl]diazene;dihydrochloride Chemical compound Cl.Cl.N=1CCNC=1C(C)(C)N=NC(C)(C)C1=NCCN1 LBSPZZSGTIBOFG-UHFFFAOYSA-N 0.000 description 1
- UIZLQMLDSWKZGC-UHFFFAOYSA-N cadmium helium Chemical compound [He].[Cd] UIZLQMLDSWKZGC-UHFFFAOYSA-N 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 229910001634 calcium fluoride Inorganic materials 0.000 description 1
- 229960000846 camphor Drugs 0.000 description 1
- 229930008380 camphor Natural products 0.000 description 1
- 125000001951 carbamoylamino group Chemical group C(N)(=O)N* 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- KBAZUXSLKGQRJF-UHFFFAOYSA-N chloro-dimethyl-(3,3,3-trifluoropropyl)silane Chemical compound C[Si](C)(Cl)CCC(F)(F)F KBAZUXSLKGQRJF-UHFFFAOYSA-N 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- RWGFKTVRMDUZSP-UHFFFAOYSA-N cumene Chemical compound CC(C)C1=CC=CC=C1 RWGFKTVRMDUZSP-UHFFFAOYSA-N 0.000 description 1
- 238000007766 curtain coating Methods 0.000 description 1
- 150000004292 cyclic ethers Chemical class 0.000 description 1
- 125000000000 cycloalkoxy group Chemical group 0.000 description 1
- 125000004956 cyclohexylene group Chemical group 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 229910052805 deuterium Inorganic materials 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- LSXWFXONGKSEMY-UHFFFAOYSA-N di-tert-butyl peroxide Chemical compound CC(C)(C)OOC(C)(C)C LSXWFXONGKSEMY-UHFFFAOYSA-N 0.000 description 1
- 239000012933 diacyl peroxide Substances 0.000 description 1
- 125000004663 dialkyl amino group Chemical group 0.000 description 1
- LCFGHKRHEVGEDI-UHFFFAOYSA-N dichloro-(1,1,2,2,2-pentafluoroethyl)-(1,1,2,2,3,3,4,4,5,5,5-undecafluoropentyl)silane Chemical compound FC([Si](Cl)(Cl)C(C(F)(F)F)(F)F)(C(C(C(C(F)(F)F)(F)F)(F)F)(F)F)F LCFGHKRHEVGEDI-UHFFFAOYSA-N 0.000 description 1
- OHABWQNEJUUFAV-UHFFFAOYSA-N dichloro-methyl-(3,3,3-trifluoropropyl)silane Chemical compound C[Si](Cl)(Cl)CCC(F)(F)F OHABWQNEJUUFAV-UHFFFAOYSA-N 0.000 description 1
- ZZNQQQWFKKTOSD-UHFFFAOYSA-N diethoxy(diphenyl)silane Chemical compound C=1C=CC=CC=1[Si](OCC)(OCC)C1=CC=CC=C1 ZZNQQQWFKKTOSD-UHFFFAOYSA-N 0.000 description 1
- ZXPDYFSTVHQQOI-UHFFFAOYSA-N diethoxysilane Chemical compound CCO[SiH2]OCC ZXPDYFSTVHQQOI-UHFFFAOYSA-N 0.000 description 1
- NYRZFYVOHOJIPS-UHFFFAOYSA-N difluoro-(1,1,2,2,2-pentafluoroethyl)-(1,1,2,2,3,3,4,4,5,5,6,6,6-tridecafluorohexyl)silane Chemical compound FC(C(C(C(F)(F)[Si](C(C(F)(F)F)(F)F)(F)F)(F)F)(F)F)(C(C(F)(F)F)(F)F)F NYRZFYVOHOJIPS-UHFFFAOYSA-N 0.000 description 1
- ITKGZHIJCHURGN-UHFFFAOYSA-N dimethoxy(3,3,3-trifluoropropyl)silane Chemical compound CO[SiH](OC)CCC(F)(F)F ITKGZHIJCHURGN-UHFFFAOYSA-N 0.000 description 1
- JJQZDUKDJDQPMQ-UHFFFAOYSA-N dimethoxy(dimethyl)silane Chemical compound CO[Si](C)(C)OC JJQZDUKDJDQPMQ-UHFFFAOYSA-N 0.000 description 1
- AHUXYBVKTIBBJW-UHFFFAOYSA-N dimethoxy(diphenyl)silane Chemical compound C=1C=CC=CC=1[Si](OC)(OC)C1=CC=CC=C1 AHUXYBVKTIBBJW-UHFFFAOYSA-N 0.000 description 1
- ORHSGYTWJUDWKU-UHFFFAOYSA-N dimethoxymethyl(ethenyl)silane Chemical compound COC(OC)[SiH2]C=C ORHSGYTWJUDWKU-UHFFFAOYSA-N 0.000 description 1
- DEHJVGGWPWZZHI-UHFFFAOYSA-N dimethyl(3,3,3-trifluoropropyl)silane Chemical compound C[SiH](C)CCC(F)(F)F DEHJVGGWPWZZHI-UHFFFAOYSA-N 0.000 description 1
- 125000002147 dimethylamino group Chemical group [H]C([H])([H])N(*)C([H])([H])[H] 0.000 description 1
- YYLGKUPAFFKGRQ-UHFFFAOYSA-N dimethyldiethoxysilane Chemical compound CCO[Si](C)(C)OCC YYLGKUPAFFKGRQ-UHFFFAOYSA-N 0.000 description 1
- LTYMSROWYAPPGB-UHFFFAOYSA-O diphenylsulfanium Chemical compound C=1C=CC=CC=1[SH+]C1=CC=CC=C1 LTYMSROWYAPPGB-UHFFFAOYSA-O 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- SACPKRUZWRIEBW-UHFFFAOYSA-N dipropoxysilane Chemical compound CCCO[SiH2]OCCC SACPKRUZWRIEBW-UHFFFAOYSA-N 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 125000003700 epoxy group Chemical group 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- FWDBOZPQNFPOLF-UHFFFAOYSA-N ethenyl(triethoxy)silane Chemical compound CCO[Si](OCC)(OCC)C=C FWDBOZPQNFPOLF-UHFFFAOYSA-N 0.000 description 1
- NKSJNEHGWDZZQF-UHFFFAOYSA-N ethenyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)C=C NKSJNEHGWDZZQF-UHFFFAOYSA-N 0.000 description 1
- NNBRCHPBPDRPIT-UHFFFAOYSA-N ethenyl(tripropoxy)silane Chemical compound CCCO[Si](OCCC)(OCCC)C=C NNBRCHPBPDRPIT-UHFFFAOYSA-N 0.000 description 1
- MBGQQKKTDDNCSG-UHFFFAOYSA-N ethenyl-diethoxy-methylsilane Chemical compound CCO[Si](C)(C=C)OCC MBGQQKKTDDNCSG-UHFFFAOYSA-N 0.000 description 1
- MABAWBWRUSBLKQ-UHFFFAOYSA-N ethenyl-tri(propan-2-yloxy)silane Chemical compound CC(C)O[Si](OC(C)C)(OC(C)C)C=C MABAWBWRUSBLKQ-UHFFFAOYSA-N 0.000 description 1
- BQRPSOKLSZSNAR-UHFFFAOYSA-N ethenyl-tris[(2-methylpropan-2-yl)oxy]silane Chemical compound CC(C)(C)O[Si](OC(C)(C)C)(OC(C)(C)C)C=C BQRPSOKLSZSNAR-UHFFFAOYSA-N 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- CWAFVXWRGIEBPL-UHFFFAOYSA-N ethoxysilane Chemical compound CCO[SiH3] CWAFVXWRGIEBPL-UHFFFAOYSA-N 0.000 description 1
- SBRXLTRZCJVAPH-UHFFFAOYSA-N ethyl(trimethoxy)silane Chemical compound CC[Si](OC)(OC)OC SBRXLTRZCJVAPH-UHFFFAOYSA-N 0.000 description 1
- 125000004705 ethylthio group Chemical group C(C)S* 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- XPBBUZJBQWWFFJ-UHFFFAOYSA-N fluorosilane Chemical compound [SiH3]F XPBBUZJBQWWFFJ-UHFFFAOYSA-N 0.000 description 1
- 235000019253 formic acid Nutrition 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 150000002334 glycols Chemical class 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 239000012760 heat stabilizer Substances 0.000 description 1
- CZWLNMOIEMTDJY-UHFFFAOYSA-N hexyl(trimethoxy)silane Chemical compound CCCCCC[Si](OC)(OC)OC CZWLNMOIEMTDJY-UHFFFAOYSA-N 0.000 description 1
- 125000003707 hexyloxy group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])O* 0.000 description 1
- 239000012456 homogeneous solution Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 125000004029 hydroxymethyl group Chemical group [H]OC([H])([H])* 0.000 description 1
- 125000003454 indenyl group Chemical group C1(C=CC2=CC=CC=C12)* 0.000 description 1
- 238000002329 infrared spectrum Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 150000007529 inorganic bases Chemical class 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- MGFYSGNNHQQTJW-UHFFFAOYSA-N iodonium Chemical compound [IH2+] MGFYSGNNHQQTJW-UHFFFAOYSA-N 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- IQPQWNKOIGAROB-UHFFFAOYSA-N isocyanate group Chemical group [N-]=C=O IQPQWNKOIGAROB-UHFFFAOYSA-N 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 125000005641 methacryl group Chemical group 0.000 description 1
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 1
- 125000001160 methoxycarbonyl group Chemical group [H]C([H])([H])OC(*)=O 0.000 description 1
- ARYZCSRUUPFYMY-UHFFFAOYSA-N methoxysilane Chemical compound CO[SiH3] ARYZCSRUUPFYMY-UHFFFAOYSA-N 0.000 description 1
- 125000001570 methylene group Chemical group [H]C([H])([*:1])[*:2] 0.000 description 1
- 125000002816 methylsulfanyl group Chemical group [H]C([H])([H])S[*] 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- YKYONYBAUNKHLG-UHFFFAOYSA-N n-Propyl acetate Natural products CCCOC(C)=O YKYONYBAUNKHLG-UHFFFAOYSA-N 0.000 description 1
- UFWIBTONFRDIAS-UHFFFAOYSA-N naphthalene-acid Natural products C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 1
- YCWSUKQGVSGXJO-NTUHNPAUSA-N nifuroxazide Chemical group C1=CC(O)=CC=C1C(=O)N\N=C\C1=CC=C([N+]([O-])=O)O1 YCWSUKQGVSGXJO-NTUHNPAUSA-N 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 description 1
- TVMXDCGIABBOFY-UHFFFAOYSA-N octane Chemical compound CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 1
- 238000006384 oligomerization reaction Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 150000001451 organic peroxides Chemical class 0.000 description 1
- 150000003961 organosilicon compounds Chemical class 0.000 description 1
- 150000002923 oximes Chemical group 0.000 description 1
- 125000005825 oxyethoxy group Chemical group [H]C([H])(O[*:1])C([H])([H])O[*:2] 0.000 description 1
- 125000006353 oxyethylene group Chemical group 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 125000005704 oxymethylene group Chemical group [H]C([H])([*:2])O[*:1] 0.000 description 1
- 150000004978 peroxycarbonates Chemical class 0.000 description 1
- YNPNZTXNASCQKK-UHFFFAOYSA-N phenanthrene Chemical group C1=CC=C2C3=CC=CC=C3C=CC2=C1 YNPNZTXNASCQKK-UHFFFAOYSA-N 0.000 description 1
- 125000000951 phenoxy group Chemical group [H]C1=C([H])C([H])=C(O*)C([H])=C1[H] 0.000 description 1
- FABOKLHQXVRECE-UHFFFAOYSA-N phenyl(tripropoxy)silane Chemical compound CCCO[Si](OCCC)(OCCC)C1=CC=CC=C1 FABOKLHQXVRECE-UHFFFAOYSA-N 0.000 description 1
- 125000000843 phenylene group Chemical group C1(=C(C=CC=C1)*)* 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920005862 polyol Polymers 0.000 description 1
- 150000003077 polyols Chemical class 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- UFUASNAHBMBJIX-UHFFFAOYSA-N propan-1-one Chemical compound CC[C]=O UFUASNAHBMBJIX-UHFFFAOYSA-N 0.000 description 1
- QLNJFJADRCOGBJ-UHFFFAOYSA-N propionamide Chemical compound CCC(N)=O QLNJFJADRCOGBJ-UHFFFAOYSA-N 0.000 description 1
- 229940080818 propionamide Drugs 0.000 description 1
- ZMYXZXUHYAGGKG-UHFFFAOYSA-N propoxysilane Chemical compound CCCO[SiH3] ZMYXZXUHYAGGKG-UHFFFAOYSA-N 0.000 description 1
- 229940090181 propyl acetate Drugs 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 1
- 239000011877 solvent mixture Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 125000005504 styryl group Chemical group 0.000 description 1
- 125000000446 sulfanediyl group Chemical group *S* 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- SWAXTRYEYUTSAP-UHFFFAOYSA-N tert-butyl ethaneperoxoate Chemical compound CC(=O)OOC(C)(C)C SWAXTRYEYUTSAP-UHFFFAOYSA-N 0.000 description 1
- UQMOLLPKNHFRAC-UHFFFAOYSA-N tetrabutyl silicate Chemical compound CCCCO[Si](OCCCC)(OCCCC)OCCCC UQMOLLPKNHFRAC-UHFFFAOYSA-N 0.000 description 1
- ADLSSRLDGACTEX-UHFFFAOYSA-N tetraphenyl silicate Chemical compound C=1C=CC=CC=1O[Si](OC=1C=CC=CC=1)(OC=1C=CC=CC=1)OC1=CC=CC=C1 ADLSSRLDGACTEX-UHFFFAOYSA-N 0.000 description 1
- ZQZCOBSUOFHDEE-UHFFFAOYSA-N tetrapropyl silicate Chemical compound CCCO[Si](OCCC)(OCCC)OCCC ZQZCOBSUOFHDEE-UHFFFAOYSA-N 0.000 description 1
- 238000012719 thermal polymerization Methods 0.000 description 1
- 239000002562 thickening agent Substances 0.000 description 1
- 150000003568 thioethers Chemical class 0.000 description 1
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
- 125000005369 trialkoxysilyl group Chemical group 0.000 description 1
- 125000005409 triarylsulfonium group Chemical group 0.000 description 1
- VBLZCVMDRFCQRW-UHFFFAOYSA-N trichloro(1,1,1,2,3,3,4,4,5,5,6,6,6-tridecafluorohexan-2-yl)silane Chemical compound FC(C(F)(F)F)([Si](Cl)(Cl)Cl)C(C(C(C(F)(F)F)(F)F)(F)F)(F)F VBLZCVMDRFCQRW-UHFFFAOYSA-N 0.000 description 1
- 150000004948 tricyclic arenes Chemical group 0.000 description 1
- DENFJSAFJTVPJR-UHFFFAOYSA-N triethoxy(ethyl)silane Chemical compound CCO[Si](CC)(OCC)OCC DENFJSAFJTVPJR-UHFFFAOYSA-N 0.000 description 1
- CPUDPFPXCZDNGI-UHFFFAOYSA-N triethoxy(methyl)silane Chemical compound CCO[Si](C)(OCC)OCC CPUDPFPXCZDNGI-UHFFFAOYSA-N 0.000 description 1
- JCVQKRGIASEUKR-UHFFFAOYSA-N triethoxy(phenyl)silane Chemical compound CCO[Si](OCC)(OCC)C1=CC=CC=C1 JCVQKRGIASEUKR-UHFFFAOYSA-N 0.000 description 1
- UMFJXASDGBJDEB-UHFFFAOYSA-N triethoxy(prop-2-enyl)silane Chemical compound CCO[Si](CC=C)(OCC)OCC UMFJXASDGBJDEB-UHFFFAOYSA-N 0.000 description 1
- NBXZNTLFQLUFES-UHFFFAOYSA-N triethoxy(propyl)silane Chemical compound CCC[Si](OCC)(OCC)OCC NBXZNTLFQLUFES-UHFFFAOYSA-N 0.000 description 1
- QQQSFSZALRVCSZ-UHFFFAOYSA-N triethoxysilane Chemical compound CCO[SiH](OCC)OCC QQQSFSZALRVCSZ-UHFFFAOYSA-N 0.000 description 1
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 1
- JLGNHOJUQFHYEZ-UHFFFAOYSA-N trimethoxy(3,3,3-trifluoropropyl)silane Chemical compound CO[Si](OC)(OC)CCC(F)(F)F JLGNHOJUQFHYEZ-UHFFFAOYSA-N 0.000 description 1
- ZOSCMWIVTFUCOW-UHFFFAOYSA-N trimethoxy(3,3,4,4,4-pentafluorobutyl)silane Chemical compound CO[Si](OC)(OC)CCC(F)(F)C(F)(F)F ZOSCMWIVTFUCOW-UHFFFAOYSA-N 0.000 description 1
- ZNOCGWVLWPVKAO-UHFFFAOYSA-N trimethoxy(phenyl)silane Chemical compound CO[Si](OC)(OC)C1=CC=CC=C1 ZNOCGWVLWPVKAO-UHFFFAOYSA-N 0.000 description 1
- LFRDHGNFBLIJIY-UHFFFAOYSA-N trimethoxy(prop-2-enyl)silane Chemical compound CO[Si](OC)(OC)CC=C LFRDHGNFBLIJIY-UHFFFAOYSA-N 0.000 description 1
- LGROXJWYRXANBB-UHFFFAOYSA-N trimethoxy(propan-2-yl)silane Chemical compound CO[Si](OC)(OC)C(C)C LGROXJWYRXANBB-UHFFFAOYSA-N 0.000 description 1
- HQYALQRYBUJWDH-UHFFFAOYSA-N trimethoxy(propyl)silane Chemical compound CCC[Si](OC)(OC)OC HQYALQRYBUJWDH-UHFFFAOYSA-N 0.000 description 1
- WLOQLWBIJZDHET-UHFFFAOYSA-N triphenylsulfonium Chemical class C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 WLOQLWBIJZDHET-UHFFFAOYSA-N 0.000 description 1
- FAYMLNNRGCYLSR-UHFFFAOYSA-M triphenylsulfonium triflate Chemical compound [O-]S(=O)(=O)C(F)(F)F.C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 FAYMLNNRGCYLSR-UHFFFAOYSA-M 0.000 description 1
- OZWKZRFXJPGDFM-UHFFFAOYSA-N tripropoxysilane Chemical compound CCCO[SiH](OCCC)OCCC OZWKZRFXJPGDFM-UHFFFAOYSA-N 0.000 description 1
- 239000006097 ultraviolet radiation absorber Substances 0.000 description 1
- NQPDZGIKBAWPEJ-UHFFFAOYSA-N valeric acid Chemical compound CCCCC(O)=O NQPDZGIKBAWPEJ-UHFFFAOYSA-N 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 150000007964 xanthones Chemical class 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Paints Or Removers (AREA)
Description
ケイ素化合物(B)が、(メタ)アクリロイルオキシC2−4アルキルモノ乃至トリC1−4アルコキシシラン又はその加水分解物と、テトラC1−4アルコキシシラン又はその加水分解物との重縮合物であり、(メタ)アクリロイルオキシC2−4アルキルモノ乃至トリC1−4アルコキシシラン又はその加水分解物とテトラC1−4アルコキシシラン又はその加水分解物との割合が、ケイ素原子換算で、前者/後者(モル比)=1/3〜1/50であり、かつケイ素化合物(B)において、ケイ素原子と官能基(b)との割合が、前者/後者(モル比)=1/0.02〜1/0.8であり、
フルオレン化合物(C)が、9,9−ビス((メタ)アクリロイルオキシアリール)フルオレン類および9,9−ビス((メタ)アクリロイルオキシ(ポリ)アルコキシアリール)フルオレン類から選択された少なくとも1種である組成物が含まれる。
ケイ素化合物(B)の割合は、ケイ素化合物(B)に含まれる官能基(b)換算で、組成物中に含まれるケイ素原子1モルに対して、0.01〜1モル程度であってもよく、
フルオレン化合物(C)の割合は、組成物中に含まれるケイ素原子1モルに対して、0.01〜10モル程度であってもよい。
ケイ素化合物(A)とフルオレン化合物(C)との割合が、ケイ素原子換算で、ケイ素化合物(A)1モルに対して、フルオレン化合物(C)0.1〜10モルであり、
ケイ素化合物(A)の割合が、ケイ素化合物(A)に含まれるフッ素原子換算で、組成物中に含まれるケイ素原子1モルに対して、0.15〜5モルであり、
ケイ素化合物(B)の割合が、ケイ素化合物(B)に含まれる官能基(b)換算で、組成物中に含まれるケイ素原子1モルに対して、0.02〜0.5モルであり、
フルオレン化合物(C)の割合が、組成物中に含まれるケイ素原子1モルに対して、0.05〜5モルである組成物などが含まれる。
フッ素含有ケイ素化合物(A)(フッ素化合物、ケイ素化合物(A)、化合物(A)などということがある)は、フッ素原子を有するケイ素化合物であれば特に限定されないが、通常、フッ素原子含有重縮合性ケイ素化合物(フッ素含有加水分解縮合性ケイ素化合物)、例えば、ケイ素原子に直接結合したフッ素原子含有基および重縮合性基[又は加水分解縮合性基、例えば、アルコキシ基、アリールオキシ基、ハロゲン原子(塩素原子など)、ヒドロキシル基など]をそれぞれ少なくとも1つ有する化合物であればよい。
[式中、X1は、フッ素含有基、R1は、炭化水素基、アルコキシシリル基又はポリ(アルコキシシリル)基であり、R2は、水素原子、ヒドロキシル基、ハロゲン原子又は炭化水素基を示す。aは1〜3の整数、cは0又は1を示す。]
上記式(A1)において、フッ素含有基X1としては、フッ素原子、フッ素原子が置換した炭化水素基(例えば、アルキル基、アルケニル基、シクロアルキル基、アリール基など)が挙げられ、代表的にはフルオロアルキル基(フッ化アルキル基、フッ素原子が置換したアルキル基)であってもよい。
(式中、xおよびyはそれぞれ1以上の整数、zは0又は1を示す)
上記式(a)において、xは1以上の整数であればよく、例えば、1〜30(例えば、1〜25)、好ましくは1〜20(例えば、1〜18)、さらに好ましくは1〜15(例えば、1〜12)、特に1〜10(例えば、1〜8)程度であってもよく、通常1〜6(例えば、2〜6、好ましくは2〜4程度)であってもよい。
ケイ素化合物(A)は、前記ケイ素化合物(前記例示のケイ素化合物、フルオロアルキルアルコキシシラン、フルオロアルキルハロシラン又はその加水分解物)で構成されていればよく、このようなケイ素化合物と他のケイ素化合物(フッ素を含有しない加水分解縮合性ケイ素化合物など)とが部分的に縮合した重縮合物(部分加水分解縮合物)の形態で組成物を構成していてもよい。このようなフッ素を含有しないケイ素化合物と組み合わせることで、効率よく傾斜構造を形成でき、また、フッ素の含量を容易に調整することもできる。
(式中、dは1〜4の整数を示し、R1およびR2は前記と同じ。)
上記式(A2)において、好ましい基OR1の置換数dは、2〜4、さらに好ましくは3〜4、特に4である。置換数dが複数である場合、複数の基R1は、同一又は異なっていてもよい。なお、式(A2)において、R1およびR2は、前記式(A1)の場合と好ましい態様を含めて同様である。
ケイ素化合物(B)(化合物(B)などということがある)は、重合性官能基(b)を有するケイ素化合物であれば特に限定されないが、通常、ケイ素原子に直接結合した重合性官能基(b)を含む基(重合性官能基(b)含有基)および重縮合性基[又は加水分解縮合性基、例えば、アルコキシ基、アリールオキシ基、ハロゲン原子(塩素原子など)、ヒドロキシル基など]をそれぞれ少なくとも1つ有する化合物であればよい。
(式中、X2はラジカル重合性基、Aは連結基、cは0又は1、R10はR2又は基−[(R3O)b−R4](式中、R3は、アルキレン基であり、R4は炭化水素基であり、bは1以上の整数を示す)を示し、R1、R2、およびaは前記と同じ。)
上記式(B1)において、ラジカル重合性基としては、前記例示の基、例えば、ビニル基、(メタ)アクリロイルオキシ基などが挙げられ、好ましい重合性基は、(メタ)アクリロイルオキシ基である。
ケイ素化合物(B)は、前記ケイ素化合物(前記例示のケイ素化合物、(メタ)アクリロイルオキシ基を有するアルコキシシラン又はその加水分解物で構成されていればよく、このようなケイ素化合物と他のケイ素化合物(官能基を含有しないケイ素化合物など)とが部分的に縮合した重縮合物(部分加水分解縮合物)の形態で組成物を構成していてもよい。このような官能基を含有しないケイ素化合物と組み合わせることで、効率よく傾斜構造を形成でき、また、官能基の含量を容易に調整することもできる。
フルオレン化合物(C)は、重合性官能基(c)を有する。このような官能基(c)は、重合性官能基(b)に対して重合性(又は反応性)の基(詳細には、官能基(b)と反応して結合形成可能な基)であればよく、前記官能基(b)と同様の官能基が挙げられる。
上記式(C1)において、環Zで表される芳香族炭化水素環としては、ベンゼン環、縮合多環式アレーン(又は縮合多環式芳香族炭化水素)環などが挙げられる。縮合多環式アレーン(又は縮合多環式芳香族炭化水素)環としては、例えば、縮合二環式アレーン環(例えば、インデン環、ナフタレン環などのC8−20縮合二環式アレーン環、好ましくはC10−16縮合二環式アレーン環)、縮合三環式アレーン環(例えば、アントラセン環、フェナントレン環など)などの縮合二乃至四環式アレーン環などが挙げられる。好ましい縮合多環式アレーン環としては、ナフタレン環、アントラセン環などが挙げられ、特にナフタレン環が好ましい。なお、2つの環Zは、同一の又は異なる環であってもよく、通常、同一の環であってもよい。
本発明の組成物において、ケイ素化合物(A)とケイ素化合物(B)との割合は、例えば、ケイ素原子換算で、ケイ素化合物(A)1モルに対して、ケイ素化合物(B)0.01〜100モル(例えば、0.03〜70モル)、好ましくは0.05〜50モル(例えば、0.07〜30モル)、さらに好ましくは0.1〜10モル(例えば、0.2〜8モル)、特に0.3〜7モル(例えば、0.5〜5モル)程度であってもよい。
本発明の組成物は、さらに、他の成分を含んでいてもよい。このような他の成分としては、官能基(b)と官能基(c)との組み合わせに応じて、これらの反応を促進するための成分(例えば、重合開始剤、硬化剤、増感剤など)、加水分解縮合反応を促進するための触媒(前記例示の酸触媒、塩基触媒の他、光酸発生剤など)などの他、慣用の添加剤[例えば、顔料、着色剤、増粘剤、増感剤、消泡剤、レベリング剤、塗布性改良剤、滑剤、安定剤(酸化防止剤、熱安定剤、耐光安定剤、光安定剤など)、紫外線吸収剤、可塑剤、界面活性剤、充填剤、帯電防止剤、硬化剤など]などが挙げられる。これらの他の成分は、単独で又は2種以上組み合わせてもよい。
本発明の組成物は、フッ素およびフルオレン骨格を含んでおり、撥水性や優れた光学的特性(高屈折率、高透明性など)を有する成形体(膜など)を形成できる。
ノナフルオロヘキシルトリメトキシシラン[信越化学(株)製、C4F9(CH2)2Si(OCH3)3]1.33g(0.0036モル)を11.9gのエタノールに溶かした後、0.1M塩酸80mgを加え、室温で30分撹拌した。さらに、テトラエトキシシランのオリゴマーを含むエタノール溶液(コルコート社製、HAS−6、平均10量体、シリカ(SiO2)換算濃度18重量%)12g(0.0036モル)に加え、16時間室温で撹拌した後、60℃で1時間加熱撹拌し、反応液を得た。
γ−メタクリロキシプロピルトリメトキシシラン0.89g(0.0036モル)を8.1gのエタノールに溶かした後、0.1M塩酸80mgを加え、室温で30分撹拌した。得られた反応液をテトラエトキシシランのオリゴマーを含むエタノール溶液(コルコート社製、HAS−6、平均10量体、シリカ(SiO2)換算濃度18重量%)12g(0.0036モル)に加え、16時間室温で撹拌した後、60℃で1時間加熱撹拌し、反応液を得た。
9,9−ビス[4−(2−アクリロイルオキシエトキシ)フェニル]フルオレンを10重量%の割合で含むテトラヒドロフラン溶液を調製した。
合成例1で得られた反応液1重量部と、合成例2で得られた反応液1重量部と、合成例3で得られたテトラヒドロフラン溶液5重量部とを混合し、混合液[ノナフルオロヘキシルトリメトキシシランの加水分解物とHAS−6との重縮合物と、γ−メタクリロキシプロピルトリメトキシシランの加水分解物とHAS−6との重縮合物と、9,9−ビス[4−(2−アクリロイルオキシエトキシ)フェニル]フルオレンとを、1/1/0.5(モル比)の割合で含む混合物(重縮合物についてはケイ素原子換算)であり、Si原子1モルに対して、F原子0.4モル、γ−メタクリロキシプロピルトリメトキシシラン中のメタクリロイルオキシ基0.06モル、9,9−ビス[4−(2−アクリロイルオキシエトキシ)フェニル]フルオレン0.28モルを含む。]を得た。得られた混合液は、無色透明な溶液(均質溶液)を形成していた。
シリカガラス基板上に、実施例1で得られた混合液に固形分に対し0.5重量%のダロキュア1173(チバスペシャルティケミカルズ製)を添加後、スピンコート法(6000rpmx10秒)によりコーティングした後、120℃で30分乾燥し、膜(厚み1μm)を形成した。さらに、形成した膜に、メタルハライドランプを用いて30秒間光照射し、無色透明の硬化膜を得た。
シリカガラス基板上に、実施例1で得られた混合液をキャスト法によりコーティングした後、80℃で30分乾燥し、膜(厚み30μm)を得た。さらに、形成した膜に、メタルハライドランプを用いて30秒間光照射し、硬化膜を得た。
合成例3で得られたテトラヒドロフラン溶液を4重量部に変更した以外は実施例1〜3同様に合成・評価を行ったところ、無色透明な膜が得られ、接触角は103°であった。また、IR測定では、表面側からの測定では、フルオロアルキル基に特徴的な吸収ピークが観測されたが、メタクリロキシ基に帰属される吸収ピークは微量観察されるのみであった。一方、基板側からの測定では、メタクリロキシ基及びフルオレン骨格に帰属される吸収ピークが明確に観察されたが、フルオロアルキル基の吸収ピークは観察されなかった。
実施例1で得られた混合液に代えて、合成例3で得られたテトラヒドロフラン溶液を使用した以外は、実施例2と同様に硬化膜を得、接触角を測定したところ80°であり、高い撥水性が得られなかった。
Claims (11)
- 傾斜膜を形成するための組成物であって、
フルオロアルキルアルコキシシラン又はその加水分解物とフッ素非含有アルコキシシラン又はその加水分解物との重縮合物であるフッ素含有ケイ素化合物(A)と、
(メタ)アクリロイルオキシ基を有するアルコキシシラン又はその加水分解物と重合性官能基非含有アルコキシシラン又はその加水分解物との重縮合物であるケイ素化合物(B)と、
2個以上の(メタ)アクリロイルオキシ基を有する9,9−ビスアリールフルオレン類であるフルオレン化合物(C)とを含み、
前記ケイ素化合物(A)と前記ケイ素化合物(B)との割合が、ケイ素原子換算で、前記ケイ素化合物(A)1モルに対して、前記ケイ素化合物(B)0.05〜50モルであり、かつ
前記ケイ素化合物(A)と前記フルオレン化合物(C)との割合が、ケイ素原子換算で、前記ケイ素化合物(A)1モルに対して、前記フルオレン化合物(C)0.05〜50モルである組成物。 - ケイ素化合物(A)において、フルオロアルキルアルコキシシラン又はその加水分解物と、フッ素非含有アルコキシシラン又はその加水分解物との割合が、ケイ素原子換算で、前者/後者(モル比)=1/1〜1/100である請求項1記載の組成物。
- ケイ素化合物(A)が、フルオロアルキルアルコキシシラン又はその加水分解物とテトラアルコキシシラン又はその加水分解物との重縮合物である請求項1又は2記載の組成物。
- ケイ素化合物(A)において、ケイ素原子とフッ素原子との割合が、前者/後者(モル比)=1/0.1〜1/20である請求項1〜3のいずれかに記載の組成物。
- ケイ素化合物(B)において、(メタ)アクリロイルオキシ基を有するアルコキシシラン又はその加水分解物と重合性官能基非含有アルコキシシラン又はその加水分解物との割合が、ケイ素原子換算で、前者/後者(モル比)=1/1〜1/100である請求項1〜4のいずれかに記載の組成物。
- ケイ素化合物(B)が、(メタ)アクリロイルオキシアルキルアルコキシシラン又はその加水分解物とテトラアルコキシシラン又はその加水分解物との重縮合物である請求項1〜5のいずれかに記載の組成物。
- ケイ素化合物(B)において、ケイ素原子と(メタ)アクリロイルオキシ基との割合が、前者/後者(モル比)=1/0.01〜1/1である請求項1〜6のいずれかに記載の組成物。
- ケイ素化合物(A)が、パーフルオロC1−8アルキル−C1−6アルキルモノ乃至トリC1−4アルコキシシラン又はその加水分解物とテトラC1−4アルコキシシラン又はその加水分解物との重縮合物であり、パーフルオロC1−8アルキル−C1−6アルキルモノ乃至トリC1−4アルコキシシラン又はその加水分解物とテトラC1−4アルコキシシラン又はその加水分解物との割合が、ケイ素原子換算で、前者/後者(モル比)=1/3〜1/50であり、かつケイ素化合物(A)において、ケイ素原子とフッ素原子との割合が、前者/後者(モル比)=1/0.5〜1/10であり、
ケイ素化合物(B)が、(メタ)アクリロイルオキシC2−4アルキルモノ乃至トリC1−4アルコキシシラン又はその加水分解物と、テトラC1−4アルコキシシラン又はその加水分解物との重縮合物であり、(メタ)アクリロイルオキシC2−4アルキルモノ乃至トリC1−4アルコキシシラン又はその加水分解物とテトラC1−4アルコキシシラン又はその加水分解物との割合が、ケイ素原子換算で、前者/後者(モル比)=1/3〜1/50であり、かつケイ素化合物(B)において、ケイ素原子と(メタ)アクリロイルオキシ基との割合が、前者/後者(モル比)=1/0.02〜1/0.8であり、
フルオレン化合物(C)が、9,9−ビス((メタ)アクリロイルオキシアリール)フルオレン類および9,9−ビス((メタ)アクリロイルオキシ(ポリ)アルコキシアリール)フルオレン類から選択された少なくとも1種である請求項1〜7のいずれかに記載の組成物。 - ケイ素化合物(A)の割合が、ケイ素化合物(A)に含まれるフッ素原子換算で、組成物中に含まれるケイ素原子1モルに対して、0.05〜10モルであり、
ケイ素化合物(B)の割合が、ケイ素化合物(B)に含まれる(メタ)アクリロイルオキシ基換算で、組成物中に含まれるケイ素原子1モルに対して、0.01〜1モルであり、
フルオレン化合物(C)の割合が、組成物中に含まれるケイ素原子1モルに対して、0.01〜10モルである請求項1〜8のいずれかに記載の組成物。 - ケイ素化合物(A)とケイ素化合物(B)との割合が、ケイ素原子換算で、ケイ素化合物(A)1モルに対して、ケイ素化合物(B)0.1〜10モルであり、
ケイ素化合物(A)とフルオレン化合物(C)との割合が、ケイ素原子換算で、ケイ素化合物(A)1モルに対して、フルオレン化合物(C)0.1〜10モルであり、
ケイ素化合物(A)の割合が、ケイ素化合物(A)に含まれるフッ素原子換算で、組成物中に含まれるケイ素原子1モルに対して、0.05〜5モルであり、
ケイ素化合物(B)の割合が、ケイ素化合物(B)に含まれる(メタ)アクリロイルオキシ基換算で、組成物中に含まれるケイ素原子1モルに対して、0.02〜0.5モルであり、
フルオレン化合物(C)の割合が、組成物中に含まれるケイ素原子1モルに対して、0.05〜5モルである請求項1〜9のいずれかに記載の組成物。 - 基板に請求項1〜10のいずれかに記載の組成物をコーティングし、硬化処理する傾斜膜の製造方法。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012175218A JP5965776B2 (ja) | 2012-08-07 | 2012-08-07 | 傾斜膜形成用組成物およびこの組成物により形成される傾斜膜 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012175218A JP5965776B2 (ja) | 2012-08-07 | 2012-08-07 | 傾斜膜形成用組成物およびこの組成物により形成される傾斜膜 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2014034596A JP2014034596A (ja) | 2014-02-24 |
| JP5965776B2 true JP5965776B2 (ja) | 2016-08-10 |
Family
ID=50283784
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012175218A Active JP5965776B2 (ja) | 2012-08-07 | 2012-08-07 | 傾斜膜形成用組成物およびこの組成物により形成される傾斜膜 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5965776B2 (ja) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016047766A1 (ja) | 2014-09-26 | 2016-03-31 | 東京応化工業株式会社 | 透明体の製造方法、透明体及び非晶質体 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003322706A (ja) * | 2002-05-02 | 2003-11-14 | Omron Corp | 積層型マイクロレンズアレイ |
| JP2004012657A (ja) * | 2002-06-05 | 2004-01-15 | Tokyo Magnetic Printing Co Ltd | 反射防止フィルム |
| JP2004315744A (ja) * | 2003-04-18 | 2004-11-11 | Omron Corp | 硬化物の耐光性に優れた硬化型樹脂組成物 |
| JP4715993B2 (ja) * | 2004-08-04 | 2011-07-06 | 株式会社クラレ | 光硬化性塗工液、硬化性樹脂組成物およびそれらを用いた積層体の製造方法 |
| JP5125507B2 (ja) * | 2005-04-13 | 2013-01-23 | Jsr株式会社 | 樹脂組成物、硬化膜及び積層体 |
| JP4756977B2 (ja) * | 2005-09-28 | 2011-08-24 | 大阪瓦斯株式会社 | 重合性組成物およびその硬化物 |
| JP2008163205A (ja) * | 2006-12-28 | 2008-07-17 | Catalysts & Chem Ind Co Ltd | 透明被膜形成用塗料および透明被膜付基材 |
| JP2009042351A (ja) * | 2007-08-07 | 2009-02-26 | Konica Minolta Opto Inc | 光学フィルム、偏光板及び表示装置 |
| JP5659460B2 (ja) * | 2008-04-03 | 2015-01-28 | 大日本印刷株式会社 | 光学フィルム、及びその製造方法 |
| JP2009271393A (ja) * | 2008-05-09 | 2009-11-19 | Toray Ind Inc | ディスプレイ用フィルター |
| EP2360194B1 (en) * | 2008-11-27 | 2015-03-11 | Toray Industries, Inc. | Siloxane resin composition and protective film for touch panel using same |
| JP5701530B2 (ja) * | 2010-07-22 | 2015-04-15 | 旭化成ケミカルズ株式会社 | 金属顔料組成物 |
| JP5885585B2 (ja) * | 2012-05-21 | 2016-03-15 | 昭和電工株式会社 | 硬化性組成物およびその硬化物 |
-
2012
- 2012-08-07 JP JP2012175218A patent/JP5965776B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2014034596A (ja) | 2014-02-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6260579B2 (ja) | フルオロポリエーテル基含有ポリマー変性シラン、表面処理剤及び物品 | |
| JP4495464B2 (ja) | 集積回路の製造方法 | |
| JP5902216B2 (ja) | 反射防止コーティング用カルボシランポリマー組成物 | |
| KR102593420B1 (ko) | 수지 조성물, 감광성 수지 조성물, 경화막, 경화막의 제조 방법, 패턴 경화막 및 패턴 경화막의 제작 방법 | |
| EP2250213A2 (en) | Silsesquioxane resins | |
| JPWO2020090346A1 (ja) | 紫外線硬化性オルガノポリシロキサン組成物およびその用途 | |
| KR101589165B1 (ko) | 실란계 조성물 및 그 경화막, 및 그것을 이용한 네거티브형 레지스트 패턴의 형성 방법 | |
| JP5469313B2 (ja) | フルオレン骨格を有するケイ素化合物 | |
| JP2011173738A (ja) | 透明焼成体 | |
| JP4756977B2 (ja) | 重合性組成物およびその硬化物 | |
| JP2019006843A (ja) | 含フッ素アクリル化合物及びその製造方法 | |
| JP5297079B2 (ja) | フルオレン骨格を有するケイ素化合物およびその重合性組成物 | |
| JP6751100B2 (ja) | 高屈折率シロキサンモノマー、それらの重合及び用途 | |
| JP5571979B2 (ja) | 新規フルオレン化合物およびその金属酸化物複合体 | |
| JP6951412B2 (ja) | シロキサンモノマー、それらの重合およびそれらの使用 | |
| CN103608407B (zh) | 高折射组合物 | |
| JP5965776B2 (ja) | 傾斜膜形成用組成物およびこの組成物により形成される傾斜膜 | |
| JP6984656B2 (ja) | フルオロポリエーテル基含有ポリマー変性有機ケイ素化合物、表面処理剤及び物品 | |
| KR101865922B1 (ko) | 유기실록산 중합체를 포함하는 저온 경화성 수지 조성물 | |
| JP2011236153A (ja) | 新規フルオレン化合物及びその製造方法、並びにその金属酸化物複合体 | |
| KR102873113B1 (ko) | 저굴절 고분자 화합물 및 이의 제조방법 | |
| FI130717B1 (en) | Low refractive index polysiloxane coatings consisting of thick films | |
| WO2017012715A1 (en) | Modified filler particles and silicone compositions comprising the same | |
| TW202515941A (zh) | 含有支鏈狀有機聚矽氧烷之組成物及其用途 | |
| WO2025153618A1 (en) | Fluorine-free polysiloxane hard coating |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20150402 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20160219 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20160405 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20160526 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20160628 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20160704 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 5965776 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |