JP5872444B2 - Pressure detector - Google Patents

Description

This invention relates to pressure Chikaraken TomoSo location for detecting the pressure in the detection object such as a vacuum pump.

  Conventionally, pressure measuring means such as a vacuum gauge and a pressure gauge are known as means for detecting the pressure state of a detection object that handles gas or liquid. For example, as shown in FIG. 12, as a measurement of the vacuum pump that is the detected object X, a vacuum gauge that is the detected object 10 is attached to the detected object X, and the state of the pump is detected, and the evaluation and analysis To perform the appropriate operation. In order to know the state of the detected pressure, a complicated pressure adjustment mechanism using gears, a display means such as a scale, and a recording means are required, so this pressure detection and detection can be made at low cost. There wasn't.

  As one of such pressure measuring means, there is a mechanical pressure gauge. The mechanical pressure gauge uses a metal part that deforms in response to a change in pressure, and the degree of deformation of the metal part is displayed on a display means such as a scale. It is connected and read through a converter or the like, and a Bourdon tube pressure means, a diaphragm pressure means, a capsule pressure means, a bellows pressure means, and the like are known. This bellows pressure means moves a pointer by pressure deformation of the bellows, and measures the pressure by the pointer, and there are the following prior art documents.

  That is, Patent Document 1 discloses a reserve tank that uses a bellows member. The bellows member of the reserve tank is deformed in one axial direction in response to bending, and the amount of change in the bellows member is detected by a pressure detection means. A probe for measuring is disclosed (see paragraphs [0019], [0022], FIG. 4 and the like).

  Further, in Patent Document 2, a bellows that detects the pressure in the detection unit contracts when the pressure in the electrical device increases, expands when the pressure decreases, and is an indicator bar that interlocks with the movement of the bellows. Has been disclosed in which the position of the mark portion at the tip of the gas moves vertically to indicate the pressure scale, thereby reading and visually checking the gas pressure (see paragraphs [0012], [0013], FIG. 1, etc.). . Patent Document 2 discloses a technique such as a double structure of the bellows (see paragraph [0018], FIG. 2 and the like).

Further, Patent Document 3 discloses that a bellows displacement based on a change in gas pressure in a container is visually observed from the outside through a viewing window (glass plate), and whether the lower end position of the bellows is at a normal level or an abnormal level. Thus, there is disclosed a gas insulating device for judging whether or not an insulating gas such as SF ₆ gas sealed in a container is leaking (see paragraph [0021], FIG. 1 and FIG. 2).

JP2011-155347A Japanese Patent Laid-Open No. 11-108781 JP 2000-114055

  However, such a conventional bellows type pressure means simply utilizes the fact that the bellows is deformed by pressure, and lacks consideration of how to ensure that the expansion and contraction operation of the bellows is stable. It was. In other words, the pressure reduction level of these devices used under reduced pressure is not detected without a power source, and the ON / OFF operation by the bellows is not detected in analog, and the detection result can be easily visually confirmed. It was not visible. For this reason, it has become a complicated mechanism such as a display means using a scale, etc., and it has become an expensive indicator with a large number of parts, so it is not suitable for low cost and small volume bellows such as simple vacuum gauges and pressure gauges It was not a formula pressure means.

  In addition, the bellows itself does not take into consideration that the amount of expansion / contraction of the bellows is linearly related to the change in pressure. Especially when the bellows is constituted by a flexible member such as rubber or resin, the bellows itself is repeatedly expanded and contracted. There was a risk that it would grow as time passed and could be fully compressed (adhered) at the same time as decompression. In other words, as the number of compressions increases, the free space becomes shorter, and there is a possibility that the bellows will not return to its original length when released to the atmosphere, and it has been impossible to achieve a long life with high accuracy.

  The applicant of the present application has conducted intensive research to meet such demands. As a result, it is possible to cope with cost reduction and volume reduction, and a bellows pressure means such as a vacuum gauge or a pressure gauge is used. The present invention has been completed.

The present invention has been made from the above viewpoint, to visually recognize the value of the pressure that the pressure in the sensing object analog manner to detect without power, was detected in either One easily, such as a vacuum pump and an object thereof is to provide a pressure sensing equipment that can.

In order to achieve the above object, a pressure detection device according to the present invention is a pressure detection device for detecting a pressure in a body to be detected, in which one end side is sealed and the other end side is connected to the body to be detected. A bellows member, a cylindrical housing that accommodates the bellows member, and an expansion / contraction reinforcement mechanism disposed inside the bellows member, and the peripheral surface of the bellows member is a bellows that expands and contracts in the axial direction of the housing, the peripheral surface, the peripheral surface window visible bellows member is formed, stretchable reinforcing mechanism, have a spring biasing the bellows member in the direction of elongation, on the peripheral surface of the bellows member, the window A visible mark is provided in a region that can be observed in (1).
Moreover, in the pressure detection apparatus of this invention, it is preferable that a spring is a helical spring and the expansion / contraction reinforcement mechanism has a telescopic pipe arrange | positioned inside the spring.
Further, in the pressure detection device of the present invention, the pipe has a first pipe member having a first flange portion that comes into contact with one end of the spring, and a second pipe portion that comes into contact with the other end of the spring, and the first pipe It is preferable that the second pipe member is movable relative to the member in the axial direction.
Moreover, in the pressure detection apparatus of this invention, it is preferable that the width | variety of the window part becomes narrow gradually along the axial direction of a housing.
In the pressure detection device of the present invention, it is preferable that the marker has a colored portion and a non-colored portion provided so as to be adjacent to the colored portion in the axial direction of the housing.

In order to achieve the above object, the pressure detection device of the present invention is a pressure detection device for detecting the pressure in the body to be detected, wherein one end side is sealed and the other end side is connected to the body to be detected. A cylindrical bellows member and a cylindrical housing that accommodates the bellows member, and the peripheral surface of the bellows member is a bellows that expands and contracts in the axial direction of the housing, and the peripheral surface of the housing includes the peripheral surface of the bellows member Is formed on the peripheral surface of the bellows member, and a visible mark is provided in an area observable in the window portion. The width of the window portion gradually increases along the axial direction of the housing. It is narrowed.
In the pressure detection device of the present invention, it is preferable that the marker has a colored portion and a non-colored portion provided so as to be adjacent to the colored portion in the axial direction of the housing.

According to this invention, on the assumption that the expansion and contraction amount of the bellows has a linear relationship with the change in pressure, this can be detected in an analog manner, and can be detected without a power source, without using a power source, The display means will be visually recognized through the monitoring window as the bellows expands and contracts, and it does not have a complicated mechanism that does not use scales, etc., has a small number of parts, and is a pressure indicator that provides a vacuum indicator that shows the pressure status at a glance. it is possible to provide a location.

In addition, when the resin bellows is provided with an expansion / contraction reinforcement mechanism, it can further respond to and cooperate with the expansion / contraction operation of the bellows, and the linearity in which the expansion / contraction amount of the bellows has a linear relationship with the change in pressure can be improved. it is possible to provide a pressure sensing equipment.

It is an external view which shows the detection apparatus of the pressure by the bellows which concerns on this invention. FIG. 2 is an exploded perspective view of FIG. 1. It is a longitudinal cross-sectional view which shows the main internal structures of FIG. It is a longitudinal cross-sectional view which shows the expansion-contraction operation | movement of the bellows in FIG. It is explanatory drawing of the bellows which shows the case where it visually recognizes from the monitoring window which concerns on this invention. It is a longitudinal cross-sectional view explaining an example of the internal structure of FIG. It is an external view which shows 2nd Example based on this invention. It is a longitudinal cross-sectional view which shows the internal structure of FIG. It is a perspective view which shows the metal spring body and metal or resin pipes of the expansion-contraction reinforcement mechanism in FIG. It is explanatory drawing which shows an example of the display means in FIG. It is a graph which shows the proportional relationship of the compression amount and pressure in FIG. It is explanatory drawing which shows the usage example of a detection body.

Embodiments of the present invention will be described below with reference to the drawings. The first example is a reference example of the present invention, and the second example is an example of the present invention. 1 to 6 show a first embodiment of the present invention. The detection body 10 is connected to the detection object X such as a vacuum pump as shown in FIG. 12, and is configured such that the cap body 11 and the housing 12 are integrated as shown in FIG. The housing 12 has an expandable / contractible bellows 14 and the bellows 14 can be seen through the monitoring window 13 of the display means 16.

  2 shows an exploded perspective view of FIG. 1. As shown in FIG. 3, the cap body 11 is formed of a hollow cylindrical body, and a screw portion is provided on the outer periphery on the tip side (left side in the figure). 11b is provided, and a hollow passage 11c is provided at the center thereof. Further, the housing 12 is formed of a hollow cylindrical body, and one side (right side in the figure) is a bottomed portion 12a that is a closed bottom surface, in which a bellows 14 that can be expanded and contracted in the axial direction is disposed. The detected object X (not shown in FIG. 3) and the detecting body 10 are interlocked with each other through the hollow passage 11c of the cap body 11, and the pressure state of each other is measured.

Further, one or more monitoring windows 13 constituting the display means 16 are opened at desired locations around the housing 12. This display means 16 allows the bellows 14 in the housing 12 to be visually inspected through the monitoring window 13 so that the non-colored portion 16a or the colored portion 16b moving with the expansion / contraction of the bellows 14 can be seen. (See FIGS. 5A and 5B). Reference numeral 15 denotes a concave cover portion provided on the bottomed portion 12 a side of the bellows 14, and is arranged so as to insert and fit one side (right side in the drawing) of the bellows 14. One side of is supported more reliably.

  For example, as shown in FIG. 4A, when the detection body 10 is under atmospheric pressure, the bellows 14 in the detection body 10 is in an extension with respect to the axial direction. At this time, the bellows 14 visually recognized from the monitoring window 13 is visually recognized as the non-colored portion 16a (normal bellows color), and the detected object X and the detected object 10 are recognized as being in an atmospheric pressure state, that is, an OFF state. Therefore, this extended state (OFF state) is visually recognized through the monitoring window 13.

  Further, as shown in FIG. 4B, when the detecting body 10 enters from the atmospheric pressure to the reduced pressure, the bellows 14 in the detecting body 10 is sequentially reduced in the axial direction according to the reduced pressure state. The At this time, the bellows 14 visually recognized from the monitoring window 13 is viewed as the colored portion 16b (the colored portion of the bellows on the right side in the figure), and the detected object X and the detected object 10 are in a state of being under reduced pressure, that is, the ON state. Therefore, the contracted state (ON state) is visually recognized through the monitoring window 13.

  In addition, the non-colored part 16a or the colored part 16b in the display means 16 is not limited to this as long as it can be visually recognized. Further, when a plurality of display means 16 are provided, the display means 16 can be viewed from all angles of 360 degrees, and the display means 16 can be provided with an enlargement function so that the pressure state can be grasped at a glance. The design can be changed.

  Thus, in this embodiment, the pressure state of the detection body 10 connected to the detection body X such as a vacuum pump is assumed on the assumption that the expansion / contraction amount of the bellows 14 has a linear relationship with the change in pressure. In addition to detecting in an analog manner, it is detected without a power source without using a power source, and is easily visually recognized as a simple display means. The display means 16 is an indicator that does not use a complicated display means such as a conventional scale, and is easily visually recognized through the monitoring window 13 with a difference in color tone.

An example of a more detailed internal structure and display means of the detection body 10 is shown in FIG . That is, the internal structure of the cap body 11 includes a base portion 11a, a screw portion 11b, and a passage 11c. A step portion 11d, a first recess portion 11e, a second recess portion 11f, a third recess portion 11g, and a female screw are formed on the inner peripheral wall surface of the base portion 11a. A receiving recess 11h and the like are provided. Further, the front tube portion 14 a of the bellows 14 inserted into the cap body 11 includes an O-ring 17 inserted into the step portion 11 d of the cap body 11, and a bulging portion 14 b fitted into the first recess 11 e of the cap body 11. A portion where the packing 18 is fitted and in contact with the second recess 11f of the cap body 11, a third recess 11g of the cap body 11, and a male screw portion 14c joined to the female screw receiving recess 11h are provided.

  On the other hand, the structure of the housing 12 surrounds the circumferential direction with a bottomed portion 12a having a closed bottom surface on one side (right side in the drawing), an open portion 12b with the end surface on the other side (left side in the drawing) released. A side wall 12c, display means 16 opened at desired locations on the side wall 12c, and a plurality of monitoring windows 13 are provided.

  Further, a concave cover portion 15 is disposed on the bottomed portion 12a side of the bellows 14 so as to insert and fit one side of the bellows 14 (the right side in the figure). It is supported more reliably. Moreover, the part of the bellows 14 is a colored part 16b provided by, for example, painting, and the other part is a non-colored part 16a.

  The following means can be selected. The cap body 11 and the housing 12 constituting the detection body 10 can be made of a flexible member such as rubber or resin, a metal member, or the like, and a joining method or a combination method thereof can be freely selected as appropriate. For example, in this example, PFA (tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer) was selected, but it can be composed of PE (polyethylene), a combination of iron and UNIQLO plating, stainless steel, other A metal, a resin member, or a rubber member can be selected, and a material can be freely selected according to a device to be detected.

Further, it is assumed that the metallic threaded structures fit to the other party apparatus such as a cap body 1 1 of the sensing member 10, it can also be configured to nipple also its original unit. Further, the internal structure of the detection body 10 can also be a combination of a bellows + O-ring + clamping / screwing part as a tightening part, a bellows + insertion joint, etc. Various other means such as reverse taper can be selected. it can.

  Next, a second embodiment will be described with reference to FIGS. The second embodiment is configured in substantially the same manner as the first embodiment described above, but particularly shows a bellows such as a rubber material or a resin material which is a flexible member. In the description, the bellows will be described as a resin material, but the other parts are substantially the same as those in the first embodiment. Conventionally, when the bellows is made of a resin material, the bellows itself is stretched over time due to repeated expansion and contraction, and may be fully compressed (adhered) simultaneously with decompression. In other words, as the number of compressions increases, the free space becomes shorter, and there is a risk that the bellows will not return to its original length when released to the atmosphere.

  For this reason, in this 2nd Example, it is set as the structure provided with the expansion-contraction reinforcement mechanism 20 inside the resin bellows 14. FIG. That is, the expansion / contraction reinforcement mechanism 20 is provided with a metal spring body 21 that is a compressible spring that cooperates in response to the expansion / contraction operation of the resin bellows 14, and the metal spring body 21 is attached from the inside thereof. It is supported by a metal or resin pipe 22 (see FIGS. 8 and 9).

  Further, the display means 16 is formed over 360 degrees on the outer periphery of the detection body 10 to improve the visibility of the bellows 14 viewed from the monitoring window 13, and the bellows 14 is provided at a desired position of the display means 16. The visibility of the non-colored portion 16a or the colored portion 16b that appears along with the expansion and contraction is improved by a scale 19 with numerical values such as 10 KPa, 50 KPa, and 100 KPa.

  This will be described with reference to FIGS. 4A, 4B, 4C, 5A, 5B, and 10. FIG. That is, at atmospheric pressure (100 KPa), the resin bellows 14 is in an extended state as shown in FIGS. 10A and 4A, so that it is visually recognized as the color of the non-colored portion of the normal resin bellows 14. It is immediately known that it is in the OFF state.

  Further, in the reduced pressure state (100 KPa → 10 KPa), the resin bellows 14 is in the contracted state as shown in FIGS. 10B, 10C, and 4B, so that the colored portion of the resin bellows 14 is reduced. It will be visually recognized sequentially as a color, and it is immediately known that it is in the ON state.

  More specifically, the following Example 1 will be described. The expansion / contraction reinforcement mechanism 20 is a metal spring body 21 with a compression spring of φ10, and the spring body 21 made of this genus is disposed on the inside thereof and is mounted on the outer periphery of a metal or resin pipe 22. Further, the expansion / contraction reinforcement mechanism 20 is mounted so as to extend from one end portion which is the bottomed portion 12a of the resin bellows 14 to the other end portion of the front tube portion 14a. Therefore, the resin bellows 14 is in an extended state under atmospheric pressure (100 KPa) (see FIGS. 10A and 4A), and in a reduced pressure state (100 KPa → 10 KPa), the resin bellows 14 is gradually reduced according to the reduced pressure state. The long state is set (see FIGS. 10B and 10C and FIG. 4B), and the proportional relationship as shown in Table 1 below is formed.

  As can be seen from the graphs in Table 1 and FIG. 11, the resin bellows 14 has a metal spring body 21 inserted therein, so that a high degree of vacuum can be managed with a good proportional compression of 100 KPa → 10 KPa. Various bellows expansion / contraction reinforcement mechanisms 20 are selected as long as they reinforce the expansion / contraction operation of the resin bellows 14 and maintain a proportional relationship.

  As described above, according to the first and second embodiments, the state of the detected object X such as a vacuum pump is detected so that the expansion / contraction amount of the bellows 14 becomes more linear due to the change in pressure. It can be easily detected visually and without power as the resin bellows 14 is expanded or contracted by a flexible member such as rubber or resin. In addition, the expansion and contraction operation repeatedly performed in the resin bellows 14 does not cause the bellows to be fully compressed (adhered to) at the same time as the pressure is reduced, and the free surface is shortened as the number of compressions is increased. Can be prevented from returning to its original length, and the level of vacuum can be sufficiently controlled to achieve a long life with high accuracy.

  This invention relates to chemical experiment equipment, vacuum adsorption, etc. in the field of scientific equipment, air conditioner gas replacement equipment, label adsorption, printing machine, carbon fiber resin impregnation (CFRP) in the field of electrical machinery and machinery, and vacuum tweezers in the field of electronic equipment. , In the field of wafer transfer, earthwork and construction, vacuum concrete, suction pressure feeding method, vacuum squeeze method, in the field of agricultural food, milking machine, vacuum kneader, vacuum heating cooker, suction transfer, dental in the field of medical equipment It can be applied in various ways such as intra-oral vacuum, vacuum blood collection tube, vacuum iron, futon pack, vacuum cleaner, home vacuum pack.

X Detected object 10 Detected object 11 Cap body 11a Base part 11b Screw part 11c Passage 11d Step part 11e First recessed part 11f Second recessed part 11g Third recessed part 11h Female thread receiving recessed part 12 Housing 12a Bottomed part 12b Opening part 12c Side wall part 13 Monitoring Window 14 Bellows 14a Lead tube portion 14b Expansion portion 14c Male thread portion 15 Cover portion 16 Display means 16a Non-colored portion 16b Colored portion 17 O-ring 18 Packing 19 Scale 20 Stretch reinforcement mechanism 21 Metal spring body 22 Metal or resin Made of pipe

Claims (7)

A pressure detection device for detecting the pressure in the body to be detected,
A cylindrical bellows member having one end sealed and the other end connected to the body to be detected; a cylindrical housing that houses the bellows member; and an expansion and contraction reinforcement mechanism disposed inside the bellows member. Prepared,
The peripheral surface of the bellows member is a bellows that expands and contracts in the axial direction of the housing,
On the peripheral surface of the housing, a window portion is formed in which the peripheral surface of the bellows member is visible,
The extendable reinforcing mechanism, have a spring biasing the bellows member in the direction of elongation,
A pressure detecting device , wherein a visible mark is provided on a peripheral surface of the bellows member in an area that can be observed by the window . The pressure detection device according to claim 1,
The spring is a spiral spring;
The pressure detecting device, wherein the expansion / contraction reinforcing mechanism includes an expandable / contractible pipe disposed inside the spring. The pressure detection device according to claim 2,
The pipe has a first pipe member having a first flange portion that comes into contact with one end of the spring, and a second pipe portion that comes into contact with the other end of the spring, and is axially disposed with respect to the first pipe member. A pressure sensing device comprising a second pipe member that is relatively movable. It is a pressure sensing device given in any 1 paragraph of Claims 1-3,
The pressure detector according to claim 1, wherein the width of the window portion is gradually reduced along the axial direction of the housing. The pressure detection device according to any one of claims 1 to 4,
The said marker has a colored part and the non-colored part provided so that it might adjoin the said colored part in the axial direction of the said housing, The pressure detection apparatus characterized by the above-mentioned. A pressure detection device for detecting the pressure in the body to be detected,
A cylindrical bellows member sealed at one end and connected to the body to be detected at the other end, and a cylindrical housing that houses the bellows member;
The peripheral surface of the bellows member is a bellows that expands and contracts in the axial direction of the housing,
On the peripheral surface of the housing, a window portion is formed in which the peripheral surface of the bellows member is visible,
On the peripheral surface of the bellows member, a visible mark is provided in an area observable in the window portion,
The pressure detector according to claim 1, wherein the width of the window portion is gradually reduced along the axial direction of the housing. The pressure detection device according to claim 6,
The said marker has a colored part and the non-colored part provided so that it might adjoin the said colored part in the axial direction of the said housing, The pressure detection apparatus characterized by the above-mentioned.

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