JP5752889B2 - Transfer method - Google Patents

Description

  The present invention relates to a transfer method for transferring a fine transfer pattern formed on a sheet-shaped mold to a molded product.

  In recent years, a mold (mold) is produced by forming an ultra-fine transfer pattern on a quartz substrate or the like by an electron beam drawing method, and this mold is pressed against a product to be molded with a predetermined pressure, and the transfer formed on the mold. A nanoimprint technique for transferring a pattern has been researched and developed (for example, see Non-Patent Document 1). Recently, in a rotary storage device such as a hard disk, CD, or DVD, there is a growing interest in a method that uses nanoimprint technology as a means for forming a storage medium (recording medium) for forming high-density data on a disk. It is coming.

  As a method for forming a nano-order fine transfer pattern at a low cost, a nanoimprint method using a lithography technique has been devised. This molding method is roughly classified into a thermal imprint method and a UV imprint method.

  In the thermal imprint method, a mold is pressed against a substrate, heated to a temperature at which a resin made of a thermoplastic polymer (thermoplastic resin) can flow sufficiently, and the resin flows into a fine pattern. The resin is cooled to below the glass transition temperature, the fine pattern transferred to the substrate is solidified, and then the mold is pulled apart.

  In the UV imprint method, a transparent mold capable of transmitting light is used, and the mold is pressed against an ultraviolet curable resin and irradiated with ultraviolet light. After irradiating ultraviolet rays for an appropriate time to cure the ultraviolet curable resin and transfer the fine pattern, the mold is pulled back.

  FIG. 6 shows the procedure of the conventional UV imprint method described in Patent Document 1. As shown in FIG. 6, an uncured ultraviolet curable resin 120 is applied to the upper surface of the flat substrate 110 with a predetermined thickness, and the mold 130 faces the ultraviolet curable resin 120. The mold 130 has a transparent sheet shape, and a fine transfer pattern (not shown) is formed on the lower surface 131 thereof. The mold 130 is disposed so that the lower surface 131 faces the ultraviolet curable resin 120 on the substrate 110.

  A roller 140 is used as the pressing member. The roller 140 is disposed so as to face the upper surface 132 of the mold 130 and is connected to a pressing source (not shown) to press the mold 130 against the ultraviolet curable resin 120 with a predetermined pressure P. The pressure P at the time of pressing is set so that the ultraviolet curable resin 120 enters the fine pattern on the lower surface 131 of the mold 130. During pattern transfer, the roller 140 can rotate in the clockwise direction indicated by the arrow R.

  As shown in FIG. 6, the lower surface 131 of the mold 130 is opposed to the ultraviolet curable resin 120 on the substrate 110 and the upper surface 132 of the mold 130 is pressed by the roller 140. In this state, the mold 130 is pressed by the pressure P. Then, the roller 140 is linearly moved in the direction indicated by the arrow M (see FIG. 7). Along with this movement, the roller 140 is also rotated in the arrow R direction. And the ultraviolet curable resin 120 in the said site | part is hardened by irradiating the ultraviolet-ray to the site | part of the ultraviolet curable resin 120 currently pressed by the roller 140. FIG.

  The roller 140 may be fixed, and the entire laminate of the substrate 110, the ultraviolet curable resin 120, and the mold 130 may be linearly moved in the direction opposite to the M direction.

  As the roller 140 moves in the M direction, the ultraviolet curable resin 120 enters the fine pattern on the lower surface 131 of the mold 130 by the pressing force of the roller 140, and the transfer pattern of the mold 130 is transferred to the upper surface of the ultraviolet curable resin 120. Thereby, the upper surface of the ultraviolet curable resin 120 becomes the transfer pattern forming surface 150 (see FIG. 8).

  Then, the cured ultraviolet curable resin 120 and the mold 130 are peeled off, and the operation is completed. In some cases, ultraviolet rays are irradiated in the state shown in FIG.

  In the above nanoimprint, when transferring a fine transfer pattern formed on a mold to a molded product such as an ultraviolet curable resin, the mold and the molded product are used to prevent bubbles from being generated in the molded product. There is known a transfer device configured to perform transfer in a vacuum molding chamber by covering the cover with a cover (for example, see Patent Document 2).

JP 2007-19451 A JP 2006-318773 A

Precision Engineering Journal of the International Societies for Precision Engineering and Nanotechnology 25 (2001) 192-199

  In the UV imprint method described above, in order to transfer the transfer pattern with high accuracy, it is necessary to control the linear movement of the roller 140 as a pressing member with high accuracy. FIG. 7 shows the traveling state of the roller 140 when the linear movement of the roller 140 is not performed with high accuracy. The roller 140 travels while meandering on the mold 130 in the vertical direction, resulting in poor traveling accuracy. ing. When the running accuracy of the roller 140 is poor as described above, the UV curable resin 120 on the lower side of the mold 130 is affected, and the film thickness of the UV curable resin 120 varies as shown in FIG. give.

  Further, as factors of the film thickness fluctuation of the ultraviolet curable resin 120 shown in FIG. 7 and FIG. In order to move the roller 140 with high accuracy and to make the film thickness of the UV curable resin 120 constant, a supporting structure such as a bearing that supports the roller 140 and a moving structure such as a guide rail for movement are highly improved. Need to be accurate. Further, in order to make the film thickness of the ultraviolet curable resin 120 constant, it is necessary to improve the cylindrical degree of the roller 140 and the runout of the rotation center of the roller 140.

  However, in a transfer apparatus that performs imprinting at a nano level, there is a problem that it is difficult to manufacture the roller 140 and a mechanism for moving the roller 140 with high accuracy. Such a problem occurs in the same manner when the substrate 110 is not linearly moved with high accuracy even if the roller 110 is fixed and the substrate 110 is moved linearly.

  The present invention has been made in view of the above problems, and even when the movement accuracy of the movement of the roller and the substrate is poor, the accuracy can be easily compensated for, and the film thickness of the ultraviolet curable resin. It is an object of the present invention to provide a transfer method capable of suppressing fluctuations.

In the first aspect of the present invention, the sheet-shaped first mold is made to face the first ultraviolet curable resin provided on the first substrate, and then a roller is pressed against the first mold. In this state, at least one of the roller or the first substrate is linearly moved relative to the other, and the portion of the first ultraviolet curable resin pressed by the roller is cured. A dummy molded body manufacturing stage for manufacturing a dummy molded body having a pressing member moving surface formed thereon, and a sheet on which a fine transfer pattern is formed on the second ultraviolet curable resin provided on the second substrate After the pattern forming surface of the second mold having the shape is made to face, the dummy molded body is placed on the second mold so that the pressing member moving surface is positioned on the opposite side to the second mold. The roller in front During that while pressed by the pressing member moving surface by relatively moving at least one of the rollers or the second substrate relative to the other, the position of the dummy green body with respect to the roller in the dummy molded body production step In this case, the second ultraviolet curable resin is cured while moving the roller relative to the pressing member moving surface, and the transfer pattern of the second mold is changed to the second ultraviolet curable resin. And a transfer stage for transferring to the recording medium.

According to a second aspect of the invention, a transfer method of claim 1, wherein said dummy molded body is the first ultraviolet curing resin, the pressing member moving surface is the first ultraviolet curing resin It is formed.

The invention according to claim 3 is the transfer method according to claim 1, wherein the dummy molded body is obtained by integrating the first ultraviolet curable resin and the first mold, and the pressing wherein the member moving surface is formed on the first mold.

Invention of Claim 4 is the transfer method of Claim 1, Comprising: As for the said dummy molded object, the said 1st board | substrate, the said 1st ultraviolet curable resin, and the said 1st mold are integrated. It is those, wherein the pressing member moving surface is formed on the first mold.

  According to the present invention, since the transfer is performed using the dummy molded body on which the pressing member moving surface is formed, even if the moving accuracy of the movement of the roller or the substrate is poor, the accuracy can be easily compensated. It is possible to produce an effect that fluctuations in the film thickness of the ultraviolet curable resin can be suppressed.

It is a front view which shows the molded object production step in one Embodiment of this invention. It is a front view which shows the dummy molded object produced in the molded object production stage. It is a front view which shows the transcription | transfer stage in one Embodiment. It is a front view which shows the transcription | transfer stage in another embodiment of this invention. It is a front view which shows the transcription | transfer stage in another embodiment of this invention. It is a front view which shows the conventional transfer method. It is a front view explaining the running accuracy of the roller in the conventional transfer method. It is a front view which shows the bad influence of the roller in the conventional forming method.

  1 to 3 show a transfer method according to an embodiment of the present invention for performing nanoimprint (fine transfer), FIG. 1 is a front view showing a dummy molded body production stage, and FIG. 2 is a dummy molded body production. FIG. 3 is a front view showing the transfer stage, and FIG. 3 is a front view showing the dummy molded body 6 produced in the stage.

  The transfer method according to this embodiment includes a dummy molded body production stage and a transfer stage. In the transfer stage, transfer is performed using the dummy molded body obtained in the dummy molded body production stage.

  In the dummy molded body production stage, the first substrate 1, the first ultraviolet curable resin 2, the first mold 3, and the roller 7 are used. The first substrate 1 has a flat plate shape, and an uncured first ultraviolet curable resin 2 is applied to the upper surface thereof with a predetermined thickness. The uncured ultraviolet curable resin 2 is a low-viscosity sol and is applied to the first substrate 1 so as to have a thickness of about a thin film.

  The first mold 3 has a transparent sheet shape capable of transmitting ultraviolet light, and is disposed so that the lower surface faces the first ultraviolet curable resin 2. The roller 7 is disposed on the upper surface of the first mold 3 so as to come into contact therewith.

  The roller 7 is a pressing member that presses the first mold 3 against the first ultraviolet curable resin 2, and presses the first mold 3 with a predetermined pressure so as to contact the first mold 3. The pressure of the roller 7 is adjusted so as to be substantially equal to the pressure at the transfer stage described later. The roller 7 moves the upper surface of the first mold 3 while pressing the first mold 3, and moves to the first ultraviolet curable resin 2 below the first mold 3 by moving while pressing. A pressing member moving surface 5 is formed. In this case, the roller 7 moves while rotating clockwise. In such a dummy molded body production stage, the roller 7 may be brought into contact without pressing the first mold 3 or with a small pressing force.

  In the dummy molded body production stage of this embodiment, as shown in FIG. 1, the lower surface of the first mold 3 is applied to the thin film-like first ultraviolet curable resin 2 applied on the first substrate 1. The rollers 7 are arranged so as to face each other and press against the upper surface of the first mold 3. Then, the roller 7 is moved in the direction indicated by the arrow M while pressing the first mold 3 with a predetermined pressure. When the roller 7 moves, it is difficult for the roller 7 to move linearly with high accuracy due to the accuracy of the transfer device itself, the mechanical defect of the transfer device, and other causes. It runs on the upper surface of the first mold 3. Therefore, this meandering is transmitted to the first ultraviolet curable resin 2 on the lower side of the first mold 3, and irregularities corresponding to the running accuracy of the roller 7 are formed on the upper surface of the first ultraviolet curable resin 2.

  When the roller 7 moves, ultraviolet light is irradiated from above the first mold 3. The irradiated ultraviolet light passes through the transparent first mold 3 and reaches the first ultraviolet curable resin 2 to be cured. In this case, the ultraviolet light irradiation is performed in synchronization with the movement of the roller 7. That is, the first ultraviolet curable resin 2 pressed by the roller 7 (part extending linearly in the direction orthogonal to the paper surface of FIG. 1) is irradiated with ultraviolet light (linear in the direction orthogonal to the paper surface of FIG. 1). The ultraviolet ray curable resin 2 in the pressed portion is cured by irradiating an ultraviolet ray bundle (moving with the roller 7). By the irradiation of the ultraviolet rays, the first ultraviolet curable resin 2 is cured. By curing the first ultraviolet curable resin 2, a dummy molded body 6 using the first ultraviolet curable resin 2 as a base is produced.

FIG. 2 shows the dummy molded body 6 produced in the above-described dummy molded body production stage, and the pressing member moving surface 5 is formed on the upper surface of the first ultraviolet curable resin 2 facing the first mold 3. . The pressing member moving surface 5 of the dummy molded body 6 is formed by unevenness according to the running accuracy of the roller, etc. For this reason, the dummy molded body 6 has a poor film thickness uniformity. By forming the pressing member moving surface 5 as described above, it is possible to compensate for the movement accuracy of the roller in the transfer stage as will be described later. The lower surface of the dummy molded body 6 is planar because it is supported by the flat first substrate 1. By using the dummy molded body 6 in the next transfer stage, the variation in running accuracy of the roller 7 can be canceled, and the uniform film thickness accuracy of the second ultraviolet curable resin 12 can be ensured.

FIG. 3 shows the transfer stage following FIG. In the transfer stage, the second substrate 11 , the second ultraviolet curable resin 12, the second mold 13, the roller 7, and the dummy molded body 6 are used.

  The second substrate 11 has a flat plate shape, and an uncured second ultraviolet curable resin 12 is applied to the upper surface of the second substrate 11 at a predetermined thickness. The uncured second ultraviolet curable resin 12 is a low-viscosity sol, and is applied to the first substrate 11 so as to have a thickness of about a thin film.

The second mold 13 is in the form of a transparent sheet capable of transmitting ultraviolet light, and a fine transfer pattern (not shown) for nanoimprinting is formed on the lower surface 14 thereof. The transfer pattern is formed with a large number of fine irregularities, and has a height or pitch that is about the wavelength of visible light, slightly larger than the wavelength of visible light, or slightly smaller. The second mold 13 is disposed so that the lower surface 14 faces the second ultraviolet curable resin 12 applied on the second substrate 11. The upper surface 15 of the second mold 13 is a flat surface, and the dummy molded body 6 is placed on the upper surface 15.

  The dummy molded body 6 is disposed such that the flat lower surface is in contact with the upper surface of the second mold 13. That is, the dummy molded body 6 is placed on the second mold 13 so that the pressing member moving surface 5 is located on the opposite side of the second mold 13. The dummy molded body 6 is placed on the second mold 13 so as to cover the transfer pattern formed on the lower surface 14 of the second mold 13.

  On the dummy molded body 6, a roller 7 is disposed. As the roller 7, the roller used in the above-described dummy molded body manufacturing stage is used. That is, the same transfer device is used in the dummy molded body production stage and the transfer stage. In addition, the position of the dummy molded body 6 with respect to the roller 7 (the position in the direction orthogonal to the paper surface in FIG. 3 and the position in the left-right direction in FIG. 3) is the same as in the dummy molded body manufacturing stage described above. .

  The roller 7 is a member that presses the second mold 13 against the second ultraviolet curable resin 12 in order to transfer the transfer pattern of the second mold 13 to the second ultraviolet curable resin 12. The second mold 13 is pressed with a predetermined pressure P. The pressure P is set so that the second ultraviolet curable resin 12 enters the transfer pattern of the second mold 13. During pattern transfer, the roller 7 rotates clockwise as indicated by an arrow R.

  In the transfer stage, as shown in FIG. 3, the lower surface 14 of the second mold 13 is placed facing the thin-film second ultraviolet curable resin 12 applied on the second substrate 11. . Then, the dummy molded body 6 is placed on the upper surface 15 of the second mold 13. The dummy molded body 6 is placed on the second mold 13 such that the planar lower surface is in contact with the upper surface of the second mold 13. On the other hand, the pressing member moving surface 5 of the dummy molded body 6 is located on the upper surface, and the roller 7 faces the pressing member moving surface 5.

  A roller 7 is disposed on the pressing member moving surface 5 of the dummy molded body 6. The roller 7 is disposed so as to come into contact with the dummy molded body 6 at the movement start end. From this movement start end, the roller 7 rotates in the direction of the arrow R and moves on the pressing member moving surface 5 in the direction indicated by the arrow N while pressing the dummy molded body 6 with a predetermined pressure P. The dummy molded body 6 has poor film thickness uniformity, and the pressing member moving surface 5 has irregularities corresponding to the running accuracy of the roller 7, so that the roller 7 moves on the pressing member moving surface 5. Thus, variation in running accuracy of the roller 7 can be canceled. Thereby, the movement accuracy of the roller 7 can be compensated.

  Next, ultraviolet light is irradiated from above the dummy molded body 6 and the second mold 13. The irradiated ultraviolet light passes through both the transparent dummy molded body 6 and the second mold 13 and reaches the second ultraviolet curable resin 12, and the second ultraviolet curable resin 12 is cured. In this case, similarly to the case where the dummy molded body 6 is cured, the light source is moved in synchronization with the movement of the roller 7 to irradiate the second ultraviolet curable resin 12 with ultraviolet light.

  Thereafter, the mold 13 is peeled off from the cured second ultraviolet curable resin 12. In addition, you may make it peel the mold 13 from the site | part which the 2nd ultraviolet curing resin 12 hardened | cured at any time. That is, partial peeling between the mold 13 and the cured ultraviolet curable resin 12 may be sequentially performed as the ultraviolet light moves.

  In addition, after the press to the whole 2nd ultraviolet curable resin 12 is complete | finished, the 2nd ultraviolet curable resin 12 may be hardened by irradiating the whole 2nd ultraviolet curable resin 12 with an ultraviolet light.

  In such an embodiment, after the pressing member moving surface 5 is formed on the dummy molded body 6 in the dummy molded body manufacturing stage, the dummy molded body 6 is placed on the second mold 13 in the transfer stage, and the pressing member Since the roller 7 is moved along the moving surface 5, the running accuracy of the roller 7 can be canceled and the running accuracy of the roller 7 can be compensated. Thereby, the 2nd ultraviolet curing resin 12 can be made into uniform film thickness precision.

  4 and 5 show other embodiments of the present invention, respectively, and the same members as those in the embodiments shown in FIGS.

In the embodiment shown in FIG. 4, the first ultraviolet curable resin 2 and the first mold 3 used in the dummy molded body production stage are integrated as the dummy molded body 6A. In the dummy molded body 6A of this embodiment, the lower surface of the first ultraviolet curable resin 2 is planar, and the planar lower surface is brought into contact with the planar upper surface of the second mold 13, and this contact is made. In the state, the entire dummy molded body 6 </ b> A is placed on the second mold 13.

  In the dummy molded body 6 </ b> A, the upper surface of the first mold 3 is an uneven pressing member moving surface 8, and the roller 7 moves in the direction of the arrow N with respect to the pressing member moving surface 8. The second mold 13 is pressed against the second ultraviolet curable resin 12 through 6A. As a result, the transfer pattern of the second mold 13 is transferred to the second ultraviolet curable resin 12. Also in the embodiment shown in FIG. 4, since the roller 7 is moved relative to the pressing member moving surface 8 of the dummy molded body 6A, the pressing member moving surface 8 can cancel the running accuracy of the roller 7, and the second The ultraviolet curable resin 12 can have uniform film thickness accuracy.

  In the embodiment shown in FIG. 5, the first molded body 1, the first ultraviolet curable resin 2, and the first mold 3 used in the dummy molded body production stage are integrated as the dummy molded body 6 </ b> B. is there. In the dummy molded body 6B, the lower surface of the first substrate 1 is planar, and the planar lower surface is brought into contact with the planar upper surface of the second mold 13, and in this contact state, the dummy molded body 6B. Is placed on the second mold 13. In the dummy molded body 6 </ b> B, the upper surface of the first mold 3 is an uneven pressing member moving surface 9, and the roller 7 moves in the direction of arrow N with respect to the pressing member moving surface 9. The second mold 13 is pressed against the second ultraviolet curable resin 12 through 6B. As a result, the transfer pattern of the second mold 13 is transferred to the second ultraviolet curable resin 12. Also in the embodiment shown in FIG. 5, since the roller 7 is moved with respect to the pressing member moving surface 9 of the dummy molded body 6B, the traveling accuracy of the roller 7 can be canceled by the pressing member moving surface 9, and the second The ultraviolet curable resin 12 can have uniform film thickness accuracy.

In the above embodiment, the roller 7 is moved with respect to the first substrate 1 and the second substrate 11 in the dummy molded body production stage and the transfer stage, but the roller 7 is fixed and the first substrate 1 and The second substrate 11 may be moved with respect to the roller 7. Not limited to this, the roller 7, the first substrate 1, and the second substrate 11 may be moved simultaneously . Et al is, in the molded body fabricated stage, may be used first mold 3 formed similarly fine transfer pattern and a second mold 13 to the lower surface.

DESCRIPTION OF SYMBOLS 1 1st board | substrate 2 1st ultraviolet curable resin 3 1st mold 5, 8, 9 Press member moving surface 6, 6A, 6B Dummy molded object 7 Roller 11 2nd board | substrate 12 2nd ultraviolet curable resin 13 1st 2 mold

Claims (4)

After the sheet-shaped first mold is made to face the first ultraviolet curable resin provided on the first substrate, the roller or the roller is pressed in contact with the first mold. A pressing member moving surface is formed by curing the portion of the first ultraviolet curable resin pressed by the roller while moving at least one of the first substrates linearly relative to the other. A dummy molded body production stage for producing a dummy molded body,
After the pattern forming surface of the sheet-like second mold on which the fine transfer pattern is formed is opposed to the second ultraviolet curable resin provided on the second substrate, it is opposite to the second mold. The dummy molded body is placed on the second mold so that the pressing member moving surface is positioned on the side, and the roller or the second substrate is pressed while the roller is pressed against the pressing member moving surface. During a period in which at least one of the rollers is moved relative to the other, the position of the dummy molded body with respect to the roller is made coincident with that in the dummy molded body creation stage, and the roller is relatively moved with respect to the pressing member moving surface. And a transfer step of curing the second ultraviolet curable resin while moving it and transferring the transfer pattern of the second mold to the second ultraviolet curable resin. Transfer method. The transfer method according to claim 1,
The dummy molded body is the first ultraviolet curing resin, transfer method, characterized in that the pressing member moving surface is formed on the first ultraviolet curing resin. The transfer method according to claim 1,
Transferring said dummy molded body, which the first ultraviolet-curable resin and the first mold are integrated, wherein said pressing member moving surface is formed on the first mold Method. The transfer method according to claim 1,
The dummy compacts, the first substrate, which the first ultraviolet-curable resin and the first mold are integrated, the pressing member moving surface is formed on the first mold A transfer method characterized by the above.

Images