JP5203746B2 - Local space air purifier - Google Patents

Description

  The present invention relates to an air cleaning apparatus for locally forming a higher air cleaning space in a clean room, a clean booth, a clean chamber, or the like.

  In semiconductor and film manufacturing factories, precision machinery factories, pharmaceutical / pharmaceutical factories, etc., even if a small amount of airborne particles are present, they may adhere to the product during manufacturing and cause product defects. We maintain the product in a clean state as necessary, and strive to improve product quality and reliability, thereby improving yield. A room cleaned for such a purpose is called a clean room, and a very high clean environment is secured.

  In the clean room, in order to keep the air clean, for example, a high performance air filter is provided on the ceiling or one side wall surface, and a number of air discharge holes are formed on the floor or the other side wall surface, thereby A circulation fan is disposed in the middle, and air is circulated so as to go around the high performance air filter.

  The air circulation system is roughly classified as shown in FIG. 5, high performance air filters 50, 50... Are arranged on the ceiling surface of the clean room CR, and the ceiling back space is partitioned and a duct shaft (duct space). ) A medium-sized blower 52 is arranged on the ceiling portion (partition portion) of 51, and after removing sensible heat by passing a part of the air passing through the grating floor 53 from the clean room CR through the cooling coil 54, the duct shaft 51 is The fan module unit method (FMU method) in which the rising air is again supplied to the ceiling space by the medium blower 52 to circulate the air, and as shown in FIG. A fan filter unit incorporating a small blower 55 and a high-performance air filter 50 is uniformly arranged on the ceiling of the clean room CR. , There is a fan filter unit scheme to circulate air (FFU system) by pushing force of the integrated blower.

  In the clean room, in order to improve the air cleanliness, clean air is supplied from the outside through an air cleaning filter to the room, and the air contaminated on the floor surface, under the floor, or under the wall surface is collected. A method of increasing air cleanliness in a clean room by exhausting using a duct is employed.

  For example, in Patent Document 1 below, a return formed of a stainless steel plate in a space where equipment between the floor of a clean room and a slab is installed for the purpose of improving the cleanliness of clean room air. A duct is formed by partitioning the space where the equipment is installed, and a device room is formed in a portion other than the return duct in the space, and a large number of holes are formed in the upper plate portion of the return duct. An opening is formed in the slab, and the air that has passed through the room enters the return duct through the gap between the assembleable floor and the slab, and the circulating air enters the equipment, piping, etc. of the backup system in the equipment room. A clean room configured to prevent contact is disclosed.

In addition, there is a dust generation source, but there is a processing place for products that require clean air, and the easiest way to add equipment to clean the manual processing space is First, a fan filter unit or the like for supplying clean air is installed at a processing place, and a method of separately installing a dust collector as a dust generation source has been adopted.
JP-A-5-146688

  However, the method according to Patent Document 1 is a method that cannot be easily adopted because it requires a large remodeling when applied to an existing clean room. On the other hand, the latter method of installing a fan filter unit and a dust collector can be easily adopted, but when clean air and a dust collector are installed, the space is ventilated using the power of two fans. The pressure balance of the target space (balance between the air supply amount and the suction amount) is lost, and it is necessary to adjust to an appropriate balance. Further, when the space to be cleaned increases, a space for installing a large number of devices becomes necessary, and there are problems such as an unnecessarily increase of maintenance items for motors and filters. Furthermore, when a processed product that needs to be cleaned has a flat surface such as a glass substrate, the clean air must be supplied from multiple directions, and a fan filter unit is required for the corresponding amount. There were problems such as taking up too much installation space.

On the other hand, in recent years, in forming clean spaces in semiconductor and film manufacturing factories, precision machinery factories, pharmaceutical and pharmaceutical manufacturing factories, etc., in addition to reducing production costs by reducing energy consumption, an international standard for environmental management systems. With the increasing interest in (ISO14001), reduction of environmental burdens such as energy consumption, generated CO ₂ , waste, NO _X , SO _X has been demanded.

  Therefore, the main problem of the present invention is a device for forming a locally higher air purification space, which can be easily adopted in an existing clean room, etc., and does not impair pressure balance, and has a small installation space. To provide an air cleaning device for a local space that has advantages such as being able to flexibly cope with a plurality of cleaning spaces, being easy to maintain, and further capable of reducing environmental burdens. It is in.

In order to solve the above-mentioned problem, as the present invention according to claim 1, there is provided a local space air cleaning device including a blower and an air filter in a box casing,
Wherein a box body casing is a height and thickness of a box body casing depth is set smaller than the width, and 2 minutes the internal casing by a partition wall at an intermediate position in the depth direction, and a downward flow path A suction chamber and an air supply chamber serving as an upward flow path are formed adjacent to each other, and a communication portion between the suction chamber and the air supply chamber is formed at the bottom of the partition wall, and the air filter is inclined in the air supply chamber. A blower is provided in the communication portion, and a pre-filter is provided at a lower end portion of the suction chamber and on an air inflow side of the blower, and is an upper surface of the box casing and the suction chamber. A plurality of suction ducts are connected to the side, and a plurality of air supply ducts are connected to the upper surface of the box casing and to the air supply chamber side. Air cleaning device is provided.

In the first aspect of the invention, the inside of the casing is divided into two by a partition wall at an intermediate position in the depth direction of the box casing, and the suction chamber that becomes the downward flow path and the air supply chamber that becomes the upward flow path are adjacent And forming a communication portion between the suction chamber and the air supply chamber at the bottom of the partition wall, an air filter in the air supply chamber, a fan in the communication portion, and the suction A pre-filter is provided at the lower end of the chamber on the air inflow side of the blower, and a plurality of suction ducts are connected to the upper surface of the box casing and the suction chamber side. And a plurality of air supply ducts connected to the air supply chamber side.

  Therefore, it can be easily adopted in an existing clean room. In addition, by supplying clean air and collecting dust using the power of one fan, it is possible to reduce the environmental load and to improve efficiency without breaking the pressure balance of the target space. Local ventilation is possible. Since a plurality of suction ducts and a plurality of air supply ducts are connected to one cleaning device, it becomes possible to simultaneously supply clean air and collect dust in a plurality of local spaces. For example, the front and back of the processed product can be cleaned with a single device. In addition, in order to adjust the pressure balance of each local space, even if the air amount of each duct is adjusted by an air amount adjusting damper described later, the air is supplied and exhausted by one blower. The air balance of the entire space will not be lost. Furthermore, the space for installing one fan filter unit only needs to be small, so the installation area can be reduced, and maintenance of only one motor and filter for one fan filter unit is sufficient, so that the maintenance work can be halved. Become.

  According to a second aspect of the present invention, there is provided the local air cleaning device according to the first aspect, wherein an air amount adjusting damper is provided in each of the connection portion of the suction duct and the connection portion of the air supply duct. Is done.

  According to the second aspect of the present invention, an air amount adjusting damper is provided in each of the connection portion of the suction duct and the connection portion of the air supply duct so that the air amount can be adjusted. When the supply / exhaust balance is adjusted in each of the plurality of local spaces, the adjustment can be made by the air amount adjusting damper of each duct.

  According to a third aspect of the present invention, there is provided the local space air purifier according to any one of the first and second aspects, wherein a coarse dust filter is provided on each of the outlet side and the inlet side of the blower. The

  In the invention described in claim 3, dust precautions are taken from the blower by disposing pre-filters on the outlet side and the inlet side of the blower, respectively.

  As a fourth aspect of the present invention, a differential pressure gauge for measuring a differential pressure between the outlet side and the inlet side of the air filter is provided, and an alarm generating means and / or an emergency stop means when a differential pressure abnormality is detected A local space air cleaning device according to any one of claims 1 to 3 is provided.

  The invention according to claim 4 is provided with a differential pressure gauge for measuring the differential pressure between the outlet side and the inlet side of the air filter in order to prevent air from flowing backward from the exhaust side, An alarm generating means and / or an emergency stop means at the time of detection are provided.

  According to a fifth aspect of the present invention, there is provided the local space air cleaning apparatus according to any one of the first to fourth aspects, wherein a flexible hose is used for the duct.

  The invention according to claim 5 uses a flexible hose as a duct. Therefore, it is easy to install the duct with the dust collection port facing the vicinity of the dust generation source.

  According to a sixth aspect of the present invention, there is provided the local space air cleaning apparatus according to any one of the first to fifth aspects, wherein the box casing is movable by a moving caster.

  The invention according to claim 6 can be easily moved in the clean room by attaching a moving caster to the lower surface of the box casing.

  As described in detail above, according to the present invention, it can be easily adopted in an existing clean room, does not impair pressure balance, requires less installation space, and can flexibly cope with a plurality of cleaning spaces. It is possible to obtain a local space air purifier having advantages such as easy maintenance and reduction of environmental load.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
[First embodiment]
FIG. 1 is a longitudinal sectional view of a local space air cleaning device 1 according to a first embodiment of the present invention.

  The air cleaning device 1 is a local space air cleaning device in which a blower 3 and an air filter 4 are built in a box casing 2. Specifically, as shown in FIG. 1, the box casing 2 is a thin box casing in which a depth dimension D is set smaller than a height dimension H and a width dimension (in the direction perpendicular to the paper surface). The interior of the casing is divided into two by the partition wall 5 at an intermediate position in the depth direction, and the suction chamber 6 and the air supply chamber 7 are formed, and the communication portion between the suction chamber 6 and the air supply chamber 7 is formed at the bottom of the partition wall 5. 8, the air filter 4 is disposed in the air supply chamber 7, the blower 3 is disposed in the communication portion 8, and the air filter 4 is disposed on the upper surface of the box casing 2 on the suction chamber 6 side. Are connected to a plurality of air supply ducts 10, 10... On the upper surface of the box casing 2 on the air supply chamber 7 side.

  This will be described in more detail below.

  The box casing 2 is a thin box casing in which the depth dimension D is set smaller than the height dimension H and the width dimension (in the direction orthogonal to the paper surface). Specific dimensions are arbitrary, but when considering portability and installation space, the height dimension is 600 to 1500 mm, the width dimension is 400 to 1000 mm, and the depth dimension D is about 200 to 300 mm. It is good to do. By attaching a moving caster 20 to the lower surface of the box casing 2, it can be easily moved.

  As the blower 3, any blower, for example, a centrifugal blower such as a multiblade blower, a turbo blower, or a limit load blower, an axial blower such as a propeller blower, or the like is used as long as it can be accommodated in the box casing 2. Of these, a multi-blade blower, a propeller axial blower, and the like are preferably used when the downsizing of the entire unit is important. Reference numeral 11 denotes a controller (rotational speed control, on / off control, etc.) of the blower 3. Like the example of illustration, the pre-filter 12 can also be provided in the air inflow side of the said air blower 3, and a noise absorption apparatus etc. can be provided in an air blowing side, and can also silence.

  As the air filter 4, a HEPA filter having a collection efficiency of 99.97% or more for 0.3 μm particles of DOP in the DOP test method, which is usually used in a clean room, is preferably used.

  The inside of the box casing 2 is divided into two parts by a partition wall 5 at an intermediate position in the depth direction to form a suction chamber 6 and an air supply chamber 7, and at the bottom of the partition wall 5, the suction chamber 6 and A communication part 8 with the air supply chamber 7 is formed. That is, the inside of the box casing 2 is divided into two along the surface direction including the height and the width, and the suction chamber 6 serving as the downward flow path and the air supply chamber 7 serving as the upward flow path are adjacent to each other. Form.

  The air filter 4 is disposed in the supply chamber 7 at an angle as shown in the figure, and the blower 3 is disposed in the communication portion 8. In addition, a plurality of, in the illustrated example, four suction ducts 9, 9... Are connected to the upper surface of the box casing 2 on the suction chamber 6 side, and the upper surface of the box casing 2 A plurality of air supply ducts 10 in the illustrated example are connected to the air chamber 7 side. In addition, an air amount adjusting damper 13 is provided at each of the connection portions of the suction ducts 9, 9... And the connection portions of the air supply ducts 10, 10,.

  The ducts 9 and 10 use flexible hoses having flexibility in the illustrated example. Of course, a steel duct may be used, but in the case of a steel duct, the dust collection port of the duct is made to face the vicinity of the dust generation source according to the relative positional relationship with the installation location of the cleaning device 1. However, when a flexible hose is used, it is possible to flexibly respond to changes in the dust generation location.

[Second embodiment]
The air purifying apparatus 1 ′ according to the second embodiment shown in FIG. 2 is provided with measures against dust generation from the blower and measures against air backflow from the exhaust side with respect to the first embodiment.

  Specifically, as a measure against dust generation, prefilters 13 and 14 are disposed on the outlet side and the inlet side of the blower 3, respectively. As the prefilters 13 and 14 to be used, it is desirable to use a coarse dust filter or a medium performance filter made of a high density nonwoven fabric filter or the like. Although a coarse filter is desirable in terms of preventing performance degradation, it is desirable to use a medium-performance filter in order to ensure all possible measures against dust generation.

  As the air backflow prevention measure, a differential pressure gauge 15 for measuring a differential pressure between the outlet side and the inlet side of the air filter 4 is provided, and an alarm generating means and / or an emergency stop means when a differential pressure abnormality is detected. 17 is provided. Reference numeral 16 denotes a controller. In general, backflow to the exhaust side is difficult to consider, but it is presumed that there is air leaking from the connecting portion of the chamber without being filtered, so it is desirable to take the above air backflow prevention measures.

[Other examples]
(1) The air cleaning devices 1, 1 ′ can be applied to a clean booth or a clean chamber in addition to a clean room.

[Usage example]
Several examples of usage examples of the above-described air cleaning devices 1 and 1 ′ will be described.

  The air cleaning devices 1 and 1 ′ are installed so that the plurality of suction ducts 9, 9... Face the vicinity of a plurality of dust generation sources, for example, when there is a manufacturing facility that flows on a line in a clean room. On the other hand, the plurality of air supply ducts 10, 10... Are installed and used so as to face the plurality of local cleaning spaces.

  In addition to the above method of use, for example, as shown in FIG. 3 (A), when it is desired to adjust the inside of the processing chamber 21 to a slightly positive pressure, there are four suction ducts 9, 9 ... and air supply ducts 10, 10 respectively. ..., four air supply ducts 10, 10 ... are supplied into the processing chamber 21, three of the suction ducts 9, 9 ... face the processing chamber 21, and the remaining one is the processing chamber. Let it face the outside of 21. Further, as shown in FIG. 3A, when it is desired to adjust the inside of the processing chamber 21 to a slightly negative pressure, the four suction ducts 9, 9... 10... Of the three processing chambers 21, and the remaining one is exposed to the outside of the processing chamber 21.

Further, as shown in FIG. 4, the local space (1) (3) is adjusted to a slightly positive pressure, the local space (2) is set to a slightly negative pressure, the local space (4) is set, etc. When the pressure is adjusted, the opening degree of the air amount adjusting damper 13 may be adjusted as follows.
Local space (1): S1> R1
Local space (2): S2 <R2
Local space (3): S3> R3
Local space (4): S4 = R4
Even in this case, since the total amount of supply air and suction is the same amount, the differential pressure in the processing chamber 21 becomes zero. If the pressure balance in the processing chamber 21 is desired to be changed, the pressure balance is adjusted by the method shown in FIG.

It is a longitudinal cross-sectional view of the local space air cleaning apparatus 1 which concerns on the 1st form example of this invention. It is a longitudinal cross-sectional view of the local space air purifying apparatus 1 'according to the second embodiment of the present invention. Another example of use of the air purifying apparatus 1, 1 ′ (No. 1) is shown. (A) wants a slightly negative pressure inside the processing chamber 21, (B) shows a slightly positive pressure inside the processing chamber 21. It is the schematic when it wants. It is the schematic which shows the other usage-method example (the 2) of the air purifying apparatuses 1 and 1 '. It is the schematic which shows the clean room structure of the conventional fan module unit system (FMU system). It is the schematic which shows the clean room structure of the conventional fan filter unit system (FFU system).

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Air purification apparatus, 2 ... Box casing, 3 ... Blower, 4 ... Air filter, 5 ... Partition wall, 6 ... Suction chamber, 7 ... Air supply chamber, 8 ... Communication part, 9 ... Suction duct, 10 ... Air supply duct, 13 ... Air amount adjusting damper, 15 ... Differential pressure gauge, 17 ... Alarm generating means and / or emergency stop means

Claims (6)

A local space air purifier with a blower and an air filter built in a box casing,
Wherein a box body casing is a height and thickness of a box body casing depth is set smaller than the width, and 2 minutes the internal casing by a partition wall at an intermediate position in the depth direction, and a downward flow path A suction chamber and an air supply chamber serving as an upward flow path are formed adjacent to each other, and a communication portion between the suction chamber and the air supply chamber is formed at the bottom of the partition wall, and the air filter is inclined in the air supply chamber. A blower is provided in the communication portion, and a pre-filter is provided at a lower end portion of the suction chamber and on an air inflow side of the blower, and is an upper surface of the box casing and the suction chamber. A plurality of suction ducts are connected to the side, and a plurality of air supply ducts are connected to the upper surface of the box casing and to the air supply chamber side. Cleaning system of air.   The local air cleaning device according to claim 1, wherein an air amount adjusting damper is disposed in each of the connection portion of the suction duct and the connection portion of the air supply duct.   The air purifier for a local space according to any one of claims 1 and 2, wherein a pre-filter is disposed on each of an outlet side and an inlet side of the blower.   4. A differential pressure gauge for measuring a differential pressure between the outlet side and the inlet side of the air filter is provided, and further provided with an alarm generating means and / or an emergency stop means when a differential pressure abnormality is detected. The local space air purifier according to any one of the above.   The local space air cleaning apparatus according to claim 1, wherein a flexible hose is used for the duct.   6. The local space air purifier according to claim 1, wherein the box casing is movable by a moving caster.

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