JP4906038B2 - Sample support device for X-ray analyzer and X-ray analyzer - Google Patents

Description

  The present invention relates to a sample support device that supports a sample to be subjected to X-ray analysis. The present invention also relates to an X-ray analyzer that performs measurement using X-rays on a sample supported by a sample support device.

  In general, in an X-ray analyzer, a sample is supported by a sample support device, the sample is irradiated with X-rays, and X-rays (for example, diffracted rays, scattered rays, reflected rays, spectral rays) emitted from the sample are X Detect with line detector. The sample support device has functions such as placing the sample at a predetermined position on the X-ray optical path, appropriately moving the sample with respect to the X-ray beam, and setting a predetermined atmosphere around the sample.

  Examples of appropriate movement of the sample with respect to the X-ray beam include ω-axis movement for adjusting the incident angle of the X-ray to the sample, φ-axis movement for rotating the sample in the plane, and moving the sample with respect to the X-ray beam. Z-axis movement that moves forward and backward, XY-axis movement that changes the X-ray irradiation position on the sample surface by sliding the sample in the plane, and Rx-Ry-axis movement that adjusts the posture of the sample with respect to the X-ray beam can be considered. (For example, patent document 1). Further, as a form of moving the specimen, it is also conceivable to place the specimen itself in and out of the X-ray beam by a sample changer. Further, setting the atmosphere around the sample may be, for example, controlling the temperature of the sample.

  In order to realize the above-described movements of the respective axes, conventionally, moving stages such as a rotary table, a slide table, a lift table, and the like have been installed so as to overlap each other (for example, Patent Document 1). In addition, each moving stage is often equipped with electric elements such as a motor, a solenoid, and a sensor in order to realize each axis movement.

JP 2004-294136 A (pages 6-7, FIG. 3)

  When various moving stages such as a rotary table and a slide table are installed in an overlapping manner, it is necessary to establish an electrical connection between the moving stages. Conventionally, an electric wire is drawn out from each moving stage, and the drawn electric wire is connected to the outside of each moving stage using a connector.

  For example, as shown in FIG. 11, a φ-axis moving stage 102 having an electric element 105b is installed on a Z-axis moving stage 101 having an electric element 105a such as a motor, and an electric element 105c is provided thereon. Considering the case where the Y-axis moving stage 103 and the X-axis moving stage 104 provided with the electric element 105d are installed, a slip ring connector 106 is provided between the φ-axis moving stage 102 and the Z-axis moving stage 101, The electric wire 107d extending from the electric element 105d of the X-axis moving stage 104 and the electric wire in the cable bundle 109 extending from the slip ring connector 106 are connected to the outside of each moving stage by the connector 108, and further, the electric element of the Y-axis moving stage 103 An electric wire 107c extending from 105c and a slip ring connector 106 The cables in the cable bundle 109 are connected to the outside of each moving stage by the connector 108.

  However, in the conventional sample support apparatus illustrated in FIG. 11, a mounting stage including a Y-axis moving stage 103 and an X-axis moving stage 104 on a base stage including a Z-axis moving stage 101 and a φ-axis moving stage 102. When installing the device, the work of mechanically mounting the mounting stage on the base stage and the work of connecting the electric wires by the connector 108 must be performed separately, which is troublesome.

  Further, when the φ-axis moving stage 102 is rotated with respect to the Z-axis moving stage 101 during the X-ray analysis measurement or during the preparatory work, the wirings 107c and 107d and the connector 108 are moved in each axis. There was a risk that the electrical connection might be abnormal or various parts could be damaged by hitting the stage or peripheral devices around it.

  The present invention has been made in view of the above-described problems, and can easily assemble a plurality of moving stages equipped with electric wires. It is an object of the present invention to provide a sample support device and an X-ray analyzer that can prevent inconveniences caused by connectors for connecting each other.

A sample support device of an X-ray analyzer according to the present invention includes a sample support device that supports a sample, an X-ray source that generates X-rays irradiated to the sample, and an X that detects X-rays emitted from the sample. A sample support device for an X-ray analyzer having a line detection means, the sample support device having a base stage and a mounting stage arranged to overlap the base stage, and supporting the sample by the mounting stage The base stage and the mounting stage are overlapped with each other in a state where the respective coupling surfaces are opposed to each other so as not to move relative to each other, and are provided within the coupling surface of the mounting stage and the electrical elements provided on the mounting stage. A mounting-side terminal that is electrically connected to the electrical element via an electric wire, and a base-side end that is provided in a coupling surface of the base stage and is conductively connected to the mounting-side terminal. Has the door, in a state where the mounting stage disposed to overlap on the base stage, a plurality said mounting side terminal and the base terminal is conductively connected, the mounting stage to move relative to the coupling surface The mounting stage is detachably attached to the base stage at the coupling surface, the electric wire is provided inside the mounting stage, and the mounting stages are stacked on each other. A plurality of moving stages installed, and a plurality of the electric elements are provided with respect to the mounting stage, and a plurality of the mounting side terminals and the base side terminals are respectively provided in the coupling surface, The plurality of mounting-side terminals and the plurality of base-side terminals are individually conductively connected .

  In the above configuration, the “mounting stage” is a stage that supports the sample, but may support the sample directly or may indirectly support the sample via some member. In short, the mounting stage is a stage closer to the sample than the base stage.

  The “base stage” and “mounting stage” include an ω-axis moving stage, a φ-axis moving stage, a Z-axis moving stage, an XY-axis moving stage, an Rx-Ry-axis moving stage, a sample changer stage, a sample temperature control stage, and the like. Each processing stage can be a single or a combination of at least two of them. For example, a base stage can be constituted by a combination of a Z-axis movement stage and a φ-axis movement stage, and a mounting stage can be constituted by a combination of a Y-axis movement stage and an X-axis movement stage.

  The “electric element” may be a power source such as an electric motor or an electromagnetic solenoid, or sensors such as a temperature sensor, a position sensor, or an angle sensor.

  According to the sample support device of the present invention having the above-described configuration, since both the mounting side terminal and the base side terminal are provided in the coupling surface of each stage, the base side terminal on the base stage and the mounting on the mounting stage The side terminals can be automatically connected when the mounting stage is mounted on the base stage. This makes it possible to install the mounting stage on the base stage and the base stage as compared to the conventional apparatus that separately performs the conductive connection of the mounting stage side electric wire and the base stage side electric wire using the connector. The work of placing the mounting stage on the top can be performed remarkably easily.

  Further, in the sample support device according to the present invention, electrical connection between the base stage and the mounting stage is achieved by connecting the mounting side terminal and the base side terminal provided in the coupling surfaces of both stages. is doing. In this way, the wire connecting part that was previously outside the moving stage as a connector is housed inside the moving stage, so when the moving stage rotates or otherwise moves, the wire connecting part becomes the mounting stage. , Base stage, and peripheral devices around them are no longer hit. In addition, since the mounting side terminal and the base side terminal are housed in each stage, the electric wires extending from these terminals can be housed in each stage, so that the wiring is connected to each stage or peripheral device. You can prevent hitting.

  Next, the sample support device according to the present invention may further include a mounting side wiring board provided with the mounting side terminal, and a base side wiring board provided with the base side terminal, and further, the mounting The side wiring board may be fixed in the coupling surface of the mounting stage, and the base side wiring board may be fixed in the base stage. In this configuration, terminals are provided on the wiring board, and the wiring board is attached to the base stage or the mounting stage, whereby the base side terminal or the mounting side terminal is provided on the base stage or the mounting stage.

  "Wiring board" is an electronic component formed by forming a wiring pattern on a relatively hard synthetic resin substrate by photo-etching, etc., and forming a metal foil-like terminal on the substrate or mounting a terminal component. Is an element. In the present invention, the mounting side terminal and the base side terminal can be directly mounted on the mounting stage and the base stage. However, if the terminals are provided on each stage via the wiring board as in the aspect of the present invention, workability for providing a plurality of terminals on the surface of each stage is remarkably improved. Also, by finely adjusting the mounting position of the wiring board on each stage, the terminal mounting position on each stage can be finely adjusted, so that the conductive connection work between the mounting side terminal and the base side terminal can be performed easily and accurately. Can do.

  Next, in the sample support device according to the present invention using a wiring board, the mounting side wiring board has an external connection terminal, and the external connection terminal has a wiring pattern formed on the mounting side wiring board. It is desirable to be electrically connected to the mounting side terminal. Further, it is desirable that the base side wiring board has an external connection terminal, and the external connection terminal is electrically connected to the base side terminal through a wiring pattern formed on the base side wiring board. According to this configuration, when the mounting-side terminal and the electrical element are conducted by the electric wire, and when the base-side terminal and the electric element are conducted by the electric wire, the electric wire is connected to the external connection terminal on the wiring board, for example, soldering This will make the connection work much easier.

  Next, it is preferable that the sample support device according to the present invention further includes a fitting structure provided between the base stage and the mounting stage and having a fitting portion and a fitted portion. In this case, it is desirable that the base stage and the mounting stage are overlapped with each other in a state where the fitting portion and the fitted portion are fitted to each other. According to this configuration, the base stage and the mounting stage stacked on the base stage can be held in a stable state without relative movement by the function of the fitting structure.

  Next, in the sample support device having a fitting structure, the fitting structure restricts the mounting stage from translating in a lateral direction with respect to the base stage, and further rotates with respect to the base stage. It is desirable to restrict movement. In this way, it is possible to reliably prevent the base stage and the mounting stage from being displaced relative to each other.

  Next, in the sample support device according to the present invention, it is desirable that the electric wire that conducts the electrical element provided on the mounting stage and the mounting side terminal passes through the mounting stage. In this way, the electric wires are not exposed to the outside of the mounting stage and the base stage. Therefore, even when each stage makes various movements such as rotation, rectilinear movement, parallel movement, etc., the electric wires touch the peripheral device and break. Or damage peripheral devices can be reliably prevented.

  Next, in the sample support device according to the present invention, the base stage includes a Z-axis movement stage that moves the sample forward and backward relative to the X-ray beam, and a φ-axis movement stage that rotates the sample in a plane. The mounting stage may be an XY axis moving stage that changes the X-ray irradiation position on the surface of the sample by sliding the sample in the plane, or the sample with respect to the X-ray beam by swinging the sample in an arc surface. It is desirable that either the Rx-Ry axis movement stage for adjusting the posture of the stage. Each of the above moving stages is a moving stage that largely moves the moving stage above itself. Therefore, if the present invention is applied to these moving stages so that the terminals for conductive connection are accommodated in the moving stages, the terminals themselves and the wires extending from the terminals touch the peripheral device and break. Or damage peripheral devices can be reliably prevented.

  Next, in the sample support device according to the present invention, one of the mounting side terminal and the base side terminal is a deformable terminal formed by deforming a material having elasticity and conductivity in a deformable manner, and the mounting side terminal And the other of the base side terminals is a planar terminal formed in a plane by a conductive material, and when the mounting side terminal and the base side terminal are conductively connected, the deformable terminal is It is desirable to be deformed by being pushed by a flat terminal. According to this configuration, when the deformable terminal and the flat terminal come into contact with each other and the deformable terminal is deformed, the deformable terminal moves while rubbing the surface of the flat terminal. This rubbing movement can stabilize the connection state between the surfaces of the deformable terminal and the flat terminal.

  Next, in the sample support device according to the present invention having a deformable terminal, the deformable terminal is a plate-shaped terminal formed in a deformable curved shape or a spring connector in which a movable terminal is supported by a spring. It is desirable that When the plate-shaped elastic material can be deformed by bending it into a curved shape, a deformable terminal can be formed at low cost. If a spring connector is used as the deformable terminal, the mounting side terminal and the base side terminal can be reliably conductively connected by the elastic force provided by the spring.

  Next, an X-ray analyzer according to the present invention includes a sample support means for supporting a sample, an X-ray source for generating X-rays irradiated on the sample, and an X-ray for detecting X-rays emitted from the sample. In the X-ray analysis apparatus having the detection means, the sample support means is the sample support apparatus described above. According to the sample support device of the present invention, the operation of placing the mounting stage on the base stage can be performed remarkably easily. Therefore, in the X-ray analysis apparatus using this sample support apparatus, the work of assembling the sample support apparatus can be easily performed.

  In addition, according to the sample support device of the present invention, since the wire connection portion that has conventionally been outside the stage as a connector is accommodated inside the base stage and the mounting stage, the stage rotates and moves other times. When done, the wire connection and the wires extending from it no longer hit the peripheral equipment. Therefore, even in the X-ray analysis apparatus using this sample support apparatus, it is possible to prevent inconvenience from occurring due to the extension of the wiring and connector around the sample.

(First embodiment of X-ray analyzer and sample support device)
Hereinafter, an X-ray analysis apparatus and a sample support apparatus according to the present invention will be described based on embodiments. Of course, the present invention is not limited to this embodiment. In the following description, the drawings are referred to. In the drawings, the components may be shown in different ratios from the actual ones in order to show the characteristic parts in an easy-to-understand manner.

  FIG. 1 shows an embodiment of an X-ray analyzer and a sample support device according to the present invention. FIG. 2 schematically shows a movement form of the X-ray optical system of FIG. In FIG. 1, an X-ray analyzer 1 includes an X-ray source F, a sample support device 2 that supports a sample S, and an X-ray detector 3. In this embodiment, a Si (silicon) wafer is used as a sample S, and the structure of the sample S is analyzed using X-rays.

  The X-ray source F can be constituted by, for example, a filament and a target facing the filament. In this case, the filament generates heat by energization to generate thermoelectrons, and X-rays are generated from the target surface when the thermoelectrons collide with the target surface at high speed. A region where the thermal electrons collide with the target surface is a region where X-rays are generated, and this region is called an X-ray focal point. The X-ray detector 3 can be configured by, for example, an SC (Scintillation Counter) that is a zero-dimensional X-ray detector having a structure that receives X-rays in a dotted region.

  Although an incident side X-ray optical system is provided between the X-ray source F and the sample S, the illustration thereof is omitted. A light receiving side optical system is provided between the sample S and the X-ray detector 3, but the illustration thereof is omitted. These incident side optical system and light receiving side optical system are configured by appropriately combining X-ray optical elements such as one slit, double slit, monochromator, collimator, solar slit, parallel slit, etc. according to the type of measurement. Is done.

  The sample support device 2 includes a chi circle 4 having the shape of a part of a circular ring, a chi-axis moving stage 5 that is driven by the chi-drive device 9 to rotate and translate along the chi-circle 4, and a chi-axis movement. And a sample stage 6 installed on the stage 5. The sample stage 6 includes a base stage 7 and a mounting stage 8 installed on the base stage 7. The base stage 7 has a Z-axis moving stage 11 and a φ-axis moving stage 12 installed thereon. The mounting stage 8 has a Y-axis moving stage 13 installed on the φ-axis moving stage 12 and an X-axis moving stage 14 installed thereon.

  In general, in an X-ray analyzer, the sample S is moved variously with respect to X-rays in order to change the posture of the sample S with respect to X-rays. And the reference axis in the case of the movement is set variously according to the kind of measurement. Here, a horizontal axis passing through the surface of the sample S is defined as a horizontal reference axis Xh1. A vertical axis passing through the sample S and perpendicular to the horizontal reference axis Xh1 is defined as a vertical reference axis Xv. These axes Xh1 and Xv are position-immovable axes.

  The χ-axis moving stage 5 rotates and moves the sample S around the χ-axis line X (χ) as indicated by an arrow χ in FIG. 2 and 1 show a state in which the χ-axis line X (χ) coincides with the horizontal reference axis line Xh1, but the χ-axis line X (χ) itself is a vertical reference in a horizontal plane including the horizontal reference axis line Xh1. It can be rotated within a predetermined angle range around the axis Xv.

  The Z-axis moving stage 11 in the base stage 7 of FIG. 1 is driven by a driving device 16 to move the sample S forward and backward with respect to the horizontal reference axis Xh1 as indicated by an arrow Z in FIG. Further, the φ axis moving stage 12 in the base stage 7 of FIG. 1 is driven by the driving device 17 so that the sample S is within an appropriate angular range with the axis X (φ) as the center as indicated by the arrow φ in FIG. Rotate to move. The central axis X (φ) is an axis that is displaced according to the movement of the χ axis in the arrow χ direction.

  Further, the Y-axis moving stage 13 in the mounting stage 8 in FIG. 1 is driven by the driving device 18 to move the sample S in parallel with the χ-axis line X (χ) as indicated by the arrow Y in FIG. . Further, the X-axis moving stage 14 in the mounting stage 8 in FIG. 1 is driven by a driving device 19 so that the sample S is parallel to the χ-axis line X (χ) as indicated by the arrow X in FIG. Translate in a direction perpendicular to the axial direction.

  Further, the following moving system can be additionally provided as necessary. The first is a moving system that rotationally moves the χ axis X (χ) itself of FIG. 2 about the vertical axis Xv. The second is a moving system that rotates the X-ray detector 3 of FIG. 1 in the direction indicated by the arrow 2θ about the vertical axis Xv. Third, the X-ray detector 3 is indicated by an arrow 2θ ′ around the axis Xh2 orthogonal to both the straight line connecting the X-ray detector 3 and the sample S and the vertical axis Xv (that is, perpendicular to the 2θ rotation direction). This is a moving system that rotates and moves in the direction of.

  The plurality of mobile systems described above are examples of various mobile systems that can be set in the X-ray analyzer 1, and if necessary, remove any of those mobile systems. Alternatively, another moving system can be additionally provided in the X-ray analyzer 1.

(Removable structure)
With respect to the sample stage 6 of this embodiment, as indicated by arrows A and B in FIG. 3, the mounting stage 8 can be attached to and detached from the base stage 7, that is, can be easily attached and detached. That is, the mounting stage 8 can be attached to and detached from the base stage 7 by using the upper surface of the base stage 7 and the bottom surface of the mounting stage 8 as coupling surfaces. The use of such a detachable structure makes it possible to simplify the mounting operation of the mounting stage 8 to the base stage 7 and to replace the moving stage constituting the mounting stage 8 with another type of moving stage. This is because. Hereinafter, this attachment / detachment structure will be described.

  As shown in FIG. 4, a circular fitting convex portion 21 is provided on the upper surface of the base stage 7, that is, the upper surface of the φ axis moving stage 12. On the other hand, on the bottom surface of the mounting stage 8 in FIG. 3, that is, the bottom surface of the Y-axis moving stage 13, as shown in FIG. 5 (the bottom surface is drawn as the top surface in FIG. 5), a circular fitting recess 22 is formed. Is provided. When the mounting stage 8 is attached to the base stage 7 in FIG. 4, the mounting stage 8 is placed on the base stage 7 while fitting the fitting recess 22 in FIG. 5 around the fitting protrusion 21 in FIG. Due to the fitting between the fitting convex portion 21 and the fitting concave portion 22, the mounting stage 8 is held so as not to move laterally with respect to the base stage 7.

  Further, in FIG. 5, a fitting pin 23 is provided at an appropriate position in a region surrounded by the fitting recess 22 on the bottom surface of the mounting stage 8, that is, the bottom surface of the Y-axis moving stage 13. On the other hand, in FIG. 4, a fitting hole 24 is provided at an appropriate position on the upper surface of the base stage 7, that is, the upper surface of the φ-axis moving stage 12. The fitting hole 24 has such a diameter that the fitting pin 23 shown in FIG. 5 can be inserted and the inserted fitting pin 23 is not displaced. When the mounting stage 8 is attached to the base stage 7, the mounting stage 8 is placed on the base stage 7 while inserting the fitting pins 23 into the fitting holes 24. By the fitting of the fitting pin 23 and the fitting hole 24, the mounting stage 8 is held so as not to rotate and move with respect to the base stage 7.

  Due to the fitting between the fitting convex portion 21 and the fitting concave portion 22 and the fitting pin 23 and the fitting hole 24 as described above, the mounting stage 8 is lateral and rotational with respect to the base stage 7. It is hold | maintained so that it may not shift position with respect to both. The mounting stage 8 is fixed by an appropriate fixing method after being mounted on the base stage 7. As this fixing method, for example, a method of screwing a screw from the side surface of the ring-shaped protrusion forming the fitting concave portion 22 of FIG. 5 and pressing the side surface of the fitting convex portion 21 of FIG.

  As described above, in FIG. 1, the driving devices 18 and 19 are provided in the mounting stage 8. In these drive devices 18 and 19, an electric motor such as a pulse motor or a servo motor is provided as a power source. Sensors for detecting the positions of various operating components installed in the drive units 18 and 19, the Y-axis movement stage 13, and the X-axis movement stage 14 are also provided. Provided. Electric elements such as an electric motor and a sensor supply power and transmit / receive signals through electric wires. Hereinafter, handling of this electric wire will be described.

  In FIG. 4, a square or rectangular concave portion 26 is provided on the upper surface of the base stage 7, that is, the upper surface of the φ axis moving stage 12. A base-side wiring board 27 is disposed and fixed in the recess 26. In this fixing method, for example, as shown in the partial view (b), through holes 29 are formed in the four corners of the wiring board 27, screws 28 are passed through the through holes 29, and these screws 28 are connected to the φ axis moving stage 12. This can be achieved by tightening.

  A plurality of base-side terminals 31 b are provided on the upper surface of the wiring board 27. In the present embodiment, a total of 12 base-side terminals 31b of 6 linear one row are provided over two rows. However, the number of base-side terminals 31b is set to a number as necessary. Further, the arrangement of the plurality of base-side terminals 31b is not limited to two linear rows, and a plurality of linear rows, a plurality of curved rows, a plurality of concentric ring-like arrangements, and various other arrangements can be adopted.

  Each base-side terminal 31b is formed by processing a conductive plate-like material as shown in the partial view (c). The base-side terminal 31b is formed by bending a plate-like material by processing. When the top portion is pressed as indicated by an arrow C, the top portion is elastically deformed in the direction of the arrow C. The base side terminal 31b shown in the partial view (c) forms a deformable portion by a simple bending structure, but instead of this, by bending the plate-like material at a plurality of locations as shown in FIG. A deformable part can also be constructed. The base-side terminal 31b shown in FIG. 6 has a deformable portion that curves in an “S” shape.

  The base-side terminal 31b shown in FIGS. 4 and 6 is formed, for example, by applying Ni (nickel) plating to beryllium copper having a thickness of about 0.1 mm as a base plating and further performing gold plating. The compressive load is desirably 3N or less when the height is deformed from 4 mm to 2.2 mm. The contact resistance value is preferably 50 mΩ or less.

  4 includes a substrate 33 formed of a relatively hard synthetic resin, pads (ie, terminals) 34 formed on the substrate 33, and external connection terminals formed at appropriate positions on the substrate 33. 32. In addition, an appropriate wiring pattern is formed on the surface of the wiring board 27 by a photoetching process. The pad 34 and the external connection terminal 32 are connected by the wiring pattern and become conductive. The base side terminal 31b is fixed on the pad 34 by a predetermined conductive bonding process, for example, soldering. After all, the base side terminal 31 b on the wiring board 27 is electrically connected to the external connection terminal 32 through the wiring pattern on the wiring board 27.

  As shown in FIG. 7, one end of the electric wire 45 is conductively bonded, for example, soldered to each of the plurality of external connection terminals 32 at the upper part of the base stage 7. The other ends of these electric wires 45 are connected to an upper terminal 49 of a slip ring connector 47 provided inside the base stage 7. Another electric wire 48 is connected to the lower terminal 50 of the slip ring connector 47. Electric power and signals supplied to the driving devices 18 and 19 belonging to the mounting stage 8 are transmitted through this electric wire 48.

  The slip ring connector 47 is a well-known connector, and a first sliding contact connected to the upper terminal 49 and a second sliding contact connected to the lower terminal 50 are provided therein, and the first sliding contact It is a connector that can relatively rotate the sliding contacts while holding the second sliding contacts electrically. In the present embodiment, for example, the first sliding contact is fixed to the φ-axis moving stage 12, the second sliding contact is fixed to the Z-axis moving stage 11, and the φ-axis moving stage 12 is moved on the Z-axis moving stage 11. Even in the case of rotation, electrical continuity is ensured between the electric wire 45 on the base-side wiring board 27 side and the external electric wire 48.

  Next, in FIG. 5, a square or rectangular recess 36 is provided on the bottom surface (top surface in the drawing) of the mounting stage 8, that is, on the bottom surface of the Y-axis movement stage 13. A mounting side wiring board 37 is disposed and fixed in the recess 36. In this fixing method, for example, as shown in the partial view (b), through holes 39 are formed in the four corners of the wiring board 37, screws 38 are passed through the through holes 39, and the screws 38 are passed to the Y-axis moving stage 13. This can be achieved by tightening.

  A plurality of mounting-side terminals 31a are provided on the upper surface of the mounting-side wiring board 37 in the same number and the same arrangement as the base-side terminals 31b in FIG. In the present embodiment, twelve mounting-side terminals 31a are provided. Each mounting-side terminal 31a is formed as a land, that is, a planar terminal, using the same material as the base-side terminal 31b in FIG.

  Similar to the base-side wiring board 27 of FIG. 4, the mounting-side wiring board 37 includes a board 43 formed of a relatively hard synthetic resin and external connection terminals 42 formed at appropriate positions on the board 43. In addition, a wiring pattern having an appropriate pattern is formed on the surface of the wiring board 37 by a photoetching process. The mounting side terminal 31a and the external connection terminal 32 are electrically connected by the wiring pattern.

  The drive device 18 belonging to the Y-axis movement stage 13 and the drive device 19 belonging to the X-axis movement stage 14 both include a power source such as a motor and electronic parts such as a sensor. An electric wire is connected to electric elements such as a power source and an electronic component, and electric power and signals are transmitted through the electric wire. The wires exit from the driving device 18 and the driving device 19 as indicated by reference numeral 44 in the mounting stage 8 of FIG. 7, pass through the inside of the Y-axis moving stage 13 and the X-axis moving stage 14, and mounted on the wiring board. 37 external connection terminals 42 (see FIG. 5). Although the electric wire 44 is drawn as one in FIG. 7, the number of the electric wires 44 is actually in accordance with the number of electric elements provided in each driving device. Eventually, the individual electric elements in the driving devices 18 and 19 are individually mounted on the wiring board 37 through the electric wire 44, the external connection terminal 42 on the wiring board 37, and the wiring pattern on the wiring board 37 in this order. It conducts to a terminal (ie, land) 31a.

  When the mounting stage 8 of FIG. 5 is attached to the base stage 7 of FIG. 4 as indicated by the arrow A in FIG. 3, the fitting recess 22 of FIG. 5 is fitted into the fitting recess 21 of FIG. The fitting pin 23 is fitted into the fitting hole 24 in FIG. 4, and the mounting stage 8 is attached to the base stage 7. When the stage is thus mounted, the mounting side terminal (land) 31a of FIG. 5 and the base side terminal (deformable terminal) 31b of FIG. 4 are automatically connected to each other as shown in the partial view (b) of FIG. Conductive connection. In the partial view (b), the base-side terminal 31b in the natural state shown by the chain line is pushed into the state shown by the solid line by being pushed by the mounting-side terminal 31a. When the terminals 31 a and 31 b are conductively connected, the electric wires 44 extending from the driving devices 18 and 19 on the mounting stage 8 side are connected to the mounting side terminals 31 a on the mounting side wiring board 37 and the base side terminals on the base side wiring board 27. 31b, the electric wire 45 on the base-side wiring board 27 side, and the slip ring connector 47 are sequentially conductively connected to the external electric wire 48.

  When the driving device 16 in the base stage 7 is operated, the sample S moves in the Z-axis of FIG. 2 (that is, forward and backward parallel movement with respect to the sample S), and when the driving device 17 in the base stage 7 is operated, the sample S is moved as shown in FIG. When the φ-axis movement (that is, in-plane rotational movement) is performed and the driving device 18 in the mounting stage 8 is activated, the sample S is translated in the Y-axis direction in FIG. 2, and the driving device 19 in the mounting stage 8 is further moved. When activated, the sample S translates in the X-axis direction of FIG.

  By giving various movements to the sample S in this way, the posture of the sample S with respect to the X-ray R0 can be set to various states in FIG. Then, X-rays are emitted from the X-ray source F, and the X-rays are irradiated to the sample S. When diffraction lines, scattered rays, etc. are emitted from the sample S at that time, the diffraction lines and the like are detected. It is detected by the device 3. Then, based on the detected X-ray intensity, the attitude of the sample S at that time with respect to the incident X-ray, and the angular position of the X-ray detector 3 at that time with respect to the incident X-ray, the internal structure of the sample S Analyze.

  According to the present embodiment, as shown in FIG. 7, both the mounting side terminal 31 a and the base side terminal 31 b are provided in the coupling surface of the base stage 7 and the mounting stage 8. The base side terminal 31 b and the mounting side terminal 31 a on the mounting stage 8 can be automatically connected when the mounting stage 8 is mounted on the base stage 7. For this reason, compared with the conventional apparatus which performed separately the operation | work which installs the mounting stage 8 on the base stage 7, and the operation | work which carries out the conductive connection of the electric wire 44 of the mounting stage side, and the electric wire 45 of the base stage side with a connector. Thus, the operation of placing the mounting stage 8 on the base stage 7 can be performed remarkably easily.

  In the present embodiment, the electrical connection between the base stage 7 and the mounting stage 8 is performed by connecting the mounting side terminal 31a and the base side terminal 31b provided in the coupling surfaces of both stages. ing. With this configuration, the electric wire 44 in the mounting stage 8 can be connected to the mounting-side terminal 31 a through the inside of the mounting stage 8 without being exposed to the outside of the mounting stage 8. As described above, since the electric wire 44 is accommodated in the mounting stage 8, when the mounting stage 8 rotates or performs other movements, the electric wire 44 is in the vicinity of the mounting stage 8, the base stage 7, or the surroundings. No more hitting the device. Further, since it is not necessary to provide a wire connecting part, that is, a connector outside the mounting stage 8, the connector does not collide with a peripheral device or the like.

  When the base side terminal 31b of FIG. 4 is installed on the upper surface of the base stage 7, or when the mounting side terminal 31a of FIG. 5 is installed on the bottom surface of the mounting stage 8, these terminals 31a and 31b are connected to each stage. Can be installed directly on the surface. However, in this case, the installation work is very troublesome. On the other hand, in this embodiment, the base side terminal 31b is provided on the base side wiring board 27, the mounting side terminal 31a is provided on the mounting side wiring board 37, and these wiring boards 27 and 37 are mounted on the base stage 7 and the mounting side. By attaching to the stage 8, the terminal 31 b and the terminal 31 a are provided on the base stage 7 and the mounting stage 8. Thus, if the terminals 31b and 31a are provided on the respective stages via the wiring boards 27 and 37, the workability is remarkably improved. Further, by finely adjusting the mounting positions of the wiring boards 27 and 37 to the stages 7 and 8, the mounting positions of the terminals 31b and 31a with respect to the stages 7 and 8 can be finely adjusted. Conductive connection work with the terminal 31b can be performed easily and accurately.

  In the present embodiment, the base side terminal 31b provided on the base side wiring board 27 of FIG. 4 is connected to the electric wire 45 (see FIG. 7) via the external connection terminal 32. Further, the mounting side terminal 31a provided on the mounting side wiring board 37 of FIG. 5 is connected to the electric wire 44 (see FIG. 7) via the external connection terminal. With this configuration, the work of connecting the electric wires to the mounting side terminal 31a and the base side terminal 31b has become very simple.

  In the present embodiment, a fitting structure is provided between the base stage 7 and the mounting stage 8. Specifically, a fitting structure comprising a combination of a fitting convex portion 21 provided on the upper surface of the base stage 7 of FIG. 4 and a fitting concave portion 22 provided on the bottom surface of the mounting stage 8 of FIG. 5 is provided. 4 is provided with a fitting structure comprising a combination of a fitting hole 24 provided on the upper surface of the base stage 7 in FIG. 4 and a fitting pin 23 provided on the bottom surface of the mounting stage 8 in FIG. By providing such a fitting structure, the base stage 7 and the mounting stage 8 stacked thereon can be held in a stable state without relative movement.

  In particular, in this embodiment, the lateral displacement is restricted by the fitting structure of the fitting convex portion 21 and the fitting concave portion 22, and the rotational direction is controlled by the fitting structure of the fitting hole 24 and the fitting pin 23. Since the double fitting structure that restricts the displacement to the position is adopted, the relative positional relationship between the stages 7 and 8 can always be kept constant.

  Further, in the present embodiment, the electric wire 44 that conducts the drive devices 18 and 19 belonging to the mounting stage 8 and the mounting side terminal 31a in FIG. 7 passes through the inside of the mounting stage 8, and therefore the electric wire 44 is connected to the mounting stage 8 and the base. It is no longer exposed outside the stage 7. For this reason, even when each stage performs various movements such as rotation, linear movement, parallel movement, etc., the electric wire 44 does not touch the peripheral device and break or damage the peripheral device.

  Further, in this embodiment, as shown in the partial view (b) of FIG. 7, the base side terminal 31b provided on the base stage 7 side is fixed to the base side wiring board 27 and the other end is a free end. Since it is a certain deformable terminal, when the mounting side terminal 31a and the base side terminal 31b, which are planar terminals (that is, lands) are conductively connected, the base side terminal 31b is pushed by the mounting side terminal 31a. While deforming, the base side terminal 31b moves while rubbing the surface of the mounting side terminal 31a. By this rubbing movement, the connection state between the surfaces of the base side terminal 31b and the mounting side terminal 31a can be stabilized.

(Second embodiment of X-ray analyzer and sample support device)
FIG. 8 shows another embodiment of the X-ray analysis apparatus and the sample support apparatus according to the present invention. The embodiment shown here is different from the previous embodiment shown in FIG. 1 in that the mounting stage 8 constituting the sample stage 6 in FIG. 1 is modified. In this embodiment, the same members as those shown in FIG. 1 are denoted by the same reference numerals, and the description thereof is omitted.

  In FIG. 8, the χ-axis moving stage 5 and the elements associated therewith are the same as those used in the embodiment of FIG. The sample stage 56 placed on the χ-axis moving stage 5 has a base stage 7 and a mounting stage 58. The base stage 7 is the same as that used in the embodiment of FIG. The mounting stage 58 includes an Ry axis moving stage 63 placed on the φ axis moving stage 12 of the base stage 7 and an Rx axis moving stage 64 placed thereon.

  The Ry axis moving stage 63 is driven by the driving device 68 to swing and move the sample S so as to draw an arc locus about the χ axis line X (χ) as indicated by an arrow Ry in FIG. Further, the Rx axis moving stage 64 in the mounting stage 58 in FIG. 8 is driven by the driving device 69 to draw an arc locus about the sample S around the χ axis line X (χ) as indicated by the arrow Rx in FIG. Oscillate and move. The rocking movements Rx and Ry as described above are performed, for example, when finely adjusting the posture of the sample S with respect to X-rays incident on the sample S.

  On the upper surface (that is, the coupling surface) of the base stage 7 in the present embodiment, as in the case of the previous embodiment, the fitting convex portion 21, the fitting hole 24, the base-side wiring board 27, and the like shown in FIG. A base side terminal 31b is provided. Further, on the bottom surface (that is, the coupling surface) of the mounting stage 58, the fitting recess 22, the fitting pin 23, the mounting side wiring board 37, and the mounting side terminal shown in FIG. 31a is provided. Therefore, when the mounting stage 58 is mounted on the base stage 7, electrical connection between the two stages is automatically achieved when the two stages are fitted together, and the operation is very simple. is there. Further, the mounting stage 58 can be prevented from being displaced with respect to the base stage 7 by the action of the fitting structure provided between the two stages. In addition, since the wiring in the mounting stage 58 is not exposed to the outside of the mounting stage 58 and the base stage 7, damage to the wiring and peripheral devices can be prevented.

  If the structure of the bottom surface of the mounting stage 8 shown in FIG. 1 and the structure of the bottom surface of the mounting stage 58 shown in FIG. 8 are formed in the same manner, for example, the bottom structure of both stages is shown in FIG. If the structure is unified, it is easy to remove the mounting stage 8 from the base stage 7 in the X-ray analyzer 1 of FIG. 1 and mount the mounting stage 58 shown in FIG. 8 on the base stage 7 instead. Can do. That is, the XY axis translation stage and the Rx and Ry axis swing movement stages can be exchanged and attached to the base stage 7. Such exchange is not limited to exchange between the XY-axis translation stage and the Rx / Ry-axis oscillating stage, and it is only necessary to share the configuration of the coupling surface of the base stage and the coupling surface of the mounting stage. For example, it can be realized with respect to any other kind of moving stage.

(Third embodiment of X-ray analyzer and sample support device)
FIG. 10 shows a main part of still another embodiment of the X-ray analysis apparatus and the sample support apparatus according to the present invention. The overall external shape of this embodiment is the same as that of the embodiment of FIG. In the present embodiment, the structure of the upper surface of the base stage 7 shown in FIG. 4 used in the previous embodiment is modified. In the following, the modified part will be mainly described, and the description of the common configuration will be omitted.

  In the previous embodiment shown in FIG. 4, the base-side terminal 31b is formed to be elastically deformable by bending a conductive plate-like material. In this embodiment, such a terminal structure is used. Instead, as shown in the partial view (b) of FIG. 10, the base-side terminal is formed by the spring connector 61b. As shown in the partial view (c), the spring connector 61b is a connector having a structure in which a movable terminal 62 movable in the vertical direction is supported by a spring 65 as indicated by an arrow D-D '.

  In the present embodiment, when the mounting stage 8 of FIG. 5 is mounted on the base stage 7 of FIG. 10 as indicated by the arrow A in FIG. 3, the fitting recess 22 of FIG. Further, the fitting pin 23 in FIG. 5 is fitted into the fitting hole 24 in FIG. 10, and the mounting stage 8 is mounted on the base stage 7. When the stage is thus attached, the mounting side terminal (land) 31a in FIG. 5 and the movable terminal 62 of the spring connector 61b in FIG. 10 are automatically conductively connected to each other. 7, the electric wires 44 extending from the driving devices 18 and 19 on the mounting stage 8 side are connected to the mounting side terminal 31a on the mounting side wiring substrate 37, the spring connector 61b on the base side wiring substrate 27, and the base side wiring substrate. The electric wire 45 on the 27 side and the slip ring connector 47 are sequentially conductively connected to the external electric wire 48.

(Other embodiments)
The present invention has been described with reference to the preferred embodiments. However, the present invention is not limited to the embodiments, and various modifications can be made within the scope of the invention described in the claims.

  For example, in the embodiment shown in FIG. 1, the sample stage 6 is provided on the χ-axis moving stage 5, but the sample stage 6 may be provided on a moving stage other than the χ-axis moving stage. Further, the sample stage 6 can be provided on a fixed stage instead of the moving stage. Further, the moving stage incorporated in the base stage 7 is not limited to the Z-axis moving stage 11 and the φ-axis moving stage 12 shown in FIG. 7, and may be any other moving stage.

  Further, the moving stage incorporated in the mounting stage 8 is not limited to the Y-axis moving stage 13 and the X-axis moving stage 14 in FIG. 7, the Ry-axis moving stage 63 and the Rx-axis moving stage 64 in FIG. It can be set as a moving stage. 4 and 5, the base side terminal 31b provided on the base stage 7 is a deformable terminal, and the mounting side terminal 31a provided on the mounting stage 8 is a planar terminal. In other words, a flat terminal may be provided on the base stage 7 and a changeable terminal may be provided on the mounting stage 8.

1 is a perspective view showing an embodiment of an X-ray analyzer and a sample support device according to the present invention. It is a figure which shows the motion of the sample performed by the sample support apparatus of FIG. It is a perspective view which shows the usage condition of the sample support apparatus of FIG. It is a perspective view which shows the principal part of FIG. It is a perspective view which shows the other principal part of FIG. It is a perspective view which shows the modification of a deformable terminal. FIG. 2 is a side view showing the sample stage shown in FIG. It is a perspective view which shows other embodiment of the X-ray analyzer which concerns on this invention, and a sample support apparatus. It is a figure which shows the motion of the sample performed by the sample support apparatus of FIG. It is a perspective view which shows other embodiment of the sample support apparatus which concerns on this invention. It is a figure which shows an example of the conventional sample support apparatus.

Explanation of symbols

1. 1. X-ray analyzer, 2. sample support device; X-ray detector, 4. χ circle,
5. χ axis moving stage; 6. Sample stage, 7. Base stage, 8. Loading stage,
9. 10. Chi-drive device, Z-axis moving stage, 12. φ axis moving stage,
13. Y-axis movement stage, 14. X axis movement stage,
16, 17, 18, 19. Drive device, 21. Fitting protrusion, 22. Fitting recess,
23. Fitting pin, 24. Fitting hole, 26. Recess, 27. Base side wiring board,
28. Screws, 29. Through hole, 31a. Mounting side terminal, 31b. Base side terminal,
32. External connection terminal, 33. Substrate, 34. Pad, 36. Recess,
37. Mounting-side wiring board, 39. Through hole, 42. External connection terminal, 43. substrate,
44, 45, 48. Electric wire, 47. Slip ring connector, 49. Upper terminal,
50. Lower terminal, 56. Sample stage, 61b. Spring connector, 62. Movable terminal,
63. Ry axis movement stage, 64. Rx axis movement stage, 65. spring,
68, 69. Driving device, F.F. X-ray source, R0. Incident X-rays; sample,
Xh1. Horizontal reference axis, Xh2. Axis, Xv. Vertical reference axis

Claims (9)

The sample support of an X-ray analyzer having a sample support device for supporting a sample, an X-ray source for generating X-rays irradiated to the sample, and an X-ray detection means for detecting X-rays emitted from the sample A device,
In a sample support device that has a base stage and a mounting stage that is arranged to overlap the base stage, and supports a sample by the mounting stage,
The base stage and the mounting stage are overlapped with each other in a state of facing each other so as not to move relative to each other,
An electrical element provided on the mounting stage;
A mounting-side terminal that is provided in the coupling surface of the mounting stage and is electrically connected to the electrical element via an electric wire;
A base side terminal that is provided in the coupling surface of the base stage and can be conductively connected to the mounting side terminal;
With the mounting stage placed on the base stage, the mounting side terminal and the base side terminal are conductively connected,
The mounting stage has a plurality of portions that move relative to the coupling surface;
The mounting stage is detachably attached to the base stage at the coupling surface,
The electric wire is provided inside the mounting stage ,
The mounting stage has a plurality of moving stages installed on top of each other,
A plurality of the electrical elements are provided for the mounting stage,
A plurality of the mounting side terminals and the base side terminals are provided in the coupling surface, respectively.
The sample support device for an X-ray analyzer, wherein the plurality of mounting-side terminals and the plurality of base-side terminals are individually conductively connected . In the sample support apparatus of the X-ray analyzer according to claim 1,
A mounting side wiring board provided with the mounting side terminal; and a base side wiring board provided with the base side terminal;
The sample support apparatus for an X-ray analyzer, wherein the mounting side wiring board is fixed in a coupling surface of the mounting stage, and the base side wiring board is fixed in the base stage. In the sample support apparatus of the X-ray analyzer according to claim 2,
The mounting side wiring board has an external connection terminal, and the external connection terminal is electrically connected to the mounting side terminal through a wiring pattern formed on the mounting side wiring board.
The base-side wiring board has an external connection terminal, and the external connection terminal is electrically connected to the base-side terminal through a wiring pattern formed on the base-side wiring board. Sample support device. In the sample support device of the X-ray analyzer according to any one of claims 1 to 3,
A fitting structure provided between the base stage and the mounting stage and having a fitting portion and a fitted portion;
The sample support device for an X-ray analyzer, wherein the base stage and the mounting stage are overlapped with each other in a state where the fitting portion and the fitted portion are fitted to each other.   5. The sample support apparatus for an X-ray analyzer according to claim 4, wherein the fitting structure restricts the mounting stage from translating in a lateral direction with respect to the base stage, and further rotates with respect to the base stage. A sample support device for an X-ray analyzer characterized by restricting movement. In the sample support device of the X-ray analyzer according to any one of claims 1 to 5,
The base stage includes a Z-axis movement stage that moves the sample forward and backward with respect to the X-ray beam, and a φ-axis movement stage that rotates the sample in-plane,
The mounting stage is an XY axis moving stage that changes the X-ray irradiation position on the surface of the sample by sliding the sample in the plane, or an Rx-Ry axis moving stage that adjusts the posture of the sample with respect to the X-ray beam. Or a sample support device for an X-ray analysis device. In the sample support device of the X-ray analyzer according to any one of claims 1 to 6,
One of the mounting side terminal and the base side terminal is a deformable terminal formed by curving a material having elasticity and conductivity in a deformable manner,
The other of the mounting side terminal and the base side terminal is a planar terminal formed planarly by a conductive material,
When the mounting side terminal and the base side terminal are conductively connected, the deformable terminal is deformed by being pushed by the flat terminal. In the sample support apparatus of the X-ray analyzer according to claim 7,
The sample support device of an X-ray analyzer, wherein the deformable terminal is a plate-like terminal formed in a deformable curved shape or a spring connector formed by supporting a movable terminal with a spring.   An X-ray analysis apparatus comprising the sample support apparatus according to claim 1.

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