JP4621041B2 - Manufacturing method of piping unit - Google Patents

Description

The present invention integrates three-dimensionally pipes for supplying and discharging various liquids such as liquids such as tap water, pure water, alcohol, slurry, highly erodible chemicals or gases such as gas, hydrogen and nitrogen. The present invention relates to a manufacturing method of a piping unit made of a thermoplastic resin that is integrally formed and is compact, seamless, and hardly contaminated with dust.

Conventionally, piping for supplying and discharging various fluids in various buildings such as apartments, buildings, factories, etc., manufacturing equipment such as semiconductors and liquid crystals, and manufacturing equipment such as pharmaceuticals, foods and cosmetics, Tubular members such as multiple tubes are connected using pipe joints such as elbows, and measuring instruments such as pressure sensors, leak sensors, and flow meters, valves, pumps, flanges, etc. are installed in the middle of the piping and at the terminals. ing.
However, connecting a tubular member such as a tube by screwing or the like through a pipe joint or the like increases the connecting portion and increases the assembly cost because the pipe joint is large and expensive, and further, there is a gap in the pipe joint. In addition, there is a problem in that it is liable to cause a difference in level due to the accumulation of dust or the like and the hindrance to the smooth flow of fluid.
When joining end surfaces of tubular members such as tubes are formed in a flat shape and welded, the resin melted by pressurization at the time of welding protrudes from the inner peripheral surface of the joining portion, and the protruding welded portion becomes dust. If the tubular member is used to flow a fluid used in manufacturing equipment for semiconductors, liquid crystals, etc., and manufacturing equipment for pharmaceuticals, foods, cosmetics, etc. Due to the contamination by the semiconductor, the quality of manufactured semiconductors, liquid crystals, pharmaceuticals, foods, cosmetics, etc. is deteriorated, resulting in a decrease in yield and a problem of hygiene.
(Patent Document 1) states that “two metal plates are bonded together, and one or both of these metal plates are subjected to expansion tube processing, so that a capillary channel having a channel cross-sectional area of 4 mm ² or less between both metal plates; A tank portion having a relatively large inner diameter and a strainer insertion portion that opens at the end portion of the metal plate are formed to communicate with the capillary pipes, respectively, and the strainer is fitted and fixed in the strainer insertion portion. Piping member "is disclosed.
(Patent Document 2) states that “a flow path is formed inside a synthetic resin lump that is integrally molded and is homogeneously connected, and at least the reagent flow path that connects the reagent openings internally and the opening of the sample water. A synthetic resin flow channel member is provided that is provided with a sample water flow channel to be connected to each other and configured so as not to communicate with each other inside and to intersect with each other.
JP-A-6-137718 JP 2000-28049 A

However, the above conventional techniques have the following problems.
In (1) (Patent Document 1), the capillary conduit, the tank portion communicating with the capillary passage, and the strainer insertion portion that opens at the end portion are integrally formed. However, since the piping member is made of metal, it has a problem that it lacks chemical resistance, has limited applications, and lacks versatility.
Further, since the piping member is formed by bonding two metal plates, the piping is two-dimensionally arranged in a plane, and there is a problem that the miniaturization is insufficient and design flexibility is lacking.
(2) In (Patent Document 2), since the flow path is integrally formed inside the synthetic resin lump, dust or the like stays in the flow path or disturbs the smooth flow of the fluid. However, it has a problem that its shape and application are limited and lacks versatility.
In addition, since UV curable resin is used as the synthetic resin and the flow path is formed using stereolithography, design flexibility is lacking, the manufacturing process is complicated, mass production is difficult, dimensional management is difficult, and dimensional accuracy is difficult. There was a problem of lack of reproducibility.
Furthermore, there is a possibility that the component of the synthetic resin that forms the flow path may be eluted, and there is a problem that it is difficult to use it for a highly erodible chemical or a highly pure fluid.
(3) In existing semiconductor manufacturing equipment, etc., various functional parts are installed in a limited space, so if you make a mistake in the construction procedure, the piping is so complex that it has to be reworked from the beginning and the workability is poor, and screwing However, the connecting portions connected with each other have a problem in that they are liable to cause defects such as leakage and lack reliability.

The present invention solves the above-mentioned conventional problems, and piping for supplying and discharging various fluids is integrally formed and integrated three-dimensionally, so that it is highly resistant to external impacts and has safety and chemical resistance. Excellent installation, easy installation and replacement, excellent workability, compact and excellent space saving, and there are no gaps, steps, seams, etc. in the pipes, making it difficult for dust to enter. The flow of air is smooth, and it is easy to perform contamination control and flow rate management of manufacturing equipment, etc., and can form a piping unit with excellent reliability and maintainability. An object of the present invention is to provide a manufacturing method of a piping unit that is easy to process, excellent in mass productivity, reproducible in dimensional accuracy, and excellent in sealing reliability.

In order to solve the above-described problems, the piping unit manufacturing method of the present invention has the following configuration.
According to a first aspect of the present invention, there is provided a pipe unit manufacturing method comprising: a hole forming step for forming a hole from a surface of a block body made of a thermoplastic resin; and at least one end opening on the surface of the block body. An air hole drilling process for drilling an air hole communicating with the drilling hole, and a lid member fitting process for fitting a thermoplastic resin lid member from the surface of the block body to the drilling hole; An internal channel forming step of heating and heat-sealing the block body and the lid member to block the opening end of the perforation hole with the lid member; and two or more open channels communicating with the internal channel An opening channel forming step for drilling, and in the air hole drilling step, the opening channel is formed in accordance with a position where the opening channel is drilled in the subsequent opening channel forming step. The air hole smaller than the hole diameter is formed .
This configuration has the following effects.
(1) Since the thermoplastic resin block body and the lid member can be directly heat-sealed, the bonding strength can be increased, and the block body and the lid member are integrated to form a joint spot, a pinhole, etc. Can be prevented, and leakage of fluid flowing through the internal flow path can be prevented.
(2) Since pipes having two or more open flow channels and an internal flow channel communicating with each other inside the block body are three-dimensionally integrated inside the block body, pipe joints such as cheese and elbows are unnecessary. Pipes can be made compact, and there are no gaps, steps, or joints in the pipes, making it difficult for dust to enter. Smooth flow of fluid, contamination control of manufacturing equipment, etc., suppression of microbubbles, and flow control Etc. can be easily performed.
(3) Since the pipe has two or more open flow channels that communicate with each other inside the block body and at least one end is opened on the surface of the block body, the open flow channel and a pipe joint or tube such as cheese or elbow Tubular members such as can be connected, and can be easily incorporated in the middle of existing piping. Moreover, tubular members, such as various pipe joints and tubes, can be formed in the open channel.
(4) Since the piping is integrally formed inside the block body, assembly and replacement work is easy, and handling and maintenance are excellent.
(5) Since the perforation hole can be formed from the surface of the block body by the perforation hole forming step, the perforation hole can be formed in any direction at an arbitrary position of the block body, so that design flexibility is possible. Excellent.
(6) The lid member is fitted from the surface of the block body to the drill hole by the lid member fitting process, and the block body and the lid member are heated and heat-sealed by the internal flow path forming process to open the opening end of the drill hole. Since the internal flow path can be formed by closing the cover with the lid member, fluid leakage from the internal flow path can be reliably prevented.
(7) Since the air hole drilling step can drill an air hole having at least one end opened on the surface of the block body and communicating with the drill hole, the block body and the lid member were heated in the internal flow path forming step. In this case, the air expanded inside the drilling hole can be released from the air hole to the outside of the block body, and the cover member can be prevented from jumping out of the block body, and the drilling hole is securely closed and the internal flow is prevented. A path can be formed.
(8) By opening the opening channel in the opening channel forming step after the end of the internal channel forming step, thermal deformation of the opening channel does not occur, and the shape and dimensional accuracy of the opening channel are reproducible. Excellent stability and excellent bonding reliability in the open channel.
(9) The block body and the lid member can be integrated by heat fusion, and leakage of the fluid flowing through the internal flow path can be prevented.
(10) By opening the air holes in the air hole drilling process in the previous process in accordance with the position where the open channel is drilled in the subsequent process of forming the open flow path, There is no opening other than the path, and the process of closing the air hole is unnecessary, and the productivity is excellent, and fluid leakage does not occur and the reliability is excellent.

Here, as the thermoplastic resin forming the block body and the lid member, those having excellent chemical resistance and heat resistance and high mechanical strength are preferable, such as tetrafluoroethylene (PTFE, PFA, FEP, ETFE), polyfluoride. Fluorine resins such as vinylidene (PVDF), polyether ether ketone, and the like are preferably used.
An arbitrary number of open channels can be provided not only at the end of the internal channel but also at any position and direction. Further, when a plurality of independent (not communicating) internal flow paths are formed in one piping unit, a plurality of piping through which different types of fluids flow can be integrated, resulting in excellent space saving.
The open channel includes tubes, pipes and other tubular members, cheese and elbow pipe joints, pressure sensor pressure sensing parts, leak sensor sensing parts, temperature sensor sensor parts, flow meter transmitters and receivers, etc. Ends of various measuring instruments, valves, flanges, etc. can be connected. Ends of tubular members, pipe joints, measuring instruments and the like may be connected by screws or the like, or may be joined by welding. In the case of a flow meter, the transmitter and receiver of an existing flow meter may be connected to the opening flow path of the piping unit, or the part corresponding to the measurement flow path of the flow meter is used as the internal flow path of the piping unit. It is also possible to form only the transmitter and receiver.
In addition, when fitting parts such as ridges and ridges are formed on the outer periphery of the opening channel, or screw holes for fixing are drilled on the circumference, pipe joints and measuring instruments can be easily used. It can be connected to and has excellent workability.

  In addition, as a shape of a block body, it can form in various shapes, such as a substantially L shape, a substantially T shape, and a substantially cross shape other than a rectangular parallelepiped shape or a cube shape. Moreover, you may form a projection part in the arbitrary positions of a block body. Thereby, an open flow path can be formed in various positions and directions of the block body, and more complicated piping can be integrated and integrated. In particular, when a tubular part or a joint part is formed by cutting or the like in the protruding part of the block body formed in a substantially L shape or a T shape, the utility and workability can be improved. Connection with piping etc. can be performed easily and complicated piping can be realized simply.

By forming at least one of the block body and the lid member with the modified PTFE or the resin composition containing the modified PTFE as a main component, the processing is easy and excellent in mass productivity, and the reproducibility of the dimensional accuracy and the sealing performance are improved. Excellent reliability.

具体的には、ダイキン工業（株）製の商品名モ−ルディングパウダ−（Ｍ−１１１、Ｍ−１１２、Ｍ−１３９），三井デュポン社製（７０Ｊ），住友３Ｍ（ＴＦＭ１６００）やヘキスト社製のもの等が好適に用いられる。
組成物として配合される他の合成樹脂としてはＰＦＡ（テトラフルオロエチレン−パーフルオロアルキルビニルエーテル重合体）、ＰＴＦＥ等があげられる。
ＰＦＡを加えることにより、熱融着時間の短縮化が図られ、コストを低減することができる。また、従来のＰＴＦＥを加えることにより熱融着時の保形性を向上できると共に、希釈剤として優れコストを低減できる。 Here, as the modified PTFE, at least one of the perfluorinated ethers represented by the following chemical formulas (Chemical Formula 1), (Chemical Formula 2), and (Chemical Formula 3) is used as a modifier during the suspension polymerization. PTFE (polytetrafluoroethylene) polymerized by adding as is used.

Specifically, Daikin Industries, Ltd. product name molding powder (M-111, M-112, M-139), Mitsui DuPont (70J), Sumitomo 3M (TFM1600), and Hoechst And the like are preferably used.
Examples of other synthetic resins blended as the composition include PFA (tetrafluoroethylene-perfluoroalkyl vinyl ether polymer), PTFE, and the like.
By adding PFA, the heat fusion time can be shortened and the cost can be reduced. In addition, the addition of conventional PTFE can improve the shape retention at the time of heat-sealing, and can be excellent as a diluent and can reduce the cost.

The amount of PFA used is 1 wt% to 95 wt%, preferably 1 wt% to 80 wt%. As the content becomes less than 1 wt%, the effect of addition is less likely to be recognized, and as the content exceeds 80 wt%, the shape retention at the time of heat-sealing decreases, and the dimensional accuracy of the internal flow path tends to decrease. . In particular, as the amount exceeds 95 wt%, the tendency of the internal flow path to be easily deformed becomes remarkable, which is not preferable.
A conventional PTFE content is 1 wt% to 90 wt%, preferably 1 wt% to 70 wt%. As the content is less than 1 wt%, the effect of addition is less likely to be recognized, and as the content exceeds 70 wt%, the bonding strength tends to decrease. In particular, as the content exceeds 90 wt%, the tendency of the joining to become insufficient and leakage or the like is likely to occur becomes remarkable.

Pipe, if an external connection formed or disposed to protrude to the surface of the block body communicating with the opening passage, facilitates pipe joint and instruments and the like into the opening passage through the external connection portion It can be connected to and has excellent workability.

Here, the external connection portion may be formed integrally with the block body by cutting, or may be welded after fitting a PFA formed in a pipe shape or various joint shapes.
When a male thread part or a female thread part is formed in the external connection part, it is possible to easily connect a pipe joint, a measuring instrument, etc., and it is excellent in assembling workability and maintainability. A plurality of piping units can also be connected via an external connection part. In that case, after simplifying the configuration of the piping of each piping unit, complicated piping can be easily realized, and the productivity and versatility are excellent.

Piping, if a valve valve seat which is Katachi設the block body communicating with the opening passage, easily valve can be positioned and fixed, easily carried-off and flow control of the opening channel Inflow and outflow of fluid can be controlled.
In addition, the valve valve seat is formed in communication with the open flow path, eliminating the need for conventional connection with tubes and joints, reducing the valve installation space and piping length, saving space, Design flexibility can be improved.
Here, the valve valve seat is formed in a concave shape or a convex shape. In the case of a concave shape, it can be formed by digging down the end of the open channel. In the case of a convex shape, it is formed integrally with the block body by shaving, or a member formed of a separate member like the external connection portion is fitted into the opening flow path and then welded.
There may be any number of internal flow paths communicating with the open flow path in which the valve valve seat portion is formed. By disposing the valve in the valve valve seat portion, the flow of fluid can be controlled by selectively communicating a plurality of internal flow paths with the open flow path, in addition to simply opening and closing the open flow path.

When the piping has a plurality of internal flow paths formed in communication with each other inside the block body, it is possible to reduce the size of the complicated piping by integrating the plurality of open flow paths at arbitrary positions. It can be formed and has excellent design flexibility.
Here, the hole diameters of the plurality of internal channels may be the same or different. Further, the communication location of the internal channel may be at the end of the channel or in the middle.

Here, the drilling hole forming step, the air hole drilling step, and the opening channel forming step are performed by a drill, an end mill, or the like. Since the drilling hole cannot be processed after it is closed by the lid member, sufficient accuracy is ensured in the drilling hole forming step. Note that the deformation of the internal flow path in the internal flow path forming process is relatively small and sufficiently acceptable. The perforation hole can be formed in a circular shape, an elliptical shape, a polygonal shape, or the like.
The lid member used in the lid member fitting step is formed in a columnar shape, an elliptical column shape, a polygonal column shape or the like in accordance with the shape of the drilled hole. Since the entire outer periphery of the lid member can be fused to the drilled hole and the bonding area can be increased, the reliability of the bonding is excellent. In addition, you may form an unevenness | corrugation, a spiral protruding item | line, etc. in the outer periphery of a cover member. At the time of fusing, it is possible to make it tightly contact with the drilled hole and improve the reliability of sealing.

The heating temperature T in the internal flow path forming step is preferably 250 ° C. ≦ T ≦ 450 ° C. As the heating temperature T becomes lower than 250 ° C., unjoined parts tend to occur, and as the heating temperature T becomes higher than 450 ° C., the synthetic resin tends to deteriorate and mechanical strength tends to decrease. Neither is preferred.
The opening channel formed in the opening channel forming step can be provided at any position communicating with the position of the air hole and the internal channel.
If the air hole cannot be formed in accordance with the position of the opening flow path due to design reasons, an air hole closing step is required. It can be blocked by welding a closing member formed in a columnar shape or the like in the air hole and then welding. In addition, when the hole diameter of the air hole is relatively small or when the depth is shallow, it can be expected that the air hole is naturally clogged by thermal expansion due to heating in the internal flow path forming process, but from the viewpoint of reliability. It is desirable to perform the air hole closing step.

Invention of Claim 2 is a manufacturing method of the piping unit of Claim 1 , Comprising: The external connection which communicates with the said opening flow path, and forms or arrange | positions the external connection part which protruded on the surface of the said block body It has the structure provided with the part formation process.
With this configuration, in addition to the operation of the first aspect , the following operation is provided.
(1) By the external connection portion forming step, an external connection portion that can communicate with the opening flow path and easily connect a pipe joint, a measuring instrument, or the like can be formed or disposed.

Here, when the external connection portion is formed integrally with the block body, a convex portion is formed in advance at the position where the external connection portion of the block body is formed, or the entire block body is formed larger than the finished dimensions. Then, the outer periphery of the convex portion and the surface of the block body are cut.
When welding an external connection part that is formed in a pipe shape or the like with a separate member, a ridge is formed on the outer periphery of the opening end (block body surface) of the opening channel, or a ridge is formed on the inner periphery. It is preferable to do. Thereby, the edge part of an external connection part can be reliably abutted and welded to a protruding item | line part or a recessed part, and it is excellent in the reliability of sealing. In particular, when the inner peripheral surface of the ridge is formed in an inclined shape that is expanded toward the outer peripheral side of the end surface, the welded portion formed on the joint end surface protrudes toward the inner peripheral side of the opening channel at the time of welding. The inner peripheral surface of the welded portion can be formed smoothly. Thereby, it is difficult for dust to stay and the fluid can flow smoothly, and the reliability can be improved.
Moreover, you may provide the valve-valve-seat part formation process of making a concave and convex valve-valve seat part in a block body in communication with an open flow path. As a result, the valve can be easily positioned and fixed.

As described above, according to the method for manufacturing a piping unit of the present invention, the following advantageous effects can be obtained.
According to invention of Claim 1, it has the following effects.
(1) Since the thermoplastic resin block body and the lid member can be directly heat-sealed, the bonding strength can be increased, and the block body and the lid member are integrated to form a joint spot or a pinhole. It is possible to provide a method for manufacturing a piping unit that is excellent in the reliability and durability of the joint, which can prevent the occurrence of the occurrence of leakage and prevent leakage of fluid flowing through the internal flow path.
(2) Since pipes having two or more open flow channels and an internal flow channel communicating with each other inside the block body are three-dimensionally integrated inside the block body, the connection between the open flow channel and the internal flow channel This eliminates the need for pipe joints such as cheese and elbows, which makes it possible to reduce the size of the piping and is excellent in space-saving. It is possible to provide a manufacturing method of a piping unit excellent in reliability and handleability, which is easy to control contamination of facilities, suppress generation of microbubbles, and manage flow rate.
(3) Since two or more open flow passages communicate with the internal flow passage inside the block body, various pipe joints such as cheese and elbows and tubular members such as tubes are formed in each open flow passage, It is possible to provide a method of manufacturing a piping unit excellent in practicality and workability that can be easily connected to a middle of existing piping with a pipe joint or a tubular member.
(4) Since the piping is integrally formed inside the block body, it is possible to provide a method of manufacturing a piping unit that is easy to assemble and replace, and that is excellent in handling and maintenance.
(5) In the drilling hole forming step, the drilling hole is drilled from the surface of the block body, so that the drilling hole can be formed in any direction at any position of the block body. A method for manufacturing a piping unit can be provided.
(6) In the lid member fitting step, the lid member is fitted from the surface of the block body to the drilled hole, and in the internal flow path forming step, the block body and the lid member are heat-sealed, thereby closing with the lid member. Therefore, it is possible to provide a method for manufacturing a piping unit excellent in reliability and mass productivity that can reliably prevent leakage of fluid from the internal flow path.
(7) In the air hole drilling step, air that communicates with the drill hole is drilled so that the air that has expanded inside the drill hole when the block body and the lid member are heated in the internal flow path forming step. Can be released from the air hole to the outside of the block body, so that the lid member can be prevented from jumping out of the block body, and the drilling hole can be reliably closed, which is excellent in joining reliability and workability. The manufacturing method of a piping unit can be provided.
(8) By opening the opening channel in the opening channel forming step after the end of the internal channel forming step, thermal deformation of the opening channel does not occur, and the shape and dimensional accuracy of the opening channel are reproducible. It is possible to provide a manufacturing method of a piping unit that is excellent in stability and excellent in reliability of joining in an open channel.
(9) A fluid that flows through the internal flow path by heat-sealing and integrating the block body formed of a modified PTFE or a resin composition mainly composed of modified PTFE with a lid member. It is possible to provide a highly reliable method for manufacturing a piping unit that can reliably prevent leakage and the like.
(10) By opening the opening channel at the position of the air hole in the opening channel forming step, the completed piping unit has no opening other than the opening channel, and the process of closing the air hole is unnecessary. It is possible to provide a method for manufacturing a piping unit that is excellent in reliability and that can reliably prevent fluid leakage and that is excellent in reliability.

According to invention of Claim 2 , in addition to the effect of Claim 1 , it has the following effects.
(1) In the external connection part forming step, it is possible to form or arrange an external connection part that can be easily connected to a pipe joint, a measuring instrument, etc. in communication with the opening channel, and has excellent productivity. The manufacturing method of a piping unit can be provided.

Hereinafter, the manufacturing method of the piping unit in embodiment of this invention is demonstrated, referring drawings below.
(Embodiment 1)
FIG. 1 is a perspective view showing a piping unit manufactured by the manufacturing method of a piping unit according to Embodiment 1 of the present invention.
In FIG. 1, 1 is a piping unit manufactured by the manufacturing method of a piping unit in Embodiment 1 of the present invention, and 2 is a piping unit 1 formed of modified PTFE or a resin composition containing modified PTFE as a main component. The block body, 2a is the upper surface of the block body 2, 2b is the side surface of the block body 2, 3 is a pipe formed three-dimensionally inside the block body 2, and 4 and 5 have one end on the upper surface 2a of the block body 2. Two open flow paths of the pipe 3 opened and drilled, 6 is an internal flow path of the pipe 3 formed in communication with the open flow paths 4 and 5 inside the block body 2, and 7 is an open flow path 4 The valve valve seat portion 8 is formed in a concave shape on the upper surface 2a of the block body 2, and 8 is provided around the valve valve seat portion 7 for fixing a valve disposed on the valve valve seat portion 7. The fixed hole 9 is formed so as to project from the upper surface 2a of the block body 2 in communication with the opening channel 5. The is an external connection.

The manufacturing method of the piping unit in Embodiment 1 of this invention formed as mentioned above is demonstrated.
2 is a perspective view showing the hole forming step, FIG. 3 is a perspective view showing the air hole forming step, and FIG. 4 is a perspective view showing the lid member fitting step and the internal flow path forming step. FIG. 5 is a perspective view showing the opening flow path forming step.

First, in the hole forming step, a hole 10 having an opening end 11 opened on the side surface 2b of the block body 2 is formed at a position corresponding to the internal flow path 6 in FIG. Since the drilling hole 10 cannot be post-processed, sufficient accuracy is secured at this point.
Next, in the air hole drilling step, air holes 12 and 13 are drilled at positions corresponding to the opening channels 4 and 5 in FIG. 1 as shown in FIG. The hole diameters of the air holes 12 and 13 are sufficient to allow air to circulate and may be smaller than the hole diameters of the opening channels 4 and 5. Moreover, since the air holes 12 and 13 should just discharge | emit the air in the inside of the drilling hole 10, you may provide only any one.
Next, in the lid member fitting step, as shown in FIG. 4, a modified PTFE or a resin composition containing modified PTFE as a main component is formed into a cylindrical shape having an outer diameter substantially equal to the diameter of the hole 10. The lid member 14 thus fitted is fitted from the opening end 11 of the drilling hole 10.
In this embodiment, the perforation hole 10 is formed in a circular shape and the lid member 14 is formed in a cylindrical shape. However, the perforation hole 10 can be formed in an elliptical shape, a polygonal shape, or the like other than the circular shape. The lid member 14 can be formed in an elliptical column shape, a polygonal column shape, or the like according to the shape of the perforated hole 10. Further, when irregularities, spiral ridges, or the like are formed on the outer periphery of the lid member 14, the lid member 14 can be reliably brought into close contact with the inner peripheral surface of the drilling hole 10, and the sealing reliability can be improved.

Next, in the internal flow path forming step, the cover member 14 shown in FIG. 4 is heated and thermally fused to integrate the block body 2 fitted in the drilling hole 10, thereby integrating the opening end of the drilling hole 10. 11 is closed to form the internal flow path 6 (see FIGS. 1 and 5). Since the entire outer periphery of the lid member 14 can be fused to the inner peripheral surface of the perforation hole 10 and the bonding area can be increased, the reliability of the bonding is excellent.
During heating in the internal flow path forming step, the air expanded inside the drilling hole 10 is discharged from the air holes 12 and 13 drilled in the air hole drilling step to the outside of the block body 2. It is possible to prevent the lid member 14 from jumping out of the block body 2.

Next, in the opening channel forming step, the opening channels 4 and 5 are formed so as to enlarge the air holes 12 and 13 in FIG. 4 as shown in FIG. By aligning the positions of the air holes 12 and 13 drilled in the air hole drilling process of the previous process with the positions of the opening channels 4 and 5 drilled in the opening channel forming process, unnecessary processes are unnecessary. Excellent productivity and reliability.
Next, in the valve valve seat portion forming step, the concave valve valve seat portion 7 communicating with the opening flow path 4 is formed on the upper surface 2a of the block body 2 (see FIG. 1). A plurality of fixing holes 8 are formed around the valve valve seat portion 7 (see FIG. 1). Thereby, the valve | bulb arrange | positioned at the valve valve seat part 7 can be positioned and fixed easily.
In the present embodiment, the valve valve seat portion 7 is formed in a concave shape, but may be formed in a convex shape. The convex valve valve seat 7 is formed integrally with the block body 2 by cutting, or is formed by fitting another convex member into the opening flow path 4 and then welding.

Next, in the external connection portion forming step, a pipe-like external connection portion 9 that communicates with the opening channel 5 and protrudes from the upper surface 2a of the block body 2 is disposed by welding (see FIG. 1). Thereby, a pipe joint, a measuring instrument, another piping unit, etc. can be easily connected to the opening flow path 5 via the external connection part 9. In particular, when a male thread part is formed on the outer periphery of the external connection part 9 or a female thread part is formed on the inner periphery, connection of pipe joints, measuring instruments, etc. can be easily performed, Excellent maintainability. Moreover, you may form the external connection part 9 in the various joint shape provided with the some connection part other than cylindrical shape. Thereby, connection with complicated piping can be performed simply.
When the external connection portion 9 is disposed by welding, the material of the external connection portion 9 is preferably PFA. Moreover, it is preferable to form a protruding line part or a recessed line part in the opening edge part (upper surface of the block body 2) of the opening flow path 5. FIG. Thereby, the edge part of the external connection part 9 can be reliably abutted and welded to a protruding item | line part or a recessed item part, and it is excellent in the reliability of sealing.
The external connection portion 9 may be formed integrally with the block body 2 by forming the block body 2 in a large size and cutting the upper surface 2a.

In the present embodiment, the block body 2 is formed in a rectangular parallelepiped shape. However, the block body 2 can be formed in various shapes such as a cube shape, a substantially L shape, a substantially T shape, and a substantially cross shape. A protrusion can be provided at the position. Thereby, the opening flow path 5 can be formed in the protrusion part provided in the various positions and directions of the block body 2, and more complicated piping 3 can be integrated and integrated. In particular, when one or a plurality of tubular parts or joints are provided on the protrusions of the block body 2 by cutting or welding, it is possible to easily connect with more complicated pipes and the like. Can be improved.
Instead of forming both the block body 2 and the lid member 14 with modified PTFE or a resin composition containing modified PTFE as a main component, only one of them is modified PTFE or modified PTFE as a main component. You may form with a resin composition. Further, as the material of the block body 2 and the lid member 14, a fluororesin such as ethylene tetrafluoride (PTFE, PFA, FEP, ETFE) or polyvinylidene fluoride (PVDF), or a thermoplastic resin such as polyether ether ketone may be used. Similarly, the piping unit 1 can be formed.

Since the piping unit manufactured by the manufacturing method of the piping unit in Embodiment 1 is configured as described above, it has the following effects.
(1) At least one of the block body 2 and the lid member 14 is formed of modified PTFE or a resin composition mainly composed of modified PTFE, so that the block body 2 and the lid member 14 are directly heat-sealed. In this case, the reproducibility of dimensional accuracy and the reliability of sealing can be improved, the joint strength can be increased, and the block body 2 and the lid member 14 can be integrated to prevent the occurrence of joint spots and pinholes, It is possible to prevent leakage of fluid flowing through the open flow path 5 and the internal flow path 6.
(2) Since the pipe 3 is integrally formed inside the block body 2, assembly and replacement are easy, and handling and maintenance are excellent.
(3) Since the pipe 3 is provided with the external connection portion 9 that communicates with the open flow path 5 and protrudes from the upper surface 2 a of the block body 2, the pipe 3 is connected to the open flow path 5 via the external connection portion 9. Joints and measuring instruments can be easily connected, and workability is excellent.
(4) Since the pipe 3 is provided with the concave valve valve seat portion 7 that is formed in the block body 2 so as to communicate with the opening flow path 4, the end portion of the valve is fitted to the valve valve seat portion 7. Thus, the valve can be easily positioned and fixed, and the opening channel 4 can be easily opened and closed to control the inflow, outflow and flow rate of the fluid.
(5) Since the valve valve seat portion 7 is formed in communication with the opening flow path 4, connection with a tube or a joint as in the prior art is unnecessary, and the valve installation space and the piping length can be reduced. Space and design flexibility can be improved.
(6) Valves, various pipe joints, measuring instruments, etc. connected using the valve valve seat 7 and the external connection part 9 can be handled integrally with the piping unit 1 to improve workability and practicality. be able to.
(7) Since a plurality of piping units 1 can be connected via the external connection portion 9, it is possible to easily realize complicated piping while simplifying the configuration of the piping 3 of each piping unit 1. Excellent productivity and versatility.

Since the manufacturing method of the piping unit in Embodiment 1 is configured as described above, it has the following effects.
(8) The drilling hole 10 can be drilled from the side surface 2b of the block body 2 by the drilling hole forming process, and the lid member 14 is fitted from the opening end 11 of the drilling hole 10 by the lid member fitting process. Can be made.
(9) The block body 2 and the lid member 14 are heated and heat-sealed by the internal flow path forming step, and the opening end 11 of the hole 10 is closed with the lid member 14 to form the internal flow path 6. Therefore, fluid leakage from the internal flow path 6 can be reliably prevented.
(10) Since the air holes 12 and 13 having one end opened on the upper surface 2a of the block body 2 and communicated with the hole 10 can be formed by the air hole drilling process, the block body 2 is formed in the internal flow path forming process. When the lid member 14 is heated, the air expanded inside the perforation hole 10 can escape from the air holes 12 and 13 to the outside of the block body 2, and the lid member 14 jumps out of the block body 2. The internal flow path 6 can be formed by reliably blocking the perforated hole 10.
(11) By opening the opening channels 4 and 5 in the opening channel forming step after the internal channel forming step is completed, the opening channels 4 and 5 are not thermally deformed, and the opening channels 4 and 5 are formed. The reproducibility and stability of the shape and dimensional accuracy are excellent, and the bonding reliability in the open channels 4 and 5 is excellent.
(12) By forming at least one of the block body 2 and the lid member 14 with a modified PTFE or a resin composition containing the modified PTFE as a main component, the block body 2 and the lid member 14 are thermally fused. They can be integrated, and leakage of fluid flowing through the internal flow path 6 can be prevented.
(13) By opening the opening channels 4 and 5 at the positions of the air holes 12 and 13 in the opening channel forming step, the completed piping unit 1 has no openings other than the opening channels 4 and 5. The process of closing the air holes 12 and 13 is not required and the productivity is excellent, and the fluid is not leaked and the reliability is excellent.
(14) By the external connection portion forming step, the external connection portion 9 that can communicate with the opening channels 4 and 5 and can easily connect a pipe joint, a measuring instrument, or the like can be formed or disposed.
(15) Through the valve valve seat portion forming step, the concave valve valve seat portion 7 that communicates with the opening flow paths 4 and 5 and can easily position and fix the valve can be formed.

(Embodiment 2)
FIG. 6 is a perspective view showing a piping unit according to Embodiment 2 of the present invention.
The piping unit 1a in the second embodiment is different from the first embodiment in that a plurality of open flow paths 4a to 4f, 5a to 5e and internal flow paths 6a to 6l are three-dimensionally integrated in the block body 22. It is a point provided with the piping 3a formed in this way.

It will be described that the piping unit 1a according to the second embodiment including the piping 3a having a complicated configuration as shown in FIG. 6 can be manufactured by the same manufacturing method as in the first embodiment.
7 is a perspective view showing the hole forming step, FIG. 8 is a perspective view showing the air hole forming step, and FIG. 9 is a perspective view showing the lid member fitting step and the internal channel forming step. FIG. 10 is a perspective view showing the opening flow path forming step.

  First, in the drilling hole forming step, drilling holes 10a to 10l are drilled at positions corresponding to the internal flow paths 6a to 6l in FIG. 6 as shown in FIG. The drill holes 10a, 10e, 10l have open ends 11a, 11e, 11l on the left side 22c of the block body 22, and the drill holes 10b, 10f, 10k are open ends 11b, 11f, 11f on the upper surface 22a of the block body 22. 11k, the drill holes 10c, 10g, 10i have open ends 11c, 11g, 11i on the back surface 22e of the block body 22, and the drill holes 10d, 10h, 10j open on the right side surface 22b of the block body 22. It has ends 11d, 11h, 11j.

Next, in the air hole drilling step, air holes 12a, 12b and 13a are drilled at positions corresponding to the opening channels 4c, 4d and 5a in FIG. 6 as shown in FIG. The air hole only needs to be able to discharge the air expanding inside the perforation holes 10a to 10l, and can be formed at the position of the open flow channel other than the open flow channels 4c, 4d, and 5a.
In the present embodiment, it is possible to communicate all the drilling holes 10a to 10l with only one air hole 13a, and to discharge the internal air. However, a plurality of air holes 12a and 12b are provided. By adding, the air discharge performance is improved. As described above, the number and position of the air holes can be appropriately selected in consideration of air exhaustability.
If the air holes cannot be drilled in accordance with the positions of the open channels 4a to 4f and 5a to 5e due to design reasons, etc., the air holes are formed at arbitrary positions communicating with the drill holes 10a to 10l. Can be drilled. When the hole diameter of the air hole is relatively small or when the depth is shallow, it can be expected that the air hole is naturally clogged by thermal expansion due to heating in the internal flow path forming step, but it will be described later from the viewpoint of reliability. It is desirable to perform an air hole closing process.

Next, in the lid member fitting step, as shown in FIG. 9, the modified PTFE or a resin composition mainly composed of modified PTFE has an outer diameter substantially equal to the diameter of each of the drill holes 10a to 10l. The lid members 14a to 14l formed in a columnar shape are fitted from the opening ends 11a to 11l of the drill holes 10a to 10l.
Next, in the internal flow path forming step, the cover members 14a to 14l shown in FIG. 9 are formed by heating and heat-sealing and integrating the block body 22 fitted in the hole 10a to 10l. The open ends 11a to 11l of the holes 10a to 10l are closed to form internal flow paths 6a to 6l (see FIGS. 6 and 10).

Next, in the opening channel forming step, the opening channels 4a to 4f and 5a to 5e are formed as shown in FIG. In addition, about the opening flow paths 4c, 4d, and 5a, it drills so that the air holes 12a, 12b, and 13a in FIG. 9 may be expanded.
Next, in the valve valve seat portion forming step, the concave valve valve seat portion 7 communicating with the opening channels 4a to 4f is formed on the upper surface 22a of the block body 22 (see FIG. 6). A plurality of fixing holes 8 are formed around the valve valve seat portion 7 (see FIG. 6).
Next, in the external connection portion forming step, the pipe-shaped external connection portion 9 that communicates with the opening flow paths 5a to 5e and protrudes from the upper surface 22a and the front surface 22d of the block body 22 is disposed by welding (see FIG. 6). .
Next, when air holes are drilled in positions other than the positions of the open channels 4a to 4f and 5a to 5e, an air hole closing process is performed as necessary. After fitting a blocking member formed in a columnar shape or the like into the air hole, the air hole is closed by welding. The air hole closing step may be performed anytime after the internal flow path forming step.

Since the piping unit in the second embodiment is configured as described above, it has the following action in addition to the first embodiment.
(1) The complicated piping 3a can be three-dimensionally integrated inside the block body 22 without using a pipe joint such as cheese or elbow, and can be formed compactly and integrally. There are no steps, seams, etc., and it is difficult for dust to enter, and the flow of fluid is smooth. Contamination control of manufacturing equipment, etc., generation of microbubbles, flow control, etc. can be easily performed.
(2) The external connection portion 9 is disposed in the two or more open flow paths 5a to 5f that communicate with the internal flow paths 6a to 6l in the block body 22 and at least one end opens to the upper surface 22a and the front surface 22d of the block body 22. Therefore, it can be easily incorporated in the middle of existing piping simply by connecting to a pipe joint such as cheese or elbow or a tubular member such as a tube.
(3) By providing a valve in the valve valve seat section 7, the plurality of internal flow paths 6a to 6l are selectively communicated with the open flow paths 5a to 5f in addition to simply opening and closing the open flow paths 5a to 5f. The flow of fluid can be controlled.
(4) Since the piping 3a includes a plurality of internal flow paths 6a to 6l formed in communication with each other inside the block body 22, complicated piping can be integrated and reduced in size. The open channels 5a to 5f can be formed at arbitrary positions, and the design flexibility is excellent.

The perspective view which shows the piping unit manufactured with the manufacturing method of the piping unit in Embodiment 1 of this invention. Perspective perspective view showing drilling hole forming step Perspective perspective view showing the air hole drilling step Perspective perspective view showing lid member fitting step and internal flow path forming step Perspective perspective view showing the opening channel forming step The perspective view which shows the piping unit in Embodiment 2 of this invention Perspective perspective view showing drilling hole forming step Perspective perspective view showing the air hole drilling step Perspective perspective view showing lid member fitting step and internal flow path forming step Perspective perspective view showing the opening channel forming step

Explanation of symbols

1, 1a Piping unit 2, 22 Block body 2a, 22a Upper surface 2b Side surface 3, 3a Piping 4, 4a, 4b, 4c, 4d, 4e, 4f, 5, 5a, 5b, 5c, 5d, 5e Open channel 6, 6a, 6b, 6c, 6d, 6e, 6f, 6g, 6h, 6i, 6j, 6k, 6l Internal flow path 7 Valve valve seat part 8 Fixing hole 9 External connection part 10, 10a, 10b, 10c, 10d, 10e, 10f, 10g, 10h, 10i, 10j, 10k, 10l Drilling holes 11, 11a, 11b, 11c, 11d, 11e, 11f, 11g, 11h, 11i, 11j, 11k, 11l Open ends 12, 12a, 12b, 13 , 13a Air hole 14, 14a, 14b, 14c, 14d, 14e, 14f, 14g, 14h, 14i, 14j, 14k, 14l Lid member 22b Right side surface 22c Side 22d front 22e back

Claims (2)

A drilling hole forming step for drilling a drilling hole from the surface of the block body made of thermoplastic resin, and an air hole for drilling an air hole having at least one end opened on the surface of the block body and communicating with the drilling hole A drilling step, a lid member fitting step of fitting a lid member made of thermoplastic resin into the drilling hole from the surface of the block body, and heating and heat-sealing the block body and the lid member An internal flow path forming step of closing an open end of a drilling hole with the lid member, and an open flow path forming step of drilling two or more open flow paths communicating with the internal flow path , the air In the hole drilling step, the air hole having a diameter smaller than the hole diameter of the open channel is drilled in accordance with a position where the open channel is drilled in the subsequent open channel forming step. Manufacturing method of piping unit. 2. The method of manufacturing a piping unit according to claim 1 , further comprising an external connection portion forming step of forming or arranging an external connection portion that communicates with the open flow path and protrudes from the surface of the block body.

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