JP4431155B2 - プリント配線板のレジストパターン製造方法 - Google Patents
プリント配線板のレジストパターン製造方法 Download PDFInfo
- Publication number
- JP4431155B2 JP4431155B2 JP2007068324A JP2007068324A JP4431155B2 JP 4431155 B2 JP4431155 B2 JP 4431155B2 JP 2007068324 A JP2007068324 A JP 2007068324A JP 2007068324 A JP2007068324 A JP 2007068324A JP 4431155 B2 JP4431155 B2 JP 4431155B2
- Authority
- JP
- Japan
- Prior art keywords
- acid
- resist pattern
- resin
- printed wiring
- wiring board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
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- CAYGQBVSOZLICD-UHFFFAOYSA-N hexabromobenzene Chemical compound BrC1=C(Br)C(Br)=C(Br)C(Br)=C1Br CAYGQBVSOZLICD-UHFFFAOYSA-N 0.000 description 1
- OJMHGSMSQZEBFH-UHFFFAOYSA-N hexabromodiphenyl ethers Chemical compound BrC1=CC(Br)=CC(Br)=C1OC1=CC(Br)=CC(Br)=C1Br OJMHGSMSQZEBFH-UHFFFAOYSA-N 0.000 description 1
- VUNCWTMEJYMOOR-UHFFFAOYSA-N hexachlorocyclopentadiene Chemical compound ClC1=C(Cl)C(Cl)(Cl)C(Cl)=C1Cl VUNCWTMEJYMOOR-UHFFFAOYSA-N 0.000 description 1
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- 150000002429 hydrazines Chemical class 0.000 description 1
- 150000002430 hydrocarbons Chemical group 0.000 description 1
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- 150000002513 isocyanates Chemical class 0.000 description 1
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- 150000002576 ketones Chemical class 0.000 description 1
- VMPHSYLJUKZBJJ-UHFFFAOYSA-N lauric acid triglyceride Natural products CCCCCCCCCCCC(=O)OCC(OC(=O)CCCCCCCCCCC)COC(=O)CCCCCCCCCCC VMPHSYLJUKZBJJ-UHFFFAOYSA-N 0.000 description 1
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- JAOPKYRWYXCGOQ-UHFFFAOYSA-N n,n-dimethyl-1-(4-methylphenyl)methanamine Chemical compound CN(C)CC1=CC=C(C)C=C1 JAOPKYRWYXCGOQ-UHFFFAOYSA-N 0.000 description 1
- DFQICHCWIIJABH-UHFFFAOYSA-N naphthalene-2,7-diol Chemical compound C1=CC(O)=CC2=CC(O)=CC=C21 DFQICHCWIIJABH-UHFFFAOYSA-N 0.000 description 1
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- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 description 1
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- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 1
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- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 229920006380 polyphenylene oxide Polymers 0.000 description 1
- 229920005650 polypropylene glycol diacrylate Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- XTFKWYDMKGAZKK-UHFFFAOYSA-N potassium;gold(1+);dicyanide Chemical compound [K+].[Au+].N#[C-].N#[C-] XTFKWYDMKGAZKK-UHFFFAOYSA-N 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- 235000019260 propionic acid Nutrition 0.000 description 1
- NHARPDSAXCBDDR-UHFFFAOYSA-N propyl 2-methylprop-2-enoate Chemical compound CCCOC(=O)C(C)=C NHARPDSAXCBDDR-UHFFFAOYSA-N 0.000 description 1
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 1
- 125000004076 pyridyl group Chemical group 0.000 description 1
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 1
- IUVKMZGDUIUOCP-BTNSXGMBSA-N quinbolone Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H]([C@]4(C=CC(=O)C=C4CC3)C)CC[C@@]21C)C1=CCCC1 IUVKMZGDUIUOCP-BTNSXGMBSA-N 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 239000011342 resin composition Substances 0.000 description 1
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- 229920006395 saturated elastomer Polymers 0.000 description 1
- 150000003333 secondary alcohols Chemical class 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000001488 sodium phosphate Substances 0.000 description 1
- 229910000162 sodium phosphate Inorganic materials 0.000 description 1
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
- 229910052911 sodium silicate Inorganic materials 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- 125000001302 tertiary amino group Chemical group 0.000 description 1
- JRMUNVKIHCOMHV-UHFFFAOYSA-M tetrabutylammonium bromide Chemical compound [Br-].CCCC[N+](CCCC)(CCCC)CCCC JRMUNVKIHCOMHV-UHFFFAOYSA-M 0.000 description 1
- 125000006158 tetracarboxylic acid group Chemical group 0.000 description 1
- 229940073455 tetraethylammonium hydroxide Drugs 0.000 description 1
- LRGJRHZIDJQFCL-UHFFFAOYSA-M tetraethylazanium;hydroxide Chemical compound [OH-].CC[N+](CC)(CC)CC LRGJRHZIDJQFCL-UHFFFAOYSA-M 0.000 description 1
- IEVVGBFMAHJELO-UHFFFAOYSA-M tetramethylazanium;benzoate Chemical compound C[N+](C)(C)C.[O-]C(=O)C1=CC=CC=C1 IEVVGBFMAHJELO-UHFFFAOYSA-M 0.000 description 1
- KCNSDMPZCKLTQP-UHFFFAOYSA-N tetraphenylen-1-ol Chemical compound C12=CC=CC=C2C2=CC=CC=C2C2=CC=CC=C2C2=C1C=CC=C2O KCNSDMPZCKLTQP-UHFFFAOYSA-N 0.000 description 1
- 238000012719 thermal polymerization Methods 0.000 description 1
- 150000003557 thiazoles Chemical class 0.000 description 1
- 239000002562 thickening agent Substances 0.000 description 1
- 125000000101 thioether group Chemical group 0.000 description 1
- 125000003396 thiol group Chemical group [H]S* 0.000 description 1
- 150000003573 thiols Chemical class 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- KHPCPRHQVVSZAH-UHFFFAOYSA-N trans-cinnamyl beta-D-glucopyranoside Natural products OC1C(O)C(O)C(CO)OC1OCC=CC1=CC=CC=C1 KHPCPRHQVVSZAH-UHFFFAOYSA-N 0.000 description 1
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 1
- 150000003852 triazoles Chemical class 0.000 description 1
- YFDSDPIBEUFTMI-UHFFFAOYSA-N tribromoethanol Chemical compound OCC(Br)(Br)Br YFDSDPIBEUFTMI-UHFFFAOYSA-N 0.000 description 1
- DWWMSEANWMWMCB-UHFFFAOYSA-N tribromomethylsulfonylbenzene Chemical compound BrC(Br)(Br)S(=O)(=O)C1=CC=CC=C1 DWWMSEANWMWMCB-UHFFFAOYSA-N 0.000 description 1
- STCOOQWBFONSKY-UHFFFAOYSA-N tributyl phosphate Chemical compound CCCCOP(=O)(OCCCC)OCCCC STCOOQWBFONSKY-UHFFFAOYSA-N 0.000 description 1
- DQWPFSLDHJDLRL-UHFFFAOYSA-N triethyl phosphate Chemical compound CCOP(=O)(OCC)OCC DQWPFSLDHJDLRL-UHFFFAOYSA-N 0.000 description 1
- WVLBCYQITXONBZ-UHFFFAOYSA-N trimethyl phosphate Chemical compound COP(=O)(OC)OC WVLBCYQITXONBZ-UHFFFAOYSA-N 0.000 description 1
- XZZNDPSIHUTMOC-UHFFFAOYSA-N triphenyl phosphate Chemical compound C=1C=CC=CC=1OP(OC=1C=CC=CC=1)(=O)OC1=CC=CC=C1 XZZNDPSIHUTMOC-UHFFFAOYSA-N 0.000 description 1
- VRRIVXLVXXAHJA-UHFFFAOYSA-N tris(2,3,4-tribromophenyl) phosphate Chemical compound BrC1=C(Br)C(Br)=CC=C1OP(=O)(OC=1C(=C(Br)C(Br)=CC=1)Br)OC1=CC=C(Br)C(Br)=C1Br VRRIVXLVXXAHJA-UHFFFAOYSA-N 0.000 description 1
- MHEGXVLDEDJADA-UHFFFAOYSA-N tris(2,3,4-trimethylphenyl) phosphate Chemical compound CC1=C(C)C(C)=CC=C1OP(=O)(OC=1C(=C(C)C(C)=CC=1)C)OC1=CC=C(C)C(C)=C1C MHEGXVLDEDJADA-UHFFFAOYSA-N 0.000 description 1
- LRSNDFOWYYKLHB-UHFFFAOYSA-N tris(2,3-dibromophenyl) phosphate Chemical compound BrC1=CC=CC(OP(=O)(OC=2C(=C(Br)C=CC=2)Br)OC=2C(=C(Br)C=CC=2)Br)=C1Br LRSNDFOWYYKLHB-UHFFFAOYSA-N 0.000 description 1
- JZZBTMVTLBHJHL-UHFFFAOYSA-N tris(2,3-dichloropropyl) phosphate Chemical compound ClCC(Cl)COP(=O)(OCC(Cl)CCl)OCC(Cl)CCl JZZBTMVTLBHJHL-UHFFFAOYSA-N 0.000 description 1
- KOWVWXQNQNCRRS-UHFFFAOYSA-N tris(2,4-dimethylphenyl) phosphate Chemical compound CC1=CC(C)=CC=C1OP(=O)(OC=1C(=CC(C)=CC=1)C)OC1=CC=C(C)C=C1C KOWVWXQNQNCRRS-UHFFFAOYSA-N 0.000 description 1
- WTLBZVNBAKMVDP-UHFFFAOYSA-N tris(2-butoxyethyl) phosphate Chemical compound CCCCOCCOP(=O)(OCCOCCCC)OCCOCCCC WTLBZVNBAKMVDP-UHFFFAOYSA-N 0.000 description 1
- HQUQLFOMPYWACS-UHFFFAOYSA-N tris(2-chloroethyl) phosphate Chemical compound ClCCOP(=O)(OCCCl)OCCCl HQUQLFOMPYWACS-UHFFFAOYSA-N 0.000 description 1
- GTRSAMFYSUBAGN-UHFFFAOYSA-N tris(2-chloropropyl) phosphate Chemical compound CC(Cl)COP(=O)(OCC(C)Cl)OCC(C)Cl GTRSAMFYSUBAGN-UHFFFAOYSA-N 0.000 description 1
- LIPMRGQQBZJCTM-UHFFFAOYSA-N tris(2-propan-2-ylphenyl) phosphate Chemical compound CC(C)C1=CC=CC=C1OP(=O)(OC=1C(=CC=CC=1)C(C)C)OC1=CC=CC=C1C(C)C LIPMRGQQBZJCTM-UHFFFAOYSA-N 0.000 description 1
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 description 1
- NSBGJRFJIJFMGW-UHFFFAOYSA-N trisodium;stiborate Chemical compound [Na+].[Na+].[Na+].[O-][Sb]([O-])([O-])=O NSBGJRFJIJFMGW-UHFFFAOYSA-N 0.000 description 1
- 150000007964 xanthones Chemical class 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Phenolic Resins Or Amino Resins (AREA)
- Epoxy Resins (AREA)
- Macromonomer-Based Addition Polymer (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
- Materials For Photolithography (AREA)
Description
このようなアルカリ現像型の硬化性組成物としては、エポキシ樹脂と不飽和基含有モノカルボン酸の反応物に酸無水物を付加した硬化性樹脂、光重合開始剤、光重合性モノマー、及びエポキシ樹脂からなる組成物が一般的である。例えば、ノボラック型エポキシ樹脂と不飽和基含有モノカルボン酸の反応物に酸無水物を付加した硬化性樹脂、光重合開始剤、光重合性モノマー及びエポキシ樹脂からなる組成物(特許文献1参照)、クレゾールノボラック型エポキシ樹脂とアクリル酸とp−ヒドロキシフェネチルアルコールの反応生成物にテトラヒドロフタル酸無水物を反応させて得られる不飽和基含有ポリカルボン酸樹脂を含むことを特徴とする組成物(特許文献2参照)、1分子中に2個のグリシジル基を有する芳香族エポキシ樹脂と1分子中に2個のフェノール性水酸基を有する芳香族アルコール樹脂とを反応させて得られるアルコール性の二級の水酸基にエピハロヒドリンを反応させ、得られた反応物に不飽和基含有モノカルボン酸、次いで酸無水物を付加した硬化性樹脂を含むことを特徴とする組成物(特許文献3参照)等が挙げられる。
即ち、従来市販の硬化性組成物を用いてレジストを形成した高密度化のプリント配線板では、高温及び高湿下での電気絶縁性が低下し、また長期信頼性試験であるPCT耐性が劣るといったことが問題となっている。
(A)1分子中に2個以上のフェノール性水酸基を有する化合物(a)と環状カーボネート類(b)とを反応させて得られる反応生成物(c)に不飽和基含有モノカルボン酸(d)及び/又はそのエステル類(e)を反応させ、得られる反応生成物(f)に多塩基酸無水物(g)を反応させて得られるカルボキシル基含有感光性樹脂、(B)光重合開始剤、(C)感光性(メタ)アクリレート化合物、及び(D)希釈溶剤を含有する硬化性組成物を、回路形成されたプリント配線板に塗布して塗膜を形成する工程、
上記塗膜を選択的に活性エネルギー線により露光し、未露光部を希アルカリ水溶液により現像してレジストパターンを形成する工程、及び
上記レジストパターンを加熱及び/又は活性エネルギー線の照射により硬化させる工程
を含むことを特徴とするプリント配線板のレジストパターン製造方法が提供される。
(式中、R1、R2、R3、R4、R5はそれぞれ水素原子又はメチル基を表わし、Zは酸無水物残基を表わし、m及びnはそれぞれ0.5〜10の値を表わす。)
また、前記したような硬化性組成物を用いることにより、プリント配線板における信頼性の高い実装が期待でき、また、高温あるいは高湿条件下に曝されても、硬化皮膜が基材から剥離するといったようなこともなく、プリント配線板あるいは多層配線板やフレキシブル配線基板に前記したような諸特性に優れるソルダーレジスト、エッチングレジスト、メッキレジスト等を作製することができる。
まず、本発明の硬化性組成物中に含まれるカルボキシル基含有感光性樹脂(A)は、前記したように、1分子中に2個以上のフェノール性水酸基を有する化合物(a)と環状カーボネート類(b)とを反応させて得られる反応生成物(c)に不飽和基含有モノカルボン酸(d)及び/又はそのエステル類(e)を反応させ、得られた反応生成物(f)にさらに多塩基酸無水物(g)を反応させて得られるが、各反応は、後述するような触媒を用い、溶媒中又は無溶媒下で容易に行なわれる。
これらのフェノール性水酸基含有化合物の中でも好ましいのは、1分子中に3個以上のフェノール性水酸基を有する化合物であり、より好ましくは、ノボラック型フェノール樹脂及び/又はフェノール類とフェノール性水酸基を有する芳香族アルデヒドとの縮合物である。
エステル化触媒としては、硫酸、塩酸、燐酸、フッ化ホウ素、メタンスルホン酸、ベンゼンスルホン酸、p−トルエンスルホン酸、カチオン交換樹脂等が適宜用いられる。エステル化反応は重合禁止剤の存在下で行なうのが好ましく、重合禁止剤としては、ハイドロキノン、メチルハイドロキノン、ハイドロキノンモノメチルエーテル、カテコール、ピロガロール等が好適に用いられる。
1分子中にカルボキシル基を有する樹脂(G)の酸価は、カルボキシル基含有感光性樹脂(A)と1分子中にカルボキシル基を有する樹脂(G)の混合後の酸価が20〜200mgKOH/gの範囲内にあることを考慮して、決定される。
前記したような難燃剤は、単独で使用しても構わないが、2種以上を組み合わせて使用することができる。
また、光硬化させるための照射光源としては、低圧水銀灯、中圧水銀灯、高圧水銀灯、超高圧水銀灯、キセノンランプ又はメタルハライドランプなどが適当である。その他、レーザー光線なども活性エネルギー線として利用できる。
ノボラック型クレゾール樹脂(大日本インキ化学工業(株)製、OH当量:120)120部、トリフェニルホスフィン0.6部及びプロピレンカーボネート112部を反応釜に仕込み、撹拌しながら、150〜160℃に加熱昇温して反応を開始させ、次いで200〜220℃で約2時間反応を続けた。反応の進行とともに炭酸ガスが発生するので、系外に除去した。その後、室温まで冷却し、水酸基当量が182.2g/eq.であるノボラック型クレゾール樹脂のプロピレンカーボネート反応物を得た。これは、フェノール性水酸基1当量当りプロピレンオキシドが平均1.08モル付加しているものと同等であった。
上記反応物をトルエン120部に溶解させた後、この中にアクリル酸43.2部、パラトルエンスルホン酸1.7部及びメチルハイドロキノン0.04部を仕込み、空気を10ml/分の速度で吹き込み、撹拌しながら、100±10℃で7時間反応させた。反応により生成した水は、トルエンとの共沸混合物として、11.6部の水が留出した。その後、室温まで冷却し、得られた反応溶液を水洗し、エバポレーターにてトルエンをジエチレングリコールモノエチルエーテルアセテート118.1部で置換しつつ留去し、アクリレート樹脂溶液を得た。
次に、得られたアクリレート樹脂溶液332.5部及びトリフェニルホスフィン1.1部を、撹拌器、温度計及び空気吹き込み管を備えた反応器に仕込み、空気を10ml/分の速度で吹き込み、撹拌しながら、テトラヒドロフタル酸無水物60.8部を徐々に加え、95〜105℃で約6時間反応させ、冷却後、取り出した。このようにして得られたカルボキシル基含有感光性樹脂は、不揮発分70.6%、固形分酸価87.7mgKOH/gであった。
フェノール類とフェノール性水酸基を有する芳香族アルデヒドとの縮合物であるポリフェノール樹脂(ジャパンエポキシレジン(株)製、商品名「エピキュアーYL6065」、OH当量:98)98部、トリフェニルホスフィン0.5部及びプロピレンカーボネート112部を反応釜に仕込み、撹拌しながら、150〜160℃に加熱昇温して反応を開始させ、次いで200〜220℃で約2時間反応を続けた。反応の進行とともに炭酸ガスが発生するので、系外に除去した。その後、室温まで冷却し、水酸基当量が160.7g/eq.であるポリフェノール樹脂のプロピレンカーボネート反応物を得た。これは、フェノール性水酸基1当量当りプロピレンオキシドが平均1.08モル付加しているものと同等であった。
上記反応物をトルエン98部に溶解させた後、この中にアクリル酸36.0部、パラトルエンスルホン酸1.4部及びメチルハイドロキノン0.04部を仕込み、空気を10ml/分の速度で吹き込み、撹拌しながら、100±10℃で約7時間反応させた。反応により生成した水は、トルエンとの共沸混合物として、9.8部の水が留出した。その後、室温まで冷却し、得られた反応溶液を水洗し、エバポレーターにてトルエンをジエチレングリコールモノエチルエーテルアセテート109.0部で置換しつつ留去し、不揮発分63.3%のアクリレート樹脂溶液を得た。
次に、得られたアクリレート樹脂溶液296.4部及びトリフェニルホスフィン1.1部を、撹拌器、温度計、空気吹き込み管を備えた反応器に仕込み、空気を10ml/分の速度で吹き込み、撹拌しながら、テトラヒドロフタル酸無水物76.0部を徐々に加え、95〜105℃で約6時間反応させ、冷却後、取り出した。このようにして得られたカルボキシル基含有感光性樹脂は、不揮発分71.8%、固形分酸価109.6mgKOH/gであった。
合成例2と同ようにして得られた水酸基当量が160.7g/eq.であるポリフェノール樹脂のプロピレンカーボネート反応物160.7部をトルエン98部に溶解させた後、この中にアクリル酸43.2部、パラトルエンスルホン酸1.7部及びメチルハイドロキノン0.05部を反応釜に仕込み、空気を10ml/分の速度で吹き込み、撹拌しながら、100±10℃で7時間反応させた。反応により生成した水は、トルエンとの共沸混合物として、12.6部の水が留出した。その後、室温まで冷却し、得られた反応溶液を水洗し、エバポレーターにてトルエンをジエチレングリコールモノエチルエーテルアセテート113.0部で置換しつつ留去し、不揮発分63.4%のアクリレート樹脂溶液を得た。
次に、得られたアクリレート樹脂溶液304.5部及びトリフェニルホスフィン1.1部を、撹拌器、温度計、空気吹き込み管を備えた反応器に仕込み、空気を10ml/分の速度で吹き込み、撹拌しながら、テトラヒドロフタル酸無水物60.8部を徐々に加え、95〜105℃で約6時間反応させ、冷却後、取り出した。このようにして得られたカルボキシル基含有感光性樹脂は、不揮発分70.5%、固形分酸価93.1mgKOH/gであった。
クレゾールノボラック型エポキシ樹脂(ECON−104S、日本化薬(株)製、エポキシ当量:220)220部を撹拌機及び還流冷却器の付いた四つ口フラスコに入れ、カルビトールアセテート220部を加え、加熱溶解した。次に、重合禁止剤としてメチルハイドロキノン0.46部と、反応触媒としてトリフェニルホスフィン1.38部を加えた。この混合物を95〜105℃に加熱し、アクリル酸50.4部、p−ヒドロキシフェネチルアルコール41.5部を徐々に滴下し、16時間反応させた。この反応生成物を、80〜90℃まで冷却し、テトラヒドロフタル酸無水物116部を加え、8時間反応させ、冷却後、取り出した。このようにして得られたカルボキシル基含有感光性樹脂は、不揮発分66%、固形分酸価98mgKOH/gであった。
表1に示す配合組成(数値は質量部である)に従って各成分を配合し、3本ロールミルでそれぞれ別々に混練し、硬化性組成物を調製した。これをスクリーン印刷法により、100メッシュのポリエステルスクリーンを用いて20〜30μmの厚さになるように、パターン形成されている銅スルホールプリント配線基板に全面塗布し、塗膜を80℃の熱風乾燥器を用いて30分間乾燥し、次いで、レジストパターンを有するネガフィルムを塗膜に密着させ、紫外線露光装置((株)オーク製作所製、型式HMW−680GW)を用いて、紫外線を照射(露光量600mJ/cm2)し、1%炭酸ナトリウム水溶液で60秒間、2.0kg/cm2のスプレー圧で現像し、その後、150℃の熱風乾燥器で60分加熱硬化を行ない、試験基板を作製した。得られた硬化皮膜を有する試験基板について、後述の試験方法及び評価方法にて、PCT耐性、密着性、はんだ耐熱性、耐酸性、耐アルカリ性、無電解金めっき耐性の試験を行なった。
また、銅スルホールプリント配線基板の代わりにIPCで定められたプリント回路基板(厚さ1.6mm)のBパターンを用い、上記と同じ条件で試験基板を作製し、電気絶縁抵抗の試験を行なった。
上記各試験の結果を表2に示す。
(1)PCT耐性:
硬化皮膜のPCT耐性を、121℃、飽和水蒸気中50時間の条件にて以下の基準で評価した。
○:硬化皮膜にふくれ、剥がれ、変色がないもの
△:硬化皮膜に若干のふくれ、剥がれ、変色があるもの
×:硬化皮膜にふくれ、剥がれ、変色があるもの
JIS D 0202の試験方法に従って硬化皮膜に碁盤目状にクロスカットを入れ、次いでセロハン粘着テープによるピーリングテスト後の剥れの状能を目視判定した。
◎:100/100で全く剥れのないもの
○:100/100でクロスカット部が少し剥れたもの
△:50/100〜90/100
×:0/100〜50/100
JIS C 6481の試験方法に従って、260℃のはんだ浴への試験基板の10秒浸漬を3回行ない、外観の変化を評価した。なお、ポストフラックス(ロジン系)としては、JIS C 6481に従ったフラックスを使用した。
○:外観変化なし
△:硬化皮膜の変色が認められるもの
×:硬化皮膜の浮き、剥れ、はんだ潜りあり
試験基板を10容量%硫酸水溶液に20℃で30分間浸漬後取り出し、硬化皮膜の状態を以下の基準で評価した。
○:変化が認められないもの
△:ほんの僅か変化しているもの
×:硬化皮膜にフクレあるいは膨潤脱落があるもの
試験基板を、10容量%硫酸水溶液を10容量%水酸化ナトリウム水溶液に代えた以外は耐酸性試験と同ように評価した。
後述する工程に従って試験基板に無電解金めっきを行ない、その試験基板について外観の変化及びセロハン粘着テープを用いたピーリング試験を行ない、硬化皮膜の剥離状態を以下の基準で判定した。
○:外観変化もなく、硬化皮膜の剥離も全くない。
△:外観の変化はないが、硬化皮膜にわずかに剥れがある。
×:硬化皮膜の浮きが見られ、めっき潜りが認められ、ピーリング試験で硬化皮膜の剥れが大きい。
1.脱脂:
試験基板を、30℃の酸性脱脂液((株)日本マクダーミッド製、Metex L−5Bの20Vol%水溶液)に3分間、浸漬した。
2.水洗:
試験基板を、流水中に3分間、浸漬した。
3.ソフトエッチ:
試験基板を、14.3wt%の過硫酸アンモン水溶液に室温で3分間、浸漬した。
4.水洗:
試験基板を、流水中に3分間、浸漬した。
5.酸浸漬:
試験基板を、10Vol%の硫酸水溶液に室温で1分間、浸漬した。
6.水洗:
試験基板を、流水中に30秒〜1分間、浸漬した。
7.触媒付与:
試験基板を、30℃の触媒液((株)メルテックス製、メタルプレートアクチベーター350の10Vol%水溶液)に7分間、浸漬した。
8.水洗:
試験基板を、流水中に3分間、浸漬した。
9.無電解ニッケルめっき:
試験基板を、85℃、pH=4.6のニッケルめっき液((株)メルテックス製、メルプレートNi−865M、20Vol%水溶液)に20分間、浸漬した。
10.酸浸漬:
試験基板を、10Vol%の硫酸水溶液に室温で1分間、浸漬した。
11.水洗:
試験基板を、流水中に30秒〜1分間、浸漬した。
12.無電解金めっき:
試験基板を、95℃、pH=6の金めっき液((株)メルテックス製、オウロレクトロレス UP 15Vol%、シアン化金カリウム3Vol%の水溶液)に10分間、浸漬した。
13.水 洗:
試験基板を、流水中に3分間、浸漬した。
14.湯洗:
試験基板を、60℃の温水に浸漬し、3分間充分に水洗後、水をよくきり、乾燥した。
このような工程を経て無電解金めっきした試験基板を得た。
硬化皮膜の電気絶縁性を以下の基準にて評価した。
加湿条件:温度120℃、湿度95%RH、印加電圧30V、100時間。
測定条件:測定時間60秒、印加電圧500V。
○:加湿後の絶縁抵抗値1010Ω以上、銅のマイグレーションなし
△:加湿後の絶縁抵抗値1010Ω以上、銅のマイグレーションあり
×:加湿後の絶縁抵抗値109Ω以下、銅のマイグレーションあり
Claims (5)
- (A)1分子中に2個以上のフェノール性水酸基を有する化合物(a)と環状カーボネート類(b)とを反応させて得られる反応生成物(c)に不飽和基含有モノカルボン酸(d)及び/又はそのエステル類(e)を反応させ、得られる反応生成物(f)に多塩基酸無水物(g)を反応させて得られるカルボキシル基含有感光性樹脂、(B)光重合開始剤、(C)感光性(メタ)アクリレート化合物、及び(D)希釈溶剤を含有する硬化性組成物を、回路形成されたプリント配線板に塗布して塗膜を形成する工程、
上記塗膜を選択的に活性エネルギー線により露光し、未露光部を希アルカリ水溶液により現像してレジストパターンを形成する工程、及び
上記レジストパターンを加熱及び/又は活性エネルギー線の照射により硬化させる工程
を含むことを特徴とするプリント配線板のレジストパターン製造方法。 - 前記硬化性組成物のカルボキシル基含有感光性樹脂(A)が、下記一般式(1)及び(2)で示される構造単位を有するカルボキシル基含有感光性樹脂であることを特徴とする請求項1に記載のプリント配線板のレジストパターン製造方法。
(式中、R1、R2、R3、R4、R5はそれぞれ水素原子又はメチル基を表わし、Zは酸無水物残基を表わし、m及びnはそれぞれ0.5〜10の値を表わす。) - 前記硬化性組成物がさらに(E)エポキシ樹脂を含有することを特徴とする請求項1又は2に記載のプリント配線板のレジストパターン製造方法。
- さらに(F)硬化触媒を含有することを特徴とする請求項1乃至3のいずれか一項に記載のプリント配線板のレジストパターン製造方法。
- さらに(G)1分子中にカルボキシル基を有する樹脂を含有することを特徴とする請求項1乃至4のいずれか一項に記載のプリント配線板のレジストパターン製造方法。
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