JP3718321B2 - End hat component for magnetron and manufacturing method thereof - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an end hat component for a magnetron used in a microwave oven or the like and a method for manufacturing the same.
[0002]
[Prior art]
Conventionally, as shown in FIG. 6, a cathode part of a magnetron tube used in a microwave oven or the like includes a coiled filament 1 that emits thermoelectrons, and Mo-Ru at the upper and lower ends of the coiled filament 1, respectively. Upper and lower end hats 3, 4 made of Mo joined via a brazing material or Mo—Ru—Ni brazing material 2, a center lead 5 connected and fixed to the upper end hat 3, and a lower end hat 4 What is mainly comprised from the fixed side lead 6 is known.
[0003]
The brazing of the coiled filament 1 and the end hats 3 and 4 in the cathode part assembly process as described above is performed at a predetermined position in the end hats 3 and 4 as shown in FIG. It has been carried out by inserting a ring-shaped brazing material 7 made of -Ru-Ni, placing the coiled filament 1 on the ring-shaped brazing material 7, and then carrying it in a brazing furnace and heat-treating it.
[0004]
However, since the ring-shaped brazing material 7 is simply inserted into the end hats 3 and 4 as described above, the dimensional difference between the inner diameter of the end hats 3 and 4 and the outer diameter of the ring-shaped brazing material 7 is small. If center misalignment or the like occurs at the time of insertion, defective insertion of the ring-shaped brazing material 7 occurs, or if the ring-shaped brazing material 7 is tilted or floated even if it is inserted, the ring-shaped brazing material at the time of brazing 7 has become non-uniform, causing problems such as poor brazing and poor assembly dimensions.
[0005]
Thus, it has been proposed to place and fix a brazing material in advance at a predetermined position of the end hat. For example, Japanese Patent Application Laid-Open No. 58-53136 describes an end hat component in which a powder mixture of Mo and Ru powder (brazing material) is adhered (adhered) to the surface of the end hat with an organic adhesive or the like. Has been. JP-A-58-157593 discloses that a mixed powder of Mo and Ru or an alloy powder (a brazing material) is kneaded with an organic binder and an organic solvent, and this pasted brazing material is applied to the surface of the end hat. After that, a method of baking at a temperature of 1273 to 1673K is described.
[0006]
[Problems to be solved by the invention]
However, among the above-described conventional brazing material arrangement and fixing methods, the former method of attaching the green compact of the brazing material to the surface of the end hat with an organic adhesive or the like is because the brazing material is a green compact first. For example, when the brazing material is conveyed by vacuum suction and inserted into the end hat, there is a problem that poor insertion or breakage is likely to occur. Furthermore, since such a brazing material is adhered with an organic adhesive or the like, there is a problem that the adhesive component may adversely affect brazing. In addition, the latter method of heat-baking the pasted brazing material is difficult to secure a predetermined amount of brazing material, and requires two high-temperature heat treatment steps of the brazing material heating baking step and the brazing step. There is a problem that the cost increases.
[0007]
Furthermore, it has also been proposed to shrink fit a ring-shaped brazing material made of a sintered body of Mo-Ru brazing material or Mo-Ru-Ni brazing material (Japanese Patent Laid-Open No. 60-18314). (See JP-A-60-86731, JP-A-60-91531, etc.). However, in this case as well, there is a problem that the manufacturing cost increases because two high-temperature heat treatment steps are required.
[0008]
For this reason, in order to prevent the occurrence of defective insertion of the ring-shaped brazing material into the end hat in the assembly process of the cathode part, as well as the occurrence of defective brazing and defective assembly dimensions, the ring shape is previously set in the end hat. End hat parts with brazing material fixed reduce production man-hours and suppress the occurrence of poor insertion and breakage due to poor handling of brazing material and brazing defects based on the fixing material. It is an issue to do.
[0009]
The present invention has been made to cope with such a problem. In an end hat component in which a ring-shaped brazing material is fixed in advance in the end hat, the manufacturing man-hour is reduced and the insertion of the ring-shaped brazing material is performed. It is an object of the present invention to provide a magnetron end hat component and a method for manufacturing the same that can suppress the occurrence of defects, breakage, brazing defects, and the like.
[0010]
[Means for Solving the Problems]
First magnetron for end hat part according to the present invention, the end hat body made of Mo, Mo-Ru Ri Do a sintered body of a brazing material or Mo-Ru-Ni brazing material, a ring-shaped brazing filaments The ring-shaped brazing material is fixed to a predetermined position of the end hat main body by laser welding.
A second magnetron end hat component according to the present invention includes an end hat main body made of Mo, and a ring-shaped brazing material made of a sintered body of Mo-Ru brazing material or Mo-Ru-Ni brazing material, The ring-shaped brazing material is fixed to a predetermined position of the end hat main body by a paste-like brazing material that is the same material as the ring-shaped brazing material.
[0011]
First method of manufacturing a magnetron for end hat part according to the present invention, a predetermined position of the end hat body consisting of Mo, Ri Do a sintered body of a Mo-Ru brazing material or Mo-Ru-Ni brazing material, the filaments characterized placing a ring-shaped brazing material for brazing, the ring-shaped brazing material by laser welding to the end hat body, that a step of fixing said ring-shaped brazing material to the end hat body It is said.
[0012]
First method of manufacturing a magnetron for end hat part, the ring-shaped brazing material especially with respect to the end hat body, is characterized in that fixed at the same time spot welding multiple points by laser welding.
[0013]
Second method for manufacturing a magnetron for end hat part according to the present invention, a predetermined position of the end hat body consisting of Mo, applying a paste-like brazing material containing Mo-Ru brazing material or Mo-Ru-Ni brazing material And after disposing a ring-shaped brazing material made of a sintered body of Mo-Ru brazing material or Mo-Ru-Ni brazing material of the same material as the pasty brazing material on the paste brazing material coating layer, And heating and drying to fix the ring-shaped brazing material to the end hat main body.
[0014]
In the present invention, since the ring-shaped brazing material is composed of a sintered body of Mo-Ru brazing material or Mo-Ru-Ni brazing material, the occurrence of defects such as breakage during handling and the occurrence of poor insertion are greatly increased. Can be reduced. In addition, since the end hat main body and the ring-shaped brazing material are fixed by laser welding or a paste-like brazing material of the same material as the ring-shaped brazing material, the work efficiency can be improved and the manufacturing cost can be reduced. In addition, it is possible to obtain a good fixing state with sufficient reproducibility that can sufficiently withstand vibrations and shocks in the assembly process of the magnetron cathode portion. Furthermore, the fixing material does not adversely affect the brazing.
[0015]
Further, when laser welding is applied to the fixing of the ring-shaped brazing material to the end hat main body, the efficiency of the fixing operation of the ring-shaped brazing material can be significantly improved by spot welding at a plurality of points at the same time. Furthermore, according to laser welding, since it is not necessary to heat the whole at a high temperature, it is possible to prevent the occurrence of defects due to the difference in shrinkage between the ring-shaped brazing filler metal and the end hat main body.
[0016]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, modes for carrying out the present invention will be described.
[0017]
FIG. 1 is a cross-sectional view showing a first embodiment of an end hat component of the present invention. The end hat component 11 shown in the figure has an end hat main body 12 made of a Mo sintered body, and the end hat main body 12 has a recess 12a in which a coiled filament (not shown) is accommodated. Such an end hat main body 12 is obtained by press-molding Mo powder into a predetermined shape, for example, and then sintering it at a predetermined temperature.
[0018]
The end hat component 11 shown in FIG. 1 is a lower end hat, and a through hole 12b through which a center lead is inserted is provided in the bottom surface of the recess 12a. Although not shown, a side lead is connected and fixed to the lower side of the end hat body 12. When used for the upper end hat, the basic configuration is the same, but a center lead insertion hole is provided in the bottom surface of the recess 12a.
[0019]
A ring-shaped brazing material 13 made of a Mo-Ru brazing material or a sintered body of Mo-Ru-Ni brazing material is inserted and arranged in the recess 12a of the end hat main body 12 described above. 13 is fixed to the end hat main body 12 by laser welding (laser welding portion 14). The laser welding portion 14 may be so-called spot welding, and may be provided at two or more, more preferably three or more.
[0020]
The ring-shaped brazing filler metal 13 is a mixed powder obtained by mixing Mo powder and Ru powder so as to satisfy Mo-30 to 60 wt% Ru (especially Mo-43 wt% Ru which is a eutectic composition), or Mo— 30 to 60 wt% Ru-10 to 40 wt% A mixed powder obtained by mixing Mo powder, Ru powder and Ni powder, or an alloy powder obtained by previously alloying these mixed powders so as to satisfy Ni After press forming into a shape, it is obtained by sintering at a temperature of about 1773-2023K, for example.
[0021]
Here, even if the amount of Ru in the Mo—Ru brazing material is less than 30% by weight or exceeds 60% by weight, the melting point becomes too high and the function as the brazing material is impaired. In addition, the melting point of the brazing material can be lowered by adding Ni of about 40% by weight or less to such a Mo-Ru brazing material, but the melting point decreases when the Ni amount exceeds 40% by weight. If the temperature is too high, the brazed portion may cause a decrease in strength. Also, the practical effect of lowering the melting point by blending Ni can be obtained from about 10% by weight. As the ring-shaped brazing material 13, any of a Mo—Ru brazing material and a Mo—Ru—Ni brazing material may be used, which is appropriately selected and used according to the application, the manufacturing process, and the like.
[0022]
Such an end hat component 11 of the first embodiment is manufactured as follows, for example.
[0023]
That is, first, as shown in FIG. 2A, an end hat main body 12 made of a Mo sintered body having a concave cross section is prepared, and a Mo—Ru sintered body or Mo—Ru—Ni sintered body is prepared in the end hat main body 12. A ring-shaped brazing material 13 made of a knot is inserted and arranged.
[0024]
Next, as shown in FIG. 2 (b), for example, a YAG laser 15 is irradiated on the outer peripheral edge of the ring-shaped brazing material 13 adjacent to the end hat main body 12, so that the end hat main body 12 and the ring-shaped brazing material 13 are irradiated. And spot welded.
[0025]
Such spot welding by the YAG laser 15 is performed at about 3 to 4 places on the outer peripheral edge of the ring-shaped brazing filler metal 13, and the ring-shaped brazing filler metal 13 is ended by the laser welding sections 14 at about 3 to 4 places. By fixing to the hat main body 12, the target end hat component 11 shown in FIG. 1 is obtained.
[0026]
Further, the fixing operation of the ring-shaped brazing material 13 to the end hat main body 12 can be performed by spot welding a plurality of points simultaneously by laser welding. For example, as shown in FIG. 3, by using a laser welding apparatus (laser irradiation apparatus) 17 that splits a laser beam 15 into a plurality of, for example, three (laser beams 15a to 15c) by an emission optical unit 16, for example, three points Can be spot welded simultaneously. In the figure, reference numeral 18 denotes a laser oscillator. By using such a laser welding device 17, the efficiency of the fixing operation of the ring-shaped brazing material 13 can be further improved.
[0027]
In the end hat component 11 of the first embodiment described above, first, the ring-shaped brazing material 13 is composed of a sintered body of Mo-Ru brazing material or a sintered body of Mo-Ru-Ni brazing material, and the ring Since the brazing filler metal 13 has sufficient strength to withstand vibrations and shocks during handling, the occurrence of defects such as breakage due to handling and poor insertion into the end hat main body 12 is greatly reduced. can do. In addition, since the end hat main body 12 and the ring-shaped brazing filler metal 13 are fixed by laser welding with excellent work efficiency, the manufacturing cost of the end hat component 11 can be reduced, and the assembly of the magnetron cathode portion is performed. A good fixing state that can sufficiently withstand vibrations and shocks in the process can be obtained with good reproducibility. In particular, the manufacturing cost of the end hat component 11 can be further reduced by applying the multiple point simultaneous welding. In addition, since the adhesive component or the like that adversely affects brazing does not remain in the fixing portion by laser welding, it is possible to perform the brazing operation satisfactorily.
[0028]
In the end hat component 11 as described above, a coiled filament is inserted and disposed in the concave portion 12a of the end hat main body 12 to which the ring-shaped brazing material 13 is fixed in the assembly process of the magnetron cathode portion, for example, in a non-oxidizing atmosphere. And brazed with a coiled filament.
[0029]
In such an assembly process of the magnetron cathode part, the ring-shaped brazing material 13 is fixed to the end hat main body 12 in a good state, and the insertion of the coiled filament into the end hat main body 12 is easy and stable. Therefore, it is possible to prevent the work efficiency from being lowered due to the poor insertion of the ring-shaped brazing filler metal 13 and to suppress the occurrence of defective brazing or defective assembly dimensions. In addition, since an adhesive component that adversely affects brazing does not remain in the fixing portion by laser welding, a good bonding state of the coiled filament can be stably obtained. As a result, it is possible to improve the assembly accuracy of the magnetron cathode part and to suppress the occurrence of work defects during the assembly, thereby improving the tube characteristics and productivity of the magnetron cathode part.
[0030]
Next, a second embodiment of the present invention will be described with reference to FIG.
The end hat component 21 shown in FIG. 4 has an end hat main body 12 made of the same shape and material as in the first embodiment. In the recess 12a of the end hat main body 12, a ring-shaped brazing material 13 made of the same shape and material as in the first embodiment is inserted and arranged. It is fixed to the main body 12 via a dry solidified layer 22 of a paste-like brazing material made of the same material as the ring-shaped brazing material 13.
[0031]
Such an end hat component 21 of the second embodiment can be manufactured as follows, for example.
[0032]
That is, first, as shown in FIG. 5A, an end hat main body 12 made of a Mo sintered body having a concave cross section is prepared, and Mo-Ru is formed on the ring-shaped brazing material arrangement portion 12 c in the end hat main body 12. An appropriate amount of a brazing material or a paste of Mo-Ru-Ni brazing material (paste brazing material) 22 'is applied.
[0033]
The application of the paste-like brazing filler metal 22 'is performed by, for example, a dispenser system or another system. This application may be performed over the entire circumference or may be applied partially. As the paste-like brazing material 22 ′, a Mo—Ru brazing material or a Mo—Ru—Ni brazing material mixed with an appropriate amount of a binder and an organic solvent can be used.
[0034]
Next, as shown in FIG. 5B, a Mo-Ru brazing material sintered body of the same material as the pasty brazing material 22 'is applied on the coating layer of the pasty brazing material 22' in the end hat body 12. Alternatively, a ring-shaped brazing material 13 made of a sintered body of Mo—Ru—Ni brazing material is inserted and arranged. Subsequently, in order to improve the bondability between the end hat main body 12 and the paste-like brazing material 22 ′, and further the ring-shaped brazing material 13, pressurization is performed with a weak force that does not cause the ring-shaped brazing material 13 to break in the axial direction ( (Indicated in the figure by arrows).
[0035]
Thereafter, as shown in FIG. 5C, the paste-like brazing material is dried by drying and solidifying the coating layer of the paste-like brazing material 22 'by heating at a low temperature (for example, about 353K) in the above-described state. The ring-shaped brazing material 13 is fixed to the end hat main body 12 via the solidified layer 22.
[0036]
In the end hat component 11 of the second embodiment described above, as in the first embodiment, the ring-shaped brazing material 13 is sintered with a Mo-Ru brazing material or a Mo-Ru-Ni brazing material. Since the ring-shaped brazing filler metal 13 has sufficient strength to withstand vibrations and shocks during handling, the occurrence of defects such as breakage due to handling or insertion into the end hat main body 12 is achieved. The occurrence of defects and the like can be greatly reduced.
[0037]
Then, the end-hat body 12 and the ring-shaped brazing material 13 are fixed by applying a paste-like brazing material 22 ′ of the same material as the ring-shaped brazing material 13 and drying and solidifying it. The manufacturing cost of the hat part 11 can be reduced, and a good fixing state that can sufficiently withstand vibrations and shocks in the assembly process of the magnetron cathode portion can be obtained with good reproducibility. In addition, adhesive components that adversely affect brazing do not remain.
[0038]
As in the first embodiment, in the end hat component 21 as described above, a coiled filament is inserted into the recess 12a of the end hat main body 12 to which the ring-shaped brazing material 13 is fixed in the assembly process of the magnetron cathode portion. For example, heated in a non-oxidizing atmosphere and brazed to a coiled filament.
[0039]
In such an assembly process of the magnetron cathode part, the ring-shaped brazing material 13 is fixed to the end hat main body 12 in a good state, and the insertion of the coiled filament into the end hat main body 12 is easy and stable. Therefore, it is possible to prevent the work efficiency from being lowered due to the poor insertion of the ring-shaped brazing filler metal 13 and to suppress the occurrence of defective brazing or defective assembly dimensions. Further, the dry solidified layer 22 of the paste-like brazing material, which is an adhesive layer of the ring-shaped brazing material 13, does not adversely affect the brazing, so that a good bonding state of the coiled filament can be stably obtained. Can do. As a result, it is possible to improve the assembly accuracy of the magnetron cathode part and to prevent the occurrence of defective work during the assembly, so that the tube characteristics of the magnetron cathode part and the productivity can be improved.
[0040]
【The invention's effect】
As described above, according to the end hat part of the present invention, the number of manufacturing steps can be reduced, and the occurrence of defects based on the low handleability of the brazing material and the brazing defects caused by the fixing material. Etc. can be suppressed. Therefore, it greatly contributes to improving the accuracy of the assembly process of the magnetron cathode part and suppressing the occurrence of work defects.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view showing a configuration of a first embodiment of an end hat component of the present invention.
FIG. 2 is a cross-sectional view showing a process for manufacturing the end hat component shown in FIG. 1;
3 is a diagram showing another process example of laser welding in the manufacturing process of the end hat component shown in FIG. 2. FIG.
FIG. 4 is a cross-sectional view showing a configuration of a second embodiment of an end hat component of the present invention.
5 is a cross-sectional view showing a process for manufacturing the end hat component shown in FIG. 4; FIG.
FIG. 6 is a cross-sectional view showing a configuration of a cathode portion of a magnetron.
FIG. 7 is a cross-sectional view showing a main part of a conventional cathode part assembly process.
[Explanation of symbols]
11, 21... End hat parts 12... End hat body 13... Ring-shaped brazing material 14... Laser welded portion 17... Laser welding apparatus 22 ... Paste-like Mo-Ru or Mo-Ru-Ni brazing material Dry solidified layer

Claims (5)

Comprising the end hat body consisting of Mo, Ri Do a sintered body of a Mo-Ru brazing material or Mo-Ru-Ni brazing material, and a ring-shaped brazing material for brazing the filaments,
The ring-shaped brazing material is fixed to a predetermined position of the end hat main body by laser welding, and the magnet has an end hat component. An end hat main body made of Mo, and a ring brazing material made of a sintered body of Mo-Ru brazing material or Mo-Ru-Ni brazing material,
An end hat component for a magnetron, wherein the ring-shaped brazing material is fixed to a predetermined position of the end hat main body by a paste-like brazing material made of the same material as the ring-shaped brazing material. Disposing a ring-shaped brazing material for brazing a filament, which is made of a sintered body of Mo-Ru brazing material or Mo-Ru-Ni brazing material, at a predetermined position of the end hat body made of Mo;
And a step of laser-welding the ring-shaped brazing material to the end hat main body to fix the ring-shaped brazing material to the end hat main body. In the manufacturing method of the end hat part for magnetrons of Claim 3 ,
A method of manufacturing a magnetron end hat part, wherein the ring-shaped brazing material is fixed to the end hat main body by spot welding at a plurality of points simultaneously by laser welding. Applying a paste brazing material containing Mo-Ru brazing material or Mo-Ru-Ni brazing material to a predetermined position of the end hat body made of Mo;
On the coating layer of the paste-like brazing material, a ring-like brazing material made of a sintered body of Mo-Ru brazing material or Mo-Ru-Ni brazing material, which is the same material as the pasty brazing material, is placed, heated, And a step of fixing the ring-shaped brazing material to the end-hat main body by drying.

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