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JP3264609B2 - Apparatus and method for detecting fluid flow - Google Patents

Apparatus and method for detecting fluid flow

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Publication number
JP3264609B2
JP3264609B2 JP27836795A JP27836795A JP3264609B2 JP 3264609 B2 JP3264609 B2 JP 3264609B2 JP 27836795 A JP27836795 A JP 27836795A JP 27836795 A JP27836795 A JP 27836795A JP 3264609 B2 JP3264609 B2 JP 3264609B2
Authority
JP
Japan
Prior art keywords
thermistor
measurement
resistance value
fluid
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP27836795A
Other languages
Japanese (ja)
Other versions
JPH09101322A (en
Inventor
裕路 小川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Organo Corp
Original Assignee
Organo Corp
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Filing date
Publication date
Application filed by Organo Corp filed Critical Organo Corp
Priority to JP27836795A priority Critical patent/JP3264609B2/en
Publication of JPH09101322A publication Critical patent/JPH09101322A/en
Application granted granted Critical
Publication of JP3264609B2 publication Critical patent/JP3264609B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、流体の流れ検知装
置及び方法に関し、特に、被測定流体中に配置されるサ
ーミスタに発熱乃至は加温のための電流を流し、この加
温に起因した所定時間内の温度変化の大小に基づいて流
れの有無を検知することを可能にした、流体の流れ検知
装置及び方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus and a method for detecting a flow of a fluid, and more particularly, to applying a current for heat generation or heating to a thermistor disposed in a fluid to be measured. The present invention relates to a fluid flow detection device and method capable of detecting the presence or absence of a flow based on the magnitude of a temperature change within a predetermined time.

【0002】[0002]

【従来の技術】燃料や水等の液体、ガスを送る配管で
は、内部流体の流れの有無や流速を検知するための装置
が用いられている。例えば、機械的な方法で流れの有無
を検知する装置では、パドル式フロースイッチが知られ
ている。パドル式フロースイッチは、流体の流路に可動
式の障害物となるパドルを設置し、流体がパドルに当た
って生じるパドルの移動をマイクロスイッチ等を用いて
電気信号として取り出す。
2. Description of the Related Art In a pipe for sending a liquid or gas such as fuel or water, a device for detecting the presence or absence of a flow of an internal fluid and a flow velocity is used. For example, a paddle type flow switch is known as an apparatus for detecting the presence or absence of a flow by a mechanical method. In the paddle type flow switch, a paddle serving as a movable obstacle is installed in a fluid flow path, and movement of the paddle generated when the fluid hits the paddle is extracted as an electric signal using a microswitch or the like.

【0003】また、電気的な方法で流れの有無を検知す
る装置として、図7に示すように、2個のサーミスタを
センサとして用いた熱式フローセンサがある。一方のサ
ーミスタAは流体自体の温度を測定するためのもの、他
方のサーミスタBは加温電流を流して自己発熱させると
共に、これに伴うサーミスタの温度上昇を測定するため
のものである。これらサーミスタA、Bを、サーミスタ
Aが配管の上流側となるように流体中に配置し、サーミ
スタAにより測定した流体温度と、自己発熱し流体によ
って冷却されるサーミスタBの温度との差が一定値を超
えるか超えないかによって、流体の流れの有無を判定す
る。
[0003] As a device for detecting the presence or absence of a flow by an electric method, there is a thermal flow sensor using two thermistors as sensors as shown in FIG. One thermistor A is for measuring the temperature of the fluid itself, and the other thermistor B is for applying a heating current to cause self-heating and for measuring the temperature rise of the thermistor accompanying the self-heating. These thermistors A and B are arranged in a fluid such that the thermistor A is located on the upstream side of the pipe, and the difference between the fluid temperature measured by the thermistor A and the temperature of the thermistor B self-generated and cooled by the fluid is constant. The presence or absence of the fluid flow is determined based on whether the value exceeds or does not exceed the value.

【0004】また、上記と類似の装置によって流体の流
速を検出するものもある。例えば、上記サーミスタAと
サーミスタBの温度差を、予め設定した比率で流速に換
算する方法、あるいはサーミスタAとサーミスタBの温
度差が常に一定となるように、サーミスタBに流す電流
値を制御し、その電流値から流速を計算する方法等があ
る。
Further, there is an apparatus which detects the flow velocity of a fluid by using a device similar to the above. For example, a method of converting the temperature difference between the thermistor A and the thermistor B into a flow rate at a preset ratio, or controlling a current value flowing through the thermistor B so that the temperature difference between the thermistor A and the thermistor B is always constant. And a method of calculating the flow velocity from the current value.

【0005】[0005]

【発明が解決しようとする課題】ところで、前記機械的
なフロースイッチを用いる方法は、流体の流速を利用し
て機械的な駆動力を得ているために、流体中に圧力損失
を生じるという問題がある。また、所定の流量範囲を超
えると圧力損失が特に増大することから、対応できる流
速の範囲が狭い、更には、構造自体が大きくなりがち
で、取付けスペースの確保が困難という問題もある。
The above-mentioned method using a mechanical flow switch has a problem that a pressure loss occurs in a fluid because a mechanical driving force is obtained by utilizing the flow velocity of the fluid. There is. Further, when the flow rate exceeds the predetermined flow rate range, the pressure loss particularly increases, so that the range of flow velocity that can be handled is narrow, and the structure itself tends to be large, so that there is a problem that it is difficult to secure a mounting space.

【0006】一方、熱式フローセンサや熱式流速計は、
センサの取付けスペースの確保は容易であるものの、流
体温度測定用と自己発熱用の2組の高精度サーミスタ及
びその測定回路を必要とし、装置が高価になりがちであ
る。また、双方のサーミスタの温度特性を同じものとす
ることは困難なため、温度特性の差を補償する温度補償
回路が別に必要となり、回路が複雑化する。更には、双
方の測定回路における各部品間の特性の相違や経時変化
等を考慮して、双方のサーミスタの温度差を大きくとる
ことが必要なため、加温のための消費電力が大きくなり
がちという欠点もある。
On the other hand, a thermal flow sensor and a thermal anemometer are:
Although it is easy to secure the mounting space for the sensor, two sets of high-precision thermistors for measuring the fluid temperature and self-heating and a measuring circuit for the same are required, and the apparatus tends to be expensive. Further, since it is difficult to make the temperature characteristics of both thermistors the same, a temperature compensating circuit for compensating for the difference in temperature characteristics is required separately, and the circuit becomes complicated. Furthermore, it is necessary to increase the temperature difference between the two thermistors in consideration of the difference in characteristics between the components in the two measurement circuits and changes over time, so that power consumption for heating tends to increase. There is also a disadvantage.

【0007】本発明は、上記に鑑み、圧力損失が小さ
く、その検出範囲も広くとれると共に、簡素な構造で製
作コストが低く且つ検知のための消費電力も少なくて足
りる、流体の流れ検知装置を提供することを目的とす
る。
SUMMARY OF THE INVENTION In view of the above, the present invention provides a fluid flow detection device which has a small pressure loss, a wide detection range, a simple structure, low production cost, and low power consumption for detection. The purpose is to provide.

【0008】[0008]

【課題を解決するための手段】上記目的を達成するため
に、本発明の流体の流れ検知装置は、被測定流体中に配
置されるサーミスタと、周期的又は間欠的に前記サーミ
スタに通電してこれを加温する通電手段と、前記サーミ
スタの抵抗値を測定する抵抗値測定手段であって、前記
通電手段による通電開始直前又は通電開始後の所定時刻
に第1回の抵抗値測定をし、次いで、該第1回の抵抗値
測定から所定の時間間隔をおいて第2回の抵抗値測定を
する抵抗値測定手段と、前記抵抗値測定手段による測定
から求められた、前記第1回の抵抗値測定時点から前記
第2回の抵抗値測定時点迄のサーミスタの温度変化に基
づいて、流体の流れの有無を判定する流れ判定手段とを
備えることを特徴とする。
In order to achieve the above object, a fluid flow detecting device according to the present invention comprises a thermistor disposed in a fluid to be measured, and a periodic or intermittent current supply to the thermistor. An energizing means for heating this, and a resistance value measuring means for measuring the resistance value of the thermistor, wherein a first resistance value measurement is performed at a predetermined time immediately before the energization by the energization means or at a predetermined time after the energization start, Next, a resistance value measuring means for performing a second resistance value measurement at a predetermined time interval from the first resistance value measurement, and the first time resistance value obtained from the measurement by the resistance value measurement means. It is characterized by comprising flow determining means for determining the presence or absence of fluid flow based on the temperature change of the thermistor from the time when the resistance value is measured to the time when the second resistance value is measured.

【0009】また、本発明の流れ検知方法は、被測定流
体中にサーミスタを配置し、周期的又は間欠的に前記サ
ーミスタを加温し、該加温の開始直前又は開始後に前記
サーミスタの抵抗値を測定し、次いで、該抵抗値の測定
から所定の時間間隔をおいて前記サーミスタの抵抗値を
再度測定し、前記測定された抵抗値から求められた、先
の抵抗値測定時点から後の抵抗値測定時点までのサーミ
スタの温度変化の大小に基づいて流体の流れの有無を検
知することを特徴とする。
Further, according to the flow detecting method of the present invention, a thermistor is arranged in a fluid to be measured, and the thermistor is periodically or intermittently heated, and the resistance value of the thermistor is immediately before or after the start of the heating. Then, at predetermined time intervals from the measurement of the resistance value, the resistance value of the thermistor is measured again, and the resistance obtained after the previous resistance value measurement time obtained from the measured resistance value is measured. It is characterized in that the presence or absence of a fluid flow is detected based on the magnitude of the temperature change of the thermistor up to the time of the value measurement.

【0010】[0010]

【発明の実施の形態】本発明の流れ検知装置及び方法の
1つの実施形態では、サーミスタを流体中に配置し、通
電手段によりサーミスタを加温し、サーミスタの抵抗値
測定回路により、サーミスタの加温前温度と加温から一
定時間経過後の温度とを夫々測定する。サーミスタは、
流体に流れがないときには温度変化が大きく現れ、流体
に流れがあるときには、流体の冷却効果により温度変化
が小さく現れる。従って、双方の温度差が所定値以上の
ときには流れが無いものと判定し、所定値以下のときに
は流れが有るものと判定できる。その後、サーミスタの
温度が安定する期間をおいて、再び上記手順を繰り返し
て、周期的又は間欠的に流体の流れの有無を検知する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS In one embodiment of the flow detecting device and method of the present invention, a thermistor is placed in a fluid, the thermistor is heated by a current supply means, and the thermistor resistance is measured by a thermistor resistance measurement circuit. The pre-warming temperature and the temperature after a certain period of time from the heating are measured respectively. The thermistor
When there is no flow in the fluid, a large change in temperature appears. When there is a flow in the fluid, a small change in temperature appears due to the cooling effect of the fluid. Therefore, when the temperature difference between the two is equal to or more than the predetermined value, it is determined that there is no flow, and when it is equal to or less than the predetermined value, it can be determined that there is flow. Thereafter, after a period in which the temperature of the thermistor is stabilized, the above procedure is repeated again, and the presence or absence of fluid flow is detected periodically or intermittently.

【0011】[0011]

【実施例】以下、図面を参照し、本発明の実施例につい
て説明する。図1(a)は、本発明の第1の実施例の流
体の流れ検知装置の構成を示す回路図である。同図にお
いて、1はマイクロコンピュータ(MPU)、2はサー
ミスタ、3はAD変換器である。また、R1はサーミス
タ2と直列に接続された抵抗、TR1はp-n-pトラン
ジスタ、TR2はn-p-nトランジスタ、4は直流電源
装置である。サーミスタ2は、ガラス等の絶縁物で覆わ
れて流体から保護され、例えば図2に示すように、表面
にネジ山が刻まれた保持具(プラグ)10の先端に取り
付けられている。プラグ10が配管11に設けられたネ
ジ孔(取付け座)12にねじ込まれると、サーミスタ2
は、配管11中を流れる流体の流路に位置し、流体と接
触する構造である。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1A is a circuit diagram showing a configuration of a fluid flow detecting device according to a first embodiment of the present invention. In the figure, 1 is a microcomputer (MPU), 2 is a thermistor, and 3 is an AD converter. R1 is a resistor connected in series with the thermistor 2, TR1 is a pnp transistor, TR2 is an npn transistor, and 4 is a DC power supply. The thermistor 2 is covered with an insulator such as glass to be protected from fluid, and is attached to the tip of a holder (plug) 10 whose surface is threaded, for example, as shown in FIG. When the plug 10 is screwed into a screw hole (mounting seat) 12 provided in the pipe 11, the thermistor 2
Is a structure located in the flow path of the fluid flowing through the pipe 11 and in contact with the fluid.

【0012】流体の流れの有無の検知は、一定周期で現
れる一連の手順により行なわれる。各検知周期は、被測
定流体の温度測定工程、サーミスタ加温工程、サーミス
タ鎮静化工程、鎮静化工程後の再度の温度測定工程、及
び、サーミスタ冷却工程からなる。鎮静化工程後に得ら
れた温度測定値と、最初に測定された被測定流体の温度
測定値とを比較し、両者の温度差が、予め定めた値を下
回れば流体の流れが有り、これを上回れば流体の流れが
無いものと判定する。
The detection of the presence or absence of the flow of the fluid is performed by a series of procedures that appear at a constant cycle. Each detection cycle includes a temperature measurement step of the fluid to be measured, a thermistor heating step, a thermistor calming step, a temperature measurement step after the calming step, and a thermistor cooling step. The temperature measurement value obtained after the sedation step is compared with the temperature measurement value of the fluid to be measured first, and if the temperature difference between the two falls below a predetermined value, there is a fluid flow, and this is determined. If it exceeds, it is determined that there is no fluid flow.

【0013】図1(b)のタイムチャートを更に参照し
て、本実施例の流れ検知装置の動作を詳細に説明する。
被測定流体の温度測定工程は、トランジスタTR1をO
Nに、トランジスタTR2をOFFにする。トランジス
タTR1を通過した電流はサーミスタ2を通り抵抗R1
を経由してアースに至り、抵抗R1の両端にサーミスタ
2の抵抗値に対応した電圧降下を発生させる。この電圧
降下は、AD変換器3によってディジタル信号に変換さ
れてMPU1に入力され、更にMPU1内で温度換算さ
れて記憶される。このように、先ずサーミスタ2の抵抗
値を測定し、これを温度に換算して被測定流体の測定温
度とする。
The operation of the flow detecting device according to the present embodiment will be described in detail with reference to the time chart of FIG.
In the step of measuring the temperature of the fluid to be measured, the transistor TR1 is turned off.
At N, the transistor TR2 is turned off. The current passing through the transistor TR1 passes through the thermistor 2 and the resistor R1
To the ground via the resistor R1, and a voltage drop corresponding to the resistance value of the thermistor 2 is generated at both ends of the resistor R1. This voltage drop is converted into a digital signal by the AD converter 3 and input to the MPU 1, which then converts the temperature in the MPU 1 and stores it. As described above, first, the resistance value of the thermistor 2 is measured, and this is converted into a temperature, which is used as the measured temperature of the fluid to be measured.

【0014】サーミスタ2の加温工程は、引き続きトラ
ンジスタTR2をONとして行なわれる。トランジスタ
TR1を通過した電流は、サーミスタ2、トランジスタ
TR2を介してアースに流れ、サーミスタ2はこの通電
電流により自己発熱する。サーミスタ2は、流体により
冷却され且つ流体温度を上昇させる。この加温工程は、
例えば数秒間である。
The step of heating the thermistor 2 is performed with the transistor TR2 turned on. The current that has passed through the transistor TR1 flows to the ground via the thermistor 2 and the transistor TR2, and the thermistor 2 self-heats by the supplied current. The thermistor 2 is cooled by the fluid and raises the fluid temperature. This heating step
For example, for a few seconds.

【0015】次に、鎮静化工程として、トランジスタT
R1、TR2をOFFとして、加温されたサーミスタ2
の中心部の熱が、ガラス等の絶縁材や周囲の被測定流体
に拡散して平均化する時間を確保する。この期間は、例
えば約1secである。次いで、トランジスタTR1を短
時間ONとして、サーミスタ2の加温後温度を測定す
る。この測定温度と、先に測定した加温前温度すなわち
被測定流体の温度とを比較し、その温度上昇分が、予め
設定した基準値を上回る場合には、流体が静止状態にあ
り、下回る場合には流れていると判定する。これは、サ
ーミスタ2の温度上昇は流体の流れがある場合に小さ
く、且つ、温度降下は流体の流れがある場合に大きいと
いう原理に基づいている。
Next, as a calming step, the transistor T
R1 and TR2 are turned off and thermistor 2 is heated
The time at which the heat in the central portion of the substrate spreads over the insulating material such as glass and the surrounding fluid to be measured is averaged. This period is, for example, about 1 second. Next, the transistor TR1 is turned on for a short time, and the temperature of the thermistor 2 after heating is measured. This measured temperature is compared with the previously measured temperature before heating, that is, the temperature of the fluid to be measured.If the temperature rise exceeds a preset reference value, the fluid is in a stationary state, and Is determined to be flowing. This is based on the principle that the temperature rise of the thermistor 2 is small when the fluid flows, and the temperature drop is large when the fluid flows.

【0016】冷却工程は、加温工程で加えた熱エネルギ
が被測定流体中に拡散し、サーミスタが加温前温度に近
くなるようにするもので、トランジスタTR1、TR2
の双方をOFFにする。なお、この期間は例えば数sec
である。加温前温度測定工程から冷却工程迄の一連の工
程により1つの流れ検知周期Tが構成される。
In the cooling step, the thermal energy applied in the heating step is diffused into the fluid to be measured, so that the thermistor approaches the temperature before the heating.
Are turned off. This period is, for example, several seconds.
It is. One flow detection cycle T is constituted by a series of steps from the pre-heating temperature measurement step to the cooling step.

【0017】以上の各工程における、サーミスタ2の温
度と時間との関係を図3に示す。このグラフは、流体を
水とした実験で得られたもので、水温を25℃とし、毎
分1リットルの流れ有りのとき、及び、流れ無しのとき
の図である。同図に示されるように、サーミスタ2の温
度は、流体に流れが有るときには加温開始から約1sec
で飽和状態になり、流れの無いときには加温開始後3se
c経過後も上昇を続ける。例えば約3secの加温工程をと
り、その後に約1secの鎮静化工程を設けると、双方の
下降曲線間に図示したような判別可能な相違ができる。
FIG. 3 shows the relationship between the temperature of the thermistor 2 and time in each of the above steps. This graph was obtained in an experiment using water as the fluid, and is a diagram when the water temperature is 25 ° C., when there is a flow of 1 liter per minute, and when there is no flow. As shown in the figure, the temperature of the thermistor 2 is about 1 second from the start of heating when there is a flow in the fluid.
Saturates at 3 °, and when there is no flow, 3se after starting heating
Continue to rise after c. For example, if a heating step of about 3 seconds is performed, and then a sedation step of about 1 second is provided, a discernible difference between the two descending curves can be obtained as shown in the figure.

【0018】ここで、被測定流体の温度測定時点Aの温
度と、鎮静完了時点Bの温度とを比較すると、流れが有
る場合にはその差がほとんどなく、流れが無い場合には
一定以上の差が生じている。時点Aと時点Bの温度差
を、予め設定した基準値と比較することによって流れの
有無を判定する。
Here, comparing the temperature at the temperature measurement point A of the fluid to be measured and the temperature at the sedation completion point B, there is almost no difference when there is a flow, and when there is no flow, the difference is equal to or more than a certain value. There is a difference. The presence or absence of a flow is determined by comparing the temperature difference between the time points A and B with a preset reference value.

【0019】図3から理解できるように、加温開始後例
えば約1sec後の時点Cと3sec間の加温終了直前の時点
Dとの温度差からも、流れの有無を判別することができ
る。このようにすることで、1回の測定に必要な時間を
短縮する。更に、この場合、測定時点Cの温度は高くと
もよいので、測定時点D後の冷却工程の時間の短縮も可
能である。ここで、時点Aと時点Bの温度差による検知
と、時点Cと時点Dの温度差による検知とを併用するこ
とも可能である。
As can be understood from FIG. 3, the presence or absence of the flow can also be determined from the temperature difference between the time point C, for example, about 1 second after the start of the heating, and the time point D immediately before the end of the heating for 3 seconds. By doing so, the time required for one measurement is reduced. Further, in this case, since the temperature at the measurement time point C may be high, the time of the cooling step after the measurement time point D can be reduced. Here, the detection based on the temperature difference between the time points A and B and the detection based on the temperature difference between the time points C and D can be used in combination.

【0020】以上のような流れ検知の手順を周期的に繰
り返すことで、継続的な流れ検知が行なわれる。また、
このような周期的な検知に代えて、流れの有無を検知す
る必要が生じた場合に、その都度、上記検知手順を実施
するという間欠的な検知を行なうことも出来る。
By continuously repeating the above flow detection procedure, continuous flow detection is performed. Also,
Instead of such periodic detection, when it is necessary to detect the presence / absence of a flow, intermittent detection of performing the above detection procedure may be performed each time.

【0021】図3の実験結果から、加温中乃至は加温後
のサーミスタの温度変化の等価的な時定数が、流体の流
れの有無で異なることが理解できる。即ち、流れがある
ときには時定数が小さく、流れがないときには時定数が
大きい。これを利用して、流れ検知の所要時間を先に説
明した例から更に短縮することが出来る。これを、図4
を参照して説明する。流れがある状態では、サーミスタ
の温度は、その加温開始から約1sec経過後に飽和す
る。従って、加温時間を1secに短縮して、その加温開
始時点Aと、加温終了時点又は鎮静終了時点Bの温度差
を測定することでも、流れの有無判定が可能となる。周
期的な検知を行なう場合には、或る検知周期で流れが有
ると判定されたら、その周期の冷却期間を1secにし、
流れが無いと判定されたら、その周期の冷却期間を3se
cにする。これにより、検知周期Tを小さくできる。
From the experimental results shown in FIG. 3, it can be understood that the equivalent time constant of the temperature change of the thermistor during or after the heating differs depending on whether or not the fluid flows. That is, when there is a flow, the time constant is small, and when there is no flow, the time constant is large. By utilizing this, the time required for flow detection can be further reduced from the example described above. This is shown in FIG.
This will be described with reference to FIG. In a state where there is a flow, the temperature of the thermistor saturates about 1 second after the start of heating. Therefore, it is also possible to determine the presence or absence of the flow by reducing the heating time to 1 second and measuring the temperature difference between the heating start time A and the heating end time or the sedation end time B. When performing periodic detection, if it is determined that there is a flow in a certain detection cycle, the cooling period of that cycle is set to 1 second,
If it is determined that there is no flow, the cooling period of the cycle is 3se
c. Thereby, the detection cycle T can be reduced.

【0022】上記第1の実施例によれば、加温前後の温
度測定や加温時刻に関連した所定時間間隔の温度測定を
共通のサーミスタで行うので、別々の検出回路を設けた
従来の流れ検知装置に比べて、誤差の要因が少なくな
る。即ち、温度特性や経時変化等のバラツキを考慮する
必要が無いので、僅かな加温でも加温前後等の温度差が
有効に測定でき、加温のための電力を削減することがで
きる。例えば、2個のサーミスタを用いて水の流れの有
無を測定する場合には、特性のバラツキを考慮すると、
被測定流体の温度を25℃として、加温温度を5℃程度
とる必要があり、この場合、消費電力は50mW程度必
要である。これに対し、本発明では、バラツキを考慮し
なくともよいことから、加温温度は最小で約2.5℃程
度でもよく、この場合、消費電力は25mW程度で済
む。また、部品が少なくて済むとともに、構成部品のバ
ラツキや誤差を吸収するための調整が不要となるので、
製造原価の低減を図ることができる。
According to the first embodiment, the temperature measurement before and after the heating and the temperature measurement at a predetermined time interval related to the heating time are performed by the common thermistor. The cause of the error is smaller than that of the detection device. That is, since there is no need to consider variations such as temperature characteristics and changes over time, the temperature difference between before and after heating can be effectively measured even with a small amount of heating, and power for heating can be reduced. For example, when measuring the presence / absence of water flow using two thermistors, considering the variation in characteristics,
It is necessary to set the temperature of the fluid to be measured at 25 ° C. and the heating temperature to about 5 ° C. In this case, the power consumption is required to be about 50 mW. On the other hand, in the present invention, since the variation does not need to be considered, the heating temperature may be a minimum of about 2.5 ° C., and in this case, the power consumption may be about 25 mW. In addition, the number of components is reduced, and adjustment for absorbing variations and errors of the components is not required.
Manufacturing costs can be reduced.

【0023】次に、図5(a)及び(b)を参照して、
本発明の第2の実施例の流体の流れ検知装置について説
明する。なお、第1の実施例で説明した要素と同一また
は相当する要素には同じ符号を付して、その説明を省略
する。本実施例は、センサとして1個のサーミスタ2を
使用する点は、先の実施例と同じである。異なる点はそ
の回路構成にある。図5(a)に示すように、サーミス
タ2と直列の抵抗R1に代えてコンデンサCを設けた
点、AD変換器を省略した点、及び、MPU1にシュミ
ット回路を含めた点である。
Next, referring to FIGS. 5A and 5B,
A description will be given of a fluid flow detecting device according to a second embodiment of the present invention. Elements that are the same as or correspond to the elements described in the first embodiment are given the same reference numerals, and descriptions thereof are omitted. This embodiment is the same as the previous embodiment in that one thermistor 2 is used as a sensor. The difference lies in the circuit configuration. As shown in FIG. 5A, the point is that a capacitor C is provided instead of the resistor R1 in series with the thermistor 2, the AD converter is omitted, and the MPU 1 includes a Schmitt circuit.

【0024】第2の実施例における各検知周期は、図5
(b)に示すように、第1の実施例と同様な構成であ
る。先ず、トランジスタTR1をONに、トランジスタ
TR2をOFFにし、被測定流体の温度測定を行う。ト
ランジスタTR1を通った電流は、サーミスタ2を通
り、コンデンサCに充電される。コンデンサCの端子電
圧は、サーミスタ2の抵抗値に依存し、その値がMPU
1のシュミット回路に入力される。コンデンサCへの充
電開始からシュミット回路のHレベル電圧に到達する迄
の時間を測定して温度に換算する。ここで、トランジス
タTR2をONすると、コンデンサCの電荷は瞬間的に
放電され、コンデンサCの端子電圧はゼロに復帰し、同
時に、サーミスタ2は加温され自己発熱し始める。
Each detection cycle in the second embodiment is shown in FIG.
As shown in (b), the configuration is similar to that of the first embodiment. First, the transistor TR1 is turned on and the transistor TR2 is turned off, and the temperature of the fluid to be measured is measured. The current passing through the transistor TR1 passes through the thermistor 2 and charges the capacitor C. The terminal voltage of the capacitor C depends on the resistance value of the thermistor 2, and the value is MPU
1 to the Schmitt circuit. The time from the start of charging the capacitor C to when the voltage reaches the H level voltage of the Schmitt circuit is measured and converted into a temperature. Here, when the transistor TR2 is turned on, the electric charge of the capacitor C is instantaneously discharged, and the terminal voltage of the capacitor C returns to zero. At the same time, the thermistor 2 is heated and starts self-heating.

【0025】3秒間の加温期間経過後に、鎮静化工程と
して、トランジスタTR1、TR2の双方をOFFと
し、先の実施例と同様に温度が平均化される時間を確保
する。この期間は例えば0.5secである。温度が平均
化した時点で、トランジスタTR1をONにする。コン
デンサCの端子電圧がMPU1のシュミット回路に入力
され、シュミット回路のHレベルに達する迄の時間を測
定して温度に換算する。先の温度とこの温度とが比較さ
れ、その温度差から流れの有無が判定される。
After the elapse of the heating period of 3 seconds, as a calming step, both the transistors TR1 and TR2 are turned off, and a time for averaging the temperatures is secured as in the previous embodiment. This period is, for example, 0.5 sec. When the temperatures are averaged, the transistor TR1 is turned on. The terminal voltage of the capacitor C is input to the Schmitt circuit of the MPU 1 and the time until the Schmitt circuit reaches the H level is measured and converted to temperature. The above temperature is compared with this temperature, and the presence or absence of a flow is determined from the temperature difference.

【0026】冷却工程は、先の実施例と同様な目的で設
けられ、トランジスタTR1、TR2の双方をOFFに
することで得られる。なお、この期間は、例えば3.5
secとしてある。以上のような手順を周期的又は間欠的
に繰り返し、継続的な流れの検知を行う。
The cooling step is provided for the same purpose as in the previous embodiment, and is obtained by turning off both the transistors TR1 and TR2. This period is, for example, 3.5.
as sec. The above procedure is repeated periodically or intermittently to detect a continuous flow.

【0027】次に、図6を参照して、本発明の第3の実
施例である純水等の水の電気伝導率測定装置について説
明する。本実施例では、イオン交換式純水製造装置から
送られる純水の電気伝導率を測定する電気伝導率測定装
置の水中電極21、22と、先に説明した実施例の流れ
検知装置のサーミスタ2とを、図6に示すように、1つ
のプラグ20上に配置して1つの部品にまとめている。
Next, a third embodiment of the present invention will be described with reference to FIG. In the present embodiment, the underwater electrodes 21 and 22 of the electric conductivity measuring device for measuring the electric conductivity of pure water sent from the ion-exchange type pure water producing device, and the thermistor 2 of the flow detecting device of the embodiment described above. Are arranged on one plug 20 as shown in FIG.

【0028】一般に、イオン交換式純水製造装置では、
純水の純度を確保するために、そのイオン交換樹脂の性
能が低下したことを検知する終点検知を行なう。この場
合、装置出口の純水の電気伝導率を測定し、電気伝導率
が所定値以上に上昇したことを検知した時点で、イオン
交換樹脂の性能が低下したものとしてその終点を検知す
る。ところで、この形式の純水製造装置で得られる純水
の電気伝導率は、装置の運転開始時点では高く、その値
が安定するのは運転開始から約30sec経過後であるこ
とが知られている。つまり、終点検知のためには、装置
の運転開始から30sec以上経過後の電気伝導率を測定
する必要がある。このため、この形式の純水製造装置で
は、一般に、装置出口で純水が流れ始めたことをフロー
スイッチ等で検知し、その検知時点から30sec経過後
の電気伝導率を測定している。
Generally, in an ion-exchange type pure water producing apparatus,
In order to ensure the purity of pure water, end point detection is performed to detect that the performance of the ion exchange resin has decreased. In this case, the electric conductivity of pure water at the outlet of the apparatus is measured, and when it is detected that the electric conductivity has risen to a predetermined value or more, the end point of the ion exchange resin is detected as degraded. By the way, it is known that the electric conductivity of pure water obtained by a pure water producing apparatus of this type is high at the start of operation of the apparatus, and that the value stabilizes after about 30 seconds from the start of operation. . That is, in order to detect the end point, it is necessary to measure the electric conductivity after a lapse of 30 seconds or more from the start of the operation of the device. Therefore, in this type of pure water producing apparatus, generally, the start of pure water flowing at the outlet of the apparatus is detected by a flow switch or the like, and the electric conductivity is measured 30 seconds after the detection.

【0029】純水の電気伝導率の測定は、被測定純水に
接触する1対の電極間に交流電圧を印加し、これらの間
に流れる電流値を測定することで行なわれる。ところ
で、同じ純度の純水でも、その測定時点の水温によって
電気伝導率は大きく異なるものである。このため、JI
Sにおいても、水の電気伝導率は水温25℃に於ける値
を用いるように規定しているので、25℃に換算する必
要がある。つまり、水の電気伝導率の測定では、その測
定時点の水温の測定が不可欠である。
The electric conductivity of pure water is measured by applying an AC voltage between a pair of electrodes in contact with the pure water to be measured, and measuring a current value flowing between the electrodes. By the way, even with pure water of the same purity, the electric conductivity greatly differs depending on the water temperature at the time of the measurement. For this reason, JI
Also in S, the electric conductivity of water is specified to use a value at a water temperature of 25 ° C., so it is necessary to convert the value to 25 ° C. That is, in the measurement of the electric conductivity of water, the measurement of the water temperature at the time of the measurement is indispensable.

【0030】そこで、本実施例では、前記のごとく、流
れ検知装置のサーミスタ2と電気伝導率測定装置の水中
電極21、22とを1つの部品としてまとめ、これらを
プラグ20の先端に取り付けてある。このプラグを、純
水の出口配管の取付け座にねじ込むことで、純水の流れ
の有無検知、水温換算のための水温測定、及び、電気伝
導率測定の全てについて、この1つの部品を利用でき
る。このようにして、本実施例は、純水製造装置におけ
る部品点数の削減及びスペースの縮小を図っている。
Therefore, in this embodiment, as described above, the thermistor 2 of the flow detecting device and the underwater electrodes 21 and 22 of the electric conductivity measuring device are combined as one component, and these are attached to the tip of the plug 20. . By screwing this plug into the mounting seat of the outlet pipe of pure water, this one part can be used for detection of pure water flow, water temperature measurement for water temperature conversion, and electric conductivity measurement. . In this way, in the present embodiment, the number of parts and the space in the pure water production apparatus are reduced.

【0031】[0031]

【発明の効果】本発明の流れ検知装置及び方法では、1
つのサーミスタを利用してその加温前後等における流体
の温度変化を測定し、この温度変化の大小に従って流れ
の有無を検知することとしたので、本発明は、部品点数
の削減による製造コストの削減はもとより、素子や部品
の特性のバラツキ等に起因する誤差の要因を減らして加
温のための電力削減を可能とした、低圧力損失で且つ広
い検出範囲を有する流れ検知装置を提供した顕著な効果
を奏する。
According to the flow detecting apparatus and method of the present invention, 1
The present invention uses two thermistors to measure the temperature change of the fluid before and after its heating, and to detect the presence or absence of flow according to the magnitude of the temperature change. Therefore, the present invention reduces the manufacturing cost by reducing the number of parts. In addition, a flow detection device with a low pressure loss and a wide detection range that has reduced the factors of error due to variations in the characteristics of elements and components and reduced power for heating has been provided. It works.

【図面の簡単な説明】[Brief description of the drawings]

【図1】(a)は本発明の第1の実施例の流体の流れ検
知装置の回路図、(b)はその回路の動作を示すタイミ
ングチャート。
FIG. 1A is a circuit diagram of a fluid flow detecting device according to a first embodiment of the present invention, and FIG. 1B is a timing chart showing the operation of the circuit.

【図2】図1の流れ検知部の構造を示す断面図。FIG. 2 is a sectional view showing a structure of a flow detection unit in FIG. 1;

【図3】図1の実施例のサーミスタの温度変化を示すグ
ラフ。
FIG. 3 is a graph showing a temperature change of the thermistor of the embodiment of FIG.

【図4】図1の実施例の変形例のサーミスタの温度変化
を示すグラフ。
FIG. 4 is a graph showing a temperature change of a thermistor according to a modification of the embodiment of FIG. 1;

【図5】(a)は本発明の第2の実施例の流体の流れ検
知装置の回路図、(b)はその回路の動作を示すタイミ
ングチャート。
FIG. 5A is a circuit diagram of a fluid flow detecting device according to a second embodiment of the present invention, and FIG. 5B is a timing chart showing the operation of the circuit.

【図6】本発明の第3の実施例の電気伝導率測定装置の
センサ部分の構造を示す斜視図。
FIG. 6 is a perspective view showing the structure of a sensor part of an electric conductivity measuring device according to a third embodiment of the present invention.

【図7】従来の流体の流れ検知装置の模式的側面図。FIG. 7 is a schematic side view of a conventional fluid flow detection device.

【符号の説明】[Explanation of symbols]

1 マイクロコンピュータ(MPU) 2 サーミスタ 3 AD変換器 4 直流電源装置 R1 抵抗器 TR1、TR2 トランジスタ 10、20 保持具(プラグ) 11 配管 12 ネジ孔(取付け座) 21、22 水中電極 DESCRIPTION OF SYMBOLS 1 Microcomputer (MPU) 2 Thermistor 3 A / D converter 4 DC power supply R1 Resistor TR1, TR2 Transistor 10, 20 Holder (Plug) 11 Piping 12 Screw hole (Mounting seat) 21, 22 Underwater electrode

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) G01P 5/12 G01P 13/00 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 7 , DB name) G01P 5/12 G01P 13/00

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 被測定流体中に配置されるサーミスタ
と、 周期的又は間欠的に前記サーミスタに通電してこれを加
温する通電手段と、 前記サーミスタの抵抗値を測定する抵抗値測定手段であ
って、前記通電手段による通電開始直前又は通電開始後
の所定時刻に第1回の抵抗値測定をし、次いで、該第1
回の抵抗値測定から所定の時間間隔をおいて第2回の抵
抗値測定をする抵抗値測定手段と、 前記抵抗値測定手段による測定から求められた、前記第
1回の抵抗値測定時点から前記第2回の抵抗値測定時点
迄のサーミスタの温度変化の大小に基づいて、流体の流
れの有無を判定する流れ判定手段とを備えることを特徴
とする流体の流れ検知装置。
1. A thermistor disposed in a fluid to be measured, energizing means for energizing and heating the thermistor periodically or intermittently, and resistance value measuring means for measuring a resistance value of the thermistor. The first resistance value measurement is performed immediately before the energization by the energization means or at a predetermined time after the energization is started.
Resistance measurement means for performing a second resistance measurement at a predetermined time interval from the resistance measurement, and from the first resistance measurement time obtained from the measurement by the resistance measurement means A fluid flow detection device, comprising: flow determination means for determining the presence or absence of fluid flow based on the magnitude of temperature change of the thermistor up to the second resistance value measurement.
【請求項2】 前記第1回及び第2回の抵抗値測定、又
は、前記第2回の抵抗値測定が、前記通電手段による通
電停止後である、請求項1に記載の流体の流れ検知装
置。
2. The fluid flow detection according to claim 1, wherein the first and second resistance measurements or the second resistance measurement is performed after the power supply is stopped by the power supply unit. apparatus.
【請求項3】 被測定流体中にサーミスタを配置し、周
期的又は間欠的に前記サーミスタを加温し、該加温の開
始直前又は開始後に前記サーミスタの抵抗値を測定し、
次いで、該抵抗値の測定から所定の時間間隔をおいて前
記サーミスタの抵抗値を再度測定し、前記測定された抵
抗値から求められた、先の抵抗値測定時点から後の抵抗
値測定時点までのサーミスタの温度変化の大小に基づい
て流体の流れの有無を検知することを特徴とする、流体
の流れ検知方法。
3. A thermistor is arranged in a fluid to be measured, the thermistor is heated periodically or intermittently, and a resistance value of the thermistor is measured immediately before or after the start of the heating.
Next, the resistance value of the thermistor is measured again at a predetermined time interval from the measurement of the resistance value, and the resistance value obtained from the measured resistance value is measured from the previous resistance value measurement time to the subsequent resistance value measurement time. A method for detecting the presence or absence of fluid flow based on the magnitude of temperature change of the thermistor.
JP27836795A 1995-10-02 1995-10-02 Apparatus and method for detecting fluid flow Expired - Fee Related JP3264609B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27836795A JP3264609B2 (en) 1995-10-02 1995-10-02 Apparatus and method for detecting fluid flow

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27836795A JP3264609B2 (en) 1995-10-02 1995-10-02 Apparatus and method for detecting fluid flow

Publications (2)

Publication Number Publication Date
JPH09101322A JPH09101322A (en) 1997-04-15
JP3264609B2 true JP3264609B2 (en) 2002-03-11

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ID=17596362

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Country Status (1)

Country Link
JP (1) JP3264609B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030018345A (en) * 2001-08-28 2003-03-06 한국생산기술연구원 Mass flow sensor and measuring apparatus
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JP5054837B1 (en) * 2011-07-22 2012-10-24 立山科学工業株式会社 Seismoscope
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Also Published As

Publication number Publication date
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