JP3179662B2 - Ultrasonic motor and device having ultrasonic motor - Google Patents
Ultrasonic motor and device having ultrasonic motorInfo
- Publication number
- JP3179662B2 JP3179662B2 JP21282994A JP21282994A JP3179662B2 JP 3179662 B2 JP3179662 B2 JP 3179662B2 JP 21282994 A JP21282994 A JP 21282994A JP 21282994 A JP21282994 A JP 21282994A JP 3179662 B2 JP3179662 B2 JP 3179662B2
- Authority
- JP
- Japan
- Prior art keywords
- elastic body
- vibrator
- ultrasonic motor
- peripheral wall
- friction surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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- Lens Barrels (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は超音波モータ、特に棒状
の超音波モータを構成する振動子の弾性体に摺動材を好
適に塗布できる構造に係り、またこのような構成の超音
波モータを駆動源とする装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic motor, and more particularly to a structure capable of suitably applying a sliding material to an elastic body of a vibrator constituting a rod-shaped ultrasonic motor. The present invention relates to an apparatus using a driving source.
【0002】[0002]
【従来の技術】圧電素子等の電気−機械エネルギー変換
素子を固定した弾性体の表面に進行性振動を生ぜしめ、
その振動エネルギーを一方向の連続した機械運動に変換
させて取り出すように構成した超音波モータは本出願人
により実用化されて以来、現在ではカメラ等の光学機器
に搭載されて一般にも広くしられるようになっている。
従来公知の回転型超音波モータには、円環型及び円板型
のものと、棒状タイプのものとがあり、円環型のものと
棒状型のものは本出願人の製造する光学機器に搭載され
ている。2. Description of the Related Art Progressive vibration is generated on the surface of an elastic body to which an electromechanical energy conversion element such as a piezoelectric element is fixed,
An ultrasonic motor configured to convert the vibration energy into continuous mechanical movement in one direction and take it out has been put to practical use by the present applicant, and is currently mounted on optical equipment such as a camera and widely used in general. It has become.
Conventionally known rotary ultrasonic motors include an annular type and a disk type, and a rod type, and the annular type and the rod type are used in optical devices manufactured by the present applicant. It is installed.
【0003】以下には、本発明の先行技術としても棒状
型の超音波モータの従来例について説明する。A conventional example of a rod-type ultrasonic motor will be described below as a prior art of the present invention.
【0004】図3に示された棒状超音波モータにおい
て、振動エネルギー発生源となる振動子1は、金属等か
らなる弾性体9及び10の間に挟圧保持された圧電素子
群11とで構成されている。弾性体9は該モータの骨格
部材となるボルト状の頭部、5bに押圧される素子群1
1とで構成されている。弾性体9は該モータの骨格部材
となるボルト状の支持棒5の大径のねじ部5aに螺着さ
れ、弾性体10は該支持棒5の大径の頭部5bに押され
ることにより弾性体9との間に圧電素子群11を挟圧保
持している。2は弾性体9の先端面に対向して配置され
たロータ(すなわち移動子)であり、ロータ2の先端面
には軸方向にたわみ得る薄肉のばね部2aが形成され、
該ばね部2aが弾性体9の先端面に圧接されている。ロ
ータ2には出力ギア4が嵌着固定されており、該ギア4
は球軸受3の外輪に嵌着されている。球軸受3の内輪は
モータ取付け用フランジ6に嵌着固定され、該フランジ
6は該支持棒5の先端部近傍の部分5cに嵌着固定され
ている。ロータ2の内周部にはばね受け7が嵌着固定さ
れており、該ばね受け7の振動子側先端と出力ギア4の
端部との間にはロータ2のばね部2aを振動子1の弾性
体9の先端面に圧接させるための加圧ばね8が配置され
ている。In the rod-shaped ultrasonic motor shown in FIG. 3, a vibrator 1 serving as a vibration energy generating source is composed of a piezoelectric element group 11 held between elastic bodies 9 and 10 made of metal or the like. Have been. The elastic body 9 has a bolt-shaped head serving as a frame member of the motor, and an element group 1 pressed by 5b.
1 and 1. The elastic body 9 is screwed onto a large-diameter threaded portion 5a of a bolt-shaped support rod 5 serving as a frame member of the motor, and the elastic body 10 is elastically pressed by a large-diameter head 5b of the support rod 5. The piezoelectric element group 11 is held between the body 9 and the body. Reference numeral 2 denotes a rotor (that is, a moving element) disposed so as to face the distal end surface of the elastic body 9, and a thin spring portion 2 a that can bend in the axial direction is formed on the distal end surface of the rotor 2.
The spring portion 2 a is pressed against the distal end surface of the elastic body 9. An output gear 4 is fitted and fixed to the rotor 2.
Is fitted on the outer ring of the ball bearing 3. The inner ring of the ball bearing 3 is fitted and fixed to a motor mounting flange 6, and the flange 6 is fitted and fixed to a portion 5 c near the tip of the support rod 5. A spring receiver 7 is fitted and fixed to an inner peripheral portion of the rotor 2. A spring portion 2 a of the rotor 2 is attached between the vibrator-side tip of the spring receiver 7 and an end of the output gear 4. A pressurizing spring 8 for pressing against the distal end surface of the elastic body 9 is disposed.
【0005】図4に該振動子1に設けられている圧電素
子群11の配置と分極パターンと圧電素子の構成を示
す。圧電素子群11は、A相駆動信号が印加されるA相
圧電素子11a及び11bと、B相駆動信号が印加され
るB相圧電素子11c及び11dと、共振検出用のS相
圧電素子11eとから構成されている。各圧電素子11
a〜11eは中心線を境に左右反転して分極されてお
り、各圧電素子11a〜11eの間には不図示の電極板
が挿入されている。前記超音波モータの駆動原理は以下
の通りである。FIG. 4 shows the arrangement of the piezoelectric element group 11 provided in the vibrator 1, the polarization pattern, and the configuration of the piezoelectric element. The piezoelectric element group 11 includes A-phase piezoelectric elements 11a and 11b to which an A-phase drive signal is applied, B-phase piezoelectric elements 11c and 11d to which a B-phase drive signal is applied, and an S-phase piezoelectric element 11e for detecting resonance. It is composed of Each piezoelectric element 11
The electrodes a to 11e are polarized right and left inverted around the center line, and an electrode plate (not shown) is inserted between the piezoelectric elements 11a to 11e. The driving principle of the ultrasonic motor is as follows.
【0006】A相だけに交流電界を印加すると、圧電素
子の伸縮によって、振動子1には紙面に水平な方向の1
次曲げ固有振動が励起される。またB相だけに交流電界
を印加すると、紙面に垂直な方向へ振動する。When an AC electric field is applied only to the A-phase, the vibrator 1 is placed on the vibrator 1 in a direction parallel to the plane of FIG.
The next bending natural vibration is excited. Also, when an AC electric field is applied only to the B phase, it vibrates in a direction perpendicular to the paper surface.
【0007】A相によって励起される水平方向の振動
と、B相による垂直方向の振動を、時間的にも90度位
相を違えて加えると、振動子には長手軸に対して右また
は左回りの円運動が発生する。弾性体9は変位拡大のた
めの周溝9aを有するため、弾性体9の先端には図3に
示したような首振り運動が生ずる。When a horizontal vibration excited by the A-phase and a vertical vibration caused by the B-phase are applied with a phase difference of 90 degrees in time, the vibrator is rotated clockwise or counterclockwise with respect to the longitudinal axis. Circular motion occurs. Since the elastic body 9 has a circumferential groove 9a for expanding the displacement, a swinging motion as shown in FIG.
【0008】摩擦面(振動子上面)からみると、この振
動は1波の進行波に相当する。この振動子に、ばね部2
aを有するロータ2を加圧接触させるとロータ2は波頭
付近の1か所のみで弾性体9と接触し、進行波の逆方向
に回転する。出力はロータ2と球軸受3の外輪に嵌着さ
れたギア4により取り出される。When viewed from the friction surface (upper surface of the vibrator), this vibration corresponds to one traveling wave. This vibrator has a spring 2
When the rotor 2 having “a” is brought into pressure contact, the rotor 2 comes into contact with the elastic body 9 only at one place near the wave front, and rotates in the direction opposite to the traveling wave. The output is taken out by a gear 4 fitted to the outer ring of the rotor 2 and the ball bearing 3.
【0009】また、棒状超音波モータでは、支持棒5の
先端に取り付けられたフランジ6も一体の系として振動
子の固有モードをフランジ6の振動振幅が非常に小さく
なるように設計しているので、円環型の振動子をフェル
ト等の吸振材で支持したものと較べて支持損失は非常に
小さい。ロータ2のばね部2aは、円環型超音波モータ
同様に固有振動数が振動子の加振周波数よりも十分高
く、振動に追従するよう設計されている。またロータ本
環は慣性質量が十分大きく、振動子の加振力によって振
動が励起されないように設計されている。In the rod-shaped ultrasonic motor, the eigenmode of the vibrator is designed so that the vibration amplitude of the flange 6 is extremely small, since the flange 6 attached to the tip of the support rod 5 is also an integral system. The supporting loss is much smaller than that of a ring-shaped vibrator supported by a vibration absorbing material such as felt. The spring portion 2a of the rotor 2 has a natural frequency sufficiently higher than the vibration frequency of the vibrator and is designed to follow the vibration, similarly to the annular ultrasonic motor. Further, the rotor main ring has a sufficiently large inertial mass and is designed so that vibration is not excited by the exciting force of the vibrator.
【0010】[0010]
【発明が解決しようとする課題】超音波モータの短所の
一つに耐久寿命の短いことが挙げられる。その原因は、
超音波モータが摩擦力により駆動力を得ていることにあ
る。One of the disadvantages of the ultrasonic motor is that it has a short durability life. The cause is
An ultrasonic motor obtains a driving force by a frictional force.
【0011】すなわち、高トルクを得るためには、大き
な摩擦力を得ることが必要であるが、このとき滑りが生
ずれば、摩擦面で大きなエネルギーを消費するため摩耗
が進む。公知の超音波モータでは、ロータと振動子の相
互摩擦面に耐摩耗性の摺動材が用いられており、この摺
動材の摩耗が超音波モータの寿命を決している。That is, in order to obtain a high torque, it is necessary to obtain a large frictional force. However, if slippage occurs at this time, a large amount of energy is consumed on the frictional surface, so that abrasion proceeds. In a known ultrasonic motor, a wear-resistant sliding material is used for a mutual friction surface between the rotor and the vibrator, and the wear of the sliding material will last the life of the ultrasonic motor.
【0012】この摺動材に関しては最近多数の研究がな
されているが、有機材料を用いたものに高寿命のものが
多い。Although many studies have been made on the sliding material recently, many of those using an organic material have a long life.
【0013】例を挙げると、エポキシ系樹脂・ポリイミ
ド・ポリアミド・ポリアミドイミド・シリコーン系樹脂
・これらの混合物等は摩擦定数が大きくかつ低摩耗であ
る。またこれらにPTFE・チタン酸カリ・炭酸繊維等
を添加すると摩擦定数はやや低下するがより低摩耗とな
る。For example, epoxy resins, polyimides, polyamides, polyamide imides, silicone resins, and mixtures thereof have a large friction constant and low wear. Further, when PTFE, potassium titanate, carbonated fiber or the like is added to these, the friction constant is slightly lowered but the wear becomes lower.
【0014】そこで摩擦面にこれらの有機材料を付与す
ることになるが、振動子材料は振動歪に対して低損失と
なるよう金属等が用いられることになるため、別体で構
成する必要があるが、有機材料のシートを貼るのでは手
間がかかりコスト高になるため、塗布による方法を採用
したい。しかも、吹き付け塗装が一番簡単でローコスト
である。ここで、問題となるのが、摩擦面以外に付着す
る有機材料である。Therefore, these organic materials are applied to the friction surface. However, since the vibrator material is made of metal or the like so as to have a low loss with respect to vibration strain, it is necessary to form the vibrator separately. However, sticking an organic material sheet is time-consuming and costly, so we would like to adopt a coating method. Moreover, spray painting is the easiest and the lowest cost. Here, what matters is an organic material that adheres to a portion other than the friction surface.
【0015】前記したように、弾性体9は螺旋状の締結
部を有するが、ここに付着すると、ねじ寸法の変化やね
じ強度の低下等振動子の組立に支障ができる。ここに締
結部とはネジ部のほか、圧入嵌合のハメアイ部、カシメ
結合の締結部等をさす。前述の事情もこれらの締結構造
でも同じである。ところで、締結部でなくとも振動子側
面は曲げ振動に伴い大きな歪を生じているため、ここに
有機材料が付着すると、その内部減衰によりエネルギー
損失の増加を招きモータ効率の悪化につながる。そこ
で、マスク等をした後吹き付け塗装し、さらにその後マ
スクを除去するのでは手間がかかる。As described above, the elastic body 9 has a helical fastening portion, but if attached to the elastic body 9, it may hinder assembly of the vibrator, such as a change in screw dimensions and a decrease in screw strength. Here, the term "fastening portion" refers to a threaded portion, a press-fit fitting portion, a crimping fastening portion, or the like. The situation described above is the same in these fastening structures. By the way, even if it is not a fastening part, since the vibrator side face generates a large distortion due to the bending vibration, if an organic material adheres to the side, internal loss will increase energy loss and lead to deterioration of motor efficiency. Therefore, it is time-consuming to spray-coat after forming a mask or the like and then remove the mask.
【0016】本発明の第1の目的は、耐摩耗有機材料か
らなる摺動材を振動子を構成する弾性体の駆動面にのみ
吹きつけ法等のローコストな方法で塗布できる構造の超
音波モータを提供することにある。A first object of the present invention is to provide an ultrasonic motor having a structure in which a sliding member made of a wear-resistant organic material can be applied to only a driving surface of an elastic body constituting a vibrator by a low cost method such as a spraying method. Is to provide.
【0017】本発明の第2の目的は、上記した第1の目
的を実現する超音波モータを駆動源とする装置を提供す
ることにある。A second object of the present invention is to provide an apparatus which uses an ultrasonic motor as a drive source and realizes the first object.
【0018】[0018]
【課題を解決するための手段及び作用】本発明の第1の
目的を実現する構成は、請求項1に記載のように、電気
−機械エネルギー変換素子により進行波が励起される弾
性体及び電気−機械エネルギー変換素子を弾性体に挟持
固定させるための締結部とからなる振動子と、弾性体に
加圧接触し進行波により所定方向に駆動される移動子
と、弾性体の移動子との接触面に耐摩耗性の被覆層から
なる摩擦面を有し、締結部及び振動子の周壁面が、摩擦
面を摩擦面と垂直な方向に投影した領域内に配置される
ことを特徴とする。 According to a first aspect of the present invention, there is provided an electric vehicle comprising:
-Bullets whose traveling wave is excited by the mechanical energy conversion element
Body and electro-mechanical energy conversion element sandwiched between elastic bodies
A vibrator consisting of a fastening part for fixing and an elastic body
A moving element which is brought into pressure contact and driven in a predetermined direction by a traveling wave
And a wear-resistant coating layer on the contact surface of the elastic body with the moving element
Friction surface, the fastening part and the peripheral wall of the vibrator
Placed in the area projected the surface perpendicular to the friction surface
It is characterized by the following.
【0019】この構成では、振動子を構成する弾性部材
の摩擦面に対して垂直な方向から耐摩耗性の例えば有機
材料からなる摺動材を吹きつけると、該摺動材は振動子
を構成する締結部及び振動子の周壁面に付着することは
ない。In this configuration, when a wear-resistant sliding material made of, for example, an organic material is sprayed from a direction perpendicular to the friction surface of the elastic member constituting the vibrator, the sliding material forms the vibrator. It does not adhere to the fastening portion and the peripheral wall surface of the vibrator .
【0020】この構成により、摩擦面を構成する弾性体
の上面における面積を広くし、この上面の上方から摩擦
面を投影した領域内に振動子の周壁面と締結部が納まる
形状とすることで、上方から摺動材を吹きつけ塗装して
も、弾性体の上面以外に摺動材が付着することはない。
したがって振動子の組立等に際して、締結部のネジ穴等
に摺動材が付着することによる締結不良等の悪影響を防
止することができ、また、振動子の曲げ振動に伴い大き
な歪を生じている振動子の周壁面に摺動材が付着するこ
とによるエネルギー損失の増加を防ぐことができる。 With this structure, the elastic body constituting the friction surface
The area on the upper surface of the
The peripheral wall of the vibrator and the fastening part fit within the projected area of the surface
By spraying the sliding material from above by painting
Also, the sliding material does not adhere to portions other than the upper surface of the elastic body.
Therefore, when assembling the vibrator, etc.,
Prevents adverse effects such as poor fastening due to the adhesion of sliding material to
Can be stopped, and the size increases with the bending vibration of the vibrator.
Sliding material may adhere to the peripheral wall of
This can prevent the energy loss from increasing.
【0021】本発明の第1の目的を実現する他の構成
は、請求項2に記載のように、電気−機械エネルギー変
換素子により進行波が励起される弾性体及び電気−機械
エネルギー変換素子を弾性体に挟持固定させるための締
結部とからなる振動子と、弾性体の周壁部に加圧接触し
進行波により所定方向に駆動される移動子と、弾性体の
周壁部の振動子との接触面に耐摩耗性の被覆層からなる
摩擦面を有し、弾性体自身が、弾性体の周壁面を弾性体
の周壁面と垂直な方向に投影した領域内に配置されるこ
とを特徴とする。 The first other configurations to achieve the object of the present invention, as described in claim 2, electro - mechanical energy varying
Body and electro-mechanical device in which traveling wave is excited by exchange element
Tightening to fix the energy conversion element to the elastic body
Pressure contact between the vibrator consisting of the joint and the peripheral wall of the elastic body.
A moving element driven in a predetermined direction by a traveling wave;
Consists of a wear-resistant coating layer on the peripheral wall contacting the vibrator
It has a friction surface, and the elastic body itself
Placed in the area projected in the direction perpendicular to the surrounding wall
And features.
【0022】この構成では、振動子の軸方向に対して垂
直な方向から耐摩耗性の例えば有機材料からなる摺動材
を吹きつけると、該摺動材は振動子を構成する弾性体の
周壁面以外の部位に付着することはない。In this configuration, when a wear-resistant sliding material made of, for example, an organic material is sprayed from a direction perpendicular to the axial direction of the vibrator, the sliding material forms the vibrator. Elastic body
It does not adhere to parts other than the peripheral wall .
【0023】この構成により、弾性体の周壁面における
面積を広くし、この周壁面の外側から周壁面を投影した
領域内に弾性体自身が納まる形状とすることで、周壁面
の外側から摺動材を吹きつけ塗装しても、弾性体は周壁
面以外に摺動材が付着することはない。したがって振動
子の組立等に際して、締結部のネジ穴等に摺動材が付着
することによる締結不良等の悪影響を防止することがで
き、また、弾性体の周壁面以外で振動子の曲げ振動に伴
い歪を生じている部位に摺動材が付着することによるエ
ネルギー損失の増加を防ぐことができる。 According to this configuration, the peripheral wall surface of the elastic body
Increased area and projected the peripheral wall from outside of this peripheral wall
By making the elastic body itself fit in the area, the surrounding wall surface
Even if the sliding material is sprayed and painted from the outside of the
No sliding material adheres to the surface. Therefore vibration
Sliding material adheres to screw holes, etc. in the fastening part when assembling
Can prevent adverse effects such as fastening failures
And the bending vibration of the vibrator other than the peripheral wall of the elastic body.
Due to the adhesion of the sliding material to the part where
An increase in energy loss can be prevented.
【0024】本発明の第2の目的を実現する構成は、請
求項3に記載のように、請求項1または2に記載した超
音波モータを駆動源とする超音波モータを有する装置に
ある。According to a third aspect of the present invention, there is provided an apparatus having an ultrasonic motor driven by the ultrasonic motor according to the first or second aspect.
【0025】この構成では、耐久性に優れた超音波モー
タを駆動源とすることができる。With this configuration, an ultrasonic motor having excellent durability can be used as a driving source.
【0026】[0026]
(第1の実施例)図1は本発明の第1の実施例を示す。
モータ駆動原理および基本構成は図4のものと同一であ
るが、異なる点は振動子側にも弾性体9に接触ばね9b
を設けていること。ギア4と支持棒5が直接摺動し、玉
軸受けを廃していること。さらに振動子摩擦面を含む弾
性体9の上面には有機材料である摺動材12が塗布され
ていることが異なっている。(First Embodiment) FIG. 1 shows a first embodiment of the present invention.
The principle of driving the motor and the basic configuration are the same as those in FIG.
Is provided. The gear 4 and the support rod 5 slide directly, and the ball bearing is eliminated. Further, the difference is that a sliding material 12 which is an organic material is applied to the upper surface of the elastic body 9 including the vibrator friction surface.
【0027】本実施例における弾性体9の拡大図を図2
に示す。有機材料は摩擦面上方から吹き付け塗装される
が、該摩擦面を上方から投影した領域に弾性体9がすべ
て含まれるため、振動により大きな歪を発生する9c,
9d等の振動子側面に有機材料は付着せず、塗布によっ
て振動子内部損失はほとんど増加しない。FIG. 2 is an enlarged view of the elastic body 9 in this embodiment.
Shown in The organic material is spray-painted from above the friction surface. However, since the elastic body 9 is entirely contained in a region where the friction surface is projected from above, a large distortion 9c,
The organic material does not adhere to the side surface of the vibrator such as 9d, and the internal loss of the vibrator hardly increases by coating.
【0028】また、ねじ部9eにも付着しないため、締
結不良等を防止できる。Further, since it does not adhere to the screw portion 9e, it is possible to prevent a defective fastening or the like.
【0029】なお、吹き付けではなく刷毛塗り等の塗布
方法を取る場合、重力による塗布材料の垂れ等が発生し
ても本実施例によれば他部に付着しないため有効であ
る。It is effective to apply a coating method such as brush coating instead of spraying, because even if a coating material sags due to gravity, it does not adhere to other parts according to this embodiment.
【0030】(第2の実施例)図5は本発明の第2の実
施例を示す。本実施例の棒状超音波モータの振動子を構
成する弾性体9は、従来の弾性体と較べて摩擦面内径9
gが小さくなっているため、該内径9gより大径のねじ
嵌合部9eへの摺動材12の付着がないため初期のねじ
寸法変化がなく組立可能である。なおこれまで有機材料
のみを問題としてきたが無機材料(たとえばタングステ
ンカーバイド・ニッケル・硬質アルマイト等)を吹き付
け塗装(溶射等も含む)する場合にも本実施例は同様の
効果・目的を達成する。(Second Embodiment) FIG. 5 shows a second embodiment of the present invention. The elastic body 9 constituting the vibrator of the rod-shaped ultrasonic motor of the present embodiment has a friction surface inner diameter 9 as compared with the conventional elastic body.
Since g is small, there is no attachment of the sliding member 12 to the screw fitting portion 9e having a diameter larger than the inner diameter 9g, so that the screw can be assembled without an initial change in screw dimensions. Although only organic materials have been considered so far, the present embodiment achieves the same effects and objects when spray coating (including thermal spraying, etc.) an inorganic material (for example, tungsten carbide, nickel, hard alumite, etc.).
【0031】なお本実施例では、摩擦面内径が小さくな
っている場合のみを示しているが、これに加えて、従来
の弾性体に較べ摩擦面外径を大きくし、弾性体側面に摺
動材が付着しないようにすることで振動子の内部損失の
増大を防ぐこともできる。In this embodiment, only the case where the inner diameter of the friction surface is small is shown. In addition to this, the outer diameter of the friction surface is made larger than that of the conventional elastic body, and the sliding surface is moved to the side of the elastic body. By preventing the material from adhering, an increase in the internal loss of the vibrator can be prevented.
【0032】(第3の実施例)図6は本発明の第3の実
施例を示す。本実施例の棒状超音波モータの振動子を構
成する弾性体9において、9fは周状突起で、これに有
機材料の摺動材12を塗布すると蒲鉾状に盛り上がる。
この結果ロータ2に設けられた接触ばねのエッジ2b,
2cが摺動材料12と接触しないため、有機材料の摺動
材12を傷つけず、摩耗を低減することが出来る。(Third Embodiment) FIG. 6 shows a third embodiment of the present invention. In the elastic body 9 constituting the vibrator of the rod-shaped ultrasonic motor according to the present embodiment, reference numeral 9f denotes a circumferential projection, and when a sliding material 12 made of an organic material is applied to the projection, the projection protrudes in a semi-cylindrical shape.
As a result, the edge 2b of the contact spring provided on the rotor 2
Since 2c does not contact the sliding material 12, the sliding material 12 made of an organic material is not damaged and wear can be reduced.
【0033】(第4の実施例)図7は本発明の第4の実
施例を示す。本実施例の棒状超音波モータは、振動子を
なす電気−機械エネルギー変換素子群11が、ねじり及
び縦の振動を励振する。そして、両振動間の時間位相差
を適当に与えることにより、弾性体9の上面に楕円運動
が生じ、これにロータ2を押圧すれば、摩擦力により、
ロータが回転する超音波モータは公知の技術である。こ
のような駆動原理によるものであっても、本発明は適用
しうる。(Fourth Embodiment) FIG. 7 shows a fourth embodiment of the present invention. In the rod-shaped ultrasonic motor of this embodiment, the electromechanical energy conversion element group 11 forming a vibrator excites torsional and vertical vibrations. By appropriately giving a time phase difference between the two vibrations, an elliptical motion is generated on the upper surface of the elastic body 9, and when the rotor 2 is pressed against this, the frictional force causes
The ultrasonic motor in which the rotor rotates is a known technique. The present invention can be applied even with such a driving principle.
【0034】すなわち、弾性体9の側面はねじり・縦の
振動により、大きな歪を生じており、ここに有機材料か
らなる摺動材12が付着するのは好ましくないが、上面
(摩擦面)には曲げ等の変形を生じておらず比較的歪が
小さいので、この上面に摺動材12を吹き付けにより塗
布する。また、内面には挟持用のねじが切られている
が、ここに付着するのも組立上困る。そこで、弾性体9
の外径をテーパ状として、内径側には突出部9hを設け
ることで、これらへの付着を防止している。That is, the side surface of the elastic body 9 is subjected to a large strain due to torsion and longitudinal vibration, and it is not preferable that the sliding material 12 made of an organic material adheres to the side surface. Since no deformation such as bending occurs and the distortion is relatively small, the sliding material 12 is applied to the upper surface by spraying. Further, although a screw for holding is cut on the inner surface, it is difficult to assemble the screw on the inner surface. Therefore, the elastic body 9
Are tapered, and a protrusion 9h is provided on the inner diameter side, thereby preventing adhesion to these.
【0035】(第5の実施例)図8は本発明の第5の実
施例を示す。(Fifth Embodiment) FIG. 8 shows a fifth embodiment of the present invention.
【0036】本実施例の棒状超音波モータは、大径部を
有する支持棒5の該大径部と挟持体部13との間に圧電
素子群11を配置し、該挟持体部13の一端面に設けた
弾性体9に支持棒5をネジ結合させ、これにより該圧電
素子群11を弾性体9、挟持体部13及び支持棒5によ
り挟持固定した振動子を構成している。弾性体9はキャ
ップ形状に形成され、その周壁部9iが挟持体部13の
外周を覆っている。In the rod-shaped ultrasonic motor according to the present embodiment, the piezoelectric element group 11 is disposed between the large-diameter portion of the support rod 5 having the large-diameter portion and the holding body portion 13, and one of the holding body portions 13 is provided. The support rod 5 is screw-coupled to the elastic body 9 provided on the end face, thereby forming a vibrator in which the piezoelectric element group 11 is clamped and fixed by the elastic body 9, the clamp body 13 and the support rod 5. The elastic body 9 is formed in a cap shape, and its peripheral wall portion 9i covers the outer periphery of the holding body portion 13.
【0037】この振動子は、支持棒5の他端部が固定部
材に固定され、一端側の弾性体9の周壁部9iを駆動面
として移動体2と加圧接触し、図8の(a)に示すよう
に円または楕円運動をする該駆動面により移動体2を間
欠駆動する。In this vibrator, the other end of the support rod 5 is fixed to a fixing member, and the peripheral wall 9i of the elastic body 9 at one end is brought into pressure contact with the moving body 2 as a driving surface. ), The moving body 2 is intermittently driven by the driving surface that makes a circular or elliptical motion.
【0038】ここで、弾性体9の周壁部9iには摺動材
12が吹き付けにより塗布されるが、弾性体9が支持棒
5とネジ結合する部分は周壁部9iの内側であるため、
塗布時に摺動材が該ネジ結合部分に付着することはな
い。Here, the sliding material 12 is applied to the peripheral wall portion 9i of the elastic body 9 by spraying, but the portion where the elastic body 9 is screwed to the support rod 5 is inside the peripheral wall portion 9i.
The sliding material does not adhere to the screw connection portion during application.
【0039】(第6の実施例)図9は本発明の超音波モ
ータを内蔵した光学機器を示す図である。(Sixth Embodiment) FIG. 9 is a view showing an optical apparatus incorporating an ultrasonic motor according to the present invention.
【0040】同図において、60は図6に示した超音波
モータであり、該モータ60の構成要素は図1と同じ符
号で表示されている。50は該光学機器の鏡筒51に保
持されているレンズ、55は該光学機器に固定されてい
てヘリコイド56により該鏡筒51を回転及び軸線方向
移動可能に支持している固定筒、52は該モータ60の
フランジ20に締結されるモータ取付け板、53は該モ
ータ60の出力ギア19に噛み合って該ギア19により
回転駆動される機器側被動ギア、54は該ギア53と同
軸に設けられた滑りクラッチである。該モータ60が駆
動されると、該ギア19が回転され、機器側の被動ギア
53が回転駆動され、該ギア53を介して不図示のギア
機構を介して鏡筒51が回転されることによりレンズ5
0を保持している鏡筒51が光軸を中心として回転しつ
つ軸方向移動される。In the figure, reference numeral 60 denotes the ultrasonic motor shown in FIG. 6, and the components of the motor 60 are denoted by the same reference numerals as those in FIG. 50 is a lens held in the lens barrel 51 of the optical device, 55 is a fixed tube fixed to the optical device and supporting the lens barrel 51 by a helicoid 56 so as to rotate and move in the axial direction. A motor mounting plate 53 fastened to the flange 20 of the motor 60 meshes with the output gear 19 of the motor 60 and is a driven gear driven by the gear 19 for rotation. A gear 54 is provided coaxially with the gear 53. It is a slip clutch. When the motor 60 is driven, the gear 19 is rotated, the driven gear 53 on the device side is driven to rotate, and the lens barrel 51 is rotated via the gear 53 via a gear mechanism (not shown). Lens 5
The lens barrel 51 holding 0 is moved in the axial direction while rotating about the optical axis.
【0041】[0041]
【発明の効果】請求項1に記載の発明によれば、振動子
を構成する弾性体の摩擦面に対して垂直な方向から耐摩
耗性の例えば有機材料からなる摺動材を吹きつけると、
該摺動材は振動子を項製する締結部及び振動子の周壁面
に付着することはない。According to the first aspect of the present invention, when a wear-resistant sliding member made of, for example, an organic material is sprayed from a direction perpendicular to the friction surface of the elastic body constituting the vibrator,
The sliding material does not adhere to the fastening portion that forms the vibrator and the peripheral wall surface of the vibrator .
【0042】この構成により、振動子の組立等に際し
て、締結部のネジ穴等に摺動材が付着することによる締
結不良等の悪影響を防止することができる。また、振動
子の曲げ振動に伴い大きな歪を生じている振動子の周壁
面に摺動材が付着することによるエネルギー損失の増加
を防ぐことができる。 With this configuration, when assembling the vibrator or the like, it is possible to prevent adverse effects such as poor fastening due to the attachment of the sliding material to the screw holes or the like of the fastening portion. Also, vibration
Vibrator peripheral wall causing large distortion due to bending vibration of transducer
Increased energy loss due to adhesion of sliding material to surface
Can be prevented.
【0043】請求項2に記載の発明によれば、振動子の
軸方向に対して垂直な方向から耐摩耗性の例えば有機材
料からなる摺動材を吹きつけると、該摺動材は振動子を
構成する弾性体の周壁面以外の部位に付着することはな
い。[0043] According to the invention described in claim 2, the transducer
When a sliding material made of, for example, an abrasion-resistant material such as an organic material is sprayed from a direction perpendicular to the axial direction, the sliding material does not adhere to portions other than the peripheral wall surface of the elastic body constituting the vibrator. .
【0044】この構成により、振動子の組立等に際し
て、締結部のネジ穴等に摺動材が付着することによる締
結不良等の悪影響を防止することができ、また、弾性体
の周壁面以外で振動子の曲げ振動に伴い歪を生じている
部位に摺動材が付着することによるエネルギー損失の増
加を防ぐことができる。With this configuration, when assembling the vibrator, it is possible to prevent adverse effects such as poor fastening due to a sliding material adhering to a screw hole or the like of the fastening portion. It is possible to prevent an increase in energy loss due to the attachment of the sliding material to a portion where distortion occurs due to the bending vibration of the vibrator.
【0045】したがって、請求項1または2に記載の発
明によれば、耐摩耗性の高い振動子を簡単な加工工程で
得ることができ、高寿命で効率の良い超音波モータを安
価に提供することができる。Therefore, according to the first or second aspect of the present invention, a highly wear-resistant vibrator can be obtained by a simple machining process, and a long-life and efficient ultrasonic motor is provided at low cost. be able to.
【0046】請求項3に記載の発明によれば、耐久性に
優れた超音波モータを駆動源とすることができる。According to the third aspect of the present invention, an ultrasonic motor having excellent durability can be used as a drive source.
【図1】本発明の第1実施例の超音波モータの縦断面
図。FIG. 1 is a longitudinal sectional view of an ultrasonic motor according to a first embodiment of the present invention.
【図2】図1に示した実施例の一部拡大図。FIG. 2 is a partially enlarged view of the embodiment shown in FIG.
【図3】従来の超音波モータの縦断面図。FIG. 3 is a longitudinal sectional view of a conventional ultrasonic motor.
【図4】図3の超音波モータに使用されている圧電素子
群の構成と配置とを示した図。FIG. 4 is a diagram showing a configuration and an arrangement of a piezoelectric element group used in the ultrasonic motor in FIG. 3;
【図5】本発明の第2実施例の超音波モータの一部概略
縦断面図。FIG. 5 is a partial schematic longitudinal sectional view of an ultrasonic motor according to a second embodiment of the present invention.
【図6】本発明の第3実施例の超音波モータの一部概略
縦断面図。FIG. 6 is a partial schematic longitudinal sectional view of an ultrasonic motor according to a third embodiment of the present invention.
【図7】本発明の第4の実施例の縦断面図。FIG. 7 is a longitudinal sectional view of a fourth embodiment of the present invention.
【図8】本発明の第5の実施例の縦断面図。FIG. 8 is a longitudinal sectional view of a fifth embodiment of the present invention.
【図9】本発明の超音波モータを搭載している光学機器
の一部の縦断面図。FIG. 9 is a longitudinal sectional view of a part of an optical apparatus equipped with the ultrasonic motor of the present invention.
1,22,24…振動子 11,27…圧
電素子群 9,10,13,14,26,28…弾性体 2,16…ロータ 29…移動子 5,15…支持棒 4,19…出力
ギア 6,20…フランジ 8,18…ロー
タ加圧ばね 12,17,23,35…被覆材 36…樹脂シー
ト 50…レンズ 51…鏡筒 55…固定筒 56…ヘリコイ
ド 60…超音波モータ 52…モータ取
付け板 53…被動ギア1, 22, 24 ... vibrator 11, 27 ... piezoelectric element group 9, 10, 13, 14, 26, 28 ... elastic body 2, 16 ... rotor 29 ... mover 5, 15 ... support rod 4, 19 ... output gear 6, 20 ... Flange 8, 18 ... Rotor pressurizing spring 12, 17, 23, 35 ... Coating material 36 ... Resin sheet 50 ... Lens 51 ... Lens barrel 55 ... Fixed cylinder 56 ... Helicoid 60 ... Ultrasonic motor 52 ... Motor mounting Plate 53: driven gear
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) H02N 2/00 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int. Cl. 7 , DB name) H02N 2/00
Claims (3)
行波が励起される弾性体及び前記電気−機械エネルギー
変換素子を前記弾性体に挟持固定させるための締結部と
からなる振動子と、前記弾性体に加圧接触し前記進行波
により所定方向に駆動される移動子と、前記弾性体の前
記移動子との接触面に耐摩耗性の被覆層からなる摩擦面
を有し、前記締結部及び前記振動子の周壁面が、前記摩
擦面を前記摩擦面と垂直な方向に投影した領域内に配置
されることを特徴とする超音波モータ。(1) An electric-mechanical energy conversion element
Elastic body excited by line waves and the electro-mechanical energy
A fastening portion for sandwiching and fixing the conversion element to the elastic body;
A vibrator made of
A movable element driven in a predetermined direction by the
Friction surface consisting of wear-resistant coating layer on contact surface with moving element
Wherein the fastening portion and the peripheral wall surface of the vibrator are
Arranged in the area where the friction surface is projected in the direction perpendicular to the friction surface
An ultrasonic motor characterized by being performed .
行波が励起される弾性体及び前記電気−機械エネルギー
変換素子を前記弾性体に挟持固定させるための締結部と
からなる振動子と、前記弾性体の周壁部に加圧接触し前
記進行波により所定方向に駆動される移動子と、前記弾
性体の周壁部の前記振動子との接触面に耐摩耗性の被覆
層からなる摩擦面を有し、前記弾性体自身が、前記弾性
体の周壁面を前記弾性体の周壁面と垂直な方向に投影し
た領域内に配置されることを特徴とする超音波モータ。2. An electro-mechanical energy conversion element,
Elastic body excited by line waves and the electro-mechanical energy
A fastening portion for sandwiching and fixing the conversion element to the elastic body;
Before contact with the vibrator made of
A moving element driven in a predetermined direction by the traveling wave;
Wear-resistant coating on the contact surface of the peripheral wall of the conductive body with the vibrator
A friction surface composed of a layer, wherein the elastic body itself has the elasticity
Projecting the peripheral wall surface of the body in a direction perpendicular to the peripheral wall surface of the elastic body.
An ultrasonic motor, wherein the ultrasonic motor is disposed in a region where the ultrasonic motor is located.
タを駆動源とする超音波モータを有する装置。3. An apparatus having an ultrasonic motor driven by the ultrasonic motor according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21282994A JP3179662B2 (en) | 1994-09-06 | 1994-09-06 | Ultrasonic motor and device having ultrasonic motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21282994A JP3179662B2 (en) | 1994-09-06 | 1994-09-06 | Ultrasonic motor and device having ultrasonic motor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0880079A JPH0880079A (en) | 1996-03-22 |
| JP3179662B2 true JP3179662B2 (en) | 2001-06-25 |
Family
ID=16629055
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21282994A Expired - Fee Related JP3179662B2 (en) | 1994-09-06 | 1994-09-06 | Ultrasonic motor and device having ultrasonic motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3179662B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5744670B2 (en) * | 2011-08-05 | 2015-07-08 | キヤノン株式会社 | Ultrasonic motor and lens apparatus having the same |
-
1994
- 1994-09-06 JP JP21282994A patent/JP3179662B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0880079A (en) | 1996-03-22 |
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