JP3007921B2 - Probe for magnetic particle fixed type magnetic sensor and method of manufacturing the same - Google Patents
Probe for magnetic particle fixed type magnetic sensor and method of manufacturing the sameInfo
- Publication number
- JP3007921B2 JP3007921B2 JP10139437A JP13943798A JP3007921B2 JP 3007921 B2 JP3007921 B2 JP 3007921B2 JP 10139437 A JP10139437 A JP 10139437A JP 13943798 A JP13943798 A JP 13943798A JP 3007921 B2 JP3007921 B2 JP 3007921B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- probe
- fixed
- bacteria
- tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
【0001】[0001]
【発明の属する技術分野】本発明は微小領域に局在する
磁場を高分解能で計測するための磁気微粒子の採取方法
と磁気センサのプローブ、およびその製造方法に関する
ものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for collecting magnetic fine particles for measuring a magnetic field localized in a minute area with high resolution, a probe for a magnetic sensor, and a method for manufacturing the same.
【0002】[0002]
【従来の技術】従来の磁気力顕微鏡などで利用されてい
るプローブは、シリコン製のカンチレバー上にコバルト
合金等の磁性体の薄膜を蒸着し、その薄膜を強力な磁石
によって磁化することにより、作製してきた。この磁化
されたプローブの先端をサンプル表面上で走査し、磁気
相互作用による引力および斥力によるプローブの変位、
共振周波数での振幅変化、位相変化、周波数変化を光学
的に検出し、2次元画像を構成することで、サンプルの
ミクロな磁場像を得る。このようなプローブの理想的な
場合は、プローブの先端部のみに磁化(磁気双極子)が
局在した場合であり、この場合にはサンプルとの相互作
用が最も局所的になって分解能が上がることは原理的に
も分かっていた。2. Description of the Related Art Probes used in conventional magnetic force microscopes are manufactured by depositing a thin film of a magnetic material such as a cobalt alloy on a silicon cantilever and magnetizing the thin film with a strong magnet. I've been. The tip of this magnetized probe is scanned over the sample surface, and the probe displacement due to the attractive and repulsive forces due to magnetic interaction,
A micro magnetic field image of the sample is obtained by optically detecting an amplitude change, a phase change, and a frequency change at the resonance frequency and forming a two-dimensional image. The ideal case of such a probe is when the magnetization (magnetic dipole) is localized only at the tip of the probe, in which case the interaction with the sample is most localized and the resolution is increased. I knew that in principle.
【0003】また、従来の別の方式の磁気記録の読み出
しヘッドは、コイルを巻いたリング形状の軟磁性コアに
微小ギャップをもうけたものであり、ギャップの幅によ
って、分解能が限定されているが、現在のギャップ幅は
製造上の関係から数100nmが標準的である。Further, a conventional read head for magnetic recording of another type has a small gap formed in a ring-shaped soft magnetic core wound with a coil, and the resolution is limited by the width of the gap. The current gap width is typically several hundred nm from the viewpoint of manufacturing.
【0004】[0004]
【発明が解決しようとする課題】しかしながら、実際に
は、前例では磁性薄膜はプローブ全体に一様に蒸着さ
れ、先端部以外の薄膜の磁化がサンプルの磁場と相互作
用をするため、分解能が悪くなっており、このことは磁
性薄膜の厚みが増すとともに分解能が劣化するという研
究結果によっても裏付けられていた。また、磁性薄膜に
おいて局所的な磁気双極子を作り出すことは、本質的に
困難であり、それが磁気力顕微鏡におけるプローブの分
解能の低下を招いていた。However, in practice, in the previous example, the magnetic thin film is uniformly deposited on the entire probe, and the magnetization of the thin film other than the tip interacts with the magnetic field of the sample, so that the resolution is poor. This has been supported by the research results that the resolution is degraded as the thickness of the magnetic thin film increases. Also, it is essentially difficult to create a local magnetic dipole in a magnetic thin film, which has led to a decrease in the resolution of the probe in a magnetic force microscope.
【0005】[0005]
【課題を解決するための手段】本発明は上記従来の欠点
に鑑み提案されたもので、磁石上に載置した非磁性体の
基板上に磁性細菌を含んだ培養液を滴下して、上記磁性
細菌の細胞膜を破壊するためのアルカリ・有機溶媒に浸
し、且つ蒸留水で洗浄する作業を数回繰り返し、更に上
記磁石を取外すことによって、上記基板上で磁気微粒子
列を採取する磁気微粒子の採取方法を提供するものであ
る。SUMMARY OF THE INVENTION The present invention has been proposed in view of the above-mentioned conventional drawbacks, and a culture solution containing magnetic bacteria is dropped on a non-magnetic substrate mounted on a magnet. The operation of immersing in an alkali / organic solvent for destroying the cell membrane of magnetic bacteria and washing with distilled water is repeated several times, and by removing the magnet, a magnetic particle array is collected on the substrate. It provides a method.
【0006】なお、本発明は、上記アルカリ・有機溶媒
が水酸化ナトリウム飽和エタノールである磁気微粒子の
採取方法を提供するものである。The present invention provides a method for collecting magnetic fine particles in which the alkali / organic solvent is sodium hydroxide-saturated ethanol.
【0007】また、本発明は、非磁性体からなる先端の
尖った探針の先端部に磁性細菌から採取した磁性微粒子
を磁気双極子方向が一定となるように固着し、この磁気
微粒子の集合体を磁気センサのプローブとするように構
成した磁気微粒子固定型磁気センサのプローブの製造方
法を提供するものである。Further, according to the present invention, a magnetic fine particle collected from a magnetic bacterium is fixed to the tip of a pointed probe made of a non-magnetic material so that the magnetic dipole direction is constant. An object of the present invention is to provide a method of manufacturing a probe for a magnetic particle fixed type magnetic sensor in which a body is configured as a probe of a magnetic sensor.
【0008】更に、本発明は、非磁性体からなる先端の
尖った探針の先端部に磁性細菌から採取した磁性微粒子
を磁気双極子方向が一定となるように固着し、この磁気
微粒子の集合体を含めて磁気センサのプローブとする磁
気微粒子固定型磁気センサのプローブを提供するもので
ある。Further, the present invention provides a method in which magnetic fine particles collected from a magnetic bacterium are fixed to the tip of a pointed probe made of a non-magnetic material so that the magnetic dipole direction is constant. An object of the present invention is to provide a probe of a magnetic particle fixed magnetic sensor which is used as a probe of a magnetic sensor including a body.
【0009】[0009]
【発明の実施の形態】以下に本発明の実施形態を図面に
基づいて説明する。まず、本発明で用いられる磁性細菌
について以下に説明する。磁性細菌は走磁性細菌とも呼
ばれ、海や池、湖の底の沈殿物中に生息する細菌であ
り、その体長は数μmである。磁性細菌はその体内に1
0〜20個の磁気微粒子からなる磁気微粒子列を1列か
ら数列持っている。この磁気微粒子列の持つ磁気モーメ
ントが地磁気などの外部から加わる磁場によってトルク
を生じ、磁気微粒子列すなわち磁性細菌の向きを磁力線
と平行な方向に向ける。Embodiments of the present invention will be described below with reference to the drawings. First, the magnetic bacteria used in the present invention will be described below. Magnetic bacteria, also called magnetotactic bacteria, are bacteria that inhabit sediments at the bottom of seas, ponds, and lakes, and have a body length of several μm. Magnetic bacteria in the body 1
It has one to several magnetic fine particle rows composed of 0 to 20 magnetic fine particles. The magnetic moment of the row of magnetic microparticles generates torque by a magnetic field applied from the outside, such as geomagnetism, and the magnetic microparticle row, that is, the magnetic bacteria, is directed in a direction parallel to the magnetic force lines.
【0010】この磁場による磁性細菌の向きと細菌自身
の持つ鞭毛による運動によって、磁性細菌は磁力線に沿
った向きの運動を発生する。これが磁性細菌の走磁性の
起源となっている。この磁気微粒子は50〜100nm
の大きさをもち、細菌自身が生成したマグネタイト(F
e3 O4 )の微粒子であり、磁性をもっている。Due to the direction of the magnetic bacterium caused by the magnetic field and the movement of the bacterium itself, the magnetic bacterium generates movement in the direction along the magnetic field lines. This is the origin of the magnetotacticity of magnetic bacteria. The magnetic fine particles have a size of 50 to 100 nm.
The size of magnetite (F
e 3 O 4 ), which are magnetic.
【0011】この磁性細菌が菌体内で合成する磁気微粒
子を取り出して、先鋭な探針(たとえば、シリコンや窒
化シリコン製の原子間力顕微鏡用カンチレバー)の先端
部に固定し、プローブを作製する。その磁気微粒子の持
つ磁気双極子を利用して、磁場の検出をおこなう。磁性
細菌の作り出す磁気微粒子は約100nmの大きさをも
つ微粒子で、主にマグネタイトから構成され、単独で単
磁区の磁気双極子を構成している。A magnetic microparticle synthesized by the magnetic bacterium in the cell is taken out and fixed to the tip of a sharp probe (for example, a cantilever for an atomic force microscope made of silicon or silicon nitride) to produce a probe. The magnetic field is detected using the magnetic dipole of the magnetic fine particles. The magnetic microparticles produced by the magnetic bacteria are microparticles having a size of about 100 nm, are mainly composed of magnetite, and independently constitute a magnetic dipole of a single magnetic domain.
【0012】すなわち、磁気微粒子の探針先端部への固
定は、図1に示すようなフローチャートに基づき実現す
る。 (a) 裏面に磁石を固定した平坦な基板(たとえば、カバ
ーガラス)に磁性細菌を含む培養液を滴下し、菌体を磁
場により固定する。 (b) それをアルカリ・有機溶媒溶液(たとえば、水酸化
ナトリウム・エタノール溶液など)に一定時間浸し、細
菌の細胞膜を破壊する。 (c) その後に再び蒸留水等で濯ぎ、磁性体以外の残存物
を洗浄する。 (d) この操作を何回か繰り返した後に乾燥させる。 (e) 最後に、基板裏面の磁石を取り外す。 この手順により、基板上に磁性細菌内に存在する磁気微
粒子を凝集させずに、基板上に取り出すことができる。That is, the fixing of the magnetic fine particles to the tip of the probe is realized based on the flowchart shown in FIG. (a) A culture solution containing magnetic bacteria is dropped on a flat substrate (for example, a cover glass) having a magnet fixed to the back surface, and the cells are fixed by a magnetic field. (b) Immerse it in an alkali / organic solvent solution (eg, sodium hydroxide / ethanol solution) for a certain period of time to destroy bacterial cell membranes. (c) Thereafter, the residue is rinsed again with distilled water or the like, and the remaining material other than the magnetic substance is washed. (d) Repeat after repeating this operation several times. (e) Finally, remove the magnet on the back of the board. According to this procedure, the magnetic fine particles present in the magnetic bacteria on the substrate can be taken out on the substrate without aggregating.
【0013】また、探針先端部には、 (1) 光学顕微鏡下においてマニピュレータを使用して、
微小量の接着性樹脂を塗布しておく。接着性樹脂として
は、紫外線の照射によって硬化する紫外線硬化型樹脂
(例えば紫外線硬化型エポキシ樹脂)などを使用する。 (2) この探針を基板上に取り出した磁気微粒子上を走査
させ、少数個の磁気微粒子を先端部に付着させる。 (3) この探針を強力な磁場中で磁気微粒子の方向を揃え
ながら、接着性樹脂を紫外線照射により硬化、結合さ
せ、磁気微粒子を探針上に固定する。このような紫外線
硬化樹脂を使用することで、樹脂を硬化させない状態で
プローブ先端部に磁気微粒子を付着させ、その後に紫外
線を照射することで望ましい環境下(たとえば磁気微粒
子の磁化の向きを揃える)において樹脂を硬化させ、磁
気微粒子を固定することができる。In addition, (1) using a manipulator under an optical microscope,
A minute amount of adhesive resin is applied. As the adhesive resin, an ultraviolet-curable resin (for example, an ultraviolet-curable epoxy resin) that is cured by irradiation with ultraviolet light is used. (2) The probe is scanned over the magnetic fine particles taken out of the substrate, and a small number of magnetic fine particles are attached to the tip. (3) While aligning the direction of the magnetic fine particles in a strong magnetic field with the probe, the adhesive resin is cured and bonded by ultraviolet irradiation, and the magnetic fine particles are fixed on the probe. By using such an ultraviolet curable resin, magnetic fine particles are adhered to the tip of the probe in a state where the resin is not cured, and then irradiated with ultraviolet light in a desired environment (for example, the magnetization directions of the magnetic fine particles are aligned). The resin can be cured to fix the magnetic fine particles.
【0014】以上の行程を図であらわしたのが図2であ
り、より具体的に行程を理解することができる。FIG. 2 shows the above steps in a diagram, so that the steps can be understood more specifically.
【0015】図3(a)はシリコン製カンチレバーの鋭
い探針部分の先端に磁気微粒子を接着・固定したもので
ある。図3(b)は図3(a)の要部拡大図であり、磁
気微粒子の単磁区における磁気双極子の分布が容易に理
解できる。また、図3(c)は本実施形態のシリコン製
のカンチレバーの斜視図を示しており、磁気力顕微鏡
(図示せず)においては、この状態で使用され、この図
からも分解能が大幅に向上しているのがわかる。FIG. 3 (a) shows an example in which magnetic fine particles are bonded and fixed to the tip of a sharp probe portion of a silicon cantilever. FIG. 3B is an enlarged view of a main part of FIG. 3A, and the distribution of magnetic dipoles in a single magnetic domain of the magnetic fine particles can be easily understood. FIG. 3C is a perspective view of the silicon cantilever of this embodiment, which is used in this state in a magnetic force microscope (not shown), and the resolution is greatly improved from this figure. You can see that it is doing.
【0016】以上、本発明を図面に記載された実施形態
に基づいて説明したが、本発明は上記した実施形態だけ
ではなく、特許請求の範囲に記載した構成を変更しない
限りどのようにでも実施することができる。たとえば、
本実施形態をハードディスクなどの磁気記録媒体の読み
出しに用いた場合には、従来、得られなかった高密度再
生を実施できる。As described above, the present invention has been described based on the embodiments described in the drawings. However, the present invention is not limited to the above-described embodiments, but may be implemented in any manner unless the configuration described in the claims is changed. can do. For example,
When this embodiment is used for reading data from a magnetic recording medium such as a hard disk, high-density reproduction, which has not been obtained conventionally, can be performed.
【0017】[0017]
【発明の効果】従来の磁性薄膜を利用したプローブよ
り、高分解能の磁気力顕微鏡像を得ることができ、磁性
体研究に役立つ。磁気記録媒体の読み出しに用いた場合
には、今までのサブミクロンサイズの磁性体ギャップを
用いずに、より小さいサイズ(nmサイズ)の微小な磁
気双極子を用いることで、より空間分解能をたかめるこ
とができ、磁気記録媒体の高密度化が可能になる。According to the present invention, a high-resolution magnetic force microscope image can be obtained from a probe using a conventional magnetic thin film, which is useful for studying magnetic materials. When used for reading data from a magnetic recording medium, the spatial resolution can be further enhanced by using a small magnetic dipole having a smaller size (nm size) without using a magnetic gap having a submicron size. And the density of the magnetic recording medium can be increased.
【図1】本発明の一実施形態におけるフローチャートで
ある。FIG. 1 is a flowchart according to an embodiment of the present invention.
【図2】図1のフローチャートを図で表した概念図であ
る。FIG. 2 is a conceptual diagram illustrating the flowchart of FIG. 1;
【図3】(a)、(b)、(c)は何れも本実施形態を
表した図であり、(a)はシリコン製カンチレバーの鋭
い探針部分の先端に磁気微粒子を接着・固定したもので
あり、(b)は(a)の要部拡大図であり、(c)は本
実施形態のシリコン製のカンチレバーの斜視図を示して
いる。FIGS. 3 (a), (b), and (c) are diagrams illustrating the present embodiment, and FIG. 3 (a) shows magnetic fine particles adhered and fixed to the tip of a sharp probe portion of a silicon cantilever. (B) is an enlarged view of a main part of (a), and (c) is a perspective view of a silicon cantilever of the present embodiment.
───────────────────────────────────────────────────── フロントページの続き (73)特許権者 591033744 松永 是 東京都小金井市本町4−20−15 (72)発明者 鈴木 仁 兵庫県神戸市西区美賀多台1−9−2− 1−1103 (72)発明者 益子 信郎 兵庫県神戸市垂水区清水が丘2−4−1 −123 (72)発明者 松永 是 東京都府中市幸町2−40−B506 (56)参考文献 特開 昭62−171677(JP,A) 特開 昭62−294089(JP,A) 特公 平6−12994(JP,B2) (58)調査した分野(Int.Cl.7,DB名) G01R 33/00 - 33/18 ──────────────────────────────────────────────────続 き Continuing from the front page (73) Patent holder 591033744 Isao Matsunaga 4-20-15, Honcho, Koganei-shi, Tokyo (72) Inventor Jin Suzuki 1-1-2-1-1, Migatadai, Nishi-ku, Kobe-shi, Hyogo Prefecture 1-1103 (72) Inventor Nobuo Mashiko 2-4-1-123 Shimizugaoka, Tarumizu-ku, Kobe-shi, Hyogo (72) Inventor Makoto Naganaga 2-40-B506, Sachimachi, Fuchu-shi, Tokyo (56) References JP-A-62-171677 (JP, A) JP-A-62-294089 (JP, A) JP 6-12994 (JP, B2) (58) Fields investigated (Int. Cl. 7 , DB name) G01R 33/00-33 / 18
Claims (4)
端部に磁性細菌から採取した磁性微粒子を磁気双極子方
向が一定となるように固着し、この磁気微粒子の集合体
を磁気センサのプローブとするように構成したことを特
徴とする磁気微粒子固定型磁気センサのプローブの製造
方法。 1. A tip of a pointed tip made of a non-magnetic material
At the end, the magnetic particles obtained from the magnetic bacteria
The magnetic particles are fixed so that the direction is fixed.
Is configured as a magnetic sensor probe.
Of Probe for Fixed Magnetic Particle Fixed Magnetic Sensor
Method.
ては、磁石上に載置した非磁性体の基板上に磁性細菌を
含んだ培養液を滴下して、上記磁性細菌の細胞膜を破壊
するためにアルカリ・有機溶媒で浸し、且つ蒸留水で洗
浄する作業を数回繰り返し、更に上記磁石を取外すこと
によって、磁気微粒子列を崩すことなく基板上に採取す
るものとしたことを特徴とする請求項1に記載の磁気微
粒子固定型磁気センサのプローブの製造方法。 2. A method for collecting magnetic fine particles from a magnetic bacterium.
Magnetic bacteria on a non-magnetic substrate placed on a magnet
The cell membrane of the above-mentioned magnetic bacteria is destroyed by dropping the containing culture solution
Soak with alkaline or organic solvent and wash with distilled water
Repeat the cleaning process several times and remove the magnet
Sample on the substrate without breaking the array of magnetic particles
2. The magnetic microstructure according to claim 1, wherein
A method for manufacturing a probe for a particle-fixed magnetic sensor.
端部に磁性細菌から採取した磁性微粒子を磁気双極子方
向が一定となるように固着し、この磁気微粒子の集合体
を含めて磁気センサのプローブとすることを特徴とする
磁気微粒子固定型磁気センサのプローブ。 3. The tip of a pointed probe made of a nonmagnetic material.
At the end, the magnetic particles obtained from the magnetic bacteria
The magnetic particles are fixed so that the direction is fixed.
And a magnetic sensor probe including
Probe for magnetic particle fixed type magnetic sensor.
性細菌を含んだ培養液を滴下して、上記磁性細菌の細胞
膜を破壊するためにアルカリ・有機溶媒で浸し、且つ蒸
留水で洗浄する作業を数回繰り返し、更に上記磁石を取
外すことによって、基板上に列状態で取り出した磁気微
粒子を探針の先端部に固着するものとしたことを特徴と
する磁気微粒子固定型磁気センサのプローブ。 4. A non-magnetic substrate mounted on a magnet,
The culture medium containing the bacterium is dropped into the cells of the magnetic bacterium.
Soak in alkaline or organic solvent to break the film
Repeat the operation of washing with distilled water several times, and then remove the above magnet.
By removing, the magnetic fines taken out in a row on the substrate
The feature is that particles are fixed to the tip of the probe.
Of a magnetic particle fixed type magnetic sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10139437A JP3007921B2 (en) | 1998-05-21 | 1998-05-21 | Probe for magnetic particle fixed type magnetic sensor and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10139437A JP3007921B2 (en) | 1998-05-21 | 1998-05-21 | Probe for magnetic particle fixed type magnetic sensor and method of manufacturing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11326475A JPH11326475A (en) | 1999-11-26 |
| JP3007921B2 true JP3007921B2 (en) | 2000-02-14 |
Family
ID=15245186
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10139437A Expired - Lifetime JP3007921B2 (en) | 1998-05-21 | 1998-05-21 | Probe for magnetic particle fixed type magnetic sensor and method of manufacturing the same |
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| Country | Link |
|---|---|
| JP (1) | JP3007921B2 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4761476B2 (en) * | 2004-03-19 | 2011-08-31 | リサーチ ファウンデーション オブ ザ シティー ユニバーシティ オブ ニューヨーク | Magnetic nanotube |
-
1998
- 1998-05-21 JP JP10139437A patent/JP3007921B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH11326475A (en) | 1999-11-26 |
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