JP2771615B2 - Liquid ejection recording head substrate, liquid ejection recording head having the substrate, and recording apparatus having the recording head - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a liquid ejection recording apparatus in which an electrothermal transducer and a drive element for driving the electrothermal transducer, for example, a diode array or a transistor array are arranged on the same substrate. The present invention relates to a head substrate, a liquid jet recording head having the substrate, and a recording apparatus having the recording head.

[Prior Art] As a liquid jet recording method for performing recording by discharging a liquid,
Many liquid ejection principles are known, and various types of liquid jet recording heads and recording apparatuses using the method are known.

Above all, a method of discharging a liquid by using thermal energy generated by an electrothermal conversion element or the like is suitable for miniaturization, high definition, and long size, and has attracted attention.

For example, an electrothermal conversion element array is formed on a silicon substrate as a liquid jet recording head using such a discharge method utilizing thermal energy, and a diode array or a transistor is provided outside the silicon substrate as a driving circuit of the electrothermal conversion element. There is known a configuration in which a driving element (functional element) for driving an electrothermal converting element such as an array is arranged, and connection between the electrothermal converting element and the functional element is performed by a flexible cable, wire bonding, or the like.

With the aim of simplifying the structure considered for the above-described head configuration or reducing defects occurring during the manufacturing process, further uniforming the characteristics of each element, and improving reproducibility.
US Pat. No. 4,429,321 proposes a liquid jet recording apparatus in which an electrothermal conversion element and a functional element are provided on the same substrate.

In addition, when a method of discharging a liquid using thermal energy is adopted, in order to maximize its advantages, for example, a large number of electrothermal conversion elements are arranged to achieve a longer length and a higher density. I have. When a large number of electrothermal conversion elements are provided, various methods can be considered for wiring to the electrothermal conversion elements depending on the driving method. Among them, a common electrode commonly connected to a plurality of electrothermal conversion elements And examples using individual electrodes individually connected to each electrothermal conversion element are well known. In this case, one electrothermal conversion element is driven by driving another electrothermal conversion element. In order to solve the so-called crosstalk problem, a diode for preventing crosstalk is interposed between each individual electrode or between each electrothermal conversion element and the common electrode.

However, since a current of several hundred milliamps to several amps flows through the common electrode depending on the number of connected diode elements, it is necessary to increase the surface area as much as possible. If the surface area is small, a voltage drop occurs due to wiring resistance, and if this voltage drop occurs during driving of the liquid jet recording head, problems such as a decrease in liquid ejection speed, a drop in droplet diameter, and a decrease in reproducibility of operation will occur. Can cause.

The occurrence of this problem can be one factor that makes it impossible to perform higher quality and higher quality recording.

Also, if the surface area is too large, one of the features of the system using thermal energy that it is possible to reduce the size when a large number of electrothermal transducers are arranged at a high density cannot be realized. was there.

Furthermore, the larger the surface area of the electrode, the larger the area of the intersection of the electrodes. The intersecting portions of the electrodes are usually electrically separated by an insulating layer, except when the intersecting electrodes are electrically connected.

[Problems to be Solved by the Invention] However, in most cases, there is a case where defects such as dust or pinholes are present in the insulating layer under an established condition, and insufficient insulation may occur. As a result, such a portion often causes a short circuit between the electrodes.

In addition, the large intersection area increases the probability that pinholes and the like are present, thereby causing a problem that a short circuit is likely to occur.

Of course, in order to solve the above problems, it is conceivable to manufacture the insulating film without defects. However, it is difficult to completely remove the defects in the process, and it causes a cost increase.

Further, there is also a demand that the thickness of the insulating film (insulating layer) between the electrodes is appropriately set to a desired value, for example, if the thickness is too large, the production time increases, and if the thickness is too thin, the number of defective portions of the film increases.

SUMMARY OF THE INVENTION An object of the present invention is to provide a liquid jet recording head substrate using a method of ejecting a liquid using thermal energy, a liquid jet recording head having the substrate, and a recording apparatus having the recording head. Is to solve.

Another object of the present invention is to provide a substrate for a liquid jet recording head capable of performing higher quality and high quality recording, a liquid jet recording head having the substrate, and a recording apparatus having the recording head. .

Still another object of the present invention is to provide a substrate for a liquid jet recording head in which a short circuit is prevented at an intersection of electrode wirings, a liquid jet recording head having the substrate, and a recording apparatus having the recording head.

Another object of the present invention is to provide a high-performance liquid jet recording head substrate, a liquid jet recording head having the substrate, and a recording apparatus having the recording head, which are inexpensive, have substantially no difference in work process, and have high performance. Aim.

[Means for Solving the Problems] For this purpose, in the present invention, a semiconductor substrate, a plurality of electrothermal transducers for generating thermal energy for discharging a liquid, and individual electrodes corresponding to the electrothermal transducers are provided. And a drive element for driving the electrothermal transducer, electrically connected via a liquid ejecting recording head substrate, comprising: an electrode provided between adjacent drive elements; and a plurality of the drive elements. A common electrode that is electrically connected in common, and is stacked on the inter-drive element electrode with an insulating layer interposed therebetween, and a cutout portion is formed in the common electrode on the electrode provided between the drive elements. It is characterized by being provided.

Also, a discharge port for discharging a liquid, a plurality of electrothermal conversion elements provided for the discharge port and generating thermal energy used for discharging the liquid, and a plurality of the electrothermal conversion elements. Electrically connected via individual electrodes,
A driving element for driving the electrothermal transducer, in a liquid jet recording head having an electrode provided between adjacent driving elements, and electrically connected to a plurality of the driving elements in common; and A common electrode is stacked on the inter-drive element electrode with an insulating layer interposed therebetween, and a cutout is provided in the common electrode on the electrode provided between the drive elements.

Further, a discharge port for discharging the liquid, a plurality of electrothermal conversion elements for generating thermal energy used for discharging the liquid provided for the discharge port, and corresponding to the electrothermal conversion element And a driving element for driving the electrothermal conversion element, which is electrically connected through the individual electrodes,
A liquid jet recording head having a liquid jet recording head, an ink tank for storing liquid supplied to the liquid jet recording head, and a platen along which a recording medium for receiving the liquid ejected from the liquid jet recording head extends. In the recording apparatus, the liquid ejecting recording head has a common electrode electrically connected to a plurality of the driving elements in common and stacked on an electrode between the driving elements with an insulating layer interposed therebetween. A cutout is provided in the common electrode on the electrode provided therebetween.

In addition, in the liquid jet recording head having a plurality of ejection ports for ejecting liquid, a liquid path communicating with each of the ejection ports, and a plurality of electrothermal conversion elements provided corresponding to the ejection ports, A supply electrode pattern for supplying a drive current to each of the heat conversion elements, and the supply electrode pattern and the supply electrode pattern are laminated with an insulating layer interposed therebetween to control the supply of the drive current or control the operation of the drive element by another drive. A control electrode pattern for separating the element from an element, wherein the supply electrode pattern and the control electrode pattern are formed so as to reduce an area where the supply electrode pattern intersects with the control electrode pattern. And

In addition, in a liquid jet recording head substrate having a plurality of electrothermal transducers that generate ejection energy for ejecting liquid, a supply electrode pattern for supplying a drive current to each of the electrothermal transducers, The supply electrode pattern and an insulating layer are interposed therebetween, and a control electrode pattern for controlling the supply of the drive current or separating the operation of the drive element from the other is provided. The supply electrode pattern and the control electrode pattern are formed so as to reduce an area where the control electrode pattern intersects.

[Operation] According to the above configuration, a short circuit between the electrodes occurs due to a defect such as dust existing in the insulating layer by introducing a wiring pattern that reduces the area where the electrode patterns cross each other. The probability can be reduced.

[Example] Hereinafter, the present invention will be described with reference to the drawings.

FIG. 5 shows an example of a substrate for a liquid jet recording head provided on an N-type silicon substrate on which a diode as a driving element (hereinafter, also referred to as a functional element) for driving an electrothermal transducer is formed. FIG. 3 is a schematic longitudinal sectional view. In the figure, a p-well diffusion layer 1 is
02 is formed. Around the p-well layer 102, ap ⁺ layer 103 electrically connected to the anode electrode 110 of the diode is formed. Further, on the silicon substrate 101, there are formed n ⁺ layers 107 and 105 respectively electrically connected to a cathode electrode 111 of the diode and a cap electrode 109 for restricting a parasitic transistor operation between individual diodes.

The upper portions of these diode structures are covered with an insulating layer 108, and the electrodes 110 and 111 are electrically connected to aluminum wirings 113 and 115, respectively, and the resistor layers 112 and 114 are electrically connected therethrough. The aluminum electrode 109 on the n ⁺ layer 105 for the cap electrode is wired so as to surround the diode similarly to the n ⁺ layer 105, and a cap potential is externally applied by a lead wire (not shown). A diode is formed between the anode electrode 110 and the cathode electrode 111,
The anode electrode 110 includes a resistor wiring 112 and an aluminum wiring 113
The liquid is ejected to the external terminal of the liquid jet recording head.

The anode electrode 110 is normally connected to a common electrode connecting a plurality of anode electrodes according to the driving method.

A current corresponding to the number of connected electrothermal exchange elements (the number of anode electrodes) sufficiently flows through the common electrode, and the common electrode has a surface area that does not substantially cause a voltage drop.

FIG. 6 is a schematic cross-sectional view showing an example of a process for manufacturing the functional element having the structure shown in FIG. FIG. 5 shows only a part of the recording head substrate shown in FIG.

First, in step (2), an S-type
The iO ₂ insulating layer 118 is covered and patterned. Next, in a step (3), a desired region of the silicon substrate 101 is doped with a p-type impurity (conductivity-type controlling substance) to form a p-well diffusion layer 102. In the steps (4) and (5), the p-type diffusion layer 102 is formed.
In the well layer 102, ap ⁺ layer 103 and an n ⁺ layer 107 are further formed. Further, an n ⁺ layer 105 for a cap electrode is formed adjacent to the p well layer 102. Next, in step (6), the insulating layer 108 of inorganic oxide SiO ₂ is coated and patterned on the semiconductor structure thus formed, and in steps (7) and (8), the SiO ₂ An anode electrode 110, a cathode electrode 111, and a cap electrode 109 are provided in the patterned region of the layer, and a SiO ₂ insulating layer 119 of an inorganic oxide is further coated thereon. The SiO ₂ insulating layer 119 has a function as a heat storage layer disposed on the lower surface of the electrothermal change element, in addition to a function as an insulating layer of each part of the diode.

Next, in steps (9) and (10), the resistor wires 112 and 115 formed as the common electrode and the heating resistor layer of the electrothermal conversion element, the electrodes, and the wiring terminals are formed on the anode electrode 110 and the cathode electrode 111 of the diode, respectively. Aluminum wirings 113 and 115 are connected, and an SiO ₂ insulating layer 117 and 1
20 are formed.

As described above, the electrothermal conversion elements are formed on the silicon wafer on which the diodes as the functional elements are formed. In the above configuration, the relationship between the cap electrode and the common electrode is schematically viewed in plan. FIG. 7 (A) and FIG. 7 (B).

7 (A) shows a 2 × 2 matrix structure, and FIG. 7 (B) shows a diode matrix having a 1 × 5 column structure. FIG. 7 (A) shows a common electrode 113C, which connects a plurality of anode electrodes. It can be seen that the wirings 115C and 115D connected to 113D and the anode electrode 111 to form the electrothermal conversion element intersect with the cap electrodes 109C and 109D. In particular, since a relatively large current flows through the common electrodes 113C and 113D as described above, the area is increased, and the intersecting area is particularly increased.

By the way, as described above, each electrode is basically separated by the SiO ₂ insulating layer. However, an increase in the area of the intersecting portion may cause the above-described problem. Therefore, the present invention solves the above problem by the following configuration.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

FIG. 1A is a top view showing a wiring pattern of a diode matrix in a substrate for a liquid jet recording head according to a preferred embodiment of the present invention, and FIG. 1A shows a cell having the diode configuration shown in FIG. Indicates a matrix in which a plurality is formed.

In the figure, 310 and 311 are an anode electrode and a cathode electrode respectively provided corresponding to one diode cell. 315A is an electrothermal transducer and cathode electrode 311
309A is a cap electrode provided so as to surround each diode cell 300.
13A is a common electrode connected to the four anode electrodes 310 and made of aluminum wiring.

Although the common electrode 313A and the aluminum wiring 315A intersect with the cap electrode 309A in the same manner as the above-described configuration, the common electrode 313A is provided with a notch (a hatched portion in the figure) at a portion intersecting with the cap electrode 309A. The area where the common electrode 313A intersects with the cap electrode 309A is made as small as possible so that short circuit between both electrodes due to poor insulation is avoided as much as possible.

To achieve the above-described configuration, it is only necessary to change the pattern on the mask, and it is possible to reduce the defect rate in the manufacturing process without taking a complicated manufacturing process or special measures against dust.

FIG. 1B is a top view of a wiring pattern in a diode array having a column structure according to another embodiment of the present invention. As can be seen from the figure, the common electrode 313B cuts off the portion where the electrode intersects with the cap electrode 309B, thereby reducing the area where the electrode intersects each other and avoiding the danger of a short circuit due to a pinhole or the like in the insulating film. I made it.

Although the embodiment shown in FIGS. 1A and 1B has been described with respect to the diode matrix formed by the N-type silicon substrate, the common electrode and the diode are also formed when the diode structure is formed by the p-type silicon substrate. The risk of short circuit can be remarkably reduced by minimizing the intersection area of the cap electrodes provided for the isolation of each diode cell as described above.

FIG. 2A is an equivalent circuit of a liquid jet recording head incorporating the diode matrix array and the electrothermal transducer shown in FIG. 1A or FIG. 1B. The on / off control of the electrothermal conversion element shown in the figure is performed by transistors (not shown) provided corresponding to the respective terminals in the figure.

In the figure, for example, the structure of the above-described diode array on the N-type silicon substrate is changed by changing the mask pattern to change the configuration of the n ⁺ layer or the p ⁺ layer, and the NPN type as shown in FIG. It is also possible to use a transistor array. In this case, since a large current flows in the common electrode 401, the common electrode 401 has a large-area pattern, and the area of intersection with the base electrodes 402, 403, and 404 of the NPN transistor for turning on and off the block increases. Therefore, the probability of short-circuit failure due to pinholes or the like in the insulating film can be reduced by making the crossing portions have the same configuration as described above.

Further, it is needless to say that the same can be said when the above structure is replaced with a PNP transistor array.

Fig. 2 (C) shows the other side (GND side) of the electrothermal transducer.
FIG. 9 is an equivalent circuit diagram when a transistor array is provided in FIG. In this case, since the emitter electrode 405 of the NPN transistor array becomes a common GND and a large current flows, it is necessary to increase the pattern area. Therefore, as described above, the intersection between the emitter electrode 405 and the base electrodes 406, 407, and 408 of the NPN transistor array for performing block on / off has the same configuration as described above, thereby greatly reducing the probability of short-circuit between the electrodes. Becomes possible.

FIG. 3 is a perspective view showing an arrangement example in a recording head cartridge having a substrate on which a diode array or a transistor array as a driving element and an electrothermal converting element are patterned as described in the above embodiments.

In the figure, reference numeral 500 denotes a liquid jet recording head cartridge. The recording head cartridge 500 is suitably used for a serial type liquid jet recording apparatus, and the upper surface of the head cartridge 500 shown in the figure shows a joint surface with a carriage, and therefore 504 is a terminal provided on the carriage. This is an input terminal for transmitting and receiving a control signal to be connected.

The head cartridge 500 has an ink tank for storing liquid (ink) supplied to the recording head. Therefore, the head cartridge 500
When the ink in the ink tank is exhausted, a so-called "disposable" method can be used in which the cartridge is removed from a carriage of a recording device described later and a new cartridge is mounted on the recording device.

501 is a silicon substrate, 502 is a functional element array patterned on the silicon substrate 501, 510 is a substrate for a liquid jet recording head, and a recording head is formed by the substrate 501, a top plate 506, and a liquid path wall. A discharge port 503 and a thermal action chamber 505 are formed.

A preferred example in which the above-described liquid jet recording head cartridge is mounted on an apparatus will be described with reference to FIG.

In FIG. 4, 701 is a head cartridge, 702 is a carriage, 703 is a rail, 704 is a flexible wiring board, 70
5 is a capping device, 706 is a cap, 707 is a suction tube, 708 is a suction pump, 709 is a platen, and p is a recording paper as a recording medium.

The head cartridge 701 is placed on the carriage 702 to perform electrical connection and positioning. carriage
702 is reciprocated along a rail 703 by a driving means (not shown) along a platen 709 along which the recording paper p is moved. The flexible wiring board transmits a drive signal from the apparatus main body to an electric contact (not shown) of the carriage 702.

The capping means 705 has a cap 706, and is configured to cover the ejection opening of the head cartridge with the cap 706 when the head cartridge comes to the capping position by the movement of the capping 702 (capping). In this state (capping state), the suction pump 708 is used.
When the is driven, ink is sucked from the ejection port of the head cartridge through the suction tube 707, and the function of the head cartridge is restored and / or held.

It should be noted that the recording head is simply fixed to the carriage 702 without using a head cartridge having an ink tank as shown in FIG. 3 and FIG. It is good also as a form which performs from the ink tank mounted in. Also, many forms are possible within the scope of the present invention.

Although the capping device has been described above with respect to the suction mechanism, the capping device is not necessarily limited to the above configuration as long as it can perform functions such as maintaining the function of the head and recovering from defective ejection. In some cases, it is not necessary to have the capping device itself. However, in order to perform more reliable recording, it is desirable to have a capping device.

[Effects of the Invention] As is clear from the above description, according to the present invention, it is possible to reduce the probability of occurrence of a short circuit between electrodes via a defect such as dust existing in an insulating layer.

As a result, it is possible to reduce defects due to a short circuit between electrodes in a functional element or the like by a conventional inexpensive forming process without requiring a special insulating layer forming process.

Further, according to the present invention, there is provided a substrate which can be used for a liquid jet recording head which solves the above problems and sufficiently achieves the above object, a liquid jet recording head having the substrate, and a recording apparatus having the recording head. Provided.

[Brief description of the drawings]

1A and 1B are schematic top views for explaining an electrode wiring pattern of the substrate of the present invention, and FIGS. 2A to 2C are equivalent diagrams for explaining a circuit of the substrate of the present invention. FIG. 3 is a circuit diagram, FIG. 3 is a schematic perspective view of a recording head cartridge provided with a recording head having the substrate of the present invention, and FIG. 4 explains a main part of a recording apparatus having the recording head cartridge shown in FIG. FIG. 5 is a schematic longitudinal sectional view showing an example of a substrate which can be used for a liquid jet recording head, and FIG. 6 shows a manufacturing process for forming a functional element formed on the substrate. FIG. 7A and FIG. 7B are schematic top views for explaining an electrode wiring pattern of a substrate. 300 …… Diode cell, 309A, 309B …… Cap electrode,
310 …… Anode electrode, 311 …… Cathode electrode, 313A, 313
B: Common electrode, 315A, 315B: Aluminum wiring.

Claims (42)

(57) [Claims] 1. A semiconductor substrate, a plurality of electrothermal transducers for generating thermal energy for discharging a liquid, and the electric heater electrically connected to the electrothermal transducers via individual electrodes corresponding to the electrothermal transducers. A driving element for driving the heat conversion element,
A liquid jet recording head substrate having: an electrode provided between adjacent driving elements; an electrode commonly connected to a plurality of the driving elements; and an insulating layer interposed on the inter-driving element electrode. A substrate for a liquid jet recording head, comprising: a common electrode provided between the driving elements; and a notch provided in the common electrode on an electrode provided between the driving elements. 2. The substrate for a liquid jet recording head according to claim 1, wherein said electrothermal conversion element is formed on said semiconductor substrate. 3. The liquid jet recording head according to claim 1, wherein the electrode provided between the driving elements is an electrode for separating the operation of the driving element from another driving element. substrate. 4. The substrate for a liquid jet recording head according to claim 1, wherein said driving element is a diode. 5. The substrate according to claim 1, wherein the driving element is a transistor. 6. An electrode provided between the driving elements, wherein n
2. The substrate for a liquid jet recording head according to claim 1, wherein the substrate is provided on a + layer. 7. The substrate for a liquid jet recording head according to claim 6, wherein said electrodes are made of aluminum. 8. A substrate for a liquid jet recording head according to claim 3, wherein said electrodes are provided so as to surround individual driving elements. 9. The substrate for a liquid jet recording head according to claim 1, wherein said electrothermal transducer is provided on said semiconductor substrate via a protective layer of said drive element. 10. The substrate for a liquid jet recording head according to claim 9, wherein said protective layer is an inorganic oxide. 11. The substrate for a liquid jet recording head according to claim 10, wherein said inorganic oxide is SiO ₂ . 12. A discharge port for discharging liquid, a plurality of electrothermal conversion elements provided for the discharge port and generating thermal energy used for discharging liquid, and the electrothermal conversion element. A driving element for driving the electrothermal transducer, which is electrically connected via an individual electrode corresponding to the above, wherein an electrode provided between adjacent driving elements; A common electrode electrically connected to a plurality of drive elements in common, and having a common electrode stacked on the inter-drive element electrode with an insulating layer interposed therebetween, the common electrode on the electrode provided between the drive elements A liquid jet recording head having a notch. 13. The liquid jet recording head according to claim 12, wherein said electrothermal conversion element is formed on a semiconductor substrate. 14. The liquid jet recording head according to claim 12, wherein the electrothermal transducer is provided on a semiconductor substrate via a protective layer for protecting the drive element. 15. The liquid jet recording head according to claim 14, wherein said protective layer is an inorganic oxide layer. 16. The liquid jet recording head according to claim 15, wherein said inorganic oxide is SiO ₂ . 17. The liquid jet recording head according to claim 12, wherein the electrodes provided between the driving elements are electrodes for separating the operation of the functional element from other driving elements. 18. The liquid jet recording head according to claim 12, wherein said driving element is a diode. 19. The liquid jet recording head according to claim 12, wherein said drive element is a transistor. 20. The liquid jet recording head according to claim 12, wherein the electrodes provided between the driving elements are provided on an n + layer of the semiconductor substrate. 21. A liquid jet recording head according to claim 20, wherein said electrodes are made of aluminum. 22. The liquid jet recording head according to claim 17, wherein said electrode is provided so as to surround each drive element. 23. The liquid jet recording head according to claim 12, wherein the liquid jet recording head further comprises an ink tank for storing the liquid ink supplied into the head. 24. The liquid jet recording head according to claim 23, wherein the liquid jet recording head has a terminal for supplying an electric signal to the head on an external surface. 25. A discharge port for discharging liquid, a plurality of electrothermal conversion elements provided for the discharge port for generating thermal energy used for discharging liquid, and the electrothermal conversion. A liquid ejecting recording head having a driving element for driving the electrothermal transducer, which is electrically connected via an individual electrode corresponding to the element, and storing a liquid supplied to the liquid ejecting recording head A liquid jet recording head, and a platen along which a recording medium for receiving the liquid ejected from the liquid jet recording head extends. A common electrode that is electrically connected and stacked on the inter-drive element electrode with an insulating layer interposed therebetween, and a cutout is provided in the common electrode on the electrode provided between the drive elements. A recording device, characterized in that: 26. The recording apparatus according to claim 25, wherein said electrothermal conversion element is formed on a semiconductor substrate. 27. A recording apparatus according to claim 25, wherein said electrothermal conversion element is provided on a semiconductor substrate via a protective layer for protecting said drive element. 28. The recording apparatus according to claim 27, wherein said protective layer is an inorganic oxide layer. 29. The recording apparatus according to claim 28, wherein said inorganic oxide is SiO ₂ . 30. The recording apparatus according to claim 25, wherein the electrode provided between the driving elements is an electrode for separating the operation of the driving element from another driving element. 31. A recording apparatus according to claim 25, wherein said drive element is a diode. 32. A recording apparatus according to claim 25, wherein said driving element is a transistor. 33. The recording apparatus according to claim 25, wherein the electrode provided between the driving elements is provided on an n + layer of the semiconductor substrate. 34. A recording apparatus according to claim 33, wherein said electrode is made of aluminum. 35. The recording apparatus according to claim 30, wherein said electrode is provided so as to surround each drive element. 36. A recording apparatus according to claim 25, wherein said liquid jet recording head and said ink tank are integrally formed. 37. The recording apparatus according to claim 25, wherein the liquid jet recording head and the ink tank are integrally formed, and have an electric terminal on an outer surface of the integrated structure. . 38. A recording apparatus according to claim 25, wherein said recording apparatus further comprises capping means. 39. A recording apparatus according to claim 38, wherein said capping means has a cap for covering a discharge port of the recording head and a pump for sucking a liquid in the recording head through the cap. 40. A recording apparatus according to claim 25, wherein said carriage is capable of reciprocating along said platen. 41. A liquid jet recording head having a plurality of discharge ports for discharging liquid, a liquid path communicating with each of the discharge ports, and a plurality of electrothermal transducers provided corresponding to the discharge ports. A supply electrode pattern for supplying a drive current to each of the heat conversion elements; and a supply electrode pattern and a supply electrode pattern stacked on each other with an insulating layer interposed therebetween to control the supply of the drive current or to control the operation of the drive element. And a control electrode pattern for separating between the drive electrode and the drive element, wherein the supply electrode pattern and the control electrode pattern are formed so as to reduce an area where the supply electrode pattern intersects with the control electrode pattern. A liquid jet recording head comprising: 42. A substrate for a liquid jet recording head having a plurality of electrothermal transducers for generating ejection energy for ejecting liquid, comprising: a supply electrode pattern for supplying a drive current to each of said electrothermal transducers; A control electrode pattern that is stacked with the supply electrode pattern and an insulating layer interposed therebetween, and has a control electrode pattern for controlling the supply of the drive current or separating the operation of the drive element from the others. A substrate for a liquid jet recording head, wherein the supply electrode pattern and the control electrode pattern are formed so as to reduce an area where the control electrode pattern intersects.