JP2581665B2 - Ultrasonic probe - Google Patents
Ultrasonic probeInfo
- Publication number
- JP2581665B2 JP2581665B2 JP60189662A JP18966285A JP2581665B2 JP 2581665 B2 JP2581665 B2 JP 2581665B2 JP 60189662 A JP60189662 A JP 60189662A JP 18966285 A JP18966285 A JP 18966285A JP 2581665 B2 JP2581665 B2 JP 2581665B2
- Authority
- JP
- Japan
- Prior art keywords
- plate
- acoustic matching
- piezoelectric body
- thickness
- matching layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Transducers For Ultrasonic Waves (AREA)
Description
【発明の詳細な説明】 〔発明の利用分野〕 本発明は、超音波診断装置・超音波探傷装置などの超
音波撮像装置におけるセンサ部として好適な超音波探触
子に関する。Description: FIELD OF THE INVENTION The present invention relates to an ultrasonic probe suitable as a sensor in an ultrasonic imaging apparatus such as an ultrasonic diagnostic apparatus and an ultrasonic flaw detector.
一体型板状圧電体を用いる配列型超音波探触子（モノ
リシツク・アレイ探触子）は特開昭59-207137号公報記
載のように、高性能と低い生産コストを両立可能な、本
来すぐれた特徴を持つ探触子である。しかし、この型の
探触子ではアレイを構成する振動子素子が機械的に切断
されていないため、板状圧電体を横方向に伝搬する部分
波が生じ、これが撮像性能を低下させる場合があり、通
常何らかの対策が必要となる。As described in Japanese Patent Application Laid-Open No. 59-207137, an array type ultrasonic probe (monolithic array probe) using an integral plate-like piezoelectric material is originally excellent in that it can achieve both high performance and low production cost. The probe has the following characteristics. However, in this type of probe, since the transducer elements constituting the array are not mechanically cut, a partial wave propagating in the plate-like piezoelectric body in the horizontal direction occurs, which may lower the imaging performance. Usually, some countermeasures are required.
本発明の目的は、モノリシツク・アレイ型探触子固有
の上記の問題点を解決し、高い撮像性能を低コストで実
現することのできる超音波探触子を提供することにあ
る。An object of the present invention is to solve the above-mentioned problems inherent in a monolithic array type probe and to provide an ultrasonic probe capable of realizing high imaging performance at low cost.
かかる目的を実現するため、本発明においては、一体
型板状圧電体を電気・音響変換材料として用いるモノリ
シツク・アレイ型超音波探触子を構成する音響整合層と
して、縦波音速が該圧電体と実質上等しい材料を用いる
ことを提案する。In order to achieve this object, the present invention provides a monolithic array type ultrasonic probe using an integrated plate-shaped piezoelectric material as an electric-to-acoustic conversion material. It is proposed to use a material substantially equivalent to
モノリシツク・アレイ型探触子の概略図を第１図に、
その断面図を第２図に示す。第２図中には、板状圧電体
中に生ずる部分波を矢印により示したが、これからも明
らかなように、板状圧電体の共振周波数rは部分波の
伝搬方向と板の法線とのなす角θによつて異なり、 となる。ここで、Ｃは圧電体中の縦波の音速,Tは板厚で
ある。従つて、角θにより音響整合条件は異なり、一般
には、ある整合層厚さを選ぶと、ある角θのみについて
しか音響整合をとることができない。FIG. 1 is a schematic diagram of a monolithic array probe.
FIG. 2 shows a cross-sectional view thereof. In FIG. 2, the partial wave generated in the plate-shaped piezoelectric body is indicated by an arrow. As is clear from this, the resonance frequency r of the plate-shaped piezoelectric body depends on the propagation direction of the partial wave and the normal to the plate. Depends on the angle θ Becomes Here, C is the sound speed of the longitudinal wave in the piezoelectric body, and T is the plate thickness. Therefore, the acoustic matching conditions differ depending on the angle θ. In general, when a certain matching layer thickness is selected, acoustic matching can be performed only for a certain angle θ.
そこで、本発明の提案により縦波音速が実質上等しい
音響整合層を用いると、上記の部分波の伝搬方向と板の
法線とのなす角は音響整合層中においても実質上θに等
しくなり、整合層厚さをT/2程度に選ぶと、θがいかな
る値の部分波に関しても音響整合をとることができる。
これにより、目的とする高い撮像性能が実現可能とな
る。Therefore, if an acoustic matching layer having substantially equal longitudinal wave velocities is used according to the proposal of the present invention, the angle between the propagation direction of the partial wave and the normal to the plate becomes substantially equal to θ even in the acoustic matching layer. If the thickness of the matching layer is selected to be about T / 2, acoustic matching can be achieved for partial waves having any value of θ.
This makes it possible to achieve the desired high imaging performance.
以下、本発明の実施例を参照し、さらに詳しく本発明
を説明する。Hereinafter, the present invention will be described in more detail with reference to examples of the present invention.
本発明の一実施例として、第１図の構造をもち電気・
音響変換材料としてPZT系セラミクス・チタン酸鉛系セ
ラミクスなどの圧電セラミクスを用い、音響整合層材料
としてメチロール・メラミン系樹脂を用いたモノリシツ
ク・アレイ型探触子をあげる。メチロール・メラミン系
樹脂は、縦波音速が3300m/secと圧電セラミクスと実質
上等しく、また、５×106kg/m2・sec程度の大きさの縦
波音響インピーダンスを有するので、大体・水などの音
響媒質と圧電セラミクスとの間の音響整合層材料とし
て、本発明を実施する際に好適な材料のひとつである。As one embodiment of the present invention, the electric
A monolithic array type probe using piezoelectric ceramics such as PZT-based ceramics and lead titanate-based ceramics as the acoustic conversion material, and methylol-melamine-based resin as the acoustic matching layer material. Methylol / melamine resins have a longitudinal wave velocity of 3300 m / sec, which is substantially equal to that of piezoelectric ceramics, and have a longitudinal wave acoustic impedance of about 5 × 10 6 kg / m 2・ sec. This is one of the materials suitable for implementing the present invention as a material for an acoustic matching layer between an acoustic medium such as a piezoelectric ceramic and an acoustic medium.
上記の実施例においては、板状圧電体１の前面にその
厚みの1/2程度の厚さの音響整合層２を設けたが、さら
に、板状圧電体の１の背面と背面制動材３との間に同程
度の音速を持ち圧電体の厚みの1/4程度の厚さを有する
音響整合層４を設けた本発明の一実施例の断面図を第３
図に示す。板状圧電体中には、圧電体の前面・背面の両
境界を歪みの節とし、その中点を歪みの腹とするモード
（実線により模式的に図示した。）のほかに、その中点
をも歪みの節とするモード（点線により模式的に図示し
た。）が生ずることがあり、これが撮像性能劣化の原因
となる場合がある。そこで、本実施例の構成をとれば、
後者のモードの音波エネルギーを背面制動材の方へ効率
的に導くことができ、結果として、撮像性能の劣化を防
止することができる。In the above embodiment, the acoustic matching layer 2 having a thickness of about 1/2 of the thickness is provided on the front surface of the plate-shaped piezoelectric body 1. FIG. 3 is a cross-sectional view of an embodiment of the present invention in which an acoustic matching layer 4 having a sound speed of about the same as that of
Shown in the figure. In the plate-shaped piezoelectric body, in addition to the mode (shown schematically by a solid line) in which both the front and back boundaries of the piezoelectric body are used as nodes of distortion and the midpoint is the antinode of distortion, the midpoint is also displayed. May also be a mode (typically shown by a dotted line) which is a node of distortion, which may cause deterioration of imaging performance. Therefore, if the configuration of this embodiment is adopted,
The sound energy of the latter mode can be efficiently guided toward the rear braking member, and as a result, deterioration of the imaging performance can be prevented.
以上説明した様に、本発明によれば、高い撮像性能と
低い生産コストを両立する両立するモノリシツク・アレ
イ型超音波探触子を実現することができ、本発明の効果
ならびに意議はきわめて大きい。As described above, according to the present invention, it is possible to realize a monolithic array type ultrasonic probe compatible with both high imaging performance and low production cost. .
なお、以上の説明は、板状圧電体の音響インピーダン
スが、音響媒質ならびに背面制動材の両方より大きい場
合を例に述べたが、本発明の適用範囲は、これに限定さ
れるものでなく、板状圧電体の音響インピーダンスが両
者の間にある場合にも及ぶものである。In the above description, the case where the acoustic impedance of the plate-shaped piezoelectric body is larger than both the acoustic medium and the rear braking member has been described, but the scope of the present invention is not limited thereto. This also applies to the case where the acoustic impedance of the plate-shaped piezoelectric body is between the two.
第１図は本発明の一実施例たるモノリシツク・アレイ型
探触子の構造を示す斜視図、第２図はその断面図、第３
図は本発明の他の実施例になる探触子の断面図である。 １……一体型板状圧電体アレイ、２……１と音響媒質と
の間の前面音響整合層、３……背面制動材、４……１と
４との間の背面音響整合層。FIG. 1 is a perspective view showing the structure of a monolithic array probe according to an embodiment of the present invention, FIG.
The figure is a sectional view of a probe according to another embodiment of the present invention. 1 ... an integrated plate-shaped piezoelectric array, 2 ... a front acoustic matching layer between 1 and the acoustic medium, 3 ... a rear damping material, 4 ... a rear acoustic matching layer between 1 and 4.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 片倉 景義 国分寺市東恋ヶ窪１丁目280番地 株式 会社日立製作所中央研究所内 (56)参考文献 特開 昭56−143149（ＪＰ，Ａ) 特開 昭59−226600（ＪＰ，Ａ) 特開 昭60−41399（ＪＰ，Ａ) ──────────────────────────────────────────────────続 き Continuation of front page (72) Inventor Keiyoshi Katakura 1-280 Higashi-Koigabo, Kokubunji-shi, Central Research Laboratory, Hitachi, Ltd. (56) References JP-A-56-143149 (JP, A) JP-A-59-226600 (JP, A) JP-A-60-41399 (JP, A)
Claims (2)
設けられた第１の音響整合層と、前記第１の面と対向す
る第２の面に設けられた背面制動材とを有する超音波探
触子において、前記第２の面と前記背面制動材との間に
第２の音響整合層が設けられ、前記第１、及び第２の音
響整合層における縦波音速が前記板状圧電体における縦
波音速とほぼ等しく、前記第１の音響整合層の厚さが前
記板状圧電体の厚さのほぼ1/2であり、第２の音響整合
層の厚さが前記板状圧電体の厚さのほぼ1/4であること
を特徴とする超音波探触子。1. A plate-shaped piezoelectric body, a first acoustic matching layer provided on a first surface of the plate-shaped piezoelectric body, and a back surface provided on a second surface opposite to the first surface. An ultrasonic probe having a damping member, wherein a second acoustic matching layer is provided between the second surface and the back surface damping member, and a longitudinal wave in the first and second acoustic matching layers is provided. The sound speed is substantially equal to the longitudinal wave sound speed in the plate-shaped piezoelectric body, the thickness of the first acoustic matching layer is substantially half the thickness of the plate-shaped piezoelectric body, and the thickness of the second acoustic matching layer is An ultrasonic probe having a thickness of about 1/4 of the thickness of the plate-shaped piezoelectric body.
ール・メラニン系樹脂からなることを特徴とする特許請
求の範囲第１項に記載の超音波探触子。2. The ultrasonic probe according to claim 1, wherein said first and second acoustic matching layers are made of a methylol-melanin-based resin.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60189662A JP2581665B2 (en) | 1985-08-30 | 1985-08-30 | Ultrasonic probe |
| DE19863611669 DE3611669A1 (en) | 1985-04-10 | 1986-04-07 | ULTRASONIC CONVERTER |
| US06/849,833 US4680499A (en) | 1985-04-10 | 1986-04-09 | Piezoelectric ultrasonic transducer with acoustic matching plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60189662A JP2581665B2 (en) | 1985-08-30 | 1985-08-30 | Ultrasonic probe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6251400A JPS6251400A (en) | 1987-03-06 |
| JP2581665B2 true JP2581665B2 (en) | 1997-02-12 |
Family
ID=16245072
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60189662A Expired - Lifetime JP2581665B2 (en) | 1985-04-10 | 1985-08-30 | Ultrasonic probe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2581665B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103959817B (en) * | 2011-11-28 | 2016-12-14 | 株式会社村田制作所 | Multilayer piezoelectric elements and sensors for refeed detection |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56143149A (en) * | 1980-04-08 | 1981-11-07 | Hitachi Medical Corp | Probe of ultrasonic diagnosis apparatus |
-
1985
- 1985-08-30 JP JP60189662A patent/JP2581665B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6251400A (en) | 1987-03-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |