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JP2024058079A - Heat transfer member connection structure for cryogenic device and cryogenic device - Google Patents

Heat transfer member connection structure for cryogenic device and cryogenic device Download PDF

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JP2024058079A
JP2024058079A JP2022165219A JP2022165219A JP2024058079A JP 2024058079 A JP2024058079 A JP 2024058079A JP 2022165219 A JP2022165219 A JP 2022165219A JP 2022165219 A JP2022165219 A JP 2022165219A JP 2024058079 A JP2024058079 A JP 2024058079A
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heat transfer
transfer member
temperature side
side heat
cryogenic
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JP7788984B2 (en
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航生 上野
Koki Ueno
透 栗山
Toru Kuriyama
政彦 高橋
Masahiko Takahashi
紀和 高木
Norikazu Takagi
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Toshiba Corp
Toshiba Energy Systems and Solutions Corp
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Toshiba Energy Systems and Solutions Corp
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Abstract

To make it possible to reduce the contact thermal resistance of a connection part of a heat transfer member.SOLUTION: In a heat transfer member connection structure of a cryogenic device, a superconducting coil 11 is conduction-cooled to a cryogenic temperature via a second heat transfer member 16 by a cryogenic refrigerator 12. The second heat transfer member 16 comprises a low-temperature side heat transfer member 17 connected to the cryogenic refrigerator, and a high-temperature side heat transfer member 18 connected to the superconducting coil. A convex part 23 is formed in one of the high-temperature side heat transfer member and the low-temperature side heat transfer member, and a hole 24 having a shape following the shape of the convex part is formed in an end part 27 of the other. Under the same temperature condition of the high-temperature side heat transfer member 18 and the low-temperature side heat transfer member 17 at the time of manufacturing, the internal diameter of the hole 24 is set equal to or smaller than the external diameter of the convex part 23. The convex part is fitted into the hole by heating or cooling, and thereby the high-temperature side heat transfer member 18 and the low-temperature side heat transfer member 17 are connected.SELECTED DRAWING: Figure 1

Description

本発明の実施形態は、極低温冷凍機により超電導コイルをはじめとする被冷却物を、伝熱部材を介して極低温に伝導冷却する極低温装置の伝熱部材接続構造、及びその接続構造が適用された伝熱部材を有する極低温装置に関する。 Embodiments of the present invention relate to a heat transfer member connection structure of a cryogenic device that uses a cryogenic refrigerator to conductively cool objects such as superconducting coils to cryogenic temperatures via a heat transfer member, and a cryogenic device having a heat transfer member to which the connection structure is applied.

従来、77K以下の極低温まで冷却可能な極低温冷凍機を利用して、超電導コイルなどの被冷却物を、良熱伝導体からなる伝熱部材の固体熱伝導により伝導冷却する伝導冷却方式の極低温装置が開発されている。 Conventionally, cryogenic devices using a conduction cooling system have been developed that utilize a cryogenic refrigerator capable of cooling to extremely low temperatures of 77K or less to conduct heat to objects to be cooled, such as superconducting coils, by solid-state thermal conduction of heat transfer members made of good thermal conductors.

この冷却方式では、極低温冷凍機のシリンダと構造材の熱収縮差により生じる熱応力の緩和のために、可撓性を有する伝熱部材を一部に用いており、複数の伝熱部材をボルト締結や溶接等で接続して、被冷却物から極低温冷凍機の冷却ステージまでの熱経路を形成している。 In this cooling method, flexible heat transfer materials are used in part to alleviate thermal stress caused by differences in thermal contraction between the cylinder of the cryogenic refrigerator and the structural materials, and multiple heat transfer materials are connected by bolting or welding to form a thermal path from the object to be cooled to the cooling stage of the cryogenic refrigerator.

伝熱部材間の接続箇所では、図6に示すように、伝熱部材100における低温側伝熱部材101と高温側伝熱部材102の接続部の表面には微細な凹凸が存在するため、低温側伝熱部材101と高温側伝熱部材102の接触面に微細な空隙103が生じ、この空隙103が熱伝導の妨げとなる。このため、伝熱部材100の接続部には、伝熱部材100の熱抵抗よりも大きな接触熱抵抗が生する場合がある。 As shown in FIG. 6, at the connection points between the heat transfer members, there are minute irregularities on the surface of the connection between the low-temperature side heat transfer member 101 and the high-temperature side heat transfer member 102 in the heat transfer member 100, which creates minute gaps 103 on the contact surface between the low-temperature side heat transfer member 101 and the high-temperature side heat transfer member 102, and these gaps 103 impede heat conduction. For this reason, the connection points of the heat transfer members 100 may have contact thermal resistance greater than the thermal resistance of the heat transfer member 100.

一般的に接触熱抵抗は、実接触面積または押し付け圧力に反比例して小さくなる傾向がある。従って、接触熱抵抗の低減方法としては、空隙103を小さくして実接触面積を増加させることが有効である。このためには、表面の微細な凹凸を塑性変形させるに十分な面圧を加えるか、または、図7に示すように、接触面に熱伝導グリースや伝熱促進用の柔らかい金属シート等の接触伝熱媒体104を配置することで、空隙103を埋めて実接触面積を増加させる手法がとられる。 In general, contact thermal resistance tends to decrease inversely proportional to the actual contact area or pressure. Therefore, an effective method for reducing contact thermal resistance is to reduce the gap 103 and increase the actual contact area. To achieve this, a method is used in which sufficient surface pressure is applied to plastically deform the fine irregularities on the surface, or, as shown in Figure 7, a contact heat transfer medium 104 such as thermally conductive grease or a soft metal sheet for promoting heat transfer is placed on the contact surface to fill the gap 103 and increase the actual contact area.

特開2010-192253号公報JP 2010-192253 A 特許第5520740号公報Japanese Patent No. 5520740

伝熱部材における接続方法としては、ボルト締結が一般的に広く用いられる。そのほか、特許文献1では、熱収縮率の異なる2つの部材を嵌合構造により接続する構造が、特許文献2では、嵌合構造の更に外側に、熱収縮率の大きな熱収縮リングを配置して接続する構造がそれぞれ開示されている。 Bolt fastening is a common method for connecting heat transfer members. In addition, Patent Document 1 discloses a structure in which two members with different thermal shrinkage rates are connected by a fitting structure, and Patent Document 2 discloses a structure in which a heat shrink ring with a large thermal shrinkage rate is placed on the outer side of the fitting structure to connect the members.

伝熱部材100における低温側伝熱部材101と高温側伝熱部材102の接続部の熱伝導では、上述のように、接触面の微細な凹凸によって生じる空隙103で熱流が制限されることにより接触熱抵抗が生ずる。この接触熱抵抗の低減のために、熱伝導グリースや柔らかい金属シートなどの接触伝熱媒体104を接触面に設置して、空隙103を埋めることで、接触熱抵抗の低減を図ることができる。しかしながら、接触伝熱媒体104は、極低温の温度領域では、その熱伝導率が高純度のアルミニウムや銅からなる伝熱部材100と比較して極端に小さくなるため、接触伝熱媒体104として十分な効果を発揮することができない。 In the heat transfer of the connection between the low-temperature heat transfer member 101 and the high-temperature heat transfer member 102 in the heat transfer member 100, as described above, the heat flow is restricted by the gap 103 caused by the minute unevenness of the contact surface, resulting in contact thermal resistance. In order to reduce this contact thermal resistance, a contact heat transfer medium 104 such as thermally conductive grease or a soft metal sheet can be placed on the contact surface to fill the gap 103, thereby reducing the contact thermal resistance. However, in the extremely low temperature range, the thermal conductivity of the contact heat transfer medium 104 is extremely small compared to the heat transfer member 100 made of high-purity aluminum or copper, and therefore the contact heat transfer medium 104 cannot exert a sufficient effect.

接触熱抵抗のもう一つの低減方法としては、接触面の微細な凹凸の変形を促して空隙103を小さくするために、強い面圧を加えることが考えられる。しかしながら、通常行われるボルト締結による加圧では、レッチェルの影響円錐と呼ばれるボルト穴の周辺部にのみに押し付け圧力が加わる。この結果、図8に示すように、アルミニウムや銅を基材とする低温側伝熱部材101、高温側伝熱部材102にうねりが発生し、結果的にボルト105の周辺部のみしか接触面が生まれず、接触熱抵抗が低減されない課題が生じていた。 Another method for reducing contact thermal resistance is to apply strong surface pressure to reduce the gap 103 by promoting deformation of the fine irregularities on the contact surface. However, in the usual case of applying pressure by fastening a bolt, the pressure is applied only to the periphery of the bolt hole, known as the Letschel cone of influence. As a result, as shown in Figure 8, undulations are generated in the low-temperature side heat transfer member 101 and the high-temperature side heat transfer member 102, which are made of aluminum or copper, and as a result, only the periphery of the bolt 105 is in contact, creating the problem of not being able to reduce contact thermal resistance.

また、特許文献1の嵌合構造では、室温時に接合箇所に面圧が加わっておらず、熱抵抗が高くなることに加え、場合によっては脱落の危険がある。特許文献2の嵌合構造では、熱収縮リングを使用した締結としているが、同様に、室温時にはクリアランスが生じており、接触熱抵抗が大きくなっている。 In addition, in the fitting structure of Patent Document 1, no surface pressure is applied to the joint at room temperature, which increases thermal resistance and, in some cases, poses the risk of separation. In the fitting structure of Patent Document 2, a heat shrink ring is used for fastening, but similarly, clearance occurs at room temperature, increasing contact thermal resistance.

本発明の実施形態は、上述の事情を考慮してなされたものであり、伝熱部材の接続部の接触熱抵抗を低減できる極低温装置の伝熱部材接続構造及び極低温装置を提供することを目的とする。 The embodiment of the present invention has been made in consideration of the above circumstances, and aims to provide a heat transfer member connection structure for a cryogenic device and a cryogenic device that can reduce the contact thermal resistance of the connection part of the heat transfer member.

本発明の実施形態における極低温装置の伝熱部材接続構造は、極低温冷凍機により被冷却物を、伝熱部材を介して極低温に伝導冷却する極低温装置の伝熱部材接続構造において、前記伝熱部材が、前記極低温冷凍機に接続される低温側伝熱部材と、前記被冷却物に接続される高温側伝熱部材とを有してなり、前記高温側伝熱部材と前記低温側伝熱部材の一方に凸部が、他方の端部に、前記凸部の形状に沿う形状の凹部がそれぞれ形成され、製造時における前記高温側伝熱部材と前記低温側伝熱部材の同一温度条件下で、前記凹部の内径が前記凸部の外径以下に設定され、前記凸部を前記凹部に加熱または冷却により嵌合させることで、前記高温側伝熱部材と前記低温側伝熱部材とを接続させるよう構成されたことを特徴とするものである。 The heat transfer member connection structure of a cryogenic device in an embodiment of the present invention is a heat transfer member connection structure of a cryogenic device in which a cryogenic refrigerator conducts and cools an object to be cooled to a cryogenic temperature via a heat transfer member, the heat transfer member having a low-temperature side heat transfer member connected to the cryogenic refrigerator and a high-temperature side heat transfer member connected to the object to be cooled, a convex portion is formed on one end of the high-temperature side heat transfer member and the low-temperature side heat transfer member, and a concave portion having a shape that conforms to the shape of the convex portion is formed on the other end, and the inner diameter of the concave portion is set to be equal to or smaller than the outer diameter of the convex portion under the same temperature conditions of the high-temperature side heat transfer member and the low-temperature side heat transfer member during manufacture, and the convex portion is fitted into the concave portion by heating or cooling to connect the high-temperature side heat transfer member and the low-temperature side heat transfer member.

本発明の実施形態における極低温装置は、極低温冷凍機と、前記実施形態に記載の極低温装置の伝熱部材接続構造が適用されて構成されて、前記極低温冷凍機と被冷却物とを熱的に接続する伝熱部材と、前記極低温冷凍機、前記被冷却物及び前記伝熱部材を格納する真空容器と、を有して構成されたことを特徴とするものである。 The cryogenic device in the embodiment of the present invention is characterized by having a cryogenic refrigerator, a heat transfer member that is configured by applying the heat transfer member connection structure of the cryogenic device described in the embodiment and thermally connects the cryogenic refrigerator and the object to be cooled, and a vacuum container that stores the cryogenic refrigerator, the object to be cooled, and the heat transfer member.

本発明の実施形態によれば、伝熱部材の接続部の接触熱抵抗を低減することができる。 According to an embodiment of the present invention, it is possible to reduce the contact thermal resistance of the connection part of the heat transfer member.

第1実施形態に係る極低温装置の伝熱材接続構造が適用された伝熱部材を有する極低温装置の全体構成を示す概略断面。1 is a schematic cross-sectional view showing an overall configuration of a cryogenic device having a heat transfer member to which a heat transfer material connection structure for a cryogenic device according to a first embodiment is applied. 図1の伝熱部材を示す断面図。FIG. 2 is a cross-sectional view showing the heat transfer member of FIG. 1 . 図2の伝熱部材の変形形態を示す断面図。3 is a cross-sectional view showing a modified example of the heat transfer member of FIG. 2; FIG. 第2実施形態に係る極低温装置の伝熱部材接続構造が適用された伝熱部材を示す断面図。13 is a cross-sectional view showing a heat transfer member to which a heat transfer member connection structure for a cryogenic device according to a second embodiment is applied. FIG. 第3実施形態に係る極低温装置の伝熱部材接続構造が適用された伝熱部材を構成する基材を含む材料の熱膨張率を示すグラフ。13 is a graph showing the thermal expansion coefficient of materials including a base material constituting a heat transfer member to which the heat transfer member connection structure of the cryogenic device according to the third embodiment is applied. 伝熱部材の接触面における微細な空隙を説明する概念図。FIG. 4 is a conceptual diagram illustrating minute gaps in the contact surface of a heat transfer member. 伝熱部材の接触面に接触伝熱媒体を介在させた状態を示す概念図。FIG. 13 is a conceptual diagram showing a state in which a contact heat transfer medium is interposed between contact surfaces of heat transfer members. 伝熱部材をボルト締結により接合したときに生ずるうねりについて説明する概念図。6 is a conceptual diagram illustrating undulations that occur when heat transfer members are joined by bolt fastening.

以下、本発明を実施するための形態を、図面に基づき説明する。
[A]第1実施形態(図1~図3)
図1は、第1実施形態に係る極低温装置の伝熱材接続構造が適用された伝熱部材を有する極低温装置の全体構成を示す概略断面である。この図1に示す極低温装置10は、被冷却物としての超電導コイル11及び熱シールド14を、極低温冷凍機12により77K以下の極低温に伝導冷却するものであり、真空容器13、上記極低温冷凍機12、上記熱シールド14、第1伝熱部材15及び第2伝熱部材16を有して構成される。
Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
[A] First embodiment (FIGS. 1 to 3)
Fig. 1 is a schematic cross-sectional view showing the overall configuration of a cryogenic device having a heat transfer member to which the heat transfer material connection structure for a cryogenic device according to the first embodiment is applied. The cryogenic device 10 shown in Fig. 1 conducts and cools a superconducting coil 11 and a heat shield 14, which are objects to be cooled, to a cryogenic temperature of 77K or less by a cryogenic refrigerator 12, and is configured with a vacuum vessel 13, the cryogenic refrigerator 12, the heat shield 14, a first heat transfer member 15, and a second heat transfer member 16.

真空容器13は、極低温冷凍機12を支持すると共に熱シールド14を格納し、この熱シールド14内に超電導コイル11を格納する。極低温冷凍機12は、ギフォード・マクマフォン(GM)冷凍機またはパルスチューブ冷凍機等が用いられ、20K~50K程度の寒冷を発生する第1冷却ステージ21と、3K~30K程度の寒冷を発生する第2冷却ステージ22とを有する。第1冷却ステージ21が真空容器13内に配置され、第2冷却ステージ22が熱シールド14内に配置される。 The vacuum vessel 13 supports the cryogenic refrigerator 12 and houses the heat shield 14, with the superconducting coil 11 housed within this heat shield 14. The cryogenic refrigerator 12 is a Gifford-McMahon (GM) refrigerator or a pulse tube refrigerator, etc., and has a first cooling stage 21 that generates cold at about 20K to 50K, and a second cooling stage 22 that generates cold at about 3K to 30K. The first cooling stage 21 is disposed within the vacuum vessel 13, and the second cooling stage 22 is disposed within the heat shield 14.

第1伝熱部材15は、極低温冷凍機12の第1冷却ステージ21と被冷却物としての熱シールド14とを熱的に接続し、この熱シールド14が第1冷却ステージ21により、第1伝熱部材15を介して極低温(20K~50K程度)に伝導冷却される。また、第2伝熱部材16は、極低温冷凍機12の第2冷却ステージ22と被冷却物としての超電導コイル11とを熱的に接続し、この超電導コイル11が第2冷却ステージ22により、第2伝熱部材16を介して極低温(3K~30K程度)に伝導冷却される。 The first heat transfer member 15 thermally connects the first cooling stage 21 of the cryogenic refrigerator 12 to the heat shield 14 as the object to be cooled, and the heat shield 14 is conductively cooled to a cryogenic temperature (approximately 20K to 50K) by the first cooling stage 21 via the first heat transfer member 15. The second heat transfer member 16 thermally connects the second cooling stage 22 of the cryogenic refrigerator 12 to the superconducting coil 11 as the object to be cooled, and the superconducting coil 11 is conductively cooled to a cryogenic temperature (approximately 3K to 30K) by the second cooling stage 22 via the second heat transfer member 16.

以下、第1~第3実施形態では、第2伝熱部材16の構成及び作用効果ついて説明するが、第1伝熱部材15についても第2伝熱部材16と同様な構成であってもよく、その場合、第1伝熱部材15についても第2伝熱部材16と同様な作用効果を奏する。 In the following, in the first to third embodiments, the configuration and effects of the second heat transfer member 16 will be described, but the first heat transfer member 15 may also have a similar configuration to the second heat transfer member 16, in which case the first heat transfer member 15 will also have the same effects as the second heat transfer member 16.

第2伝熱部材16は、極低温冷凍機12の第2冷却ステージ22に熱的に接続される低温側伝熱部材17と、超電導コイル11に熱的に接続される高温側伝熱部材18とを有して構成される。図2に示すように、これらの低温側伝熱部材17と高温側伝熱部材18の一方、例えば高温側伝熱部材18に凸部23が形成され、低温側伝熱部材17と高温側伝熱部材18の他方、例えば低温側伝熱部材17の剛性を有する端部27(後述)に、凹部としての孔24が形成される。凹部は、図2に示すように、端部27を貫通する孔に限らず、図3に示すように、端部27の例えば底部を刳り抜く穴25であってもよい。これらの孔24及び穴25は、高温側伝熱部材18の凸部23の形状に沿う形状、例えば凸部23を嵌合する形状に形成される。 The second heat transfer member 16 is configured to include a low-temperature side heat transfer member 17 that is thermally connected to the second cooling stage 22 of the cryogenic refrigerator 12, and a high-temperature side heat transfer member 18 that is thermally connected to the superconducting coil 11. As shown in FIG. 2, a convex portion 23 is formed on one of the low-temperature side heat transfer member 17 and the high-temperature side heat transfer member 18, for example, on the high-temperature side heat transfer member 18, and a hole 24 is formed as a concave portion on the other of the low-temperature side heat transfer member 17 and the high-temperature side heat transfer member 18, for example, on the end portion 27 (described later) having rigidity of the low-temperature side heat transfer member 17. The concave portion is not limited to a hole that penetrates the end portion 27 as shown in FIG. 2, but may be a hole 25 that hollows out, for example, the bottom portion of the end portion 27 as shown in FIG. 3. These holes 24 and holes 25 are formed in a shape that follows the shape of the convex portion 23 of the high-temperature side heat transfer member 18, for example, a shape that fits the convex portion 23.

高温側伝熱部材18における凸部23は、高温側伝熱部材18の基材の削り出し加工による形成が好適であるが、凸部23を高温側伝熱部材18の本体に対し別部材として製作し、この凸部23を高温側伝熱部材18の本体に溶接により接合、またはボルト等により締結してもよい。凸部23を含む高温側伝熱部材18を構成する基材は、特に極低温で熱伝導率が高い材料が望ましく、例えば高純度アルミニウム(純度99.99%以上)を含む純アルミニウム(純度99.5%以上)、または高純度銅(純度99.96%以上)を含む純銅(純度99.9%以上)が用いられる。 The protrusions 23 in the high-temperature side heat transfer member 18 are preferably formed by machining the base material of the high-temperature side heat transfer member 18, but the protrusions 23 may be manufactured as a separate member from the main body of the high-temperature side heat transfer member 18, and the protrusions 23 may be joined to the main body of the high-temperature side heat transfer member 18 by welding or fastened with bolts or the like. The base material constituting the high-temperature side heat transfer member 18 including the protrusions 23 is preferably a material with high thermal conductivity, especially at extremely low temperatures, and for example, pure aluminum (purity 99.5% or more) containing high-purity aluminum (purity 99.99% or more) or pure copper (purity 99.9% or more) containing high-purity copper (purity 99.96% or more) is used.

低温側伝熱部材17は、可撓性部材26の一端に剛性を有す端部27が、他端に端部28が、それぞれ例えば溶接により接合されて構成される。可撓性部材26は、極低温冷凍機12と被冷却物である超電導コイル11との熱収縮差により生ずる熱応力を緩和させるために設けられたものであり、複数の箔または細線から構成される。また、低温側伝熱部材17の端部28は、極低温冷凍機12の第2冷却ステージ22に取り付けられる。 The low-temperature side heat transfer member 17 is constructed by joining, for example, a rigid end 27 to one end of a flexible member 26 and an end 28 to the other end. The flexible member 26 is provided to relieve thermal stress caused by the difference in thermal contraction between the cryogenic refrigerator 12 and the object to be cooled, the superconducting coil 11, and is constructed from multiple foils or thin wires. The end 28 of the low-temperature side heat transfer member 17 is attached to the second cooling stage 22 of the cryogenic refrigerator 12.

可撓性部材26を構成する基材は、極低温で熱伝導率が高い材料が望ましく、例えば高純度アルミニウム(純度99.99%以上)を含む純アルミニウム(純度99.5%以上)の箔もしくは細線、高純度銅(純度99.96%以上)を含む純銅(純度99.9%以上)の箔もしくは細線、または炭素繊維からなる箔もしくは細線が用いられる。また、可撓性部材26は、上述のアルミニウム、銅、炭素繊維のそれぞれの箔もしくは細線を並列に使用して構成されてもよい。 The base material constituting the flexible member 26 is preferably a material with high thermal conductivity at cryogenic temperatures, such as a foil or thin wire of pure aluminum (purity 99.5% or more) containing high purity aluminum (purity 99.99% or more), a foil or thin wire of pure copper (purity 99.9% or more) containing high purity copper (purity 99.96% or more), or a foil or thin wire made of carbon fiber. The flexible member 26 may also be formed by using foils or thin wires of the above-mentioned aluminum, copper, and carbon fiber in parallel.

低温側伝熱部材17の端部27及び28を構成する基材も、極低温で熱伝導率が高い材料が望ましく、例えば高純度アルミニウム(純度99.99%以上)を含む純アルミニウム(純度99.5%以上)、または高純度銅(純度99.96%以上)を含む純銅(純度99.9%以上)が好ましい。 The base material constituting the ends 27 and 28 of the low-temperature side heat transfer member 17 is also preferably a material with high thermal conductivity at extremely low temperatures, such as pure aluminum (purity 99.5% or more) containing high-purity aluminum (purity 99.99% or more), or pure copper (purity 99.9% or more) containing high-purity copper (purity 99.96% or more).

ところで、第2伝熱部材16の室温での製造時における高温側伝熱部材18と低温側伝熱部材17の同一温度条件下で、低温側伝熱部材17の孔24または穴25の内径は、高温側伝熱部材18の凸部23の外径以下の寸法に設定される。そして、凸部23を孔24または穴25に加熱または冷却により嵌合させることで、低温側伝熱部材17と高温側伝熱部材18とが接続されて第2伝熱部材16が製造される。つまり、高温側伝熱部材18の凸部23を低温に冷却し、熱収縮により凸部23の外径を小さくした状態で、この凸部23を低温側伝熱部材17の孔24または穴25に嵌合させる。あるいは、低温側伝熱部材17の端部27を加熱し、熱膨張により孔24または穴25の内径を大きくした状態で、この孔24または穴25に高温側伝熱部材18の凸部23を嵌合させる。 By the way, under the same temperature conditions of the high-temperature side heat transfer member 18 and the low-temperature side heat transfer member 17 during the manufacture of the second heat transfer member 16 at room temperature, the inner diameter of the hole 24 or hole 25 of the low-temperature side heat transfer member 17 is set to a dimension equal to or smaller than the outer diameter of the protruding portion 23 of the high-temperature side heat transfer member 18. Then, the low-temperature side heat transfer member 17 and the high-temperature side heat transfer member 18 are connected by fitting the protruding portion 23 into the hole 24 or hole 25 by heating or cooling, and the second heat transfer member 16 is manufactured. In other words, the protruding portion 23 of the high-temperature side heat transfer member 18 is cooled to a low temperature, and the outer diameter of the protruding portion 23 is reduced by thermal contraction, and the protruding portion 23 is fitted into the hole 24 or hole 25 of the low-temperature side heat transfer member 17. Alternatively, the end 27 of the low-temperature side heat transfer member 17 is heated, and the inner diameter of the hole 24 or hole 25 is enlarged by thermal expansion, and the protrusion 23 of the high-temperature side heat transfer member 18 is fitted into this hole 24 or hole 25.

従って、第2伝熱部材16の接続部としての低温側伝熱部材17の孔24または穴25と高温側伝熱部材18の凸部23は、低温側伝熱部材17の端部27の熱応力によって、凸部23の側面(外周面)に対し均一な圧力を作用した状態となる。これにより、低温側伝熱部材17の端部27と高温側伝熱部材18の凸部23とは、ボルトや溶接、ハンダ付け等を用いることなく接続される。 Therefore, the hole 24 or hole 25 of the low-temperature side heat transfer member 17, which serves as the connection part of the second heat transfer member 16, and the protrusion 23 of the high-temperature side heat transfer member 18 are in a state where uniform pressure is applied to the side (outer peripheral surface) of the protrusion 23 due to thermal stress of the end 27 of the low-temperature side heat transfer member 17. As a result, the end 27 of the low-temperature side heat transfer member 17 and the protrusion 23 of the high-temperature side heat transfer member 18 are connected without using bolts, welding, soldering, etc.

以上のように構成されたことから、本第1実施形態によれば、次の効果(1)及び(2)を奏する。
(1)第2伝熱部材16を構成する高温側伝熱部材18と低温側伝熱部材17は、一方(例えば高温側伝熱部材18)に凸部23が、他方(例えば低温側伝熱部材17)の端部27に、凸部23の形状に沿う形状の孔24または穴25がそれぞれ形成され、第2伝熱部材16の製造時における同一温度条件下で、孔24または穴25の内径が凸部23の外径以下に設定される。そして、凸部23を孔24または穴25に加熱または冷却により嵌合させることで、高温側伝熱部材18と低温側伝熱部材17とが接続されて第2伝熱部材16が製造される。
As configured as above, the first embodiment provides the following advantages (1) and (2).
(1) The high-temperature side heat transfer member 18 and the low-temperature side heat transfer member 17 constituting the second heat transfer member 16 have a protrusion 23 on one side (e.g., the high-temperature side heat transfer member 18) and a hole 24 or a hole 25 formed in an end 27 of the other side (e.g., the low-temperature side heat transfer member 17) in a shape that conforms to the shape of the protrusion 23, and under the same temperature conditions during the manufacture of the second heat transfer member 16, the inner diameter of the hole 24 or the hole 25 is set to be equal to or smaller than the outer diameter of the protrusion 23. Then, the high-temperature side heat transfer member 18 and the low-temperature side heat transfer member 17 are connected by fitting the protrusion 23 into the hole 24 or the hole 25 by heating or cooling, thereby manufacturing the second heat transfer member 16.

従って、高温側伝熱部材18と低温側伝熱部材17との接続状態では、極低温冷凍機12による冷却前であっても、接続部である凸部23と孔24または穴25との接触面に熱応力による均一な圧力が作用しているので、上記接触面では接触面積を十分に確保でき、接触熱抵抗を低減させることができる。この結果、極低温冷凍機12と超電導コイル11との温度差を低く維持することができる。 Therefore, when the high-temperature side heat transfer member 18 and the low-temperature side heat transfer member 17 are connected, even before cooling by the cryogenic refrigerator 12, uniform pressure due to thermal stress acts on the contact surface between the connecting portion, the protrusion 23, and the hole 24 or hole 25, so that a sufficient contact area can be secured at the contact surface, and contact thermal resistance can be reduced. As a result, the temperature difference between the cryogenic refrigerator 12 and the superconducting coil 11 can be maintained low.

(2)高温側伝熱部材18の凸部23を低温側伝熱部材17の孔24または穴25に、加熱または冷却により嵌合させて低温側伝熱部材17と高温側伝熱部材18とを接続し、第2伝熱部材16を製造している。従って、第2伝熱部材16は、極低温冷凍機12の運転による全ての温度域において、接続部である凸部23と孔24または穴25との接触面に、熱応力による均一な圧力が作用している。この結果、第2伝熱部材16は、低温側伝熱部材17と高温側伝熱部材18とに脱落等を発生させることなく、極低温冷凍機12の運転による全温度域で、接続部における接触面の接触熱抵抗を低減させることができる。 (2) The second heat transfer member 16 is manufactured by fitting the protrusion 23 of the high-temperature side heat transfer member 18 into the hole 24 or hole 25 of the low-temperature side heat transfer member 17 by heating or cooling to connect the low-temperature side heat transfer member 17 and the high-temperature side heat transfer member 18. Therefore, in the second heat transfer member 16, a uniform pressure due to thermal stress acts on the contact surface between the protrusion 23 and the hole 24 or hole 25, which is the connection part, in all temperature ranges during operation of the cryogenic refrigerator 12. As a result, the second heat transfer member 16 can reduce the contact thermal resistance of the contact surface at the connection part in all temperature ranges during operation of the cryogenic refrigerator 12 without causing the low-temperature side heat transfer member 17 and the high-temperature side heat transfer member 18 to fall off.

[B]第2実施形態(図4)
図4は、第2実施形態に係る極低温装置の伝熱部材接続構造が適用された伝熱部材を示す断面図である。この第2実施形態において第1実施形態と同様な部分については、第1実施形態と同一の符号を付すことにより説明を簡略化し、または省略する。
[B] Second embodiment (FIG. 4)
4 is a cross-sectional view showing a heat transfer member to which the heat transfer member connection structure of the cryogenic device according to the second embodiment is applied. In the second embodiment, the same parts as those in the first embodiment are denoted by the same reference numerals as those in the first embodiment, and the description thereof will be simplified or omitted.

本第2実施形態の極低温装置30(図1)の第2伝熱部材32(図4)が第1実施形態と異なる点は、高温側伝熱部材18の凸部23の外周面と低温側伝熱部材17の孔24または穴25(例えば孔24)の内周面との少なくとも一部に、モース硬度2.9未満の柔軟な金属製のメッキ層(金属メッキ層33)が設けられた点である。 The second heat transfer member 32 (Fig. 4) of the cryogenic device 30 (Fig. 1) of the second embodiment differs from the first embodiment in that a flexible metal plating layer (metal plating layer 33) with a Mohs hardness of less than 2.9 is provided on at least a portion of the outer peripheral surface of the protrusion 23 of the high-temperature side heat transfer member 18 and the inner peripheral surface of the hole 24 or hole 25 (e.g. hole 24) of the low-temperature side heat transfer member 17.

接触熱抵抗は、基材となる材料が柔らかいほど、ミクロな接触面積が増加して低減される。第2伝熱部材32における高温側伝熱部材18と低温側伝熱部材17がそれぞれ例えばアルミニウムからなる場合のビッカーズ硬度は200~300MPa程度であり、表面の硬さの目安となるモース硬度は2.9とされる。金属メッキ層33は、少なくともアルミニウムよりも柔らかい材料が好ましく、このような材料としては、金、銀、すず、インジウムなどが挙げられる。第2実施形態では、金属メッキ層33は、ビッカーズ硬度が約9MPaであり、モース硬度1.2と最も柔らかいインジウムによって形成されるが、インジウムの他に金、銀、すずなどであってもよい。また、金属メッキ層33の形成方法としては電解メッキが好ましいが、超音波はんだやコールドスプレーなどによる溶着であってもよい。 The softer the base material, the greater the micro contact area and the lower the contact thermal resistance. When the high-temperature side heat transfer member 18 and the low-temperature side heat transfer member 17 in the second heat transfer member 32 are made of aluminum, for example, the Vickers hardness is about 200 to 300 MPa, and the Mohs hardness, which is a guide to the surface hardness, is 2.9. The metal plating layer 33 is preferably made of a material that is at least softer than aluminum, and examples of such materials include gold, silver, tin, and indium. In the second embodiment, the metal plating layer 33 is formed of indium, which has a Vickers hardness of about 9 MPa and a Mohs hardness of 1.2, which is the softest, but gold, silver, tin, and the like may be used instead of indium. The metal plating layer 33 is preferably formed by electrolytic plating, but may also be deposited by ultrasonic soldering or cold spray.

以上のように構成されたことから、本第2実施形態においても第1実施形態の効果(1)及び(2)と同様な効果を奏するほか、次の効果(3)を奏する。 As configured as described above, the second embodiment achieves the same effects as the first embodiment (1) and (2), and also achieves the following effect (3).

(3)第2伝熱部材32においても、製造時の室温での同一温度条件下で、低温側伝熱部材17の孔24または穴25の内径が高温側伝熱部材18の凸部23の外径以下に設定され、凸部23を孔24または穴25に加熱または冷却により嵌合させることで、低温側伝熱部材17と高温側伝熱部材18とが接続されて第2伝熱部材32が製造される。このため、互いに接触する低温側伝熱材17の孔24または穴25の内周面と高温側伝熱部材18の凸部23の外周面とに熱応力による圧力が生じる。 (3) In the second heat transfer member 32, the inner diameter of the hole 24 or hole 25 of the low-temperature side heat transfer member 17 is set to be equal to or smaller than the outer diameter of the protrusion 23 of the high-temperature side heat transfer member 18 under the same temperature conditions at room temperature during manufacture, and the protrusion 23 is fitted into the hole 24 or hole 25 by heating or cooling, thereby connecting the low-temperature side heat transfer member 17 and the high-temperature side heat transfer member 18 to manufacture the second heat transfer member 32. As a result, pressure due to thermal stress is generated on the inner circumferential surface of the hole 24 or hole 25 of the low-temperature side heat transfer member 17 and the outer circumferential surface of the protrusion 23 of the high-temperature side heat transfer member 18, which are in contact with each other.

従って、これらの接触面に設けられた金属メッキ層33は、極低温冷凍機12による冷却開始前の上記熱応力による圧力によって低温側伝熱部材17及び高温側伝熱部材18よりも大きく変形し、上記接触面の微細な空隙を埋めることができる。この結果、第2伝熱部材32における低温側伝熱部材17と高温側伝熱部材18との接触面(孔24または穴25と凸部23)の接触面の接触熱抵抗をより一層低減することができる。 The metal plating layer 33 provided on these contact surfaces is deformed more than the low-temperature side heat transfer member 17 and the high-temperature side heat transfer member 18 due to the pressure caused by the thermal stress before the start of cooling by the cryogenic refrigerator 12, and can fill minute gaps in the contact surfaces. As a result, the contact thermal resistance of the contact surface between the low-temperature side heat transfer member 17 and the high-temperature side heat transfer member 18 in the second heat transfer member 32 (the hole 24 or hole 25 and the protrusion 23) can be further reduced.

[C]第3実施形態(図5)
図5は、第3実施形態に係る極低温装置の伝熱部材接続構造が適用された伝熱部材を構成する基材を含む材料の熱膨張率を示すグラフである。この第3実施形態において第1実施形態と同様な部分については、第1実施形態と同一の符号を付すことにより説明を簡略化し、または省略する。
[C] Third embodiment (FIG. 5)
5 is a graph showing the thermal expansion coefficient of materials including a base material constituting a heat transfer member to which the heat transfer member connection structure of the cryogenic device according to the third embodiment is applied. In the third embodiment, the same parts as those in the first embodiment are denoted by the same reference numerals as those in the first embodiment, and the description thereof will be simplified or omitted.

本第3実施形態の極低温装置40(図1)の第2伝熱部材42(図2、図3)が第1実施形態と異なる点は、高温側伝熱部材18における凸部43が純銅(純度99.9%以上)にて構成され、低温側伝熱部材17における孔24または穴25が形成される剛性を有する端部47が、純アルミニウム(純度99.5%以上)にて構成された点である。 The second heat transfer member 42 (Figs. 2 and 3) of the cryogenic device 40 (Fig. 1) of the third embodiment differs from the first embodiment in that the protrusion 43 of the high-temperature side heat transfer member 18 is made of pure copper (purity of 99.9% or more), and the rigid end 47 in which the hole 24 or hole 25 of the low-temperature side heat transfer member 17 is formed is made of pure aluminum (purity of 99.5% or more).

図5に示すように、アルミニウムの熱膨張率(熱収縮率)は銅よりも大きいことが知られている。熱膨張率の大きなアルミニウムで低温側伝熱部材17の剛性を有する端部47を構成することにより、この端部47は、第2伝熱部材42が極低温冷凍機12の運転により冷却されると、高温側伝熱部材18の凸部43に比べて0.1%(1‰)ほど大きく熱収縮しようとする。このため、極低温冷凍機12の運転による第2伝熱部材42の冷却時に、低温側伝熱部材17の端部47の孔24または穴25と高温側伝熱部材18の凸部43の各接触面に、室温時以上の熱応力が発生する。 As shown in FIG. 5, it is known that the thermal expansion coefficient (thermal contraction coefficient) of aluminum is greater than that of copper. By forming the rigid end 47 of the low-temperature side heat transfer member 17 from aluminum, which has a large thermal expansion coefficient, this end 47 tends to thermally contract by about 0.1% (1‰) more than the convex portion 43 of the high-temperature side heat transfer member 18 when the second heat transfer member 42 is cooled by the operation of the cryogenic refrigerator 12. For this reason, when the second heat transfer member 42 is cooled by the operation of the cryogenic refrigerator 12, thermal stress greater than that at room temperature is generated at each contact surface between the hole 24 or hole 25 of the end 47 of the low-temperature side heat transfer member 17 and the convex portion 43 of the high-temperature side heat transfer member 18.

以上のように構成されたことから、本第3実施形態によれば、第1実施形態の効果(1)及び(2)と同様な効果を奏するほか、次の効果(4)を奏する。 As configured above, the third embodiment provides the same effects as the effects (1) and (2) of the first embodiment, as well as the following effect (4).

(4)第2伝熱部材42における高温側伝熱部材18の凸部43が純銅にて構成され、低温側伝熱部材17の端部47が純銅よりも熱膨張率(熱収縮率)の大きな純アルミニウムにて構成されている。このため、端部47の孔24または穴25に凸部43を嵌合させたときの孔24または穴25と凸部43との接触面における熱応力による圧力は、低温側伝熱部材17と高温側伝熱部材18とを接続して第2伝熱部材42を製造する室温の製造時によりも、極低温冷凍機12の運転による第2伝熱部材42の冷却時の方が、純アルミニウム製の端部47の熱収縮により大きくなる。この結果、極低温冷凍機12の運転時において、第2伝熱部材42における低温側伝熱部材17と高温側伝熱部材18との接続部(端部47の孔24または穴25と凸部43)の接触面の接触熱抵抗をより一層低減することができる。 (4) The convex portion 43 of the high-temperature side heat transfer member 18 in the second heat transfer member 42 is made of pure copper, and the end portion 47 of the low-temperature side heat transfer member 17 is made of pure aluminum, which has a larger thermal expansion coefficient (thermal contraction coefficient) than pure copper. Therefore, when the convex portion 43 is fitted into the hole 24 or hole 25 of the end portion 47, the pressure due to thermal stress on the contact surface between the hole 24 or hole 25 and the convex portion 43 is larger due to thermal contraction of the end portion 47 made of pure aluminum when the second heat transfer member 42 is cooled by operating the cryogenic refrigerator 12 than when the low-temperature side heat transfer member 17 and the high-temperature side heat transfer member 18 are connected to manufacture the second heat transfer member 42 at room temperature. As a result, when the cryogenic refrigerator 12 is operating, the contact thermal resistance of the contact surface of the connection portion between the low-temperature side heat transfer member 17 and the high-temperature side heat transfer member 18 in the second heat transfer member 42 (the hole 24 or hole 25 and the convex portion 43 of the end portion 47) can be further reduced.

以上、本発明のいくつかの実施形態を説明したが、これらの実施形態は、例として提示したものであり、発明の範囲を限定することは意図していない。これらの実施形態は、その他の様々な形態で実施されることが可能であり、発明の要旨を逸脱しない範囲で、種々の省略、置き換え、変更、組み合わせを行うことができ、また、それらの置き換えや変更、組み合わせは、発明の範囲や要旨に含まれると共に、特許請求の範囲に記載された発明とその均等の範囲に含まれる。 Although several embodiments of the present invention have been described above, these embodiments are presented as examples and are not intended to limit the scope of the invention. These embodiments can be implemented in various other forms, and various omissions, substitutions, changes, and combinations can be made without departing from the gist of the invention. Furthermore, such substitutions, changes, and combinations are included in the scope and gist of the invention, and are included in the scope of the invention and its equivalents described in the claims.

10…極低温装置、11…超電導コイル(被冷却物)、12…極低温冷凍機、13…真空容器、14…熱シールド(被冷却物)、15…第1伝熱部材、16…第2伝熱部材、17…低温側伝熱部材、18…高温側伝熱部材、23…凸部、24…孔(凹部)、25…穴(凹部)、27…端部、30…極低温装置、32…第2伝熱部材、33…金属メッキ層、40…極低温装置、42…第2伝熱部材、43…凸部、47…端部 10... cryogenic device, 11... superconducting coil (object to be cooled), 12... cryogenic refrigerator, 13... vacuum vessel, 14... heat shield (object to be cooled), 15... first heat transfer member, 16... second heat transfer member, 17... low-temperature side heat transfer member, 18... high-temperature side heat transfer member, 23... convex portion, 24... hole (recess), 25... hole (recess), 27... end, 30... cryogenic device, 32... second heat transfer member, 33... metal plating layer, 40... cryogenic device, 42... second heat transfer member, 43... convex portion, 47... end

Claims (5)

極低温冷凍機により被冷却物を、伝熱部材を介して極低温に伝導冷却する極低温装置の伝熱部材接続構造において、
前記伝熱部材が、前記極低温冷凍機に接続される低温側伝熱部材と、前記被冷却物に接続される高温側伝熱部材とを有してなり、
前記高温側伝熱部材と前記低温側伝熱部材の一方に凸部が、他方の端部に、前記凸部の形状に沿う形状の凹部がそれぞれ形成され、
製造時における前記高温側伝熱部材と前記低温側伝熱部材の同一温度条件下で、前記凹部の内径が前記凸部の外径以下に設定され、
前記凸部を前記凹部に加熱または冷却により嵌合させることで、前記高温側伝熱部材と前記低温側伝熱部材とを接続させるよう構成されたことを特徴とする極低温装置の伝熱部材接続構造。
A heat transfer member connection structure for a cryogenic device that conductively cools an object to a cryogenic temperature via a heat transfer member using a cryogenic refrigerator,
the heat transfer member includes a low-temperature side heat transfer member connected to the cryogenic refrigerator and a high-temperature side heat transfer member connected to the object to be cooled,
a convex portion is formed on one end of the high-temperature side heat transfer member and the low-temperature side heat transfer member, and a concave portion having a shape that conforms to the shape of the convex portion is formed on an end of the other end of the high-temperature side heat transfer member and the low-temperature side heat transfer member,
an inner diameter of the recess is set to be equal to or smaller than an outer diameter of the protrusion under the same temperature condition of the high-temperature side heat transfer member and the low-temperature side heat transfer member during manufacture;
A heat transfer member connection structure for a cryogenic device, characterized in that the high-temperature side heat transfer member and the low-temperature side heat transfer member are connected by fitting the convex portion into the concave portion by heating or cooling.
前記凸部と、前記凹部が形成された端部との少なくとも一方が、純アルミニウムまたは純銅にて構成されたことを特徴とする請求項1に記載の極低温装置の伝熱部材接続構造。 The heat transfer member connection structure for a cryogenic device according to claim 1, characterized in that at least one of the protrusion and the end where the recess is formed is made of pure aluminum or pure copper. 前記凸部の外周面と前記凹部の内周面との少なくとも一部に、モース硬度2.9未満の金属のメッキ層が設けられたことを特徴とする請求項1または2に記載の極低温装置の伝熱部材接続構造。 The heat transfer member connection structure for a cryogenic device according to claim 1 or 2, characterized in that a plating layer of a metal having a Mohs hardness of less than 2.9 is provided on at least a portion of the outer peripheral surface of the protrusion and the inner peripheral surface of the recess. 前記凸部が純銅にて構成され、前記凹部が形成された端部が純アルミニウムにて構成されたことを特徴とする請求項1に記載の極低温装置の伝熱部材接続構造。 The heat transfer member connection structure for a cryogenic device according to claim 1, characterized in that the protrusion is made of pure copper, and the end portion where the recess is formed is made of pure aluminum. 極低温冷凍機と、
請求項1または4に記載の極低温装置の伝熱部材接続構造が適用されて構成されて、前記極低温冷凍機と被冷却物とを熱的に接続する伝熱部材と、
前記極低温冷凍機、前記被冷却物及び前記伝熱部材を格納する真空容器と、を有して構成されたことを特徴とする極低温装置。
A cryogenic refrigerator,
A heat transfer member that is configured by applying the heat transfer member connection structure for a cryogenic device according to claim 1 or 4 and thermally connects the cryogenic refrigerator and an object to be cooled;
a vacuum vessel for accommodating the cryogenic refrigerator, the object to be cooled, and the heat transfer member,
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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02292875A (en) * 1989-05-02 1990-12-04 Sumitomo Electric Ind Ltd Support structure for cryogenic components
US20080155995A1 (en) * 2004-05-25 2008-07-03 Siemens Magnet Technology Ltd. Reduction of Cryogen Loss During Transportation
JP2011007129A (en) * 2009-06-26 2011-01-13 National Maritime Research Institute Cold stirling engine and method for manufacturing cold stirling engine
JP2012032125A (en) * 2010-08-03 2012-02-16 Hitachi Ltd Cryogenic refrigeration coupling structure
JP2022012108A (en) * 2020-07-01 2022-01-17 株式会社東芝 Refrigeration unit and superconducting magnet device
JP2022071417A (en) * 2020-10-28 2022-05-16 住友重機械工業株式会社 Manufacturing method of heat transfer structure, ultra-low temperature device, and heat transfer structure

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02292875A (en) * 1989-05-02 1990-12-04 Sumitomo Electric Ind Ltd Support structure for cryogenic components
US20080155995A1 (en) * 2004-05-25 2008-07-03 Siemens Magnet Technology Ltd. Reduction of Cryogen Loss During Transportation
JP2011007129A (en) * 2009-06-26 2011-01-13 National Maritime Research Institute Cold stirling engine and method for manufacturing cold stirling engine
JP2012032125A (en) * 2010-08-03 2012-02-16 Hitachi Ltd Cryogenic refrigeration coupling structure
JP2022012108A (en) * 2020-07-01 2022-01-17 株式会社東芝 Refrigeration unit and superconducting magnet device
JP2022071417A (en) * 2020-10-28 2022-05-16 住友重機械工業株式会社 Manufacturing method of heat transfer structure, ultra-low temperature device, and heat transfer structure

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