JP2024041693A - Co-Mn-Ga ALLOY POWDER, CONDUCTIVE MOLDING, MANUFACTURING METHOD THEREOF, AND THERMOELECTRIC CONVERSION ELEMENT - Google Patents
Co-Mn-Ga ALLOY POWDER, CONDUCTIVE MOLDING, MANUFACTURING METHOD THEREOF, AND THERMOELECTRIC CONVERSION ELEMENT Download PDFInfo
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Abstract
Description
本発明は、熱電変換素子の素材として有用なCo-Mn-Ga系合金粉体、およびその製造方法に関する。また本発明は、Co-Mn-Ga系合金粉体の導電成形体、その製造方法、および上記導電成形体を用いた熱電変換素子に関する。 The present invention relates to a Co--Mn--Ga based alloy powder useful as a material for thermoelectric conversion elements, and a method for producing the same. The present invention also relates to a conductive molded body of Co--Mn--Ga based alloy powder, a method for manufacturing the same, and a thermoelectric conversion element using the conductive molded body.
近年、異常ネルンスト効果を利用した熱電変換素子の研究が進められている。異常ネルンスト効果は、自発的に磁化している磁性体に磁化と直交する向きの熱流を付与したとき、磁化と熱流の双方に垂直な方向の起電力が生じる現象である。異常ネルンスト効果を利用すると熱流と直角方向に電流が取り出せるため、ゼーベック効果を利用する場合とは異なり、薄くシート化した熱電変換デバイスが構築できるといったメリットが得られる。 In recent years, research on thermoelectric conversion elements that utilize the anomalous Nernst effect has been progressing. The anomalous Nernst effect is a phenomenon in which when a spontaneously magnetized magnetic material is subjected to a heat flow in a direction perpendicular to the magnetization, an electromotive force is generated in a direction perpendicular to both the magnetization and the heat flow. Using the anomalous Nernst effect allows current to be extracted in a direction perpendicular to the heat flow, which has the advantage of being able to construct thin thermoelectric conversion devices, unlike when using the Seebeck effect.
常温で大きい異常ネルンスト効果を示す物質として、強磁性金属間化合物Co2MnGaが知られている。 The ferromagnetic intermetallic compound Co 2 MnGa is known as a material that exhibits a large anomalous Nernst effect at room temperature.
特許文献1には、チョクラルスキー法によってCo2MnGa単結晶を作製し、異常ネルンスト係数を測定した実験例が記載されている。Co2MnGa単結晶の室温(300K)でのネルンスト係数は、磁場の付与方向が結晶の[100]、[110]、[111]方向のいずれに平行な場合も、6μV/K程度の高い値に達している(段落0021、図4)。
特許文献2には、熱流センサと温度センサを有する複合センサにおいて、その熱流センサに異常ネルンスト材料膜を使用することが記載されている。異常ネルンスト材料としていくつかの物質が列挙されており、その1つとしてCo2MnGaの記載がある(段落0026)。異常ネルンスト材料膜の成膜方法としてスパッタ法が示されている(段落0030)。
熱電変換素子の主な用途として、熱電発電デバイスおよび熱流センサが挙げられる。 Main applications of thermoelectric conversion elements include thermoelectric power generation devices and heat flow sensors.
熱電発電デバイスを実現するための熱電変換素子は、厚さ数ミリメートル程度のバルク体であることが望ましい。チョクラルスキー法による単結晶体を用いると、上記のようなサイズのバルク体を作製することは可能である。しかし、チョクラルスキー法などの単結晶製造技術はコストが高く生産性が低いので、熱電発電デバイス用素材の工業的生産においては実用的ではない。一方、スパッタ法などの成膜技術を、熱電発電デバイス用のバルク素材の工業的生産に適用することは困難である。 A thermoelectric conversion element for realizing a thermoelectric power generation device is preferably a bulk body with a thickness of several millimeters. By using a single crystal body using the Czochralski method, it is possible to produce a bulk body of the size described above. However, single crystal manufacturing techniques such as the Czochralski method are expensive and have low productivity, so they are not practical for industrial production of materials for thermoelectric power generation devices. On the other hand, it is difficult to apply film formation techniques such as sputtering to the industrial production of bulk materials for thermoelectric power generation devices.
熱流センサを実現するための熱電変換素子は、微小な回路パターンの一部に組み込んで使用することを考慮すると、小サイズの素子であることが望まれる。小サイズの素子を、チョクラルスキー法などで得られる単結晶体から多数切り出すことは、コスト面で工業的に実用化することが難しい。また、所定形状の小サイズ素子をチョクラルスキー法で直接形成させることも困難である。一方、スパッタ法などの成膜技術によれば、所定の回路パターンに応じた小サイズの素子を絶縁基板上に直接形成させることは可能である。しかし、そのような成膜方法は生産性が低く、熱流センサの製造コストは高くなる。 Considering that a thermoelectric conversion element for realizing a heat flow sensor is used by being incorporated into a part of a minute circuit pattern, it is desired that the thermoelectric conversion element be a small-sized element. Cutting out a large number of small-sized elements from a single crystal obtained by the Czochralski method or the like is difficult to put into practical use industrially due to cost considerations. Furthermore, it is difficult to directly form small-sized elements with a predetermined shape using the Czochralski method. On the other hand, according to film forming techniques such as sputtering, it is possible to directly form small-sized elements according to a predetermined circuit pattern on an insulating substrate. However, such a film forming method has low productivity and increases the manufacturing cost of the heat flow sensor.
本出願人は、チョクラルスキー法やスパッタ法などに代わるCo2MnGa結晶の合成手法として、Co-Mn-Ga系合金の溶湯を凝固させて金属間化合物Co2MnGaを主成分とする合金塊を溶製する手法を採用し、その合金塊を粉砕、分級することにより所定粒度分布のCo-Mn-Ga系合金粉体を得る技術を、特願2021-103682号として開示した。この技術で得られるCo-Mn-Ga系合金粉体は種々の形状の導電成形体に加工でき、その導電成形体は常温で高いネルンスト係数を呈することが確認された。しかし、この技術では、合金塊を粉体化させるために粉砕の工程が必要となり、所定粒度分布の粉体製品を得るためには分級の工程が必須となる。粉砕工程は、量産化を意図した場合にはサイズの大きい合金塊を多量に砕く設備が必要となり、製造負荷を押し上げる要因となる。また、粉砕によって粉体化すると、角張った形状の粒子が生成する。そのため、粉砕によって粉体化した粒子で構成される粉体は、粒子の充填性に関して場所的なバラツキの少ない均質性の高い導電成形体を生産性良く製造するという観点では、不利となる。 The present applicant has developed an alloy lump containing the intermetallic compound Co 2 MnGa as a main component by solidifying a molten Co-Mn-Ga alloy as a method for synthesizing Co 2 MnGa crystals in place of the Czochralski method or sputtering method. Japanese Patent Application No. 2021-103682 discloses a technique for obtaining Co--Mn--Ga based alloy powder with a predetermined particle size distribution by adopting a method of melting and pulverizing and classifying the alloy ingot. It was confirmed that the Co--Mn--Ga based alloy powder obtained by this technique can be processed into conductive molded bodies of various shapes, and that the conductive molded bodies exhibit a high Nernst coefficient at room temperature. However, this technique requires a pulverization process to powderize the alloy ingot, and a classification process is essential in order to obtain a powder product with a predetermined particle size distribution. In the crushing process, if mass production is intended, equipment for crushing a large amount of large alloy ingots is required, which increases the manufacturing load. Furthermore, when it is pulverized into powder, angular shaped particles are produced. Therefore, a powder composed of particles pulverized by pulverization is disadvantageous from the viewpoint of producing a highly homogeneous conductive molded body with good productivity with little local variation in the filling properties of the particles.
本発明は、異常ネルンスト効果を利用した、高いネルンスト係数が得られる熱電変換素子を、生産性良く製造するために適した技術であって、特に種々の形状、サイズの素子の製造に幅広く対応でき、かつ均質性の高い素子を生産性良く得る上でも有利な技術の提供を目的とする。また、その技術を用いて得られるネルンスト係数の高い熱電変換素子の提供を目的とする。 The present invention is a technology suitable for manufacturing thermoelectric conversion elements with high productivity that utilizes the anomalous Nernst effect and can obtain a high Nernst coefficient, and is particularly applicable to a wide range of manufacturing of elements of various shapes and sizes. The purpose of the present invention is to provide a technology that is advantageous in obtaining highly homogeneous devices with good productivity. Another object of the present invention is to provide a thermoelectric conversion element with a high Nernst coefficient obtained using the technique.
上記目的を達成するために、本明細書では以下の発明を開示する。 In order to achieve the above object, the following invention is disclosed in this specification.
[1]金属間化合物Co2MnGaを主成分とする粉体であって、レーザー回折・散乱法による体積基準の粒度分布において、累積50%粒子径D50が1~150μm、累積90%粒子径D90が250μm以下であり、粉体を構成する粒子の平均円形度が0.80以上であるCo-Mn-Ga系合金粉体。
ここで、平均円形度は、SEM(走査型電子顕微鏡)画像から下記(1)式により求まる各粒子の円形度についての相加平均に相当する。
円形度=4πS/L2 …(1)
ただし、Sは当該粒子の画像上の面積(μm2)、Lは当該粒子の画像上の周囲長(μm)である。
[2]不活性ガス雰囲気の気相空間中で、Co-Mn-Ga系合金の金属溶湯に不活性ガスの気流を吹き付けることにより前記溶湯の粒子を急冷凝固させるガスアトマイズ法によって、金属間化合物Co2MnGaを主成分とする金属粒子を合成する金属粒子合成工程、
を有する上記[1]に記載のCo-Mn-Ga系合金粉体の製造方法。
[3]不活性ガス雰囲気の気相空間中で、Co-Mn-Ga系合金の金属溶湯に不活性ガスの気流を吹き付けることにより前記溶湯の粒子を急冷凝固させるガスアトマイズ法によって、金属間化合物Co2MnGaを主成分とする金属粒子を合成する金属粒子合成工程、
前記金属粒子からなる粉体から一部の粒子を除去することにより粒度分布を調整する分級工程、
を有する上記[1]に記載のCo-Mn-Ga系合金粉体の製造方法。
[4]前記Co-Mn-Ga系合金の金属溶湯は、Co、MnおよびGaを溶融させて合金化したのち凝固させて得られたCo-Mn-Ga系母合金を用いて形成させたものである、上記[2]または[3]に記載のCo-Mn-Ga系合金粉体の製造方法。
[5]上記[1]に記載のCo-Mn-Ga系合金粉体の導電成形体。
[6]上記[1]に記載のCo-Mn-Ga系合金粉体の焼結体からなる導電成形体。
[7]温度300Kにおいて5.5μV/K以上のネルンスト係数を呈する上記[5]または[6]に記載の導電成形体。
[8]上記[1]に記載のCo-Mn-Ga系合金粉体を焼結させることにより導電成形体を得る焼結工程、を有する導電成形体の製造方法。
[9]上記[5]または[6]に記載の導電成形体を用いた熱電変換素子。
[10]上記[7]に記載の導電成形体を用いた熱電変換素子。
[1] Powder mainly composed of intermetallic compound Co 2 MnGa, which has a cumulative 50% particle diameter D50 of 1 to 150 μm and a cumulative 90% particle diameter D90 in volume-based particle size distribution determined by laser diffraction/scattering method. is 250 μm or less, and the average circularity of the particles constituting the powder is 0.80 or more.
Here, the average circularity corresponds to the arithmetic mean of the circularity of each particle determined from the following equation (1) from a SEM (scanning electron microscope) image.
Circularity = 4πS/L 2 ...(1)
However, S is the area (μm 2 ) of the particle on the image, and L is the circumference length (μm) of the particle on the image.
[2] The intermetallic compound Co is produced by a gas atomization method in which particles of the molten metal are rapidly solidified by spraying a stream of inert gas onto the molten metal of Co-Mn-Ga based alloy in a gas phase space with an inert gas atmosphere. 2. Metal particle synthesis step of synthesizing metal particles containing MnGa as a main component,
The method for producing a Co--Mn--Ga based alloy powder according to [1] above.
[3] The intermetallic compound Co is produced by a gas atomization method in which particles of the molten metal are rapidly solidified by spraying a stream of inert gas onto the molten metal of a Co-Mn-Ga alloy in a gas phase space in an inert gas atmosphere. 2. Metal particle synthesis step of synthesizing metal particles containing MnGa as a main component,
a classification step of adjusting the particle size distribution by removing some particles from the powder made of the metal particles;
The method for producing a Co--Mn--Ga based alloy powder according to [1] above.
[4] The molten metal of the Co-Mn-Ga-based alloy is formed using a Co-Mn-Ga-based master alloy obtained by melting Co, Mn, and Ga, alloying them, and then solidifying them. The method for producing a Co--Mn--Ga based alloy powder according to [2] or [3] above.
[5] A conductive molded body of Co--Mn--Ga alloy powder according to [1] above.
[6] A conductive molded body made of a sintered body of the Co--Mn--Ga alloy powder described in [1] above.
[7] The conductive molded article according to [5] or [6] above, which exhibits a Nernst coefficient of 5.5 μV/K or more at a temperature of 300K.
[8] A method for producing a conductive molded body, comprising a sintering step of obtaining a conductive molded body by sintering the Co-Mn-Ga alloy powder described in [1] above.
[9] A thermoelectric conversion element using the conductive molded body according to [5] or [6] above.
[10] A thermoelectric conversion element using the conductive molded body according to [7] above.
本発明によれば、ネルンスト係数の高い熱電変換素子を得ることができる。その熱電変換素子に用いる材料は粉体であるため、本発明の技術は、種々の形状、サイズの素子に幅広く対応することができる。その粉体は球状粒子で構成されるため、均質性の高い素子を生産性良く製造する上で有利である。また、本発明の技術は、単結晶やスパッタ法による薄膜を用いた従来の技術と比べ、コストおよび生産性の面で優れる。 According to the present invention, a thermoelectric conversion element with a high Nernst coefficient can be obtained. Since the material used for the thermoelectric conversion element is powder, the technology of the present invention can be widely applied to elements of various shapes and sizes. Since the powder is composed of spherical particles, it is advantageous in manufacturing highly homogeneous devices with good productivity. Furthermore, the technique of the present invention is superior in terms of cost and productivity compared to conventional techniques using single crystals or thin films formed by sputtering.
[Co-Mn-Ga系合金粉体]
本発明では熱電変換素子に適した材料として金属間化合物Co2MnGaを主成分とするCo-Mn-Ga系合金粉体を対象とする。Co2MnGaはL21結晶構造を持つホイスラー合金の1種である。この金属間化合物はワイル強磁性体であり、常温付近でのネルンスト係数が6μV/K程度に達し、大きい異常ネルンスト効果を発現する物質であることが知られている。
[Co-Mn-Ga alloy powder]
The present invention targets Co--Mn--Ga based alloy powder containing the intermetallic compound Co 2 MnGa as a main component as a material suitable for thermoelectric conversion elements. Co 2 MnGa is a type of Heusler alloy having an L2 1 crystal structure. This intermetallic compound is a Weyl ferromagnetic material, and is known to have a Nernst coefficient of about 6 μV/K near room temperature, and is a substance that exhibits a large anomalous Nernst effect.
Co、Mn、Gaの組成比がCo2MnGaの化学量論組成に近い一定の組成域において、Co2MnGa型の結晶構造を持つ金属間化合物が単相として安定に存在し得る。その組成域の周辺ではCo2MnGa型の結晶構造を持つ金属間化合物相と異相とが混在したCo-Mn-Ga系合金が得られると考えられる。本明細書では、Co-Mn-Ga系3元合金において、Co2MnGa型(すなわちL21)結晶構造を持つ金属間化合物相を「金属間化合物Co2MnGa」、あるいは単に「Co2MnGa相」と呼んでいる。Co2MnGaの化学量論組成から少しずれた組成比の金属間化合物であっても、Co2MnGa型結晶構造を持つものは、本明細書でいう「金属間化合物Co2MnGa」に含まれる。 In a certain composition range where the composition ratio of Co, Mn, and Ga is close to the stoichiometric composition of Co 2 MnGa, an intermetallic compound having a Co 2 MnGa type crystal structure can stably exist as a single phase. It is thought that a Co--Mn--Ga based alloy containing an intermetallic compound phase having a Co 2 MnGa type crystal structure and a different phase is obtained around this composition range. In this specification, an intermetallic compound phase having a Co 2 MnGa type (i.e. L2 1 ) crystal structure in a Co-Mn-Ga ternary alloy is referred to as an "intermetallic compound Co 2 MnGa" or simply a "Co 2 MnGa phase". ” is called. Even if the intermetallic compound has a composition ratio slightly different from the stoichiometric composition of Co 2 MnGa, those having a Co 2 MnGa type crystal structure are included in the "intermetallic compound Co 2 MnGa" referred to in this specification. .
「金属間化合物Co2MnGaを主成分とする」とは、粉体に含まれる金属相のうち、質量割合が最も多い金属相がCo2MnGa相であることを意味する。Co-Mn-Ga系合金粉体を用いた熱電変換素子において、Co2MnGa相以外の異相が含まれていても、Co2MnGa相の異常ネルンスト効果による熱電変換作用は生じる。しかし、効率の良い熱電変換特性を実現するためには、異常ネルンスト効果を示さない異相の存在量は少ないことが望ましい。例えば、粉体に占めるCo2MnGa相の割合は50質量%以上であることが好ましく、90質量%以上であることがより好ましい。また、金属間化合物Co2MnGaからなる粉体、すなわち、金属間化合物Co2MnGa以外は不可避的不純物である粉体が特に好ましい。 "Containing the intermetallic compound Co 2 MnGa as a main component" means that among the metal phases contained in the powder, the metal phase having the largest mass proportion is the Co 2 MnGa phase. In a thermoelectric conversion element using Co--Mn--Ga based alloy powder, even if a different phase other than the Co 2 MnGa phase is contained, a thermoelectric conversion effect occurs due to the abnormal Nernst effect of the Co 2 MnGa phase. However, in order to realize efficient thermoelectric conversion characteristics, it is desirable that the amount of foreign phases that do not exhibit the anomalous Nernst effect be small. For example, the proportion of the Co 2 MnGa phase in the powder is preferably 50% by mass or more, more preferably 90% by mass or more. Particularly preferred is a powder made of the intermetallic compound Co 2 MnGa, ie, a powder in which components other than the intermetallic compound Co 2 MnGa are unavoidable impurities.
本発明のCo-Mn-Ga系合金粉体を構成する粒子の粒度分布は、レーザー回折・散乱法による体積基準の粒度分布において、累積50%粒子径D50が1~150μm、累積90%粒子径D90が250μm以下の範囲とする。累積50%粒子径D50が大きすぎる場合は、平均粒子径が大きくなるため、保磁力の低下につながる。累積90%粒子径D90が大きすぎる場合は、粗大粒子の存在割合が大きくなるため、この場合も保磁力の低下につながる。保磁力を確保する観点からは、累積50%粒子径D50が100μm以下であることが好ましく、60μm以下であることがより好ましい。 The particle size distribution of the particles constituting the Co-Mn-Ga alloy powder of the present invention is determined by the volume-based particle size distribution by laser diffraction/scattering method, with a cumulative 50% particle diameter D50 of 1 to 150 μm and a cumulative 90% particle diameter. D90 is in the range of 250 μm or less. If the cumulative 50% particle diameter D50 is too large, the average particle diameter becomes large, leading to a decrease in coercive force. If the cumulative 90% particle diameter D90 is too large, the proportion of coarse particles present increases, which also leads to a decrease in coercive force. From the viewpoint of ensuring coercive force, the cumulative 50% particle diameter D50 is preferably 100 μm or less, more preferably 60 μm or less.
本発明のCo-Mn-Ga系合金粉体は、球状粒子で構成される。具体的には、粉体を構成する粒子の平均円形度が0.80以上であるCo-Mn-Ga系合金粉体を対象とする。平均円形度がこのように高い粉体を適用することによって、後述する導電成形体を製造する工程で粉体を成形型に装填する際の装填作業性が、角張った形状の粒子からなる粉体と比べ、大幅に改善される。また、場所的な充填密度の変動が小さい、均質性の高い導電成形体を得る上で有利となる。導電成形体の均質性の向上は、ネルンスト係数に代表される素子の特性に関して製品間でのバラツキが少ない、安定した所期性能を呈するデバイスを構築する上で極めて有効である。さらに、粉体をフィラーとする塗工液(ペーストを含む)を作製する場合にも、平均円形度の高い粉体を使用することは、媒体中での粒子の分散性を改善する上で有効である。平均円形度は0.85以上であることがより好ましい。平均円形度が高いCo-Mn-Ga系合金粉体は、ガスアトマイズ法を用いた金属粒子合成工程を採用することによって実現できる。平均円形度は以下のようにして求めることができる。 The Co--Mn--Ga based alloy powder of the present invention is composed of spherical particles. Specifically, the target is a Co--Mn--Ga based alloy powder in which the average circularity of the particles constituting the powder is 0.80 or more. By applying a powder with such a high average circularity, loading workability when loading the powder into a mold in the process of manufacturing a conductive molded body, which will be described later, is improved by using a powder consisting of angularly shaped particles. It is greatly improved compared to . Moreover, it is advantageous in obtaining a highly homogeneous conductive molded body with small local variations in packing density. Improving the homogeneity of a conductive molded body is extremely effective in constructing a device that exhibits stable and desired performance with little variation among products in terms of element characteristics represented by the Nernst coefficient. Furthermore, when creating coating liquids (including pastes) that use powder as a filler, using powder with a high average circularity is effective in improving the dispersibility of particles in the medium. It is. More preferably, the average circularity is 0.85 or more. A Co--Mn--Ga based alloy powder with a high average circularity can be realized by employing a metal particle synthesis process using a gas atomization method. The average circularity can be determined as follows.
(平均円形度の求め方)
測定対象である粉体のSEM(走査型電子顕微鏡)観察を行い、無作為に選択した視野についてのSEM画像において、粒子の輪郭の全体が把握できる全ての粒子を測定対象粒子とする。各測定対象粒子について、下記(1)式により円形度を求める。
円形度=4πS/L2 …(1)
ここで、Sは当該粒子の画像上の面積(μm2)、Lは当該粒子の画像上の周囲長(μm)である。
上記円形度の測定を、測定対象粒子の総数が50個以上となるように、無作為に選んだ1つまたは複数の視野についてのSEM画像で行い、個々の粒子の上記円形度の総和を測定対象粒子の総数で除した値を、当該粉体を構成する粒子の平均円形度とする。なお、上記(1)式により定まる円形度の値は、真円である場合の1が最大となる。
(How to find average circularity)
The powder to be measured is observed using a scanning electron microscope (SEM), and all particles whose entire contours can be grasped in the SEM image of a randomly selected field of view are defined as particles to be measured. For each particle to be measured, the degree of circularity is determined using the following equation (1).
Circularity = 4πS/L 2 ...(1)
Here, S is the area (μm 2 ) of the particle on the image, and L is the circumference length (μm) of the particle on the image.
The circularity is measured using SEM images of one or more randomly selected fields of view such that the total number of particles to be measured is 50 or more, and the sum of the circularity of each particle is measured. The value divided by the total number of target particles is defined as the average circularity of the particles constituting the powder. Note that the circularity value determined by the above equation (1) has a maximum value of 1 when it is a perfect circle.
本発明のCo-Mn-Ga系合金粉体を構成する金属粒子は、ガスアトマイズ法を利用した「金属粒子合成工程」によって得ることができる。そのガスアトマイズ法は例えば以下のようにして実施できる。原料金属を溶解炉で溶融させてCo-Mn-Ga系合金の溶湯を形成させ、その溶湯を、必要に応じて非酸化性雰囲気下に置かれたタンディッシュ内に一旦収容したのち、例えばオリフィスを備える出湯ノズルから、Ar、N2等の不活性ガス雰囲気の気相空間に吐出させる。気相空間への吐出は、重力や加圧ガスによる押し出し力を利用して行うことができる。溶湯の吐出流は通常、液滴状あるいは紐状に流下させる。気相空間に出た流下中の金属溶湯に、Ar、N2等の不活性ガスを高圧で吹き付け、溶湯を粒子化させる。溶湯の粒子は気相中で急冷凝固し、金属間化合物Co2MnGaを主成分とする球状粒子となる。出湯ノズルの形状、気相空間に吐出させる溶湯の単位時間あたりの流量、吹き付けるガスの流速などにより、得られる金属粒子の平均粒子径をコントロールすることができる。 The metal particles constituting the Co--Mn--Ga based alloy powder of the present invention can be obtained by a "metal particle synthesis step" using a gas atomization method. The gas atomization method can be carried out, for example, as follows. The raw metal is melted in a melting furnace to form a molten Co-Mn-Ga alloy, and the molten metal is temporarily stored in a tundish placed in a non-oxidizing atmosphere as necessary, and then placed in an orifice, for example. The hot water is discharged from a tap nozzle equipped with a hot water into a gas phase space having an atmosphere of an inert gas such as Ar or N2 . Discharging into the gas phase space can be performed using gravity or extrusion force by pressurized gas. The discharge flow of the molten metal is usually made to flow down in the form of droplets or strings. An inert gas such as Ar or N 2 is blown at high pressure onto the molten metal flowing down into the gas phase space to turn the molten metal into particles. The particles of the molten metal are rapidly solidified in the gas phase to become spherical particles containing the intermetallic compound Co 2 MnGa as a main component. The average particle diameter of the metal particles obtained can be controlled by the shape of the tapping nozzle, the flow rate per unit time of the molten metal discharged into the gas phase space, the flow rate of the gas to be blown, and the like.
ガスアトマイズ法で使用する原料金属としては、例えば、Co、MnおよびGaを溶融させて合金化したのち凝固させることによって予め作製したCo-Mn-Ga系母合金を用いることが好ましい。これにより、ガスアトマイズ法で得られる粉体の化学組成を、より正確に制御できる。Co-Mn-Ga系母合金の作製は、所定組成に秤量したCo、Mn、Gaの各原料金属をるつぼに入れ、非酸化性雰囲気中で加熱して溶融させ、得られた溶融金属をるつぼ中で冷却して凝固させる方法、または鋳型に鋳造して凝固させる方法で行うことができる。 As the raw material metal used in the gas atomization method, it is preferable to use, for example, a Co--Mn--Ga based mother alloy prepared in advance by melting Co, Mn, and Ga, alloying them, and then solidifying them. Thereby, the chemical composition of the powder obtained by the gas atomization method can be controlled more accurately. To produce a Co-Mn-Ga-based master alloy, Co, Mn, and Ga raw material metals weighed to a predetermined composition are placed in a crucible, heated and melted in a non-oxidizing atmosphere, and the resulting molten metal is placed in the crucible. This can be done by cooling and solidifying in a mold or by casting into a mold and solidifying.
ガスアトマイズ法を利用した金属粒子合成工程によって、上述の粒度分布および平均円形度を有するCo-Mn-Ga系合金粉体を直接得ることができるが、金属粒子合成工程の後に、篩などを用いて粒度分布を更に調整する「分級工程」を1回または複数回行ってもよい。 The metal particle synthesis process using the gas atomization method can directly produce Co-Mn-Ga alloy powder having the above-mentioned particle size distribution and average circularity, but after the metal particle synthesis process, a "classification process" may be carried out once or multiple times using a sieve or the like to further adjust the particle size distribution.
[導電成形体]
本明細書では、粉体を材料に用いて所定形状に成形され、使用環境においてその形状を維持できる定形性を備えた物体を、「粉体の成形体」と呼ぶ。特に、導電性を有する粉体の成形体を「粉体の導電成形体」と呼ぶ。上記のCo-Mn-Ga系合金粉体を材料に用いた、金属間化合物Co2MnGaを主成分とする粉体の導電成形体は、熱電変換素子として有用である。
[Conductive molded body]
In this specification, an object that is molded into a predetermined shape using powder as a material and has a fixed shape that can maintain its shape in a usage environment is referred to as a "powder molded object." In particular, a molded body of powder having conductivity is called a "conductive molded body of powder". A conductive molded body of powder containing the intermetallic compound Co 2 MnGa as a main component, using the above Co--Mn--Ga alloy powder as a material, is useful as a thermoelectric conversion element.
粉体の導電成形体の代表的な形態として、圧粉体、焼結体が挙げられる。圧粉体であっても、使用環境で定形性を維持できるようにしてデバイスに組み込むことにより、熱電変換素子として使用可能である。安定した定形性を確保するためには、焼結体が好ましい。 Typical forms of conductive powder compacts include pressed powder and sintered compacts. Even pressed powder can be used as a thermoelectric conversion element by incorporating it into a device in a way that allows it to maintain its shape in the usage environment. Sintered compacts are preferred to ensure stable shape.
粉体の導電成形体の、圧粉体、焼結体以外の形態としては、例えば樹脂等のバインダー成分により粉体を所定形状に固形化した成形体を挙げることができる。導電性のないバインダー成分を使用する場合は、粉体粒子同士が接触する状態で固形化させる必要がある。導電性を有するバインダー成分を使用する場合は、粉体粒子同士の接触は必須ではない。 Examples of forms of the conductive molded body of powder other than green compacts and sintered bodies include molded bodies obtained by solidifying powder into a predetermined shape with a binder component such as a resin. When using a non-conductive binder component, it is necessary to solidify the powder particles in a state where they are in contact with each other. When using a binder component having conductivity, contact between powder particles is not essential.
金属間化合物Co2MnGaを主成分とする粉体の導電成形体として、焼結体を適用する場合は、公知の「焼結工程」を利用して金属間化合物Co2MnGaを主成分とする粉体の焼結体を作製することができる。絶縁基板上に形成された回路パターンの一部または全部を、金属間化合物Co2MnGaを主成分とする粉体の導電成形体として使用する場合は、当該粉体をフィラーとする塗料により絶縁基板上に回路パターンの塗膜を形成したのち、その塗膜を加熱して焼結させる方法が適用できる。 When applying a sintered body as a conductive molded body of powder containing the intermetallic compound Co 2 MnGa as the main component, a known "sintering process" is used to form the intermetallic compound Co 2 MnGa as the main component. A sintered body of powder can be produced. When using part or all of a circuit pattern formed on an insulating substrate as a conductive molded body of powder containing intermetallic compound Co 2 MnGa as a main component, the insulating substrate is coated with a paint containing the powder as a filler. An applicable method is to form a coating film with a circuit pattern thereon and then heat and sinter the coating film.
熱電変換素子として利用するためには、温度300Kにおいて5.5μV/K以上、より好ましくは5.8μV/K以上のネルンスト係数を呈する粉体の導電成形体を構築することが好ましい。上述のガスアトマイズ法を利用した金属粒子合成工程によって得られるCo-Mn-Ga系合金粉体を使用すれば、特段の分級工程を行わなくても、上記のような高いネルンスト係数を呈する粉体の導電成形体を得ることが可能である。 In order to use it as a thermoelectric conversion element, it is preferable to construct a powder conductive molded body exhibiting a Nernst coefficient of 5.5 μV/K or more, more preferably 5.8 μV/K or more at a temperature of 300K. By using the Co-Mn-Ga based alloy powder obtained by the metal particle synthesis process using the gas atomization method described above, it is possible to produce powder exhibiting a high Nernst coefficient as described above without performing a special classification process. It is possible to obtain a conductive molded body.
[実施例1]
(Co-Mn-Ga系母合金の作製)
原料である金属Co(株式会社レアメタリック製、純度3N)、金属Mn(株式会社レアメタリック製、純度3N)および金属Ga(株式会社レアメタリック製、純度6N)を、原子比でCo:Mn:Ga=50:25:25となるように秤量してアルミナるつぼに入れた。このるつぼを縦型電気炉(シリコニット社製、高温縦型管状炉UVHT631K)に装入し、Arガス雰囲気下において、常温から1000℃まで4時間かけて昇温、1000℃から1250℃まで2時間かけて昇温、1250℃で12時間保持、その後、炉内で5時間放冷、というヒートパターンにより、Co-Mn-Ga系合金の溶融金属をるつぼ中で凝固させ、Co-Mn-Ga系母合金を得た。
[Example 1]
(Preparation of Co-Mn-Ga-based mother alloy)
The raw materials, metallic Co (made by Rare Metallic Co., Ltd., purity 3N), metallic Mn (made by Rare Metallic Co., Ltd., purity 3N), and metallic Ga (made by Rare Metallic Co., Ltd., purity 6N), were weighed to have an atomic ratio of Co:Mn:Ga = 50:25:25 and placed in an alumina crucible. The crucible was placed in a vertical electric furnace (manufactured by Siliconit Co., Ltd., high-temperature vertical tubular furnace UVHT631K), and in an Ar gas atmosphere, the molten metal of the Co-Mn-Ga alloy was solidified in the crucible by the following heat pattern: heating from room temperature to 1000°C over 4 hours, heating from 1000°C to 1250°C over 2 hours, holding at 1250°C for 12 hours, and then cooling in the furnace for 5 hours. Thus, a Co-Mn-Ga mother alloy was obtained.
(金属粒子の合成)
上記のCo-Mn-Ga系母合金を所定サイズに破砕したのち、ガスアトマイズ装置の溶解炉に投入してArガス雰囲気下で溶融させ金属溶湯を得た。その金属溶湯を、Arガス雰囲気下のタンディッシュに収容したのち、1.2mm径のオリフィスを備える出湯ノズルからArガス雰囲気の気相空間に吐出させた。気相空間に出た吐出中の溶湯に8MPaの加圧力でArガスを吹き付け、溶湯を粒子化させ、気相空間中で凝固させた。このようにしてCo-Mn-Ga系合金粉体を得た。このCo-Mn-Ga系合金粉体を「供試粉体」と呼ぶ。この供試粉体を以下の試験に供した。
(Synthesis of Metal Particles)
The above-mentioned Co-Mn-Ga-based mother alloy was crushed to a predetermined size, then charged into the melting furnace of a gas atomizer and melted under an Ar gas atmosphere to obtain a molten metal. The molten metal was placed in a tundish under an Ar gas atmosphere, and then discharged from a discharge nozzle equipped with an orifice having a diameter of 1.2 mm into a gas phase space of an Ar gas atmosphere. Ar gas was blown onto the molten metal discharged into the gas phase space with a pressure of 8 MPa, and the molten metal was granulated and solidified in the gas phase space. In this way, a Co-Mn-Ga-based alloy powder was obtained. This Co-Mn-Ga-based alloy powder is called the "test powder". This test powder was subjected to the following tests.
(X線回折パターンの測定)
上記の供試粉体について、X線回折装置(株式会社島津製作所製、XRD-6100 LabX)により、Cu-Kα線でのX線回折パターンを測定した。
図1に、そのX線回折パターンを例示する。当該供試粉体は、Co2MnGa型の結晶構造を有するものであることが確認された。Co2MnGa相以外の相は認められないことから、この供試粉体は「金属間化合物Co2MnGaを主成分とする粉体」に該当する。
(Measurement of X-ray diffraction pattern)
The X-ray diffraction pattern of the above sample powder using Cu-Kα rays was measured using an X-ray diffraction device (XRD-6100 LabX, manufactured by Shimadzu Corporation).
FIG. 1 illustrates the X-ray diffraction pattern. It was confirmed that the sample powder had a Co 2 MnGa type crystal structure. Since no phase other than the Co 2 MnGa phase was observed, this sample powder corresponds to "powder whose main component is the intermetallic compound Co 2 MnGa."
(粒度分布の測定)
上記の供試粉体について、乾式レーザー回折式粒度分布測定装置(Sympatec社製、HELOS/KR & RODOS)により、分散圧力1.7bar(0.17MPa)、焦点距離200mmのレンズを用いてレーザー回折・散乱法による体積基準の粒度分布を測定した。得られた粒度分布に基づき算出された累積10%粒子径D10は5.9μm、累積50%粒子径D50は22.1μm、累積90%粒子径D90は54.3μmであった。
(Measurement of particle size distribution)
The above sample powder was subjected to laser diffraction using a dry laser diffraction particle size distribution analyzer (manufactured by Sympatec, HELOS/KR & RODOS) at a dispersion pressure of 1.7 bar (0.17 MPa) and a lens with a focal length of 200 mm. - Volume-based particle size distribution was measured using a scattering method. The cumulative 10% particle diameter D10 calculated based on the obtained particle size distribution was 5.9 μm, the cumulative 50% particle diameter D50 was 22.1 μm, and the cumulative 90% particle diameter D90 was 54.3 μm.
(平均円形度の測定)
上掲の「平均円形度の求め方」に従い、供試粉体のSEM(走査型電子顕微鏡)画像に基づいて平均円形度を測定した。その結果、当該供試粉体の平均円形度は0.88であった。
図2に、供試粉体のSEM(走査型電子顕微鏡)写真を例示する。撮影条件は倍率500倍、加速電圧は15kVである。写真の下部に表示される白いスケールバーの長さが10μmに相当する。使用したSEMは、日本電子株式会社製、FE-SEM JSM-7200Fである。
(Measurement of average circularity)
The average circularity was measured based on the SEM (scanning electron microscope) image of the sample powder according to the above-mentioned "How to determine average circularity". As a result, the average circularity of the sample powder was 0.88.
FIG. 2 illustrates an SEM (scanning electron microscope) photograph of the sample powder. The photographing conditions were a magnification of 500 times and an accelerating voltage of 15 kV. The length of the white scale bar displayed at the bottom of the photo corresponds to 10 μm. The SEM used was FE-SEM JSM-7200F manufactured by JEOL Ltd.
(EDXによる粉体の組成分析)
上記の供試粉体について、SEMに付属のEDX(エネルギー分散型X線分析)装置(Oxford Instruments製、X-Max20)により組成分析を行ったところ、原子比でCo:Mn:Ga=49.2:27.9:22.9であった。
(Composition analysis of powder by EDX)
The composition of the above sample powder was analyzed using an EDX (energy dispersive X-ray analysis) device (manufactured by Oxford Instruments, X-Max20) attached to the SEM, and the atomic ratio was Co:Mn:Ga = 49. It was 2:27.9:22.9.
(導電成形体の作製)
上記の供試粉体を用いた焼結体を以下のように作製した。供試粉体約5.9gを、内径10mmの円筒形グラファイトセルのシリンダー中で上下のピストンにより90MPa(7.065kN)の圧力を付与した状態として、約1Paの真空雰囲気下で放電プラズマ焼結装置により加熱することによって、直径10mm、高さ約8mmの円柱形状の焼結体を得た。ヒートパターンは、650℃まで昇温、650℃で10分間保持、750℃まで昇温、750℃で10分間保持、放冷とした。
(Preparation of conductive molded body)
A sintered body using the above sample powder was produced as follows. Approximately 5.9 g of the sample powder was subjected to discharge plasma sintering in a vacuum atmosphere of approximately 1 Pa with a pressure of 90 MPa (7.065 kN) applied by upper and lower pistons in a cylinder of a cylindrical graphite cell with an inner diameter of 10 mm. By heating with an apparatus, a cylindrical sintered body with a diameter of 10 mm and a height of about 8 mm was obtained. The heat pattern was to raise the temperature to 650°C, hold at 650°C for 10 minutes, raise the temperature to 750°C, hold at 750°C for 10 minutes, and let it cool.
(異常ネルンスト効果の測定)
上記の導電成形体(焼結体)から、長さ(L1)8.269mm、幅(W)1.460mm、厚さ(H)0.624mmの直方体試料を切り出した。図3に、起電力測定用の端子、温度測定用のプローブ取り付け位置と、熱流、磁場の付与方向を模式的に示す。ネルンスト効果測定用試料1の対向する側面中央位置に、起電力測定用の端子2a、2bを導電性エポキシ接着剤で取り付け、電圧計で両端子間に生じる電圧(V)を測定できるようにした。この電圧は異常ネルンスト効果によって生じるものであるので、VANEと表示する。試料1の上面2箇所(符号31、32で示す位置)に5.0mmの間隔(L2)をあけて温度測定用プローブを導電性エポキシ接着剤で取り付けてその間の温度差ΔTをモニターできるようにし、Quantum Design社製、物理特性測定システムPPMS装置内で試料長手方向に熱流を生じさせながら、試料の厚さ方向に磁場を付与し、試料の幅方向両端の間に生じる起電力を室温(300K)において測定した。図3中の黒塗り矢印(符号4)が試料中の熱流方向を表す。温度T1およびT2が安定した後、試料に磁場を付与し、電圧VANE(V)を測定した。図3中の白抜き矢印(符号5)が磁場の方向を表す。磁場は3Tから-3T、-3Tから3Tの間で掃引した。
下記(2)式によりネルンスト係数SANE(μV/K)を求めた。
SANE(μV/K)=VANE(V)/W/ΔT(K)/L2 …(2)
ここで、
VANE:試料幅方向両端に生じる起電力(V)、
W:試料の幅方向長さ(mm)、
ΔT:温度プローブ取り付け位置2箇所の温度差(K)、
L2:2箇所の温度プローブ取り付け位置の試料長手方向距離(mm)、
である。
(Measurement of the anomalous Nernst effect)
A rectangular parallelepiped sample with a length ( L1 ) of 8.269 mm, a width (W) of 1.460 mm, and a thickness (H) of 0.624 mm was cut out from the conductive compact (sintered body). Figure 3 shows the positions of the terminals for measuring electromotive force and the probes for measuring temperature, as well as the directions of heat flow and magnetic field application.
The Nernst coefficient S ANE (μV/K) was calculated using the following formula (2).
SANE (μV/K)= VANE (V)/W/ΔT(K)/ L2 ... (2)
here,
V ANE : Electromotive force (V) generated at both ends of the sample in the width direction,
W: width of sample (mm),
ΔT: temperature difference between the two temperature probe mounting positions (K),
L2 : Distance in the longitudinal direction of the sample between the two temperature probe attachment positions (mm),
It is.
図4に、ネルンスト係数の測定結果を示す。温度300Kにおける到達ネルンスト係数は5.99μV/Kであった。このネルンスト係数は単結晶Co2MnGaにほぼ比肩するものである。
以上の結果を表1に示す。
FIG. 4 shows the measurement results of the Nernst coefficient. The Nernst coefficient reached at a temperature of 300K was 5.99 μV/K. This Nernst coefficient is almost comparable to that of single crystal Co 2 MnGa.
The above results are shown in Table 1.
[実施例2]
実施例1で得られたCo-Mn-Ga系合金粉体を、公称目開き9μmの篩いを用いて分級した。この分級工程で篩下に得られた粉体を本例の供試粉体とした。
この供試粉体の粒度分布を実施例1と同様の手法で測定したところ、累積10%粒子径D10は3.0μm、累積50%粒子径D50は5.4μm、累積90%粒子径D90は8.8μmであった。
図5に、本例供試粉体のSEM(走査型電子顕微鏡)写真を例示する。撮影条件は上述図2と同様である。
[Example 2]
The Co--Mn--Ga based alloy powder obtained in Example 1 was classified using a sieve with a nominal opening of 9 μm. The powder obtained under the sieve in this classification step was used as the test powder of this example.
When the particle size distribution of this sample powder was measured using the same method as in Example 1, the cumulative 10% particle diameter D10 was 3.0 μm, the cumulative 50% particle diameter D50 was 5.4 μm, and the cumulative 90% particle diameter D90 was It was 8.8 μm.
FIG. 5 illustrates an SEM (scanning electron microscope) photograph of the sample powder of this example. The photographing conditions are the same as those in FIG. 2 described above.
また、本例供試粉体について、実施例1と同様に平均円形度、組成分析および異常ネルンスト効果の測定を行った。その結果、平均円形度は0.87、組成は原子比でCo:Mn:Ga=49.1:28.3:22.6、温度300Kにおける到達ネルンスト係数は5.95μV/Kであった。
これらの結果を表1に示す。
Furthermore, the average circularity, compositional analysis, and abnormal Nernst effect were measured in the same manner as in Example 1 for the sample powder of this example. As a result, the average circularity was 0.87, the composition was Co:Mn:Ga=49.1:28.3:22.6 in atomic ratio, and the Nernst coefficient reached at a temperature of 300K was 5.95 μV/K.
These results are shown in Table 1.
1 ネルンスト効果測定用試料
2a、2b 起電力測定端子
31、32 測温位置
4 試料中の熱流方向
5 磁場の方向
1 Sample for
Claims (10)
ここで、平均円形度は、SEM(走査型電子顕微鏡)画像から下記(1)式により求まる各粒子の円形度についての相加平均に相当する。
円形度=4πS/L2 …(1)
ただし、Sは当該粒子の画像上の面積(μm2)、Lは当該粒子の画像上の周囲長(μm)である。 A powder whose main component is the intermetallic compound Co 2 MnGa, with a cumulative 50% particle diameter D50 of 1 to 150 μm and a cumulative 90% particle diameter D90 of 250 μm or less in a volume-based particle size distribution determined by laser diffraction/scattering method. Co--Mn--Ga based alloy powder, wherein the average circularity of the particles constituting the powder is 0.80 or more.
Here, the average circularity corresponds to the arithmetic mean of the circularity of each particle determined from the following equation (1) from a SEM (scanning electron microscope) image.
Circularity = 4πS/L 2 ...(1)
However, S is the area (μm 2 ) of the particle on the image, and L is the circumference length (μm) of the particle on the image.
を有する請求項1に記載のCo-Mn-Ga系合金粉体の製造方法。 The intermetallic compound Co 2 MnGa is produced by a gas atomization method in which particles of the molten metal are rapidly solidified by blowing an inert gas stream onto the molten metal of Co-Mn-Ga based alloy in a gas phase space with an inert gas atmosphere. A metal particle synthesis step of synthesizing metal particles as the main component;
The method for producing a Co--Mn--Ga based alloy powder according to claim 1.
前記金属粒子からなる粉体から一部の粒子を除去することにより粒度分布を調整する分級工程、
を有する請求項1に記載のCo-Mn-Ga系合金粉体の製造方法。 The intermetallic compound Co 2 MnGa is produced by a gas atomization method in which particles of the molten metal are rapidly solidified by blowing an inert gas stream onto the molten metal of Co-Mn-Ga based alloy in a gas phase space with an inert gas atmosphere. A metal particle synthesis step of synthesizing metal particles as the main component;
a classification step of adjusting the particle size distribution by removing some particles from the powder made of the metal particles;
The method for producing a Co--Mn--Ga based alloy powder according to claim 1.
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