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JP2023003295A - Capacitive electromagnetic flowmeter detector - Google Patents

Capacitive electromagnetic flowmeter detector Download PDF

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JP2023003295A
JP2023003295A JP2021104382A JP2021104382A JP2023003295A JP 2023003295 A JP2023003295 A JP 2023003295A JP 2021104382 A JP2021104382 A JP 2021104382A JP 2021104382 A JP2021104382 A JP 2021104382A JP 2023003295 A JP2023003295 A JP 2023003295A
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detector
electromagnetic flowmeter
fluid
capacitive electromagnetic
shield member
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萌 後藤
Moe Goto
悠一 林
Yuichi Hayashi
和年 岡本
Kazutoshi Okamoto
千菜 福川
China Fukukawa
耕司 高田
Koji Takada
宗幸 角田
Muneyuki Tsunoda
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Yokogawa Electric Corp
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Yokogawa Electric Corp
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Abstract

To provide a capacitive electromagnetic flowmeter detector capable of preventing noise from entering a detection circuit through a portion between an end face of a detector body and a fluid grounding member.SOLUTION: A capacitive electromagnetic flowmeter detector 1 is provided, comprising a detector body 7 having a flow channel 6a, a fluid grounding member 9 disposed to face an end face of the detector body 7, and a conductive shield member 5 sandwiched between the end face of the detector body 7 and the fluid grounding member 9.SELECTED DRAWING: Figure 1

Description

本開示は静電容量式電磁流量計用検出器に関する。 The present disclosure relates to detectors for capacitive electromagnetic flow meters.

2つの配管の間に配置されて流体の流量に対応する検出信号を生成する検出器と検出信号を流量に変換する変換器とを有する電磁流量計(例えば特許文献1~4参照)として、検出電極を流体に接触させない方式を採用する静電容量式電磁流量計(例えば特許文献1~2参照)が知られている。また、電磁流量計用検出器は、配管の端面と検出器本体の端面との間に流体に接するように配置される導電性部材であるアースリングなどと称される流体アース部材を有する場合がある(例えば特許文献4参照)。 As an electromagnetic flowmeter (see, for example, Patent Documents 1 to 4) having a detector that is arranged between two pipes and generates a detection signal corresponding to the flow rate of the fluid and a converter that converts the detection signal into a flow rate, detection A capacitive electromagnetic flowmeter that employs a system in which the electrodes are not brought into contact with the fluid is known (see Patent Documents 1 and 2, for example). In addition, the electromagnetic flowmeter detector may have a fluid ground member called an earth ring, which is a conductive member arranged between the end face of the pipe and the end face of the detector body so as to be in contact with the fluid. (See, for example, Patent Document 4).

特開2019-158579号公報JP 2019-158579 A 特開2019-158580号公報JP 2019-158580 A 特開2017-529545号公報JP 2017-529545 A 特開2002-277299号公報JP-A-2002-277299

静電容量式電磁流量計用検出器に流体アース部材を設ける場合には、電磁流量計の外部のノイズが検出器本体の端面と流体アース部材との間の部分を通して検出回路に侵入するのを抑制することが望ましい。 When a fluid grounding member is provided in the detector for a capacitance type electromagnetic flowmeter, external noise of the electromagnetic flowmeter shall be prevented from entering the detection circuit through the portion between the end face of the detector body and the fluid grounding member. Suppression is desirable.

本開示の目的は、ノイズが検出器本体の端面と流体アース部材との間の部分を通して検出回路に侵入するのを抑制することができる静電容量式電磁流量計用検出器を提供することにある。 An object of the present disclosure is to provide a detector for a capacitive electromagnetic flowmeter that can suppress noise from entering the detection circuit through the portion between the end face of the detector body and the fluid grounding member. be.

幾つかの実施形態に係る静電容量式電磁流量計用検出器は、流路を備える検出器本体と、前記検出器本体の端面に対向して配置される流体アース部材と、前記検出器本体の前記端面と前記流体アース部材の間に挟まれる導電性のシールド部材と、を有する静電容量式電磁流量計用検出器である。このような構成によれば、検出器本体の端面と流体アース部材との間の部分をシールド部材によって塞ぎ、電磁流量計の外部のノイズが当該部分を通して検出回路に侵入するのを抑制することができる。 A capacitive electromagnetic flowmeter detector according to some embodiments includes a detector body having a flow path, a fluid grounding member disposed facing an end face of the detector body, and the detector body and a conductive shield member sandwiched between the end face of the above and the fluid grounding member. According to such a configuration, the portion between the end surface of the detector body and the fluid grounding member is blocked by the shield member, and noise from the outside of the electromagnetic flowmeter can be suppressed from entering the detection circuit through this portion. can.

一実施形態において、静電容量式電磁流量計用検出器は、上記構成において、前記シールド部材の軸剛性が前記流体アース部材の軸剛性よりも小さい静電容量式電磁流量計用検出器である。このような構成によれば、検出器本体の端面と流体アース部材との間の部分をシールド部材によって塞ぎ易くすることができる。 In one embodiment, the capacitance-type electromagnetic flowmeter detector is a capacitance-type electromagnetic flowmeter detector having the above configuration, wherein the axial rigidity of the shield member is smaller than the axial rigidity of the fluid grounding member. . According to such a configuration, the portion between the end surface of the detector main body and the fluid grounding member can be easily covered with the shield member.

一実施形態において、静電容量式電磁流量計用検出器は、上記構成において、前記検出器本体の前記端面と前記流体アース部材の間に挟まれるガスケットを有する静電容量式電磁流量計用検出器である。このような構成によればガスケットによってシールすることができる。したがって、検出器本体の端面と流体アース部材との間の部分を通して流体が漏出するのを防止することができる。 In one embodiment, the capacitance-type electromagnetic flowmeter detector has a gasket sandwiched between the end face of the detector body and the fluid grounding member in the above configuration. It is a vessel. Such a configuration can be sealed with a gasket. Therefore, it is possible to prevent the fluid from leaking through the portion between the end face of the detector body and the fluid grounding member.

一実施形態において、静電容量式電磁流量計用検出器は、上記構成において、前記シールド部材の軸剛性が前記ガスケットの軸剛性よりも小さく、例えば前記ガスケットの軸剛性の1/10以下である静電容量式電磁流量計用検出器である。このような構成によれば、ガスケットの良好なシール性能を実現し易くすることができる。 In one embodiment, in the capacitive electromagnetic flowmeter detector having the above configuration, the axial rigidity of the shield member is smaller than the axial rigidity of the gasket, for example, 1/10 or less of the axial rigidity of the gasket. This is a detector for a capacitive electromagnetic flowmeter. According to such a configuration, it is possible to easily achieve good sealing performance of the gasket.

一実施形態において、静電容量式電磁流量計用検出器は、上記構成において、前記ガスケットが前記シールド部材と前記流路との間に配置される静電容量式電磁流量計用検出器である。このような構成によれば、シールド部材への流体の接触を抑制できるので、流体の接触によるシールド部材のシールド性能の劣化を抑制することができる。 In one embodiment, the capacitive electromagnetic flowmeter detector is a capacitive electromagnetic flowmeter detector in which the gasket is arranged between the shield member and the flow path in the above configuration. . According to such a configuration, it is possible to suppress the contact of the fluid with the shield member, so it is possible to suppress the deterioration of the shield performance of the shield member due to the contact of the fluid.

一実施形態において、静電容量式電磁流量計用検出器は、上記構成において、前記シールド部材が弾性材料を含む静電容量式電磁流量計用検出器である。このような構成によれば、シールド部材を形成し易くすることができる。 In one embodiment, the capacitive electromagnetic flowmeter detector is a capacitive electromagnetic flowmeter detector in which the shield member includes an elastic material in the above configuration. According to such a configuration, it is possible to facilitate formation of the shield member.

一実施形態において、静電容量式電磁流量計用検出器は、上記構成において、前記弾性材料がシリコーン、例えばシリコーン樹脂又はシリコーンゴムを含む静電容量式電磁流量計用検出器である。このような構成によれば、シールド部材を形成し易くすることができる。 In one embodiment, the capacitive electromagnetic flowmeter detector is a capacitive electromagnetic flowmeter detector having the above configuration, wherein the elastic material contains silicone, such as silicone resin or silicone rubber. According to such a configuration, it is possible to facilitate formation of the shield member.

一実施形態において、静電容量式電磁流量計用検出器は、上記構成において、前記シールド部材が炭素又は金属を含む静電容量式電磁流量計用検出器である。このような構成によれば、シールド部材を形成し易くすることができる。 In one embodiment, the capacitive electromagnetic flowmeter detector is a capacitive electromagnetic flowmeter detector in which the shield member contains carbon or metal in the above configuration. According to such a configuration, it is possible to facilitate formation of the shield member.

一実施形態において、静電容量式電磁流量計用検出器は、上記構成において、前記シールド部材の導電率が1.0~1.0×10S/mである静電容量式電磁流量計用検出器である。このような構成によれば、シールド部材のシールド性能を実現し易くすることができる。 In one embodiment, the detector for a capacitive electromagnetic flowmeter is a capacitive electromagnetic flowmeter having the above configuration, wherein the electrical conductivity of the shield member is 1.0 to 1.0×10 8 S/m. It is a detector for According to such a configuration, the shielding performance of the shielding member can be easily achieved.

一実施形態において、静電容量式電磁流量計用検出器は、上記構成において、前記シールド部材が磁性材料を含む静電容量式電磁流量計用検出器である。このような構成によれば、シールド部材に磁気的なシールド性能を与えることができるので、ノイズを抑制し易くすることができる。 In one embodiment, the capacitive electromagnetic flowmeter detector is a capacitive electromagnetic flowmeter detector in which the shield member contains a magnetic material in the above configuration. According to such a configuration, it is possible to impart magnetic shielding performance to the shield member, so that noise can be easily suppressed.

一実施形態において、静電容量式電磁流量計用検出器は、上記構成において、前記検出器本体が、前記流路を備えるパイプと、前記検出器本体の前記端面における前記シールド部材に対向して配置される部分を備えるとともに前記パイプに一体に取り付けられる導電性の端部材と、を有する静電容量式電磁流量計用検出器である。このような構成によれば、端部材の電気的なシールド性能も利用することができるので、ノイズが検出回路に侵入するのを抑制し易くすることができる。 In one embodiment, the detector for a capacitive electromagnetic flowmeter has the above configuration, wherein the detector main body faces the pipe provided with the flow path and the shield member on the end surface of the detector main body. and a conductive end member integrally attached to said pipe, said end member having a portion disposed thereon. With such a configuration, it is possible to utilize the electrical shielding performance of the end member, so that noise can be easily suppressed from entering the detection circuit.

一実施形態において、静電容量式電磁流量計用検出器は、上記構成において、前記端部材が磁性材料を含む静電容量式電磁流量計用検出器である。このような構成によれば、端部材に磁気的なシールド性能を与えることができるので、ノイズを抑制し易くすることができる。 In one embodiment, the capacitive electromagnetic flowmeter detector is a capacitive electromagnetic flowmeter detector in which the end member contains a magnetic material in the above configuration. According to such a configuration, it is possible to impart magnetic shielding performance to the end member, so that noise can be easily suppressed.

本開示によれば、ノイズが検出器本体の端面と流体アース部材との間の部分を通して検出回路に侵入するのを抑制することができる静電容量式電磁流量計用検出器を提供することができる。 According to the present disclosure, it is possible to provide a detector for a capacitive electromagnetic flowmeter that can suppress noise from entering the detection circuit through the portion between the end face of the detector body and the fluid grounding member. can.

一実施形態に係る静電容量式電磁流量計用検出器を示す断面図である。1 is a cross-sectional view showing a detector for a capacitive electromagnetic flowmeter according to one embodiment; FIG.

以下、図面を参照して本開示の実施形態を詳細に例示説明する。 Hereinafter, embodiments of the present disclosure will be illustrated in detail with reference to the drawings.

図1に示すように、本開示の一実施形態に係る静電容量式電磁流量計用検出器1は、プラント内等の2つの配管2の間に配置されて液体等の流体の流量に対応する検出信号を生成する。本実施形態では、静電容量式電磁流量計3は検出器1と変換器4とを有する。検出器1は検出信号を生成する検出回路1aを有し、変換器4は検出信号を流量に変換する変換回路4aを有する。 As shown in FIG. 1, a capacitive electromagnetic flowmeter detector 1 according to an embodiment of the present disclosure is arranged between two pipes 2 in a plant or the like to correspond to the flow rate of a fluid such as a liquid. Generates a detection signal that In this embodiment, a capacitive electromagnetic flowmeter 3 has a detector 1 and a converter 4 . The detector 1 has a detection circuit 1a that generates a detection signal, and the converter 4 has a conversion circuit 4a that converts the detection signal into a flow rate.

本実施形態では検出器1と変換器4は一体に設けられるが、これに限らず別体に設けてもよい。その場合、検出器1と変換器4は例えば、互いに無線通信可能に設けられ、互いに離隔して配置される。 Although the detector 1 and the converter 4 are provided integrally in this embodiment, they may be provided separately. In that case, the detector 1 and the transducer 4 are for example arranged in wireless communication with each other and arranged at a distance from each other.

検出回路1aは、流体中に磁界を発生させる励磁コイルと、磁界と流速によって流体中に発生する起電力を検出する検出電極と、を有する。電磁流量計3は、検出電極を流体に接触させない方式である静電容量式を採用する。一般的に静電容量式では流体中に発生する起電力に基く微弱な信号を高インピーダンスな検出回路1aで受信するため、良好なS/N比を実現し難い傾向がある。そこで、本実施形態では電磁流量計3の外部のノイズが検出回路1aに侵入するのを抑制するノイズ対策として、シールド部材5が使用される。 The detection circuit 1a has an excitation coil that generates a magnetic field in the fluid, and detection electrodes that detect an electromotive force generated in the fluid by the magnetic field and flow velocity. The electromagnetic flowmeter 3 employs a capacitance type, which is a method in which the detection electrodes are not brought into contact with the fluid. Generally, in the capacitance type, a weak signal based on the electromotive force generated in the fluid is received by the high-impedance detection circuit 1a, so it tends to be difficult to achieve a good S/N ratio. Therefore, in this embodiment, the shield member 5 is used as a noise countermeasure for suppressing the noise outside the electromagnetic flowmeter 3 from entering the detection circuit 1a.

検出器1は、パイプ6と検出回路1aとを備える検出器本体7を有する。パイプ6は中心軸線Oを中心とする筒状をなす。なお、筒状とは円筒状に限らず、楕円筒状、角筒状など、円筒状以外の筒状も含む。以下、中心軸線Oに沿う方向を軸方向といい、中心軸線Oに直交する直線に沿う方向を径方向といい、中心軸線Oを周回する方向を周方向という。パイプ6は、パイプ6の内周面で形成され流体を軸方向に流す流路6aを有する。またパイプ6は非導電性であり、例えばセラミック製である。検出回路1aはパイプ6よりも径方向外側に設けられる。 The detector 1 has a detector body 7 with a pipe 6 and a detection circuit 1a. The pipe 6 has a cylindrical shape centered on the central axis O. As shown in FIG. Note that the tubular shape is not limited to a cylindrical shape, and includes tubular shapes other than a cylindrical shape, such as an elliptical tubular shape and a rectangular tubular shape. Hereinafter, the direction along the central axis O will be referred to as the axial direction, the direction along the straight line perpendicular to the central axis O will be referred to as the radial direction, and the direction around the central axis O will be referred to as the circumferential direction. The pipe 6 has a channel 6a which is formed on the inner peripheral surface of the pipe 6 and allows the fluid to flow in the axial direction. The pipe 6 is also non-conductive, for example made of ceramic. The detection circuit 1 a is provided radially outside the pipe 6 .

検出器本体7は、図1における右側である軸方向一方側(以下、右側ともいう)の端部に端部材8を有する。また検出器1は、右側の端部に流体アース部材9、シールド部材5及びガスケット10を有する。検出器1の軸方向他方側(以下、左側ともいう)の端部の構造は、右側の端部の構造と同様である。検出器1の右側の端部の構造を以下に説明する。 The detector main body 7 has an end member 8 at the end on one axial side (hereinafter also referred to as the right side), which is the right side in FIG. The detector 1 also has a fluid ground member 9, a shield member 5 and a gasket 10 at the right end. The structure of the other end in the axial direction (hereinafter also referred to as the left side) of the detector 1 is the same as the structure of the right end. The structure of the right end of detector 1 is described below.

端部材8は導電性であり、例えば金属製である。また端部材8は中心軸線Oを中心とする環状をなす。なお、環状とは円形の環状に限らず、楕円形の環状、角形の環状など、円形以外の環状も含む。端部材8はパイプ6の右側の端部よりも径方向外側に配置された状態でパイプ6に直接又は他の部材を介して一体に取り付けられる。 The end member 8 is electrically conductive and made of metal, for example. Further, the end member 8 has an annular shape centered on the central axis O. As shown in FIG. Note that the ring is not limited to a circular ring, and includes rings other than a circle, such as an elliptical ring and a square ring. The end member 8 is arranged radially outside the right end of the pipe 6 and is integrally attached to the pipe 6 directly or via another member.

流体アース部材9は導電性であり、例えば金属製である。また流体アース部材9は中心軸線Oを中心とする環状をなし、検出器本体7の右側の端面に対向して配置される。 The fluid ground member 9 is conductive and made of metal, for example. The fluid grounding member 9 has an annular shape centered on the central axis O, and is arranged to face the right end face of the detector main body 7 .

流体アース部材9の右側の端面は、配管2の左側の端面に、例えば図示しないガスケットを介して、当接する。配管2は左側の端部にフランジ2aを有し、配管2の左側の端面はフランジ2aの左側の端面からなる。なお、配管2はフランジ2aを有さない構成であってもよい。 The right end face of the fluid grounding member 9 contacts the left end face of the pipe 2 via, for example, a gasket (not shown). The pipe 2 has a flange 2a at its left end, and the left end face of the pipe 2 consists of the left end face of the flange 2a. In addition, the structure which does not have the flange 2a may be sufficient as the piping 2. FIG.

シールド部材5は導電性であり、シールド部材5の導電率は例えば1.0~1.0×10S/mである。またシールド部材5は中心軸線Oを中心とする環状をなし、検出器本体7の右側の端面と流体アース部材9との間に挟まれる。より具体的に、シールド部材5は端部材8の右側の端面と流体アース部材9の左側の端面との間に挟まれる。 The shield member 5 is conductive, and the conductivity of the shield member 5 is, for example, 1.0 to 1.0×10 8 S/m. The shield member 5 has an annular shape centered on the central axis O and is sandwiched between the right end face of the detector main body 7 and the fluid grounding member 9 . More specifically, the shield member 5 is sandwiched between the right end face of the end member 8 and the left end face of the fluid grounding member 9 .

シールド部材5の軸剛性は端部材8の軸剛性と流体アース部材9の軸剛性とのいずれよりも小さい。したがって、端部材8の右側の端面と流体アース部材9の左側の端面との間の部分をシールド部材5によって塞ぎ易い。 The axial rigidity of the shield member 5 is smaller than both the axial rigidity of the end member 8 and the axial rigidity of the fluid grounding member 9 . Therefore, the portion between the right end face of the end member 8 and the left end face of the fluid grounding member 9 can be easily blocked by the shield member 5 .

端部材8の右側の端面は中心軸線Oを中心とする環状溝11を有し、シールド部材5は環状溝11内に配置される。シールド部材5の配置はこれに限らず、例えば、流体アース部材9の左側の端面が中心軸線Oを中心とする環状溝11を有し、シールド部材5が環状溝11内に配置される構成としてもよいし、端部材8にも流体アース部材9にも環状溝11を設けない構成としてもよい。 The right end face of the end member 8 has an annular groove 11 centered on the central axis O, and the shield member 5 is arranged in the annular groove 11 . The arrangement of the shield member 5 is not limited to this. Alternatively, neither the end member 8 nor the fluid earthing member 9 may be provided with the annular groove 11 .

ガスケット10は非導電性であり、中心軸線Oを中心とする環状をなす。なお、ガスケット10は導電性であってもよい。ガスケット10は検出器本体7の右側の端面と流体アース部材9との間に挟まれることで、当該端面と流体アース部材9との間の部分をシールし、それにより流体の漏出を防止する。またガスケット10はシールド部材5と流路6aとの間に配置される。より具体的に、ガスケット10はパイプ6の右側の端面と流体アース部材9の左側の端面との間に挟まれる。 Gasket 10 is non-conductive and has an annular shape about central axis O. As shown in FIG. Note that the gasket 10 may be conductive. The gasket 10 is sandwiched between the right end face of the detector body 7 and the fluid grounding member 9 to seal the portion between the right end face and the fluid grounding member 9, thereby preventing leakage of fluid. Also, the gasket 10 is arranged between the shield member 5 and the flow path 6a. More specifically, the gasket 10 is sandwiched between the right end face of the pipe 6 and the left end face of the fluid grounding member 9 .

ガスケット10の軸剛性はパイプ6の軸剛性と流体アース部材9の軸剛性とのいずれよりも小さい。したがって、パイプ6の右側の端面と流体アース部材9の左側の端面との間の部分をガスケット10によって塞ぎ易い。 The axial rigidity of the gasket 10 is smaller than both the axial rigidity of the pipe 6 and the axial rigidity of the fluid grounding member 9 . Therefore, the portion between the right end face of the pipe 6 and the left end face of the fluid grounding member 9 can be easily closed by the gasket 10 .

シールド部材5の軸剛性はガスケット10の軸剛性よりも小さく、例えばガスケット10の軸剛性の1/10以下である。したがって、ガスケット10の良好なシール性能を実現し易い。 The axial rigidity of the shield member 5 is smaller than the axial rigidity of the gasket 10 , for example, 1/10 or less of the axial rigidity of the gasket 10 . Therefore, it is easy to achieve good sealing performance of the gasket 10 .

シールド部材5とガスケット10は、例えば2つの配管2のフランジ2aが通しボルトとナットからなる複数の締結具を介して互いに連結されることにより、検出器本体7の右側の端面と流体アース部材9との間に挟まれる。なお、端部材8をフランジ状に形成し、端部材8と配管2のフランジ2aとを例えば締結具を介して互いに連結することにより、シールド部材5とガスケット10を検出器本体7の右側の端面と流体アース部材9との間に挟む構成としてもよい。 The shield member 5 and the gasket 10 are connected to each other by, for example, connecting the flanges 2a of the two pipes 2 via a plurality of fasteners including through bolts and nuts, so that the right end surface of the detector body 7 and the fluid grounding member 9 are connected. sandwiched between By forming the end member 8 into a flange shape and connecting the end member 8 and the flange 2a of the pipe 2 with, for example, a fastener, the shield member 5 and the gasket 10 are attached to the right end face of the detector main body 7. and the fluid grounding member 9.

流体アース部材9の内周面は流路6aを流れる流体に接し、流体アース部材9はシールド部材5を介して端部材8に電気的に接続する。したがって、流体アース部材9を検出回路1aのコモンと流体の電位とを同一化するために用いることができる。なお、流体アース部材9と端部材8との電気的接続を強めるために、流体アース部材9を導電性のブラケットを介して端部材8に接続する構成としてもよい。 The inner peripheral surface of the fluid grounding member 9 is in contact with the fluid flowing through the flow path 6a, and the fluid grounding member 9 is electrically connected to the end member 8 via the shield member 5. As shown in FIG. Therefore, the fluid grounding member 9 can be used to equalize the potential of the common of the detection circuit 1a and the fluid. In order to strengthen the electrical connection between the fluid grounding member 9 and the end member 8, the fluid grounding member 9 may be connected to the end member 8 via a conductive bracket.

本実施形態によれば、端部材8の右側の端面と流体アース部材9との間の部分をシールド部材5によって塞ぐことができる。したがって、電磁流量計3の外部のノイズが、図1に白抜き矢印で示すように端部材8の右側の端面と流体アース部材9との間の部分を通り、さらに端部材8の内周面とパイプ6の右側の端部の外周面との間の部分又は非導電性のパイプ6等を通って、検出回路1aに侵入するのを抑制することができる。 According to this embodiment, the portion between the right end surface of the end member 8 and the fluid grounding member 9 can be blocked by the shield member 5 . Therefore, noise outside the electromagnetic flowmeter 3 passes through the portion between the right end surface of the end member 8 and the fluid grounding member 9 as indicated by the white arrow in FIG. and the outer peripheral surface of the right end of the pipe 6 or through the non-conductive pipe 6 or the like to enter the detection circuit 1a.

シールド部材5は弾性材料を含むのが好ましい。弾性材料は特に限定されないが、例えばシリコーン、例えばシリコーン樹脂又はシリコーンゴムを含む。またシールド部材5は導電性材料として、例えば炭素又は金属を含むのが好ましい。このような構成によれば、シールド部材5を形成し易くすることができる。 Shield member 5 preferably comprises an elastic material. Elastic materials include, but are not limited to, silicones, such as silicone resins or silicone rubbers. The shield member 5 preferably contains, for example, carbon or metal as a conductive material. With such a configuration, it is possible to facilitate the formation of the shield member 5 .

例えば、シールド部材5は、導電性材料を配合した弾性材料で形成される中実又は中空の環状体を有する構成としてもよい。また、シールド部材5は、弾性材料で形成される中実又は中空の環状体からなる芯材と、芯材の外面を覆う導電性被覆材と、を有する構成としてもよい。導電性被覆材は特に限定されないが、例えば金属メッシュ又は導電性シリコーンを含む。 For example, the shield member 5 may have a solid or hollow annular body made of an elastic material mixed with a conductive material. Further, the shield member 5 may be configured to have a core made of a solid or hollow annular body made of an elastic material, and a conductive coating material covering the outer surface of the core. Conductive coatings include, but are not limited to, metal mesh or conductive silicone, for example.

またシールド部材5は磁性材料を含むのが好ましい。磁性材料は特に限定されないが、例えば金属を含む。このような構成によれば、シールド部材5に磁気的なシールド性能を与えることができるので、ノイズを抑制し易くすることができる。 Also, the shield member 5 preferably contains a magnetic material. Magnetic materials include, but are not limited to, metals, for example. According to such a configuration, the shield member 5 can be provided with magnetic shielding performance, so noise can be easily suppressed.

また端部材8は磁性材料を含むのが好ましい。このような構成によれば、端部材8に磁気的なシールド性能を与えることができるので、ノイズを抑制し易くすることができる。 Also, the end member 8 preferably contains a magnetic material. According to such a configuration, the end member 8 can be provided with magnetic shielding performance, so noise can be easily suppressed.

本開示は前述した実施形態に限定されるものではなく、その要旨を逸脱しない範囲で種々変更可能である。 The present disclosure is not limited to the above-described embodiments, and can be variously modified without departing from the scope of the present disclosure.

したがって、前述した実施形態に係る静電容量式電磁流量計用検出器1は、例えば以下に述べるような種々の変更が可能である。 Therefore, the capacitive electromagnetic flowmeter detector 1 according to the embodiment described above can be modified in various ways, for example, as described below.

前述した実施形態に係る静電容量式電磁流量計用検出器1は、流路6aを備える検出器本体7と、検出器本体7の端面に対向して配置される流体アース部材9と、検出器本体7の端面と流体アース部材9の間に挟まれる導電性のシールド部材5と、を有する静電容量式電磁流量計用検出器1である限り、種々変更可能である。 The capacitive electromagnetic flowmeter detector 1 according to the above-described embodiment includes a detector body 7 having a flow path 6a, a fluid grounding member 9 disposed facing the end surface of the detector body 7, and a detection Various modifications are possible as long as the detector 1 for a capacitive electromagnetic flowmeter has the conductive shield member 5 sandwiched between the end surface of the vessel main body 7 and the fluid grounding member 9 .

例えば、端部材8はパイプ6の軸方向端部よりも径方向外側に配置される構成に限らない。端部材8は例えば、検出器本体7の端面の全体を端部材8の端面が形成するように構成してもよい。この場合でも、検出器1の外部のノイズが検出器本体7の端面と流体アース部材9との間の部分を通り、流体とパイプ6を介して検出回路1aに侵入するのを抑制することができる。また、検出器本体7の端面の全体をパイプ6の端面が形成するように構成してもよい。つまり、端部材8を設けない構成としてもよい。また、ガスケット10を設けない構成としてもよい。 For example, the configuration in which the end member 8 is arranged radially outside the axial end of the pipe 6 is not limited. The end member 8 may be configured, for example, so that the end surface of the end member 8 forms the entire end surface of the detector body 7 . Even in this case, noise outside the detector 1 can be prevented from passing through the portion between the end face of the detector body 7 and the fluid grounding member 9 and entering the detection circuit 1a via the fluid and the pipe 6. can. Alternatively, the entire end surface of the detector body 7 may be formed by the end surface of the pipe 6 . In other words, a configuration in which the end member 8 is not provided may be employed. Alternatively, a configuration in which the gasket 10 is not provided may be employed.

なお、前述した実施形態に係る静電容量式電磁流量計用検出器1は、上記構成において、シールド部材5の軸剛性が流体アース部材9の軸剛性よりも小さい静電容量式電磁流量計用検出器1であることが好ましい。 In addition, in the capacitive electromagnetic flowmeter detector 1 according to the above-described embodiment, the axial rigidity of the shield member 5 is smaller than the axial rigidity of the fluid grounding member 9. Detector 1 is preferred.

また、前述した実施形態に係る静電容量式電磁流量計用検出器1は、上記構成において、検出器本体7の端面と流体アース部材9の間に挟まれるガスケット10を有する静電容量式電磁流量計用検出器1であることが好ましい。 Further, the capacitive electromagnetic flowmeter detector 1 according to the above-described embodiment has a capacitive electromagnetic flowmeter having a gasket 10 sandwiched between the end surface of the detector main body 7 and the fluid grounding member 9 in the above configuration. It is preferably the detector 1 for a flow meter.

また、前述した実施形態に係る静電容量式電磁流量計用検出器1は、上記構成において、シールド部材5の軸剛性がガスケット10の軸剛性よりも小さく、例えばガスケット10の軸剛性の1/10以下である静電容量式電磁流量計用検出器1であることが好ましい。 Further, in the capacitive electromagnetic flowmeter detector 1 according to the above-described embodiment, the axial rigidity of the shield member 5 is smaller than the axial rigidity of the gasket 10, for example, 1/1 of the axial rigidity of the gasket 10. It is preferable that the detector 1 for a capacitance type electromagnetic flowmeter is 10 or less.

また、前述した実施形態に係る静電容量式電磁流量計用検出器1は、上記構成において、ガスケット10がシールド部材5と流路6aとの間に配置される静電容量式電磁流量計用検出器1であることが好ましい。 Further, the capacitive electromagnetic flowmeter detector 1 according to the above-described embodiment is for a capacitive electromagnetic flowmeter in which the gasket 10 is arranged between the shield member 5 and the flow path 6a in the above configuration. Detector 1 is preferred.

また、前述した実施形態に係る静電容量式電磁流量計用検出器1は、上記構成において、シールド部材5が弾性材料を含む静電容量式電磁流量計用検出器1であることが好ましい。 Further, the capacitive electromagnetic flowmeter detector 1 according to the embodiment described above is preferably the capacitive electromagnetic flowmeter detector 1 in which the shield member 5 contains an elastic material in the above configuration.

また、前述した実施形態に係る静電容量式電磁流量計用検出器1は、上記構成において、弾性材料がシリコーン、例えばシリコーン樹脂又はシリコーンゴムを含む静電容量式電磁流量計用検出器1であることが好ましい。 Further, the capacitive electromagnetic flowmeter detector 1 according to the above-described embodiment is a capacitive electromagnetic flowmeter detector 1 in which the elastic material contains silicone, for example, silicone resin or silicone rubber in the above configuration. Preferably.

また、前述した実施形態に係る静電容量式電磁流量計用検出器1は、上記構成において、シールド部材5が炭素又は金属を含む静電容量式電磁流量計用検出器1であることが好ましい。 Further, the capacitive electromagnetic flowmeter detector 1 according to the above-described embodiment is preferably the capacitive electromagnetic flowmeter detector 1 in which the shield member 5 contains carbon or metal in the above configuration. .

また、前述した実施形態に係る静電容量式電磁流量計用検出器1は、上記構成において、シールド部材5の導電率が1.0~1.0×10S/mである静電容量式電磁流量計用検出器1であることが好ましい。 Further, the capacitance type electromagnetic flowmeter detector 1 according to the above-described embodiment has a capacitance flowmeter in which the electrical conductivity of the shield member 5 is 1.0 to 1.0×10 8 S/m in the above configuration. It is preferably the detector 1 for a type electromagnetic flowmeter.

また、前述した実施形態に係る静電容量式電磁流量計用検出器1は、上記構成において、シールド部材5が磁性材料を含む静電容量式電磁流量計用検出器1であることが好ましい。 Further, the capacitive electromagnetic flowmeter detector 1 according to the above-described embodiment is preferably the capacitive electromagnetic flowmeter detector 1 in which the shield member 5 contains a magnetic material in the above configuration.

また、前述した実施形態に係る静電容量式電磁流量計用検出器1は、上記構成において、検出器本体7が、流路6aを備えるパイプ6と、検出器本体7の端面におけるシールド部材5に対向して配置される部分を備えるとともにパイプ6に一体に取り付けられる導電性の端部材8と、を有する静電容量式電磁流量計用検出器1であることが好ましい。 Further, the capacitive electromagnetic flowmeter detector 1 according to the embodiment described above has the configuration described above, in which the detector main body 7 includes the pipe 6 having the flow path 6a and the shield member 5 on the end face of the detector main body 7. and a conductive end member 8 integrally attached to the pipe 6 and having a portion disposed opposite to the capacitive electromagnetic flow meter detector 1 .

また、前述した実施形態に係る静電容量式電磁流量計用検出器1は、上記構成において、端部材8が磁性材料を含む静電容量式電磁流量計用検出器1であることが好ましい。 Further, the capacitive electromagnetic flowmeter detector 1 according to the embodiment described above is preferably the capacitive electromagnetic flowmeter detector 1 in which the end member 8 contains a magnetic material in the above configuration.

1 検出器
1a 検出回路
2 配管
2a フランジ
3 電磁流量計
4 変換器
4a 変換回路
5 シールド部材
6 パイプ
6a 流路
7 検出器本体
8 端部材
9 流体アース部材
10 ガスケット
11 環状溝
O 中心軸線
Reference Signs List 1 detector 1a detection circuit 2 pipe 2a flange 3 electromagnetic flowmeter 4 converter 4a conversion circuit 5 shield member 6 pipe 6a flow path 7 detector main body 8 end member 9 fluid grounding member 10 gasket 11 annular groove O central axis

Claims (7)

流路を備える検出器本体と、
前記検出器本体の端面に対向して配置される流体アース部材と、
前記検出器本体の前記端面と前記流体アース部材の間に挟まれる導電性のシールド部材と、
を有する静電容量式電磁流量計用検出器。
a detector body comprising a channel;
a fluid grounding member disposed facing the end face of the detector body;
a conductive shield member sandwiched between the end surface of the detector body and the fluid grounding member;
A detector for a capacitive electromagnetic flowmeter having
前記シールド部材の軸剛性が前記流体アース部材の軸剛性よりも小さい、請求項1に記載の静電容量式電磁流量計用検出器。 2. The capacitive electromagnetic flowmeter detector according to claim 1, wherein the axial rigidity of the shield member is smaller than the axial rigidity of the fluid grounding member. 前記検出器本体の前記端面と前記流体アース部材の間に挟まれるガスケットを有する、請求項1又は2に記載の静電容量式電磁流量計用検出器。 3. The capacitance type electromagnetic flowmeter detector according to claim 1, further comprising a gasket interposed between said end face of said detector body and said fluid grounding member. 前記シールド部材の軸剛性が前記ガスケットの軸剛性よりも小さい、請求項3に記載の静電容量式電磁流量計用検出器。 4. The capacitive electromagnetic flowmeter detector according to claim 3, wherein the axial rigidity of the shield member is smaller than the axial rigidity of the gasket. 前記ガスケットが前記シールド部材と前記流路との間に配置される、請求項3又は4に記載の静電容量式電磁流量計用検出器。 5. The capacitive electromagnetic flowmeter detector according to claim 3, wherein said gasket is arranged between said shield member and said channel. 前記シールド部材が弾性材料を含む、請求項1~5の何れか1項に記載の静電容量式電磁流量計用検出器。 A capacitive electromagnetic flowmeter detector according to any one of claims 1 to 5, wherein said shield member comprises an elastic material. 前記シールド部材が磁性材料を含む、請求項1~6の何れか1項に記載の静電容量式電磁流量計用検出器。 The detector for a capacitive electromagnetic flowmeter according to any one of claims 1 to 6, wherein said shield member contains a magnetic material.
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Citations (6)

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JPS63148830U (en) * 1987-03-23 1988-09-30
JPH01193463A (en) * 1988-01-29 1989-08-03 Matsushita Electric Ind Co Ltd Vacuum seal structure of vacuum processing equipment
JPH04354876A (en) * 1991-05-31 1992-12-09 Hitachi Ltd Microwave plasma processing equipment
JPH07225142A (en) * 1994-02-14 1995-08-22 Yokogawa Electric Corp Earth ring for pipeline
JPH085421A (en) * 1994-06-23 1996-01-12 Yokogawa Electric Corp Flange type electromagnetic flowmeter
JP2015172550A (en) * 2014-03-12 2015-10-01 横河電機株式会社 Electromagnetic flow meter

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63148830U (en) * 1987-03-23 1988-09-30
JPH01193463A (en) * 1988-01-29 1989-08-03 Matsushita Electric Ind Co Ltd Vacuum seal structure of vacuum processing equipment
JPH04354876A (en) * 1991-05-31 1992-12-09 Hitachi Ltd Microwave plasma processing equipment
JPH07225142A (en) * 1994-02-14 1995-08-22 Yokogawa Electric Corp Earth ring for pipeline
JPH085421A (en) * 1994-06-23 1996-01-12 Yokogawa Electric Corp Flange type electromagnetic flowmeter
JP2015172550A (en) * 2014-03-12 2015-10-01 横河電機株式会社 Electromagnetic flow meter

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