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JP2022035725A - Pure water production system - Google Patents

Pure water production system Download PDF

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JP2022035725A
JP2022035725A JP2020140243A JP2020140243A JP2022035725A JP 2022035725 A JP2022035725 A JP 2022035725A JP 2020140243 A JP2020140243 A JP 2020140243A JP 2020140243 A JP2020140243 A JP 2020140243A JP 2022035725 A JP2022035725 A JP 2022035725A
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water
hardness
softening device
permeated
production system
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慎一郎 手嶋
Shinichiro Tejima
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Miura Co Ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02ATECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A20/00Water conservation; Efficient water supply; Efficient water use
    • Y02A20/124Water desalination
    • Y02A20/131Reverse-osmosis

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Abstract

【課題】逆浸透膜装置とEDI装置の間に軟水装置を設置するシステムにおいて、EDI装置へ安定的に硬度分を除去した水を供給できる純水製造システムを提供すること。【解決手段】本発明に係る純水製造システム1は、逆浸透膜によって原水を透過水と濃縮水とに分離する逆浸透膜装置10と、イオン交換により透過水から硬度分を除去した中間処理水を製造する軟水装置20と、電気再生式脱塩により中間処理水からイオンを除去した処理水を製造するEDI装置40と、軟水装置20から流出する中間処理水の硬度を検出する出口硬度検出器32と、出口硬度検出器32の検出値が所定の硬度設定値以上となった場合に軟水装置20に再生運転をさせる硬度基準制御部341を有する制御装置と、を備える。【選択図】図3PROBLEM TO BE SOLVED: To provide a pure water production system capable of stably supplying water from which a hardness component has been removed to an EDI device in a system in which a water softening device is installed between a reverse osmosis membrane device and an EDI device. SOLUTION: The pure water production system 1 according to the present invention has a back-penetration film device 10 that separates raw water into permeated water and concentrated water by a back-permeation film, and an intermediate treatment in which hardness is removed from the permeated water by ion exchange. The water softening device 20 for producing water, the EDI device 40 for producing treated water in which ions are removed from the intermediate treated water by electroregenerative desalination, and the outlet hardness detection for detecting the hardness of the intermediate treated water flowing out from the water softening device 20. It includes a device 32 and a control device having a hardness reference control unit 341 that causes the water softening device 20 to perform a regeneration operation when the detected value of the outlet hardness detector 32 becomes a predetermined hardness set value or more. [Selection diagram] Fig. 3

Description

本発明は、純水製造システムに関する。 The present invention relates to a pure water production system.

従来、EDI装置(Electro Deionization Device:電気再生式脱塩装置)を用いて純水を製造するシステムが知られている。EDI装置は、高度にイオンを除去することができるが、非イオン性の不純物を除去することができず、除去できるイオンの量も少ないため、原水の非イオン性の不純物を除去すると共にイオン濃度を一定程度まで低下させる前処理を必要とする。特に、硬度分がEDI装置に持ち込まれると、EDI装置の内部にスケールとなって付着して電気再生が阻害されることにより処理性能が著しく低下する不具合を招くおそれがある。EDI装置のための前処理は、逆浸透膜装置を用いて行われることが多いが、通常、EDI装置で処理可能な程度まで原水のイオン濃度を低下させるには逆浸透膜装置を多段に配置することが必要となる。 Conventionally, a system for producing pure water using an EDI device (Electro Deionization Device) is known. Although the EDI device can remove ions to a high degree, it cannot remove nonionic impurities and the amount of ions that can be removed is small. Therefore, the nonionic impurities in the raw water can be removed and the ion concentration can be removed. Requires pretreatment to reduce to a certain degree. In particular, if the hardness component is brought into the EDI device, it may form a scale and adhere to the inside of the EDI device to hinder electric regeneration, resulting in a problem that the processing performance is significantly deteriorated. Pretreatment for EDI equipment is often performed using reverse osmosis membrane equipment, but usually, reverse osmosis membrane equipment is arranged in multiple stages to reduce the ion concentration of raw water to the extent that it can be processed by EDI equipment. It is necessary to do.

EDI装置のための前処理設備として、逆浸透膜装置を多段に配置する構成に換えて、逆浸透膜装置の前にイオン交換を行う軟水装置を配置することも提案されている(例えば、特許文献1参照)。このように、軟水装置を使用することで、逆浸透膜装置を多段に設ける場合と比べて、設備コスト及び運転コストを低減できる。 As a pretreatment facility for an EDI device, it has been proposed to arrange a water softening device for ion exchange in front of the reverse osmosis membrane device instead of a configuration in which the reverse osmosis membrane device is arranged in multiple stages (for example, patent). See Document 1). As described above, by using the water softening device, the equipment cost and the operating cost can be reduced as compared with the case where the reverse osmosis membrane device is provided in multiple stages.

特開2011-20029号公報Japanese Unexamined Patent Publication No. 2011-20029

逆浸透膜装置は、逆浸透膜によって被処理水を透過水と濃縮水とに分離する装置であるため、前段の逆浸透膜装置又は軟水装置でコストをかけて処理した被処理水の一部を濃縮水として系外に排出する。逆浸透膜装置の回収率(供給した非処理水の量に対する透過水の比率)を大きくするために濃縮水の排出を抑制すると、過濃縮による汚れやスケール成分の付着が進行し、逆浸透膜洗浄の頻度が増加するために却って非効率となり得る。 Since the reverse osmosis membrane device is a device that separates the water to be treated into permeated water and concentrated water by a reverse osmosis membrane, it is a part of the water to be treated that is costly treated by the reverse osmosis membrane device or the water softening device in the previous stage. Is discharged to the outside of the system as concentrated water. If the discharge of concentrated water is suppressed in order to increase the recovery rate (ratio of permeated water to the amount of untreated water supplied) of the reverse osmosis membrane device, stains and scale components will adhere due to overconcentration, and the reverse osmosis membrane will be adhered. It can be rather inefficient due to the increased frequency of cleaning.

このような事情に鑑みて、逆浸透膜装置とEDI装置の間に軟水装置を設置するシステム構成も考えられる。逆浸透膜装置とEDI装置の間に軟水装置を設置することにより、逆浸透膜装置の透過水から軟水装置で硬度分を除去した中間処理水の全量をEDI装置に供給することができるので、軟水装置の利用効率が高く、比較的安価に純水を製造できる。 In view of such circumstances, a system configuration in which a water softening device is installed between the reverse osmosis membrane device and the EDI device can be considered. By installing a water softening device between the reverse osmosis membrane device and the EDI device, the entire amount of intermediate treated water from which the hardness is removed by the water softening device from the permeated water of the reverse osmosis membrane device can be supplied to the EDI device. The utilization efficiency of the water softener is high, and pure water can be produced at a relatively low cost.

しかし、軟水装置の硬度除去性能には限界があるため、適切なタイミングでの再生を実施しないと、硬度分の漏れが発生する。逆浸透膜装置とEDI装置の間に軟水装置を設置するシステムでは、軟水装置から漏れ出した硬度分は、そのままEDI装置へ供給されることになるため、EDI装置の致命的なダメージの要因になり得る。 However, since the hardness removing performance of the water softening device is limited, leakage of the hardness will occur unless regeneration is performed at an appropriate timing. In a system in which a water softening device is installed between a reverse osmosis membrane device and an EDI device, the hardness leaked from the water softening device is supplied to the EDI device as it is, which is a cause of fatal damage to the EDI device. Can be.

本発明は、逆浸透膜装置とEDI装置の間に軟水装置を設置するシステムにおいて、EDI装置へ安定的に硬度分を除去した水を供給できる純水製造システムを提供することを目的とする。 An object of the present invention is to provide a pure water production system capable of stably supplying water from which hardness is removed to an EDI device in a system in which a water softening device is installed between a reverse osmosis membrane device and an EDI device.

本発明の一態様に係る純水製造システムは、逆浸透膜によって原水を透過水と濃縮水とに分離する逆浸透膜装置と、イオン交換により前記透過水から硬度分を除去した中間処理水を製造する軟水装置と、電気再生式脱塩により前記中間処理水からイオンを除去した処理水を製造するEDI装置と、前記軟水装置から流出する前記中間処理水の硬度を検出する出口硬度検出器と、前記出口硬度検出器の検出値が所定の硬度設定値以上となった場合に前記軟水装置に再生運転をさせる硬度基準制御部を有する制御装置と、を備える。 The pure water production system according to one aspect of the present invention uses a back-penetration membrane device that separates raw water into permeated water and concentrated water by a back-permeation membrane, and intermediate-treated water from which the hardness is removed from the permeated water by ion exchange. A water softening device to be manufactured, an EDI device for manufacturing treated water in which ions are removed from the intermediate treated water by electroregenerative desalination, and an outlet hardness detector for detecting the hardness of the intermediate treated water flowing out of the soft water device. A control device having a hardness reference control unit for causing the water softening device to perform a regeneration operation when the detection value of the outlet hardness detector becomes a predetermined hardness set value or more.

前記純水製造システムは、前記軟水装置に導入される前記透過水の硬度を検出する入口硬度検出器と、前記軟水装置に導入される前記透過水又は前記軟水装置から導出される前記中間処理水の流量を検出する流量検出器と、をさらに備え、前記制御装置は、前記入口硬度検出器の検出値と前記流量検出器の検出値との積の時間積分値が所定の総量設定値以上となった場合に前記軟水装置に再生運転をさせる総量基準制御部をさらに有してもよい。 The pure water production system includes an inlet hardness detector that detects the hardness of the permeated water introduced into the water softening device, and the permeated water introduced into the water softening device or the intermediate treated water derived from the water softening device. The control device further includes a flow rate detector for detecting the flow rate of the water, and the control device has a time integral value of the product of the detection value of the inlet hardness detector and the detection value of the flow rate detector of a predetermined total amount set value or more. It may further have a total amount reference control unit for causing the water softening device to perform a regeneration operation in the event of a failure.

本発明の別の態様に係る純水製造システムは、逆浸透膜によって原水を透過水と濃縮水とに分離する逆浸透膜装置と、イオン交換により前記透過水から硬度分を除去した中間処理水を製造する軟水装置と、電気再生式脱塩により前記中間処理水からイオンを除去した処理水を製造するEDI装置と、前記軟水装置に導入される前記透過水の硬度を検出する入口硬度検出器と、前記軟水装置に導入される前記透過水又は前記軟水装置から導出される前記中間処理水の流量を検出する流量検出器と、前記入口硬度検出器の検出値と前記流量検出器の検出値との積の時間積分値が所定の総量設定値以上となった場合に前記軟水装置に再生運転をさせる総量基準制御部を備える制御装置と、を備える。 The pure water production system according to another aspect of the present invention includes a back-penetration membrane device that separates raw water into permeated water and concentrated water by a back-permeation membrane, and intermediate treated water from which hardness is removed from the permeated water by ion exchange. An EDI device for producing treated water from which ions have been removed from the intermediate treated water by electroregenerative desalination, and an inlet hardness detector for detecting the hardness of the permeated water introduced into the water softening device. A flow rate detector that detects the flow rate of the permeated water introduced into the water softening device or the intermediate treated water derived from the water softening device, and the detection values of the inlet hardness detector and the detection values of the flow rate detector. A control device including a total amount reference control unit for causing the water softening device to perform a regeneration operation when the time-integrated value of the product with and is equal to or greater than a predetermined total amount set value is provided.

前記純水製造システムは、複数の前記軟水装置が並列して配置され、前記制御装置は、前記軟水装置に前記再生運転をさせるとき、少なくとも1つの他の前記軟水装置に前記透過水から前記中間処理水を導出させてもよい。 In the pure water production system, a plurality of the water softening devices are arranged in parallel, and when the control device causes the water softening device to perform the regeneration operation, at least one other water softening device is operated from the permeated water to the intermediate. Treated water may be derived.

前記制御装置は、前記軟水装置に前記再生運転をさせるとき、前記再生運転中の前記軟水装置をバイパスして前記透過水を他の前記軟水装置から導出される前記中間処理水に混合してもよい。 When the water softening device is allowed to perform the regeneration operation, the control device may bypass the water softening device during the regeneration operation and mix the permeated water with the intermediate treated water derived from the other water softening device. good.

前記純水製造システムは、前記中間処理水から溶存している気体を除去する脱気装置をさらに備えてもよい。 The pure water production system may further include a degassing device for removing dissolved gas from the intermediate treated water.

前記軟水装置は、前記再生運転時に複数の箇所に再生液を供給してもよい。 The water softening device may supply the regenerating liquid to a plurality of places during the regenerating operation.

前記逆浸透膜装置は、前記透過水の流量が一定となるよう制御されてもよい。 The reverse osmosis membrane device may be controlled so that the flow rate of the permeated water becomes constant.

本発明によれば、逆浸透膜装置とEDI装置の間に軟水装置を設置するシステムにおいて、EDI装置へ安定的に硬度分を除去した水を供給できる純水製造システムを提供することができる。 According to the present invention, in a system in which a water softening device is installed between a reverse osmosis membrane device and an EDI device, it is possible to provide a pure water production system capable of stably supplying water from which hardness is removed to the EDI device.

本発明の一実施形態に係る純水製造システムの全体構成図である。It is an overall block diagram of the pure water production system which concerns on one Embodiment of this invention. 図1の純水製造システムの上流部分の詳細構成図である。It is a detailed block diagram of the upstream part of the pure water production system of FIG. 図1の純水製造システムの中流部分の詳細構成図である。It is a detailed block diagram of the middle-flow part of the pure water production system of FIG. 図1の純水製造システムの下流部分の詳細構成図である。It is a detailed block diagram of the downstream part of the pure water production system of FIG.

以下、本発明の実施形態について、図面を参照しながら説明する。図1は、本発明の純水製造システム1の全体構成図である。図2は、純水製造システム1の上流部分の詳細構成図である。図3は、純水製造システム1の中流部分の詳細構成図である。図4は、純水製造システム1の下流部分の詳細構成図である。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is an overall configuration diagram of the pure water production system 1 of the present invention. FIG. 2 is a detailed configuration diagram of an upstream portion of the pure water production system 1. FIG. 3 is a detailed configuration diagram of the middle flow portion of the pure water production system 1. FIG. 4 is a detailed configuration diagram of a downstream portion of the pure water production system 1.

本実施形態の純水製造システム1は、逆浸透膜によって原水を透過水と濃縮水とに分離する逆浸透膜装置10と、並列して配設され、それぞれイオン交換により透過水から硬度分を除去した中間処理水を製造する複数の軟水装置20と、中間処理水から溶存している気体を除去する脱気装置30と、並列して配設され、それぞれ電気再生式脱塩により中間処理水からイオンを除去した処理水を製造する複数のEDI装置40と、を備える。 The pure water production system 1 of the present embodiment is arranged in parallel with a reverse osmosis membrane device 10 that separates raw water into permeated water and concentrated water by a reverse osmosis membrane, and each of them has a hardness component from the permeated water by ion exchange. A plurality of water softening devices 20 for producing the removed intermediate treated water and a degassing device 30 for removing dissolved gas from the intermediate treated water are arranged in parallel, and the intermediate treated water is each arranged by electroregenerative desalination. A plurality of EDI devices 40 for producing treated water from which ions have been removed from the water are provided.

純水製造システム1は、図2に示すように、逆浸透膜装置10に付随して、原水を貯留する原水タンク11と、原水タンク11から逆浸透膜装置10に原水を供給する原水供給ラインL11と、逆浸透膜装置10から透過水を導出する透過水導出ラインL12と、逆浸透膜装置10から濃縮水を系外に排出する濃縮水ラインL13と、を備える。 As shown in FIG. 2, the pure water production system 1 is associated with the reverse osmosis membrane device 10 and has a raw water tank 11 for storing raw water and a raw water supply line for supplying raw water from the raw water tank 11 to the reverse osmosis membrane device 10. It is provided with L11, a permeation water lead-out line L12 that draws out permeated water from the reverse osmosis membrane device 10, and a concentrated water line L13 that discharges concentrated water from the reverse osmosis membrane device 10 to the outside of the system.

より詳しくは、純水製造システム1は、原水水質検出器12と、原水ポンプ13と、インバータ14と、透過水流量検出器15と、濃縮水流量検出器16と、濃縮水排出調整弁17と、膜分離制御装置18と、をさらに備える。原水水質検出器12は、原水タンク11に設けられ、原水の電気伝導度を検出する。原水ポンプ13は、原水供給ラインL11に設けられ、原水を加圧することにより逆浸透膜装置10に供給する。インバータ14は、入力された指令信号に対応する駆動周波数の電力を原水ポンプに供給する。透過水流量検出器15は、透過水導出ラインL12に設けられ、逆浸透膜装置10から流出する透過水の流量を検出する。濃縮水流量検出器16は、濃縮水ラインL13に設けられ、濃縮水ラインL13から系外に排出される濃縮水の流量を検出する。濃縮水排出調整弁17は、濃縮水ラインL13に設けられ、濃縮水ラインL13から系外に排出される濃縮水の流量を調節する。膜分離制御装置18は、原水水質検出器12、透過水流量検出器15及び濃縮水流量検出器16の検出値に応じて、インバータ14に指令信号を出力するとともに、濃縮水排出調整弁17の開度を調節する。 More specifically, the pure water production system 1 includes a raw water quality detector 12, a raw water pump 13, an inverter 14, a permeated water flow rate detector 15, a concentrated water flow rate detector 16, and a concentrated water discharge control valve 17. , And a membrane separation control device 18. The raw water quality detector 12 is provided in the raw water tank 11 and detects the electric conductivity of the raw water. The raw water pump 13 is provided in the raw water supply line L11 and supplies the raw water to the reverse osmosis membrane device 10 by pressurizing the raw water. The inverter 14 supplies the raw water pump with electric power having a drive frequency corresponding to the input command signal. The permeated water flow rate detector 15 is provided in the permeated water lead-out line L12 and detects the flow rate of the permeated water flowing out from the reverse osmosis membrane device 10. The concentrated water flow rate detector 16 is provided in the concentrated water line L13, and detects the flow rate of the concentrated water discharged from the concentrated water line L13 to the outside of the system. The concentrated water discharge control valve 17 is provided in the concentrated water line L13, and regulates the flow rate of the concentrated water discharged from the concentrated water line L13 to the outside of the system. The membrane separation control device 18 outputs a command signal to the inverter 14 according to the detection values of the raw water quality detector 12, the permeated water flow rate detector 15, and the concentrated water flow rate detector 16, and also outputs a command signal to the inverter 14 and of the concentrated water discharge control valve 17. Adjust the opening.

また、純水製造システム1は、図3に詳しく示すように、軟水装置20に付随して、透過水導出ラインL12を通して供給される透過水を貯留する透過水タンク21と、透過水タンク21から各軟水装置20に透過水を供給する透過水供給ラインL21と、各軟水装置20から中間処理水を導出し、中間処理水を合流させて脱気装置30に供給する中間処理水導出ラインL22と、透過水供給ラインL21から透過水の一部を軟水装置20をバイパスして中間処理水導出ラインL22に供給することで、透過水を中間処理水に混合するバイパスラインL23と、各軟水装置20から導出される中間処理水をサンプリングするサンプリングラインL24と、各軟水装置20に再生液を供給する再生液ラインL25と、を備える。 Further, as shown in detail in FIG. 3, the pure water production system 1 is attached to the water softening device 20 from the permeated water tank 21 for storing the permeated water supplied through the permeated water lead-out line L12 and the permeated water tank 21. The permeated water supply line L21 that supplies the permeated water to each softening device 20, and the intermediate treated water lead-out line L22 that draws out the intermediate treated water from each softened water device 20 and merges the intermediate treated water and supplies it to the degassing device 30. , Bypassing a part of the permeated water from the permeated water supply line L21 to the intermediate treated water lead-out line L22 by bypassing the permeated water device 20, the bypass line L23 for mixing the permeated water with the intermediate treated water, and each softened water device 20. A sampling line L24 for sampling the intermediate treated water derived from the water softening device 20 and a regenerating liquid line L25 for supplying the regenerating liquid to each water softening device 20 are provided.

より詳しくは、純水製造システム1は、入口硬度検出器22と、透過水ポンプ23と、複数の中間処理水流量検出器24と、複数の中間処理水遮断弁26と、バイパス流量検出器27と、バイパス流量調整弁28と、バイパス遮断弁29と、複数のサンプリング弁31と、出口硬度検出器32と、再生液タンク33と、軟水化制御装置34と、を備える。 More specifically, the pure water production system 1 includes an inlet hardness detector 22, a permeation water pump 23, a plurality of intermediate treated water flow detectors 24, a plurality of intermediate treated water shutoff valves 26, and a bypass flow detector 27. A bypass flow control valve 28, a bypass shutoff valve 29, a plurality of sampling valves 31, an outlet hardness detector 32, a regenerating liquid tank 33, and a water softening control device 34 are provided.

入口硬度検出器22は、例えば透過水タンク21に設けられ、軟水装置20に供給される透過水の硬度を検出する。入口硬度検出器22は、透過水供給ラインL21に設けられてもよい。透過水ポンプ23は、透過水供給ラインL21に設けられ、透過水を加圧することにより軟水装置20に供給する。中間処理水流量検出器24は、中間処理水導出ラインL22に設けられ、それぞれの軟水装置20から導出される中間処理水の流量を検出する。中間処理水流量調整弁25は、中間処理水導出ラインL22に設けられ、それぞれの軟水装置20から導出される中間処理水の流量を調節する。中間処理水遮断弁26は、中間処理水導出ラインL22に設けられ、それぞれの軟水装置20からの中間処理水の導出を遮断する。バイパス流量検出器27は、バイパスラインL23に設けられ、バイパスラインL23を通過する透過水の流量を検出する。バイパス流量調整弁28は、バイパスラインL23に設けられ、バイパスラインL23を通過する透過水の流量を調節する。バイパス遮断弁29は、バイパスラインL23に設けられ、中間処理水導出ラインL22への透過水の供給を遮断する。サンプリング弁31は、サンプリングラインL24に設けられ、各軟水装置20から導出される中間処理水のサンプリングラインL24への導入を可能にする。出口硬度検出器32は、サンプリングラインL24に設けられ、軟水装置20から流出する中間処理水の硬度を検出する。再生液タンク33は、再生液ラインL25に接続され、再生液ラインL25を介して軟水装置20に再生液を供給する。軟水化制御装置34は、軟水装置20、中間処理水流量調整弁25、中間処理水遮断弁26、バイパス流量調整弁28、バイパス遮断弁29及びサンプリング弁31の動作を制御する。 The inlet hardness detector 22 is provided in, for example, the permeated water tank 21, and detects the hardness of the permeated water supplied to the water softening device 20. The inlet hardness detector 22 may be provided on the permeated water supply line L21. The permeated water pump 23 is provided in the permeated water supply line L21 and supplies the permeated water to the water softening device 20 by pressurizing the permeated water. The intermediate treated water flow rate detector 24 is provided in the intermediate treated water lead-out line L22, and detects the flow rate of the intermediate treated water led out from each of the soft water softening devices 20. The intermediate treated water flow rate adjusting valve 25 is provided in the intermediate treated water lead-out line L22, and adjusts the flow rate of the intermediate treated water led out from each of the water softening devices 20. The intermediate treated water shutoff valve 26 is provided in the intermediate treated water lead-out line L22, and shuts off the lead-out of the intermediate treated water from each of the soft water softening devices 20. The bypass flow rate detector 27 is provided on the bypass line L23 and detects the flow rate of the permeated water passing through the bypass line L23. The bypass flow rate adjusting valve 28 is provided on the bypass line L23 and regulates the flow rate of the permeated water passing through the bypass line L23. The bypass shutoff valve 29 is provided in the bypass line L23 and shuts off the supply of permeated water to the intermediate treated water lead-out line L22. The sampling valve 31 is provided in the sampling line L24 and enables introduction of the intermediate treated water derived from each water softening device 20 into the sampling line L24. The outlet hardness detector 32 is provided on the sampling line L24 and detects the hardness of the intermediate treated water flowing out from the water softening device 20. The regenerating liquid tank 33 is connected to the regenerating liquid line L25, and supplies the regenerating liquid to the water softening device 20 via the regenerating liquid line L25. The water softening control device 34 controls the operations of the water softening device 20, the intermediate treated water flow rate adjusting valve 25, the intermediate treated water shutoff valve 26, the bypass flow rate adjusting valve 28, the bypass shutoff valve 29, and the sampling valve 31.

さらに、純水製造システム1は、図4に詳しく示すように、EDI装置40に付随して、脱気装置30から流出する脱気された中間処理水を各EDI装置40に供給する中間処理水供給ラインL41と、各EDI装置40から処理水を導出する処理水ラインL42と、処理水ラインL42から導出される処理水を貯留する処理水タンク41と、を備える。 Further, as shown in detail in FIG. 4, the pure water production system 1 is attached to the EDI device 40 and supplies the degassed intermediate treated water flowing out from the degassing device 30 to each EDI device 40. It includes a supply line L41, a treated water line L42 that draws out treated water from each EDI device 40, and a treated water tank 41 that stores the treated water led out from the treated water line L42.

膜分離制御装置18は、透過水の流量が一定となるよう逆浸透膜装置10を制御することが好ましい。透過水の流量が一定となるよう逆浸透膜装置10が制御されることで、透過水を貯留する透過水タンク21の容量を小さくすることができる。具体的には、膜分離制御装置18は、透過水流量検出器15が検出する透過水の流量が一定となるよう、原水ポンプ13を駆動するインバータ14の出力周波数をフィードバック制御することが好ましい。 The membrane separation control device 18 preferably controls the reverse osmosis membrane device 10 so that the flow rate of the permeated water becomes constant. By controlling the reverse osmosis membrane device 10 so that the flow rate of the permeated water becomes constant, the capacity of the permeated water tank 21 for storing the permeated water can be reduced. Specifically, it is preferable that the membrane separation control device 18 feedback-controls the output frequency of the inverter 14 that drives the raw water pump 13 so that the flow rate of the permeated water detected by the permeated water flow rate detector 15 becomes constant.

また、膜分離制御装置18は、逆浸透膜装置10の回収率(原水タンク11から供給される原水の流量に対する透過水の流量の比率)を、原水の水質(本実施形態では原水水質検出器12が検出する電気伝導度)に応じて設定される値に調節してもよい。これにより、逆浸透膜の膜面でのスケーリングが防止でき、軟水装置20及びEDI装置の安定した運転が可能となるので、高品質な純水を製造することができる。具体的には、膜分離制御装置18は、原水水質検出器12が検出する電気伝導度が高い程回収率の目標値を小さい値に設定し、透過水流量検出器15の検出値と濃縮水流量検出器16の検出値との合計に対する透過水流量検出器15の検出値の比を設定した目標値に維持するよう濃縮水排出調整弁17の開度を調整することが好ましい。 Further, the membrane separation control device 18 determines the recovery rate of the reverse osmosis membrane device 10 (the ratio of the flow rate of the permeated water to the flow rate of the raw water supplied from the raw water tank 11) to the water quality of the raw water (in this embodiment, the raw water quality detector). The value may be adjusted to a value set according to the electrical conductivity detected by 12. As a result, scaling of the reverse osmosis membrane on the membrane surface can be prevented, and stable operation of the water softening device 20 and the EDI device becomes possible, so that high-quality pure water can be produced. Specifically, the membrane separation control device 18 sets the target value of the recovery rate to a smaller value as the electric conductivity detected by the raw water quality detector 12 is higher, and the detection value of the permeated water flow rate detector 15 and the concentrated water. It is preferable to adjust the opening degree of the concentrated water discharge adjusting valve 17 so that the ratio of the detected value of the permeated water flow detector 15 to the sum of the detected values of the flow detector 16 is maintained at the set target value.

軟水装置20は、流入する透過水中の硬度成分(例えばカルシウムイオン、マグネシウムイオン等)をナトリウムイオン等に置換するイオン交換体から形成される交換層を有する。イオン交換体は、ナトリウムイオンをすべて放出するとそれ以上硬度成分を除去することができなくなるので、再生液ラインL25から再生液を供給してイオン交換体が吸着した硬度成分をナトリウムイオンに再置換する軟水装置20の再生運転を行う必要がある。 The water softening device 20 has an exchange layer formed of an ion exchanger that replaces a hardness component (for example, calcium ion, magnesium ion, etc.) in the inflowing permeated water with sodium ion or the like. When the ion exchanger releases all the sodium ions, the hardness component cannot be removed any more. Therefore, the regenerated liquid is supplied from the regenerating liquid line L25 to replace the hardness component adsorbed by the ion exchanger with sodium ions. It is necessary to perform the regeneration operation of the water softening device 20.

軟水化制御装置34は、各軟水装置20から流出する中間処理水の水量が一定となるよう、それぞれの中間処理水流量調整弁25の開度を対応する中間処理水流量検出器24の検出値に基づいて調整する。 The water softening control device 34 is a detection value of the intermediate treatment water flow rate detector 24 corresponding to the opening degree of each intermediate treatment water flow rate adjusting valve 25 so that the amount of the intermediate treatment water flowing out from each water softening device 20 is constant. Adjust based on.

軟水化制御装置34は、複数のサンプリング弁31を順番に開放し、軟水装置20から流出する中間処理水のサンプルを、出口硬度検出器32に供給する。この中間処理水のサンプリングは、中間処理水の流量全体に比して十分に少量とされる。サンプリングラインL24を設ける代わりに、各軟水装置20の出口流路にそれぞれ出口硬度検出器32を設けてもよい。 The water softening control device 34 opens a plurality of sampling valves 31 in order, and supplies a sample of the intermediate treated water flowing out of the water softening device 20 to the outlet hardness detector 32. The sampling of this intermediate treatment water is sufficiently small compared to the entire flow rate of the intermediate treatment water. Instead of providing the sampling line L24, an outlet hardness detector 32 may be provided in the outlet flow path of each water softening device 20.

軟水化制御装置34は、出口硬度検出器32の検出値が所定の硬度設定値以上となった場合に軟水装置20に再生運転をさせる硬度基準制御部341と、入口硬度検出器22の検出値と中間処理水流量検出器24の検出値との積の時間積分値が所定の総量設定値以上となった場合に軟水装置に再生運転をさせる総量基準制御部342と、を有する。 The water softening control device 34 has a hardness reference control unit 341 that causes the water softening device 20 to perform a regeneration operation when the detection value of the outlet hardness detector 32 is equal to or higher than a predetermined hardness set value, and a detection value of the inlet hardness detector 22. It has a total amount reference control unit 342 that causes the water softening device to perform a regeneration operation when the time integrated value of the product of the intermediate treated water flow rate detector 24 and the detected value becomes equal to or more than a predetermined total amount set value.

硬度基準制御部341は、いずれかの軟水装置20から流出する中間処理水の硬度が高くなった場合に、硬度が高い中間処理水を流出する軟水装置20にイオン交換能力を回復する再生運転を行わせることによって、EDI装置40に誤って硬度が高い水が供給されてトラブルを引き起こすことを防止する。 The hardness reference control unit 341 performs a regeneration operation for restoring the ion exchange capacity to the water softening device 20 that flows out the intermediate treated water having a high hardness when the hardness of the intermediate treated water flowing out from any of the water softening devices 20 becomes high. By doing so, it is possible to prevent the EDI device 40 from being accidentally supplied with water having a high hardness and causing trouble.

また、総量基準制御部342は、それぞれの軟水装置20に流入した硬度成分の累積量が総量設定値以上となったときに、再生装置にイオン交換体を再生させる構成としたことで、軟水装置20の破過を事前に予測して、EDI装置に供給される中間処理水の硬度をより低いレベルに保持することができる。 Further, the total amount reference control unit 342 is configured to regenerate the ion exchanger in the regenerating device when the cumulative amount of the hardness components flowing into each water softening device 20 exceeds the total amount set value. The breakthrough of 20 can be predicted in advance to keep the hardness of the intermediate treated water supplied to the EDI apparatus at a lower level.

軟水化制御装置34では、硬度基準制御部341及び総量基準制御部342がそれぞれ異なる基準で軟水装置20のイオン交換能力を監視し、いずれかが軟水装置20のイオン交換能力が低下していると判断した場合にその軟水装置20に再生運転を行わせるよう構成され得る。さらに、軟水化制御装置34は、一定時間毎に軟水装置20に再生運転を行わせる制御等を同時に行ってもよい。 In the water softening control device 34, the hardness reference control unit 341 and the total amount reference control unit 342 monitor the ion exchange capacity of the water softening device 20 according to different standards, and one of them states that the ion exchange capacity of the water softening device 20 is reduced. If it is determined, the water softening device 20 may be configured to perform a regeneration operation. Further, the water softening control device 34 may simultaneously perform control or the like to cause the water softening device 20 to perform a regeneration operation at regular time intervals.

軟水化制御装置34は、軟水装置20に再生運転をさせるとき、少なくとも1つの他の軟水装置20に透過水を供給して中間処理水を導出させる。好ましくは、軟水化制御装置34は、複数の軟水装置20に同時に再生運転をさせないようにする。これにより、軟水装置20の下流側にバッファタンクを設けなくても、軟水装置20の再生運転により脱気装置30ひいてはEDI装置40への中間処理水の供給を停止する必要がない。また、軟水装置20とEDI装置40との間に設けるとしても、バッファタンクの容量を小さくできるので、設備コストを低減できる。 When the water softening device 20 is allowed to perform the regeneration operation, the water softening control device 34 supplies the permeated water to at least one other water softening device 20 to derive the intermediate treated water. Preferably, the water softening control device 34 prevents the plurality of water softening devices 20 from simultaneously performing the regeneration operation. As a result, even if the buffer tank is not provided on the downstream side of the water softening device 20, it is not necessary to stop the supply of the intermediate treated water to the degassing device 30 and thus the EDI device 40 by the regeneration operation of the water softening device 20. Further, even if it is provided between the water softening device 20 and the EDI device 40, the capacity of the buffer tank can be reduced, so that the equipment cost can be reduced.

また、軟水化制御装置34は、軟水装置20に再生運転をさせるとき、バイパスラインL23を介して、再生運転中の軟水装置20をバイパスして透過水を他の軟水装置20から導出される中間処理水に混合するよう、バイパス遮断弁29を制御する。いずれかの軟水装置20が再生運転を行うときに、その軟水装置20からの中間処理水に相当する流量の透過水を他の軟水装置20から流出する中間処理水に混合することで、各軟水装置20の流量を一定に保持したま、脱気装置30ひいてはEDI装置40に供給される中間処理水の流量を一定に保つことができる。これによって、軟水装置20の下流側にバッファタンクを設けなくても、一定の流量でEDI装置40の運転を継続することができる。したがって、軟水化制御装置34は、再生運転を行っている軟水装置20の数に応じて、バイパスラインL23から中間処理水に混合する透過水の流量を調節するよう、バイパス流量調整弁28の開度をバイパス流量検出器27の検出値に基づいて調整することが望ましい。 Further, when the water softening control device 34 causes the water softening device 20 to perform the regeneration operation, the permeated water is led out from the other water softening device 20 by bypassing the water softening device 20 during the regeneration operation via the bypass line L23. The bypass shutoff valve 29 is controlled so as to be mixed with the treated water. When any of the soft water devices 20 performs the regeneration operation, the permeated water having a flow rate corresponding to the intermediate treated water from the soft water device 20 is mixed with the intermediate treated water flowing out from the other soft water device 20, so that each soft water is softened. While the flow rate of the device 20 is kept constant, the flow rate of the intermediate treated water supplied to the degassing device 30 and thus the EDI device 40 can be kept constant. As a result, the operation of the EDI device 40 can be continued at a constant flow rate without providing a buffer tank on the downstream side of the water softening device 20. Therefore, the water softening control device 34 opens the bypass flow rate adjusting valve 28 so as to adjust the flow rate of the permeated water mixed with the intermediate treated water from the bypass line L23 according to the number of the water softening devices 20 performing the regeneration operation. It is desirable to adjust the degree based on the detection value of the bypass flow rate detector 27.

軟水装置20は、再生運転時に複数の箇所に再生液を供給するスプリットフロー再生を行うことが好ましい。具体的には、軟水装置20は、交換層の上端部及び下端部の両側に再生液が供給され、交換層の略中央部から再生液が排出されることが好ましい。このように、交換層を複数の部分に分けて再生液を挿通することにより、イオン交換体を効率よく再生することができる。 It is preferable that the water softening device 20 performs split flow regeneration in which the regeneration liquid is supplied to a plurality of locations during the regeneration operation. Specifically, in the water softening device 20, it is preferable that the regenerated liquid is supplied to both the upper end portion and the lower end portion of the exchange layer, and the regenerated liquid is discharged from the substantially central portion of the exchange layer. In this way, by dividing the exchange layer into a plurality of portions and inserting the regenerating liquid, the ion exchanger can be efficiently regenerated.

脱気装置30は、中間処理水から溶存している気体を除去することにより、溶存する気体によるEDI装置40の性能低下を抑制することができる。脱気装置30としては、典型的には脱炭酸装置が用いられる。純水製造システム1は、多段に設置される複数の脱気装置30を備えてもよく、並列に設置される複数の脱気装置を備えてもよい。 By removing the dissolved gas from the intermediate treated water, the degassing device 30 can suppress the deterioration of the performance of the EDI device 40 due to the dissolved gas. As the deaeration device 30, a decarboxylation device is typically used. The pure water production system 1 may include a plurality of degassing devices 30 installed in multiple stages, or may include a plurality of degassing devices installed in parallel.

EDI装置40は、軟水装置20から脱気装置30を介して供給される中間処理水の全量を処理できる数が並列に配設される。各EDI装置40は、中間処理水を、イオンを除去した処理水(純水)と、イオンが濃縮された濃縮水とに分離する。 The EDI device 40 is arranged in parallel in a number capable of processing the entire amount of the intermediate treated water supplied from the water softening device 20 via the degassing device 30. Each EDI device 40 separates the intermediate treated water into treated water (pure water) from which ions have been removed and concentrated water in which ions have been concentrated.

純水製造システム1は、逆浸透膜装置10の透過水から軟水装置20でイオンを除去した中間処理水をEDI装置40に供給する構成としたことで、軟水装置から流出する中間処理水の全量をEDI装置40に供給することができる。このため、純水製造システム1は、軟水装置20の利用効率が高く、比較的安価に純水を製造できる。 The pure water production system 1 is configured to supply the EDI device 40 with the intermediate treated water from which the ions have been removed from the permeated water of the reverse osmosis membrane device 10 by the water softening device 20, so that the total amount of the intermediate treated water flowing out from the water softening device is reached. Can be supplied to the EDI device 40. Therefore, the pure water production system 1 has high utilization efficiency of the water softening device 20, and can produce pure water at a relatively low cost.

純水製造システム1では、軟水化制御装置34が、中間処理水の硬度が高くなった場合には軟水装置20にイオン交換能力を回復する再生運転を行わせるため、EDI装置に誤って硬度が高い水が供給されてトラブルを引き起こすことが防止される。 In the pure water production system 1, the water softening control device 34 causes the water softening device 20 to perform a regeneration operation for recovering the ion exchange capacity when the hardness of the intermediate treated water becomes high, so that the hardness of the EDI device is erroneously increased. It is prevented from being supplied with high water and causing trouble.

純水製造システム1は、並列して配置される複数の軟水装置20を備え、軟水化制御装置34がすべての軟水装置20がイオン交換体の再生により同時に中間処理水の供給を停止することがないように制御し、かつ再生運転されている軟水装置20による中間処理水の流量減少を補うようバイパスラインL23から下流側に透過水を供給するので、バッファタンクがなくてもEDI装置に中間処理水を連続して供給することができる。 The pure water production system 1 includes a plurality of water softening devices 20 arranged in parallel, and the water softening control device 34 may stop the supply of intermediate treated water at the same time by all the water softening devices 20 due to the regeneration of the ion exchanger. Since the permeated water is supplied from the bypass line L23 to the downstream side so as to compensate for the decrease in the flow rate of the intermediate treated water due to the soft water device 20 which is controlled so as not to be regenerated and is being regenerated, the intermediate treatment is performed on the EDI device even if there is no buffer tank. Water can be supplied continuously.

以上、本発明の純水製造システムの好ましい各実施形態につき説明したが、本発明は、上述の実施形態に制限されるものではなく、適宜変更が可能である。 Although the preferred embodiments of the pure water production system of the present invention have been described above, the present invention is not limited to the above-described embodiments and can be appropriately modified.

本発明に係る純水製造システムにおいて、硬度基準制御部及び総量基準制御部のいずれか一方は省略されてもよい。本発明に係る純水製造システムにおいて、それぞれの軟水装置が再生運転時にはイオン交換体を通さずに透過水を下流側に供給するバイパス流路を有してもよい。また、本発明に係る純水製造システムは、各装置の始動時等に流出する処理が不完全な水を上流側に還流させる流路等、本発明の効果を阻害しないさらなる構成を備えてもよい。 In the pure water production system according to the present invention, either the hardness standard control unit or the total amount standard control unit may be omitted. In the pure water production system according to the present invention, each water softening device may have a bypass flow path for supplying permeated water to the downstream side without passing through the ion exchanger during the regeneration operation. Further, the pure water production system according to the present invention may be further provided with a further configuration that does not impair the effect of the present invention, such as a flow path for recirculating incompletely processed water flowing out at the start of each device to the upstream side. good.

1 純水製造システム
10 逆浸透膜装置
11 原水タンク
12 原水水質検出器
13 原水ポンプ
14 インバータ
15 透過水流量検出器
16 濃縮水流量検出器
17 濃縮水排出調整弁
18 膜分離制御装置
20 軟水装置
21 透過水タンク
22 入口硬度検出器
23 透過水ポンプ
24 中間処理水流量検出器
25 中間処理水流量調整弁
26 中間処理水遮断弁
27 バイパス流量検出器
28 バイパス流量調整弁
29 バイパス遮断弁
30 脱気装置
31 サンプリング弁
32 出口硬度検出器
33 再生液タンク
34 軟水化制御装置
341 硬度基準制御部
342 総量基準制御部
40 EDI装置
41 処理水タンク
L11 原水供給ライン
L12 透過水導出ライン
L13 濃縮水ライン
L21 透過水供給ライン
L22 中間処理水導出ライン
L23 バイパスライン
L24 サンプリングライン
L25 再生液ライン
L41 中間処理水供給ライン
L42 処理水ライン
1 Pure water production system 10 Reverse permeation membrane device 11 Raw water tank 12 Raw water quality detector 13 Raw water pump 14 Inverter 15 Permeated water flow rate detector 16 Concentrated water flow rate detector 17 Concentrated water discharge control valve 18 Film separation control device 20 Soft water device 21 Permeated water tank 22 Inlet hardness detector 23 Permeated water pump 24 Intermediate treated water flow rate detector 25 Intermediate treated water flow control valve 26 Intermediate treated water shutoff valve 27 Bypass flow rate detector 28 Bypass flow control valve 29 Bypass shutoff valve 30 Degassing device 31 Sampling valve 32 Outlet hardness detector 33 Regenerating liquid tank 34 Softening control device 341 Hardness standard control unit 342 Total amount standard control unit 40 EDI device 41 Treated water tank L11 Raw water supply line L12 Permeated water lead-out line L13 Concentrated water line L21 Permeated water Supply line L22 Intermediate treated water lead-out line L23 Bypass line L24 Sampling line L25 Recycled liquid line L41 Intermediate treated water supply line L42 Treated water line

Claims (8)

逆浸透膜によって原水を透過水と濃縮水とに分離する逆浸透膜装置と、
イオン交換により前記透過水から硬度分を除去した中間処理水を製造する軟水装置と、
電気再生式脱塩により前記中間処理水からイオンを除去した処理水を製造するEDI装置と、
前記軟水装置から流出する前記中間処理水の硬度を検出する出口硬度検出器と、
前記出口硬度検出器の検出値が所定の硬度設定値以上となった場合に前記軟水装置に再生運転をさせる硬度基準制御部を有する制御装置と、
を備える、純水製造システム。
A reverse osmosis membrane device that separates raw water into permeated water and concentrated water using a reverse osmosis membrane.
A water softening device that produces intermediate treated water from which hardness is removed from the permeated water by ion exchange, and
An EDI device that produces treated water from which ions have been removed from the intermediate treated water by electroregenerative desalination, and
An outlet hardness detector that detects the hardness of the intermediate treated water flowing out of the water softening device, and
A control device having a hardness reference control unit that causes the water softening device to perform a regeneration operation when the detection value of the outlet hardness detector is equal to or higher than a predetermined hardness set value.
A pure water production system.
前記軟水装置に導入される前記透過水の硬度を検出する入口硬度検出器と、
前記軟水装置に導入される前記透過水又は前記軟水装置から導出される前記中間処理水の流量を検出する流量検出器と、
をさらに備え、
前記制御装置は、前記入口硬度検出器の検出値と前記流量検出器の検出値との積の時間積分値が所定の総量設定値以上となった場合に前記軟水装置に再生運転をさせる総量基準制御部をさらに有する、請求項1に記載の純水製造システム。
An inlet hardness detector that detects the hardness of the permeated water introduced into the water softening device, and
A flow rate detector that detects the flow rate of the permeated water introduced into the water softening device or the intermediate treated water derived from the water softening device.
Further prepare
The control device is a total amount reference for causing the water softening device to perform a regeneration operation when the time integral value of the product of the detection value of the inlet hardness detector and the detection value of the flow rate detector becomes a predetermined total amount set value or more. The pure water production system according to claim 1, further comprising a control unit.
逆浸透膜によって原水を透過水と濃縮水とに分離する逆浸透膜装置と、
イオン交換により前記透過水から硬度分を除去した中間処理水を製造する軟水装置と、
電気再生式脱塩により前記中間処理水からイオンを除去した処理水を製造するEDI装置と、
前記軟水装置に導入される前記透過水の硬度を検出する入口硬度検出器と、
前記軟水装置に導入される前記透過水又は前記軟水装置から導出される前記中間処理水の流量を検出する流量検出器と、
前記入口硬度検出器の検出値と前記流量検出器の検出値との積の時間積分値が所定の総量設定値以上となった場合に前記軟水装置に再生運転をさせる総量基準制御部を備える制御装置と、
を備える、純水製造システム。
A reverse osmosis membrane device that separates raw water into permeated water and concentrated water using a reverse osmosis membrane.
A water softening device that produces intermediate treated water from which hardness is removed from the permeated water by ion exchange, and
An EDI device that produces treated water from which ions have been removed from the intermediate treated water by electroregenerative desalination, and
An inlet hardness detector that detects the hardness of the permeated water introduced into the water softening device, and
A flow rate detector that detects the flow rate of the permeated water introduced into the water softening device or the intermediate treated water derived from the water softening device.
A control provided with a total amount reference control unit for causing the water softening device to perform a regeneration operation when the time integral value of the product of the detection value of the inlet hardness detector and the detection value of the flow rate detector becomes equal to or more than a predetermined total amount set value. With the device
A pure water production system.
複数の前記軟水装置が並列して配置され、
前記制御装置は、前記軟水装置に前記再生運転をさせるとき、少なくとも1つの他の前記軟水装置に前記中間処理水を導出させる、請求項1から3のいずれかに記載の純水製造システム。
A plurality of the water softening devices are arranged in parallel,
The pure water production system according to any one of claims 1 to 3, wherein the control device causes at least one other water softening device to derive the intermediate treated water when the water softening device is allowed to perform the regeneration operation.
前記制御装置は、前記軟水装置に前記再生運転をさせるとき、前記再生運転中の前記軟水装置をバイパスして前記透過水を他の前記軟水装置から導出される前記中間処理水に混合する、請求項4に記載の純水製造システム。 When the water softening device is allowed to perform the regeneration operation, the control device bypasses the water softening device during the regeneration operation and mixes the permeated water with the intermediate treated water derived from the other water softening device. Item 4. The pure water production system according to Item 4. 前記中間処理水から溶存している気体を除去する脱気装置をさらに備える、請求項1から5のいずれかに記載の純水製造システム。 The pure water production system according to any one of claims 1 to 5, further comprising a degassing device for removing dissolved gas from the intermediate treated water. 前記軟水装置は、前記再生運転時に複数の箇所に再生液を供給する、請求項1から6のいずれかに記載の純水製造システム。 The pure water production system according to any one of claims 1 to 6, wherein the water softening device supplies a regenerated liquid to a plurality of locations during the regenerating operation. 前記逆浸透膜装置は、前記透過水の流量が一定となるよう制御される、請求項1から7のいずれかに記載の純水製造システム。 The pure water production system according to any one of claims 1 to 7, wherein the reverse osmosis membrane device is controlled so that the flow rate of the permeated water becomes constant.
JP2020140243A 2020-08-21 2020-08-21 Pure water production system Pending JP2022035725A (en)

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JP2008194658A (en) * 2007-02-16 2008-08-28 Miura Co Ltd Pure water production system
JP2010058013A (en) * 2008-09-01 2010-03-18 Miura Co Ltd Pure water production system
JP2011020029A (en) * 2009-07-14 2011-02-03 Miura Co Ltd Pure water production system
JP2012196632A (en) * 2011-03-22 2012-10-18 Miura Co Ltd Water treatment method and water treatment system
JP2017131846A (en) * 2016-01-28 2017-08-03 栗田工業株式会社 Ultrapure water production apparatus and operation method of ultrapure water production apparatus
JP2017131872A (en) * 2016-01-29 2017-08-03 三浦工業株式会社 Water treatment system

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003220386A (en) * 2002-01-31 2003-08-05 Miura Co Ltd Water softener and method for controlling regeneration of the same
JP2008194658A (en) * 2007-02-16 2008-08-28 Miura Co Ltd Pure water production system
JP2010058013A (en) * 2008-09-01 2010-03-18 Miura Co Ltd Pure water production system
JP2011020029A (en) * 2009-07-14 2011-02-03 Miura Co Ltd Pure water production system
JP2012196632A (en) * 2011-03-22 2012-10-18 Miura Co Ltd Water treatment method and water treatment system
JP2017131846A (en) * 2016-01-28 2017-08-03 栗田工業株式会社 Ultrapure water production apparatus and operation method of ultrapure water production apparatus
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