JP2022035545A - Liquid discharge head and actuator - Google Patents

Abstract

To reduce the possibility that a crack may occur in a piezoelectric element.SOLUTION: In a liquid discharge head, a piezoelectric body, a common electrode and a plurality of individual electrodes are laminated in a first direction, and an end part of the common electrode is extended in a second direction orthogonal to the first direction, in a first boundary that is a boundary between an active region and a non-active region. Each of the plurality of individual electrodes has a first portion positioned at the first boundary, and a first portion that the first individual electrode of the plurality of individual electrodes has is extended in a third direction. The active region is a region in which the piezoelectric body is arranged in a space in the first direction between the individual region and the common electrode, of regions in which the individual electrodes are arranged. The non-active region is a region in which the piezoelectric body is not arranged in a space in the first direction between the individual electrode and the common electrode. The third direction, the second direction and a fourth direction are set on the same plane and the third direction crosses both of the second direction and the fourth direction at an angle different from a right angle, and the fourth direction is orthogonal to the first direction and the second direction.SELECTED DRAWING: Figure 4

Description

The present invention relates to a liquid discharge head and an actuator.

Conventionally, with respect to a liquid discharge head, Patent Document 1 discloses a liquid discharge head including a common electrode, a piezoelectric body, and a piezoelectric element having a plurality of individual electrodes. This liquid ejection head is provided in, for example, a liquid ejection device such as a printer, and ejects a liquid such as ink by utilizing the displacement of the piezoelectric body generated by applying a voltage.

Japanese Unexamined Patent Publication No. 2012-176578

However, in the above-mentioned prior art, when a voltage is applied, between the active region of the piezoelectric material sandwiched between the common electrode and the individual electrodes and the inactive region not sandwiched by each of the common electrode and the plurality of individual electrodes. There is a difference in displacement. Therefore, at the boundary between the active region and the non-active region, tensile stress due to the difference in displacement may occur, and the piezoelectric element may be cracked.

In order to solve the above problems, one aspect of the liquid discharge head according to the preferred embodiment of the present invention is a piezoelectric body having a plurality of active regions and a common electrode commonly provided for the plurality of active regions. A liquid discharge head having a plurality of individual electrodes individually provided for the plurality of active regions, wherein the piezoelectric body, the common electrode, and the plurality of individual electrodes are in the first direction. At the first boundary, which is the boundary between the active region and the non-active region, the end portion of the common electrode extends in the second direction orthogonal to the first direction, and each of the plurality of individual electrodes is laminated. The first portion of the plurality of individual electrodes having the first portion located at the first boundary extends in the third direction, and the active region is formed by the individual electrode. Among the provided regions, the piezoelectric body is a region provided between the individual electrode and the common electrode in the first direction, and the inactive region is a region provided with the individual electrode. , The piezoelectric body is a region not provided between the individual electrode and the common electrode in the first direction, and the third direction is located on the same plane as the second and fourth directions. In addition, both the second direction and the fourth direction intersect at different angles from the right electrode, and the fourth direction is orthogonal to the first direction and the second direction.

One aspect of the actuator according to the public aspect of the present invention is a piezoelectric body having a plurality of active regions, a common electrode commonly provided for the plurality of active regions, and the plurality of active regions. An actuator having a plurality of individually provided individual electrodes, wherein the piezoelectric body, the common electrode, and the plurality of individual electrodes are laminated in the first direction, and a boundary between the active region and the inactive region. At the first boundary, the end of the common electrode extends in a second direction orthogonal to the first direction, and each of the plurality of individual electrodes has a first portion located at the first boundary. The first portion of the plurality of individual electrodes having the first individual electrode extends in the third direction, and the active region includes the piezoelectric material in the region provided with the individual electrodes. The region provided between the individual electrode and the common electrode in the first direction, and the inactive region is the region in which the individual electrode is provided, in which the piezoelectric material is the individual electrode and the common electrode. It is a region not provided between the first direction and the third direction, which is located on the same plane as the second direction and the fourth direction, and is in the second direction and the fourth direction. It intersects both at right angles and different angles, and the fourth direction is orthogonal to the first direction and the second direction.

The schematic diagram which illustrates the liquid discharge apparatus 100 which concerns on 1st Embodiment. It is an exploded perspective view of the liquid discharge head 26. FIG. 2 is a cross-sectional view taken along the line aa in FIG. An enlarged plan view of the vicinity of the piezoelectric element 38. FIG. 4 is a cross-sectional view taken along the line bb in FIG. The figure which shows a plurality of active regions Ac and inactive regions Ia. Enlarged view of the active region boundary Ba. The figure which shows the laminated area Sa and the non-stacked area Is. FIG. 3 is an enlarged plan view of the vicinity of the piezoelectric element 38a in the second embodiment. FIG. 9 is a cross-sectional view taken along the line cc in FIG. The plan view of the piezoelectric element 38b in the 3rd Embodiment. The plan view of the piezoelectric element 38c in 4th Embodiment.

Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings. However, in each figure, the dimensions and scale of each part are appropriately different from the actual ones. Further, since the embodiments described below are suitable specific examples of the present invention, various technically preferable limitations are attached, but the scope of the present invention particularly limits the present invention in the following description. Unless otherwise stated, it is not limited to these forms.

1. 1. 1st Embodiment FIG. 1 is a schematic diagram illustrating the liquid discharge device 100 according to the 1st embodiment. The liquid ejection device 100 of the first embodiment is an inkjet printing apparatus that ejects ink, which is an example of "liquid", to the medium 12. The medium 12 is typically printing paper, but a printing target of any material such as a resin film or a cloth is used as the medium 12. As illustrated in FIG. 1, a liquid container 14 for storing ink is installed in the liquid ejection device 100. For example, a cartridge that can be attached to and detached from the liquid ejection device 100, a bag-shaped ink pack made of a flexible film, or an ink tank that can be refilled with ink is used as the liquid container 14.

As illustrated in FIG. 1, the liquid discharge device 100 includes a control unit 20, a transfer mechanism 22, a moving mechanism 24, and a liquid discharge head 26. The control unit 20 includes, for example, a processing circuit such as a CPU or FPGA and a storage circuit such as a semiconductor memory, and comprehensively controls each element of the liquid discharge device 100. CPU is an abbreviation for Central Processing Unit. FPGA is an abbreviation for Field Programmable Gate Array. The transport mechanism 22 transports the medium 12 along the Y axis under the control of the control unit 20.

The moving mechanism 24 reciprocates the liquid discharge head 26 along the X axis under the control of the control unit 20. The X-axis intersects the Y-axis to which the medium 12 is conveyed. For example, the X-axis and the Y-axis are orthogonal to each other. The moving mechanism 24 of the first embodiment includes a substantially box-shaped transport body 242 that accommodates the liquid discharge head 26, and a transport belt 244 to which the transport body 242 is fixed. It should be noted that a configuration in which a plurality of liquid discharge heads 26 are mounted on the transport body 242 or a configuration in which the liquid container 14 is mounted on the transport body 242 together with the liquid discharge head 26 may be adopted.

The liquid ejection head 26 ejects the ink supplied from the liquid container 14 from the plurality of nozzles N to the medium 12 under the control of the control unit 20. An image is formed on the surface of the medium 12 by each liquid ejection head 26 ejecting ink to the medium 12 in parallel with the transport of the medium 12 by the transport mechanism 22 and the repetitive reciprocation of the transport body 242.

1.1. Liquid discharge head 26
FIG. 2 is an exploded perspective view of the liquid discharge head 26. FIG. 3 is a cross-sectional view taken along the line aa in FIG. As illustrated in FIG. 2, assume a Z-axis perpendicular to the XY plane. The cross section shown in FIG. 3 is a cross section parallel to the XX plane. The Z-axis is an axis along the ink ejection direction of the liquid ejection head 26. As illustrated in FIG. 2, one direction along the Z axis when viewed from an arbitrary point is referred to as "Z1 direction", and the direction opposite to the Z1 direction is referred to as "Z2 direction". The Z1 direction and the Z2 direction are collectively referred to as "Z-axis direction". Similarly, one direction along the X axis when viewed from an arbitrary point is referred to as "X1 direction", and the direction opposite to the X1 direction is referred to as "X2 direction". The X1 direction and the X2 direction are collectively referred to as "X-axis direction". Similarly, one direction along the Y axis when viewed from an arbitrary point is referred to as "Y1 direction", and the direction opposite to the Y1 direction is referred to as "Y2 direction". The Y1 direction and the Y2 direction are collectively referred to as "Y-axis direction".

As illustrated in FIGS. 2 and 3, the liquid discharge head 26 includes a substantially rectangular flow path substrate 32 that is long along the Y axis. A pressure chamber substrate 34, a diaphragm 36, a plurality of piezoelectric elements 38, a housing portion 42, and a sealing body 44 are installed on the surface of the flow path substrate 32 in the Z1 direction. A nozzle plate 46 and a vibration absorbing body 48 are installed on the surface of the flow path substrate 32 in the Z2 direction. Each element of the liquid discharge head 26 is generally a long plate-shaped member along the Y axis like the flow path substrate 32, and is bonded to each other by using, for example, an adhesive.

As illustrated in FIG. 2, the nozzle plate 46 is a plate-shaped member in which a plurality of nozzles N arranged along the Y axis are formed. Each nozzle N is a through hole through which ink passes. The flow path substrate 32, the pressure chamber substrate 34, and the nozzle plate 46 are formed by processing, for example, a silicon single crystal substrate by a semiconductor manufacturing technique such as etching. However, the material and manufacturing method of each element of the liquid discharge head 26 are arbitrary. The direction of the Y axis can be paraphrased as the direction in which a plurality of nozzles N are arranged.

The flow path substrate 32 is a plate-shaped member for forming a flow path of ink. As illustrated in FIGS. 2 and 3, the flow path substrate 32 is formed with an opening 322, a supply flow path 324, and a communication flow path 326. The opening 322 is a through hole that is continuous over a plurality of nozzles N along the Y axis in a plan view from the direction of the Z axis. The supply flow path 324 and the communication flow path 326 are through holes individually formed for each nozzle N. Further, as illustrated in FIG. 3, a relay flow path 328 over a plurality of supply flow paths 324 is formed on the surface of the flow path substrate 32 in the Z2 direction. The relay flow path 328 is a flow path that allows the opening 322 and the plurality of supply flow paths 324 to communicate with each other.

The housing portion 42 is, for example, a structure manufactured by injection molding of a resin material, and is fixed to the surface of the flow path substrate 32 in the Z1 direction. As illustrated in FIG. 3, the housing portion 42 is formed with a housing portion 422 and an introduction port 424. The accommodating portion 422 is a concave portion having an outer shape corresponding to the opening portion 322 of the flow path substrate 32. The introduction port 424 is a through hole that communicates with the accommodating portion 422. As can be understood from FIG. 3, the space in which the opening 322 of the flow path substrate 32 and the accommodating portion 422 of the housing portion 42 communicate with each other functions as the liquid storage chamber R. The ink supplied from the liquid container 14 and passing through the introduction port 424 is stored in the liquid storage chamber R.

The vibration absorber 48 absorbs pressure fluctuations in the liquid storage chamber R. The vibration absorber 48 includes, for example, a flexible sheet member capable of elastic deformation. Specifically, in the Z2 direction in the flow path substrate 32 so as to block the opening 322 of the flow path substrate 32, the relay flow path 328, and the plurality of supply flow paths 324 to form the bottom surface of the liquid storage chamber R. A vibration absorbing body 48 is installed on the surface.

As illustrated in FIGS. 2 and 3, the pressure chamber substrate 34 is a plate-shaped member in which a plurality of pressure chambers C corresponding to the plurality of nozzles N are formed. The plurality of pressure chambers C are arranged at intervals along the Y axis. Each pressure chamber C is a long opening along the X axis. The end of the pressure chamber C in the X1 direction overlaps one supply flow path 324 in a plan view, and the end of the pressure chamber C in the X2 direction is one communication flow path 326 of the flow path substrate 32 in a plan view. Overlap on.

The diaphragm 36 is installed on the surface of the pressure chamber substrate 34 in the direction opposite to the surface facing the flow path substrate 32. The diaphragm 36 is a plate-shaped member that can be elastically deformed. As illustrated in FIG. 3, the diaphragm 36 of the first embodiment is composed of a laminate of an elastic film 361 and an insulating film 362. The insulating film 362 is located in the direction opposite to the pressure chamber substrate 34 when viewed from the elastic film 361. The elastic membrane 361 is formed of, for example, silicon oxide. The insulating film 362 is formed of, for example, zirconium oxide.

As can be understood from FIG. 3, the flow path substrate 32 and the diaphragm 36 face each other at a distance inside each pressure chamber C. The pressure chamber C is located between the flow path substrate 32 and the diaphragm 36, and is a space for applying pressure to the ink filled in the pressure chamber C. The diaphragm 36 constitutes a part of the wall surface of the pressure chamber C. The ink stored in the liquid storage chamber R branches from the relay flow path 328 to each supply flow path 324, and is supplied and filled in parallel to the plurality of pressure chambers C. That is, the liquid storage chamber R functions as a common liquid chamber for supplying ink to the plurality of pressure chambers C.

As illustrated in FIGS. 2 and 3, a plurality of piezoelectric elements 38 corresponding to the plurality of nozzles N are installed on the surface of the diaphragm 36 in the direction opposite to the pressure chamber substrate 34. Each piezoelectric element 38 is an actuator that is deformed by the supply of a drive signal, and is formed in a long shape along the X axis. The plurality of piezoelectric elements 38 are arranged along the Y axis so as to correspond to the plurality of pressure chambers C. When the diaphragm 36 vibrates in conjunction with the deformation of the piezoelectric element 38, the pressure in the pressure chamber C fluctuates, so that the ink filled in the pressure chamber C passes through the communication flow path 326 and the nozzle N and is ejected. Will be done. That is, the piezoelectric element 38 is a drive element that vibrates the diaphragm 36 to eject the ink in the pressure chamber C from the nozzle N.

The sealing body 44 of FIGS. 2 and 3 is a structure that protects the plurality of piezoelectric elements 38 from the outside air and reinforces the mechanical strength of the pressure chamber substrate 34 and the diaphragm 36. The sealing body 44 is fixed to the surface of the diaphragm 36 with, for example, an adhesive. A plurality of piezoelectric elements 38 are housed inside the recess formed on the surface of the sealing body 44 facing the diaphragm 36.

As illustrated in FIG. 3, the wiring board 60 is joined to the wiring (not shown) formed on the surface of the diaphragm 36. The wiring board 60 is a mounting component on which a plurality of wirings for electrically connecting the control unit 20 and the liquid discharge head 26 are formed. For example, a flexible wiring board 60 such as FPC or FFC is preferably adopted. FPC is an abbreviation for Flexible Printed Circuit. FFC is an abbreviation for Flexible Flat Cable.

The specific configuration of each piezoelectric element 38 will be described in detail below. FIG. 4 is an enlarged plan view of the vicinity of the piezoelectric element 38. In FIG. 4, the outline of the element located behind any one element is also shown by a solid line for convenience. FIG. 5 is a cross-sectional view taken along the line bb in FIG.

As exemplified in FIGS. 4 and 5, in the piezoelectric element 38, the individual electrode 53, the piezoelectric body 52, and the common electrode 51 are generally laminated in the above order from the diaphragm 36 side in the Z-axis direction. It is a structure. The Z-axis direction is an example of the "first direction". In the present specification, the expression "element A and element B are laminated" is not limited to the configuration in which element A and element B are in direct contact with each other. That is, if element A and element B partially or wholly overlap each other in a plan view, even in a configuration in which another element C is interposed between element A and element B, "element A and element B are It is included in the concept of "stacked". Similarly, the expression "element B is formed on the surface of element A" is not limited to the configuration in which element A and element B are in direct contact with each other. That is, even if the element C is formed on the surface of the element A and the element B is formed on the surface of the element C, if a part or all of the element A and the element B overlap in a plan view, the "element" is used. It is included in the concept that "element B is formed on the plane of A". The direction of the Z axis corresponds to the direction in which the common electrode 51, the piezoelectric body 52, and the individual electrodes 53 are laminated.

As illustrated in FIGS. 4 and 5, the individual electrode 53 is formed on the surface of the diaphragm 36. The individual electrode 53 is an electrode formed so as to be separated from each other for each of the piezoelectric elements 38. Specifically, a plurality of individual electrodes 53 are arranged side by side in the direction of the Y axis at intervals from each other. The individual electrode 53 is formed of a highly heat-resistant and low-resistance conductive material such as platinum or iridium. A drive signal is supplied to the connection terminal formed at the end of the individual electrodes 53 in the X2 direction via the wiring board 60. The longitudinal direction of each of the plurality of individual electrodes 53 is the X-axis direction. As illustrated in FIG. 5, the individual electrodes 53 are laminated in the Z2 direction with respect to the piezoelectric body 52. In the first embodiment, the individual electrode 53 is a so-called lower electrode.

The piezoelectric body 52 is formed on the surface of the diaphragm 36 on which the individual electrodes 53 are formed. In FIG. 4, the piezoelectric body 52 is shaded with diagonal lines from the upper right to the lower left. The piezoelectric body 52 is a strip-shaped dielectric film continuous along the Y axis over a plurality of piezoelectric elements 38. The piezoelectric body 52 is formed of a piezoelectric material such as lead zirconate titanate. As illustrated in FIG. 4, a notch 521 along the X axis is formed in the region of the piezoelectric body 52 corresponding to the gap between the pressure chambers C adjacent to each other. The notch 521 is an opening that penetrates the piezoelectric body 52. According to the above configuration, each piezoelectric element 38 is individually deformed for each pressure chamber C, and the propagation of vibration between the piezoelectric elements 38 is suppressed.

As illustrated in FIGS. 4 and 5, the common electrode 51 covers the piezoelectric body 52. In FIG. 4, the outline of the common electrode 51 is shown by a thick line. The common electrode 51 is a strip-shaped electrode that is continuous along the Y axis over a plurality of piezoelectric elements 38. A predetermined constant voltage is applied to the common electrode 51. The common electrode 51 is made of a low resistance conductive material such as platinum or iridium. As illustrated in FIG. 5, the common electrode 51 has a surface of the piezoelectric body 52 opposite to the diaphragm 36, an inner wall surface of the notch 521, and a region of the surface of the diaphragm 36 exposed inside the notch 521. Contact with. As illustrated in FIG. 5, the common electrode 51 is laminated in the Z1 direction with respect to the piezoelectric body 52. In the first embodiment, the common electrode 51 is a so-called upper electrode.

As illustrated in FIG. 4, the individual electrode 53 has a first portion U1, a second portion U2, and a third portion U3. In FIG. 4, in order to avoid complication of the drawing, the first portion U1, the second portion U2, and the third portion U3 are shown only on one individual electrode 53 out of the plurality of individual electrodes 53. Any one individual electrode 53 of the plurality of individual electrodes 53 is an example of the “first individual electrode”. The first portion U1 extends in the V2 direction. In the present specification, when it is described that a certain member extends in a specific direction, the certain member has a minute convex portion protruding in a direction intersecting the specific direction and a direction facing the direction intersecting the specific direction. It may have one or both of the recesses that are recessed, and may extend in a specific direction as a whole. In the first embodiment, all the first portions U1 of each of the plurality of individual electrodes 53 extend in the V2 direction. The V2 direction is an example of the "third direction". The V2 direction is coplanar with the Y2 and X2 directions and intersects both the Y2 and X2 directions at right angles and different angles. The Y2 direction is an example of the "second direction". The X2 direction is an example of the "fourth direction". The direction opposite to the V2 direction is referred to as "V1 direction".

Further, the angle formed by the Y2 direction and the V2 direction is preferably less than 90 degrees, more preferably less than 45 degrees. Further, as illustrated in FIG. 4, the second portion U2 and the third portion U3 do not overlap in the Y-axis direction. In other words, the second portion U2 and the third portion U3 do not overlap when viewed in the Y2 direction.

The first portion U1 is connected to the second portion U2 at the end in the V1 direction and is connected to the third portion U3 at the end in the V2 direction. The second portion U2 extends in the X-axis direction and is connected to the first portion U1 at the end in the X2 direction. In the example of FIG. 4, the position of the end portion of the second portion U2 in the X1 direction coincides with the position of the end portion of the common electrode 51 in the X1 direction. However, the end portion of the second portion U2 in the X1 direction may be located in the X1 direction from the end portion of the common electrode 51 in the X1 direction, or may be located in the X2 direction. The second portion U2 is arranged in the Z2 direction with respect to the pressure chamber C. The third portion U3 extends in the X-axis direction and is connected to the first portion U1 at the end in the X1 direction. The third portion U3 is an input wiring for taking in the electric power for driving the piezoelectric body 52 from the wiring board 60.

Further, as illustrated in FIG. 4, the intervals between the second portions U2 adjacent to each other are arranged so as to be the interval dY2. Further, the distance between the third portions U3 adjacent to each other is arranged so as to be the distance dY3. The interval dY2 and the interval dY3 are substantially the same. This "match" includes not only the case where the match is perfect, but also the case where it can be regarded as a match when manufacturing errors are taken into consideration. The distance d23 between the position of the end portion of the second portion U2 in the Y2 direction and the position of the end portion of the third portion U3 in the Y2 direction included in one individual electrode 53 is shorter than the distance dY2 and the distance dY3. For example, the interval d23 is approximately half the length of the interval dY2 and the interval dY3. According to the first embodiment, the length of the first portion U1 in the extending direction can be shortened as compared with the embodiment in which the interval d23 is longer than the interval dY2 and the interval dY3, and the arrangement of the individual electrodes 53 becomes easy. Further, according to the first embodiment, the length of the interval d1 of the first portion U1 adjacent to each other can be increased as compared with the embodiment in which the interval d23 is longer than the interval dY2 and the interval dY3. However, the interval d23 may match the interval dY2 and the interval dY3, or may be longer.

The piezoelectric body 52 has a plurality of active regions Ac and an inactive region Ia. The active region Ac and the inactive region Ia will be described with reference to FIG.

FIG. 6 is a diagram showing a plurality of active regions Ac and inactive regions Ia. Each of the plurality of active regions Ac is a region in which the piezoelectric body 52 is provided between the plurality of individual electrodes 53 and the common electrode 51 in the Z-axis direction in the region where the plurality of individual electrodes 53 are provided. In the example of FIG. 6, the active region Ac is shaded with diagonal lines from the upper right to the lower left.

The inactive region Ia is a region in which the piezoelectric body 52 is not provided between the plurality of individual electrodes 53 and the common electrode 51 in the Z-axis direction among the regions where the plurality of individual electrodes 53 are provided. In the example of FIG. 6, the inactive region Ia is shaded with diagonal lines from the upper left to the lower right. In the active region Ac, piezoelectric strain occurs when a voltage is applied to the piezoelectric body 52 via the common electrode 51 and the individual electrode 53. The piezoelectric element 38 changes the volume of the pressure chamber C due to the displacement caused by this piezoelectric strain. Specifically, the piezoelectric element 38 deforms the diaphragm 36 by the piezoelectric strain of the piezoelectric body 52, and changes the volume of the pressure chamber C. In the non-active region Ia, piezoelectric distortion does not occur even when a voltage is applied to the piezoelectric body 52. Therefore, at the boundary Ba between each of the plurality of active regions Ac and the inactive region Ia, a difference in displacement occurs when a voltage is applied. Hereinafter, for the sake of brevity, the boundary Ba between the active region Ac and the inactive region Ia will be referred to as an “active region boundary Ba”. The active region boundary Ba is an example of the "first boundary".

As illustrated in FIG. 6, at the active region boundary Ba, the end portion of the common electrode 51 extends in the Y-axis direction, and the first portion U1 possessed by each of the plurality of individual electrodes 53 is arranged. The second portion U2 of each of the plurality of individual electrodes 53 is located in the active region Ac. The third portion U3 of each of the plurality of individual electrodes 53 is located in the inactive region Ia. The stress generated at the active region boundary Ba will be described with reference to FIG. 7.

FIG. 7 is an enlarged view of the active region boundary Ba. In the example of FIG. 7, the active region Ac is shaded with diagonal lines from the upper right to the lower left, and the inactive region Ia is shaded with diagonal lines from the upper left to the lower right. As illustrated in FIG. 7, at the active region boundary Ba, the tensile stress SV2 toward the V2 direction, which is the extending direction of the first portion U1, and the V1 direction, which is the opposite direction of the V2 direction, due to the difference in displacement of the piezoelectric body 52. The toward tensile stress SV1 is generated. More specifically, the active region Ac in the first portion U1 contracts in the V1 direction, and a tensile stress SV1 is generated in the inactive region Ia in the first portion U1. Due to the reaction of the tensile stress SV1, the tensile stress SV2 is generated in the active region Ac in the first portion U1.

1.2. Summary of the First Embodiment As described above, according to the first embodiment, the liquid discharge head 26 has a piezoelectric body 52 having a plurality of active regions Ac and a common electrode 51 commonly provided for the plurality of active regions Ac. And a plurality of individual electrodes 53 individually provided for the plurality of active regions Ac. The piezoelectric body 52, the common electrode 51, and the plurality of individual electrodes 53 are laminated in the Z-axis direction. At the active region boundary Ba, the end of the common electrode 51 extends in the Y2 direction orthogonal to the Z-axis direction, and the first portion U1 of each of the plurality of individual electrodes 53 is arranged. The first portion U1 of any one of the plurality of individual electrodes 53 extends in the V2 direction. Any one individual electrode 53 of the plurality of individual electrodes 53 is an example of the “first individual electrode”. The plurality of active regions Ac are regions in which the piezoelectric body 52 is provided between the plurality of individual electrodes 53 and the common electrode 51 in the Z-axis direction among the regions where the plurality of individual electrodes 53 are provided. The inactive region Ia is a region in which the piezoelectric body 52 is not provided between the plurality of individual electrodes 53 and the common electrode 51 in the Z-axis direction among the regions where the plurality of individual electrodes 53 are provided. The V2 direction is coplanar with the Y2 and X2 directions and intersects both the Y2 and X2 directions at right angles and different angles. The X2 direction is orthogonal to the Z-axis direction and the Y2 direction.
The Z-axis direction is an example of the "first direction". The Y2 direction is an example of the "second direction". The V2 direction is an example of the "third direction". The X2 direction is an example of the "fourth direction". However, the Y1 direction may be an example of the "second direction". When the Y1 direction is an example of the "second direction", the V1 direction corresponds to the "third direction" and the X1 direction corresponds to the "fourth direction".

According to the first embodiment, when piezoelectric strain occurs in the active region Ac, tensile stress SV1 and tensile stress SV2 are generated. At the active region boundary Ba, the extending direction of the end portion of the common electrode 51 and the extending direction of the first portion U1 intersect with each other. Therefore, as illustrated in FIG. 7, the tensile stress SV1 is decomposed into a shear stress TY1 in the Y1 direction and a tensile stress SX1 in the X1 direction orthogonal to the Y1 direction, and the tensile stress SV2 is a shear stress in the Y2 direction. It is decomposed into the stress TY2 and the tensile stress SX2 in the X2 direction orthogonal to the Y2 direction. Hereinafter, the tensile stress SV1 and the tensile stress SV2 are collectively referred to as “tensile stress SV”. Similarly, the shear stress TY1 and the shear stress TY2 are collectively referred to as "shear stress TY", and the tensile stress SX1 and the tensile stress SX2 are collectively referred to as "tensile stress SX". The magnitude of the tensile stress SX is smaller than the magnitude of the tensile stress SV. Therefore, according to the first embodiment, the possibility of cracks in the piezoelectric element 38 can be reduced as compared with the embodiment in which the extending direction of the first portion U1 is orthogonal to the extending direction of the end portion of the common electrode 51. .. In particular, when the extending direction of the first portion U1 is orthogonal to the extending direction of the end portion of the common electrode 51, the length of the piezoelectric element 38 in the X-axis direction is larger than the length in the Y-axis direction. May cause a large tensile stress at the active region boundary Ba.
Further, in the embodiment in which the extending direction of the first portion U1 is orthogonal to the extending direction of the end portion of the common electrode 51, the active region Ac, the active region boundary Ba, and the inactive region Ia are arranged on the same straight line. Therefore, the strain of the entire active region Ac acts on the active region boundary Ba, and a large tensile stress is generated at the active region boundary Ba. In the present embodiment, the active region Ac, the active region boundary Ba, and the inactive region Ia are not arranged on the same straight line, but are arranged in a staggered manner. By arranging the active region Ac, the active region boundary Ba, and the inactive region Ia in a staggered manner, only the strain of the first portion U1 acts on the active region boundary Ba. The strain of the second portion U2 acts on the end of the first portion U1. Since the end portion of the first portion U1 is covered with the common electrode 51 and the strain acting on the end portion of the first portion U1 is received by both the piezoelectric element 38 and the common electrode 51, the end portion of the first portion U1 , The piezoelectric element 38 does not crack. Therefore, in the present embodiment, the strain acting on the active region boundary Ba is smaller than in the embodiment in which the extending direction of the first portion U1 is orthogonal to the extending direction of the end portion of the common electrode 51, and thus the piezoelectric element. The possibility of cracks in 38 can be reduced.

Further, the plurality of individual electrodes 53 are arranged side by side in the Y2 direction. That is, the V2 direction intersects the Y2 direction, which is the direction in which the plurality of individual electrodes 53 are arranged. By intersecting the V1 direction with respect to the Y2 direction, the tensile stress SV can be decomposed into the shear stress TY and the tensile stress SX, and the possibility of cracking in the piezoelectric element 38 can be reduced.

Further, the longitudinal direction of each of the plurality of individual electrodes 53 is the X2 direction. More precisely, the longitudinal direction of the second portion U2 and the third portion U3 of each of the plurality of individual electrodes 53 is the X2 direction. That is, the V2 direction intersects the X-axis direction, which is the longitudinal direction of the individual electrodes 53. By intersecting the V2 direction with respect to the X2 direction, the tensile stress SV can be decomposed into the shear stress TY and the tensile stress SX, and the possibility of cracking in the piezoelectric element 38 can be reduced.

Further, in the first embodiment, the angle formed by the Y2 direction and the V1 direction is less than 45 degrees. As the angle between the Y2 direction and the V1 direction decreases, the magnitude of the tensile stress SX decreases monotonically. Therefore, in the first embodiment, the magnitude of the tensile stress SX can be reduced and the possibility of cracks in the piezoelectric element 38 can be reduced as compared with the embodiment in which the angle formed by the Y2 direction and the V1 direction is 45 degrees. ..

Further, each of the plurality of individual electrodes 53 is located in the active region Ac and extends in the X-axis direction, and the third portion U3 is located in the inactive region Ia and extends in the X-axis direction. And include. According to the present embodiment, the size of the liquid discharge head 26 in the Y-axis direction can be reduced as compared with the embodiment in which the third portion U3 extends in the V1 direction.

Further, the second portion U2 and the third portion U3 do not overlap in the Y2 direction. In other words, the angle between the Y2 direction and the V1 direction is less than 90 degrees. According to the present embodiment, the tensile stress SV can be decomposed into the shear stress TY and the tensile stress SX as compared with the embodiment in which the angle formed by the Y2 direction and the V1 direction is 90 degrees, and the piezoelectric element 38 is cracked. Can be reduced.

Further, at the boundary between the laminated region Sa and the non-laminated region Is, the end portion of the piezoelectric body 52 extends in the Y2 direction, and the third portion U3 possessed by each of the plurality of individual electrodes 53 is arranged. Since the third portion U3 extends in the X-axis direction, the third portion U3 is orthogonal to the end portion of the piezoelectric body 52 at the boundary between the laminated region Sa and the non-laminated region Is. The laminated region Sa and the non-laminated region Is will be described with reference to FIG. The boundary between the laminated region Sa and the non-laminated region Is is an example of the "second boundary".

FIG. 8 is a diagram showing a laminated region Sa and a non-laminated region Is. The laminated region Sa is a region in which the individual electrodes 53 are laminated with respect to the piezoelectric body 52 in the Z-axis direction. In the example of FIG. 8, the laminated region Sa is shaded with diagonal lines from the upper right to the lower left. Further, the outline of the laminated region Sa is shown by a thick line.

The non-laminated region Is is a region in which the individual electrodes 53 are not laminated with respect to the piezoelectric body 52 in the Z-axis direction. In the example of FIG. 8, the non-stacked region Is is shaded with diagonal lines from the upper left to the lower right.

At the boundary between the laminated region Sa and the non-stacked region Is, the third portion U3 included in the inactive region Ia is arranged. In the inactive region Ia, since the displacement of the piezoelectric body 52 does not occur, the third portion U3 is orthogonal to the end portion of the piezoelectric body 52, so that the third portion U3 intersects the end portion of the piezoelectric body 52. Therefore, the size of the liquid discharge head 26 in the Y-axis direction can be reduced.

Further, the third portion U3 is an input wiring for taking in electric power for driving the piezoelectric body 52. The third portion U3 can supply electric power to the piezoelectric body 52.

Further, the liquid discharge head 26 includes a diaphragm 36 that vibrates by the piezoelectric body 52. The common electrode 51 is laminated with respect to the piezoelectric body 52 in a direction opposite to the direction in which the diaphragm 36 is located, that is, in the Z1 direction. The plurality of individual electrodes 53 are laminated with respect to the piezoelectric body 52 in the direction in which the diaphragm 36 is located, that is, in the Z2 direction. According to the first embodiment, even if the common electrode 51 is a so-called upper electrode and the individual electrode 53 is a so-called lower electrode, the possibility of cracks in the piezoelectric element 38 can be reduced. Therefore, the degree of freedom in the configuration of the piezoelectric element 38 can be improved.

2. 2. 2nd Embodiment In the 1st embodiment, the common electrode 51 is a so-called upper electrode, and the individual electrode 53 is a so-called lower electrode. On the other hand, the second embodiment differs from the first embodiment in that the common electrode 51 is a so-called lower electrode and the individual electrode 53 is a so-called upper electrode. Hereinafter, the second embodiment will be described.

2.1. Piezoelectric element 38a in the second embodiment
FIG. 9 is an enlarged plan view of the vicinity of the piezoelectric element 38a. In FIG. 9, the outline of the element located behind any one element is also shown by a solid line for convenience. FIG. 10 is a cross-sectional view taken along the line cc in FIG.

As illustrated in FIGS. 9 and 10, in the piezoelectric element 38, generally, the common electrode 51a, the piezoelectric body 52, and the individual electrodes 53a are laminated in the Z-axis direction in the above order from the diaphragm 36 side. It is a structure.

The common electrode 51a is formed on the surface of the diaphragm 36. The common electrode 51a is a strip-shaped electrode that is continuous along the Y axis over a plurality of piezoelectric elements 38. The common electrode 51a comes into contact with the surface of the diaphragm 36. In the second embodiment, the common electrode 51a is a so-called lower electrode.

The individual electrode 53a is formed on the surface of the piezoelectric body 52 in the Z1 direction. The individual electrodes 53a are electrodes formed so as to be separated from each other for each of the piezoelectric elements 38. In the second embodiment, the individual electrode 53a is a so-called upper electrode.

2.2. Summary of Second Embodiment As described above, the liquid discharge head 26 in the second embodiment includes a diaphragm 36 vibrated by each of the piezoelectric bodies 52. The common electrode 51a is laminated with respect to the piezoelectric body 52 in the direction in which the diaphragm 36 is located, that is, in the Z2 direction. The plurality of individual electrodes 53a are laminated in the direction opposite to the direction in which the diaphragm 36 is located with respect to the piezoelectric body 52, that is, in the Z1 direction. According to the second embodiment, even if the individual electrode 53a is a so-called upper electrode and the common electrode 51a is a so-called lower electrode, the possibility of cracks in the piezoelectric element 38a can be reduced. Therefore, the degree of freedom in the configuration of the piezoelectric element 38a can be improved.

3. 3. Third Embodiment In the first embodiment, the extending direction of the first portion U1 of each of the plurality of individual electrodes 53 is the V2 direction. On the other hand, the third embodiment differs from the first embodiment in that the extending directions of the first portion U1 possessed by each of the plurality of individual electrodes 53 are not the same. Hereinafter, the third embodiment will be described. The piezoelectric element 38b in the third embodiment has the embodiment in which the common electrode 51 is the upper electrode and the individual electrode 53 is the lower electrode, as shown in the first embodiment, but is shown in the second embodiment. The common electrode 51 may be a lower electrode and the individual electrode 53 may be an upper electrode.

3.1. Piezoelectric element 38b in the third embodiment
FIG. 11 is a plan view of the piezoelectric element 38b. In FIG. 11, in order to prevent the drawings from being complicated, only a part of the plurality of notches 521 is designated with a reference numeral. The piezoelectric element 38b has a common electrode 51, a piezoelectric body 52, one or more individual electrodes 53b1, and one or more individual electrodes 53b2. In a plan view seen in the Z-axis direction, the piezoelectric element 38b has a first region PR1 and a second region PR2 divided in the Y2 direction. As a specific example, the first region PR1 and the second region PR2 are regions in which the piezoelectric body 52 is evenly divided into two in the Y2 direction. In the present specification, dividing into two in the Y2 direction means forming a region located in the Y1 direction and a region located in the Y2 direction. That is, the first region PR1 and the second region PR2 have the same shape, and the length d1 of the first region PR1 in the Y-axis direction and the length d2 of the second region PR2 in the Y-axis direction are Match.

The first region PR1 includes an active region Ac1 provided for the individual electrode 53b1. The second region PR2 includes an active region Ac2 provided for the individual electrode 53b2. In FIG. 11, in order to prevent the drawing from being complicated, the outline of the active region Ac1 located most in the Y1 direction among the active regions Ac1 included in the first region PR1 is shown by a thick line, and only in this active region Ac1 “ "Ac1" is shown. Similarly, among the active regions Ac2 included in the second region PR2, the outline of the active region Ac2 located most in the Y2 direction is shown by a thick line, and "Ac2" is shown only in this active region Ac3.
The individual electrode 53b1 is an example of the "first individual electrode" in the third embodiment. The individual electrode 53b2 is an example of the “second individual electrode”.

The individual electrode 53b1 has the same shape as the individual electrode 53 in the first embodiment. The individual electrode 53b2 has a first portion U1b2, a second portion U2, and a third portion U3. The first portion U1b2 extends in the Vb1 direction. In the third embodiment, all the first portions U1 of each of the plurality of individual electrodes 53b1 extend in the V2 direction, and all the first portions U1b2 of each of the plurality of individual electrodes 53b2 extend in the Vb1 direction. It is postponed.

The Vb1 direction is an example of the "fifth direction". The Vb1 direction is located on the same plane as the Y2 direction and the X2 direction, intersects the Y2 direction and the X2 direction at a right angle and a different angle, and intersects in the V2 direction. More specifically, the angle formed by the Y2 direction and the Vb1 direction is larger than 90 degrees, preferably larger than 135 degrees. Typically, the Vb1 direction is a direction rotated clockwise by the angle formed by the Y2 direction and the V2 direction with respect to the Y1 direction. When the Vb1 direction is a direction rotated clockwise by the angle formed by the Y2 direction and the V2 direction with respect to the Y1 direction, the individual electrodes 53b1 and the individual electrodes 53b2 are at the boundary between the first region PR1 and the second region PR2. On the other hand, it has a line-symmetrical shape.

3.2. Summary of the Third Embodiment As described above, in the liquid discharge head 26 in the third embodiment, in the plan view seen in the Z-axis direction, the piezoelectric body 52 is divided in the Y2 direction among the first region PR1 and the second region PR2. The first region PR1 includes an active region Ac1 provided for the individual electrode 53b1. The first portion U1b2 of the individual electrode 53b2 provided for the active region Ac2 included in the second region PR2 extends in the Vb1 direction.
The individual electrode 53b1 is an example of the "first individual electrode". The individual electrode 53b2 is an example of the “second individual electrode”. The Vb1 direction is an example of the "fifth direction".
The Vb1 direction is located on the same plane as the Y2 direction and the X2 direction, and intersects the Y2 direction and the X2 direction at a right angle and a different angle. The Vb1 direction may be orthogonal to the V2 direction.
Also in the third embodiment, as in the first embodiment, the extending direction of the end portion of the common electrode 51 and the extending direction of the first portion U1b2 intersect each other at the active region boundary Ba in the individual electrode 53b2. do. Therefore, the possibility of cracks in the piezoelectric element 38 can be reduced as compared with the embodiment in which the extending direction of the first portion U1 is orthogonal to the extending direction of the end portion of the common electrode 51. Further, in the third embodiment, the extending direction of the first portion U1 of the individual electrode 53b1 is different from the extending direction of the first portion U1b2 of the individual electrode 53b2. Therefore, it is possible to prevent the direction of the shear stress in the Y-axis direction applied to the entire active region Ac from concentrating in one direction, and the deformation of the piezoelectric element 38b is more effectively suppressed.

Further, an example of the first region PR1 and the second region PR2 is a region in which the piezoelectric body 52 is evenly divided into two in the Y2 direction. In other words, the first region PR1 and the second region PR2 have the same area as each other. Therefore, when all the tensile stresses applied to all the active regions Ac included in the piezoelectric body 52 are the same, the sum of the magnitudes of the tensile stress applied to all the active regions Ac1 included in the first region PR1 and the second region The sum of the magnitudes of the tensile stress applied to all the active regions Ac2 contained in PR2 is substantially the same. According to the third embodiment, the magnitude of the tensile stress toward the V2 direction and the magnitude of the tensile stress toward the Vb1 direction are as compared with the embodiment in which the first region PR1 and the second region PR2 do not have the same area. Is likely to be about the same, and it is possible to prevent the direction of the shear stress in the Y-axis direction applied to the entire active region Ac from concentrating in one direction.

Further, the Y2 direction is the direction in which the first region PR1 is located with respect to the second region PR2, and the angle formed by the Y2 direction and the Vb1 direction is larger than 90 degrees. In other words, the extending direction of the first portion U1 of the individual electrode 53b1 and the extending direction of the first portion U1b2 of the individual electrode 53b2 have components toward the outer edge of the piezoelectric body 52 in the Y-axis direction. According to the third embodiment, the component in which the extending direction of the first portion U1 of the individual electrode 53b1 and the extending direction of the first portion U1b2 of the individual electrode 53b2 are toward the center in the Y-axis direction of the piezoelectric body 52. The distance between the pressure chambers C located near the center in the Y-axis direction of the piezoelectric body 52 can be narrowed in the Y-axis direction as compared with the embodiment. By narrowing the distance in the Y-axis direction of the pressure chamber C, the distance in the Y-axis direction in the third portion U3 of the individual electrode 53b in the third embodiment is the Y-axis direction of the pressure chamber C, while achieving high resolution. Since it is wider than the interval, the wiring of the third portion U3 becomes easy, and the liquid discharge head 26 can be easily manufactured.

4. Fourth Embodiment In the third embodiment, the extending direction of the first portion U1 of each of the plurality of individual electrodes 53b1 provided for the active region Ac1 included in the first region PR1 is the V2 direction. .. On the other hand, in the fourth embodiment, the first is that the extending directions of the first portion U1 of each of the plurality of individual electrodes 53 provided for the active region Ac included in the first region PR1 are not the same. Different from the embodiment. Hereinafter, the fourth embodiment will be described. The piezoelectric element 38c in the fourth embodiment has the embodiment in which the common electrode 51 is the upper electrode and the individual electrode 53 is the lower electrode, as shown in the first embodiment, but is shown in the second embodiment. The common electrode 51 may be a lower electrode and the individual electrode 53 may be an upper electrode.

4.1. Piezoelectric element 38c in the fourth embodiment
FIG. 12 is a plan view of the piezoelectric element 38c. In FIG. 12, in order to prevent the drawings from being complicated, only a part of the plurality of notches 521 is designated with a reference numeral. The piezoelectric element 38c has a common electrode 51, a piezoelectric body 52, one or more individual electrodes 53b1, one or more individual electrodes 53b2, one or more individual electrodes 53c1, and one or more individual electrodes 53c2. In a plan view seen in the Z-axis direction, the piezoelectric element 38c has a first region PR1 and a second region PR2 divided in the Y2 direction, as in the third embodiment. Further, the first region PR1 is divided into a third region PR3 and a fourth region PR4 in the Y2 direction. Similarly, the second region PR2 is divided into a fifth region PR5 and a sixth region PR6 in the Y2 direction. The third region PR3 and the fourth region PR4 may have the same shape or may be different. Similarly, the fifth region PR5 and the sixth region PR6 may have the same shape or may be different.

The third region PR3 is a region of the third region PR3 and the fourth region PR4 that is located far from the end of the piezoelectric body 52 in the Y2 direction. On the other hand, the fourth region PR4 is a region of the third region PR3 and the fourth region PR4 located near the end of the piezoelectric body 52 in the Y2 direction. Similarly, the fifth region PR5 is a region of the fifth region PR5 and the sixth region PR6 that is located far from the end of the piezoelectric body 52 in the Y1 direction. On the other hand, the sixth region PR6 is a region of the fifth region PR5 and the sixth region PR6 located near the end of the piezoelectric body 52 in the Y1 direction.

The third region PR3 includes an active region Ac1 provided for the individual electrode 53b1. The fourth region PR4 includes an active region Ac3 provided for the individual electrode 53c1. The fifth region PR5 includes an active region Ac2 provided for the individual electrode 53b2. The sixth region PR6 includes an active region Ac4 provided for the individual electrode 53c2. In FIG. 12, in order to prevent the drawing from being complicated, the outline of the active region Ac1 located most in the Y1 direction among the active regions Ac1 included in the third region PR3 is shown by a thick line, and only in this active region Ac1 “ "Ac1" is shown. Similarly, among the active regions Ac3 included in the fourth region PR4, the outline of the active region Ac3 located most in the Y2 direction is shown by a thick line, and "Ac3" is shown only in this active region Ac3. Further, among the active regions Ac2 included in the fifth region PR5, the outline of the active region Ac2 located most in the Y2 direction is shown by a thick line, and "Ac2" is shown only in this active region Ac2. Further, among the active regions Ac4 included in the sixth region PR6, the outline of the active region Ac4 located most in the Y1 direction is shown by a thick line, and "Ac4" is shown only in this active region Ac4.
The individual electrode 53b1 is an example of the "first individual electrode" in the fourth embodiment. The individual electrode 53c1 is an example of the “third individual electrode”.

The individual electrode 53c1 has a first portion U1c1, a second portion U2, and a third portion U3. The first portion U1c1 extends in the Vc1 direction. The Vc1 direction is an example of the "sixth direction". The Vc1 direction is located on the same plane as the Y2 direction and the X2 direction, intersects the Y2 direction and the X2 direction at a right angle and a different angle, and intersects in the V2 direction. Further, the angle formed by the Y2 direction and the V2 direction is larger than the angle formed by the Y2 direction and the Vc1 direction.

The individual electrode 53c2 has a first portion U1c2, a second portion U2, and a third portion U3. The first portion U1c2 extends in the Vc2 direction. The Vc2 direction is located on the same plane as the Y2 direction and the X2 direction, intersects the Y1 direction and the X1 direction at a right angle and a different angle, and intersects the Vb1 direction. Further, the angle formed by the Y1 direction and the Vb1 direction is larger than the angle formed by the Y1 direction and the Vc2 direction. The Vc2 direction is typically a direction rotated clockwise by the angle formed by the Y2 direction and the Vc1 direction with respect to the Y1 direction.

4.2. Summary of Fourth Embodiment In the liquid discharge head 26 in the fourth embodiment, the third region far from the end of the piezoelectric body 52 in the Y2 direction of the two regions obtained by dividing the first region PR1 along the Y2 direction. The PR3 includes an active region Ac1 provided for the individual electrode 53b1. Of the two regions, the first portion U1c1 of the individual electrode 53c1 provided for the active region Ac3 included in the fourth region PR4 near the end in the Y2 direction of the piezoelectric body 52 extends in the Vc1 direction.
The third region PR3 is an example of the "third region", and the fourth region PR4 is an example of the "fourth region". The individual electrode 53c1 is an example of the “third individual electrode”. The Vc1 direction is an example of the "sixth direction". However, when the Y1 direction is an example of the "second direction", the second region PR2 corresponds to the "first region", the first region PR1 corresponds to the "second region", and the fifth region PR5 corresponds to the "second region". The sixth region PR6 corresponds to the "third region", the individual electrode 53b2 corresponds to the "first individual electrode", and the individual electrode 53c2 corresponds to the "third individual electrode". Correspondingly, the Vc2 direction corresponds to the "sixth direction".
The Vc1 direction is located on the same plane as the Y2 direction and the X2 direction, and intersects the Y2 direction and the fourth direction at a right angle and a different angle. The angle formed by the Y2 direction and the V2 direction is larger than the angle formed by the Y2 direction and the Vc1 direction.
According to the fourth embodiment, the distance between the pressure chambers C in the Y-axis direction can be narrowed as compared with the embodiment in which the angle formed by the Y2 direction and the V2 direction is equal to or less than the angle formed by the Y2 direction and the Vc1 direction. By narrowing the distance in the Y-axis direction of the pressure chamber C, the distance in the Y-axis direction in the third portion U3 of the individual electrode 53 in the fourth embodiment is the Y-axis direction of the pressure chamber C, while achieving high resolution. Can be wider than the interval. Since the distance in the Y-axis direction in the third portion U3 is wide, the wiring of the third portion U3 becomes easy, and the liquid discharge head 26 can be easily manufactured.

5. Modification Examples Each of the above-exemplified forms can be variously transformed. Specific modes of modification are illustrated below. Two or more embodiments arbitrarily selected from the following examples can be appropriately merged to the extent that they do not contradict each other.

5.1. First Modification Example In each of the above-described embodiments, the third portion U3 of the individual electrode 53 extends in the X2 direction, but is not limited to this. For example, the third portion U3 may extend in a direction that is coplanar with the X2 and Y2 directions and intersects the X2 and Y2 directions at an angle that is not perpendicular.

5.2. Second Modification Example In each of the above-described embodiments, the individual electrode 53 has the third portion U3, but may not have the third portion U3. For example, the end portion of the first portion U1 in the V2 direction may be connected to the wiring board 60.

5.3. Third Modification Example In each of the above-described embodiments, the liquid discharge head 26 has one piezoelectric body 52 having a plurality of active regions Ac, but is not limited thereto. For example, the liquid discharge head 26 may have a plurality of piezoelectric bodies 52 having one active region Ac. Specifically, the liquid discharge head 26 in the third modification has a plurality of piezoelectric bodies 52 along the X-axis.

5.4. Fourth Modification Example In each of the above-described embodiments, the first portion U1 of each of the plurality of individual electrodes 53 is located in the same plane as the Y2 direction and the X2 direction, and is different from a right angle in both the Y2 direction and the X2 direction. It extended to the angle, but it is not limited to this. For example, among the plurality of individual electrodes 53, the individual electrode 53 having the first portion U1 extending in the X-axis direction may be included.

5.5. Fifth Modification Example In each of the above-described embodiments, the serial type liquid discharge device 100 for reciprocating the transport body 242 equipped with the liquid discharge head 26 is exemplified, but the line type in which a plurality of nozzles N are distributed over the entire width of the medium 12 The present invention can also be applied to a liquid discharge device.

5.6. Sixth Modification Example The liquid discharge device 100 exemplified in each of the above-described embodiments can be adopted in various devices such as a facsimile machine and a copier, in addition to a device dedicated to printing. However, the application of the liquid ejection device of the present invention is not limited to printing. For example, a liquid discharge device that discharges a solution of a coloring material is used as a manufacturing device for forming a color filter of a liquid crystal display device. Further, a liquid discharge device that discharges a solution of a conductive material is used as a manufacturing device for forming wiring and electrodes on a wiring substrate.

5.7. Seventh Modification Example The actuator provided with the piezoelectric element 38 and the vibrating plate 36 exemplified in each of the above-described embodiments is not only the liquid discharge head 26, but also an ultrasonic transducer, an ultrasonic motor, a pressure sensor, a charcoal sensor, or the like. It can also be applied to the actuator of. Even in such an actuator, the possibility of cracks in the piezoelectric element can be reduced.

12 ... Medium, 14 ... Liquid container, 20 ... Control unit, 22 ... Transfer mechanism, 24 ... Movement mechanism, 26 ... Liquid discharge head, 32 ... Flow path substrate, 34 ... Pressure chamber substrate, 36 ... Vibration plate, 38, 38a , 38b, 38c ... Piezoelectric element, 42 ... Housing, 44 ... Sealing body, 46 ... Nozzle plate, 48 ... Vibration absorber, 51, 51a ... Common electrode, 52 ... Piezoelectric material, 53, 53a, 53b, 53b1, 53b2, 53c1, 53c2 ... Individual electrodes, 60 ... Wiring board, 100 ... Liquid discharge device, 242 ... Transport body, 244 ... Transport belt, 322 ... Opening, 324 ... Supply flow path, 326 ... Communication flow path, 328 ... Relay Flow path, 361 ... elastic film, 362 ... insulating film, 422 ... accommodating part, 424 ... introduction port, 521 ... notch, Ac, Ac1, Ac2, Ac3, Ac4 ... active region, Ba ... active region boundary, C ... pressure chamber , Ia ... inactive region, Is ... non-stacked region, N ... nozzle, R ... liquid storage chamber, PR1 ... first region, PR2 ... second region, PR3 ... third region, PR4 ... fourth region, PR5 ... 5 regions, PR6 ... 6th region, SV1, SV2, SX1, SX2 ... tensile stress, Sa ... laminated region, TY1, TY2 ... shear stress, U1, U1b2, U1c1, U1c2 ... 1st part, U2 ... 2nd part, U3 ... Third part.

Claims (15)

Piezoelectrics with multiple active regions and
A common electrode commonly provided for the plurality of active regions and
A plurality of individual electrodes individually provided for the plurality of active regions, and
Is a liquid discharge head with
The piezoelectric body, the common electrode, and the plurality of individual electrodes are laminated in the first direction.
At the first boundary, which is the boundary between the active region and the inactive region, the end portion of the common electrode extends in the second direction orthogonal to the first direction.
Each of the plurality of individual electrodes has a first portion located at the first boundary.
The first portion of the first individual electrode among the plurality of individual electrodes extends in the third direction and extends in the third direction.
The active region is a region in which the piezoelectric body is provided between the individual electrode and the common electrode in the first direction among the regions where the individual electrodes are provided.
The inactive region is a region in which the individual electrode is provided, in which the piezoelectric body is not provided between the individual electrode and the common electrode in the first direction.
The third direction is located on the same plane as the second and fourth directions, and intersects both the second direction and the fourth direction at right angles and different angles.
The fourth direction is orthogonal to the first direction and the second direction.
A liquid discharge head characterized by that. The liquid discharge head according to claim 1, wherein the plurality of individual electrodes are arranged side by side in the second direction. The liquid discharge head according to claim 1 or 2, wherein the longitudinal direction of each of the plurality of individual electrodes is the fourth direction. The liquid discharge head according to any one of claims 1 to 3, wherein the angle formed by the second direction and the third direction is less than 45 degrees. Each of the plurality of individual electrodes
A second portion located in the active region and extending in the fourth direction,
The liquid discharge head according to any one of claims 1 to 4, wherein the liquid discharge head is located in the inactive region and includes a third portion extending in the fourth direction. The liquid discharge head according to claim 5, wherein the second portion and the third portion do not overlap in the second direction. At the second boundary, which is the boundary between the laminated region and the non-laminated region, the end portion of the piezoelectric body extends in the second direction.
Each of the plurality of individual electrodes has the third portion at the position of the second boundary.
The laminated region is a region in which the plurality of individual electrodes are laminated in the first direction with respect to the piezoelectric body.
The non-laminated region is a region in which the plurality of individual electrodes are not laminated in the first direction with respect to the piezoelectric body.
The liquid discharge head according to claim 5 or 6. The liquid discharge head according to any one of claims 5 to 7, wherein the third portion is an input wiring for taking in electric power for driving the piezoelectric body. A diaphragm vibrating by the piezoelectric body is provided.
The common electrode is laminated in the direction opposite to the direction in which the diaphragm is located with respect to the piezoelectric body.
The plurality of individual electrodes are laminated in the direction in which the diaphragm is located with respect to the piezoelectric body.
The liquid discharge head according to any one of claims 1 to 8. A diaphragm vibrating by each of the piezoelectric bodies is provided.
The common electrode is laminated in the direction in which the diaphragm is located with respect to the piezoelectric body.
The plurality of individual electrodes are laminated in a direction opposite to the direction in which the diaphragm is located with respect to the piezoelectric body.
The liquid discharge head according to any one of claims 1 to 8. In the plan view seen in the first direction, the active body provided with respect to the first individual electrode in the first region of the first region and the second region obtained by dividing the piezoelectric body in the second direction. The area is included,
The first portion of the second individual electrode provided for the active region included in the second region extends in the fifth direction.
The fifth direction is located on the same plane as the second direction and the fourth direction, and intersects the second direction and the fourth direction at a right angle and a different angle, and intersects the third direction. do,
The liquid discharge head according to any one of claims 1 to 10. The first region and the second region are regions in which the piezoelectric body is evenly divided into two in the second direction.
The liquid discharge head according to claim 11. Of the two regions obtained by dividing the first region in the second direction, the third region far from the end of the piezoelectric body in the second direction includes an active region provided for the one individual electrode. ,
Of the two regions, the first portion of the third individual electrode provided for the active region included in the fourth region near the end of the piezoelectric material in the second direction extends in the sixth direction. death,
The sixth direction is located on the same plane as the second direction and the fourth direction, and intersects the second direction and the fourth direction at a right angle and a different angle.
The angle formed by the second direction and the third direction is larger than the angle formed by the second direction and the sixth direction.
The liquid discharge head according to claim 11 or 12. The second direction is the direction in which the first region is located with respect to the second region.
The liquid discharge head according to any one of claims 11 to 13, wherein the angle formed by the second direction and the fifth direction is larger than 90 degrees. Piezoelectrics with multiple active regions and
A common electrode commonly provided for the plurality of active regions and
A plurality of individual electrodes individually provided for the plurality of active regions, and
It is an actuator with
The piezoelectric body, the common electrode, and the plurality of individual electrodes are laminated in the first direction.
At the first boundary, which is the boundary between the active region and the inactive region, the end portion of the common electrode extends in the second direction orthogonal to the first direction.
Each of the plurality of individual electrodes has a first portion located at the first boundary.
The first portion of the first individual electrode among the plurality of individual electrodes extends in the third direction and extends in the third direction.
The active region is a region in which the piezoelectric body is provided between the individual electrode and the common electrode in the first direction among the regions where the individual electrodes are provided.
The inactive region is a region in which the individual electrode is provided, in which the piezoelectric body is not provided between the individual electrode and the common electrode in the first direction.
The third direction is located on the same plane as the second and fourth directions, and intersects both the second direction and the fourth direction at right angles and different angles.
The fourth direction is orthogonal to the first direction and the second direction.
An actuator characterized by that.

Images