JP2021117326A - Lens array, led illumination unit, exposure device, and exposure method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a lens array, an LED lighting unit, an exposure apparatus, and an exposure method capable of stably assembling a lens array to an LED base plate, having an excellent illuminance distribution, and being able to be miniaturized. A lens array 50 includes a lens plate 51 and a plurality of lenses 52. The lens plate 51 has a lens region in which the lens 52 is fixed and a non-lens region in which the lens 52 is not fixed. Further, the base plate 24 to which the LED 25 is fixed has an LED region in which the LED 25 is fixed and a non-LED region in which the LED 25 is not fixed. The lens plate 51 and the base plate 24 are fastened by overlapping the lens region and the LED region, and the non-lens region and the non-LED region. [Selection diagram] Fig. 3

Description

The present invention relates to a lens array, an LED lighting unit, an exposure apparatus, and an exposure method.

In recent years, as a lighting device for an exposure device, a device in which a plurality of LEDs having low power consumption are arranged in a two-dimensional matrix is used. When an LED is used as a light source, it is necessary to cover each LED with a lens in order to give directivity to the light from the LED. Further, since it is inefficient to individually assemble the lenses on the substrate on which the LEDs are arranged, a lens array in which a plurality of lenses are aggregated is known.

For example, in Patent Document 1, regarding an exposure device including an LED light source, a plurality of LEDs are grouped in units of 100, and a plurality of LED light source devices mounted on a connection substrate arranged on a cooling member are provided. In the LED light source device, a lens array in which a plurality of convex condensing lenses are mounted on a base material is provided on the upper surface of the plurality of LEDs. Further, in Patent Document 2, recesses are formed at the rear ends of a plurality of lens elements of the lens array, LEDs are housed in the recesses, respectively, and the LED substrate and the lens array are assembled. In Patent Document 3, a lens array having a flat back surface is arranged to face each LED arranged in a matrix.

Japanese Unexamined Patent Publication No. 2014-11107 Japanese Unexamined Patent Publication No. 2012-42670 Japanese Unexamined Patent Publication No. 2005-22806

By the way, in a lighting device having a plurality of LEDs, in order to improve the illuminance, it is required to densely arrange a large number of LED elements, and from the viewpoint of easy replacement of the LED elements and cooling efficiency for cooling the LED elements, It is required to use a plurality of LED lighting units as an LED lighting unit having a predetermined number of LED elements as one unit. Therefore, the lens array also needs to be provided for each unitized LED element, and the lens array needs to be arranged on the base plate on which the LED element is attached. However, if a large number of LED elements are densely arranged, the space for arranging the fastening means for mounting the lens array is limited. Further, if the fastening means is arranged between the LED elements, it is necessary to widen the interval between the LED elements, which limits the number of LED elements that can be arranged and causes a decrease in illuminance.

In the LED light source device of Patent Document 1, it is described that a plurality of LEDs are grouped in units of 100 and a lens array is provided on the upper surface of the plurality of LEDs, but the attachment of the lens array to the LED substrate is mentioned. do not have. In the LED lighting device of Patent Document 2, since the LEDs are housed and assembled in the recesses formed at the rear ends of the lens elements, the LEDs cannot be densely arranged, and there is a problem that it is difficult to miniaturize the LED lighting device. Further, the lighting device of Patent Document 3 is a lighting device that serves as a backlight source for a liquid crystal display panel, and since a plurality of LEDs are arranged and held by a frame-shaped holder member, the LEDs are densely arranged in a peripheral portion. Can not do it. Also, there is no mention of mounting the lens array on the LED substrate.

The present invention has been made in view of the above-mentioned problems, and an object thereof is a lens array and an LED lighting unit which can stably assemble a lens array to an LED base plate, have an excellent illuminance distribution, and can be miniaturized. , An exposure apparatus, and an exposure method.

The above object of the present invention is achieved by the following configuration.
(1) A lens plate and a plurality of lenses fixed to the lens plate and capable of condensing light emitted from an LED are provided, and a lens region on which the lens is fixed is provided on the surface of the lens plate. , N (m, n: integer) matrix-like regions of m in the first direction and n in the second direction orthogonal to the first direction, which is one of the non-lens regions to which the lens is not fixed. Is a lens array in which
The non-lens region is formed at least three places in the matrix-like region.
Each of the non-lens regions comprises a fastening hole through which a fastening means for fixing the lens array is inserted with respect to the base plate on which the LED is arranged.
Each of the non-lens regions is a lens array surrounded by the lens region.

(2) With the lens array described in (1)
The base plate and a plurality of the LEDs fixed to the base plate are provided, and the surface of the base plate is either an LED region where the LEDs are fixed or a non-LED region where the LEDs are not fixed. A light emitting unit and a light emitting portion in which a matrix-like region arranged in the first direction and the second direction is formed.
A heat sink that cools the light emitting portion by abutting against the back surface of the base plate opposite to the front surface to which the plurality of LEDs are fixed.
It is an LED lighting unit equipped with
An LED lighting unit in which the lens array and the light emitting unit are attached to the heat sink so that the lens region and the LED region, and the non-lens region and the non-LED region face each other.

(3) A lens array including a lens plate and a plurality of lenses fixed to the lens plate.
A light emitting unit including a base plate and a plurality of LEDs fixed to the base plate.
A heat sink that cools the light emitting portion by abutting against the back surface of the base plate opposite to the front surface to which the plurality of LEDs are fixed.
With
In the lens array, on the surface of the lens plate, m lenses in the first direction, which are either a lens region in which the lens is fixed or a non-lens region in which the lens is not fixed, are in the first direction. N (m, n: integer) matrix-like regions are formed in the second direction orthogonal to the above, and the non-lens region is formed at at least three places in the matrix-like region.
In the light emitting portion, on the surface of the base plate, a matrix arranged in the first direction and the second direction, which is either an LED region in which the LED is fixed or a non-LED region in which the LED is not fixed. A region of shape is formed,
It is an LED lighting unit
The lens array and the light emitting unit are attached to the heat sink so that the lens region and the LED region, and the non-lens region and the non-LED region face each other.
The lens plate comprises, in each of the non-lens regions, a first fastening hole through which a first fastening means for fixing the lens array to the heat sink is inserted via the base plate.
The base plate has a second fastening hole through which a second fastening means for fixing the base plate is inserted into the heat sink and a third fastening hole through which the first fastening means is inserted in each of the non-LED regions. With holes,
The lens array is fixed to the heat sink by the first fastening means via a spacer interposed between the lens plate and the base plate so as to form a gap between the LED and the lens plate. LED lighting unit.
(4) An exposure apparatus comprising a plurality of LED illumination units according to (2) or (3), wherein a mask pattern is exposed and transferred to a work by exposure light from the illumination apparatus.
(5) An exposure method comprising a plurality of LED lighting units according to (2) or (3), and exposing and transferring a mask pattern to a work by exposure light from the lighting device.

According to the lens array, the LED lighting unit, the exposure device, and the exposure method of the present invention, the lens array can be stably assembled to the LED base plate, the illuminance distribution can be excellent, and the size can be reduced.

FIG. 1 is a schematic configuration diagram of a proximity exposure apparatus including an LED lighting unit according to the present invention. FIG. 2 is a plan view of a lighting device in which a plurality of LED lighting units are arranged in a matrix. FIG. 3A is a plan view of the LED lighting unit, and FIG. 3B is a partial cross-sectional view taken along the line III-III of FIG. 3A. FIG. 4 is a partial plan view of the light emitting portion shown by removing the lens array from the LED lighting unit of FIG. 3A. FIG. 5 is a perspective view of a lens array constituting one block. 6 (a) is a plan view of the lens array shown in FIG. 5, and FIG. 6 (b) is a cross-sectional view taken along the line VI-VI of FIG. 6 (a). FIG. 7 is a cross-sectional view taken along the line VII-VII of FIG. 3 (a). FIG. 8 is a perspective view of a modified lens array. FIG. 9 is a schematic view showing a mounting example in which the fixing screws are arranged between the LEDs.

Hereinafter, embodiments of a lens array, an LED lighting unit, an exposure apparatus, and an exposure method according to the present invention will be described in detail with reference to the drawings.

FIG. 1 is a schematic configuration diagram of a proximity exposure apparatus according to an embodiment including the LED lighting unit according to the present invention.
As shown in FIG. 1, in the proximity exposure apparatus 100 of the present embodiment, the mask M held on the mask stage and the work W placed on the work stage are arranged via a predetermined gap, and the illumination apparatus 10 The work W is irradiated with the light emitted from the mask M, and the pattern of the mask M is exposed and transferred to the work W.

The lighting device 10 changes the direction of the light source unit 20, the fly-eye lens 80 constituting the integrator for equalizing the intensity of the light from the light source unit 20, and the optical path EL emitted from the fly-eye lens 80, and parallel light. A collimation mirror 82 that irradiates the light source unit and a control unit 83 that controls the light source unit 20 are provided.
A collimator lens may be used instead of the collimator mirror 82, but in the case of an exposure apparatus that irradiates a wide range of light, the collimator mirror 82 is preferably used.
Further, as the integrator, a rod lens may be used instead of the fly-eye lens 80.

As shown in FIGS. 2 to 4, the light source unit 20 is composed of a plurality of LED lighting units 21 (28 in the embodiment shown in the figure) having substantially the same configuration. Further, in the plurality of LED lighting units 21, a plurality of LEDs (Light Emitting Diodes) 25 of each LED lighting unit 21 are arranged in the X direction and the Y direction on a plane, and the connection portion 26 described later is outside the light source unit 20. They are arranged close to each other so as to be.
Specifically, in the present embodiment, the four LED lighting units 21 have two connecting portions 26 located on both ends in the Y direction and two in the X direction so that the longitudinal direction is along the Y direction. Have been placed. Further, on both sides of the four LED lighting units 21 in the X direction, the 24 LED lighting units 21 are arranged so that the connection portions 26 are located on both ends in the X direction and the longitudinal direction is along the X direction. Twelve are arranged in close proximity in the Y direction. As a result, while a plurality of LEDs 25 are arranged at high density, if a problem occurs in the LED lighting unit 21, only the corresponding LED lighting unit 21 can be attached and detached and replaced, and maintenance can be easily performed. ..
The LED lighting unit 21 is positioned on a frame (not shown).

Each LED lighting unit 21 has a light emitting unit 22, a lens array 50 arranged in front of the light emitting unit 22, and a heat sink 23 to which the light emitting unit 22 and the lens array 50 are fixed, with reference to FIG. Be prepared.

The light emitting unit 22 is provided at a base plate 24 having a rectangular shape in a plan view, a plurality of LEDs 25 fixed to the surface of the base plate 24, and one end (right end in FIG. 3) of the base plate 24 in the X direction to control each LED 25. A connection portion 26 for installing wiring, a connector, etc. (not shown) is provided.
As shown in FIG. 7, the LED 25 has a configuration in which a cover glass 25c is provided in front of the LED chip 25a attached to the package substrate 25b.

As shown in FIG. 4, the plurality of LEDs 25 are arranged in a matrix in the X and Y directions, while a region in which the LEDs 25 are not fixed is partially provided and fixed to the base plate 24.
Therefore, on the surface of the base plate 24, 25 in the first direction (X direction in FIGS. 3 and 4), which is either the LED region 27 to which the LED 25 is fixed or the non-LED region 28 to which the LED 25 is not fixed. And five matrix-like regions are formed in the second direction (Y direction in FIGS. 3 and 4) orthogonal to the first direction.

Further, in the present embodiment, a plurality of lens arrays 50 having a size corresponding to the region of the 5 × 5 matrix-shaped base plate 24 (five in the present embodiment) are arranged in front of the light emitting unit 22. .. Therefore, a total of 125 matrix-like regions of the base plate 24 have five identical pattern PAs having 5 × 5 (25) regions, which are either LED regions 27 or non-LED regions 28. It is composed of lining up in the X direction.

Here, each pattern PA is selected from three locations so that the non-LED region 28 is surrounded by eight LED regions 27 among the regions divided into 25 (5 × 5) matrix-shaped regions. It is provided as a target. In this case, the 5 × 5 matrix-shaped peripheral region is all the LED region 27, and three of the nine internal regions are the non-LED regions 28, satisfying the above conditions. As such, it is selectively provided. Therefore, even if the LED lighting units 21 are arranged adjacent to each other, it is possible to prevent the non-LED regions 28 of the adjacent LED lighting units 21 from being adjacent to each other and the illuminance distribution from being scattered.

With reference to FIGS. 4 and 7, each non-LED region 28 has a second fastening hole 29 for fixing the base plate 24 to the heat sink 23 and a first fastening by a fixing screw 32 which is a second fastening means. A fixing screw 33, which is a means, forms a third fastening hole 30 for fixing the lens array 50 and the base plate 24 to the heat sink 23 via the spacer 34.
In each of the second fastening hole 29 and the third fastening hole 30 provided at the three locations, any two of them are located on both sides of the intermediate position X1 in the X direction, and the other Any two of them are located on both sides of the intermediate position Y1 in the Y direction. That is, any two of the three non-LED regions 28 are located on both sides of the intermediate position X1 in the X direction, and the other two are located on both sides of the intermediate position Y1 in the Y direction. Located on both sides. As a result, the base plate 24 and the lens array 50 can be fixed to the heat sink 23 with an even pressing force on the XY plane.

Further, pin holes 31A and 31B for positioning the lens array 50 with respect to the base plate 24 are formed in two of the three non-LED regions 28. One pin hole 31A is provided near the center of the pattern P, and the other pin hole 31B is provided farther than one pin hole 31A. The pin holes 31A and 31B are both round holes.

With reference to FIG. 3, the heat sink 23 is for cooling the heat of the LED 25 by abutting the back surface of the base plate 24 on the opposite side to the front surface on which the plurality of LEDs 25 are fixed, and has high thermal conductivity. It is made of a material such as aluminum or copper, and is provided with a water channel (not shown) for circulating cooling water inside.

As shown in FIGS. 3, 5 and 6, the lens array 50 includes a flat lens plate 51 and a plurality of lenses 52 fixed to the lens plate 51 and capable of collecting light emitted from the LED 25. However, they are formed integrally.

On the surface of the lens plate 51, a matrix-like region of 5 × 5 in the X and Y directions, which is either a lens region 53 to which the lens 52 is fixed or a non-lens region 54 to which the lens 52 is not fixed, is provided. Has been done. The non-lens region 54 is selectively provided at three locations so as to be surrounded by eight lens regions 53 corresponding to the positions of the non-LED region 28 of the light emitting unit 22. Also in this case, the 5 × 5 matrix-shaped peripheral edge region is all the lens region 53, and three regions out of the nine internal regions are the non-lens region 54, and the above conditions are satisfied. It is selectively provided to meet. The lens area 53 is also provided corresponding to the position of the LED area.

Each non-lens region 54 is provided with a first fastening hole 55 for fixing the lens array 50 to the base plate 24. Any two of the three first fastening holes 55 are located on both sides of the intermediate position X2 in the X direction of the lens array 50, and the other two are Y of the lens array 50. It is located on both sides of the intermediate position Y2 in the direction.

Further, pin holes 56A and 56B for positioning the lens array 50 with respect to the base plate 24 are provided in two of the three non-lens regions 54. Of the two pin holes 56A and 56B, one pin hole 56A formed near the center of the lens array 50 is a round hole, and the other pin hole 56B formed far from the center of the lens array 50 is a round hole. It is a long hole long in the straight line L1 direction connecting two pin holes 56A and 56B. As a result, the lens array 50 can be accurately positioned with respect to the base plate 24 by the one pin hole 56A which is a round hole, and the rotational position of the lens array 50 can be positioned by the other pin hole 56B which is a long hole.

In each lens 52, the side surfaces of the lenses 52 in the X and Y directions adjacent to each other are formed on the flat surface 57 so that the side surfaces of the adjacent lenses 52 are fused and connected to each other. By fusing and connecting the flat surfaces 57 of the lenses 52 to each other, the distance between the lenses 52 can be narrowed, and the number of lenses 52 per unit area increases. Further, the lens 52 arranged adjacent to the X direction and the Y direction around the non-lens region 54 has a side surface 58 that bulges in a curved shape toward the non-lens region 54 side. By having the side surface 58 that bulges in a curved shape on the non-lens region 54 side, the light emitted from the LED 25 can be efficiently collected. As shown in FIG. 8, each side surface of the plurality of lenses 52 arranged adjacent to the periphery of the non-lens region 54 may also be a flat surface 57. That is, all the side surfaces of each lens 52 may be flat surfaces 57.
As a result, the lenses 52 can be arranged in close contact with each other, and the arrangement density of the lenses 52 can be increased. In addition, the lens plate 51 is less likely to crack, and waviness of the lens plate 51 can be prevented.

(Assembly of the light source)
Next, the assembly of the light source unit 20 will be described in detail. First, the LED lighting unit 21 is assembled. As shown in FIGS. 3, 4 and 7, the LED lighting unit 21 has a light emitting portion 22 mounted on the heat sink 23 and is formed in three non-LED regions 28 of the base plate 24 for second fastening. The base plate 24 is fastened and fixed to the heat sink 23 by inserting the fixing screw 32 into the hole 29.

Since the base plate 24 is fixed to the heat sink 23 by the three fixing screws 32, the base plate 24 and the heat sink 23 can be firmly fixed in close contact with each other without any gap. As a result, a high cooling effect can be obtained. At the time of the assembly, it is preferable to apply or sandwich a heat transfer material having high heat transfer efficiency between the base plate 24 and the heat sink 23.

Next, two pins (not shown) for positioning the lens array 50 are driven into the two pin holes 31A and 31B of the base plate 24, and the third fastening holes 30 at the three locations of the base plate 24 are further driven. After arranging the spacer 34 on the spacer 34, the two pins are inserted into the pin holes 56A and 56B provided in the non-lens region 54 of the lens array 50. Then, the back surface of the flat lens array 50 (lens plate 51) is brought into contact with the spacer 34 and arranged so as to cover the upper surface of the LED 25.

As a result, the lens array 50 is positioned with respect to the base plate 24 by the two pins. Since one pin hole 56A is a round hole and the other pin hole 56B is an elongated hole, there is some manufacturing error in the positions of the pin holes 31A and 31B of the base plate 24 and the pin holes 56A and 56B of the lens array 50. Even if there is, the error is absorbed and can be easily positioned. The two pins are preferably removed after the assembly of the LED lighting unit 21 is completed.

Then, the fixing screw 33 is inserted into the first fastening hole 55 of the lens array 50, the hole 34a of the spacer 34, and the third fastening hole 30 of the base plate 24, and the lens array 50 passes through the spacer 34 and the base plate 24. Then, it is fastened and fixed to the heat sink 23.

Since the height of the spacer 34 is set to be slightly larger than the height of the LED 25 fixed to the base plate 24, a gap of, for example, about 0.1 mm is formed between the lens array 50 and the LED 25, and the lens is formed. Interference between the plate 51 and the LED 25 can be prevented, damage to the thin cover glass 25c is prevented, and assembly becomes easy.

As shown in FIG. 2, the plurality of LED lighting units 21 assembled in this way form the light source unit 20 by arranging the connection portions 26 in a matrix toward the outer peripheral side, as shown in FIG.

Here, as in the present embodiment, 22 LEDs 25 are arranged in a 5 × 5 matrix-shaped area, and as shown in FIG. 9, the LEDs 25 are mounted in all the 5 × 5 matrix-shaped areas. On the other hand, the output per unit area was confirmed when a space for arranging the fixing screw 32 or the fixing screw 33 was provided between the four LEDs 25.

In the case of the mounting example shown in FIG. 9, in order to arrange the fixing screws 32 and 33 in the gap SA between the four LEDs 25 without interfering with the LEDs 25, it is a condition that the relationship of the following formula (1) is satisfied. Become.

但し、Ｐ：ＬＥＤ２５の取付ピッチ、Ｌ：ＬＥＤ２５のサイズ、Ｓ：固定ネジの頭部の直径、Ａ：４つのＬＥＤ２５の間の空隙ＳＡの対角線距離

However, P: the mounting pitch of the LED25, L: the size of the LED25, S: the diameter of the head of the fixing screw, A: the diagonal distance of the gap SA between the four LEDs25.

For example, when P = 10 mm and L = 6.8 mm, A = 4.5 mm, and the equation (1) is satisfied by using M2 or M2.5 fixing screws 32 and 33 having S = 4 mm. Therefore, in the case of this implementation example in which the LEDs 25 are arranged in all the areas divided into 5 × 5, the output per unit area is 25 W / (10 × 5/10), where W is the output of one LED 25. ² = 1.0 W.

On the other hand, when P = 8 mm and L = 6.8 mm, A = 1.7 mm, and when M2 or M2.5 fixing screws 32 and 33 having S = 4 mm are used, the equation (1) is not satisfied. , In order to arrange the fixing screws 32 and 33 as in the present embodiment, three non-LED regions 28 are provided. That is, when the number of LEDs 25 is 22, the output per unit area is 22 W / (8 × ^{5/10) 2} = 1.375 W, where W is the output of one LED 25.

Therefore, the output per unit area is higher in the mounting example of the present embodiment than in the mounting example shown in FIG. 9, and if the focusing efficiency of the lens is a difference of 10%, the number of LEDs 25 is increased. Even if it decreased, it was proved that it is advantageous in terms of illuminance to shorten the mounting pitch P and arrange the LEDs 25 densely. As a result, the light emitting unit 22 can be fixed to the heat sink 23 without a gap, and the cooling efficiency is improved.

The present invention is not limited to the above-described embodiment, and can be appropriately modified, improved, and the like.
For example, in the present embodiment, a lens array having a plurality of lenses in a 5 × 5 matrix-like region has been described, but the number of regions is not limited to this as long as the configuration satisfies the conditions of the present invention, and the number of regions is LED. It may be changed according to the number and arrangement of. Further, the numbers in the first direction and the numbers in the second direction may be the same number as in the present embodiment or may be different numbers.
Further, in the present embodiment, three non-lens regions (that is, fixing regions) are set in the 5 × 5 matrix-shaped region, but for example, if stronger fixing is required, four regions are used. It is also possible to make it a place.
Further, in the present embodiment, the LED 25 is shown in a square shape in a plan view, but it may be in a rectangular shape.
Further, the exposure apparatus and the exposure method of the present invention are not limited to the proximity exposure apparatus and the proximity exposure method of the present embodiment, and may be other types of exposure apparatus and exposure method.

As described above, the following matters are disclosed in this specification.
(1) A lens plate and a plurality of lenses fixed to the lens plate and capable of condensing light emitted from an LED are provided, and a lens region on which the lens is fixed is provided on the surface of the lens plate. , N (m, n: integer) matrix-like regions consisting of any of the non-lens regions to which the lens is not fixed, m in the first direction and n in the second direction orthogonal to the first direction. Is a lens array in which
The non-lens region is formed at least three places in the matrix-like region.
Each of the non-lens regions comprises a fastening hole through which a fastening means for fixing the lens array is inserted with respect to the base plate on which the LED is arranged.
Each of the non-lens regions is a lens array surrounded by the lens region.
According to this configuration, the lens array can be stably assembled to the base plate of the LED, the illuminance distribution is excellent, and the size can be reduced.

(2) The lens array according to (1), wherein pin holes for positioning the lens array with respect to the base plate are formed in at least two positions in the non-lens region.
According to this configuration, the lens array can be accurately positioned on the base plate by the two pin holes.

(3) The pin holes are provided at two places.
One of the pin holes is a round hole near the center of the lens array, and the other of the pin holes is farther from the center of the lens array than the round hole and in the direction connecting the two pin holes. The lens array according to (2), which has a long elongated hole.
According to this configuration, the lens array can be easily and accurately fixed to the base plate by positioning the lens array with respect to the base plate by the round holes and determining the rotational direction position of the lens array by the elongated holes.

(4) The lens arranged adjacent to the first direction and the second direction around the non-lens region has a side surface that bulges in a curved shape toward the non-lens region (4). The lens array according to any one of 1) to (3).
According to this configuration, the light emitted from the LED can be efficiently collected by having the side surface that bulges in a curved shape on the non-lens region side.

(5) The lens array according to any one of (1) to (4), wherein the side surfaces of the adjacent lenses have flat surfaces that are fused and connected to each other.
According to this configuration, the lenses can be arranged in close contact with each other, the arrangement density of the lenses can be increased, the lens plate is less likely to crack, and the undulation of the lens plate can be prevented.

(6) The fastening holes are provided at three places.
Any two of the three fastening holes are located on both sides with respect to the intermediate position in the first direction.
The lens array according to any one of (1) to (5), wherein any two of the three fastening holes are located on both sides with respect to an intermediate position in the second direction.
According to this configuration, the lens array can be fixed to the base plate with an even pressing force over the entire surface of the lens plate.

(7) The lens array according to any one of (1) to (6), wherein the plurality of lenses have flat surfaces on the side surfaces in the first direction and the second direction facing the adjacent lenses, respectively. ..
According to this configuration, the lenses can be arranged in close contact with each other, the arrangement density of the lenses can be increased, the lens plate is less likely to crack, the waviness of the lens plate can be prevented, and all lenses can be arranged. The light collection performance can be made uniform, and the lens can be easily processed.

(8) The lens array according to any one of (1) to (7) and
The base plate and a plurality of the LEDs fixed to the base plate are provided, and the surface of the base plate is either an LED region where the LEDs are fixed or a non-LED region where the LEDs are not fixed. A light emitting unit and a light emitting portion in which a matrix-like region arranged in the first direction and the second direction is formed.
A heat sink that cools the light emitting portion by abutting against the back surface of the base plate opposite to the front surface to which the plurality of LEDs are fixed.
It is an LED lighting unit equipped with
An LED lighting unit in which the lens array and the light emitting unit are attached to the heat sink so that the lens region and the LED region, and the non-lens region and the non-LED region face each other.
According to this configuration, even if the LED lighting units are arranged adjacent to each other, it is possible to suppress the variation in the illuminance distribution due to the non-LED regions of the adjacent LED lighting units being adjacent to each other.

(9) A lens array including a lens plate and a plurality of lenses fixed to the lens plate.
A light emitting unit including a base plate and a plurality of LEDs fixed to the base plate.
A heat sink that cools the light emitting portion by abutting against the back surface of the base plate opposite to the front surface to which the plurality of LEDs are fixed.
With
In the lens array, on the surface of the lens plate, m lenses in the first direction, which are either a lens region in which the lens is fixed or a non-lens region in which the lens is not fixed, are in the first direction. N (m, n: integer) matrix-like regions are formed in the second direction orthogonal to the above, and the non-lens region is formed at at least three places in the matrix-like region.
In the light emitting portion, on the surface of the base plate, a matrix arranged in the first direction and the second direction, which is either an LED region in which the LED is fixed or a non-LED region in which the LED is not fixed. A region of shape is formed,
It is an LED lighting unit
The lens array and the light emitting unit are attached to the heat sink so that the lens region and the LED region, and the non-lens region and the non-LED region face each other.
The lens plate comprises, in each of the non-lens regions, a first fastening hole through which a first fastening means for fixing the lens array to the heat sink is inserted via the base plate.
The base plate has a second fastening hole through which a second fastening means for fixing the base plate is inserted into the heat sink and a third fastening hole through which the first fastening means is inserted in each of the non-LED regions. With holes,
The lens array is fixed to the heat sink by the first fastening means via a spacer interposed between the lens plate and the base plate so as to form a gap between the LED and the lens plate. LED lighting unit.
According to this configuration, when the lens plate is fixed to the base plate, interference between the lens plate and the LED can be prevented, damage to the thin cover plate can be prevented, and assembly becomes easy.

(10) The LED lighting unit according to (9), wherein each of the non-lens regions is surrounded by the lens region.
According to this configuration, even if a plurality of LED lighting units are arranged in a matrix to form a light source unit, it is possible to prevent non-lens regions from being adjacent to each other and to make the illuminance distribution uniform.

(11) A lighting device including a plurality of LED lighting units according to any one of (8) to (10) is provided, and a mask pattern is exposed and transferred to a work by exposure light from the lighting device. Exposure device.
According to this configuration, the mask pattern can be exposed and transferred to the work by the exposure light emitted from the lighting device including the plurality of LED lighting units.

(12) The lighting device includes a plurality of LED lighting units according to any one of (8) to (10), and the mask pattern is exposed and transferred to the work by the exposure light from the lighting device. Exposure method.
According to this configuration, the mask pattern can be exposed and transferred to the work by the exposure light emitted from the lighting device including the plurality of LED lighting units.

10 Lighting device 21 LED lighting unit 22 Light emitting unit 23 Heat sink 24 Base plate 25 LED
27 LED area 28 Non-LED area 29 Second fastening hole 30 Third fastening hole 32 Fixing screw (second fastening means)
33 Fixing screw (first fastening means)
34 Spacer 50 Lens array 51 Lens plate 52 Lens 53 Lens area 54 Non-lens area 55 First fastening hole (fastening hole)
56A pin hole (round hole)
56B pin hole (long hole)
57 Flat surface 58 Side surface 100 Proximity exposure equipment (exposure equipment)
M mask W work

Claims (12)

A lens plate and a plurality of lenses fixed to the lens plate and capable of condensing light emitted from an LED are provided, and a lens region to which the lens is fixed and the lens are provided on the surface of the lens plate. N (m, n: integer) matrix-like regions are formed, consisting of any of the non-lens regions in which the lens is not fixed, m in the first direction and n (m, n: integer) in the second direction orthogonal to the first direction. It is a lens array
The non-lens region is formed at least three places in the matrix-like region.
Each of the non-lens regions comprises a fastening hole through which a fastening means for fixing the lens array is inserted with respect to the base plate on which the LED is arranged.
Each of the non-lens regions is a lens array surrounded by the lens region. The lens array according to claim 1, wherein pin holes for positioning the lens array with respect to the base plate are formed in at least two of the non-lens regions. The pin holes are provided in two places.
One of the pin holes is a round hole near the center of the lens array, and the other of the pin holes is farther from the center of the lens array than the round hole and in the direction connecting the two pin holes. The lens array according to claim 2, which has a long elongated hole. Claims 1 to that the lens arranged adjacent to the first direction and the second direction around the non-lens region has a side surface that bulges in a curved shape toward the non-lens region side. The lens array according to any one of 3. The lens array according to any one of claims 1 to 4, wherein the side surfaces of the adjacent lenses have flat surfaces that are fused and connected to each other. The fastening holes are provided at three places.
Any two of the three fastening holes are located on both sides with respect to the intermediate position in the first direction.
The lens array according to any one of claims 1 to 5, wherein any two of the three fastening holes are located on both sides with respect to an intermediate position in the second direction. The lens array according to any one of claims 1 to 6, wherein each of the plurality of lenses has a flat surface on a side surface in a first direction and a side surface in a second direction facing the adjacent lens. The lens array according to any one of claims 1 to 7.
The base plate and a plurality of the LEDs fixed to the base plate are provided, and the surface of the base plate is either an LED region where the LEDs are fixed or a non-LED region where the LEDs are not fixed. A light emitting unit and a light emitting portion in which a matrix-like region arranged in the first direction and the second direction is formed.
A heat sink that cools the light emitting portion by abutting against the back surface of the base plate opposite to the front surface to which the plurality of LEDs are fixed.
It is an LED lighting unit equipped with
An LED lighting unit in which the lens array and the light emitting unit are attached to the heat sink so that the lens region and the LED region, and the non-lens region and the non-LED region face each other. A lens array comprising a lens plate and a plurality of lenses fixed to the lens plate.
A light emitting unit including a base plate and a plurality of LEDs fixed to the base plate.
A heat sink that cools the light emitting portion by abutting against the back surface of the base plate opposite to the front surface to which the plurality of LEDs are fixed.
With
In the lens array, on the surface of the lens plate, m lenses in the first direction, which are either a lens region in which the lens is fixed or a non-lens region in which the lens is not fixed, are in the first direction. N (m, n: integer) matrix-like regions are formed in the second direction orthogonal to the above, and the non-lens region is formed at at least three places in the matrix-like region.
In the light emitting portion, on the surface of the base plate, a matrix arranged in the first direction and the second direction, which is either an LED region in which the LED is fixed or a non-LED region in which the LED is not fixed. A region of shape is formed,
It is an LED lighting unit
The lens array and the light emitting unit are attached to the heat sink so that the lens region and the LED region, and the non-lens region and the non-LED region face each other.
The lens plate comprises, in each of the non-lens regions, a first fastening hole through which a first fastening means for fixing the lens array to the heat sink is inserted via the base plate.
The base plate has a second fastening hole through which a second fastening means for fixing the base plate is inserted into the heat sink and a third fastening hole through which the first fastening means is inserted in each of the non-LED regions. With holes,
The lens array is fixed to the heat sink by the first fastening means via a spacer interposed between the lens plate and the base plate so as to form a gap between the LED and the lens plate. LED lighting unit. The LED lighting unit according to claim 9, wherein each of the non-lens regions is surrounded by the lens region. An exposure apparatus comprising a plurality of LED illumination units according to any one of claims 8 to 10, wherein a mask pattern is exposed and transferred to a work by exposure light from the illumination apparatus. An exposure method comprising a plurality of LED lighting units according to any one of claims 8 to 10, and exposing and transferring a mask pattern to a work by exposure light from the lighting device.

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