JP2021160014A - Lifting device - Google Patents

Abstract

To provide a lifting device which can achieve compactification.SOLUTION: A lifting device 1 includes a first base part 10, a second base part 40, first rails 21A, 21B, first sliders 61A, 61B, a first stator module 31, first magnets 51, a table 70, second rails 22A, 22B, second sliders 62A, 62B, a second stator module 32, and second magnets 52.SELECTED DRAWING: Figure 1

Description

The present disclosure relates to an elevating device.

A first drive mechanism provided between the first base portion, the second base portion having an inclined surface, the first base portion and the second base portion, and moving the second base portion in the horizontal direction, a table, and the like. , A lifting device provided between the table and the second base portion and including a second driving mechanism for moving the table along an inclined surface is known (see, for example, Patent Document 1). In Patent Document 1, the first drive mechanism and the second drive mechanism are ball screws including a screw shaft and a nut that can move in conjunction with the rotation of the screw shaft.

Jikkenhei 6-53042

In the elevating device of Patent Document 1, since the first drive mechanism and the second drive mechanism are ball screws, the cross-sectional height of the elevating device (the height of the elevating device in the direction perpendicular to the installation surface on which the elevating device is installed). May be higher. In the elevating device, it is preferable that the cross-sectional height of the elevating device can be reduced, that is, compactification can be achieved. Therefore, one of the purposes is to provide an elevating device capable of achieving compactness.

The lifting device according to the present disclosure is a first base portion having a first planar surface, a second planar surface facing the first surface, and a direction perpendicular to the first surface. A second base portion that includes a planar third surface that is located on the opposite side of the second surface in the first direction and is inclined with respect to the first surface, and a first surface or a second surface. A first rail fixed to a surface and extending linearly, and a first slider fixed to a surface of the first surface and a second surface on which the first rail is not fixed and capable of traveling on the first rail. A first stator module having a plurality of first coils fixed to a first surface or a second surface and arranged side by side along a first rail, and a first surface and a second surface. 1 The stator module is fixed to a surface that is not fixed, faces a plurality of first coils, and faces a third surface with a plurality of first magnets arranged side by side so that the directions of magnetic fields are alternately opposite to each other. A virtual plane that is fixed to a third or fourth plane, extends linearly so as to be inclined with respect to the first plane, and is perpendicular to the first direction. In the projected image projected on, the second rail extending parallel to the first rail, and of the third and fourth planes, the second rail is fixed to the plane on which the second rail is not fixed and can travel on the second rail. A second stator module with two sliders and a plurality of second coils fixed to a third or fourth plane and arranged side by side along a second rail, and a third and fourth plane. Among them, a plurality of second magnets are provided, wherein the second stator module is fixed to a surface to which it is not fixed, faces a plurality of second coils, and is arranged side by side so that the directions of magnetic fields are alternately opposite to each other. ..

According to the elevating device, compactness can be achieved.

FIG. 1 is a schematic perspective view showing the structure of the elevating device. FIG. 2 is a schematic front view showing the structure of the elevating device. FIG. 3 is a schematic side view showing the structure of the elevating device. FIG. 4 is a schematic perspective view showing the structure of the lifting device in a state where the second support portion, the third support portion, the second rail, the second slider, the second stator module, the second magnet, and the table are removed. FIG. 5 is a schematic perspective view showing the structure of the lifting device in a state where the first magnet, the second base portion, the second rail, the second slider, the second stator module, the second magnet, and the table are removed. FIG. 6 is a schematic perspective view showing the structure of the lifting device in a state where the second slider, the second magnet, and the table are removed. FIG. 7 is a schematic perspective view showing the structure of the elevating device in a state where the first base portion, the first rail, the first slider, the first stator module, and the first magnet are removed. FIG. 8 is a schematic perspective view showing the structure of the elevating device in a state where the first base portion, the first rail, the first slider, the first stator module, and the first magnet are removed. FIG. 9 is a schematic perspective view showing the structure of the lifting device in a state where the first base portion, the first rail, the first slider, the first stator module, the first magnet, and the second portion are removed. FIG. 10 is a schematic perspective view showing the structure of the lifting device in a state where the first base portion, the first rail, the first slider, the first stator module, the first magnet, the second magnet, and the table are removed. FIG. 11 is a block diagram showing an electrically connected state of the elevating device. FIG. 12 is a schematic front view showing a state in which the elevating device is elevating and descending. FIG. 13 is a schematic front view showing a state in which the elevating device is elevating and descending.

[Outline of Embodiment]
First, embodiments of the present disclosure will be listed and described. The elevating device of the present disclosure has a first base portion having a first planar surface, a second planar surface facing the first surface, and a first direction perpendicular to the first surface. On a second base and a first or second surface that is located on the opposite side of the second surface in the direction and includes a planar third surface that is inclined with respect to the first surface. A first rail that is fixed and extends linearly, a first slider that is fixed to the first surface and the second surface on which the first rail is not fixed and can travel on the first rail, and a first A first stator module having a plurality of first coils fixed to the first surface or the second surface and arranged side by side along the first rail, and the first fixation of the first surface and the second surface. A plane facing the third surface with a plurality of first magnets fixed to a surface on which the child module is not fixed, facing the plurality of first coils, and arranged side by side so that the directions of the magnetic fields are alternately opposite to each other. A table containing a fourth surface of the shape, fixed to the third surface or the fourth surface, extending linearly so as to be inclined with respect to the first surface, and projected onto a virtual plane perpendicular to the first direction. In the projected image, the second rail extending parallel to the first rail, and of the third and fourth surfaces, the second slider is fixed to the surface on which the second rail is not fixed and can travel on the second rail. And a second stator module having a plurality of second coils fixed to the third or fourth plane and arranged side by side along the second rail, and of the third and fourth planes. , The second stator module is fixed to a surface to which it is not fixed, faces a plurality of second coils, and is provided with a plurality of second magnets arranged side by side so that the directions of magnetic fields are alternately opposite to each other.

In the elevating device of the present disclosure, the magnetic flux density between the first base portion and the first magnet is changed by changing the direction of the current flowing through the first coil, and the second base portion is in the direction in which the first rail extends. It can move along (eg, in the horizontal direction). Further, by changing the direction of the current flowing through the second coil, the magnetic flux density between the second base portion and the second magnet is changed, and the table moves along the direction in which the second rail extends (inclination direction). can do.

Here, for example, if the elevating device is installed so that the first rail is parallel to the horizontal plane, the second rail is inclined with respect to the horizontal plane. When the inclination angle of the second rail with respect to the horizontal plane is θ (rad), when the table moves by a distance d with respect to the second base portion, the table moves in the vertical direction by d × sin (θ) and in the horizontal direction. It moves by d × cos (θ). At this time, the position of the table in the horizontal direction is changed by moving the second base portion with respect to the first base portion by d × cos (θ) in the direction opposite to the horizontal movement direction of the table. It can be moved (elevated) in the vertical direction.

By adopting such a configuration, the table can be raised and lowered without installing a linear motion guide device that moves the table along the vertical direction. Further, since the elevating device of the present disclosure does not use a ball screw as a drive source for traveling the first slider and the second slider, the elevating device can be made compact. As described above, according to the elevating device of the present disclosure, it is possible to provide an elevating device capable of achieving compactness of the elevating device.

The elevating device has a shape extending along the second rail, and includes a first end portion fixed to the second base portion and a second end portion fixed to the table, and the second base portion includes. On the other hand, an elastic member that can regulate the relative movement of the table so as to approach the first base portion may be further provided. By adopting such a configuration, it is possible to prevent the table from sliding down so as to approach the first base portion when the supply of electric power to the elevating device is stopped. Further, the tension of the elastic member applied to the table makes it easy to move the table away from the first base portion.

In the lifting device, the elastic member may be a spiral spring. The central axis of the vine winding spring may be arranged so as to extend in the direction in which the second rail extends. The vine winding spring is suitable as an elastic member of the elevating device.

The elevating device has a first through hole extending along the second rail, a first connecting portion that holds the first end portion of the elastic member, and a first through hole that penetrates the first through hole and is screwed into the table. (1) A screw for fixing the connection portion to the table may be further provided. By adopting such a configuration, the position where the first connecting portion is fixed to the table can be adjusted along the direction in which the second rail extends, and the tension of the elastic member applied to the table can be adjusted.

[Specific example of embodiment]
Next, an example of a specific embodiment of the elevating device of the present disclosure will be described with reference to the drawings. In the following drawings, the same or corresponding parts are given the same reference number and the explanation is not repeated.

FIG. 1 is a schematic perspective view showing a structure of an elevating device according to an embodiment of the present disclosure. In FIG. 1, the Y-axis direction is the direction along the long side of the first plane, the X-axis direction is the direction along the short side of the first plane, and the Z-axis direction is the first plane (X). -Y plane). FIG. 2 is a schematic front view showing the structure of the elevating device. FIG. 3 is a schematic side view showing the structure of the elevating device. FIG. 4 shows the structure of the lifting device in a state where the second support portion, the third support portion, the second rail, the second slider, the second stator module, the second magnet, and the table are removed from the lifting device shown in FIG. It is a schematic perspective view which shows. FIG. 4 shows a state in which some parts are partially cut from the viewpoint of showing the internal structure. In FIG. 4, the hatched region corresponds to a cross section. FIG. 5 shows the structure of the lifting device in a state where the first magnet, the second base portion, the second rail, the second slider, the second stator module, the second magnet, and the table are removed from the lifting device shown in FIG. It is a schematic perspective view. FIG. 6 is a schematic perspective view showing the structure of the elevating device in a state where the second slider, the second magnet, and the table are removed from the elevating device shown in FIG. FIG. 7 is a schematic perspective view showing the structure of the lifting device in a state where the first base portion, the first rail, the first slider, the first stator module, and the first magnet are removed from the lifting device shown in FIG. FIG. 8 corresponds to a state in which the first base portion, the first rail, the first slider, the first stator module, and the first magnet are removed from the elevating device shown in FIG. 1, and is viewed from a viewpoint different from that of FIG. It is a perspective view. FIG. 9 is a schematic perspective showing the structure of the lifting device in a state where the first base portion, the first rail, the first slider, the first stator module, the first magnet, and the second portion are removed from the lifting device shown in FIG. It is a figure. In FIG. 9, a state in which some parts are partially cut is shown from the viewpoint of showing the internal structure. In FIG. 9, the hatched region corresponds to a cross section. FIG. 10 shows the structure of the lifting device in a state where the first base portion, the first rail, the first slider, the first stator module, the first magnet, the second magnet, and the table are removed from the lifting device shown in FIG. It is a schematic perspective view.

With reference to FIGS. 1 to 4, the elevating device 1 in the present embodiment includes a first base portion 10, a second base portion 40, first rails 21A and 21B, and first sliders 61A and 61B. A first stator module 31 and a plurality of first magnets 51 are provided. The elevating device 1 uses a so-called linear motor using a coil and a magnet, which will be described later, as a drive source.

The first base portion 10 has a flat plate shape. The first base portion 10 includes a first surface 10A which is a rectangular flat surface. A plurality of screw holes 13 are formed on the outer edge of the first surface 10A at intervals along the Y-axis direction. The first rails 21A and 21B are fixed on the first surface 10A. The positions where the screw holes 212 of the first rails 21A and 21B are formed coincide with the positions where the screw holes (not shown) of the first base portion 10 are formed, and the screws 211 are screwed in. , The first rails 21A and 21B are fixed to the first base portion 10. The first rails 21A and 21B have a shape extending linearly. The first rails 21A and 21B are arranged along the Y-axis direction. The first rail 21A and the first rail 21B are arranged at intervals in the X-axis direction.

With reference to FIG. 4, the first stator module 31 is fixed on the first surface 10A. The first stator module 31 includes a flat plate-shaped substrate 316, a plurality of first coils 311 and a mold portion 312, a cord 313, and a protective sheet 314. The substrate 316 is arranged on the first surface 10A. The substrate 316 is arranged so that the position where the screw hole (not shown) of the substrate 316 is formed coincides with the position where the screw hole (not shown) of the first base portion 10 is formed, and the screw 315 is screwed in. As a result, the substrate 316 is fixed to the first base portion 10. When viewed in a plane from the Z-axis direction, the substrate 316 has a rectangular shape. A plurality of first coils 311 are arranged on the surface of the substrate 316. The first coil 311 is an electromagnet. The plurality of first coils 311 are arranged side by side along the Y-axis direction. The first coil 311 has a flat plate annular shape. The central axis of the first coil 311 intersects the XY plane (orthogonally in the present embodiment). The plurality of first coils 311 are electrically connected to each other. The plurality of first coils 311 are arranged side by side so that the directions of the magnetic fields of the first coil 311 are alternately opposite to each other when a current is passed through the plurality of first coils 311. The plurality of first coils 311 are electrically connected to the cord 313 via a connection portion. The cord 313 is electrically connected to an external power source.

A resin mold portion 312 is arranged so as to cover the substrate 316 and the plurality of first coils 311. A plurality of first coils 311 are fixed on the substrate 316 by the mold portion 312. The material constituting the mold portion 312 is, for example, an epoxy resin. A protective sheet 314 is arranged so as to cover the surface of the mold portion 312. The protective sheet 314 is fixed to the mold portion 312 with, for example, an adhesive. End plates 14 and 15 are arranged on the first surface 10A along the short side of the first surface 10A. By arranging the end plates 14 and 15, it is possible to prevent the second base portion 40, which will be described later, from popping out from the first base portion 10. The end plates 14 and 15 are arranged so that the positions where the screw holes (not shown) of the end plates 14 and 15 are formed coincide with the positions where the screw holes (not shown) of the first base portion 10 are formed. Then, the screws 141 and 151 are screwed in, so that the end plates 14 and 15 are fixed to the first base portion 10. With reference to FIG. 2, the end plates 14, 15 have pads 14A, 15A. With reference to FIGS. 1 and 2, a sensor 11 is installed at the center of the first base portion 10 in the Y-axis direction. The code 11a of the sensor 11 is held by the support band 12 fixed to the first base portion 10.

With reference to FIGS. 1 and 2, the second base portion 40 includes a first support portion 41, a second support portion 42, and a third support portion 43. The first support portion 41 has a flat plate shape. The first support portion 41 includes one surface 41A in the Z-axis direction and a surface 41B as a second surface arranged on the side opposite to the surface 41A. The surfaces 41A and 41B each have a rectangular shape. The surface 41B faces the first surface 10A. The surface 41B is arranged parallel to the first surface 10A. The second support portion 42 is fixed to the first support portion 41 so as to come into contact with the surface 41A of the first support portion 41. The second support portion 42 has a square columnar shape. The second support portion 42 has a side surface 42B that contacts the surface 41A of the first support portion 41, a side surface 42A that is opposite to the side surface 42B in the Z-axis direction, and side surfaces 42C and 42D that connect the side surface 42A and the side surface 42B. And include. The side surface 42A is inclined with respect to the XY plane. The side surface 42A has a planar shape. With reference to FIG. 3, a recess 421 is formed on the side surface 42C of the second support portion 42. With reference to FIGS. 1 and 2, the third support portion 43 is fixed to the second support portion 42 so as to come into contact with the side surface 42A of the second support portion 42. The third support portion 43 has a flat plate shape. The third support portion 43 includes a surface 43A as a third surface arranged on the side opposite to the second support portion 42 in the thickness direction. The surface 43A has a rectangular shape. The surface 43A is arranged so as to be inclined with respect to the XY plane. The surface 43A is arranged on the side opposite to the surface 41B of the first support portion 41 when viewed from the second support portion 42 in the Z-axis direction. With reference to FIG. 6, a plurality of screw holes 433 are formed on the outer edge of the surface 43A at intervals in the Y-axis direction. The third support portion 43 is arranged so that the position where the screw hole 433 of the third support portion 43 is formed and the position where the screw hole (not shown) of the second support portion 42 is formed coincide with the screw. 422 is screwed into the screw hole 433.

With reference to FIG. 4, a plurality of first magnets 51 are fixed to the surface 41B of the first support portion 41 so as to face the plurality of first coils 311. The first magnet 51 is a permanent magnet. The first magnet 51 has a rectangular parallelepiped shape. The plurality of first magnets 51 are arranged side by side along the Y-axis direction so that the directions of the magnetic fields are alternately opposite to each other. More specifically, along the Y-axis direction, the surface of the first magnet 51 facing the first coil 311 is the north pole of the north pole, and the surface of the side facing the first coil 311 is the south pole. The first magnet 51, which is a magnetic pole, is arranged alternately side by side. With reference to FIGS. 4 and 5, two pairs of first sliders 61A and 61B are fixed to the surface 41B of the first support portion 41 at intervals in the Y-axis direction. The first sliders 61A and 61B are arranged so that the positions where the screw holes 612 of the first sliders 61A and 61B are formed and the positions where the screw holes 613 of the first support portion 41 are formed coincide with each other, and the screws 611 are screwed in. As a result, the first sliders 61A and 61B are fixed to the first support portion 41. The first slider 61A and the first slider 61B are arranged so as to sandwich a plurality of first magnets 51. The first slider 61A can travel on the first rail 21A. The first slider 61B can travel on the first rail 21B. In the present embodiment, the two first sliders 61A and the two first sliders 61B are attached to the first support portion 41. A linear scale 411 is fixed to the surface 41B of the first support portion 41 so as to face the sensor 11.

With reference to FIGS. 6 to 9, the elevating device 1 includes the second rails 22A and 22B, the second sliders 62A and 62B, the second stator module 32, the plurality of second magnets 52, and the table 70. , Are further prepared. The second rails 22A and 22B are arranged on the surface 43A of the third support portion 43. The second rails 22A and 22B are arranged so that the positions where the screw holes 212 of the second rails 22A and 22B are formed coincide with the positions where the screw holes (not shown) of the third support portion 43 are formed. , The second rails 22A and 22B are fixed to the third support portion 43 by screwing the screw 212. The second rails 22A and 22B have a shape extending linearly. The second rails 22A and 22B are inclined to the first surface 10A. In the projected image of the first rails 21A and 21B and the second rails 22A and 22B projected on the XY plane perpendicular to the Z-axis direction, the first rails 21A and 21B and the second rails 22A and 22B are arranged in parallel. NS. The second rail 22A and the second rail 22B are arranged at intervals in the X-axis direction. In the present embodiment, the distance between the second rail 22A and the second rail 22B in the X-axis direction is the same as the distance between the first rail 21A and the first rail 21B. In FIG. 6, the arrow W is the direction along the direction in which the second rails 22A and 22B extend.

With reference to FIG. 9, the second stator module 32 is fixed on the surface 43A of the third support portion 43. The second stator module 32 includes a flat plate-shaped substrate 326, a plurality of second coils 321, a mold portion 322, a cord 323, and a protective sheet 324. The substrate 326 is arranged on the surface 43A of the third support portion 43. The substrate 326 is arranged so that the position where the screw hole (not shown) of the substrate 326 is formed coincides with the position where the screw hole (not shown) of the third support portion 43 is formed, and the screw 325 is screwed in. By doing so, the substrate 326 is fixed to the third support portion 43. A plurality of second coils 321 are arranged on the substrate 326. The second coil 321 is an electromagnet. The plurality of second coils 321 are arranged side by side along the direction of the arrow W. The second coil 321 has a flat plate annular shape. The central axis of the second coil 321 intersects the surface 43A (orthogonally in the present embodiment). The plurality of second coils 321 are electrically connected to each other. The plurality of second coils 321 are arranged so that the directions of the magnetic fields of the second coil 321 are alternately opposite to each other when a current is passed through the plurality of second coils 321. The plurality of second coils 321 are electrically connected to the cord 323 via a connection portion. The cord 323 is electrically connected to an external power source.

A resin mold portion 322 is arranged so as to cover the substrate 326 and the plurality of second coils 321. The plurality of second coils 321 are fixed on the substrate 326 by the mold portion 322. The material constituting the mold portion 322 is, for example, an epoxy resin. A protective sheet 324 is arranged so as to cover the surface of the mold portion 322. The protective sheet 324 is fixed to the mold portion 322 with, for example, an adhesive. End plates 434 and 436 are arranged on the surface 43A along the short side of the surface 43A of the third support portion 43. By arranging the end plates 434 and 436, it is possible to prevent the table 70, which will be described later, from popping out from the third support portion 43. The end plates 434 and 436 are arranged so that the positions where the screw holes (not shown) of the end plates 434 and 436 are formed coincide with the positions where the screw holes (not shown) of the third support portion 43 are formed. Then, the screws 435 and 437 are screwed in, so that the end plates 434 and 436 are fixed to the third support portion 43. The end plates 434 and 436 have pads 434A and 436A, respectively. A sensor 431 is installed at the center of the long side of the surface 43A of the third support portion 43. The code 431a of the sensor 431 is held by a support band 432 fixed to the third support portion 43.

With reference to FIGS. 7-9, the table 70 includes a first portion 71 and a second portion 72. The first portion 71 has a flat plate shape. The first portion 71 includes one surface 71A in the thickness direction and a surface 71B as a fourth surface arranged on the side opposite to the surface 71A. The surfaces 71A and 71B have a rectangular shape. The surface 71B faces the surface 43A of the third support portion 43. The surface 71B is arranged parallel to the surface 43A. The second portion 72 is fixed to the first portion 71 so as to come into contact with the surface 71A of the first portion 71. The second portion 72 is arranged so that the position where the screw hole 722 of the second portion 72 is formed coincides with the position where the screw hole (not shown) of the first portion 71 is formed, and the screw 721 is screwed. As a result, the second portion 72 is fixed to the first portion 71. The second portion 72 has a square columnar shape. The second portion 72 includes a side surface 72A of the second portion 72 opposite to the first portion 71 in the Z-axis direction. The side surface 72A has a planar shape. The side surface 72A is parallel to the XY plane.

With reference to FIG. 9, a plurality of second magnets 52 are fixed to the surface 71B of the first portion 71 so as to face the plurality of second coils 321. The second magnet 52 is a permanent magnet. The second magnet 52 has a rectangular parallelepiped shape. The plurality of second magnets 52 are arranged side by side along the direction of the arrow W so that the directions of the magnetic fields are alternately opposite to each other. More specifically, the second magnet 52 having an N-pole magnetic pole on the surface facing the second coil 321 and the second magnet 52 having an S-pole magnetic pole on the surface facing the second coil 321 alternately alternate. Arranged side by side. With reference to FIGS. 9 and 10, a pair of second sliders 62A and 62B are fixed to the surface 71B of the first portion 71. The positions where the screw holes (not shown) of the second sliders 62A and 62B are formed and the positions where the screw holes 622 of the first portion 71 are formed are arranged so as to coincide with each other, and the screws 621 are screwed in. The second sliders 62A and 62B are fixed to the first portion 71. The second slider 62A and the second slider 62B are arranged so as to sandwich the plurality of second magnets 52. The second slider 62A can travel on the second rail 22A. The second slider 62B can travel on the second rail 22B. In the present embodiment, two second sliders 62A and two second sliders 62B are attached to the first portion 71. A linear scale 711 is fixed to the surface 71B of the first portion 71 so as to face the sensor 431.

With reference to FIGS. 7 and 8, the elevating device 1 further includes a spiral spring 81 as an elastic member, a first connecting portion 82, and a second connecting portion 83. The first connecting portion 82 has a structure in which a steel plate is bent. The first connecting portion 82 includes a flat plate-shaped head 821, a flat plate-shaped connecting portion 822, and a flat plate-shaped 823 bent portion 823. The connecting portion 822 is arranged along the YY plane from the outer edge of the head 821. The bent portion 823 bends along the X-axis direction from the end portion of the connecting portion 822 opposite to the head 821. A through hole 82B that penetrates in the thickness direction is formed in the bent portion 823. The head 821 is formed with a first through hole 82A extending in the direction of the arrow W. The first connecting portion 82 is arranged so that the position where the first through hole 82A of the first connecting portion 82 is formed coincides with the position where the screw hole (not shown) of the second portion 72 is formed. By screwing the two screws 84, the first connecting portion 82 is fixed to the second portion 72. The second connecting portion 83 has a structure in which a steel plate is bent. The second connecting portion 83 includes a flat plate-shaped plate-shaped portion 831 and a flat plate-shaped bent portion 832 arranged along the YY plane from the outer edge of the plate-shaped portion 831. A through hole 83A penetrating in the thickness direction is formed in the bent portion 832. The second connection portion 83 is arranged so that the position where the screw hole (not shown) of the plate-shaped portion 831 is formed coincides with the position where the screw hole (not shown) of the second support portion 42 is formed. By screwing the screw 85, the second connecting portion 83 is fixed to the second supporting portion 42. A first engaging portion 811 is formed at one end of the spiral winding spring 81. A second engaging portion 812 is formed at the other end of the vine winding spring 81. The first engaging portion 811 is inserted through the through hole 82B of the first connecting portion 82. The second engaging portion 812 is inserted through the through hole 83A of the second connecting portion 83. In this way, the spiral winding spring 81 connects the first connecting portion 82 and the second connecting portion 83. The vine winding spring 81 can regulate the movement of the table 70 relative to the second base portion 40 in the direction opposite to the direction of the arrow W.

With reference to FIG. 11, the elevating device 1 further includes a control unit 80. The control unit 80 is electrically connected to the first coil 311 of the first stator module 31, the second coil 321 of the second stator module 32, and the sensors 11, 431. With reference to FIG. 2, the control unit 80 controls the current flowing through the first coil 311 and the second coil 321 based on the output signals (position information) of the sensors 11 and 431, so that the control unit 80 of the second base unit 40 The position in the Y-axis direction (horizontal position) and the position in the direction of the arrow W of the table 70 (inclination direction position) are controlled. In FIG. 11, the description of the sensors 11 and 431 is omitted in order to make the illustrated contents easy to understand.

Next, the operation when the table 70 goes up and down will be described. For example, the elevating device 1 is installed so that the first rails 21A and 21B are parallel to the horizontal plane. When the inclination angle of the second rails 22A and 22B with respect to the horizontal plane is θ (rad), when the table 70 moves by a distance d with respect to the second base portion 40, the table moves by d × sin (θ) in the vertical direction. At the same time, it moves in the horizontal direction by d × cos (θ). At this time, by moving the second base portion 40 with respect to the first base portion 10 by d × cos (θ) in the direction opposite to the horizontal movement direction of the table 70, the table 70 is moved in the horizontal direction. It can be moved (elevated) in the vertical direction without changing its position.

Referring to FIG. 12, it moves the second base portion 40 in the direction of arrow L _1, for controlling the lifting device 1 so as to move the table 70 in the direction of arrow R _1. By doing so, the position of the table 70 in the Z-axis direction can be lowered. Referring to FIG. 13, it moves the second base portion 40 in the direction of arrow L _2, to control the lifting device 1 so as to move the table 70 in the direction of the arrow R _2. By doing so, the position of the table 70 in the Z-axis direction can be raised.

According to the elevating device 1 in the present embodiment, the table 70 can be elevated and lowered without installing a linear motion guide device for moving the table 70 along the vertical direction. Further, since the elevating device of the present disclosure does not use a ball screw as a drive source for traveling the first sliders 61A and 61B and the second sliders 62A and 62B, the elevating device 1 can be made compact. As described above, according to the elevating device 1 in the present embodiment, the elevating device 1 capable of achieving compactness is provided.

The lifting device 1 in the present embodiment can be applied to a machine tool, various assembly devices, a test device, a semiconductor manufacturing device, and the like. The elevating device 1 in the present embodiment can be applied to an elevating device that elevates and elevates a table 70 on which an object to be processed is placed in order to perform processing such as processing, assembling, or inspection. At this time, the side surface 72A of the second portion 72 of the table 70 serves as a mounting surface for the object to be processed.

In the above embodiment, the elevating device 1 includes a vine winding spring 81. One end of the spiral spring 81 is held by the first connecting portion 82, and the other end is held by the second connecting portion 83. The central axis of the spiral winding spring 81 is arranged along the direction of the arrow W. By adopting such a configuration, it is possible to prevent the table 70 from sliding down so as to approach the first base portion 10 when the supply of electric power to the elevating device 1 is stopped. Further, the tension of the spiral spring 81 applied to the table 70 makes it easy to move the table 70 away from the first base portion 10. In the above embodiment, the case where the spiral spring 81 is adopted as the elastic member has been described, but the present invention is not limited to this, and rubber having a shape extending along the direction of the arrow W may be adopted as the elastic member.

In the above embodiment, the elevating device 1 penetrates the first connecting portion 82 having the first through hole 82A extending in the direction of the arrow W and the first through hole 82A and is screwed into the second portion 72. A screw 84 for fixing the first connecting portion 82 to the second portion 72 is provided. By adopting such a configuration, the position where the first connecting portion 82 is fixed to the second portion 72 is adjusted along the direction of the arrow W, and the tension of the spiral spring 81 applied to the second portion 72 is applied. Can be adjusted.

In the above embodiment, the first rails 21A and 21B and the first stator module 31 are fixed on the first surface 10A of the first base portion 10, the first sliders 61A and 61B and the plurality of first magnets. The case where the 51 is fixed on the surface 41B of the first support portion 41 has been described, but the present invention is not limited to this, and the first rails 21A and 21B and the first stator module 31 are mounted on the surface 41B of the first support portion 41. It may be fixed and the first sliders 61A, 61B and the plurality of first magnets 51 may be fixed on the first surface 10A of the first base portion 10. Further, in the above embodiment, the second rails 22A and 22B and the second stator module 32 are fixed on the surface 43A of the third support portion 43, and the second sliders 62A and 62B and the plurality of second magnets 52 are tables. The case where the first portion 71 of the 70 is fixed on the surface 71B has been described, but the present invention is not limited to this, and the second rails 22A and 22B and the second stator module 32 are fixed on the surface 71B of the first portion 71. , The second sliders 62A, 62B and the plurality of second magnets 52 may be fixed on the surface 43A of the third support portion 43. Further, the material constituting the mold portions 312 and 322 is not limited to the epoxy resin, and a bulk molding compound (hereinafter referred to as BMC) can be adopted. BMC is a material obtained by mixing a reinforcing material, a filler and a curing agent with an unsaturated polyester resin and then injection molding.

In the above embodiment, the case where the table 70 is moved in the vertical direction without changing the position in the horizontal direction has been described, but the present invention is not limited to this, and only the second base portion 40 is moved along the first rails 21A and 21B. By moving the table 70, the table 70 can be moved along the Y-axis direction. Further, a second table different from the table 70 is arranged at intervals in the Z-axis direction, and a third rail arranged along the X-axis direction, a third slider capable of traveling on the third rail, and a third slider. By attaching a third stator module having a plurality of third coils arranged along the three rails and a plurality of third magnets facing the plurality of third coils, it is possible to move in the X-axis direction as well. It can be the lifting device 1.

It should be understood that the embodiments disclosed here are exemplary in all respects and are not restrictive in any way. The scope of the present invention is defined by the scope of claims, not the above description, and is intended to include all modifications within the meaning and scope equivalent to the scope of claims.

1 Lifting device, 10 1st base, 10A 1st surface, 11,431 sensor, 11a, 313,323,431a cord, 12,432 support band, 13,212,433,612,613,622,722 screws Holes, 14, 15, 434,436 end plates, 14A, 15A, 434A, 436A pads, 21A, 21B 1st rail, 22A, 22B 2nd rail, 31 1st stator module, 32 2nd stator module, 40 2nd base part, 41 1st support part, 41A, 41B, 43A, 71A, 71B surface, 42 2nd support part, 42A, 42B, 42C, 42D, 72A side surface, 43 3rd support part, 51 1st magnet, 52 2nd magnet, 61A, 61B 1st slider, 62A, 62B 2nd slider, 70 table, 71 1st part, 72 2nd part, 80 control unit, 81 vine winding spring, 82 1st connection part, 82A 1st Through hole, 82B, 83A Through hole, 83 Second connection, 84,85,141,151,121,212,315,325,422,435,437,611,621,721 Screws, 311 First coil, 312 , 322 Mold part, 314,324 protective sheet, 316,326 board, 321 second coil, 411,711 linear scale, 421 recess, 811 first engagement part, 812 second engagement part, 821 head, 822 connection part , 823,832 Bent part, 831 Plate-shaped part, L1, L2, R1, R2, W arrow, d distance.

Claims (4)

A first base portion having a flat first surface and
The first surface is arranged on a plane opposite to the second surface in a first direction perpendicular to the first surface and a planar second surface facing the first surface. A second base portion that includes a planar third surface that is inclined with respect to
A first rail fixed to the first surface or the second surface and extending linearly,
Of the first surface and the second surface, a first slider fixed to the surface on which the first rail is not fixed and capable of traveling on the first rail.
A first stator module having a plurality of first coils fixed to the first surface or the second surface and arranged side by side along the first rail.
Of the first surface and the second surface, the first stator module is fixed to the surface on which the first stator module is not fixed, faces the plurality of first coils, and the directions of the magnetic fields are alternately opposite to each other. Multiple first magnets arranged side by side and
A table including a planar fourth surface facing the third surface, and
The first in a projected image that is fixed to the third surface or the fourth surface, extends linearly so as to be inclined with respect to the first surface, and is projected onto a virtual plane perpendicular to the first direction. The second rail that extends parallel to the rail,
Of the third surface and the fourth surface, a second slider fixed to the surface on which the second rail is not fixed and capable of traveling on the second rail.
A second stator module having a plurality of second coils fixed to the third surface or the fourth surface and arranged side by side along the second rail.
Of the third surface and the fourth surface, the second stator module is fixed to the surface on which the second stator module is not fixed, faces the plurality of second coils, and the directions of the magnetic fields are alternately opposite to each other. An elevating device including a plurality of second magnets arranged side by side. It has a shape extending along the second rail and includes a first end portion fixed to the second base portion and a second end portion fixed to the table, with respect to the second base portion. The elevating device according to claim 1, further comprising an elastic member capable of restricting the relative movement of the table so as to approach the first base portion. The elastic member is a vine winding spring.
The elevating device according to claim 2, wherein the central axis of the spiral winding spring is arranged along the direction in which the second rail extends. A first connecting portion having a first through hole extending along the second rail and holding the first end portion of the elastic member, and a first connecting portion.
The elevating device according to claim 2 or 3, further comprising a screw that penetrates the first through hole and is screwed into the table to fix the first connection portion to the table.

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