JP2021008010A - Board cutting device - Google Patents
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Abstract
【課題】製造用基板の断裁後に、端材部を短時間でステージ上からステージの外側に排除できる基板断裁装置を提供する。【解決手段】基板をステージに固定し、前記基板を複数の個片製品と複数の端材部とに断裁し、断裁終了後に前記固定を解除し、前記複数の個片製品を取り出す基板断裁装置であって、前記ステージは、平面視で前記端材部と重なる領域の一部が傾斜面部を有し、前記固定の解除後に、前記端材部を、前記傾斜面部に沿って自然落下させる機能を有し、自然落下する前記端材部を収容する端材収容ユニットを備える基板断裁装置とする。【選択図】図1PROBLEM TO BE SOLVED: To provide a substrate cutting apparatus capable of removing scraps from a stage to the outside of a stage in a short time after cutting a manufacturing substrate. SOLUTION: A substrate cutting device is used to fix a substrate to a stage, cut the substrate into a plurality of individual products and a plurality of scraps, release the fixing after the cutting is completed, and take out the plurality of individual products. The stage has an inclined surface portion in a part of the region overlapping the end material portion in a plan view, and after the fixing is released, the end material portion is naturally dropped along the inclined surface portion. The substrate cutting device is provided with a scrap material accommodating unit for accommodating the scrap material portion that naturally falls. [Selection diagram] Fig. 1
Description
本発明は、個片化してプリント配線板等として使用される基板の断裁装置に関するものである。 The present invention relates to a substrate cutting device that is individually separated and used as a printed wiring board or the like.
プリント配線板などの製品は、製造時には複数の製品を面付け配置した製造用基板を断裁加工し個片化して製品化がなされる。製造用基板の四辺の端部は製品とならない端材部となる。このように製造用基板から製品となる個片の基板に断裁する装置として基板断裁装置が使われている(例えば特許文献1、2)。 At the time of manufacturing, products such as printed wiring boards are commercialized by cutting a manufacturing substrate on which a plurality of products are impositioned and arranging them into individual pieces. The four-sided ends of the manufacturing substrate are scraps that are not products. As described above, a substrate cutting device is used as a device for cutting a manufacturing substrate into individual substrates to be a product (for example, Patent Documents 1 and 2).
図7は、従来の一般的な基板断裁装置のステージ部分を例示する、(a)模式平面図、(b)模式断面図である。従来の基板断裁装置のステージ50では、製造用基板(不図示)の断裁時に、該製造用基板は、ずれないようにステージ50上に固定される。この固定方法としては、真空系を利用した吸着方式が一般的である。断裁が終了した後には、吸着用の空間(吸着路)は真空破壊され大気圧に戻される。 FIG. 7 is a schematic plan view (a) and a schematic cross-sectional view (b) illustrating a stage portion of a conventional general substrate cutting device. In the stage 50 of the conventional substrate cutting device, when the manufacturing substrate (not shown) is cut, the manufacturing substrate is fixed on the stage 50 so as not to shift. As this fixing method, an adsorption method using a vacuum system is generally used. After the cutting is completed, the space for adsorption (adsorption path) is evacuated and returned to atmospheric pressure.
前記のために、基板断裁装置のステージ50は、製造用基板の個片製品となる部分を吸着するための吸着孔53p、端材部となる部分を吸着するための吸着孔53t、及び断裁のためのブレード溝52を備えている。符号54vは個片製品部と端材部を同時に吸着または真空破壊するための、吸着孔53p及び吸着孔53tを連結する吸着路を示している。 For the above purpose, the stage 50 of the substrate cutting device has a suction hole 53p for sucking a portion of a manufacturing substrate as an individual product, a suction hole 53t for sucking a portion to be a scrap portion, and a cutting. A blade groove 52 for the purpose is provided. Reference numeral 54v indicates a suction path connecting the suction holes 53p and the suction holes 53t for simultaneously sucking or vacuum-breaking the individual product part and the scrap material part.
図8は、従来の基板断裁装置のステージ50上に製造用基板51を吸着した形態を例示する、(a)模式平面図、(b)模式断面図である。符号54v’は、吸着路54vが減圧状態で吸着時であることを意味している。 FIG. 8 is a schematic plan view (a) and a schematic cross-sectional view (b) illustrating a form in which a manufacturing substrate 51 is adsorbed on a stage 50 of a conventional substrate cutting device. Reference numeral 54v'means that the suction path 54v is in a reduced pressure state during suction.
図9は従来の基板断裁装置で製造用基板を断裁する様態を例示する、模式平面図である。ここで、符号51aは、断裁中の製造用基板を意味する。このように、製造用基板は、ブレードユニット61により、個片製品と端材部に断裁される。符号62bは、製造用基板の断裁された箇所を意味する。図10は、従来の基板断裁装置で断裁工程が終了した様態を例示する模式平面図である。符号51bは断裁後の製造用基板を意味している。 FIG. 9 is a schematic plan view illustrating a mode in which a manufacturing substrate is cut by a conventional substrate cutting device. Here, reference numeral 51a means a manufacturing substrate being cut. In this way, the manufacturing substrate is cut into individual products and scraps by the blade unit 61. Reference numeral 62b means a cut portion of the manufacturing substrate. FIG. 10 is a schematic plan view illustrating a mode in which the cutting process is completed by the conventional substrate cutting device. Reference numeral 51b means a manufacturing substrate after cutting.
図11は、従来の基板断裁装置で個片製品51pを取り出す工程を例示する、(a)模式平面図、(b)模式断面図である。断裁終了後は、吸着路54vは真空破壊され大気圧に戻されて吸着は解除され、断裁後の製造用基板51bから個片製品51pを、アームを備えるピックアップロボット58pにより取り出し、収容トレイ59pに収容する。符号51p’はピックアップ中の個片製品を意味している。 FIG. 11 is a schematic plan view (a) and a schematic cross-sectional view (b) illustrating a step of taking out an individual product 51p with a conventional substrate cutting device. After the cutting is completed, the suction path 54v is evacuated and returned to atmospheric pressure to release the suction, and the individual product 51p is taken out from the manufacturing substrate 51b after cutting by a pickup robot 58p equipped with an arm and placed in the storage tray 59p. Contain. Reference numeral 51p'means an individual product being picked up.
図12は、従来の基板断裁装置で端材部51tを取り出す工程を例示する、(a)模式平面図、(b)模式断面図である。このように、個片製品を取り出した後の製造用基板51cから端材部51tを、アームを備えるピックアップロボット58tにより取り出し、収容トレイ59tに収容する。符号51t’はピックアップ中の端材部を意味している。 FIG. 12 is a schematic plan view (a) and a schematic cross-sectional view (b) illustrating a step of taking out a scrap portion 51t with a conventional substrate cutting device. In this way, the scrap portion 51t is taken out from the manufacturing substrate 51c after the individual product is taken out by the pickup robot 58t provided with the arm, and is stored in the storage tray 59t. Reference numeral 51t'means a scrap portion during pickup.
端材部51tは、次に加工する製造用基板を載置する前にステージ50上から排除する必要がある。端材部51tを排除する方法として、断裁後に端材部51tを先に排除すると、端材部51tを取り除く際に個片製品に接触して個片製品のステージ50上の位置や向きが変わってしまい、その後のピックアップロボット58pでの搬送が困難となる。このため、個片製品のピックアップ作業を終えてから端材部51tを取り除く方が個片製品のピックアップを失敗なく進めることができる。 The scrap portion 51t needs to be removed from the stage 50 before the manufacturing substrate to be processed next is placed. As a method of eliminating the scrap portion 51t, if the scrap portion 51t is removed first after cutting, when the scrap portion 51t is removed, it comes into contact with the individual product and the position or orientation of the individual product on the stage 50 changes. Therefore, it becomes difficult to carry the pickup robot 58p thereafter. Therefore, it is better to remove the scrap portion 51t after finishing the pick-up work of the individual product so that the individual product can be picked up without failure.
しかしながら、上記の手順では、個片製品のピックアップに要する時間が長いため、端材部51tの除去は、ピックアップ作業が終わるまで待機する必要があり、特に人手で端材部51tを取り除こうとすると作業時間に比べて待ち時間がながくなり、作業効率が著しく悪いものであった。 However, in the above procedure, since it takes a long time to pick up the individual product, it is necessary to wait until the pick-up work is completed to remove the scrap portion 51t, and especially when trying to manually remove the scrap portion 51t. The waiting time was longer than the time, and the work efficiency was extremely poor.
また、不要物である端材部51tを取り除く作業専用の機構を断裁装置に設けるのは装置構成が複雑化する場合は、個片製品のピックアップするピックアップロボット58pで端材部51tを取り除く作業も行っていた。いずれにしても、製品ではない端材部51tの排除は効率の悪い作業となっていた。 In addition, if the cutting device is provided with a mechanism dedicated to the work of removing unnecessary scraps 51t, if the device configuration becomes complicated, the pick-up robot 58p that picks up individual products can also remove the scraps 51t. I was going. In any case, the removal of the scrap portion 51t, which is not a product, has been an inefficient operation.
本発明は、上記問題に鑑みなされたものであり、製造用基板の断裁後に、端材部を短時間でステージ上からステージの外側に排除できる基板断裁装置を提供することを目的とする。 The present invention has been made in view of the above problems, and an object of the present invention is to provide a substrate cutting apparatus capable of removing scraps from the stage to the outside of the stage in a short time after cutting the manufacturing substrate.
上記の課題を解決する手段として、本発明の請求項1に記載の発明は、基板をステージに固定し、前記基板を複数の個片製品と複数の端材部とに断裁し、
断裁終了後に前記固定を解除し、前記複数の個片製品を取り出す基板断裁装置であって、前記ステージは、平面視で前記端材部と重なる領域の一部が傾斜面部を有し、
前記固定の解除後に、前記端材部を、前記傾斜面部に沿って自然落下させる機能を有し、自然落下する前記端材部を収容する端材収容ユニットを備える、ことを特徴とする基板断裁装置としたものである。
As a means for solving the above problems, in the invention according to claim 1 of the present invention, a substrate is fixed to a stage, and the substrate is cut into a plurality of individual products and a plurality of scraps.
A substrate cutting device for releasing the fixing and taking out the plurality of individual products after the cutting is completed. The stage has an inclined surface portion in a part of a region overlapping the end material portion in a plan view.
Substrate cutting characterized by having a function of allowing the end material portion to fall naturally along the inclined surface portion after releasing the fixing, and providing an end material accommodating unit for accommodating the end material portion that naturally falls. It is a device.
請求項2に記載の発明は、前記固定は、前記基板と前記ステージとが構成する空間の減圧による吸着により、
前記固定の解除は、前記空間が大気圧に戻ることによる、ことを特徴とする請求項1に記載の基板断裁装置としたものである。
According to the second aspect of the present invention, the fixing is performed by adsorption by decompression of the space formed by the substrate and the stage.
The substrate cutting device according to claim 1, wherein the fixing is released by returning the space to atmospheric pressure.
請求項3に記載の発明は、前記固定及び固定の解除は、前記基板の前記個片製品となる領域と、前記基板の前記端材部となる領域とで、個別に行うことができる、ことを特徴とする請求項2に記載の基板断裁装置としたものである。 According to the third aspect of the present invention, the fixing and the release of the fixing can be performed individually in the region of the substrate to be the individual product and the region of the substrate to be the end material. The substrate cutting apparatus according to claim 2, wherein the substrate is cut.
請求項4に記載の発明は、前記基板の前記端材部となる領域を固定、及び固定を解除するために、前記端材部となる領域へ着脱することができるクランプを備える、ことを特徴とする請求項1に記載の基板断裁装置としたものである。 The invention according to claim 4 is characterized by comprising a clamp that can be attached to and detached from the region to be the end material portion in order to fix and release the region to be the end material portion of the substrate. This is the substrate cutting device according to claim 1.
本発明によれば、製造用基板の断裁後に、端材部をステージ上からステージの外側に排除可能とする基板断裁装置を提供することができる。端材部の排出は、基板を固定するための吸着機構を真空破壊するだけでできるため、特別の払い出し機構を設ける必要がなく、装置仕様の簡素化ができるという効果がある。また、払い出しに要する時間が短いため、作業効率を向上することができる。 According to the present invention, it is possible to provide a substrate cutting apparatus capable of removing scraps from the stage to the outside of the stage after cutting the manufacturing substrate. Since the scraps can be discharged only by vacuum-breaking the suction mechanism for fixing the substrate, there is no need to provide a special dispensing mechanism, and there is an effect that the device specifications can be simplified. In addition, since the time required for payout is short, work efficiency can be improved.
以下、本発明の実施形態に係る基板断裁装置について図面を用いて説明する。同一の構成要素については便宜上の理由がない限り同一または類似の符号を付ける。各図面において、見易さのため構成要素の厚さや比率は誇張されていることがあり、構成要素の数も減らして図示していることがある。また、本発明は以下の実施形態そのままに限定されるものではなく、主旨を逸脱しない限りにおいて、適宜の組み合わせ、変形によって具体化できる。 Hereinafter, the substrate cutting apparatus according to the embodiment of the present invention will be described with reference to the drawings. The same components are labeled the same or similar unless there is a reason for convenience. In each drawing, the thickness and ratio of the components may be exaggerated for ease of viewing, and the number of components may be reduced. Further, the present invention is not limited to the following embodiments as they are, and can be embodied by appropriate combinations and modifications as long as the gist is not deviated.
図1は、本発明の第1実施形態の基板断裁装置の構成を示す、(a)模式平面図、(b)模式断面図である。第1実施形態の基板断裁装置100は、ステージ10と端材収容ユニット16からなる。ステージ10には従来の基板断裁装置と同様に、製造用基板の個片製品となる部分を吸着するための吸着孔13p、端材部となる部分を吸着するための吸着孔13t、及び断裁のためのブレード溝12を備えている。断面図の符号14vは個片製品部と端材部を同時に吸着または真空破壊するための、吸着孔13p及び吸着孔13tと連結する吸着路を示している。 FIG. 1 is a schematic plan view (a) and a schematic cross-sectional view (b) showing a configuration of a substrate cutting device according to a first embodiment of the present invention. The substrate cutting device 100 of the first embodiment includes a stage 10 and a scrap material accommodating unit 16. Similar to the conventional substrate cutting device, the stage 10 has an adsorption hole 13p for adsorbing a portion of a manufacturing substrate as an individual product, an adsorption hole 13t for adsorbing a portion of a scrap material, and a cutting device. A blade groove 12 for the purpose is provided. Reference numeral 14v in the cross-sectional view indicates a suction path connected to the suction hole 13p and the suction hole 13t for simultaneously sucking or vacuum-breaking the individual product part and the scrap part.
前記に加えて、第1実施形態の基板断裁装置100は、ステージ10の外周部に傾斜面部10sを有しており、傾斜面部10sは図4で後述するように、平面視でその一部が、製造用基板(図1では不図示)の端材部と重なるように形成されている。 In addition to the above, the substrate cutting device 100 of the first embodiment has an inclined surface portion 10s on the outer peripheral portion of the stage 10, and the inclined surface portion 10s is partially formed in a plan view as described later in FIG. , It is formed so as to overlap with the end material portion of the manufacturing substrate (not shown in FIG. 1).
第1実施形態の基板断裁装置100は、傾斜面部10sを有することにより、図4で詳述するように、製造用基板の端材部の固定の解除後に、端材部を、傾斜面部10sに沿って自然落下させる機能を有している。 Since the substrate cutting device 100 of the first embodiment has the inclined surface portion 10s, as described in detail in FIG. 4, after the fixing of the end material portion of the manufacturing substrate is released, the end material portion is turned into the inclined surface portion 10s. It has a function to let it fall naturally along.
第1実施形態の基板断裁装置100は、前記の自然落下する端材部を収容するための端材収容ユニット16を備えている。端材収容ユニット16の外形は、端材収容ユニット外壁16aと端材収容ユニット内壁16bとからなるが、端材部は固定の解除後に製造用基板の四辺から一斉に落下するため、端材収容ユニット16は、平面視で端材収容ユニット外壁16aと端材収容ユニット内壁16bとの間に製造用基板外周部の四辺を含むように、枠状に形成されている。尚、図示しないが、ステージ10や端材収容ユニット16は定盤や支持棒等によって支持されている。 The substrate cutting device 100 of the first embodiment includes a scrap material accommodating unit 16 for accommodating the naturally falling end material portion. The outer shape of the scrap material accommodating unit 16 is composed of an outer wall 16a of the end material accommodating unit and an inner wall 16b of the end material accommodating unit. The unit 16 is formed in a frame shape so as to include four sides of the outer peripheral portion of the manufacturing substrate between the outer wall 16a of the end material accommodating unit and the inner wall 16b of the end material accommodating unit in a plan view. Although not shown, the stage 10 and the scrap material accommodating unit 16 are supported by a surface plate, a support rod, or the like.
図2は、本発明の第1実施形態の基板断裁装置の変形例の構成を示す、模式断面図である。図1の第1実施形態の基板断裁装置100では、吸着路は個片製品部と端材部を同時に吸着または真空破壊するための吸着路14vとなっていたが、第1実施形態の基板断裁装置の変形例100’では隔壁15によって個片製品部の吸着路14v1と、端材部の吸着路14v2とに分離され、従って吸着孔13pと吸着孔13tとは連結していない。 FIG. 2 is a schematic cross-sectional view showing a configuration of a modified example of the substrate cutting device according to the first embodiment of the present invention. In the substrate cutting device 100 of the first embodiment of FIG. 1, the suction path is a suction path 14v for simultaneously adsorbing or vacuum-breaking the individual product part and the end material part, but the substrate cutting of the first embodiment. In the modified example 100'of the device, the suction path 14v1 of the individual product part and the suction path 14v2 of the scrap part are separated by the partition wall 15, and therefore the suction hole 13p and the suction hole 13t are not connected.
図2の第1実施形態の基板断裁装置の変形例100’の構成により、固定及び固定の解除は、製造用基板の個片製品となる領域と、製造用基板の端材部となる領域とで、個別に行うことができるようになり、それらの領域の固定及び固定の解除を、加工条件に適するように、どちらの領域を先に行うことも可能になる。 According to the configuration of the modification 100'of the substrate cutting device of the first embodiment of FIG. 2, the fixation and the release of the fixation are divided into a region to be an individual product of the manufacturing substrate and a region to be a scrap portion of the manufacturing substrate. Then, it becomes possible to perform the fixing and releasing of those regions individually, and it is possible to perform either region first so as to suit the processing conditions.
例えば、基板分割終了後、個片製品部の吸着解除→個片製品のピックアップ→端材部の吸着解除の順番で行うとすると、個片製品のピックアップの際に隣接した個片製品に仮に接触しても、端材部がまだ吸着されているため、隣接した個片製品が移動しにくくなる、という利点がある。 For example, if the process is performed in the order of de-adsorption of the individual product part → pick-up of the individual product → de-adsorption of the scrap material after the substrate division is completed, the adjacent individual product is temporarily contacted when the individual product is picked up. Even so, there is an advantage that the adjacent individual products are difficult to move because the scraps are still adsorbed.
図3は、本発明の第2実施形態の基板断裁装置の構成を示す、(a)模式平面図、(b)模式断面図である。第2実施形態の基板断裁装置200が図1の第1実施形態の基板断裁装置100と異なる点は、製造用基板の端材部となる部分を吸着するための吸着孔13tを有しておらず、その代わりにクランプバー27を備えていることのみである。クランプバー27が上下動して端材部に着脱することにより、端材部の固定及び固定の解除を行う。 FIG. 3 is a schematic plan view (a) and a schematic cross-sectional view (b) showing the configuration of the substrate cutting apparatus according to the second embodiment of the present invention. The difference between the substrate cutting device 200 of the second embodiment and the substrate cutting device 100 of the first embodiment of FIG. 1 is that it has a suction hole 13t for sucking a portion of a manufacturing substrate which is a scrap portion. Instead, it only has a clamp bar 27. The clamp bar 27 moves up and down to attach and detach to and from the end material portion, thereby fixing and releasing the end material portion.
吸着孔13tの代わりにクランプバー27を備えることにより、吸着孔を作れないほど端材部の幅が小さい製造用基板であっても、クランプバー27を着脱することで、端材部をステージ上に固定、またはステージの外側に排出することができるようになる。尚、図示しないが、クランプバー27は可動式のアームや支持棒等によって支持し、動きを制御することができる。 By providing the clamp bar 27 instead of the suction hole 13t, even if the width of the end material portion is too small to form a suction hole, the end material portion can be placed on the stage by attaching and detaching the clamp bar 27. Can be fixed to or discharged to the outside of the stage. Although not shown, the clamp bar 27 can be supported by a movable arm, a support rod, or the like to control its movement.
図4は、本発明の第1実施形態の基板断裁装置100を用いて、基板を断裁し、端材部及び個片製品を取り出すプロセスを工程順に示す、模式断面図である。尚、図4(c)以外では、端材収容ユニット16の図示を省略している。 FIG. 4 is a schematic cross-sectional view showing a process of cutting a substrate using the substrate cutting device 100 of the first embodiment of the present invention and taking out scraps and individual products in order of steps. In addition, except for FIG. 4C, the scrap material accommodating unit 16 is not shown.
製造用基板11は、第1実施形態の基板断裁装置100ステージ10に載置され、吸着路が減圧され14v’となることで、吸着路14v’と連結した吸着孔13p、13tを通して製造用基板11はステージ10に固定される(図4(a))。 The manufacturing substrate 11 is placed on the substrate cutting device 100 stage 10 of the first embodiment, and the suction path is depressurized to 14v', so that the manufacturing substrate 11 passes through the suction holes 13p and 13t connected to the suction path 14v'. 11 is fixed to the stage 10 (FIG. 4 (a)).
次に、ブレード溝12に沿ってブレードユニット(ここでは不図示)によって製造用基板11は断裁され、図4(b)に示す、個片製品11p、端材部11tの形態となる。 Next, the manufacturing substrate 11 is cut along the blade groove 12 by a blade unit (not shown here) to form the individual product 11p and the end material portion 11t shown in FIG. 4B.
次に、吸着路が真空破壊され大気圧に戻り14vとなることで、個片製品11p、端材
部11tの固定は解除される。これにより、端材部はステージ10の外側へ重力により自然落下し、端材収容ユニット16に収容される(図4(c))。
Next, the suction path is evacuated and returned to atmospheric pressure to become 14v, so that the individual product 11p and the end material portion 11t are not fixed. As a result, the scrap portion naturally falls to the outside of the stage 10 due to gravity and is accommodated in the scrap accommodating unit 16 (FIG. 4 (c)).
前記の際、端材部がステージ10の外側へ確実に落下するように、図4(a)に示すように、製造用基板11の端材部11tとなる部分は、その重心がステージ10の傾斜面部の始点よりも外側へ来るように、傾斜面部の始点から端材部11tの端からまでの長さls1が、端材部11tのもう一方の端までの長さlvよりも長くなるように、製造用基板11をステージ10に載置、固定しておく。 At the time of the above, as shown in FIG. 4A, the center of gravity of the portion of the manufacturing substrate 11 to be the end material portion 11t is the center of gravity of the stage 10 so that the end material portion surely falls to the outside of the stage 10. The length ls1 from the start point of the inclined surface portion to the end of the end material portion 11t is longer than the length lv to the other end of the end material portion 11t so as to come outside the start point of the inclined surface portion. The manufacturing substrate 11 is placed and fixed on the stage 10.
最後に図4(d)に示すように、固定解除されている個片製品11p’を従来と同じ方法でピックアップし取り出すことができる。 Finally, as shown in FIG. 4 (d), the defixed individual product 11p'can be picked up and taken out in the same manner as before.
図5は、本発明の第2実施形態の基板断裁装置200を用いて、基板を断裁し、個片製品及び端材部を取り出すプロセスを工程順に示す、模式断面図である。尚、図5(d)以外では、端材収容ユニット26の図示を省略している。 FIG. 5 is a schematic cross-sectional view showing a process of cutting a substrate using the substrate cutting device 200 of the second embodiment of the present invention and taking out individual products and scraps in order of process. In addition, except for FIG. 5D, the illustration of the scrap material accommodating unit 26 is omitted.
第2実施形態の基板断裁装置200では、個片製品21pの固定と解除は第1実施形態の基板断裁装置100と同様に真空系で行うが、端材部21tの固定と解除は、クランプバー27により行う。符号27’はクランプバーが製造用基板21を押さえ固定している状態を示している。 In the substrate cutting device 200 of the second embodiment, the individual product 21p is fixed and released in the same vacuum system as in the substrate cutting device 100 of the first embodiment, but the scrap bar 21t is fixed and released by the clamp bar. 27. Reference numeral 27'indicates a state in which the clamp bar holds and fixes the manufacturing substrate 21.
第2実施形態の基板断裁装置200においても、図2の第1実施形態の基板断裁装置の変形例100’と同様に、固定及び固定の解除は、個片製品となる領域と、端材部となる領域とで、個別に行うことができるので、それらの領域の固定及び固定の解除を、どちらの領域を先に行ってもよい。図5の例では個片製品となる領域の固定の解除を先に行い、個片製品21p’を従来と同じ方法でピックアップし取り出している(図5(c))。 Also in the substrate cutting device 200 of the second embodiment, as in the modification 100'of the substrate cutting device of the first embodiment of FIG. 2, the fixing and the release of the fixing are performed on the area to be an individual product and the scrap portion. Since the regions can be individually fixed and released, either region may be fixed first. In the example of FIG. 5, the region to be the individual product is first released, and the individual product 21p'is picked up and taken out by the same method as before (FIG. 5 (c)).
図5の例では端材部となる領域の固定の解除を最後に行い、端材部21tをステージ20の外側へ重力により自然落下させ、端材収容ユニット26に収容している(図5(d))。 In the example of FIG. 5, the region to be the end material portion is finally released, and the end material portion 21t is naturally dropped to the outside of the stage 20 by gravity and accommodated in the end material accommodating unit 26 (FIG. 5 (FIG. 5). d)).
前記の際、端材部がステージ20の外側へ確実に落下するように、図5(a)に示すように、製造用基板21の端材部21tとなる部分は、その重心がステージ20の傾斜面部の始点よりも外側へ来るように、傾斜面部の始点から端材部21tの端からまでの長さls2が、端材部21tのもう一方の端までの長さlcよりも長くなるように、製造用基板21をステージ20に載置、固定しておく。 At the time of the above, as shown in FIG. 5A, the center of gravity of the portion of the manufacturing substrate 21 that becomes the end material portion 21t is the center of the stage 20 so that the end material portion surely falls to the outside of the stage 20. The length ls2 from the start point of the inclined surface portion to the end of the end material portion 21t is longer than the length lc of the other end of the end material portion 21t so as to come outside the start point of the inclined surface portion. The manufacturing substrate 21 is placed and fixed on the stage 20.
尚、本発明の基板断裁装置を用いて製造用基板を断裁するが、端材部については、個片製品と同じような個片化は必ずしも必要ではない。図6は、第1実施形態の基板断裁装置を用いて基板を断裁する箇所を例示する模式平面図であり、符号12がステージ10のブレード溝を示すが、製造用基板11を断裁する箇所は白抜きの符号12bで示す箇所であれば十分である。このように断裁すれば、端材部は4片で済み、より簡潔な製造工程となる。第2実施形態の基板断裁装置を用いる場合も同じである。 Although the manufacturing substrate is cut using the substrate cutting apparatus of the present invention, it is not always necessary to cut the scraps in the same manner as the individual products. FIG. 6 is a schematic plan view illustrating a portion where the substrate is cut using the substrate cutting apparatus of the first embodiment, in which reference numeral 12 indicates a blade groove of the stage 10, but a portion where the manufacturing substrate 11 is cut is shown. The part indicated by the white reference numeral 12b is sufficient. If it is cut in this way, only four pieces of scraps are required, which makes the manufacturing process simpler. The same applies when the substrate cutting device of the second embodiment is used.
以上説明したように、本発明の断裁装置では、ステージの、平面視で製造用基板の端材部と重なる領域の一部が傾斜面部を有し、固定の解除後に、端材部を傾斜面部に沿って自然落下させる機能を有するので、端材部を短時間でステージ上からステージの外側に排除することができ、作業効率が向上するとともに、ステージの内側に端材部に付着した切りカスが落ちることはない。また、固定のための真空吸着部を作れないほど端材部の幅が小さい場合であっても、クランプバーを着脱することで、同様の効果を得ることができる。 As described above, in the cutting apparatus of the present invention, a part of the stage, which overlaps with the end material portion of the manufacturing substrate in a plan view, has an inclined surface portion, and after the fixing is released, the end material portion is formed into the inclined surface portion. Since it has a function of spontaneously dropping along the stage, the scraps can be removed from the stage to the outside of the stage in a short time, improving work efficiency and cutting scraps adhering to the scraps inside the stage. Will not fall. Further, even when the width of the end material portion is too small to form a vacuum suction portion for fixing, the same effect can be obtained by attaching and detaching the clamp bar.
11、21、51・・・製造用基板
51a・・・・・・・断裁中の基板
51b・・・・・・・断裁後の基板
51c・・・・・・・個片製品取り出し後の基板
11p、21p、51p・・・個片製品
11p’、21p’、51p’・・・ピックアップ中の個片製品
11t、21t、51t・・・端材部
11t’、21t’・・・落下中の端材部
51t’・・・・・・・・・・・・ピックアップ中の端材部
100・・・・・・・・本発明の第1実施形態の基板断裁装置
100’・・・・・・・本発明の第1実施形態の基板断裁装置の変形例
200・・・・・・・・本発明の第2実施形態の基板断裁装置
10、10’、20・・本発明の基板断裁装置のステージ
50・・・・・・・・・従来の基板断裁装置のステージ
10s、20s・・・・傾斜面部(スロープ部)
12、22、52・・・ブレード溝
12b・・・・・・・・断裁箇所
13p、23p、53p・・・吸着孔(個片製品部)
13p’、23p’・・・個片製品
13t、23t、53t・・・吸着孔(端材部)
14v、24v、54v・・・吸着路(個片製品部・端材部共通、非吸着時)
14v’、24v’、54v’・・・吸着路(吸着時)
14v1・・・・・・吸着路(個片製品部)
14v2・・・・・・吸着路(端材部)
15・・・・・・・・吸着路隔壁
16、26・・・・・端材収容ユニット
16a、26a・・・端材収容ユニット外壁
16b、26b・・・端材収容ユニット内壁
27・・・・・・・・クランプバー(非クランプ時)
27’・・・・・・・・クランプバー(クランプ時)
58p・・・・・・・ピックアップロボット(個片製品用)
58t・・・・・・・ピックアップロボット(端材部用)
59p・・・・・・・収容トレイ(個片製品用)
59t・・・・・・・収容トレイ(端材部用)
61・・・・・・・・ブレードユニット
62b・・・・・・・断裁箇所
P・・・・・・・・・個片製品領域
T・・・・・・・・・端材部領域
11, 21, 51 ... Manufacturing substrate 51a ..... Substrate under cutting 51b ..... Substrate after cutting 51c ..... Substrates after taking out individual products. 11p, 21p, 51p ... Individual pieces 11p', 21p', 51p' ... Individual pieces being picked up 11t, 21t, 51t ... Scraps 11t', 21t' ... Falling Scraps 51t'・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ Scraps 100 during pickup ・ ・ ・ ・ ・ ・ ・ ・ Board cutting device 100 ′ of the first embodiment of the present invention. .. Modification 200 of the substrate cutting device of the first embodiment of the present invention ..... The substrate cutting device of the second embodiment of the present invention 10, 10', 20 ..... The substrate cutting device of the present invention. Stage 50 ・ ・ ・ ・ ・ ・ ・ ・ ・ Stages 10s, 20s of the conventional board cutting device ・ ・ ・ ・ Inclined surface (slope)
12, 22, 52 ... Blade groove 12b ..... Cut points 13p, 23p, 53p ... Suction holes (individual product part)
13p', 23p' ... Individual products 13t, 23t, 53t ... Suction holes (mill ends)
14v, 24v, 54v ... adsorption path (common to individual product parts and scraps, non-adsorption)
14v', 24v', 54v' ... adsorption path (at the time of adsorption)
14v1 ・ ・ ・ ・ ・ ・ Adsorption path (individual product part)
14v2 ・ ・ ・ ・ ・ ・ Adsorption path (mill ends)
15 ..... Adsorption path partition wall 16, 26 ..... Scrap material storage unit 16a, 26a ... Scrap material storage unit outer wall 16b, 26b ... Scrap material storage unit inner wall 27 ...・ ・ ・ ・ ・ Clamp bar (when not clamped)
27'・ ・ ・ ・ ・ ・ ・ ・ Clamp bar (when clamped)
58p ・ ・ ・ ・ ・ ・ ・ ・ ・ Pickup robot (for individual products)
58t ... Pickup robot (for scraps)
59p ・ ・ ・ ・ ・ ・ ・ ・ ・ Storage tray (for individual products)
59t ・ ・ ・ ・ ・ ・ ・ ・ ・ Storage tray (for scraps)
61 ・ ・ ・ ・ ・ ・ ・ ・ Blade unit 62b ・ ・ ・ ・ ・ ・ ・ Cut location P ・ ・ ・ ・ ・ ・ ・ ・ ・ Individual product area T ・ ・ ・ ・ ・ ・ ・ ・ ・ Scrap area
Claims (4)
断裁終了後に前記固定を解除し、前記複数の個片製品を取り出す基板断裁装置であって、前記ステージは、平面視で前記端材部と重なる領域の一部が傾斜面部を有し、
前記固定の解除後に、前記端材部を、前記傾斜面部に沿って自然落下させる機能を有し、自然落下する前記端材部を収容する端材収容ユニットを備える、
ことを特徴とする基板断裁装置。 The substrate is fixed to the stage, and the substrate is cut into a plurality of individual products and a plurality of scraps.
A substrate cutting device for releasing the fixing and taking out the plurality of individual products after the cutting is completed. The stage has an inclined surface portion in a part of a region overlapping the end material portion in a plan view.
After the fixing is released, the end material portion has a function of spontaneously dropping along the inclined surface portion, and includes an end material accommodating unit for accommodating the end material portion that naturally falls.
A board cutting device characterized by this.
前記固定の解除は、前記空間が大気圧に戻ることによる、
ことを特徴とする請求項1に記載の基板断裁装置。 The fixing is performed by adsorption by decompression of the space formed by the substrate and the stage.
The release of the fixation is due to the return of the space to atmospheric pressure.
The substrate cutting apparatus according to claim 1.
ことを特徴とする請求項2に記載の基板断裁装置。 The fixing and the release of the fixing can be performed individually in the region of the substrate to be the individual product and the region of the substrate to be the end material.
The substrate cutting apparatus according to claim 2.
ことを特徴とする請求項1に記載の基板断裁装置。 A clamp that can be attached to and detached from the area to be the end material is provided in order to fix and release the area to be the end material of the substrate.
The substrate cutting apparatus according to claim 1.
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