JP2020036004A - Electrostatic chuck, bonding apparatus including the same, and bonding method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily support an object to be processed having a curved edge portion, and to prevent poor support from occurring in a curved surface region of the object to be processed when supporting an object to be processed having a curved edge portion. To do so. An electrostatic chuck 2000 that supports an object to be processed S1 including a flat surface portion FA and a curved surface portion CA extending outward from an edge portion of the flat surface portion is a flat surface portion FA of the object to be processed S1. It is provided with an electrostatic film 2200 arranged so as to correspond to the rear side of the object to be processed, and a movable support block 2400 located to correspond to the rear surface of the curved surface portion CA of the object to be processed S1. According to the present invention, it is possible to reduce the occurrence of a gap or a tightening margin between the electrostatic chuck 2200 and the object to be processed S1, and the objects to be processed are damaged and the objects to be processed are not aligned properly. It can be suppressed and prevented. [Selection diagram] FIG. 7

Description

  The present invention relates to an electrostatic chuck, a bonding apparatus including the same, and a bonding method. More specifically, the present invention relates to an electrostatic chuck that easily supports an object to be processed having a curved edge, a bonding apparatus including the same, and a bonding apparatus including the same. Regarding the matching method.

  As the flat panel display device, a liquid crystal display device (Liquid Crystal Display device: LCD), a plasma display device (Plasma Display Panel device: PDP), a field emission display device (Field Emission Display device: FED), and an electroluminescent display device. Display devices (ELD), organic light emitting diodes (OLED), and the like. These flat panel display devices exhibit excellent performance of thinning, lightening, and low power consumption. CRT (Cathode Ray Tube: CRT) It has replaced the rapidly.

  Recently, a curved display device in which a panel is attached to a window having a curved surface has been actively developed.

  Among curved surface display devices, efforts are being made on a curved edge display device capable of realizing an image on both a flat surface portion and a curved surface portion.

  In such a curved display device, as shown in FIG. 1, a flexible panel is attached to an inner surface of a window having a curved or curved edge instead of a flat panel edge. It is manufactured by

  A bonding apparatus that bonds a window and a panel includes an electrostatic chuck that supports a window having a curved edge. The electrostatic chuck includes a body having an empty space conforming to the shape of a window having a curved edge, and an electrostatic film adhered to an inner surface of the body defining the empty space. As described above, the electrostatic film is attached to the inner wall surface that defines the empty space of the body, so that the electrostatic film has a shape corresponding to the window.

  On the other hand, the concave portion of the electrostatic chuck is manufactured based on a design value of a window having a curved edge portion, and the design value includes a total area of the window, a curvature of the curved surface portion, and the like. The window is usually manufactured by a heat treatment molding method.

  However, at present, it is difficult to manufacture a window in the same size or shape as a design value.

  When a window having a size or shape different from the design value is supported by the electrostatic chuck, a gap may be formed between the electrostatic chuck and the window, or a local interference region of the window may be pinched by the electrostatic chuck. May occur. Such a gap or interference occurs frequently especially at the position of the curved surface portion of the window.

  The gap or interference between the electrostatic chuck and the window may cause damage to the window or poor alignment between the window and the panel in the step of attaching the panel to the window.

Korean registered patent KR1619783

  The present invention provides an electrostatic chuck that easily supports an object to be processed having a curved edge, a bonding apparatus including the electrostatic chuck, and a bonding method.

  The present invention relates to an electrostatic chuck capable of suppressing occurrence of poor support in a curved surface region of a workpiece when supporting the workpiece having a curved edge, a bonding apparatus including the electrostatic chuck, and a bonding apparatus. Provides a matching method.

  The present invention is an electrostatic chuck for supporting an object to be processed having a flat surface portion and a curved surface portion extending outward from an edge of the flat surface portion. And a movable support block located behind the curved surface of the workpiece.

  In addition, the electrostatic chuck includes a body having a concave portion in which an object to be processed is accommodated, and an electrostatic film and a support block are disposed on an inner wall of the body that defines the concave portion.

  Further, the support surface of the support block facing the curved surface of the object to be processed has a shape having a curvature corresponding to the curved surface.

  Furthermore, the electrostatic chuck includes a first cushion portion located at the rear of the electrostatic film and having an elastic force capable of expanding and contracting.

  Furthermore, the support block is movable rearward by an external force applied from the workpiece.

  Furthermore, the electrostatic chuck includes a second cushion portion that is located behind the support block and has an elastic force that can expand and contract.

  Furthermore, the second cushion portion includes a first cushion member located outside the support block in the width direction and a second cushion member located above the support block.

  Furthermore, the electrostatic chuck has a suction unit having an adhesive member that can be disposed on the support surface of the support block, and a suction tube that can be disposed inside the support block so that a vacuum suction force is generated on the support surface of the support block. At least one of the following.

  Furthermore, the electrostatic chuck is located behind the support block, and is provided with an inflatable member which is inflatable by a supplied fluid and which can be contracted by discharging the fluid. Is movable forward where is located.

  Still further, the electrostatic chuck includes a return member disposed to connect the support block and the body, and having a return force for returning the support block to a state before moving by the expansion of the expansion member.

  Furthermore, the expansion member includes a first expansion member located outside the support block in the width direction and a second expansion member located above the support block.

  Furthermore, the return member extends in the width direction of the support block, and extends in the height direction of the support block, and the first return member that connects the support block and the body. And a second return member for connecting.

  Further, according to the present invention, a second object to be processed is attached to a first object to be processed which has a flat surface portion and a curved surface portion extending outward from an edge portion of the flat surface portion and having a shape having a curvature. A bonding apparatus for attaching, a chamber having an internal space, an electrostatic chuck that can be moved up and down inside the chamber and can support a first object to be processed on one surface, and an inside of the chamber. And a tray that is hollow and can be positioned between the electrostatic chuck and the pressing portion, and that clamps and supports the second workpiece. The chuck is divided into a region corresponding to the plane portion of the first workpiece and a region corresponding to the curved surface portion, and the region corresponding to the curved surface portion is movable.

  Further, the electrostatic chuck is disposed so as to be located behind the flat portion of the first workpiece, and the electrostatic chuck is located behind the curved surface of the first workpiece. And a movable support block that is located.

  Further, the support surface of the support block facing the curved surface of the first workpiece has a shape having a curvature corresponding to the curved surface.

  Furthermore, the bonding device includes a first cushion portion that is located behind the electrostatic film and has an elastic force that can expand and contract.

  Furthermore, the bonding device includes a second cushion portion that is located behind the support block and has an elastic force that can expand and contract, and the support block is applied from the first workpiece by the second cushion portion. It is movable backward by external force.

  Furthermore, the bonding device includes a suction unit having an adhesive member that can be disposed on the support surface of the support block, and a suction pipe that can be disposed inside the support block so that a vacuum suction force is generated on the support surface of the support block. At least one of the following.

  Furthermore, the electrostatic chuck is located at the rear of the support block, is expandable by a supplied fluid, and is arranged to be connected to the support block with an inflatable member that can be contracted by discharging the fluid. A return member having a return force for returning the support block to a state before moving by the expansion of the expansion member, wherein the support block is movable forward in which the first workpiece is located by expansion of the expansion member, It is movable backward by the contraction of the expansion member and the return force of the return member.

  Further, according to the present invention, a second object to be processed is attached to a first object to be processed having a flat surface portion and a curved surface portion extending outward from an edge portion of the flat surface portion and having a shape having a curvature. Attaching a first workpiece to an electrostatic chuck, supporting a second workpiece on a hollow tray opposed to the electrostatic chuck, and attaching the first workpiece to the electrostatic chuck. Moving the electrostatic chuck and the tray so that the object and the second object are brought closer to each other, and attaching the second object to the first object. The step of supporting the object on the electrostatic chuck includes a step of moving a support block corresponding to the curved surface of the first workpiece in the electrostatic chuck.

  In the process of supporting the first object to be processed on the electrostatic chuck, the flat part of the first object is opposed to the electrostatic film of the electrostatic chuck, and the curved part is formed from the edge of the electrostatic film. A process of arranging the support surface extending outward and facing the curved surface portion so as to face a support block having a shape corresponding to the curved surface portion, and moving the first workpiece toward the electrostatic chuck. Contacting the first workpiece and the electrostatic chuck with each other, and moving the support block to move the support block backward by an external force applied from the first workpiece to the electrostatic chuck. Moving.

  Further, in the process of supporting the first object to be processed by the electrostatic chuck, the flat portion of the first object to be processed faces the electrostatic film of the electrostatic chuck, and the curved surface portion extends from the edge of the electrostatic film. A process of arranging the support surface extending outward and facing the curved surface portion so as to face a support block having a curved shape corresponding to the curved surface portion, and moving the first workpiece toward the electrostatic chuck. And contacting the first workpiece and the electrostatic chuck with each other, and moving the support block toward the curved surface of the first workpiece when moving the support block. The support surface of the support block is brought into contact with the curved surface of the first workpiece.

  Furthermore, when the support block is moved, the support block is moved toward the curved surface of the first workpiece, and the support surface of the support block is brought into contact with the curved surface of the first workpiece.

  Furthermore, when the support block moves rearward due to an external force applied from the first workpiece to the electrostatic chuck, the support block moves due to shrinkage of a cushion portion located behind the support block.

  Furthermore, when the support block is moved toward the curved surface of the first workpiece, a fluid is supplied to the expansion member located behind the support block, and the support block is moved by the expansion of the expansion member. .

  Furthermore, the support block moves in at least one of the width direction and the vertical direction of the support block.

  According to the electrostatic chuck according to the embodiment of the present invention, the support block is movable according to the size, the curvature, or the shape of the first workpiece. In particular, the support block corresponding to the curved surface portions, which are both end portions of the first workpiece, moves in at least one of the outer direction and the upper direction in the width direction. For this reason, the size or volume of the concave portion of the electrostatic chuck is variable according to the size, curvature, or shape of the first workpiece.

  Therefore, the occurrence of a gap or interference between the electrostatic chuck and the first workpiece can be reduced as compared with the related art. Accordingly, it is possible to suppress and prevent the damage of the first workpiece and the occurrence of the misalignment between the first workpiece and the second workpiece.

FIG. 2 is a diagram illustrating a state in which a second object is bonded (or joined) to a first object whose curved edge is a curved surface by the bonding apparatus according to the first embodiment of the present invention. FIG. 2 is a sectional view taken along line A-A ′ in FIG. 1. FIG. 1 is a diagram showing a bonding device according to a first embodiment of the present invention. FIG. 1 is a diagram showing a bonding device according to a first embodiment of the present invention. FIG. 1 is a diagram showing a bonding device according to a first embodiment of the present invention. FIG. 1 is a diagram showing a bonding device according to a first embodiment of the present invention. FIG. 2 is a view showing an electrostatic chuck according to the first embodiment of the present invention. A first workpiece (FIG. 8 (a)) manufactured so as to have the same design value as the first workpiece (FIG. 8 (b), FIG. 8 ( The figure explaining c)) as an example. FIG. 9 is a diagram illustrating a movement operation of a support block when a first workpiece (FIG. 8B) having a width W _fp different from a design value width W _fi is supported by an electrostatic chuck. FIG. 9 is a diagram illustrating a movement operation of a support block when a first workpiece (FIG. 8C) having a height W _cp different from a design value height W _ci is supported by an electrostatic chuck. FIG. 6 is a diagram illustrating an electrostatic chuck according to a modification of the first embodiment. FIG. 6 is a diagram illustrating an electrostatic chuck according to a second embodiment of the present invention. FIG. 6 is a diagram illustrating an electrostatic chuck according to a second embodiment of the present invention.

  Hereinafter, embodiments of the present invention will be described in more detail with reference to the accompanying drawings. However, the invention is not limited in any way to the embodiments disclosed below, but may be embodied in various different forms, which merely complete the disclosure of the invention and entail ordinary knowledge. It is provided in order to give the holder a complete understanding of the scope of the invention. In describing the present invention, the same components will be denoted by the same reference numerals, and the drawings may be partially exaggerated in size to accurately describe embodiments of the present invention. In the drawings, the same reference numerals indicate the same components.

  The present invention relates to an electrostatic chuck that easily supports an object to be processed having a curved edge, and a bonding apparatus including the electrostatic chuck. More specifically, the present invention relates to an electrostatic chuck capable of suppressing occurrence of poor support in a curved surface region of a workpiece when supporting the workpiece having a curved edge portion, and a bonding apparatus including the electrostatic chuck. .

  FIG. 1 shows a state in which a second processing object is bonded (or joined) to a first processing object having a curved edge portion by the bonding apparatus according to the first embodiment of the present invention. FIG. FIG. 2 is a cross-sectional view taken along line A-A ′ of FIG. FIG. 3 to FIG. 6 are views showing a bonding apparatus according to the first embodiment of the present invention.

  FIG. 7 is a diagram illustrating the electrostatic chuck according to the first embodiment of the present invention. FIG. 8 shows a first workpiece (FIG. 8 (a)) manufactured so as to have the same design value as the first workpiece (FIG. 8 (b)). FIG. 8 (c)) as an example.

FIG. 9 is a view for explaining the movement operation of the support block when the first workpiece (FIG. 8B) having a width W _fp different from the design value width W _fi is supported by the electrostatic chuck. It is. Figure 10 when the first object to be processed (FIG. 8 (c)) is supported by the electrostatic chuck having a height W _cp different from the height W _ci of the design value, the movement of the support block description FIG.

  Referring to FIGS. 1 and 2, a first workpiece S1 according to an embodiment of the present invention is bent (or bent or curved) such that an edge or edge (edge) becomes a curved surface. ) Shape. More specifically, the first workpiece S1 according to the embodiment has a substantially rectangular cross-sectional shape, and two opposing edges are curved.

  That is, the first workpiece S1 extends in one direction, is a substantially rectangular shape, and has a flat portion FA having a flat shape without inclination and curvature, and two facing sides of the four sides of the flat portion FA. It has a curved surface portion CA that extends downward from one side and extends outward from the plane portion FA, and is formed to have a curvature, to be rounded, or to be bent.

  The flat part FA may be a rectangular shape having a pair of long sides arranged so as to be arranged side by side and a pair of short sides arranged so as to be arranged side by side while intersecting the pair of long sides.

  The curved surface portion CA extends downward from a pair of long sides of the flat surface portion FA, and has a slope so as not to be perpendicular to the flat surface portion FA but to move away from the flat surface portion FA as going outward. It may be formed as follows. At this time, the shape has a curvature so that the inclination does not become constant when it is inclined away from the plane part FA as it goes outward. In other words, the curved surface portion CA is a curved surface in which the inner surface of a region corresponding to the curved surface portion CA is concave on the inner surface of the first processed object S1 which is a surface to be bonded to the second processed object S2. Is formed.

  The curved surface portion CA is a curved surface having a curvature as a whole, or at least a region of the curved surface portion CA which is connected to at least the flat surface portion FA and a partial region around the curved surface portion CA is a curved surface having a curvature. A shape having only a downward slope without a curvature may be used.

  The first processing object S1 according to the embodiment is a window made of glass or quartz (quartz). However, the present invention is not limited to this, and various materials having a curved edge can be adopted as the material of the first workpiece S1.

  The second workpiece S2 may include a panel P for displaying an image and a film F to which the panel P is attached. The film F may have a form in which an adhesive is also applied to one surface to which the panel is attached and the back surface to be bonded to the first processing object S1.

  When the first object S1 and the second object S2 are bonded to each other, a second object to be processed is provided on one surface of the first object S1 facing the second object S2. The object S2 is attached. At this time, the second workpiece S2 is bonded to the flat surface portion FA and the curved surface portion CA on one surface of the first workpiece S1. Therefore, the flat panel display device in which the first object S1 and the second object S2 are bonded to each other has a shape in which two opposing edges are curved surfaces, and includes a flat surface portion FA and a curved surface portion. A flat panel display device in which an image is realized in each of the CAs.

  The bonding apparatus for bonding (or bonding) the second workpiece S2 to the first workpiece S1 includes an electrostatic chuck 2000 that supports the first workpiece S1. Here, the electrostatic chuck 2000 has a shape with a curved edge so that the first workpiece S1 having a curved edge can be supported by electrostatic force. That is, the shape of the electrostatic chuck 2000 in which a region corresponding to (or facing) the curved surface portion of the first workpiece S1 has a curvature corresponding to (or the same as) the curved surface portion CA of the first workpiece S1. It is manufactured in.

  The electrostatic chuck 2000 is manufactured based on a design value of the first workpiece S1 having a curved edge. The design values include the area of the first workpiece S1, the curvature of the curved surface portion CA, and the like. When the first workpiece S1 is a window, usually, a window having a curved edge is manufactured by a heat treatment molding method.

  However, at the present time, it is difficult to manufacture the plurality of first workpieces S1 in the same shape or size as the design values. That is, the design value and the curvature of the curved surface portion CA are different, or the X-axis and the Y-axis of at least one of the entire first workpiece S1, the plane portion FA, and the curved surface portion CA. One or both of the axes and the Y axis have different lengths.

  In this case, when the first processing object S1 is supported by the electrostatic chuck 2000, a gap may be formed between the first processing object S1 and the electrostatic chuck 2000, or the second processing object S2 Of these, there is a possibility that a problem such as that the local region is sandwiched by the electrostatic chuck 2000 may occur.

  In particular, a gap or interference occurs when the length of the curved surface portion CA in the Y-axis direction, which is the direction of curvature formation, is different, or the height of the curved surface portion CA is different, or the curvature is different. The gap or the interference is mainly generated between the first workpiece and the electrostatic chuck at the position of the curved surface portion CA of the first workpiece or a region around the curved surface portion CA. Such a gap or interference may cause the first workpiece S1 to be damaged or the first workpiece S1 and the second workpiece S1 to be damaged in the step of bonding the second workpiece S2 to the first workpiece S1. Is a cause of poor alignment with the workpiece S2.

  Therefore, according to the present invention, when supporting the first workpiece S1 having a curved edge, the electrostatic chuck 2000 and the lamination provided with the electrostatic chuck 2000 can suppress the occurrence of poor support as compared with the related art. A matching device is provided.

  Hereinafter, the bonding apparatus according to the first embodiment of the present invention will be described with reference to FIGS.

  In the bonding apparatus according to the first embodiment of the present invention, the second object S2 is joined to the first object S1 having a curved (or rounded) edge portion. (Or bonding) device. Here, the first processing object S1 may be a window, and the second processing object S2 may be a film F with a panel P. That is, the second workpiece S2 has a structure in which a film is bonded to the back surface of the panel P.

  Referring to FIGS. 3 to 6, the bonding apparatus according to the embodiment of the present invention includes a chamber 100 having an internal space, and a static chamber located inside the chamber 100 so as to support the first workpiece S1. An electric chuck 2000, a pressing device 600 having a pressing portion 610 which is opposed to the electrostatic chuck 2000 and can be pressed toward the first workpiece S 1, and a position between the electrostatic chuck 2000 and the pressing portion 610. And a support device 400 having a tray 410 capable of supporting the second workpiece S2.

  In addition, the bonding apparatus according to the embodiment of the present invention includes pressure adjusting units 310 and 320 connected to the chamber 100 and adjusting the inside of the chamber 100 to a vacuum pressure or returning to an atmospheric pressure atmosphere.

  The chamber 100 has an internal space, and includes an upper chamber 110 which can be moved up and down, and a base 120 which is located below the upper chamber 110 and on which a pressing device 600 and a supporting device 400 are mounted. Here, the upper chamber 110 may have a predetermined empty space inside and may have a shape in which the lower side is open. An electrostatic chuck 2000 is mounted on an upper wall in the upper chamber 110.

  The pressure adjusters 310 and 320 include a first pressure adjuster 310 connected to the upper chamber 110 and a second pressure adjuster 320 connected to the base 120.

  The pressing device 600 includes a pressing portion 610 facing the lower side of the electrostatic chuck 2000 inside the chamber 100, and one end connected to the pressing portion 610 so as to support the pressing portion 610, and the other end. Is provided so as to extend through the base 120 so as to be located below the base 120 and to move up and down the pressing portion 610.

  The pressing portion 610 extends in a direction corresponding to the direction in which the first workpiece S1 extends, and is disposed facing the lower side of the electrostatic chuck 2000. The pressing portion 610 is a means (member) whose shape can be deformed by at least one of a fluid flowing into the inside and an external force applied from the outside, and may be, for example, a tube or a rubber pad. As shown in FIG. 3, the pressing portion 610 may have an initial shape having a curved cross-section in which the upper surface decreases in height from the center toward the edge.

  Here, the initial shape of the pressing portion 610 means a state before the shape is deformed by a fluid and an external force.

  The supporting device 400 is movable from the inside of the chamber 100 to the outside, and from the outside to the inside, and raises and lowers the tray 410 while supporting the tray 410 capable of supporting a film and the tray 410 loaded in the chamber 100. And a tray elevating unit 420 to be operated.

  The tray 410 has a hollow shape with an empty center, and may have a shape corresponding to the second workpiece S2, for example, a rectangular shape. Here, the size of the empty space at the center of the tray 410 may be larger than the first processed object S1 and the second processed object S2.

  The tray 410 according to the embodiment may be a means for inserting and supporting the end of the second workpiece S2, for example, the end of the edge of the film F, for example, a clamp structure.

  The tray lifting / lowering unit 420 raises / lowers the tray 410 while supporting the tray 410. The tray lifting / lowering unit 420 includes a shaft 421 having one end connected to a lower portion of the tray 410, and a lifting / lowering power unit 422 connected to the other end of the shaft 421 to apply a lifting / lowering driving force to the shaft 421. . Such a tray elevating unit 420 may be disposed outside the pressing unit 610 and the electrostatic chuck 2000.

  Referring to FIG. 7, the electrostatic chuck 2000 extends in the direction in which the plane part FA of the first workpiece S1 extends, and is opposed to the plane part FA on the back surface of the first workpiece S1. , A cushion portion (hereinafter, referred to as a first cushion portion 2300 a) that extends in the direction in which the electrostatic film 2200 extends and is located behind the electrostatic film 2200. The support block 2400 which faces the curved surface portion CA behind the workpiece S1 and is movable rearward by a force applied from the first workpiece S1 and a cushion portion (hereinafter, referred to as a support section 2400) located behind the support block 2400. (Referred to as a second cushion portion 2300b).

  Further, the electrostatic chuck 2000 is located behind the first cushion portion 2300a and the second cushion portion 2300b and is fixed to the upper chamber 110, and the first cushion portion 2300a and the second cushion portion 2300b are fixed. The body 2100 is provided.

  Here, the front is the direction in which the first workpiece S1 is located, and the rear is the direction opposite to the position of the first workpiece S1.

  In other words, in the above-described electrostatic chuck 2000, the electrostatic film 2200 exists only at a position facing the plane portion FA of the first workpiece S1, and faces the curved surface portion CA of the first workpiece S1. This is a structure in which the electrostatic film 2200 is not provided at the position where the electrostatic film 2200 is provided. In the electrostatic chuck 2000, a support block 2400 is provided so as to face the curved surface portion CA of the first workpiece S1, and a second cushion portion 2300b is provided behind the support block 2400. .

  Further, according to the above-described electrostatic chuck 2000, the first processing object S1 has a predetermined height due to the one surface of the electrostatic film 2200 facing the flat surface portion FA and the support surface of the support block 2400. An empty space (hereinafter referred to as a concave portion) is defined. Therefore, the first workpiece S1 is loaded (or pulled in) into the concave portion and is supported by the electrostatic chuck 2000.

  Hereinafter, the electrostatic chuck 2000 according to the first embodiment will be described in detail with reference to FIGS.

  The electrostatic film 2200 is disposed so as to face the flat part FA of the first processing object S1, and supports the first processing object S1 by electrostatic force. Such an electrostatic film 2200 may have a structure in which a plurality of negative electrodes and a plurality of positive electrodes are formed on a flexible film by patterning. Although not shown, power supply means for supplying power to each of the negative electrode and the positive electrode is connected.

  The first cushion portion 2300a extends in the direction in which the electrostatic film 2200 extends, is disposed to face the back surface of the electrostatic film 2200, and has elasticity. The material of the first cushion portion 2300a is formed, for example, from a raw material containing silicon rubber. However, the present invention is not limited to this, and may be manufactured from various raw materials to which elastic force is given.

  The support block 2400 extends in the direction in which the curved surface portion CA of the first workpiece S1 extends, and at least one surface facing the curved surface portion CA of the first workpiece S1, that is, the support surface 2410 is It has a curved surface that is concave inward.

  Such support blocks 2400 are provided in a number corresponding to the number of the curved surface portions CA of the first workpiece S1, and are located behind the respective curved surface portions CA. In the case where the first workpiece S1 has the curved surface portions CA at both ends in the Y-axis direction, two support blocks are provided, and each of the first workpieces S1 is located behind each of the both edges of the first workpiece S1. Disposed on the body 2100 as shown in FIG.

  Each of the lengths of the support block 2400 in the X-axis and Y-axis directions is equal to or greater than the length of the curved surface portion CA of the first workpiece S1 in the X-axis and Y-axis directions. . The curvature of the support surface 2410 of the support block 2400 facing the curved surface portion CA of the first workpiece S1 is formed so as to correspond to the curvature of the curved surface portion of the first workpiece S1.

  Here, the length of the support block 2400 in the X-axis and Y-axis directions is provided to be equal to or larger than the length of the curved surface portion CA of the first workpiece S1 in the X-axis and Y-axis directions. Providing the curvature of the support surface 2410 of the support block 2400 so as to correspond to (or match) the curvature of the curved surface portion CA of the first workpiece S1 means that the first workpiece S1 is designed. Based on values. That is, the length of the support block 2400 in the X-axis and Y-axis directions is equal to or larger than the length of the first workpiece S1 in the X-axis and Y-axis directions, which are numerical values in design. Provided. Note that the curvature of the support surface 2410 of the support block 2400 that faces the first workpiece S1 is set to correspond to (or match) the curvature of the curved surface portion CA, which is a design numerical value of the first workpiece S1. So).

  The second cushion portion 2300b extends in the direction in which the support block 2400 extends, and is located behind the support block 2400. The second cushion portion 2300b is disposed so that the front surface is in contact with the support block 2400 and the back surface is in contact with the body 2100.

  Here, the rear side of the support block 2400 is the upper direction of the support block 2400 and the outer side in the width direction of the support block 2400. The outer side in the width direction of the support block 2400 means a position between the body 2100 and the support block 2400 in the Y-axis direction of the support block 2400.

  When the second cushion portion 2300b is located behind the support block 2400, it may be provided so as to be located above the support block 2400 and outside in the width direction. More specifically, the second cushion portion 2300b includes a first cushion member 2310b located outside the support block 2400 in the width direction, and a second cushion member 2320b located above the support block 2400. .

  The first cushion member 2310b allows the support block 2400 to be movable in the width direction. The second cushion member 2320b allows the support block 2400 to move upward.

  In the above, the second cushion portion 2300b has been described as being formed separately from the first cushion member 2310b and the second cushion member 2320b, but the present invention is not limited to this. For example, the first cushion member 2310b and the second cushion member 2320b may be of an integrated type connected to each other.

  The material of the first cushion portion 2300a and the second cushion portion 2300b is formed, for example, from a raw material containing silicon rubber. However, the present invention is not limited to this, and various materials and means having an elastic force capable of being compressed and contracted by an external force can be adopted.

  As described above, the electrostatic chuck 2000 includes the first cushion portion 2300a located behind the electrostatic film 2200 and the second cushion portion 2300b located behind the support block 2400.

  Therefore, when the first workpiece S1 is supported (or chucked) so as to be in contact with the electrostatic chuck 2000, or when the first workpiece S1 is opposed to the electrostatic chuck 2000 by the pressing unit 610, When the object S1 is pressed, the support block 2400 is movable rearward (or movable). That is, the support block 2400 is movable so as to press at least one of the first cushion member 2310b located on the outside in the width direction (Y-axis direction) and the second cushion member 2320b located on the upper side (Z-axis direction). It is. This is because the cushion members 2310b and 2320b are provided on the outer side in the width direction (Y-axis direction) and on the upper side (Z-axis direction) of the support block 2400, respectively. This is because they can contract.

  On the other hand, when manufacturing the first workpiece S1 having the curved surface portion CA at the edge portion, the first processed object S1 may be manufactured so as to have a slight difference from the design value. That is, the first workpiece S1 may be manufactured such that at least one of the length in the X-axis direction, the length in the Y-axis direction, and the curvature of the curved surface portion CA is different from the design value.

  More specifically, at least one of the directions of the X-axis and the Y-axis of the plane portion FA of the first workpiece S1 may be different from the design value, and the X-axis and the Y-axis of the curved surface portion CA may be different. At least one of the directions may be different from the design value. The curvature of the curved surface portion CA may be different from the curvature of the design value.

  Here, the Y-axis direction of the first workpiece S1, which is the direction in which the curved surface portions CA are arranged, may be referred to as the width direction, and the X-axis direction, which is the direction intersecting or orthogonal to this, is referred to as the length direction. Is also good.

  On the other hand, since the shape of the electrostatic chuck 2000 does not change, if it is desired to support the first workpiece S1 having a different design value from the electrostatic chuck 2000, the electrostatic chuck 2000 and the first workpiece There is a possibility that a gap may be formed between the object and the object S1, and a margin may be generated at a local position. In particular, the width (length in the Y-axis direction) of the first workpiece S1 in the arrangement direction of the curved surface portions CA or the curvature of the curved surface portion CA may cause a gap or interference with the electrostatic chuck 2000. Become.

  In order to solve such a problem, the electrostatic chuck 2000 according to the embodiment of the present invention has a movable support corresponding to at least one of the width of the first workpiece S1 and the curvature of the curved surface portion CA. An electrostatic chuck 2000 having a block 2400 is provided. That is, in the electrostatic chuck 2000 according to the embodiment, the electrostatic film 2200 and the support block 2400 form the first cushion part 2300a and the second cushion part 2400 in accordance with the width and the curvature of the first workpiece S1 to be supported. It is movable by the cushion part 2300b. In particular, each of a pair of support blocks 2400 corresponding to both ends of the electrostatic chuck 2000 is movable in the width direction and the upper direction by the first cushion member 2310b and the second cushion member 2320b. Therefore, a gap or interference between the first workpiece S1 and the electrostatic chuck 2000, particularly between the curved surface portion CA of the first workpiece S1 and the electrostatic chuck 2000, is reduced. It can be suppressed as compared with the conventional case.

For example, actually supported not want the first planar portion width of the FA of the object S1 (FIG. 8 _{(b)) W fP} is the width of the flat portion of the design value (Fig. 8 _{(a)) W} longer than the _fi In this case, when the first workpiece S1 is supported by the electrostatic chuck 2000, the support block 2400 is moved outward by the force applied from the first workpiece S1, as shown in FIG. It is movable. At this time, the first cushion member 2310b located outside the support block 2400 in the width direction contracts.

  Needless to say, an upward force may be applied according to the size and curvature of the first workpiece S1 in the Y-axis direction. In this case, the support block 2400 is movable in the upward direction, and the second cushion is provided. The member 2320b contracts.

According to another example, the height of the curved surface portion CA of the first workpiece S1 to be supported (FIG. 8C) is _{Hcp, which} is the design value of the curved surface portion CA (FIG. 8A). If either shorter than the H _ci, or the different curvatures, when the first object to be processed S1 is supported by the electrostatic chuck 2000, the force applied from the first object to be treated S1, FIG. 10 As shown, the support block 2400 is movable at least a predetermined distance upward.

  Needless to say, according to the height and the curvature of the curved surface portion CA of the first workpiece S1, a force is applied not only in the upper direction but also in the width direction, and the support block 2400 is moved outward in the width direction. Is also movable, and at this time, the first cushion member 2310b contracts.

  The example in which the support block 2400 moves is not limited to the examples in FIGS. 8B and 8C described above, and an error that may occur between the first object S1 to be supported and the design value. Including various cases.

  As described above, the support block 2400 is movable so as to correspond to the size or the curvature of the first workpiece S1. Therefore, the occurrence of a gap or interference between the electrostatic chuck 2000 and the first workpiece S1 can be reduced as compared with the related art. Accordingly, it is possible to suppress and prevent the damage of the first workpiece S1 and the occurrence of the misalignment between the first workpiece S1 and the second workpiece S2.

  FIG. 11 is a diagram illustrating an electrostatic chuck according to a modification of the first embodiment.

  The above-described electrostatic chuck 2000 according to the first embodiment has a structure in which a separate supporting force is not applied to a region of the first workpiece S1 facing the curved surface portion CA.

  However, the present invention is not limited to this, and as in a modification shown in FIG. 11, the electrostatic chuck 2000 supports the support block 2400 facing the curved surface portion CA of the first workpiece S1. The surface 2410 may be provided with a support portion 2500 that provides a new supporting force.

  The support portion 2500 generates an adhesive member 2510 mounted on the support surface 2410 of the support block 2400 facing the curved surface portion CA of the first workpiece S1, and generates a vacuum suction force on the support surface 2410 of the adhesive member 2510. A suction part 2520 is provided.

  The adhesive member 2510 is a unit having an adhesive force, and is mounted or disposed on the support surface 2410 of the support block 2400. Therefore, the adhesive member 2510 has a curvature corresponding to (or the same as) the curvature of the support surface 2410 of the support block 2400.

  The suction part 2520 is located behind the adhesive member 2510 inside the support block 2400, and one end is connected to the suction pipe 2521 connected to the adhesive member 2510 and the other end of the suction pipe 2521. And a pump 2522.

  The suction pipe 2521 is in the shape of a pipe having an internal space, penetrates the adhesive member 2510 in the thickness direction, and can be extended to the front surface such that one end thereof is exposed to the front surface of the adhesive member 2510. It is. For this reason, the adhesive member 2510 may be provided with a hole through which the suction pipe 2521 can pass.

  Needless to say, the suction pipe 2521 does not extend to the front surface of the adhesive member 2510, but may extend to the rear of the front surface of the adhesive member 2510 and be connected to the hole provided in the adhesive member 2510.

  Further, the suction part 2520 may include a channel 2523 provided to connect the suction pipe 2521 and the pump 2522 inside the support block 2400, and the inner diameter of the channel 2523 is equal to the inner diameter of the suction pipe 2521. It may be larger.

  As described above, by providing the support portion 2500 to the support block 2400, a support force is further applied to a region of the electrostatic chuck 2000 corresponding to the curved surface portion CA of the first workpiece S1. Therefore, the support force of the region corresponding to the curved surface portion CA of the first workpiece S1 is improved as compared with the first embodiment. For this reason, it is possible to more effectively prevent the chucking failure of the first workpiece S1 by the electrostatic chuck 2000 and the damage of the first workpiece S1 due to the chucking failure.

  The support portion 2500 according to the above-described modification includes both the adhesive member 2510 and the suction portion 2520. However, the present invention is not limited to this, and the support portion 2500 may be configured to include any one of the adhesive member 2510 and the suction portion 2520.

  FIG. 12 and FIG. 13 are views showing an electrostatic chuck according to the second embodiment of the present invention.

  In the electrostatic chuck 2000 according to the above-described first embodiment and its modification, the second cushion portion 2300b is provided behind the support block 2400, and moves rearward by an external force applied to the support block 2400.

  However, the present invention is not limited to this, and is movable by the expansion operation of the expansion members 2610 and 2620 located behind the support block 2400 as in the second embodiment shown in FIGS. May be configured.

  That is, the electrostatic chuck 2000 according to the second embodiment includes the body 2100 positioned above the pressing portion 610 and the first processing target S1 so as to face the pressing portion 610 inside the chamber 100. An electrostatic film 2200 extending in one direction so as to face the plane portion FA and attached to the lower portion of the body 2100; and an electrostatic film 2200 extending in the direction in which the electrostatic film 2200 extends and behind the electrostatic film 2200. A cushion portion 2300a disposed inside the body 2100 so as to be positioned; and a curved surface portion CA of the first processed object S1 positioned inside the body 2100 so as to be located behind the first processed object S1. Has a curvature corresponding to (or commensurate with) the curvature of the curved surface portion CA of the first workpiece S1, and is movable toward the curved surface portion CA of the first workpiece S1. Holding block 2400, expansion members 2610 and 2620 located behind the support block 2400 inside the body 2100 and moving the support block 2400 in the direction in which the first workpiece S1 is located by an expansion operation, and the support block. Return members 2710 and 2720 are provided so as to connect the body 2400 and the body 2100 and have a return force for returning the support block 2400 to its original state (position).

  The expansion members 2610 and 2620 each have an internal space capable of supplying a fluid, for example, air (air) therein, and are tubes that can be expanded by the supplied fluid and contractable by discharging the fluid. Is also good.

  Note that a plurality of expansion members 2610 and 2620 may be arranged behind the support block 2400. For example, as shown in FIGS. 12 and 13, the expansion members 2610 and 2620 may be located outside the support block 2400 in the width direction and above the support block 2400, respectively. Hereinafter, the expansion member located outside the support block 2400 in the width direction is referred to as a first expansion member 2610, and the expansion member located above the support block 2400 is referred to as a second expansion member 2620.

  The first expansion member 2610 moves the support block 2400 in the width direction due to the expansion, and when the first expansion member 2610 expands, the support block 2400 located in front of the first expansion member 2610 approaches the first workpiece S1. Move in the width direction.

  The second expansion member 2620 moves the support block 2400 in the vertical direction due to the expansion, and when the second expansion member 2620 expands, the support block 2400 located in front of the second expansion member 2620 approaches the first workpiece. To move down.

  For operation of the first inflation member 2610 and the second inflation member 2620, an inflation control unit 2800 that controls supply and discharge of fluid is connected. The expansion control unit 2800 has one end connected to each of the first expansion member 2610 and the second expansion member 2620, and a connection pipe 2810 provided with an internal space through which a fluid passes, and the other of the connection pipe 2810. And a supply portion 2820 that is connected to the other end of the connecting tube 2810 to supply a fluid to the connecting tube 2810, and is connected to the other end of the connecting tube 2810, and the first inflation member 2610 and the second inflating member are connected via the connecting tube 2810. A discharge section 2830 for discharging the fluid inside the member 2620. The expansion control unit 2800 is provided on the extending path of the connection pipe 2810, and a first valve that controls communication with the supply unit 2820 and a second valve that controls communication with the discharge unit 2830. And a valve.

  According to such an expansion control unit 2800, the fluid is supplied by the operation of the supply unit 2820, and the first expansion member 2610 and the second expansion member 2620 are each expanded. In addition, by the operation of the discharge unit 2830, the fluid in the first expansion member 2610 and the fluid in the second expansion member 2620 are respectively discharged, and the first expansion member 2610 and the second expansion member 2620 contract.

  The return members 2710 and 2720 serve to assist the support block 2400 to return to the original state (position) when the first expansion member 2610 and the second expansion member 2620 contract.

  The return members 2710 and 2720 are disposed so as to connect the body 2100 and the support block 2400 as described above. Here, a plurality of return members 2710, 2720 may be provided to correspond to the number of expansion members 2610, 2620.

  For example, as shown in FIGS. 12 and 13, the return members 2710 and 2720 extend in the width direction from the front of the support block 2400, one end is connected to the support block 2400, and the other end is a body. A first return member 2710 connected to the upper end of the support block 2400, and a second return member connected to the upper end of the support block 2400 and the other end connected to the body 2100; A member 2720 may be provided. The first return member 2710 and the second return member 2720 may be contractible and expandable springs, respectively.

  Hereinafter, the operation of the electrostatic chuck 2000 and the process of supporting the first workpiece S1 according to the second embodiment of the present invention will be described with reference to FIGS.

  First, the first workpiece S1 having a curved edge is moved so as to be located in the concave portion of the electrostatic chuck 2000, and the plane part FA of the first workpiece S1 (see FIG. 2). ) Is in contact with the electrostatic film 2200. Next, at least one of the first inflation member 2610 and the second inflation member 2620 is inflated using the inflation control unit 2800, and the support surface 2410 of the support block 2400 is moved to the first object S1. The support block 2400 is moved so as to come into contact with the curved surface portion CA (see FIG. 2). That is, at least one of the first inflation member 2610 and the second inflation member 2620 is inflated, and the support block 2400 is moved in at least one of the width direction and the lower direction, so that its support surface 2410 Is in contact with the curved surface portion CA of the first workpiece S1.

  Thus, the support block 2400 is movable toward the curved surface portion CA of the first workpiece S1. In other words, the support block 2400 causes the support surface 2410 to move to the first surface according to the size or shape of the first workpiece S1 by the operation of at least one of the first expansion member 2610 and the second expansion member 2620. The workpiece S1 is movable so as to be in contact with the curved surface portion CA. That is, the support block 2400 is movable so as to correspond to the size or shape of the first workpiece S1. Thereby, the support force of the first workpiece S1 by the electrostatic chuck 2000 can be improved.

  Next, when the first workpiece S1 is supported by the electrostatic chuck 2000, the second workpiece S2 is bonded to the first workpiece S1. After the first workpiece S1 and the second workpiece S2 are bonded together, they are removed from the electrostatic chuck 2000. Thereafter, the discharge unit 2830 of the expansion control unit 2800 is operated to discharge the fluid from the expansion member to which the fluid has been supplied among the first expansion member 2610 and the second expansion member 2620. Thus, the expanded members 2610 and 2620 of the first expanded member 2610 and the second expanded member 2620 are contracted. As a result, the support block 2400 returns to the original state (position) by the return force of the first return member 2710 and the second return member 2720.

  As described above, according to the electrostatic chuck 2000 according to the second embodiment, according to the size or the shape of the first processing object S1, the support block 2400 can be moved by the first expansion member 2610 and the second expansion member. Actively moved by member 2620. Therefore, the moving direction and the moving amount of the support block 2400 are adjusted according to the size or the shape of the first processing object S1 such that the support surface 2410 is in contact with the curved surface portion CA of the first processing object S1. Is also good.

  As a result, even if the first workpiece S1 is manufactured so as to be different from the designed value, a gap or interference between the electrostatic chuck 2000 and the first workpiece S1 is generated. It can be reduced compared to the conventional case. Accordingly, it is possible to reduce and prevent the damage of the first processing target S1 and the occurrence of the misalignment between the first processing target S1 and the second processing target S2.

  In the above-described first embodiment, its modified example, and the second embodiment, both ends of the first workpiece to be processed in the Y-axis direction are curved surfaces, and the electrostatic chucks are arranged side by side in the Y-axis direction. The configuration including the two support blocks has been described.

  However, the present invention is not limited to this, and the first workpiece may have a shape in which a curved surface is formed in the X-axis direction. A structure may be employed in which a support block is provided so as to face a curved surface provided at an edge in the X-axis direction of the workpiece.

  Further, the first object to be processed is not limited to a planar square shape at all, and may have a planar circular shape or various polygonal shapes, and may have a curved surface at an edge portion thereof. Even in this case, the support block of the electrostatic chuck is provided so as to correspond to the curved surface position of the first workpiece.

  Hereinafter, an operation of the bonding apparatus according to the embodiment of the present invention and a process of bonding the first processing object and the second processing object will be described with reference to FIGS.

  First, as shown in FIG. 3, the electrostatic chuck 2000 supports the first workpiece S1 having a curved edge, and supports the second workpiece S2 on the tray 410. Here, the second workpiece S2 includes a film F and a panel P mounted on the film F and realizing an image.

  When supporting the first workpiece S1 on the electrostatic chuck 2000, first, the first workpiece S1 is opposed to the lower side of the electrostatic chuck 2000.

  Next, the first workpiece S1 is raised, and the back surface of the first workpiece S1 is brought into contact with the electrostatic film 2200 of the electrostatic chuck 2000 and the support surface 2410 of the support block 2400. Specifically, the flat part FA of the first workpiece S1 contacts the electrostatic film 2200, and the curved part CA contacts the support surface 2410 of the support block 2400.

  When the first workpiece S1 is supported in contact with the electrostatic chuck 2000, at least one of the electrostatic film 2200 and the support block 2400 is movable backward. That is, the electrostatic film 2200 moves upward, or the support block 2400 moves in at least one of the outer side and the upper side in the width direction.

  Such movement of the electrostatic film 2200 and the support block 2400 is based on the pressing force or force applied when the first processing target S1 comes into contact with the electrostatic chuck 2000 due to the size, the curvature of the curved surface portion, or the shape thereof. In other words, when the first workpiece S1 is in contact with and supported by the electrostatic chuck 2000, the contact surface between the electrostatic film 2200 and the support block 2400 moves according to the applied force. That is, the size of the concave portion of the electrostatic chuck 2000 can be changed according to the size, curvature, or shape of the first workpiece S1.

  Therefore, generation of a gap or interference between the electrostatic chuck 2000 and the first workpiece S1 can be reduced as compared with the related art. This suppresses and prevents the damage of the first workpiece S1 and the occurrence of a misalignment between the first workpiece S1 and the second workpiece S2.

  When the first workpiece S1 is supported by the electrostatic chuck 2000, the tray 410 is lowered so as to be located below the pressing portion 610, as shown in FIG. As a result, the second workpiece S2 has a convex cross-section in which the height increases toward the center in the width direction, like the shape of the pressing portion 610.

  Next, as shown in FIG. 5, the upper chamber 110 is lowered so that the chamber 100 is sealed, and the center of the first workpiece S1 in the width direction and the width of the second workpiece S2 are reduced. Contact with the center of the direction. When the chamber 100 is sealed, the inside of the chamber 100 is divided into an upper region and a lower region of the film F based on the film F. In the present embodiment, after the chamber 100 is sealed, each of the first pressure adjusting unit 310 and the second pressure adjusting unit 320 is operated, and the upper region of the film F and the lower region of the film F are respectively operated. To a vacuum atmosphere.

  Next, the lower area of the film F is returned to the atmospheric pressure by using the second pressure adjusting unit 320. Due to the pressure difference at this time, the film F and the panel P attached thereto are pushed up in the direction where the window is located, and press the window. As a result, the primary bonding between the panel P (the second workpiece S2) and the window (the first workpiece S1) is performed.

  Next, when the pressing portion 610 is raised using the support base 620, as shown in FIG. 6, the movement is prevented by the electrostatic chuck 2000 fixed on the upper side. Thus, a force is generated that pushes the second workpiece S2 in the direction in which the first workpiece S1 is located. At this time, the shape of the pressing portion 610 is deformed to a shape corresponding to (or corresponding to) the shape of the first workpiece S1. In this manner, the second processing object S1 is pressed from the lower side of the second processing object S2 as a whole by the pressing part 610, and the second processing object S1 is pressed onto the inner surface of the first processing object S1. The object S2 is attached.

  As described above, the electrostatic film and the support block of the electrostatic chuck according to the embodiment of the present invention are movable according to the size, curvature, or shape of the first workpiece. In particular, the support block corresponding to the curved surface portions, which are both end edges of the first workpiece, moves in at least one of the outer side and the upper side in the width direction. At this time, the size or volume of the concave portion of the electrostatic chuck is variable according to the size, curvature, or shape of the first workpiece.

  Therefore, the occurrence of a gap or interference between the electrostatic chuck and the first workpiece can be reduced as compared with the related art. Accordingly, damage to the first workpiece and misalignment between the first workpiece and the second workpiece can be suppressed and prevented.

2000: Electrostatic chuck
2100: Body 2200: Electrostatic film
2300a: first cushion portion 2300b: second cushion portion 2310b: first cushion member 2320b: second cushion member 2400: support block 2410: support surface
2510: Adhesive member 2520: Suction section 2610: First inflatable member 2620: Second inflatable member 2710: First return member 2720: Second return member

Claims (25)

An electrostatic chuck for supporting an object to be processed having a flat surface portion and a curved surface portion extending outward from an edge of the flat surface portion,
An electrostatic film disposed so as to be positioned corresponding to the rear of the flat portion of the object,
A movable support block located corresponding to the rear of the curved portion of the workpiece;
An electrostatic chuck comprising: A body having a recess in which the object is accommodated,
The electrostatic chuck according to claim 1, wherein the electrostatic film and a support block are disposed on an inner wall of the body that defines the recess.   The electrostatic chuck according to claim 2, wherein a support surface of the support block that faces the curved surface of the workpiece has a curvature that matches the curved surface.   2. The electrostatic chuck according to claim 1, further comprising a first cushion portion located behind the electrostatic film and having an elastic force capable of expanding and contracting.   The electrostatic chuck according to any one of claims 1 to 4, wherein the support block is movable rearward by an external force applied from the workpiece.   The electrostatic chuck according to claim 5, further comprising a second cushion portion located behind the support block and having an elastic force capable of expanding and contracting.   The electrostatic chuck according to claim 6, wherein the second cushion portion includes a first cushion member located outside the support block in the width direction and a second cushion member located above the support block.   At least one of an adhesive member that can be disposed on the support surface of the support block, and a suction unit that has a suction pipe that can be disposed inside the support block so that a vacuum suction force is generated on the support surface of the support block. The electrostatic chuck according to claim 6, comprising: An inflatable member located behind the support block, inflatable by a supplied fluid, and capable of contracting by discharging the fluid;
The electrostatic chuck according to any one of claims 1 to 4, wherein the support block is movable forward due to the expansion of the expansion member, where the workpiece is located. A body having a recess in which the object is accommodated,
The electrostatic chuck according to claim 9, further comprising a return member disposed to connect the support block and the body, the return member having a return force for returning the support block to a state before being moved by the expansion of the expansion member. .   The electrostatic chuck according to claim 10, wherein the expansion member includes a first expansion member located outside the support block in a width direction and a second expansion member located above the support block.   A first return member extending in the width direction of the support block, connecting the support block to the body, and a return member extending in the height direction of the support block; The electrostatic chuck according to claim 11, further comprising a second return member that connects the body and the body. A bonding apparatus for bonding a second processing object to a first processing object including a flat surface portion and a curved surface portion extending outward from an edge portion of the flat surface portion and having a curved shape. hand,
A chamber having an internal space;
An electrostatic chuck that can be moved up and down within the chamber and that can support the first object on one surface;
A pressing portion facing the electrostatic chuck inside the chamber,
A tray that is hollow and can be positioned between the electrostatic chuck and the pressing unit, and clamps and supports the second workpiece;
With
The bonding apparatus, wherein the electrostatic chuck is divided into a region corresponding to the plane portion of the first workpiece and a region corresponding to the curved surface portion, and the region corresponding to the curved surface portion is movable. . The electrostatic chuck includes:
An electrostatic film disposed so as to be located behind the flat portion of the first workpiece;
A movable support block located behind the curved surface of the first workpiece;
The bonding apparatus according to claim 13, further comprising:   The bonding apparatus according to claim 14, wherein a support surface of the support block facing the curved surface of the first workpiece has a curvature that matches the curved surface.   The bonding device according to claim 15, further comprising a first cushion portion that is located behind the electrostatic film and has an elastic force capable of expanding and contracting. A second cushion portion, which is located behind the support block and has a stretchable elastic force,
The bonding device according to any one of claims 14 to 16, wherein the support block is movable rearward by an external force applied from the first workpiece by the second cushion portion.   At least one of an adhesive member that can be disposed on the support surface of the support block, and a suction unit that has a suction pipe that can be disposed inside the support block so that a vacuum suction force is generated on the support surface of the support block. The bonding apparatus according to claim 17, further comprising: The electrostatic chuck includes:
An inflatable member located behind the support block, inflatable by a supplied fluid, and contractible by discharging the fluid;
A return member disposed so as to be connected to the support block and having a return force for returning the support block to a state before moving by the expansion of the expansion member;
With
17. The support block is movable forward by the expansion of the expansion member where the first workpiece is located, and is movable rearward by contraction of the expansion member and a return force of the return member. The bonding apparatus according to any one of the above. A method of attaching a second processing object to a first processing object including a flat surface portion and a curved surface portion extending outward from an edge portion of the flat surface portion and having a shape having a curvature,
Supporting the first workpiece on an electrostatic chuck;
Supporting a second workpiece on a hollow tray facing the electrostatic chuck;
A step of moving the electrostatic chuck and the tray so that the first object and the second object approach each other, and attaching a second object to the first object; When,
Including
The step of supporting the first workpiece on the electrostatic chuck includes a step of moving a support block corresponding to a curved surface of the first workpiece in the electrostatic chuck. The step of supporting the first workpiece on the electrostatic chuck includes:
A flat portion of the first workpiece is opposed to the electrostatic film of the electrostatic chuck, and the curved surface portion extends outward from an edge of the electrostatic film, and the support faces the curved surface portion. Arranging the surface so as to face the support block having a curved surface corresponding to the curved surface portion;
Moving the first workpiece toward the electrostatic chuck, and bringing the first workpiece and the electrostatic chuck into contact with each other;
Including
When moving the support block,
21. The bonding method according to claim 20, wherein the support block is moved backward by an external force applied from the first workpiece to the electrostatic chuck. The step of supporting the first workpiece on the electrostatic chuck includes:
A flat portion of the first workpiece is opposed to the electrostatic film of the electrostatic chuck, and the curved surface portion extends outward from an edge of the electrostatic film, and the support faces the curved surface portion. Arranging the surface so as to face the support block having a curved surface corresponding to the curved surface portion;
Moving the first workpiece toward the electrostatic chuck, and bringing the first workpiece and the electrostatic chuck into contact with each other;
Including
When moving the support block,
21. The bonding method according to claim 20, wherein the support block is moved toward a curved surface portion of the first workpiece to bring a support surface of the support block into contact with a curved surface portion of the first workpiece. . When the support block moves rearward due to an external force applied to the electrostatic chuck from the first workpiece,
22. The bonding method according to claim 21, wherein the support block moves by contraction of a cushion portion located behind the support block. When moving the support block toward the curved surface of the first workpiece,
23. The bonding method according to claim 22, wherein a fluid is supplied to an expansion member located behind the support block, and the support block is moved by expansion of the expansion member. The bonding method according to any one of claims 20 to 24, wherein the support block moves in at least one of a width direction and a vertical direction of the support block.