JP2020019104A - Gripper module and gripper device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To realize miniaturization and weight reduction of a gripper module and a gripper device. A gripper module 100 includes a gripper 200 having a gripping arm 220 that opens and closes by vibration of a piezoelectric element 210 for driving an arm, an image pickup device 300 that captures a working area of the gripper arm 220 of the gripper 200, and an image pickup device 300. The optical axis L is positioned so as to pass through the work area of the grip arm 220, and includes a pedestal member 400 to which the gripper 200 and the image pickup device 300 are attached. [Selection diagram] FIG. 6

Description

  The present invention relates to a gripper module and a gripper device including the same.

  2. Description of the Related Art Conventionally, a micro gripper device has been used for picking up and assembling a micro component, operating a cell, and the like (for example, see Patent Document 1). The micro gripper device includes a plurality of openable and closable gripping arms for gripping a minute gripping object. In addition, since the object to be grasped is very small, work by the micro gripper device is often performed with reference to an image output to a display via a camera.

  On the other hand, as a device for converting electric energy into mechanical work, there is a driving device using a piezoelectric element. The present applicant has proposed a drive device in which a piezoelectric element is attached to one end of a drive shaft supported by a guide member and a restraining member, and the drive shaft is moved in the axial direction by expanding and contracting the piezoelectric element (Japanese Patent Application Laid-Open No. H11-157,979). Reference 2). In such a driving device, a single pulse or a continuous pulse of a sawtooth wave is applied to the piezoelectric element, and the state of the contact surface between the moving body or the support that frictionally engages with the driving shaft and the driving shaft is fixed. The drive shaft and the moving body or the support are relatively moved by changing the state between the stick and the sliding state (slip).

JP 2005-342846 A JP 2015-128360 A

  In the micro-gripper device of Patent Document 1, the micro-gripper has a problem that the gripping arm is configured to open and close by an electromagnetic driving method, so that the structure is complicated and it is difficult to reduce the size and weight. Was. Further, since the camera that captures an image of the periphery of the tip of the gripper arm of the micro gripper is supported by a member different from the member that supports the micro gripper, there is a problem that the size and weight of the micro gripper device are increased. Was.

  An object of the present invention is to reduce the size and weight of a gripper module and a gripper device.

  The gripper module according to the present invention includes a gripper having a gripping arm that opens and closes by vibration of an arm driving piezoelectric element, an imaging device that captures an image of a working area of the gripping arm of the gripper, and an optical axis of the imaging device that is the work area. And a pedestal member to which the gripper and the imaging device are mounted.

  According to the gripper module of the present invention, the gripper arm of the gripper is opened and closed by the vibration of the arm driving piezoelectric element, so that the configuration of the gripper can be simplified, and the size and weight of the gripper can be reduced. Further, since the gripper and the imaging device are mounted on the same pedestal member, the gripper and the imaging device can be compactly arranged, and the size and weight of the gripper module can be reduced.

  Further, according to the gripper module of the present invention, by assembling the gripper and the imaging device on one base member to form a module, it becomes easy to incorporate the gripper and the imaging device into various robots having a moving mechanism. In the gripper module of the present invention, the gripper arm position of the gripper can be adjusted while viewing the image acquired by the imaging device. By preparing a gripper module in which the optical axis of the imaging device and the gripper arm position of the gripper have been adjusted, the gripper and the imaging device can be quickly and easily attached to the robot. In addition, the gripper module of the present invention can be mounted on a small robot having a small driving force because the gripper module can be reduced in size and weight. In addition, since the optical axis of the lens of the imaging device passes through the working area of the gripping arm, the working area of the gripping arm can be observed in an image area where the influence of the lens aberration is small. Accuracy is improved. The “working area of the gripping arm” means an area between the tip ends of the gripping arms when the pair of gripping arms that open and close is opened.

  In the gripper module according to the aspect of the invention, the imaging device includes a lens driving device that moves a lens along the optical axis by vibration of a lens driving piezoelectric element, and an imaging device that receives light passing through the lens. You may make it.

  According to such an embodiment, since the lens is moved by the vibration of the lens driving piezoelectric element, the configuration of the lens driving device can be simplified, and the size and weight of the lens driving device can be reduced. And the miniaturization and weight reduction of an imaging device and the miniaturization and weight reduction of a gripper module can be realized.

  Further, the lens driving device has an axial lens driving vibration unit having a lens driving shaft fixed to one end of the lens driving piezoelectric element, and supports the lens and frictionally engages with the lens driving shaft. A lens support that moves in the axial direction of the lens drive shaft; and a support case that has a pair of support pieces that support both ends of the lens drive vibration unit, wherein the end face of the lens drive shaft is one of the support pieces. May be fixed.

  According to such an embodiment, the thickness of the support piece (one support piece) to which the end surface of the lens drive shaft of the lens drive vibration unit is fixed can be reduced among the pair of support pieces of the support case. It is possible to reduce the size and weight of the imaging device, and further reduce the size and weight of the imaging device. Thus, the gripper and the imaging device can be more compactly arranged, and the size and weight of the gripper module can be further reduced.

  The other support piece of the support case has a structure to which the end face of the lens driving piezoelectric element is fixed, a structure to which the end face and side face of the lens driving piezoelectric element are fixed, or a side face of the lens driving piezoelectric element. The structure may be fixed. For example, if both end faces of the lens driving vibration unit (the end face of the lens driving shaft and the end face of the lens driving piezoelectric element) are fixed to both support pieces, the thickness of both support pieces can be reduced, and the lens drive Further reduction in size and weight of the device can be realized.

  Further, in the gripper module according to the present invention, the gripper includes an arm drive vibration unit having a pair of arm drive shafts fixed to both ends of the arm drive piezoelectric element, and the gripper being frictionally engaged with the pair of arm drive shafts. A pair of the gripping arms that move in the axial direction of the arm drive shaft may be provided.

  According to such an aspect, since both of the pair of gripping arms are moved by driving one arm driving piezoelectric element, a gripper capable of quickly opening and closing the gripping arm can be realized with a simple configuration.

  A gripper device according to the present invention includes the gripper module according to the present invention, and a translation mechanism that linearly moves the pedestal member of the gripper module along the optical axis of the imaging device.

  According to the gripper device of the present invention, since the gripper module of the present invention is provided, the size and weight of the entire gripper device can be reduced. Can be moved to align the tip of the gripper gripping arm with the gripping target.

  According to the present invention, the size and weight of the gripper module and the gripper device can be reduced.

FIG. 2 is a schematic perspective view illustrating a configuration of a gripper device. It is a schematic structure figure showing the control system of the same gripper device. It is the schematic which shows the structure of the expansion-contraction drive device in the same gripper apparatus. It is an expanded conceptual diagram which shows the periphery of a gripper module in the same gripper apparatus in side view, (A) shows the imaging state of a short distance visual field, (B) shows the imaging state of a long distance visual field. (A) of the same gripper module is a front view, (B) is a rear view. (A) of the same gripper module is a left side view, (B) is a longitudinal sectional view seen from the right side. It is a bottom view of the same gripper module. It is a figure which shows the gripper in the same gripper module, (A) is a top view, (B) is a front view. It is a top view for explaining the inside of the same gripper. (A), (B) is a top view which shows the modification of a gripper, respectively. It is the schematic for demonstrating the frictional engagement structure of an arm drive vibration unit and a holding arm, (A) is an isolated perspective view, (B) is a perspective view of the assembled state. It is a figure which shows the external appearance of the modification of a gripper, (A) is a top view and (B) is a front view. 3A is a left side view, and FIG. 3B is a right side view, showing an internal configuration of the gripper. It is a perspective view which shows the internal structure of the same gripper. 4A and 4B show an operation state of the gripper, in which FIG. 4A is a cross-sectional view taken along the line AA, and FIG. FIG. 3 is an exploded perspective view illustrating a configuration of an arm driving vibration unit of the gripper. FIG. 3 is an exploded perspective view showing a configuration of the gripper. It is explanatory drawing of operation | movement of the same gripper, (A) has shown the state in which the gripping arm was opened, (B) has shown the state which made the gripping arm contact, and (C) has closed the gripping arm to the limit. Indicates the status. It is a figure for explaining the physical relationship of the image pick-up field of an image pick-up device, and a gripper arm of a gripper, (A-1) and (A-2) show a mode in which both grip arms 220 are movable, and (B-1) ) And (B-2) show a mode in which one gripping arm is fixed. It is a figure which shows the example of a layout when a gripper and two imaging devices are provided in a gripper module, (A), (B) is a side view and a bottom view of the first arrangement example, (C), (B) D) is a layout view of the second arrangement example in a side view and a bottom view, and (E) is a layout view of a third arrangement example in a bottom view.

  Hereinafter, an embodiment of a gripper module and a gripper device of the present invention will be described with reference to the drawings. FIG. 1 is a schematic perspective view showing the configuration of the gripper device. FIG. 2 is a schematic configuration diagram showing a control system of the gripper device. FIG. 3 is a schematic diagram showing a configuration of a telescopic drive device in the gripper device. FIG. 4 is an enlarged conceptual view showing the periphery of the gripper module as viewed from the right side. In the following description, terms indicating specific directions and positions (for example, “left and right”, “front and back”, “up and down”, etc.) are used as necessary, but these terms are used for convenience of explanation. It is not intended to limit the technical scope of the present invention.

  As shown in FIG. 1, the gripper device 1000 of the present embodiment includes a three-axis operation drive device 500 that moves the gripper module 100 in three orthogonal directions. The gripper module 100 is detachably attached to an output member 502 that can move in three axes of a driving device 500 for three-axis operation.

  As shown in FIGS. 4 and 6, the gripper module 100 includes a gripper 200 having a pair of gripping arms 220 that are opened and closed by the vibration of an arm driving piezoelectric element 210, and a work area of the gripping arm 220 of the gripper 200 (gripping arm). The image pickup apparatus 300 includes an image pickup device 300 for picking up an image of a position at which the object 220 holds the object to be held, and a pedestal member 400 to which the gripper 200 and the image pickup device 300 are attached.

  The pedestal member 400 has the shape of a substantially trapezoidal column in which the front surface of a rectangular parallelepiped that is long in the longitudinal direction is inclined obliquely downward. The gripper 200 is attached to the pedestal front surface 401 of the pedestal member 400, and a pair of left and right gripping arms 220 extend obliquely downward. The imaging device 300 is attached to a pedestal notch concave portion 402 provided below the pedestal member 400. The optical axis L of the lens 301 of the imaging device 300 extends in the up-down direction and is positioned so as to pass through the work area of the grip arm 220. As described above, the gripper 200 and the imaging device 300 are compactly arranged by extending the gripping arm 220 obliquely downward such that the optical axis L of the imaging device 300 and the extending direction of the gripping arm 220 of the gripper 200 intersect. In addition, the length of the gripping arm 220 can be shortened as much as possible, and the strength of the gripping arm 220 can be secured. In addition, since the gripping arm 220 extends obliquely downward, a space is formed below the gripper 200 (below the base end of the gripping arm 220). Parts other than the part to be gripped) can be prevented from colliding with the object to be gripped, and the operability of the gripper device 1000 is improved. In the pedestal member 400, the rear part of the pedestal upper surface 403 is connected to the lower surface of the output member 502 of the three-axis operation driving device 500, and a module fixing screw 410 screwed from above the output member 502. , Is fixed to the output member 502.

  In the gripper module 100 of the present embodiment, since the gripping arm 220 of the gripper 200 is opened and closed by the vibration of the arm driving piezoelectric element 210, the configuration of the gripper 200 can be simplified, and the size and weight of the gripper 200 can be reduced. realizable. Since the gripper 200 and the imaging device 300 are mounted on the same pedestal member 400, the gripper 200 and the imaging device 300 can be compactly arranged, and the size and weight of the gripper module 100 can be reduced. As a result, there is an effect that mounting on a small robot having a small driving force becomes possible.

  Further, according to the gripper module 100, by assembling the gripper 200 and the imaging device 300 with one pedestal member 400 to form a module, various robots having a moving mechanism (in the present embodiment, the three-axis operation driving device 500 ) Can easily incorporate the gripper 200 and the imaging device 300. The gripper module 100 can adjust the position of the grip arm 220 of the gripper 200 while viewing the image acquired by the imaging device 300. By preparing the gripper module 100 in which the optical axis L of the imaging device 300 and the position of the grip arm 220 of the gripper 200 have been adjusted, the gripper 200 and the robot (for example, the three-axis operation driving device 500) can be moved. The mounting of the imaging device 300 can be performed quickly and easily.

  In the gripper module 100, since the optical axis L of the lens 301 of the imaging device 300 passes through the work area of the grip arm 220, the work area of the grip arm can be observed in an image area where the influence of the aberration of the lens 301 is small. Accordingly, the ease and accuracy of the gripping operation by the gripping arm 220 is improved.

  As shown in FIGS. 1 to 3, the three-axis operation driving device 500 includes an up-down (Z-axis) telescopic driving device 501 </ b> A having one end fixed on a pedestal 550, and a telescopic driving device. A telescopic drive device 501B for the left-right direction (Y-axis direction) fixed to the other end serving as the output side of 501A, and a telescopic drive device for the front-rear direction (X-axis direction) fixed to the output side of the telescopic drive device 501B. 501C, and an output member 502 fixed to the output side of the telescopic drive device 501C. The expansion / contraction drive devices 501A to 501C have the same configuration, and extend and contract by sliding the drive shaft 504 of the mobile unit 503 in the axial direction with respect to the housing 505.

  The telescopic drive device 501A is arranged so that the axial direction of the drive shaft 504 is arranged along the vertical direction, the lower end of the housing 505 is fixed to the pedestal 550, and the telescopic drive device 501A stands upright from the pedestal 550. By sliding the mobile unit 503 up and down, the output member 502 connected via the telescopic drive units 501B and 501C is moved up and down. That is, the telescopic drive device 501A moves the gripper module 100 fixed to the output member 502 along the optical axis L of the imaging device 300. Accordingly, the gripper module 100 can be moved up and down while imaging the object to be gripped by the imaging device 300, and the tip of the gripping arm 220 of the gripper 200 can be aligned with the object to be gripped.

  The telescopic drive device 501B has an output side (right side) of the housing 505 fixed to an output side of an upper end of the mobile unit 503 in the telescopic drive device 501A, and is horizontally arranged in the left-right direction with respect to the base 550. By sliding the mobile unit 503 left and right from the right end of 505, the output member 502 connected via the telescopic drive device 501C is moved in the left and right direction. The expansion / contraction driving device 501C has an output side (front side) of the housing 505 fixed to the output side of the upper end of the movable unit 503 in the expansion / contraction driving device 501B, and is horizontally disposed in the front-rear direction with respect to the pedestal 550. By sliding the mobile unit 503 back and forth from the front end of 505, the output member 502 connected to the front end of the mobile unit 503 is moved in the front and rear direction.

  Next, a schematic configuration of the telescopic driving devices 501A to 501C will be described below with reference to FIG. Hereinafter, the telescopic driving devices 501A to 501C are simply referred to as telescopic driving devices 501. The expansion / contraction driving device 501 includes a movable unit 503, a support unit 506 that supports the movable unit 503, and a piezoelectric element 507 that converts an electric signal into mechanical vibration. The moving body unit 503 moves relatively to the support unit 506 due to the vibration of the piezoelectric element 507. The expansion / contraction drive controller 508 supplies a drive pulse of a sawtooth wave to the piezoelectric element 507 to vibrate the drive shaft 504 in the axial direction.

  The moving body unit 503 has an axial configuration, and the piezoelectric element 507 is fixed to one end of the drive shaft 504, while the output member 502 is fixed to the other end of the drive shaft 504. The movable body unit 503 is arranged in the housing 505 such that the output member 502 fixed to the other end of the drive shaft 504 is arranged outside the cylindrical housing 505, and The support unit 506 is supported in the housing 505 so that the 504 has a degree of freedom only in the axial direction (sliding direction). The output member 502 moves along the axial direction of the drive shaft 504 according to the sliding operation of the mobile unit 503 outside the extension direction (axial direction) of the housing 505.

  As shown in FIG. 2, a telescopic drive controller 508 is electrically connected to the telescopic drive devices 501A to 501C, respectively. A module controller 101 that supplies a sawtooth drive pulse to the arm driving piezoelectric element 210 and the lens driving piezoelectric element 311 is electrically connected to the gripper 200 of the gripper module 100 and the lens driving device 310 of the imaging device 300. ing.

  These controllers 101 and 508 are electrically connected to a PC 1001 which is a personal computer constituting a control device. Further, the image pickup device 330 of the image pickup device 300 of the gripper module 100 is electrically connected to the PC 1001. The PC 1001 includes a CPU (Central Processing Unit) that executes various arithmetic processing and control, a ROM (Read Only Memory) that stores a control program and various data, and a RAM (Random Access Memory) that temporarily stores the control program and various data. ), An input interface, and the like. The PC 1001 controls the gripper 200 and the telescopic drive devices 501A to 501C via the controllers 101 and 508 to perform desired operations.

  The PC 1001 is configured to be able to display an image acquired by the imaging device 330 of the imaging device 300 on a monitor 1002 as a display device. In addition, the PC 1001 drives the lens driving device 310 that moves the lens 301 via the module controller 101, and performs auto-focus control so that an image acquired by the imaging device 330 of the imaging device 300 is in focus. Thus, as shown in FIG. 4A, the distance between the near field Fs around the work area of the gripper 200 and the far field Fl below the work area as shown in FIG. Even when the object to be grasped is located at such a height position, it is possible to focus on the object to be grasped.

  An example of the gripping operation of the gripping object by the gripper device 1000 will be described. The gripper module 100 is moved by driving the triaxial operation driving device 500 while operating the imaging device 300, and the gripping object is moved in the far-field Fl. Search for things. Then, the gripper module is driven by the three-axis operation driving device 500 such that the gripping target is positioned in the work area (short-range visual field Fs) of the gripping arm 220 of the gripper 200 while focusing on the gripping target that is found. 100 is moved, and the gripping arm 220 of the gripper 200 is driven to grip the gripping target.

  As described above, since the gripper device 1000 includes the gripper module 100 that can be reduced in size and weight, the size and weight of the entire gripper device 1000 can be reduced. In addition, the gripper device 1000 includes a telescopic drive device 501B as a linear motion mechanism that linearly moves the pedestal member 400 of the gripper module 100 along the optical axis L of the imaging device 300. Thus, the gripper module 100 can be moved up and down while the imaging device 300 of the gripper module 100 images the object to be gripped, and the tip of the gripping arm 220 of the gripper 200 can be aligned with the object to be gripped.

  Next, the configuration of the gripper module 100 will be described with reference to FIGS. 6B, the cross section of the gripper 200 corresponds to the position XX in FIG. 8A. As described above, the gripper module 100 includes the pedestal member 400 to which the gripper 200 and the imaging device 300 are attached.

  The pedestal member 400 is made of metal or resin, has a substantially trapezoidal column shape, and the pedestal front portion 401 is inclined obliquely downward. In the lower part of the pedestal member 400, a pedestal notch concave portion 402 is formed which is opened on the lower surface, the right side surface and the rear side surface of the pedestal member 400. The left side of the pedestal notch recess 402 is closed by a cover surface portion 404 extending downward on the left side surface portion of the pedestal member 400.

  The gripper 200 includes an arm driving vibration unit 212 in which left and right arm driving shafts 211 are fixed to left and right ends of an arm driving piezoelectric element 210, and an axial direction of the arm driving shaft 211 by frictionally engaging the left and right arm driving shafts 211. And left and right grip arms 220 that move to the right and left. The left and right grip arms 220 are opened and closed by being moved in a direction away from each other or in a direction approaching each other by the vibration of the arm driving piezoelectric element 210.

  As shown in FIG. 9, the arm driving vibration unit 212 is fixed to the gripper base plate 201 which is long in the left and right directions. One side surface of the arm driving piezoelectric element 210 is fixed to a base plate mounting table 201a projecting from the center of the gripper base plate 201 with an adhesive 202a. Further, the end surfaces of the left and right arm drive shafts 211 are fixed to the front end surfaces of the left and right base plate support pieces 201b projecting from the left and right ends of the gripper base plate 201 with an adhesive 202b.

  As shown in FIG. 10A, the end surfaces of the left and right arm drive shafts 211 may be abutted on the base plate support piece 201b and fixed with an adhesive (not shown). In addition, the end surfaces of the left and right arm drive shafts 211 do not have to be fixed to the gripper base plate 201. For example, in the configuration shown in FIG. 10A, the arm drive shaft 211 and the base plate support piece 201b are separated from each other. When not bonded, the base plate support piece 201b functions as a protection member for protecting the arm drive shaft 211. In this case, a gap may be formed between the arm drive shaft 211 and the base plate support piece 201b.

  Further, as shown in FIG. 10B, a stopper member 227 for limiting a movable range of the gripping arm 220 toward the distal end side (left and right outer sides) of the arm drive shaft 211 may be provided. For example, the stopper member 227 is attached to a portion near one end (may be two or more side surfaces) of the arm drive shaft 211 (a portion near the end opposite to the arm driving piezoelectric element 210). It is formed of an adhesive. The stopper member 227 limits the movement of the grip arm 220 to the left and right sides. The movable range of the gripping arm 220 toward the base end side (left and right inner sides) of the arm drive shaft 211 is limited by the base plate mounting table 201a of the gripper base plate 201.

  In this modified example, a stopper member 227 is provided on each of the left and right arm drive shafts 211, whereas the left and right positions where the stopper members 227 are provided on the left and right arm drive shafts 211 are different. Thus, the left and right grip arms 220 have different strokes (length of the movable range in the left-right direction).

  Since the strokes of the left and right grip arms 220 are different from each other, when the left and right grip arms 220 perform the closing operation from the fully open state, the grip arm 220 with the shorter stroke is moved to the left or right inner stroke end (the arm driving piezoelectric element). 210, and the gripping arm 220 having the longer stroke reaches the left and right inner stroke ends with a delay. As described above, by causing one grip arm 220 to reach the stroke end on the left and right inner side earlier than the other grip arm 220, the reproducibility of the position of the grip arm 220 when the left and right grip arms 220 are closed is improved. Can be improved.

  In addition, by allowing one grip arm 220 to reach the stroke end on the left and right inside first, it becomes easier to predict the position where the left and right grip arms 220 grip the grip target when gripping a minute grip target, Before the left and right grip arms 220 complete gripping the grip target, the grip target can be prevented from moving much. In this manner, the displacement of the grasping object before the completion of the grasping operation can be reduced, and the reproducibility and reliability (accuracy) of the grasping operation can be improved.

  Further, when the gripping target is moved to a desired direction or position, the gripping arm 220 having the shorter stroke can be moved to the left or right inner stroke end to move the gripping target. The movement of the grip target can be completed before the 220 contacts the grip target. As a result, the reproducibility and certainty (accuracy) of the movement operation of the grasp target can be improved.

  The shape and shape of the gripping arm 220 such that a gap is formed between the tips of the gripping arms 220 (tips of the finger members 225) in a state where the left and right gripping arms 220 are both located at the stroke ends on the left and right sides. Even when a stroke is set, the same effect as described above can be obtained by making the strokes different from each other with the left and right grip arms 220.

  By providing the stopper member 227 on only one of the left and right arm drive shafts 211, the strokes of the left and right grip arms 220 can be made different from each other. Further, by providing a stopper member at a position near the base end of the arm drive shaft 211 (a position near the end on the side of the arm driving piezoelectric element 210), it is possible to set the left and right inner stroke ends of the gripping arm 220. . It is needless to say that the configuration in which the strokes of the left and right grip arms 220 are different from each other can be applied to the configuration shown in FIG. The stopper member that determines the stroke end of the gripping arm 220 is not limited to the configuration provided on the arm drive shaft 211, and may be, for example, a configuration formed by a protrusion provided on the gripper base plate 201 or the gripper case 203. Any configuration that limits the movable range of the gripping arm 220 by contacting the gripping arm 220 may be used.

  The left and right grip arms 220 frictionally engaged with the left and right arm drive shafts 211 are provided with an elastic arm fixing member 222 on the arm body base end 223 of the arm body 221 which is brought into contact with the arm drive shaft 211. By doing so, it is frictionally engaged with the arm drive shaft 211. The left and right grip arms 220 have a symmetric configuration. 5 to 7 and the like, the periphery of the arm body base end 223 of the arm body 221 and the periphery of the arm fixing member 222 are shown in a simplified manner.

  A specific configuration example of the frictional engagement between the grip arm 220 and the arm drive shaft 211 will be described with reference to FIG. In FIG. 11, the finger mounting portion 224 of the arm body 221 in the gripping arm 220 is shown in a simplified manner, and the finger member 225 is not shown.

  The arm body base end 223 of the arm body 221 has an L-shape branched into two branches in a side view, one of which is an upper fixing part 223A extending rearward, and the other being a front fixing part extending downward. 223B. The arm fixing member 222 is made of, for example, an elastic body such as a plate-shaped friction spring bent in an L-shape when viewed from the side, and one end (the rear upper edge side) of the arm fixing member 222 is connected to the arm body base end 223. The other end (the lower front edge side) of the arm fixing member 222 is connected to the front fixing portion 223B of the arm body base end 223 while being connected to the upper fixing portion 223A.

  The arm main body 221 has a finger mounting portion 224 extending forward from the base end portion 223 of the arm main body. The finger mounting portion 224 is one of the left and right edges of the upper fixing portion 223A of the base end portion 223 of the arm body and extends forward from the front surface of the front fixing portion 223B. The base end portion 223 of the arm body has an upper locking portion 223X protruding upward at a rear edge of the upper fixing portion 223A, and has a front locking portion 223Y protruding forward at a lower edge of the front fixing portion 223B. . That is, the base end portion 223 of the arm main body has an upper fixing portion 223A having an upper locking portion 223X having a hook shape on a rear edge and a front locking portion having a front locking portion 223Y having a hook shape on a lower edge side view. The portion 223B is branched.

  The arm fixing member 222 has a rear plate portion 222A extending upward from a rear lower end and a lower plate portion 222B extending forward from a lower edge of the rear plate portion 222A. An upper locking portion 222X bent in an L-shape is provided on the upper edge, and a front locking portion 222Y bent in an L-shape is provided on the front edge of the lower plate portion 222B. The arm fixing member 222 projects the middle part of the rear plate part 222A upward and downward, and projects the middle part of the lower plate part 222B forward and backward, so that the rear plate part 222A and the lower plate part 222B are connected to each other. The connecting portion is formed in a U-shape in side view. Further, the upper locking portion 222X is configured to be bent downward after extending forward from the upper edge of the rear plate portion 222A, and to be formed after the front locking portion 222Y extends upward from the front edge of the lower plate portion 222B. It is configured to bend backward.

  The arm main body 221 is attached to the arm driving vibration unit 212 such that the base end portion 223 of the arm main body abuts on a part of the outer peripheral surface of the arm driving shaft 211. At this time, in the base end portion 223 of the arm body, the lower surface of the upper fixing portion 223A contacts the upper surface of the arm drive shaft 211, and the rear surface of the front fixed portion 223B of the base end portion 223 of the arm body contacts the front surface of the arm drive shaft 211. That is, the arm main body 221 is attached to the arm driving vibration unit 212 such that the base end portion 223 of the arm main body covers the upper surface and the front surface of a part of the arm driving shaft 211 in the left-right direction. Further, the rear edge of the upper fixed portion 223A protrudes rearward from the rear edge of the arm drive shaft 211, and the lower edge of the front fixed portion 223B protrudes lower than the lower edge of the arm drive shaft 211.

  The arm fixing member 222 is attached to the arm driving vibration unit 212 to which the arm body 221 is attached so as to cover the exposed outer peripheral surface of the arm drive shaft 211 covered by the arm body base end 223. At this time, the arm fixing member 222 makes the front surface of the protruding portion of the rear plate portion 222A abut on the rear surface of the arm drive shaft 211, and makes the upper surface of the protruding portion of the lower plate portion 222B abut the lower surface of the arm drive shaft 211. That is, the arm fixing member 222 is attached to the arm driving vibration unit 212 so as to cover the rear surface and the lower surface of the portion of the arm driving shaft 211 covered by the arm main body base end 223 of the arm driving shaft 211. Further, the arm fixing member 222 projects the upper edge of the rear plate portion 222A upward from the upper surface of the arm main body base end 223 of the arm fixing member 222 so that the upper locking portion 222X is engaged with the upper end of the arm main body base end 223. While the front plate 223X is locked to the stop 223X, the front edge of the lower plate 222B is projected forward from the front surface of the arm body base end 223 of the arm fixing member 222, so that the front locking part 222Y is located on the front side of the arm body base end 223. The locking part 223Y is locked.

  In the arm body 221, the upper locking part 222 </ b> X and the front locking part 222 </ b> Y at both ends of the arm fixing member 222 are hooked on the upper locking part 223 </ b> X and the front locking part 223 </ b> Y at both ends of the base part 223 of the arm main body. The arm drive shaft 211 is pressed by two contact portions with the shaft 211 to generate a frictional force with the arm drive shaft 211. That is, the arm main body 221 is attracted in the direction of the arm drive shaft 211 by the arm fixing member 222, and frictional force is generated between the arm drive shaft 211 and the two surfaces (upper surface and front surface) in contact with the arm drive shaft 211. Generate. In this way, the gripping arm 220 in which the arm body 221 and the arm fixing member 222 are combined is in a state of being frictionally engaged with the arm driving vibration unit 212.

  The arm body base end 223 of the arm body 221 serving as a moving body covers a part of the outer periphery of the arm drive vibration unit 212 when viewed from the axial direction of the arm drive vibration unit 212, that is, the arm drive vibration unit. It has a shape that covers a part of the outer periphery of the arm driving vibration unit 212 on a plane perpendicular to the axial direction of the 212. Then, the arm body base end 223 is made to extend along the outer periphery of the arm driving vibration unit 212, and both ends of the arm body base end 223 are connected by an arm fixing member 222 which is an elastic body. It is engaged with the vibration unit 212. That is, the arm main body base end 223 of the arm main body 221 is installed so as to cover the arm drive shaft 211 from above and in front of the arm drive shaft 211 so as to be in contact with the front and top surfaces of the arm drive shaft 211. After that, the arm fixing member 222 is expanded so that both ends of the arm main body base end 223 are sandwiched from below the rear side of the arm drive shaft 211 so that the upper locking portion 223X and the front locking portion 223Y are respectively connected to the upper locking portion. The arm 222 </ b> X and the front locking part 222 </ b> Y are locked, and the arm body base end 223 of the arm body 221 is frictionally engaged with the arm drive shaft 211.

  As described above, the gripping arm 220 is installed in the arm driving vibration unit 212 so as to sandwich the arm driving shaft 211 between the arm main body base end 223 of the arm main body 221 and the arm fixing member 222 serving as an elastic body. The gripping arm 220 can be easily incorporated into the driving vibration unit 212, and the gripping arm 220 can be frictionally engaged with the arm driving vibration unit 212 with an appropriate force. At this time, by changing the elastic force of the arm fixing member 222, the frictional force of the gripping arm 220 with respect to the arm driving vibration unit 212 may be changed, or the arm fixing member 222 may contact the arm driving shaft 211. By changing the area, the frictional force of the holding arm 220 with respect to the arm driving vibration unit 212 may be changed.

  The gripping arm 220 has a configuration in which the finger mounting portion 224 of the arm main body 221 is extended forward, but the arm drive shaft 211 has a square pillar shape and the arm main body base end of the arm main body 221. By configuring the 223 and the arm fixing member 222 in an L-shape, the rotation of the gripping arm 220 with respect to the arm driving vibration unit 212 due to the rotational moment by the finger mounting portion 224 can be restricted. That is, the arm body base end 223 and the arm fixing member 222 of the arm body 221 abut on the outer peripheral surface of the arm drive shaft 211 while pressing against each other, so that the rotation of the arm body 221 with respect to the arm drive shaft 211 can be prevented. At this time, the arm body base end 223 of the arm body 221 and the arm fixing member 222 hold the front and rear sides of the arm drive shaft 211 by the front fixing part 223B and the rear plate part 222A, and the upper fixing part 223A and the lower plate. By holding the upper and lower sides of the arm drive shaft 211 with the portion 222B, the arm drive shaft 211 is frictionally engaged with the arm drive shaft 211.

  Thus, the gripping arm 220 is frictionally engaged with the arm drive shaft 211. The configuration in which the gripping arm 220 is frictionally engaged with the arm drive shaft 211 is not limited to the configuration described with reference to FIG. 11, and the stick state (fixed state) and the slip state due to the vibration of the arm driving piezoelectric element 210. (Sliding state) may be repeated as long as the gripping arm 220 moves along the arm drive shaft 211.

  Returning to FIGS. 8 to 10 and the like, the description of the gripper 200 will be continued. A finger mounting groove 224a for holding a plate-like finger member 225 is formed at the distal end of the finger mounting portion 224 of the gripping arm 220. The finger mounting groove 224a is open on the distal end surface, the upper surface, and the lower surface of the finger mounting portion 224. A finger fixing screw hole 224b penetrating through the finger mounting groove 224a from the left and right outer surfaces of the finger mounting portion 224 is formed at the distal end of the finger mounting portion 224.

  The base end of the finger member 225 is inserted into the finger mounting groove 224a, and the base end of the finger member 225 is inserted into the finger mounting groove 224a by the finger fixing screw 226 screwed into the finger fixing screw hole 224b from the left and right outside. The finger member 225 is detachably attached to the arm main body 221 by being pressed against the wall surface. The finger fixing screw 226 is, for example, a hexagon socket screw. The distal end of the finger member 225 extends obliquely inward in a direction in which the distal ends of the left and right finger members 225 approach each other, so that the distal end of the finger member 225 can easily grip a micro component. .

  The base ends of the arm driving vibration unit 212 and the gripping arm 220 are covered with a substantially box-shaped gripper case 203 fixed to the gripper base plate 201. The arm fixing member 222 of the gripping arm 220 and the arm body base end 223 of the arm body 221 are arranged in the gripper case 203, and the finger mounting part 224 of the arm body 221 is arranged outside the gripper case 203. On the end face of the gripper case 203, left and right gripping arm insertion holes 203a into which the left and right arm bodies 221 are inserted are formed. The holding arm insertion hole 203a is formed to be horizontally long in the left and right direction, and the holding arm 220 is configured to be movable in the left and right direction.

  At the center of each of the upper and lower surfaces of the gripper case 203, mounting screw insertion holes 203b are respectively formed. The mounting screw insertion hole 203b is provided at a position where the gripper mounting screw 205 inserted into the mounting screw insertion hole 203b does not interfere with the grip arm 220 and the arm driving vibration unit 212 in the gripper case 203. Openings provided on the left and right sides of the gripper case 203 are closed by side covers 204 attached to the left and right sides of the gripper case 203 and the left and right sides of the gripper base plate 201. In the gripper case 203, a wiring insertion hole 203c for drawing out an electric wiring 206 for supplying an electric signal to the arm driving piezoelectric element 210 from the inside of the gripper case 203 is formed.

  The gripper 200 is detachable from the pedestal member 400 by screwing the gripper mounting screw 205 inserted through the mounting screw insertion hole 203b into the gripper mounting screw hole 405 provided on the pedestal front surface 401 of the pedestal member 400. Attached to. The gripper 200 is fixed to the pedestal member 400 in an obliquely downward posture such that the finger member 225 of the grip arm 220 is located below the pedestal member 400 with the left and right grip arms 220 closed.

  Next, the imaging device 300 of the gripper module 100 will be described with reference to FIGS. The imaging device 300 is mounted in a pedestal notch recess 402 provided below the pedestal member 400. The imaging device 300 includes a lens driving device 310 that moves the lens 301 up and down along the optical axis L by the vibration of the lens driving piezoelectric element 311, and an imaging device 330 that receives light passing through the lens 301. I have.

  The lens driving device 310 includes an axial lens driving vibration unit 313 having a lens driving shaft 312 fixed to one end of a lens driving piezoelectric element 311, and an axial direction of the lens driving shaft 312 which is frictionally engaged with the lens driving shaft 312. And a support case 317 having a pair of drive shaft support pieces 315 and piezoelectric element support pieces 316 that support both ends of the lens drive vibration unit 313.

  The support case 317 includes a plate-shaped support base 318 that connects the plate-shaped drive shaft support piece 315 and the piezoelectric element support piece 316, with the piezoelectric element support piece 316 being on the upper side and the drive shaft support piece 315 being on the lower side. And placed. The drive shaft support piece 315 and the piezoelectric element support piece 316 extend in the same direction (rightward in this embodiment) from the upper and lower ends of the support base 318, and the support case 317 has a U-shape (C-shape). Having. The lens drive vibration unit 313 is arranged between the drive shaft support piece 315 and the piezoelectric element support piece 316 such that the axial direction extends vertically with a gap from the support base 318.

  The support case 317 is arranged near the left rear corner of the pedestal cutout recess 402 of the pedestal member 400, and the piezoelectric element support piece 316 is fixed to the upper wall surface of the pedestal cutout recess 402 with an adhesive (not shown). As a result, it is attached to the base member 400. In the present embodiment, a gap is formed between the support case 317 and the cover surface 404 of the pedestal member 400.

  The end face (lower end face) of the lens drive shaft 312 of the lens drive vibration unit 313 is abutted on the drive shaft support piece 315 and is fixed with an adhesive (not shown). The end surface (upper end surface) of the lens driving piezoelectric element 311 is abutted on the piezoelectric element supporting piece 316 and is fixed by an adhesive (not shown). In this manner, by fixing both end surfaces of the lens driving vibration unit 313 to the pair of support pieces 315 and 316 of the support case 317, both end surfaces of the lens driving vibration unit 313 can be securely fixed to the support case 317. However, the thickness of the support pieces 315 and 316 can be reduced, and the length of the support case 317 (along the axial direction of the lens drive vibration unit 313) can be ensured while securing the movable range (up and down stroke) of the lens support 314. (Length dimension) can be reduced, and the size and weight of the support case 317 can be reduced, and the size and weight of the lens driving device 310 can be reduced.

  Also, by reducing the thickness of the drive shaft support piece 315 of the support case 317, the lens support 314 can move to the vicinity of the lower end of the lens driving device 310 (the lower surface of the drive shaft support piece 315). It is possible to realize a compact lens driving device 310 in which the projecting dimension of the lower end portion of the lens driving device 310 with respect to the movable range end (the lower limit of the movable range of the lens support 314) on the drive shaft support piece 315 side is small.

  In a configuration in which the end surface of the lens drive shaft 312 is fixed to the drive shaft support piece 315 with an adhesive, the adhesive may wrap around the side surface of the lens drive shaft 312. The same applies to a configuration in which the end surface of the lens driving piezoelectric element 311 is fixed to the piezoelectric element supporting piece 316 with an adhesive.

  The end of the lens driving vibration unit 313 on the lens driving piezoelectric element 311 side is fixed to the end face of the lens driving piezoelectric element 311 on the piezoelectric element supporting piece 316 of the support case 317 as in the present embodiment. Alternatively, the end face and the side face of the lens driving piezoelectric element 311 may be fixed, or the side face of the lens driving piezoelectric element 311 may be fixed.

  As shown in FIGS. 4 to 7, the lens support 314 of the lens driving device 310 includes a support base material 319 frictionally engaged with the lens drive shaft 312 and a lens holding plate 320 connected to the support base material 319. And a cylindrical lens barrel 321 that stands around a light transmitting hole 320 a provided in the lens holding plate 320. The lens 301 is positioned and adhered to the lens barrel 321. The lens holding plate 320 and the lens barrel 321 are made of, for example, metal and have a light blocking function.

  4 to 7, the configuration of the support base material 319 is illustrated in a simplified manner. The support base material 319 is, for example, formed by the grip arm 220 and the arm drive shaft 211 described with reference to FIG. It has a structure similar to the friction engagement structure, and frictionally engages the lens drive shaft 312. The configuration in which the lens support 314 is frictionally engaged with the lens drive shaft 312 is not limited to the same configuration as that described with reference to FIG. State) and a slip state (slip state), and the lens support 314 may move along the lens drive shaft 312 in a frictional engagement structure.

  On the other hand, the image sensor 330 mounted on the flexible substrate 331 is fitted into a light-shielding image sensor holder 332, and the image sensor 330 is mounted on the pedestal member 400 through the flexible substrate 331 and the image sensor holder 332. It is attached to 402. The imaging element 330 is mounted on one end of the flexible substrate 331, and a reinforcing backing plate 333 is attached to a surface of the one end of the flexible substrate 331 opposite to the surface on which the imaging element 330 is mounted. I have. On one side surface (upper surface) of the plate-shaped imaging element holder 332, a circuit arrangement groove 332a for accommodating the imaging element 330, the flexible substrate 331, and the backing plate 333 is formed. The imaging element holder 332 is fixed to the front portion (the portion near the gripper 200) of the pedestal cutout recess 402 of the pedestal member 400 with an adhesive with the circuit arrangement groove 332 a facing upward.

  In the image sensor holder 332, a lens arrangement hole 334 that penetrates in the vertical direction is formed corresponding to the position of the image sensor 330. The lens arrangement hole 334 is located below the image sensor 330. The lens holding plate 320 arranged below the image sensor holder 332 is arranged such that the light transmission hole 320a is located below the image sensor 330 and the lens arrangement hole 334. A cylindrical lens barrel 321 which stands on the upper surface of the lens holding plate 320 and surrounds the light transmission hole 320a of the lens holding plate 320 and holds the lens 301 therein is provided in the lens arrangement hole 334 of the imaging element holder 332, It is arranged to be able to move up and down. Between the outer peripheral surface of the lens barrel 321 and the inner peripheral surface of the lens arrangement hole 334, the position and angle of the lens barrel 321 in the lens arrangement hole 334 can be adjusted, and the position of the lens barrel 321 can be adjusted. A gap is formed to allow vertical sliding.

  As described above, in the lens driving device 310 that moves the lens 301 in the vertical direction (the direction of the optical axis L), the piezoelectric element support piece 316 of the support case 317 is fixed to the upper wall surface of the pedestal cutout recess 402 with an adhesive. ing. A gap is formed between the support case 317, the cover surface 404, and the image sensor holder 332. Thereby, when assembling the lens driving device 310 to the pedestal member 400, the parallel eccentricity and the tilt eccentricity of the lens 301 can be adjusted by adjusting the mounting position and the mounting angle of the support case 317.

  Light that enters the lens 301 from below and passes through the lens 301 through the light transmission hole 320a enters the image pickup device 330. In the present embodiment, the lens barrel 321 supported by the lens support 314 so as to cover the periphery of the lens 301 is disposed between the lens 301 and the lens arrangement hole 334, and the lens arrangement hole 334 and the lens mirror are arranged. Since the gap between the cylinder 321 is small, stray light to the image sensor 330 is reduced. In addition, the region where the outer peripheral wall of the lens barrel 321 and the inner peripheral wall of the lens arrangement hole 334 of the image sensor holder 332 face each other has a length in the optical axis L direction (vertical direction). The lens 301 and the lens barrel 321 can be moved up and down with respect to the lens arrangement hole 334 while blocking stray light.

  Further, in the lens holding plate 320 having a light shielding property, a portion located below the imaging element holder 332 is formed to be larger than the lens arrangement hole 334 in plan view, and covers the lens arrangement hole 334. Accordingly, light traveling from below to the gap between the lens arrangement hole 334 and the lens barrel 321 is blocked by the lens holding plate 320, so that light incident between the lens arrangement hole 334 and the lens barrel 321 is reduced. The stray light to the image sensor 330 is further reduced. By forming a light-shielding line or an anti-reflection film (anti-reflection coating film) on at least one of the outer peripheral surface of the lens barrel 321 and the inner peripheral surface of the lens arrangement hole 334, stray light to the image sensor 330 is further reduced. Is possible.

  As described above, according to the gripper module 100, the gripping arm 220 of the gripper 200 is opened and closed by the vibration of the arm driving piezoelectric element 210, so that the configuration of the gripper 200 can be simplified, and the size of the gripper 200 can be reduced. Weight reduction can be realized. Furthermore, since the gripper 200 and the imaging device 300 are mounted on the same pedestal member, the gripper 200 and the imaging device 300 can be compactly arranged, and the size and weight of the gripper module 100 can be reduced.

  In the gripper module 100, the imaging device 300 includes the lens 301, a lens driving device 310 that supports and moves the lens 301, and an imaging device holder 332 that holds the imaging device 330. The lens driving device 310 and the imaging element holder 332 are individually attached to the pedestal member 400. Thereby, the area occupied by the imaging device 300 in the gripper module 100 can be reduced as compared with the case where the modularized imaging device is attached to the pedestal member 400, and the gripper module 100 is configured to be more compact, and the gripper module 100 is reduced in size. And lightening can be realized.

  In addition, since the lens driving device 310 and the imaging element holder 332 are individually attached to the pedestal member 400 to which the gripper 200 is attached, the degree of freedom of the layout of the lens driving device 310 and the imaging element holder 332 with respect to the gripper 200 is improved. In addition, by disposing the gripper 200 and the lens driving device 310 close to the imaging element holder 332, the gripper 200 and the imaging device 300 can be compactly arranged, which contributes to downsizing and weight reduction of the gripper module 100. . Note that if the lens driving device 310 does not hinder the opening / closing operation of the grip arm 220, the gripper 200 and the lens driving device 310 can be arranged close to each other.

  Next, a modified example of the gripper will be described with reference to FIGS. In this gripper, one of the pair of gripping arms is driven to open and close the gripping arm. In the following description, when a term indicating a specific direction or position (for example, “left / right”, “front / rear”, “up / down”, etc.) is used as needed, as shown by an arrow in FIG. The direction perpendicular to the plane of the drawing is defined as a plan view, and this direction is used as a reference. These terms are used for convenience of description and do not limit the technical scope of the present invention.

  FIG. 12 is a plan view and a front view showing a configuration of a gripper of a modification, and FIG. 13 is a left and right side view showing the configuration of the gripper. FIG. 14 is a perspective view showing the configuration of the gripper, and FIG. 15 is a view showing the operation of the gripper. 16 and 17 are exploded perspective views for explaining an assembling process of the gripper. FIG. 18 is a diagram illustrating the operation of the gripper. 12 to 17, illustration of the fixed gripping arm 25 (see FIG. 18) is omitted.

  As shown in FIGS. 12 to 18, the gripper 200 </ b> A of the present example includes a shaft-shaped arm driving vibration unit 1 in which an arm driving piezoelectric element 11 is fixed to one end of an arm driving shaft 12, and an arm driving vibration unit 1. And a movable gripping arm 2 that frictionally engages with and moves in the axial direction of the arm driving vibration unit 1. Then, the lower surfaces of both ends of the arm driving vibration unit 1 with the movable gripping arm 2 engaged are fixed to the upper ends of a pair of support pieces 32A, 32B standing upright from the bottom surface 31 of the housing 3, thereby arm driving. The vibration unit 1 is supported by the housing 3.

  The gripper 200A connects the arm driving vibration unit 1 in which one end of the arm driving shaft 12 is fixed to one end of the arm driving piezoelectric element 11 to the mutually fixed ends of the arm driving piezoelectric element 11 and the arm driving shaft 12. It is fixed to the fixed frame 32 at two opposite ends. The housing 3 has a fixed frame 32 erected from the outer peripheral edge of the bottom surface 31, and left and right side wall portions of the fixed frame 32 correspond to a pair of left and right support pieces 32 </ b> A and 32 </ b> B. The other end of the arm driving piezoelectric element 11 is fixed to the right support piece 32B, and the other end of the arm drive shaft 12 is fixed to the left support piece 32A. At this time, the arm driving vibration unit 1 is fixed to the fixed frame 32 by, for example, pressing the arm driving vibration unit 1 against the fixed frame 32 from one direction (upward) and bonding the arm driving vibration unit 1 with the adhesive 33. You. The movable gripping arm 2 is frictionally engaged with the arm driving shaft 12 of the arm driving vibration unit 1, and the movable gripping arm 2 moves along the axial direction of the arm driving shaft 12.

  As shown in FIG. 18, the gripper 200 </ b> A is configured such that the distal end of the arm portion 24 of the arm body 21 of the movable gripping arm 2 is bent inward (to the left), and the fixed gripping arm has a distal end symmetrical to the distal end of the arm portion 24. 25 protrudes from the rear side wall 32 </ b> D of the fixed frame 32 in the housing 3. For example, the gripper 200A is attached to the pedestal front portion 401 of the pedestal member 400 with an adhesive or the like instead of the gripper 200 with respect to the gripper module 100 shown in FIGS. At this time, the gripper 200A is arranged in an inclined posture such that the arm portion 24 and the fixed gripping arm 25 of the movable gripping arm 2 extend obliquely downward, and each tip of the arm portion 24 and the fixed gripping arm 25 is It is arranged below the imaging device 300.

  Before the arm driving piezoelectric element 11 and the arm driving shaft 12 are fixed to the fixed frame 32 of the housing 3, one end of the arm driving shaft 12 is fixed to one end of the arm driving piezoelectric element 11 as a preprocess. Assembled as unit 1. The arm driving piezoelectric element 11 and the arm driving shaft 12 constituting the arm driving vibration unit 1 may be bonded by an adhesive. At this time, the heat of the arm driving piezoelectric element 11 is transmitted to the arm driving shaft 12 by using a heat conductive adhesive as an adhesive for adhering the arm driving piezoelectric element 11 and the arm driving shaft 12. Since the temperature rise of the driving piezoelectric element 11 can be reduced, the moving speed of the movable gripping arm 2 can be increased, and the duty ratio of the electric signal to the arm driving piezoelectric element 11 can be increased. Is attached to the base end (engaging portion) 23 of the arm main body 21 which is brought into contact with the arm drive shaft 12 so that the arm fixing member 22 having elasticity is frictionally engaged with the arm drive shaft 12. ing. The base end portion 23 of the arm body 21 has an L-shape branched into two branches in a side view, one of which is an upper fixing portion 23A extending rearward, and the other is a front fixing portion 23B extending downward. Become. The arm fixing member 22 is formed of, for example, an elastic body such as a plate-shaped friction spring bent in an L-shape in a side view, and one end (upper rear edge side) of the arm fixing member 22 is fixed to an upper side of the base end portion 23. While being connected to the portion 23A, the multiple ends (lower front edge side) of the arm fixing member 22 are connected to the front fixing portion 23B of the base end portion 23.

  The arm body 21 has an arm portion 24 extending forward from the base end portion 23. The arm portion 24 is one of the right and left edges of the upper fixing portion 23A of the base end portion 23 and is fixed to the front side. It extends forward from the front surface of the portion 23B. The base end portion 23 of the arm body 21 has an upper locking portion 23X protruding upward at a rear edge of the upper fixing portion 23A, and a front locking portion 23Y protruding forward at a lower edge of the front fixing portion 23B. Having. That is, the base end portion 23 of the arm main body 21 has an upper fixing portion 23A having a hook-shaped upper locking portion 23X on the rear edge and a front locking portion 23Y having a hook shape on the lower edge when viewed from the side. The front fixing portion 23B is configured to be branched.

  The arm fixing member 22 includes a rear plate portion 22A extending upward from a rear lower end, and a lower plate portion 22B extending forward from a lower edge of the rear plate portion 22A. An upper locking portion 22X bent in an L-shape is provided on the upper edge, and a front locking portion 22Y bent in an L-shape is provided on a front edge of the lower plate portion 22B. The arm fixing member 22 has a vertically intermediate portion of the rear plate portion 22A protruding forward, and a front and rear halfway portion of the lower plate portion 22B protrudes upward, so that the rear plate portion 22A and the lower plate portion 22B are connected to each other. The connecting portion is formed in a U-shape in side view. Further, the upper locking portion 22X is configured to be bent downward after extending forward from the upper edge of the rear plate portion 22A, and to be formed after the front locking portion 22Y extends upward from the front edge of the lower plate portion 22B. It is configured to bend backward.

  The arm main body 21 is attached to the arm driving vibration unit 1 such that the base end portion 23 contacts a part of the outer peripheral surface of the arm driving shaft 12. At this time, in the base end portion 23 of the arm body 21, the lower surface of the upper fixed portion 23A contacts the upper surface of the arm drive shaft 12, and the rear surface of the front fixed portion 23B of the base end portion 23 contacts the front surface of the arm drive shaft 12. That is, the arm main body 21 is attached to the arm driving vibration unit 1 such that the base end portion 23 covers the upper surface and the front surface of a part of the arm driving shaft 12 in the left-right direction. The rear edge of the upper fixing portion 23A protrudes rearward from the rear edge of the arm driving shaft 12, and the lower edge of the front fixing portion 23B protrudes below the lower edge of the arm driving shaft 12.

  The arm fixing member 22 is attached to the arm driving vibration unit 1 to which the arm main body 21 is attached so as to cover the exposed outer peripheral surface of the arm drive shaft 12 covered by the base end 23. At this time, the arm fixing member 22 causes the front surface of the protruding portion of the rear plate portion 22A to abut on the rear surface of the arm drive shaft 12, and causes the upper surface of the protruding portion of the lower plate portion 22B to contact the lower surface of the arm drive shaft 12. That is, the arm fixing member 22 is attached to the arm driving vibration unit 1 so as to cover the rear surface and the lower surface of the portion of the arm drive shaft 12 covered by the base end portion 23 of the arm body 21. Further, the arm fixing member 22 is configured such that the upper edge of the rear plate portion 22A protrudes upward from the upper surface of the base end portion 23 of the arm fixing member 22 so that the upper locking portion 22X becomes the upper locking portion 23X of the base end portion 23. On the other hand, the front edge of the lower plate portion 22B is projected forward from the front surface of the base end portion 23 of the arm fixing member 22 so that the front locking portion 22Y is locked to the front locking portion 23Y of the base end portion 23. .

  The arm main body 21 is configured such that the upper locking portion 22X and the front locking portion 22Y at both ends of the arm fixing member 22 are hooked on the upper locking portion 23X and the front locking portion 23Y at both ends of the base end portion 23, respectively. Then, the arm drive shaft 12 is pressed by the two contact portions, and a frictional force is generated between the arm drive shaft 12 and the arm drive shaft 12. That is, the arm body 21 is attracted in the direction of the arm drive shaft 12 by the arm fixing member 22, and frictional force between the arm drive shaft 12 and the two surfaces (upper surface and front surface) in contact with the arm drive shaft 12. Generate. In this way, the movable gripping arm 2 in which the arm body 21 and the arm fixing member 22 are combined is brought into a state of being frictionally engaged with the arm driving vibration unit 1.

  The base end 23 of the arm main body 21 serving as a moving body covers a part of the outer periphery of the arm driving vibration unit 1 when viewed from the axial direction of the arm driving vibration unit 1, that is, the arm driving vibration unit 1 It has a shape that covers a part of the outer periphery of the arm driving vibration unit 1 on a plane perpendicular to the axial direction. Then, the base end 23 is made to extend along the outer periphery of the arm driving vibration unit 1 and both ends of the base end 23 are connected by an arm fixing member 22 which is an elastic body, so that the arm main body 21 is connected to the arm driving vibration unit 1. Is engaged. That is, the base end portion 23 of the arm main body 21 is installed so as to cover the front side and the upper surface of the arm drive shaft 12 so as to cover from above the front side of the arm drive shaft 12. Thereafter, the arm fixing member 22 is expanded so that both ends of the base end portion 23 are sandwiched from below the rear side of the arm driving shaft 12 so that the upper locking portion 23X and the front locking portion 23Y are respectively connected to the upper locking portion 22X and The front locking portion 22 </ b> Y is locked, and the base end portion 23 of the arm body 21 is frictionally engaged with the arm drive shaft 12.

  As described above, the movable gripping arm 2 is installed in the arm driving vibration unit 1 so as to sandwich the arm driving shaft 12 between the base end portion 23 of the arm main body 21 and the arm fixing member 22 which is an elastic body. The movable gripping arm 2 can be easily incorporated into the vibration unit 1 for use, and the movable gripping arm 2 can be frictionally engaged with the vibration unit 1 for arm driving with an appropriate force. At this time, by changing the elastic force of the arm fixing member 22, the frictional force of the movable gripping arm 2 with respect to the arm driving vibration unit 1 may be changed. By changing the contact area, the frictional force of the movable gripping arm 2 on the arm driving vibration unit 1 may be changed.

  Further, the movable gripping arm 2 has a configuration in which the arm portion 24 of the arm body 21 is extended forward, but the arm drive shaft 12 is formed in a quadrangular prism shape, and the base end portion 23 of the arm body 21 and By configuring the arm fixing member 22 to have an L-shape, the rotation of the movable gripping arm 2 with respect to the arm driving vibration unit 1 due to the rotational moment by the arm portion 24 can be restricted. That is, the base end portion 23 of the arm body 21 and the arm fixing member 22 abut against each other while pressing the outer peripheral surface of the arm drive shaft 12, so that rotation of the arm body 21 with respect to the arm drive shaft 12 can be prevented. At this time, the base end portion 23 of the arm body 21 and the arm fixing member 22 hold the front and rear sides of the arm drive shaft 12 by the front fixing portion 23B and the rear plate portion 22A, and the upper fixing portion 23A and the lower plate portion 22B. By holding the upper and lower sides of the arm drive shaft 12 with each other, the arm drive shaft 12 is frictionally engaged with the arm drive shaft 12.

  As described above, the arm driving vibration unit 1 frictionally engaged by inserting the movable gripping arm 2 into the arm driving shaft 12 is moved in one direction (upward) with respect to the fixed frame 32 of the housing 3. And is placed on the fixed frame 32. At this time, the arm driving vibration unit 1 to which the movable gripping arm 2 is attached is fixed on the fixed frame 32 by bonding with an adhesive 33 or the like. That is, after the adhesive 33 made of an insulating material is applied to the support pieces 32A and 32B serving as the left and right side walls of the fixed frame 32, the arm driving vibration unit 1 with the movable gripping arm 2 engaged is moved above the housing 3. And both ends of the arm driving vibration unit 1 are placed on the support pieces 32A and 32B. At this time, by pressing the arm driving vibration unit 1 from above, the arm driving vibration unit 1 is fixed on the fixed frame 32 of the housing 3 by the adhesive 33. Accordingly, the arm driving vibration unit 1 is extremely stably fixed to the fixed frame 32 of the housing 3 and, at the same time, the arm driving vibration unit 1 is Direction), the ease of assembly can be improved in both manual and automatic assembly. Further, as the adhesive 33, an adhesive such as epoxy, urethane, rubber, silicon, cyanoacrylate, and polyimide can be used, and can be appropriately selected according to the specifications and use of the driving device. Further, the adhesive 33 is appropriately selected from various types such as a room temperature curing type, a thermosetting type, and a light curing type according to the assembly process.

  That is, the arm driving vibration unit 1 to which the movable gripping arm 2 is assembled is provided with the arm driving shaft 12 and the arm on the support pieces 32A and 32B serving as convex portions provided along the outer circumferences of two sides of the fixed frame 32, respectively. The drive piezoelectric element 11 is fixed so as to be mounted thereon. The arm drive vibration unit 1 is fixed to the fixed frame 32 by applying a required amount of adhesive 33 to the support pieces 32A and 32B of the fixed frame 32, and positioning the arm drive vibration unit 1 with a positioning jig. The arm drive shaft 12 and the arm driving piezoelectric element 11 are bonded and fixed to the fixed frame 32 by pressing the fixed frame 32. When the arm driving vibration unit 1 is bonded to the fixed frame 32 in this manner, the arm driving vibration unit 1 may be held in a state where the position and the posture of the arm driving vibration unit 1 with respect to the fixed frame 32 are fixed. It is not limited to pressing the unit 1. Then, by attaching the arm driving vibration unit 1 to the housing 3 with the adhesive 33, the mounting position of the arm driving vibration unit 1 is set to a position that is optimal with respect to the movement trajectory, position, and posture of the movable gripping arm 2. Can be adjusted. In addition, as a method of fixing the arm driving vibration unit 1 to the fixing frame 32, a fixing method such as ultrasonic welding may be used in addition to the above-described fixing method by adhesion.

  The housing 3 has a fixed frame 32 which is an outer peripheral wall standing upright from the outer peripheral edge of the bottom surface 31, and the left and right side walls of the fixed frame 32 serve as support pieces 32 </ b> A and 32 </ b> B. Support the left and right ends of the That is, one end of the arm driving piezoelectric element 11 is fixed on the support piece 32B with the adhesive 33, while one end of the arm drive shaft 12 is fixed on the support piece 32B with the adhesive 33. The elastic coefficient of the adhesive 33 is lower than the elastic coefficient of a material (for example, a metal or a fiber-reinforced resin) constituting the housing 3. Accordingly, since the adhesive 33 functions as an elastic cushioning material, one end of the arm driving piezoelectric element 11 can be displaced with respect to the support piece 32A within the range of the elasticity of the adhesive 33, and the arm driving shaft One end of 12 can be displaced with respect to the support piece 32A. Therefore, the arm driving vibration unit 1 has a degree of freedom (6 degrees of freedom) that can be displaced with respect to the housing 3 not only in the three-axis directions of the up-down direction, the left-right direction, and the front-back direction but also in the three rotation directions with respect to the three axes. ). Therefore, even if an external force is applied to the housing 3, the external force is absorbed by the adhesive 33, and the influence of the external force on the arm driving vibration unit 1 can be suppressed. The movable gripping arm 2 that moves on the arm driving vibration unit 1 thus made can perform a stable and precise operation with respect to the fixed frame 32.

  The casing 3 is configured such that the height of the front side wall 32C and the rear side wall 32D of the fixed frame 32 is higher than the support pieces 32A and 32B serving as left and right side walls. At this time, the upper ends of the front side wall 32C and the rear side wall 32D are higher than the upper end of the movable gripping arm 2 (the upper end of the arm fixing member 22) engaged with the arm driving vibration unit 1. Thus, when the housing 3 is covered with the U-shaped (U-shaped) cover 4 having the left and right side walls 42 and 43 suspended downward from the left and right side edges of the ceiling surface 41, the ceiling surface of the cover 4 A gap can be provided between the lower surface of the movable holding arm 41 and the upper end of the movable holding arm 2 to prevent interference, and the movable holding arm 2 can slide left and right with respect to the arm driving vibration unit 1.

  When the cover 4 is put on the housing 3 from above, the cover 4 has a lower surface on the front edge side of the ceiling surface 41 abutting on the upper end of the front wall 32C of the housing 3 and a lower surface on the rear edge side of the ceiling surface 41 is rearward of the housing 3. It contacts the upper end of the side wall 32D. At this time, by covering the housing 3 to which the arm driving vibration unit 1 is fixed from above with the cover 4, the front and rear of the space 34, which is vertically covered by the bottom surface 31 of the housing 3 and the ceiling surface 41 of the cover 4. The left and right sides are surrounded by front and rear side walls 32C and 32D of the housing 3 and left and right side walls 42 and 43 of the cover 4. In the space 34 surrounded by the housing 3 and the cover 4, the arm driving vibration unit 1 fixed and supported by the support pieces 32 </ b> A and 32 </ b> B of the housing 3 and the movable gripping arm 2 It is arranged to extend left and right in a state of frictional engagement. The right and left width of the arm driving vibration unit 1 is configured to be shorter than the left and right width of the housing 3, and the right end side surface of the arm driving vibration unit 1 (arm driving piezoelectric element 11) is the outer side surface (right side) of the support piece 32 </ b> B. Surface), and the left end side surface of the arm driving vibration unit 1 (arm drive shaft 12) is located inside (right side) of the outer side surface (left side surface) of the support piece 32A. . This prevents the arm driving vibration unit 1 from interfering with the housing 3 or the cover 4 due to the left-right vibration by the arm driving vibration unit 1 or the vibration about the vertical axis or the front-back direction as the rotation axis, Damage to the arm driving vibration unit 1 or the housing 3 and the cover 4 can be prevented.

  The housing 3 has an arm opening 32 </ b> E in which a part of the front side wall 32 </ b> C is cut out, and makes the arm 24 of the arm body 21 protrude to the outside. The arm opening 32E is formed by cutting off the upper left side of the upper edge of the front side wall 32C so that the left-right width is larger than the left-right movement width of the movable gripping arm 2. Are covered by the ceiling surface 41 and the left side wall 42 of the cover 4. Further, the housing 3 has a lead wire opening (introduction portion) 32F in which a part of the rear wall 32D is cut out, and the lead wire connected to the arm driving piezoelectric element 11 of the movable gripping arm 2. 5 is drawn out through the lead wire opening 32F. The lead wire opening 32F is formed by cutting off the upper right side of the upper edge of the rear side wall 32D, and is provided at a position facing the arm drive piezoelectric element 11 on the right end side of the arm drive vibration unit 1. The upper part of the opening 32 </ b> F is covered with the ceiling surface 41 of the cover 4.

  In the arm driving vibration unit 1, the arm driving piezoelectric element 11 has a larger cross section perpendicular to the axial direction of the arm driving vibration unit 1 than the arm driving shaft 12. In the present embodiment, the vertical height of the arm driving piezoelectric element 11 is higher than the vertical height of the arm driving shaft 12, and the upper surface of the arm driving piezoelectric element 11 is higher than the upper surface of the arm driving shaft 12. At this time, the lower surface of the arm driving piezoelectric element 11 and the lower surface of the arm driving shaft 12 are at the same height. Thereby, when the movable gripping arm 2 frictionally engaged with the arm drive shaft 12 moves to the right, the right side of the base end 23 of the arm body 21 contacts the left side of the arm driving piezoelectric element 11. Thus, the rightward displacement of the movable gripping arm 2 is limited. On the other hand, the lower surface of the arm drive shaft 12 is fixed to the upper surface of the left support piece 32A via an adhesive 33. Thereby, when the movable gripping arm 2 frictionally engaged with the arm drive shaft 12 moves to the left, the left side of the base end portion 23 of the arm body 21 is fixed to the fixed frame 32 of the housing 3 (the right side of the support piece 32A). (A), the leftward displacement of the movable gripping arm 2 is limited.

  In the arm driving vibration unit 1, the vertical height of the arm driving piezoelectric element 11 and the arm driving shaft 12 may be the same, and the front and rear widths may be different. That is, by making the front-rear width of the arm driving piezoelectric element 11 wider than the front-rear width of the arm driving shaft 12, the right side of the base end 23 of the arm main body 21 abuts the left side of the arm driving piezoelectric element 11. Thus, the rightward displacement of the movable gripping arm 2 is limited. That is, at least one of the outer peripheral surfaces (front and rear surfaces and upper and lower surfaces) of the arm driving piezoelectric element 11 is configured to protrude from the outer peripheral surface of the arm driving shaft 12, and the projecting portion of the arm driving piezoelectric element 11 is formed. The right side of the base end 23 of the arm body 21 abuts the left side of the arm body 21 to limit the rightward displacement of the movable gripping arm 2. When the lower surface of the arm driving piezoelectric element 11 projects below the lower surface of the arm driving shaft 12, the height of the support piece 32A for fixing the arm driving shaft 12 is adjusted to the height for supporting the arm driving piezoelectric element 11. By making the height lower than the height of the piece 32 </ b> B, the arm driving vibration unit 1 can be installed parallel (horizontally) to the bottom surface 31 of the housing 3.

  The housing 3 is provided with a lead wire opening (introduction portion) 32F for introducing a lead wire 5 electrically connected to the arm driving piezoelectric element 11 from the outside, and extends along the moving direction of the movable gripping arm 2. Thus, the lead wire opening 32 </ b> F is provided closer to the arm driving piezoelectric element 11 than the boundary between the arm driving piezoelectric element 11 and the arm driving shaft 12. The arm driving piezoelectric element 11 is composed of, for example, a laminated piezoelectric element in which a piezoelectric material is laminated in the axial direction (lateral direction) of the arm driving vibration unit 1 and has a pair of electrodes on its front and rear surfaces. are doing. Each of the two lead wires 5 is connected to each of a pair of front and rear electrodes of the arm driving piezoelectric element 11 by a solder or a conductive adhesive, and the voltage waveform for driving the arm driving piezoelectric element 11 is changed. Is applied from an external drive circuit via two lead wires 5. The rear wall 32D of the fixed frame 32 is provided with a lead wire opening 32F formed of a shallow notch. The lead wire opening 32F is connected to the arm driving piezoelectric element 11 through the lead wire opening 32F. The two lead wires 5 are led out.

  In the fixed frame 32 of the housing 3, the lead wire opening 32 </ b> F in the rear wall 32 </ b> D is provided at a position facing the rear surface of the arm driving piezoelectric element 11. Accordingly, the distance between the electrodes provided on the front and rear surfaces of the arm driving piezoelectric element 11 and the lead wire opening 32F is reduced, and the two lead wires 5 connected to the arm driving piezoelectric element 11 can be shortened. . Further, since the lead wire opening 32F is opened above the upper surface of the arm driving piezoelectric element 11, the bent portion of the lead wire 5 connected to the arm driving piezoelectric element 11 can be reduced, and the lead wire can be reduced. 5 can be prevented. Further, by setting the left edge of the lead wire opening 32 </ b> F as a boundary position between the arm driving piezoelectric element 11 and the arm driving shaft 12 in the arm driving vibration unit 1, the outer side of the moving width of the movable gripping arm 2. Since the lead wire 5 can be wired on the right side, contact between the movable gripping arm 2 and the lead wire 5 can be prevented, and damage to the lead wire 5 and interference with movement of the movable gripping arm 2 can be prevented.

  When the fluctuating voltage waveform is applied, the arm driving piezoelectric element 11 expands and contracts in the axial direction of the arm driving vibration unit 1 to induce vibration in the axial direction (longitudinal direction) of the arm driving shaft 12. The movable gripping arm 2 can be moved in the axial direction of the arm driving shaft 12 by setting the vibration in the arm driving vibration unit 1 to a vibration having an asymmetric period on the time axis. At this time, the piezoelectric element 11 for driving the arm is supplied with an electric signal having a voltage waveform having an asymmetric period of oscillation in the time axis direction, such as a sawtooth wave, an asymmetric triangular wave, and an asymmetric sine wave. In addition, the voltage waveform by the asymmetrical triangular wave and the asymmetrical sine wave is generated by distorting a triangular wave or a sine wave having symmetry in the time axis direction in the time axis direction to give asymmetry. The arm driving piezoelectric element 11 is not limited to a stacked piezoelectric element, but may be a bulk piezoelectric element. In the arm driving vibration unit 1, a vibrator such as a magnetostrictive element is connected to the arm driving shaft 12 instead of the arm driving piezoelectric element 11, and the vibration to the arm driving shaft 12 is excited by the vibrator. It is good also as what makes it.

  FIG. 18 is a diagram showing the operation of the gripper 200A, and is a plan view with the cover 4 removed to clarify the state of the movable gripping arm 2. As shown in FIG. 18, as described above, the gripper 200 </ b> A bends the tip of the arm portion 24 of the arm body 21 in the movable gripping arm 2 inward (to the left), and is symmetrical with the tip of the arm portion 24. Is protruded from the rear side wall 32 </ b> D of the fixed frame 32 in the housing 3. The gripper moves the movable gripping arm 2 right and left by the vibration of the arm driving vibration unit 1, thereby bringing the tip of the arm section 24 and the tip of the fixed gripping arm 25 into and out of contact with each other. FIG. 18A shows a state in which the movable gripping arm 2 is positioned at the leftmost position, the arm unit 24 and the fixed gripping arm 25 are opened, and the movable gripping arm 2 is moved rightward from the opened state. Then, the tip of the arm 24 is brought closer to the tip of the fixed gripping arm 25, and the arm 24 and the fixed gripping arm 25 are closed.

  As shown in FIG. 18B, when the tip of the arm portion 24 and the tip of the fixed gripping arm 25 come into contact with each other, the base end 23 of the arm main body 21 is connected to the arm driving vibration unit 1 for arm driving. The movable gripping arm 2 has not yet reached the left end of the piezoelectric element 11 (the boundary between the arm driving piezoelectric element 11 and the arm driving shaft 12), and is in a state where it can move further to the right.

  The arm body 21 is configured such that the thickness of the arm portion 24 in the left-right direction is reduced and the arm portion 24 can be bent, and as shown in FIG. The movable gripping arm 2 can be further moved to the right while keeping the contact between the movable gripping arm 2 and the movable gripping arm 2. Thus, by making the arm portion 24 flexible, the elastic force due to the bending of the arm portion 24 increases the strength of the gripping force between the arm portion 24 and the fixed gripping arm 25. Further, by bending the arm portion 24 so that the arm portion 24 and the fixed gripping arm 25 are closed, when the arm portion 24 and the fixed gripping arm 25 are opened, the elastic force due to the bending of the arm portion 24 is reduced. The movable gripping arm 2 moves smoothly in the direction in which the arm 24 moves away from the fixed gripping arm 25. Further, when assembled as a gripper, the positioning of the tip of the fixed gripping arm 25 and the tip of the arm body 21 is facilitated. At this time, the base end 23 of the arm body 21 may be inclined in accordance with the bending of the arm 24. In the present example, the left and right widths of the arm portion 24 in the arm body 21 are made thinner so that the arm portion 24 is bent. However, while the base end portion 23 in the arm body 21 is made of a highly rigid material, The arm portion 24 may be made of a flexible material so that the arm portion 24 can be bent.

  Next, the positional relationship between the imaging region of the imaging device 300 and the grip arm of the gripper 200 will be described with reference to FIG. FIGS. 19 (A-1) and (A-2) show a mode in which both gripping arms 220 are movable, and FIGS. 19 (B-1) and (B-2) show one gripping arm 25 fixed and the other gripping arm 220 fixed. 1 shows a state in which the gripping arm 2 is movable.

  The modes shown in FIGS. 19A-1 and 19A-2 correspond to the gripper module 100 described with reference to FIGS. At the stage of searching for the gripping target 600, the left and right gripping arms 220 are made to stand by outside the image acquisition area 350 of the imaging device 300 as shown in FIG. An autofocus area is set in the entire image acquisition area 350, and an object (grasping object 600) reflected in the image acquisition area 350 is focused. Then, after the tip of the grip arm 220 is adjusted to the height position of the found grip target 600, the left and right grip arms 220 are moved in the closing direction as shown in FIG. 19A-2. Then, the object 600 to be gripped is gripped. Accordingly, when searching for the grip target object 600 and when adjusting the height position of the grip arm 220, the work can be efficiently performed in a state where the grip target object 600 is focused without being focused on the grip arm 220.

  In FIGS. 19A-1 and 19A-2, an autofocus area is set in the entire image acquisition area 350, but an autofocus area may be provided in the center of the image acquisition area 350. . In this case, the left and right grip arms 220 may be made to stand by in the image acquisition area 350 outside the autofocus area.

  The modes shown in FIGS. 19 (B-1) and (B-2) correspond to the gripper module having the gripper 200A described with reference to FIGS. An autofocus area 351 is set at the center of the image acquisition area 350 of the imaging device 300, and the tip of the fixed gripping arm 25 is located inside the image acquisition area 350 outside the autofocus area 351. At the stage of searching for the gripping target object 600, as shown in FIG. 19 (B-1), the movable gripping arm 2 is made to stand by outside the image acquisition area 350, and the object reflected in the auto focus area 351 (the gripping target object 600). The camera is in focus.

  Then, after the distal ends of the gripping arms 2 and 25 are adjusted to the height position of the gripping target object 600 found, the autofocus area 351 is enlarged as shown in FIG. The section 24 is moved in the closing direction (toward the fixed gripping arm 25) to grip the gripping target 600. Thereby, when searching for the grip target object 600 and when adjusting the height position of the grip arm, the work can be efficiently performed with the focus on the grip target object 600 without being focused on the grip arms 2 and 25. . Note that the size of the autofocus area 351 may be the same at the time of searching for the object 600 to be gripped (FIG. 19B-1) and at the time of gripping (FIG. 19B-2).

  In addition, in the modes shown in FIGS. 19B and 19B, since the distal end of the fixed gripping arm 25 is located in the image acquisition area 350, the gripping target is held at the distal end of the fixed gripping arm 25. It is possible to poke, move, or rotate the object 600 to change its direction.

  In addition, instead of the gripper arm of the gripper, a needle-like member such as a capillary is mounted, and the needle-like member is attached to the object to be punctured while viewing the image acquired by the imaging device 300 focusing on the object to be punctured such as cells. It is also possible to perform a puncturing operation.

  The embodiments of the present invention have been described above, but the materials, shapes, arrangements, numbers, and the like in the above embodiments are merely examples, and the present invention can be embodied in various other ways. For example, the gripper device to which the gripper module of the present invention is attached may be a one-axis operation drive device or a two-axis operation drive device other than the three-axis operation drive device, or a drive device that performs a rotating operation. It may be combined with.

  Further, in the gripper module of the present invention, the gripper 200 and the two imaging devices 300 may be attached to the pedestal member 400 to acquire a stereo image. In this case, for example, as shown in FIGS. 20A and 20B, the configuration of the gripper module 100 of the above embodiment is opposite to the gripper 200 with the imaging device 300 with the optical axis L along the vertical direction interposed therebetween. A configuration in which a second imaging device 300A having an optical axis LA obliquely passing through the work area of the gripper 200 is added to the position on the side. Thereby, the grasping target object is searched using the acquired image of the imaging device 300, and when the gripper 200 grasps the grasping target object, the grasping operation can be performed while viewing the stereo images of the imaging device 300 and the imaging device 300A. . In this case, by disposing the lens driving device 310 of the imaging devices 300 and 300A in a direction parallel to the moving direction (opening / closing direction) of the gripping arm 220 with respect to each imaging device 330, the gripper 200 and the imaging devices 300 and 300A are arranged. By disposing the grippers 300A close to each other, the gripper module can be made compact.

  Further, as shown in FIGS. 20C and 20D, the gripper 200 is arranged so that the gripping arm 220 extends in the up-down direction, and the work area of the gripper 200 is obliquely positioned with the gripper 200 interposed therebetween. Two imaging devices 300, 300 for imaging may be arranged. According to this configuration, the grasping target is searched for using the acquired image of one of the imaging devices 300, and when the gripper 200 grasps the grasping target, the grasping operation is performed while viewing the stereo images of the two imaging devices 300. Can be performed. In this case, as shown in FIG. 20D, in each imaging device 300, the lens driving device 310 is arranged in a direction parallel to the moving direction (opening / closing direction) of the gripping arm 220 with respect to the imaging device 330. Thus, the gripper module and the two imaging devices 300 can be arranged close to each other to make the gripper module compact. In addition, as shown in FIG. 20E, in each imaging device 300, the lens driving device 310 is disposed on the opposite side of the imaging device 330 from the gripper 200, so that the gripper 200 and the two imaging devices 300 are provided. Are arranged close to each other to make the gripper module compact.

DESCRIPTION OF SYMBOLS 1 Arm driving vibration unit 2 Movable holding arm 11 Arm driving piezoelectric element 12 Arm driving shaft 25 Fixed holding arm 100 Gripper module 200, 200A Gripper 210 Arm driving piezoelectric element 211 Arm driving shaft 212 Arm driving vibration unit 220 Holding arm 300 imaging device 300A second imaging device 301 lens 310 lens driving device 311 lens driving piezoelectric element 312 lens driving shaft 313 lens driving vibration unit 314 lens support 315 drive shaft support piece (one support piece)
316 Piezoelectric element support piece (other support piece)
317 Support case 321 Lens barrel 330 Image sensor 334 Lens arrangement hole 400 Base member 501B Telescopic drive (linear motion mechanism)
1000 Gripper L, LA Optical axis

Claims (5)

A gripper having a gripping arm that opens and closes by the vibration of an arm driving piezoelectric element,
An imaging device for imaging a work area of the gripping arm of the gripper;
A gripper module, comprising: a positioning member so that an optical axis of the imaging device passes through the work area; and a pedestal member to which the gripper and the imaging device are attached.   The imaging device according to claim 1, wherein the imaging device includes a lens driving device that moves a lens along the optical axis by vibration of a lens driving piezoelectric element, and an imaging device that receives light passing through the lens. The described gripper module. The lens driving device includes an axial lens driving vibration unit having a lens driving shaft fixed to one end of the lens driving piezoelectric element, and the lens driving device supporting the lens and frictionally engaging the lens driving shaft. A lens support that moves in the axial direction of the shaft, and a support case having a pair of support pieces that support both ends of the lens driving vibration unit,
The gripper module according to claim 2, wherein an end surface of the lens drive shaft is fixed to one of the support pieces.   The gripper moves in the axial direction of the arm drive shaft by frictionally engaging the arm drive vibration unit having a pair of arm drive shafts fixed to both ends of the arm drive piezoelectric element and the arm drive shaft. The gripper module according to any one of claims 1 to 3, comprising a pair of the gripping arms. A gripper module according to any one of claims 1 to 4,
A linear motion mechanism for linearly moving the pedestal member of the gripper module along the optical axis of the imaging device.

Images