JP2020092211A - Positioning method for transfer unit and transfer tray - Google Patents

Abstract

An object of the present invention is to suppress positional errors during transport of a transport tray. A transport unit (1) includes a transport tray (10) containing workpieces and a transport arm (30) for transporting the transport tray (10) to a processing apparatus. The transport tray 10 includes a storage box 11 for workpieces, and an upper lid 20 having a plurality of square through-holes 23, which is installed above the storage box 11 with an insertion area 21 into which a transfer arm 30 is inserted. The transport arm 30 includes a holding member 31 that is inserted into the insertion area 21 and holds the transport tray 10. When the direction in which the holding member 31 is inserted into the insertion area 21 is the X direction, and the direction perpendicular to the X direction is the Y direction. , an X-direction projection 51 formed with a convex curved surface 52 accommodated in the through-hole 23 and varying in height in the X-direction, and a convex curved surface 62 accommodated in the through-hole 23 and varying in height in the Y-direction are formed. Y-direction projections 61 are provided. [Selection drawing] Fig. 6

Description

The present invention relates to a transport unit and a transport tray positioning method.

In factories where automatic transfer systems such as AGV (Automated Guided Vehicle) and OHT (Overhead Hoist Transfer) are installed, the AGV processes the workpieces in the transfer tray. There is used a technique of transporting the transport tray to the processing device by an OHT transport arm installed at the transport spot. Therefore, the applicant of the present invention has proposed a transport tray for containing a workpiece (see, for example, Patent Document 1).

JP, 2018-113410, A

In the factory where the above-mentioned automatic transfer system is installed, for example, the transfer arm of the OHT is inserted between the upper lid of the transfer tray placed on the AGV that has arrived at the transfer spot and the storage box, and the transfer arm is moved to the AGV. Is carried out to the starting position of the transportation of various processing devices.

At this time, the transport tray needs to be accurately transported to the transport start position of the processing apparatus, but a slight error occurs each time at the AGV stop position, so that the transport tray cannot be lifted well even when the transport arm is inserted. There is a problem that the transfer tray is transferred to the processing device with an error in the position of the transfer tray with respect to the transfer arm, and the transfer tray cannot be accurately transferred to the transfer start position on the processing device side.

The present invention has been made in view of the above problems, and an object thereof is to provide a transport unit and a transport tray positioning method capable of suppressing a positional error during transport of the transport tray.

In order to solve the above-mentioned problems and to achieve the object, a transport unit of the present invention is a transport unit including a transport tray in which a workpiece is accommodated, and a transport arm that transports the transport tray to a processing device. Then, the carrying tray is provided with a bottom wall, a top wall, a pair of side walls connecting the bottom wall and the top wall, and a storage box for a workpiece, which is at least composed of the side wall, and an upper portion of the storage box. The transfer arm is provided with an insertion area to be inserted, and has an upper lid having a plurality of quadrangular recesses on a surface facing the upper wall, and a connecting portion that connects the storage box and the upper lid. The arm has a holding means that is inserted into the insertion area to hold the carrying tray, a moving means that holds the holding means so as to be movable in the up-and-down direction and a direction in which the holding box moves forward and backward, and the inserting means of the holding means When the insertion direction into the area is the X direction and the direction orthogonal to the X direction on the plane is the Y direction, the holding means is formed in an area corresponding to the recess of the upper lid and is housed in the recess. The carrying tray is positioned and the projection in the X direction having the convex curved surface whose height changes in the X direction is formed, and the upper surface of the holding means is formed in a region corresponding to the recess of the upper lid. And a Y-direction projection having a convex curved surface whose height changes in the Y-direction and which is housed in the recess to position the transport tray.

In the carrying unit, the carrying tray is provided with a second X-direction projection having a convex curved surface whose height changes in the X direction and a convex curved surface having a height changing in the Y direction. And a second Y-direction protrusion, and the second X-direction protrusion and the second protrusion on the surface of the bottom wall facing the placement unit. A plurality of square-shaped second recesses for accommodating the Y-direction protrusions may be formed.

The method of positioning the carrying tray is such that the carrying tray is inserted into the inserting area of the carrying tray, the carrying arm is raised toward the upper lid, and the inner wall of the recess is brought into contact with the curved surface. Then, the carrying tray is slid and moved, and the recess is fitted to the projection in the X direction and the projection in the Y direction to position the carrying tray.

The method of positioning the transport tray includes: a holding step of holding the transport tray with the transport arm; and a step of bringing the inner wall of the second recess formed in the bottom wall into contact with the curved surface. A second positioning step of sliding the tray and fitting the second recess to the second projection in the X direction and the projection in the second Y direction to position the transport tray. To do.

The invention of the present application has an effect that it is possible to suppress an error in the position of the transport tray during transport.

FIG. 1 is an explanatory diagram showing a schematic configuration of factory equipment in which the transport unit according to the first embodiment is used. FIG. 2 is a perspective view illustrating a configuration example of the transport tray of the transport unit according to the first embodiment. FIG. 3 is a plan view showing the through holes of the transport tray shown in FIG. FIG. 4 is a perspective view showing a configuration example of a transfer arm of the transfer unit according to the first embodiment. FIG. 5 is a cross-sectional view showing side surfaces of the X-direction protrusion and the Y-direction protrusion of the transfer arm shown in FIG. FIG. 6 is a perspective view showing a state in which the transport tray and the transport arm of the transport unit according to the first embodiment are positioned. FIG. 7 is another perspective view showing a state where the transport tray and the transport arm of the transport unit according to the first embodiment are positioned. FIG. 8 is a flowchart showing the flow of the method of positioning the transport tray according to the first embodiment. FIG. 9 is a side view schematically showing the storage box and the transfer arm in the inserting step of the method of positioning the transfer tray shown in FIG. FIG. 10 is a cross-sectional view showing an example of the relative positions of the projections in the X direction and the projections in the Y direction and the through holes during the positioning step of the method of positioning the transport tray shown in FIG. FIG. 11 is a cross-sectional view showing an example of the relative positions of the projections in the X direction and the projections in the Y direction and the through holes positioned in the positioning step of the method of positioning the transport tray shown in FIG. FIG. 12 is a side view schematically showing a state in which the transport unit according to the first embodiment raises the transport tray. FIG. 13 is a perspective view showing a configuration example of the transport tray of the transport unit according to the second embodiment. FIG. 14 is a perspective view showing a mounting portion of the processing apparatus to which the transport tray of the transport unit according to the second embodiment is transported. FIG. 15 is a flowchart showing the flow of the method of positioning the carrying tray according to the second embodiment. 16 is a side view schematically showing a second positioning step of the method of positioning the carrying tray shown in FIG. FIG. 17 shows the relative positions of the second X-direction protrusion and the second Y-direction protrusion and the second through hole in the second positioning step of the method of positioning the transport tray shown in FIG. It is sectional drawing which shows an example.

Modes (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the embodiments below. Further, the constituent elements described below include those that can be easily conceived by those skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be appropriately combined. In addition, various omissions, substitutions, or changes in the configuration can be made without departing from the scope of the present invention.

[Embodiment 1]
The transport unit according to the first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is an explanatory diagram showing a schematic configuration of factory equipment in which the transport unit according to the first embodiment is used. FIG. 2 is a perspective view illustrating a configuration example of the transport tray of the transport unit according to the first embodiment. FIG. 3 is a plan view showing the through holes of the transport tray shown in FIG. FIG. 4 is a perspective view showing a configuration example of a transfer arm of the transfer unit according to the first embodiment. FIG. 5 is a cross-sectional view showing side surfaces of the X-direction protrusion and the Y-direction protrusion of the transfer arm shown in FIG. FIG. 6 is a perspective view showing a state in which the transport tray and the transport arm of the transport unit according to the first embodiment are positioned. FIG. 7 is another perspective view showing a state where the transport tray and the transport arm of the transport unit according to the first embodiment are positioned.

(Transport unit)
The transport unit 1 according to the first embodiment is used in the factory equipment 100 shown in FIG. As shown in FIG. 1, the factory equipment 100 includes a processing device 101 that processes the workpiece 200, and an automatic transfer system 102 that transfers the workpiece between the processing devices 101 and the like. The processing device 101 is a device that performs various types of processing on the workpiece 200, and includes, for example, a cutting device that cuts the workpiece 200, a laser processing device that laser-machines the workpiece 200, and the workpiece 200. It is a grinding device for grinding, but the present invention is not limited thereto. Note that FIG. 1 shows only one processing device 101 and omits the other.

Further, in the first embodiment, the workpiece 200 is a wafer such as a disc-shaped semiconductor wafer or an optical device wafer whose substrate is silicon, sapphire, gallium arsenide, or the like, but in the present invention, an inorganic material substrate, A ductile resin material substrate, a ceramics substrate, a glass substrate, or the like may be used. In the first embodiment, the workpiece 200 includes a device region in which a device is formed in each of a plurality of regions on the surface of the substrate defined by a plurality of intersecting planned dividing lines, and a device region surrounding and surrounding the device region. Not provided with a peripheral surplus area. Further, in the present invention, the work piece 200 may be a so-called TAIKO (registered trademark) wafer in which the back surface side of the device region is thinned to form a circular concave portion and an annular convex portion is formed in the outer peripheral excess area.

As shown in FIG. 1, the automatic transfer system 102 includes an AGV (Automated Guided Vehicle) 103, an OHT (Overhead Hoist Transfer) 104, and a control unit 105. The AGV 103 is an unattended automatic device in the factory equipment 100. By placing the transfer tray 10 containing the workpiece 200 of the transfer unit 1 on the upper surface, the AGV 103 transfers in advance in the factory equipment 100. The workpiece 200 is conveyed between the spots.

The OHT 104 is movable along a rail 106 installed on the ceiling or the like of the factory equipment 100, and in the first embodiment, the workpiece between the AGV 103 stopped at the transfer spot and the mounting portion 107 of the processing apparatus 101. The transport tray 10 containing 200 is transported.

In the first embodiment, as shown in FIG. 1, the transport unit 1 includes a transport tray 10 in which a workpiece 200 is housed, and the transport tray 10 from the AGV 103 stopped at a transfer spot to a mounting portion 107 of the processing apparatus 101. And a transfer arm 30 for transferring.

As shown in FIG. 2, the transport tray 10 includes a storage box 11 that stores the workpiece 200, an upper lid 20, and a connecting portion 24. The housing box 11 is composed of at least a flat plate-shaped bottom wall 12, a flat plate-shaped upper wall 13 facing the bottom wall 12 at a distance, and a pair of side walls 14 connecting the bottom wall 12 and the upper wall 13. It The bottom wall 12 and the top wall 13 are formed in a quadrangle in plan view. The pair of side walls 14 are opposed to each other with a space therebetween and connect both ends of the bottom wall 12 and the upper wall 13 in the X direction. The X direction is parallel to the bottom wall 12 and the top wall 13. In the first embodiment, the transport tray 10 is located on the front side in FIG. 2, and the workpiece 200 is loaded and unloaded through the opening 15 surrounded by the bottom wall 12, the upper wall 13, and the pair of side walls 14. Further, in the embodiment, the pair of side walls 14 are each formed with the step portion 16 that supports the workpiece 200 from the bottom wall 12 with a space therebetween. In the first embodiment, the bottom wall 12 and the upper wall 13 are formed in a quadrangular planar shape, but in the present invention, the configuration of the bottom wall 12 and the upper wall 13 may be circular or polygonal. It is not limited to the form 1.

The upper lid 20 is formed in a flat plate shape having a planar shape smaller than that of the bottom wall 12 and the upper wall 13, and is installed at an upper portion of the housing box 11, that is, an insertion area 21 into which the transfer arm 30 is inserted, with at least the upper wall 13. The lower surface 22 opposed to the through hole 23 has a plurality of quadrangular recesses as through holes 23. The upper lid 20 is arranged in parallel with the upper wall 13 and has a quadrangular planar shape like the bottom wall 12 and the upper wall 13. Although the through hole 23 penetrates the upper lid 20, in the present invention, the through hole 23 may be a concave recess from the lower surface 22 without penetrating the upper lid 20. Further, as shown in FIG. 3, the through hole 23 has a quadrangular planar shape with two sides parallel to the X direction and two sides parallel to the Y direction orthogonal to the X direction. The Y direction is parallel to the bottom wall 12 and the top wall 13. Further, in the first embodiment, three through holes 23 are provided at both ends in the Y direction of the upper lid 20 with a space in the X direction. In the first embodiment, the upper lid 20 is formed in a flat plate shape having a planar shape smaller than the bottom wall 12 and the upper wall 13, but in the present invention, the configuration of the upper lid 20 is substantially the same as the bottom wall 12 and the upper wall 13. However, it is not limited to that of the first embodiment.

The connecting portion 24 connects the upper wall 13 of the storage box 11 and the upper cover 20, and in the first embodiment, one end is attached to the upper wall 13 of the storage box 11 and the other end is attached to the upper cover 20. However, in the present invention, the structure of the connecting portion 24 is not limited to that of the first embodiment.

As shown in FIG. 4, the transfer arm 30 includes a holding member 31 that is a holding unit and a moving unit 40 that is a moving unit. The holding member 31 is inserted between the insertion area 21, that is, between the upper wall 13 of the storage box 11 and the upper lid 20, and holds the transport tray 10. In the first embodiment, the holding member 31 has a pair of parallel portions that are parallel to the X direction and spaced from each other in order to suppress interference with the connecting portion 24 when the holding member 31 is inserted into the insertion area 21. It is provided with 32 and a connecting portion 33 that connects one ends of the parallel portions 32 on the rear side in the X direction, and has a U-shaped planar shape. In the first embodiment, the transfer arm 30 includes the pair of parallel portions 32 and the connecting portion 33, but in the present invention, the transfer arm 30 does not need to include the pair of parallel portions 32 and the connecting portion 33. However, it is not limited to that of the first embodiment.

The moving unit 40 holds the holding member 31 movably in the up-down direction and the X direction, which is the direction in which the holding member 31 moves forward and backward with respect to the storage box 11. The moving unit 40 supports the upper extending portion 41 extending upward from the center of the connecting portion 24 of the holding member 31, the upper extending portion 41 movably in the vertical direction, and the lifting unit 42 attached to the OHT 104. (Shown in FIG. 1). In the moving unit 40, the lifting unit 42 holds the holding member 31 movably in the vertical direction, and the OHT 104 moves on the rail 106 to hold the holding member 31 movably in the X direction with respect to the storage box 11. . In the first embodiment, the X direction is the insertion direction of the holding member 31 into the insertion area 21. The Y direction is a direction orthogonal to the X direction on a horizontal plane.

Further, the transfer arm 30 includes a projection 51 in the X direction and a projection 61 in the Y direction, as shown in FIG. The projection 51 in the X direction and the projection 61 in the Y direction are attached to the upper surface 34 of the holding member 31 and are formed to be convex from the upper surface 34 of the holding member 31. The X-direction protrusion 51 and the Y-direction protrusion 61 are regions corresponding to the through holes 23 of the upper surface 34 of the holding member 31, that is, regions where the holding member 31 is positioned in the insertion area 21 and overlap the through holes 23 of the upper surface 34. Is formed in. The projections 51 in the X direction and the projections 61 in the Y direction correspond to the through holes 23, and overlap the corresponding through holes 23 when the holding member 31 is positioned in the insertion area 21. In the first embodiment, two X-direction protrusions 51 and two Y-direction protrusions 61 are provided.

The projection 51 in the X direction extends linearly along the X direction in a plan view of the holding member 31, and as shown in FIG. 5, a convex curved surface 52 whose height from the upper surface 34 changes in the X direction. Are formed. The curved surface 52 of the protrusion 51 in the X direction has the highest height from the upper surface 34 at the center in the X direction, and the height from the upper surface 34 gradually decreases toward the end in the X direction. Although the curved surface 52 is formed in a semicircular cross section in the first embodiment, the curved surface 52 is not limited to a semicircular cross section in the present invention. The two protrusions 51 in the X direction are arranged at intervals in the Y direction, and in the first embodiment, they are arranged at the centers of the parallel portions 32 in the X direction.

The protrusion 61 in the Y direction extends linearly along the Y direction in a plan view of the holding member 31, and a convex curved surface 62 whose height from the upper surface 34 changes in the Y direction is formed. The curved surface 62 of the protrusion 61 in the Y direction has the highest height from the upper surface 34 at the center in the Y direction, and the height from the upper surface 34 gradually decreases toward the end in the Y direction. In the first embodiment, the curved surface 62 is formed in a semicircular cross section, but in the present invention, the curved surface 62 is not limited to a semicircular cross section. The two protrusions 61 in the Y direction are arranged at intervals in the X direction, and in the first embodiment, they are arranged at both ends of the one parallel portion 32 in the X direction.

Further, the length 51-1 (shown in FIG. 5) of the projection 51 in the X direction in the X direction is shorter than the length 23-1 (shown in FIG. 3) of the corresponding through hole 23 in the X direction, and The width of the projection 51 in the Y direction is shorter than the length 23-2 (shown in FIG. 3) of the corresponding through hole 23 in the Y direction. For this reason, the projection 51 in the X direction is housed in the corresponding through hole 23 when the holding member 31 is positioned and raised in the insertion area 21, and positions the transport tray 10 with respect to the holding member 31.

Similar to the X-direction protrusion 51, the Y-direction length 61-1 (shown in FIG. 5) of the Y-direction protrusion 61 corresponds to the Y-direction length 23-2 (shown in FIG. 3) of the corresponding through hole 23. ), the width of the protrusion 61 in the Y direction in the X direction is shorter than the length 23-1 (shown in FIG. 3) of the corresponding through hole 23 in the X direction. For this reason, the protrusion 61 in the Y direction is housed in the corresponding through hole 23 when the holding member 31 is positioned and raised in the insertion area 21, and positions the transport tray 10 with respect to the holding member 31.

In the first embodiment, the X-direction length 51-1 of the X-direction projection 51 and the Y-direction length 61-1 of the Y-direction projection 61 are equal, but the present invention is not limited to this. Further, in the first embodiment, the length 23-1 of the through hole 23 in the X direction is equal to the length 23-2 of the through hole 23 in the Y direction, but the present invention is not limited to this. In addition, in the first embodiment, two X-direction protrusions 51 and two Y-direction protrusions 61 are provided, but in the present invention, one X-direction protrusion 51 and one Y-direction protrusion 61 are provided. And one of the projection 51 in the X direction and the projection 61 in the Y direction, any number of the projections 51, 61 may be provided.

Further, in the first embodiment, since each of the protrusions 51 and 61 has a semicircular cross section, it is manufactured by cutting a cylindrical member.

With such a configuration, in the transport unit 1, when the holding member 31 of the transport arm 30 is positioned in the insertion area 21 and lifted, the projection 51 in the X direction and the projection 61 in the Y direction are released as shown in FIGS. 6 and 7. The transfer tray 10 is housed in the corresponding through hole 23 and positioned with respect to the holding member 31 of the transfer arm 30. At this time, since the projection 51 in the X direction linearly extends in the X direction, the position of the upper lid 20 of the transport tray 10 in the X direction is positioned with respect to the holding member 31, and the projection 61 in the Y direction is set to Y. Since it extends linearly in the direction, the position of the upper lid 20 of the transport tray 10 in the Y direction is positioned with respect to the holding member 31. In the transport unit 1, the projections 51 in the X direction are arranged at intervals in the Y direction, and the projections 61 in the Y direction are arranged at intervals in the X direction. The direction around the axis parallel to the vertical direction of the upper lid 20 of the transport tray 10 with respect to the holding member 31 is positioned.

The control unit 105 controls the above-described components of the factory equipment 100 and the transport unit 1, respectively, and causes the factory equipment 100 and the transport unit 1 to carry out the transport operation of the transport tray 10. The control unit 105 includes an arithmetic processing unit including a microprocessor such as a CPU (central processing unit), a storage unit including a memory such as a ROM (read only memory) or a RAM (random access memory), and an input/output unit. A computer having an interface device. The arithmetic processing unit of the control unit 105 performs arithmetic processing according to a computer program stored in a storage device, and outputs a control signal for controlling the factory equipment 100 and the transport unit 1 via the input/output interface unit to the factory. Output to the above-mentioned components of the equipment 100 and the transport unit 1. The control unit 105 is connected to a display unit (not shown) configured by a liquid crystal display device for displaying the state of the transport operation and images, and an input unit (not shown) used when the operator registers various information. There is. The input unit includes at least one of a touch panel provided on the display unit and an external input device such as a keyboard.

Next, in the present specification, a method of positioning the carrying tray according to the first embodiment will be described with reference to the drawings. FIG. 8 is a flowchart showing the flow of the method of positioning the transport tray according to the first embodiment. The method of positioning the transport tray is a method in which the transport unit 1 positions the transport tray 10 at a predetermined position determined in advance with respect to the holding member 31 of the transport arm 30. In the first embodiment, the transport unit stops at the delivery spot. This is performed when the transport tray 10 is lifted from the AGV 103 that has been removed. As shown in FIG. 8, the method of positioning the transport tray includes an inserting step ST1 and a positioning step ST2.

(Insert step)
FIG. 9 is a side view schematically showing the storage box and the transfer arm in the inserting step of the method of positioning the transfer tray shown in FIG. The inserting step ST1 is a step of inserting the holding member 31 into the inserting area 21 of the transport tray 10. In the insertion step ST1, when the AGV 103 stops at the transfer spot, the control unit 105 positions the holding member 31 of the transfer arm 30 on the rear side in the X direction with respect to the transfer tray 10 supported by the AGV 103, and transfers it to the moving unit 40. The holding member 31 of the arm 30 is lowered. In the inserting step ST1, when the holding member 31 is located on the same plane as the inserting area 21, the lowering of the holding member 31 by the moving unit 40 is stopped. At this time, as shown in FIG. 9, the control unit 105 causes the end of the parallel portion 32 of the holding member 31 on the side away from the connecting portion 33 to face the transport tray 10 along the X direction. Note that the protrusions 51 and 61 are omitted in FIG. 9.

In the insertion step ST1, the control unit 105 causes the moving unit 40 to move the holding member 31 of the transport arm 30 in the X direction, and moves the holding member 31 toward the insertion area 21. In the inserting step ST1, when the holding member 31 is positioned in the inserting area 21, the control unit 105 causes the moving unit 40 to stop the movement of the transport arm 30 in the X direction, and proceeds to the positioning step ST2.

(Positioning step)
FIG. 10 is a cross-sectional view showing an example of the relative positions of the projection in the X direction and the projection in the Y direction and the through hole during the positioning step of the method for positioning the transport tray shown in FIG. FIG. 11 is a cross-sectional view showing an example of the relative positions of the projections in the X direction and the projections in the Y direction, which are positioned in the positioning step of the method of positioning the transport tray shown in FIG. 8, and the through holes.

In the positioning step ST2, the transfer arm 30 is lifted toward the upper lid 20, and the inner wall 23-3 of the through hole 23 is brought into contact with the curved surfaces 52 and 62 of the protrusions 51 and 61 to slide the transfer tray 10 to move the through hole 23. This is a step of fitting the protrusions 51 and 61 and positioning the transport tray 10 with respect to the holding member 31 of the transport arm 30. In the positioning step ST2, the control unit 105 causes the moving unit 40 to raise the transfer arm 30. Then, due to an error in the position of the AGV 103 with respect to the regular transfer spot, the protrusions 51 and 61 may contact the inner wall 23-3 of the corresponding through hole 23 as shown in FIG. 10.

In the positioning step ST2, the control unit 105 continues to raise the transfer arm 30, and the inner wall 23-3 of the through hole 23 that is in contact with the curved surfaces 52 and 62 of the corresponding protrusions 51 and 61 slides along the curved surfaces 52 and 62. The lid 20 moves and tries to approach the holding member 31. For example, in the example shown in FIG. 10, the inner wall 23-3 of the through hole 23 that is in contact with the curved surfaces 52 and 62 approaches the holding member 31 along the arrow 300 in FIG. 10. In the positioning step ST2, the control unit 105 continues to raise the transfer arm 30, and the protrusions 51 and 61 enter the corresponding through holes 23 as shown in FIG. The upper lid 20 of the transport tray 10 is overlaid on the transport tray 10, and the transport tray 10 is positioned with respect to the transport arm 30 in the X direction, the Y direction, and around the axis described above, and the transport tray positioning method according to the first embodiment is completed. ..

Note that the control unit 105 also moves the OHT 104 along the rail 106 and raises the transport tray 10 as shown in FIG. The tray 10 is positioned above the placement unit 107 of the processing apparatus 101, and the transport arm 30 is lowered to transport the transport tray 10 to the loading unit 107 of the processing apparatus 101. Note that FIG. 12 is a side view schematically showing a state where the transport unit according to the first embodiment raises the transport tray.

In the transport unit 1 according to the first embodiment, when raising the holding member 31 of the transport arm 30 inserted into the insertion area 21, the curved surfaces 52 of the protrusions 51 and 61 formed on the holding member 31 of the transport arm 30. , 62 are contact points with the upper lid 20. Therefore, even if an error occurs in the position of the AGV 103 at the transfer point, the upper lid 20 moves along the curved surfaces 52 and 62 when the holding member 31 of the transfer arm 30 inserted in the insertion area 21 is raised. The projections 51 and 61 enter the through holes 23 of the upper lid 20 to position the upper lid 20 of the transport tray 10 in the X and Y directions with respect to the holding member 31 of the transport arm 30. As a result, the transport unit 1 according to the first embodiment can position the transport tray 10 at a predetermined regular position of the transport arm 30, and can suppress an error in the position of the transport tray 10 during transport. Play.

In addition, the transport unit 1 according to the first embodiment includes two protrusions 51 in the X direction at intervals in the Y direction and two protrusions 61 in the Y direction at intervals in the X direction. The orientation of the upper lid 20 of the transport tray 10 with respect to the holding member 31 of the arm 30 about the axis described above can also be positioned.

Further, in the transport unit 1 according to the first embodiment, since the protrusions 51 and 61 are semicircular in cross section, the protrusions 51 and 61 can be manufactured by cutting a cylindrical member, and the protrusions 51 and 61 are hemispherical. The cost of each of the protrusions 51 and 61 can be reduced as compared with the case of the shape.

Further, in the method of positioning the transport tray according to the first embodiment, in the positioning step ST2, the transport arm 30 is lifted, the curved surfaces 52 and 62 are brought into contact with the inner wall 23-3 of the through hole 23, and the inner wall 23 of the through hole 23 is contacted. -3 is slid on the curved surfaces 52 and 62. Therefore, even if an error occurs in the position of the AGV 103 at the transfer point, the upper lid 20 moves along the curved surfaces 52 and 62 when the holding member 31 of the transfer arm 30 inserted in the insertion area 21 is raised. The projections 51 and 61 enter the through holes 23 of the upper lid 20 to position the upper lid 20 of the transport tray 10 in the X and Y directions with respect to the holding member 31 of the transport arm 30. As a result, the transport tray positioning method according to the first embodiment can position the transport tray 10 at a predetermined regular position of the transport arm 30, and can suppress an error in the position of the transport tray 10 during transport. Has the effect.

[Embodiment 2]
A method of positioning a transport unit and a transport tray according to a second embodiment of the present invention will be described with reference to the drawings. FIG. 13 is a perspective view showing a configuration example of the transport tray of the transport unit according to the second embodiment. FIG. 14 is a perspective view showing a mounting portion of the processing apparatus to which the transport tray of the transport unit according to the second embodiment is transported. FIG. 15 is a flowchart showing the flow of the method of positioning the carrying tray according to the second embodiment. 16 is a side view schematically showing a second positioning step of the method of positioning the carrying tray shown in FIG. FIG. 17 shows the relative positions of the second X-direction protrusions and the second Y-direction protrusions and the second through holes in the second positioning step of the carrying tray positioning method shown in FIG. It is sectional drawing which shows an example. Note that, in FIGS. 13, 14, 15, 16, and 17, the same parts as those of the first embodiment are designated by the same reference numerals and the description thereof will be omitted.

The transport unit according to the second embodiment is used in the factory equipment 100 shown in FIG. 1 similarly to the first embodiment, and the transport tray 10 has a rectangular second surface on the lower surface 17 of the bottom wall 12 as shown in FIG. A plurality of recessed second through holes 25 are formed, and as shown in FIG. 14, the mounting of the processing apparatus 101 in which the second X-direction protrusion 71 and the second Y-direction protrusion 81 are formed on the upper surface 108. The configuration is the same as that of the first exemplary embodiment except that the sheet is conveyed to the placing unit 107.

A plurality of second through holes 25 are provided on the lower surface 17 of the bottom wall 12 that faces the mounting portion 107, and penetrates the bottom wall 12 in the second embodiment, but penetrates the bottom wall 12 in the present invention. Instead, the lower surface 17 may be recessed. In addition, in the second embodiment, the second through hole 25 has the same structure as the through hole 23, and thus the description thereof will be omitted. In addition, in the second embodiment, three second through holes 25 are provided at both ends in the Y direction of the bottom wall 12 at intervals in the X direction.

The second protrusion 71 in the X direction and the second protrusion 81 in the Y direction are respectively attached to the mounting portion 107 of the processing apparatus 101 as shown in FIG. It is formed to be convex. The second protrusion 71 in the X direction and the second protrusion 81 in the Y direction are located in a region corresponding to the second through hole 25 of the bottom wall 12 of the carrying tray 10 placed on the placing portion 107, that is, the placement. When the transport tray 10 is placed on the placing section 107, it is formed in a region of the upper surface 108 of the placing section 107 overlapping the second through hole 25. The projection 51 in the X direction and the projection 61 in the Y direction correspond to the second through hole 25 and overlap with the corresponding second through hole 25 when the transport tray 10 is placed on the placing section 107. In the first embodiment, two second X-direction protrusions 71 and two second Y-direction protrusions 81 are provided.

The second protrusion 71 in the X direction extends linearly along the X direction in a plan view of the upper surface 108 of the mounting portion 107, and has a convex curved surface 72 whose height from the upper surface 108 changes in the X direction. Are formed. The curved surface 72 of the second protrusion 71 in the X direction has the highest height from the upper surface 108 at the center in the X direction, and the height from the upper surface 108 gradually decreases toward the end in the X direction. In addition, in the second embodiment, the curved surface 72 is formed in a semicircular cross section, but in the present invention, the curved surface 72 is not limited to a semicircular cross section. The two second projections 71 in the X direction are arranged at intervals in the Y direction.

The second protrusion 81 in the Y direction extends linearly along the Y direction in a plan view of the upper surface 108 of the mounting portion 107, and has a convex curved surface 82 whose height from the upper surface 108 changes in the Y direction. Are formed. The curved surface 82 of the second protrusion 81 in the Y direction has the highest height from the upper surface 108 at the center in the Y direction, and the height from the upper surface 108 gradually decreases toward the end in the Y direction. Although the curved surface 82 is formed in a semicircular cross section in the second embodiment, the curved surface 82 is not limited to a semicircular cross section in the present invention. The two second Y-direction protrusions 81 are spaced apart from each other in the X-direction, and in the first embodiment, the two second Y-direction protrusions 81 are disposed between one of the second X-direction protrusions 81. Directional protrusions 71 are arranged.

Further, the length of the second protrusion 71 in the X direction in the X direction is shorter than the length of the corresponding second through hole 25 in the X direction, and the width of the protrusion 71 in the second X direction in the Y direction is: It is shorter than the length of the corresponding second through hole 25 in the Y direction. For this reason, the second projection 71 in the X direction is accommodated in the corresponding second through hole 25 when the transport tray 10 is mounted on the mounting portion 107, and the transport tray 10 is mounted on the mounting portion. Position with respect to 107.

Similar to the protrusion 71 in the second X direction, the length in the Y direction of the protrusion 81 in the second Y direction is shorter than the length in the Y direction of the corresponding second through hole 25. The width of the protrusion 81 in the X direction is shorter than the length of the corresponding second through hole 25 in the X direction. For this reason, the second Y-direction projection 81 is accommodated in the corresponding second through hole 25 when the carrying tray 10 is placed on the placing section 107, and the carrying tray 10 is placed on the placing section. Position with respect to 107.

In the second embodiment, the X-direction length of the second X-direction protrusion 71 is equal to the Y-direction length of the second Y-direction protrusion 81, but the present invention is not limited to this. Further, in the second embodiment, the length of the second through hole 25 in the X direction and the length of the second through hole 25 in the Y direction are equal, but the present invention is not limited to this. Further, in the second embodiment, two second X-direction protrusions 71 and two second Y-direction protrusions 81 are provided, but in the present invention, the second X-direction protrusions 71 and the second Y-direction protrusions 81 are provided. 1 and one of the second X-direction protrusion 71 and the second Y-direction protrusion 81. You may prepare.

In addition, in the second embodiment, since the protrusions 71 and 81 have a semicircular cross section, they are manufactured by cutting a cylindrical member.

With such a configuration, in the transport unit 1, when the transport tray 10 is placed on the placing portion 107 of the processing apparatus 101, the second X-direction protrusion 71 and the second Y-direction protrusion 81 correspond to each other. The transfer tray 10 is housed in the second through hole 25 and is positioned with respect to the mounting portion 107 of the processing apparatus 101. At this time, since the second protrusion 71 in the X direction linearly extends in the X direction, the position of the transport tray 10 in the X direction is positioned with respect to the placing portion 107, and the second protrusion in the Y direction is positioned. Since 81 extends linearly in the Y direction, the position of the transport tray 10 in the Y direction is positioned with respect to the mounting portion 107. Further, in the transport unit 1, the second protrusions 71 in the X direction are arranged on the upper surface 108 of the mounting portion 107 at intervals in the Y direction, and the second protrusions 81 in the Y direction are arranged at intervals in the X direction. Therefore, the projections 71 and 81 position the orientation around the axis parallel to the vertical direction of the transport tray 10 with respect to the mounting portion 107.

The carrying tray positioning method according to the second embodiment is performed in addition to the carrying tray positioning method according to the first embodiment. The transport tray positioning method according to the second embodiment is a method of positioning the transport tray 10 at a predetermined position with respect to the mounting portion 107 of the processing apparatus 101, and the transport tray 30 holds the transport tray 30. This is performed when the tray 10 is placed on the placing section 107. As shown in FIG. 15, the carrying tray positioning method according to the second embodiment includes a holding step ST3 and a second positioning step ST4.

(Holding step)
The holding step ST3 is a step of holding the carrying tray 10 by the carrying arm 30, and corresponds to the inserting step ST1 and the positioning step ST2 in the second embodiment. In the holding step ST3, when the control unit 105 executes the inserting step ST1 and the positioning step ST2 and holds the carrying tray 10 by the carrying arm 30, the process proceeds to the second positioning step ST4.

(Second positioning step)
In the second positioning step ST4, the inner wall of the second through hole 25 formed in the bottom wall 12 of the transport tray 10 is brought into contact with the curved surfaces 72 and 82, and the transport tray 10 is slid to move the second through hole 25. This is a step of fitting the protrusions 71 and 81 and positioning the transport tray 10 with respect to the mounting portion 107 of the processing apparatus 101. In the positioning step ST2, the control unit 105 positions the transport tray 10 held by the transport arm 30 above the placing section 107 of the processing apparatus 101, and then lowers the transport arm 30 to move the transport arm 30 downward as shown in FIG. The transport tray 10 is brought close to the upper surface 108 of the mounting portion 107. At this time, each protrusion 71, 81 may contact the inner wall 25-3 of the corresponding second through hole 25, as shown in FIG.

In the second positioning step ST4, the control unit 105 continues the descent of the transfer arm 30, and the inner wall 25-3 of the second through hole 25 in contact with the curved surfaces 72 and 82 of the corresponding protrusions 71 and 81 has the curved surface 72. , 82 along which arrow 301 in FIG. 17 slides, and the transport tray 10 tries to approach the upper surface 108 of the mounting portion 107. In the second positioning step ST4, the control unit 105 continues the descent of the transfer arm 30, each projection 71, 81 enters the corresponding second through hole 25, and is transferred to the upper surface 108 of the mounting portion 107. The bottom wall 12 of the tray 10 is overlapped, the transport tray 10 is positioned with respect to the mounting portion 107 in the X direction, the Y direction, and around the axis center described above, and the transport tray positioning method according to the second embodiment is completed. ..

In addition to the effects of the first embodiment, the transport unit 1 according to the second embodiment has the projections 71 and 81 formed on the upper surface 108 of the mounting portion 107 when the transport tray 10 held by the transport arm 30 is lowered. The curved surfaces 72 and 82 of the above are contact points with the transport tray 10. Therefore, when the transfer tray 10 held by the transfer arm 30 is lowered, the transfer tray 10 moves along the curved surfaces 72 and 82, and the transfer tray 10 is moved into the second through holes 25 of the bottom wall 12 of the transfer tray 10. The protrusions 71 and 81 enter and the transport tray 10 is positioned in the X direction and the Y direction with respect to the upper surface 108 of the mounting portion 107. As a result, the transport unit 1 according to the second embodiment can position the transport tray 10 at the regular position of the mounting portion 107 of the processing apparatus 101, and can suppress the positional error of the transport tray 10 during transport. Produce an effect.

In addition, the transport unit 1 according to the second embodiment includes two second X-direction protrusions 71 spaced apart in the Y-direction, and two second Y-direction protrusions 81 spaced apart in the X-direction. Since it is provided, it is possible to position the transport tray 10 with respect to the upper surface 108 of the mounting portion 107 in the direction around the axis described above.

Further, in the transport unit 1 according to the second embodiment, since the protrusions 71 and 81 have a semicircular cross section, the protrusions 71 and 81 can be manufactured by cutting a cylindrical member, and the protrusions 71 and 81 are hemispherical. The cost of each of the protrusions 71 and 81 can be reduced as compared with the case of the shape.

Further, in addition to the effects of the first embodiment, the method of positioning the transport tray according to the second embodiment has a second through hole when the transport tray 10 held by the transport arm 30 is lowered in the second positioning step ST4. The curved surfaces 72 and 82 are brought into contact with the inner wall 25-3 of 25 to slide the inner wall 12-1 of the second through hole 25 on the curved surfaces 72 and 82. Therefore, when the transport tray 10 held by the transport arm 30 is lowered, the transport tray 10 moves along the curved surfaces 72 and 82, and the projections 71 and 81 are formed in the second through holes 25 of the transport tray 10. Enter, and the transport tray 10 is positioned in the X direction and the Y direction with respect to the upper surface 108 of the mounting portion 107. As a result, the transport tray positioning method according to the second embodiment can position the transport tray 10 at the proper position of the placing portion 107 of the processing apparatus 101, and suppress the error in the transport tray 10 position during transport. It has the effect of being able to.

The present invention is not limited to the above embodiment. That is, various modifications can be made without departing from the gist of the present invention.

1 Transport Unit 10 Transport Tray 11 Storage Box 12 Bottom Wall 13 Upper Wall 14 Sidewall 17 Lower Surface (Surface Facing Placement Section)
20 upper lid 21 insertion area 22 lower surface (surface facing the upper wall)
23 Through hole (recess)
23-3 Inner wall 24 Connection part 25 Second through hole (second recess)
25-3 Inner wall 30 Transfer arm 31 Holding member (holding means)
34 upper surface 40 moving unit (moving means)
51 X-direction projection 52 Curved surface 61 Y-direction projection 62 Curved surface 71 Second X-direction projection 72 Curved surface 81 Second Y-direction projection 82 Curved surface 101 Machining device 107 Placement part 200 Workpiece X direction (reciprocates) Direction, insertion direction)
Y direction ST1 Inserting step ST2 Positioning step ST3 Holding step ST4 Second positioning step

Claims (4)

A transport tray containing the workpiece,
A transport unit including: a transport arm configured to transport the transport tray to a processing device,
The carrying tray is
A bottom wall, a top wall, and a pair of side walls connecting the bottom wall and the top wall;
An upper lid which is installed on the upper part of the storage box with an insertion area into which the transfer arm is inserted, and which has a plurality of rectangular recesses on a surface facing the upper wall;
A connecting portion for connecting the storage box and the upper lid,
The transfer arm is
Holding means that is inserted into the insertion area and holds the transport tray;
Moving means for holding the holding means so as to be movable in the up-and-down direction and in the direction of moving forward and backward with respect to the storage box
When the inserting direction of the holding means into the inserting area is the X direction, and the direction orthogonal to the X direction on a plane is the Y direction,
A convex curved surface, which is formed in a region of the upper surface of the holding means corresponding to the recess of the upper lid, is housed in the recess to position the transport tray, and has a height changing in the X direction, is formed. A projection in the X direction,
A convex curved surface which is formed in a region of the upper surface of the holding means corresponding to the recess of the upper lid, is housed in the recess to position the transport tray, and has a height changing in the Y direction is formed. A protrusion in the Y direction,
A transport unit comprising: The carrying tray is
A second projection in the X direction having a convex curved surface whose height changes in the X direction;
And a second Y-direction protrusion having a convex curved surface whose height changes in the Y-direction,
A plurality of quadrangular second recesses for accommodating the second X-direction projections and the second Y-direction projections are formed on a surface of the bottom wall facing the mounting portion. The transport unit according to claim 1. A transport tray positioning method for positioning the transport tray according to claim 1,
A step of inserting the holding means into the insertion area of the transport tray;
While lifting the transfer arm toward the upper lid, the inner wall of the recess is brought into contact with the curved surface to slide the transfer tray,
A positioning step of fitting the recess into the projection in the X direction and the projection in the Y direction to position the transport tray;
A method for positioning a transport tray, comprising: A transport tray positioning method for positioning the transport tray according to claim 2,
A holding step of holding the carrying tray by the carrying arm;
The inner wall of the second recess formed in the bottom wall is brought into contact with the curved surface to slide the transport tray,
A second positioning step of fitting the second recess into the second projection in the X direction and the projection in the second Y direction to position the transport tray;
A method for positioning a transport tray, comprising:

Images