JP2020086298A - Magnification observation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a magnifying observation device for improving user convenience.
A magnifying observation apparatus selects a first imaging lens 41a or a second imaging lens 41b and arranges it in an observation optical path, a first selection lens 49a, a first objective lens 23a, and a second objective lens 23a. A second selection unit 21 that selects one of the objective lenses 23b and arranges it in the observation optical path, a recognition unit that recognizes the objective lens selected by the second selection unit 21, and a magnification selection that selects the magnification of the optical system. Section, an aperture stop arranged in the observation optical path, a magnification of the optical system selected by the magnification selection section, and an imaging lens determination section that determines an imaging lens based on the objective lens recognized by the recognition section. And a control unit that controls the first selection unit 49a so that the imaging lens determined by the imaging lens determination unit of the one imaging lens 41a and the second imaging lens 41b is arranged in the observation optical path. Good.
[Selection diagram] Figure 8

Description

The present invention relates to a magnifying observation apparatus.

In general, a microscope has been required to have an optical system having high optical performance in order to observe an observation object with high accuracy. In addition, a microscope that displays an observation image on a display in real time has appeared, and there has been competition among microscope makers for how to accurately and precisely display the original appearance of an observation target.

On the other hand, the performance of the image processing chip has improved, and it has become possible to adopt it in a microscope. Further, the users of the microscope have spread not only to researchers such as living things but also to inspectors who inspect (enlarge and observe) the products produced in the factory. As a result, market needs for microscopes that are different from conventional optical performance pursuits have arisen. This is sometimes called a magnifying observation device in distinction from a conventional microscope (Patent Document 1).

JP, 2018-013734, A JP, 2017-531201, A

The magnifying observation apparatus has a plurality of objective lenses, but the observation magnification desired by the user is determined by the combination of the objective lens and the imaging lens. Since a general microscope has only one imaging lens, the user can realize a desired magnification by rotating the revolver and selecting the objective lens. However, this limits the number of realizable magnifications to the same number as the number of objective lenses. Therefore, the inventor has considered providing a larger number of observation magnifications by mounting a plurality of imaging lenses on a magnifying observation apparatus. In this case, the user has to manually select the combination of the objective lens and the imaging lens so that the desired observation magnification is realized, which is inconvenient. Therefore, it is an object of the present invention to provide a magnifying observation apparatus that does not impair the convenience of the user while maintaining an appropriate resolution when changing the magnification.

The present invention is, for example,
A first imaging lens,
A second imaging lens,
A first selection unit that selects one of the first imaging lens and the second imaging lens and arranges it in the observation optical path;
A first objective lens,
A second objective lens,
A second selection unit that selects one of the first objective lens and the second objective lens and arranges it in the observation optical path;
A recognition unit for recognizing the objective lens selected by the second selection unit,
A magnification selection section for selecting the magnification of the optical system,
A diaphragm arranged in the observation optical path,
An imaging lens determination unit that determines an imaging lens based on the magnification of the optical system selected by the magnification selection unit and the objective lens recognized by the recognition unit;
A control unit that controls the first selection unit so that the imaging lens determined by the imaging lens determination unit of the first imaging lens and the second imaging lens is arranged in the observation optical path. Provided is a magnifying observation device characterized by having.

According to the present invention, it is possible to provide a magnifying observation apparatus that maintains an appropriate resolution when changing magnification and does not impair user convenience.

The figure explaining the outline of the magnifying observation apparatus 100. Diagram explaining the control unit, etc. Figure explaining the image processor Diagram illustrating depth stacking and embossing Diagram showing an example of the user interface Diagram showing an example of the user interface Flow chart explaining the magnifying observation process Diagram explaining the optical system Diagram illustrating switching of imaging lenses Diagram illustrating switching of imaging lenses Diagram illustrating switching of imaging lenses Diagram illustrating switching of imaging lenses Diagram illustrating the objective lens Diagram illustrating the objective lens Diagram illustrating the objective lens The figure explaining the light source of coaxial epi-illumination. Diagram explaining ring illumination Diagram explaining ring illumination Flowchart showing the lighting selection method FIG. 6 is a diagram illustrating a table for determining a numerical aperture from an observation magnification. Diagram illustrating the imaging control unit

<Magnification observation device>
FIG. 1 shows a magnifying observation apparatus 100. The magnifying observation device 100 is a device that magnifies and displays a sample such as a minute object, an electronic component, a work such as a workpiece (hereinafter, these are referred to as an observation target). The user can use the magnifying observation device 100 to inspect the external appearance of the observation object and perform dimension measurement and the like. The magnifying observation apparatus 100 may be called a microscope or a digital microscope. The observation object is not limited to the above-mentioned example, and various objects can be the observation object.

The observation unit 1 includes a base unit 10, a stand unit 20, a head unit 22, and a mounting table 30. The base part 10 is a part for placing the observation part 1 on a desk or the like without wobbling, and constitutes a substantially lower half part of the observation part 1. A mounting table 30 is provided on the base portion 10. The mounting table 30 is supported by a portion on the front side from the vicinity of the central portion of the base portion 10 in the front-rear direction, and projects upward from the base portion 10. The mounting table 30 is a part for mounting an observation target, and is configured by an electric mounting table in this embodiment. That is, the observation object can be supported movably in both the width direction (X direction) and the depth direction (Y direction) of the electric mounting table, and can be rotated in the vertical direction (Z direction) and around the Z axis. It is like this. The stand portion 20 is swingable with respect to the base portion 10. For example, the stand unit 20 can swing the observation unit 1 clockwise and counterclockwise when viewed from the front. When the stand unit 20 swings, the head unit 22 also swings. The stand section 20 and the head section 22 are attached so as to be movable in the Z-axis direction. The head unit 22 has an objective lens, an imaging lens, an illuminating device, an image sensor, and the like. The head unit 22 illuminates the observation target placed on the mounting table 30 with illumination light, detects the amount of reflected light or transmitted light of the illumination light from the observation target, and detects the image of the observation target. To generate. The details of the configuration and function of the observation unit 1 are disclosed in Japanese Patent Application No. 2018-161347 of the same applicant as the present application, the entire disclosure of which is incorporated as a part of this specification (incorporation herein by reference). It

The display unit 2 has a display screen 2a capable of color display, such as a liquid crystal display panel or an organic EL panel, and is supplied with electric power from the outside. A touch operation panel (an example of a reception unit) may be incorporated in the display screen 2a. Further, in this embodiment, an example in which the control unit 60 is incorporated in the display unit 2 has been described, but the present invention is not limited to this, and the control unit 60 may be incorporated in the observation unit 1 or the console unit 3. It may be incorporated or may be an external unit separate from the display unit 2, the observation unit 1 and the console unit 3. The display unit 2 and the observation unit 1 are connected by a cable 5 so that signals can be transmitted and received. The power supply to the observation unit 1 may be performed by the cable 5 or a power cable (not shown).

The console unit 3 is connected to the control unit 60, and is different from a general keyboard and mouse, and operates the observation unit 1, inputs various information, performs selection operations, selects images, specifies areas, and positions. This is a dedicated operation device that can be used to specify items. The mouse 4 is connected to the control unit 60 as a pointing device. The console unit 3 and the mouse 4 may be, for example, a touch panel type input device, a voice input device, or the like, as long as they can operate the magnifying observation device 100. In the case of a touch panel type input device, it can be integrated with the display unit 2 and can be configured to be able to detect an arbitrary position on the display screen displayed on the display unit 2. The console unit 3 and the mouse 4 are reception units that receive an input at an arbitrary position designated by the user on the image displayed on the display unit 2.

In addition to the above-described devices and apparatuses, the magnifying observation apparatus 100 can be connected to devices for operating and controlling, printers, computers for performing various other processes, storage devices, peripheral devices, and the like. The connection in this case is, for example, serial connection such as IEEE 1394, RS-232x, RS-422, or USB, parallel connection, or electrical or magnetic via a network such as 10BASE-T, 100BASE-TX, 1000BASE-T. And optical connection. In addition to wired connection, IEEE802. A wireless connection using radio LAN such as x or radio waves such as Bluetooth (registered trademark), infrared rays, optical communication, or the like may be used. Further, as a storage medium used for a storage device for exchanging data and storing various settings, for example, various memory cards, magnetic disks, magneto-optical disks, semiconductor memories, hard disks, etc. can be used. The magnifying observation device 100 can also be referred to as a magnifying observation system in which the above various units, devices, and devices are combined.

<Control part>
As shown in FIG. 2, the control unit 60 has a CPU 61, an image processor 66, a storage unit 67, and the like. The CPU 61 realizes various functions by executing the programs stored in the ROM area of the storage unit 67. The imaging control unit 62 controls the revolver driving unit 24 to rotate the revolver 21 provided on the head unit 22. As a result, the magnification of the objective lens 23 is changed. That is, the objective lens 23 with a certain magnification is switched to the objective lens 23 with another magnification. The imaging control unit 62 may include an identification unit (recognition unit) that identifies the objective lens 23 by communicating with the objective lens 23. The head unit 22 may have a plurality of imaging lenses 41. The imaging control unit 62 switches the imaging lens 41 by driving the imaging lens driving unit 42 (example: motor). As a result, the magnification of the optical system including the objective lens 23 and the imaging lens 41 is changed. When distinguishing between the plurality of objective lenses 23 and the plurality of imaging lenses 41, a lowercase alphabet is added to the end of the reference numeral. The motorized diaphragm 37 is a variable diaphragm provided inside the head portion 22 or inside the objective lens 23. The electric diaphragm 37 is also controlled by the imaging control unit 62.

The imaging control unit 62 controls the Z-direction drive unit 28 that moves the head unit 22 up and down in order to change the focus position of the objective lens 23. The imaging control unit 62 moves the mounting table 30 in the X direction, the Y direction, and the Z direction through the mounting table driving unit 29, and rotates the mounting table 30 by θ. The imaging control unit 62 controls the imaging unit 25 provided in the head unit 22, causes the imaging unit 25 to image the observation target object W, and acquires an image of the observation target object W.

The display control unit 63 causes the display unit 2 to display an image of the observation object W and the like. The illumination control unit 64 controls turning on and off of the ring illumination 26 and the coaxial incident illumination 27 provided on the head unit 22. The UI unit 65 displays a UI (user interface) on the display unit 2 through the display control unit 63 and receives a user instruction input from the console unit 3 or the mouse 4. The image processor 66 creates various image data from the image signal acquired by the imaging unit 25. The image processor 66 may be realized by the CPU 61. The storage unit 67 has a ROM area, a RAM area, a memory card, and the like.

The detection unit 68 detects whether the mounting table 30 is stationary or moving, or whether the revolver 21 has changed the magnification of the objective lens 23. The console unit 3 may have a joystick for instructing to move the mounting table 30 in the X direction or the Y direction. In this case, the detection unit 68 detects that the mounting table 30 is moving if the joystick of the console unit 3 is tilted in either direction, and detects that the mounting table 30 is moving if the joystick is stationary at the neutral position. It detects that it is stationary. When the rotation of the revolver 21, that is, the magnification change of the objective lens 23 is instructed through the console unit 3 or the mouse 4 and the revolver drive unit 24 rotates the revolver, the detection unit 68 detects that the magnification has been changed. If the magnification change is not instructed, the detection unit 68 detects that the magnification has not been changed. The detection unit 68 may detect manual adjustment of the focus position by the user.

<Image processor>
As shown in FIG. 3, in the image processor 66, the brightness image generation unit 31 creates a brightness image from the image signal acquired by the imaging unit 25 through the imaging control unit 62. The HDR processing unit 32 controls the imaging unit 25 through the imaging control unit 62 to acquire a plurality of sub-luminance images having different exposure times, and performs a HDR process on the plurality of sub-luminance images to generate a luminance image. .. HDR is an abbreviation for high dynamic range. The depth synthesis unit 33 controls the imaging unit 25 through the imaging control unit 62 to acquire a plurality of sub-luminance images having different in-focus positions, and depth-synthesizes the plurality of sub-luminance images to form a depth synthesis image. To generate. The sub-luminance image may be an HDR-processed luminance image. The unevenness emphasizing unit 34 combines the first luminance image of the observation object W illuminated from the first illumination direction and the second luminance image of the observation object W illuminated from the second illumination direction to perform observation. An unevenness-enhanced image in which unevenness on the surface of the object W is emphasized is created. The first illumination direction and the second illumination direction are symmetrical with each other with the optical axis A1 interposed therebetween. The first luminance image and the second luminance image may be depth-combined images that are depth-combined. For example, the unevenness emphasizing unit 34 may generate the unevenness emphasized image based on the difference in brightness between the first depth combined image and the second depth combined image. Based on the brightness value i1 of the pixel (coordinates x, y) in the first depth composite image and the brightness value i2 of the pixel (coordinates x, y) in the second depth composite image, The pixel value Ixy may be obtained from the following equation.
Ixy=(i1-i2)/(i1+i2) (1)
The pixel value of the unevenness-enhanced image is obtained by dividing the difference between the pair of pixel values by the sum of the pair of pixel values. An expression different from the expression (1) may be adopted as long as the difference between the pixel values is normalized.

The coloring unit 36 acquires color information from the color image of the observation object W acquired by the imaging unit 25 and colorizes the unevenness-enhanced image. The height image generation unit 35 obtains the height of the surface of the observation target W for each pixel by integrating each pixel of the unevenness-enhanced image, and generates a height image having the height as each pixel. The height image generation unit 35 may generate a color height image by coloring each pixel of the height image according to the height of each pixel.

<Principle of depth synthesis and embossing>
FIG. 4A illustrates that the observation object W is illuminated with illumination light from the first illumination direction by turning on a part of the ring illumination 26. The ring illumination 26 has four light source regions 140A, 140B, 140C, 140D. That is, the ring illumination 26 can illuminate the observation object W from the four illumination directions by selectively turning on and off the four light source regions 140A, 140B, 140C, and 140D. The illumination direction of the light source region 140A and the illumination direction of the light source region 140C are symmetrical with respect to the optical axis A1. The illumination direction of the light source region 140B and the illumination direction of the light source region 140D are symmetrical with respect to the optical axis A1. In FIG. 4A, only the light source area 140A is turned on.

FIG. 4B shows a luminance image I1 obtained by irradiating the observation object W with illumination light from the first illumination direction. SH indicates the shadow of the observation object W.

FIG. 4C shows that the observation object W is irradiated with the illumination light from the second illumination direction by turning on only the light source region 140C. FIG. 4C shows a luminance image I2 obtained by irradiating the observation object W with illumination light from the second illumination direction.

FIG. 4E shows n first luminance images I11 to I1n acquired by irradiating the observation object W with illumination light from the first illumination direction and changing the focus position. The depth synthesis unit 33 creates a first depth synthesis image Ia1 by performing depth synthesis on the n first luminance images I11 to I1n. For example, the depth synthesis unit 33 analyzes a plurality of pixels having the same pixel position in each of the plurality of first luminance images I11 to I1n, and determines the pixel having the highest degree of focus among the plurality of pixels as the pixel concerned. By selecting the focus pixel at the position, the first depth composite image I1a including the focus pixels at a plurality of pixel positions is generated.

FIG. 4F shows n second luminance images I21 to I2n acquired by irradiating the observation object W with illumination light from the second illumination direction and changing the focus position. The depth synthesis unit 33 creates a second depth synthesis image I2a by performing depth synthesis on the n second luminance images I21 to I2n. For example, the depth synthesis unit 33 analyzes a plurality of pixels having the same pixel position in each of the plurality of second luminance images I21 to I2n, and determines the pixel with the highest degree of focus among the plurality of pixels as the pixel concerned. By selecting the focus pixel at the position, the second depth composite image I2a composed of the focus pixels at a plurality of pixel positions is generated.

The unevenness emphasizing unit 34 generates an unevenness emphasized image using the first depth combined image I1a and the second depth combined image I2a. The unevenness emphasizing unit 34 generates the unevenness emphasized image based on the difference in luminance between the first depth combined image I1a and the second depth combined image I2a.

<Moving the mounting table and displaying images>
The UI unit 65 displays the unevenness emphasized image generated by the unevenness emphasizing unit 34 on the display unit 2. The user uses the unevenness-enhanced image to magnify and observe a part of the observation object W. Here, there are cases where a plurality of portions of the observation object W are targets for magnified observation. In this case, the user operates the console unit 3 to move the mounting table 30 in the X direction or the Y direction or rotate it in the θ direction. When a movement instruction in the X direction is input from the console unit 3, the CPU 61 causes the mounting table drive unit 29 to move the mounting table 30 in the X direction, and the CPU 61 inputs a movement instruction in the Y direction from the console unit 3. Then, the mounting table driving unit 29 moves the mounting table 30 in the Y direction. As long as such a movement instruction is input, the CPU 61 continuously moves the mounting table 30 according to the movement instruction. When the input of the movement instruction by the user is stopped, the CPU 61 stops the movement of the mounting table 30 by the mounting table drive unit 29.

Here, since a certain amount of processing time is required to generate the unevenness-enhanced image, the UI unit 65 causes the unevenness-enhancement unit 34 to generate the unevenness-enhancement process while the mounting table 30 is moving. The image cannot be displayed on the display unit 2. Therefore, the UI unit 65 displays the brightness image of the observation target object W generated by the brightness image generation unit 31 on the display unit 2 while the mounting table 30 is moving. Thereby, the user can confirm whether or not the next observation site is located in the visual field range of the image capturing unit 25 by confirming the brightness image displayed on the display unit 2. Here, the UI unit 65 updates the luminance image of the observation target object W at regular intervals, so that the display unit 2 displays the luminance image of the observation target object W like a moving image. When the CPU 61 detects that the input of the movement instruction is stopped (stop of the mounting table 30), the CPU 61 instructs the image processor 66 to generate the unevenness-enhanced image. As a result, the acquisition of the brightness image, the depth combination, and the unevenness emphasized image described above are executed again, and the unevenness emphasized image at the new observation position is displayed on the display unit 2. Even if the user does not instruct to regenerate the unevenness-enhanced image, the unevenness-enhanced image is regenerated according to the stop of the mounting table 30. Therefore, the user will be able to efficiently observe a plurality of observation sites.

<Coloring of the embossed image>
Each pixel forming the unevenness-enhanced image shows unevenness on the surface of the observation object W and does not include surface color information. Therefore, it is difficult for the user to grasp the relationship between the color of the observed region and the position of the unevenness. Therefore, the coloring unit 36 turns on all the light source regions 140A to 140D of the ring illumination 26, and causes the imaging unit 25 to image the observation target object W. As a result, the luminance image generation unit 31 generates a color image (luminance image) of the observation object W. The coloring unit 36 acquires color information from the color image, maps the color information on the unevenness emphasized image to colorize the unevenness emphasized image, and displays the color on the display unit 2. This makes it easier for the user to understand the relationship between the color of the observed region and the position of the unevenness.

<HDR processing>
When the surface of the observation object W is a metal, whiteout pixels or blackout pixels may occur in the luminance image. In such a case, it becomes difficult to confirm the unevenness in the finally generated unevenness-enhanced image. Therefore, the HDR processing unit 32 may be adopted. The HDR processing unit 32 acquires a plurality of sub-luminance images having different exposure times for one in-focus position, and performs HDR processing on the plurality of sub-luminance images to generate one luminance image. The HDR processing unit 32 acquires a plurality of sub-luminance images having different exposure times each time the focus position is changed, and performs HDR processing on the plurality of sub-luminance images to generate one luminance image. As a result, the first luminance images I11 to I1n and the second luminance images I21 to I2n are all HDR-processed images. Therefore, the depth synthesis unit 33 performs depth synthesis on the HDR-processed first luminance images I11 to I1n to generate a first depth image I1a, and performs depth synthesis on the HDR-processed second luminance images I21 to I2n. , The second depth image I2a is generated. Further, the unevenness emphasizing unit 34 synthesizes the HDR-processed first depth image I1a and the HDR-processed second depth image I2a to generate the HDR-processed unevenness emphasis image. As a result, overexposure and underexposure are less likely to occur, so that the user can more easily grasp the unevenness of the observation object W by checking the unevenness-enhanced image.

<Height image>
The unevenness-enhanced image described above does not include the height information of the surface of the observation object W. Therefore, a crater illusion occurs. The crater illusion is a phenomenon in which an observer mistakenly recognizes a concave portion and a convex portion because the concave shape and the convex shape cannot be distinguished as an image. Therefore, the height image generation unit 35 obtains the height of the surface of the observation object W for each pixel by integrating each pixel of the unevenness-enhanced image, and generates a height image having the height as each pixel. However, it may be displayed on the display unit 2. Further, the height image generation unit 35 converts the height data of each pixel of the height image into color information and maps the color information on the unevenness-enhanced image so that the height image generation unit 35 colors with a different color depending on the height. The unevenness-enhanced image thus generated may be generated and displayed on the display unit 2. This makes it easier for the user to distinguish between the concave shape and the convex shape on the surface of the observation object W based on the color information.

<Other>
Although the light source areas 140A and 140C have been described in FIG. 4, this description is also applicable to the light source areas 140B and 140D. That is, the image processor 66 may generate an unevenness-enhanced image using a pair with the light source regions 140A and 140C, or may generate an unevenness-enhanced image using a pair with the light source regions 140B and 140D. The illumination direction of the light source region 140B may be referred to as the third illumination direction. The illumination direction of the light source region 140D may be referred to as the fourth illumination direction. The third illumination direction and the fourth illumination direction are symmetrical (axisymmetric) with the optical axis A1 interposed.

The luminance image generation unit 31 controls the ring illumination 26 to irradiate the observation object W with illumination light from the third illumination direction different from the first illumination direction and the second illumination direction. . The brightness image generation unit 31 controls the Z-direction drive unit 28 and the imaging unit 25, and acquires a plurality of third brightness images by imaging the observation object W at each of a plurality of different in-focus positions. Similarly, the luminance image generation unit 31 controls the ring illumination 26 to irradiate the observation target W with illumination light from the fourth illumination direction. The brightness image generation unit 31 controls the Z direction drive unit 28 and the imaging unit 25, and acquires a plurality of fourth brightness images by imaging the observation target W at each of a plurality of different focus positions. The image processor 66 outputs the unevenness-enhanced image corresponding to the illumination direction selected by the UI unit 65 among the first illumination direction, the second illumination direction, the third illumination direction, and the fourth illumination direction to a plurality of first luminance images It is generated using a plurality of luminance images corresponding to the selected illumination direction among the plurality of second luminance images, the plurality of third luminance images, and the plurality of fourth luminance images. The display unit 2 displays the unevenness-enhanced image corresponding to the selected illumination direction. Although the first illumination direction is selected in the above embodiment, the second illumination direction may be selected. In this case, i1 and i2 in the equation (1) are interchanged. When the third illumination direction is selected, the brightness value of each pixel of the third brightness image is i1 and the brightness value of each pixel of the fourth brightness image is i2 in the expression (1). When the fourth illumination direction is selected, the luminance value of each pixel of the fourth luminance image becomes i1 and the luminance value of each pixel of the third luminance image becomes i2 in the formula (1).

<Modification>
In the above-described embodiment, the unevenness enhancement is performed after the depth stacking is performed. However, the unevenness enhancement may be performed first, and then the depth stacking may be performed.

The unevenness emphasizing unit 34 uses the first brightness image I11 and the second brightness image I21 to generate a sub unevenness emphasis image I1x. Similarly, the unevenness emphasizing unit 34 uses the first brightness image I12 and the second brightness image I22 to generate a sub unevenness emphasis image I2x. By repeating the same process as described below, finally, the unevenness emphasizing unit 34 generates the sub unevenness-enhanced image Ixn using the first luminance image I1n and the second luminance image I2n. As a result, the depth combination unit 33 performs depth combination of the n sub unevenness-enhanced images Ix1 to Ixn to generate a final unevenness-enhanced image, which is displayed on the display unit 2.

The ring illumination 26 may be arranged around the objective lens 23, or may be configured to irradiate the observation object W with illumination light through the objective lens 23.

<User interface>
FIG. 5 shows a user interface 70 displayed on the display unit 2 by the UI unit 65. The image display area 71a displays the image output from the image processor 66 through the display control unit 63. This image is a live image of the observation target W, a depth-combined unevenness enhancement image, an unevenness enhancement image colored according to the color of the surface of the observation target W, or an unevenness enhancement image colored based on height data ( Color height image). When the detection unit 68 detects that the mounting table 30 is moving or that switching of the objective lens 23 is instructed, the UI unit 65 displays the live image of the observation target W in the image display area 71a. When the detection unit 68 detects that the change of the magnification is completed and the mounting table 30 is stationary, the UI unit 65 displays the depth-combined unevenness-enhanced image in the image display area 71a. When it is detected that the mounting table 30 moves while the unevenness-enhanced image is displayed, the UI unit 65 displays the live image in the image display area 71a. The illumination direction selection unit 72 has four buttons corresponding to the light source areas 140A to 140D. As described above, since the light source region 140A and the light source region 140C form a pair, when the button corresponding to the light source region 140A is selected by the pointer 74, the illumination direction of the light source region 140A becomes the first illumination direction. Then, the illumination direction of the light source region 140C is determined as the second illumination direction. Similarly, when the button corresponding to the light source region 140D is selected by the pointer 74, the illumination direction of the light source region 140D is determined as the first illumination direction, and the illumination direction of the light source region 140B is determined as the second illumination direction. The magnification selection unit 73 is a pull-down list for selecting any one of the objective lenses 23 mounted on the revolver 21. For example, the UI unit 65 acquires the magnification of each of the plurality of objective lenses 23 attached to the revolver 21 from the setting information of the objective lenses 23 and creates a pull-down list. When the user operates the pointer 74 to select one of the magnifications, the UI unit 65 notifies the revolver drive unit 24 of the selected magnification (objective lens 23). The revolver drive unit 24 rotates the revolver 21 so that the objective lens 23 having the notified magnification is located on the photographing optical axis A1. When the revolver drive unit 24 has finished rotating, it outputs a rotation end signal to the CPU 61. Upon receiving the rotation end signal, the detection unit 68 determines that the magnification change has been completed. Normally, when the magnification change is completed, it is necessary to adjust the position of the observation site within the visual field range. The user positions the observation site at a desired position within the visual field range by moving the mounting table 30. When the mounting table 30 stands still, the UI unit 65 instructs the image processor 66 to generate the unevenness-enhanced image. The UI unit 65 displays, in place of the live image, the depth-combined unevenness-enhanced image in the image display area 71a.

It should be noted that the user interface 70 may be provided with a switching button for explicitly switching between displaying the embossed image and displaying the live image. Thus, the user may compare the both of the unevenness-enhanced image and the live image by switching between them after the completion of the unevenness-enhanced image.

In FIG. 5, the table selection unit 78 is used to select either the depth priority table or the resolution priority table as a table for determining the aperture amount.

FIG. 6 shows another example of the user interface 70 displayed on the display unit 2 by the UI unit 65. In this example, the image display area 71a displays a live image, and the image display area 71b displays the depth-combined unevenness-enhanced image, the unevenness-enhanced image colored according to the color of the surface of the observation object W, and height data. An image (color height image) or the like that is colored based on is displayed. Although the image display areas 71a and 71b are arranged in the vertical direction in FIG. 6, they may be arranged in the horizontal direction.

The coloring designating section 76 uses radio buttons for instructing to color the depth-combined unevenness-enhanced image based on the color information of the surface of the observation target W, and height information of the surface of the observation target W. Based on this, it has a radio button for instructing to color the depth-combined unevenness-enhanced image and a radio button for instructing not to color. The UI unit 65 notifies the image processor 66 of the coloring instruction designated by the coloring designation unit 76. The coloring designating section 76 may also be provided in the user interface 70 shown in FIG. The depth stacking instruction unit 77 is a check box for designating whether to enable or disable depth stacking. When the depth stacking instruction unit 77 disables the depth stacking, the unevenness emphasizing unit 34 generates the unevenness emphasized image using the first brightness image and the second brightness image according to the equation (1). In this case, the image display area 71b displays an unevenness-enhanced image that is not depth-combined.

<Flow chart of magnifying observation process>
FIG. 7 is a flowchart showing the magnification observation process. When the start is instructed by the mouse 4 or the console section 3, the CPU 61 executes the following processing.

The case where the unevenness emphasized image is displayed in the image display area 71 will be described.

In S0, the CPU 61 controls the mounting table driving unit 29 according to the movement instruction input from the mouse 4 or the console unit 3 to move the mounting table 30.

When the movement start is detected in S1, a live image is displayed in the image display area 71. That is, the CPU 61 controls the imaging unit 25 and the ring illumination 26 via the imaging control unit 62 and the illumination control unit 64 to cause the observation target object W to be imaged, and controls the image processor 66 to display a live image of the observation target object W ( A brightness image that is updated at regular time intervals) is generated, and a live image is displayed on the display unit 2 via the display control unit 63. The live image is displayed in the image display area 71. The illumination control unit 64 turns on all four light source regions 140A to 140D for the live image. While viewing the live image, the user moves the mounting table 30 in the X direction, the Y direction, the Z direction, and the θ direction so that the observation target object W enters the visual field range of the imaging unit 25.

In S2, the CPU 61 uses the detection unit 68 to determine whether the movement of the mounting table 30 is completed. For example, when the input of the movement instruction by the mouse 4 or the console unit 3 is finished and a certain time has elapsed or an explicit imaging instruction is input, the CPU 61 (detection unit 68) causes the mounting table 30 It is determined that the movement of is completed. When the CPU 61 determines that the movement of the mounting table 30 is completed, the CPU 61 proceeds to S3.

In S3, the CPU 61 displays the live image at the end of the movement in the image display area 71. If the image of the observation target object W is not displayed in the display area during the period from S4 to S10, it becomes difficult for the user to grasp the observation target object W. Therefore, the CPU 61 may display the image of the observation object W immediately before the unevenness-enhanced image is generated in the image display area 71, if necessary, while generating the unevenness-enhanced image.

In S4, the CPU 61 generates a plurality of first luminance images I11 to I1n having different focusing positions in the first illumination direction. The illumination control unit 64 turns on one light source region corresponding to the first illumination direction among the light source regions 140A to 140D. The imaging control unit 62 causes the imaging unit 25 and the brightness image generation unit 31 to acquire the first brightness images I11 to I1n while gradually changing the focus position of the objective lens 23 through the Z-direction drive unit 28.

In S5, the CPU 61 generates a plurality of second luminance images I21 to I2n having different focusing positions in the second illumination direction. The illumination control unit 64 turns on one light source region corresponding to the second illumination direction among the light source regions 140A to 140D. The imaging control unit 62 causes the imaging unit 25 and the luminance image generation unit 31 to acquire the second luminance images I21 to I2n while gradually changing the focus position of the objective lens 23 through the Z-direction driving unit 28.

In S6, the CPU 61 uses the depth combination unit 33 to perform depth combination of the first luminance images I11 to I1n to generate the first depth image I1a in the first illumination direction.

In S7, the CPU 61 uses the depth combination unit 33 to perform depth combination of the second luminance images I21 to I2n to generate the second depth image I2a in the second illumination direction.

In S8, the CPU 61 uses the unevenness emphasizing unit 34 to generate an unevenness-enhanced image based on the first depth image I1a and the second depth image I2a.

In S9, the CPU 61 uses the coloring unit 36 or the height image generation unit 35 to color the concave-convex emphasized image. Thereby, the color of the surface of the observation object W is added to the unevenness-emphasized image, or the unevenness-enhanced image is colored according to the height data acquired from the height image. Whether to execute the coloring process and what kind of the coloring process to be executed depend on which radio button is pressed in the coloring designating section 76.

In S10, the CPU 61 displays the concave-convex emphasized image on the display unit 2 through the UI unit 65 and the display control unit 63. That is, the embossed image is displayed in the image display area 71a instead of the live image of the observation object W. In the user interface 70 shown in FIG. 6, a live image of the observation object W is displayed in the image display area 71a, and a depth-combined unevenness-enhanced image is displayed in the image display area 71b.

In S11, the CPU 61 determines whether or not an instruction to end the magnifying observation process has been input. When the end instruction is input from the mouse 4 or the like, the CPU 61 ends the magnifying observation process. If the end instruction has not been input, the CPU 61 proceeds to S12.

In S12, the CPU 61 uses the detection unit 68 to determine whether or not an instruction to move the mounting table 30 or an instruction to change the magnification is input from the mouse 4 or the like. If neither the movement instruction nor the magnification change instruction has been input, the CPU 61 returns to S11. When the movement instruction or the magnification change instruction is input, the CPU 61 returns to S1 and displays the live image of the observation object W on the display unit 2. After that, when the movement of the mounting table 30 is stopped, the CPU 61 executes the generation of the unevenness-enhanced image again.

<Internal configuration of head section 22>
FIG. 8 shows the internal structure of the head portion 22. The revolver 21 has at least three mounts 50a, 50b, 50c. Objective lenses 23a, 23b and 23c are connected to the mounts 50a, 50b and 50c, respectively. The objective lens 23a is, for example, a low-magnification objective lens. An electric diaphragm 37a is provided at the pupil position of the objective lens 23a. The electric diaphragm 37a is a variable diaphragm that is driven by a motor or the like to change the diaphragm amount. In this example, the objective lens 23a is arranged on the observation optical axis A1. A ring illumination 26 is provided around the lens barrel of the objective lens 23a. The objective lens 23b also has an electric diaphragm 37b, but does not have the ring illumination 26. Since the pupil position of the objective lens 23c exists outside the lens barrel, no diaphragm is provided inside the lens barrel. The motorized diaphragm 37c is a diaphragm arranged between the objective lens 23 and the half mirror 38. In this example, the electric diaphragm 37c is provided at the pupil position of the objective lens 23c. The half mirror 38 is arranged on the observation optical axis A1 and guides the illumination light from the coaxial incident illumination 27 to the objective lens 23. The half mirror 38 guides the incident light from the objective lens 23 to the imaging unit 25 via the imaging lens 41 and the like. A condenser lens 39 is arranged between the coaxial epi-illumination 27 and the half mirror 38. An electric diaphragm 37d is arranged between the coaxial epi-illumination 27 and the condenser lens 39. The electric diaphragms 37a to 37d are controlled by the imaging control unit 62 of the CPU 61.

The imaging lens group includes a narrow-field imaging lens 41a, a wide-field imaging lens 41b, and a lens adapter 43. The imaging lens 41a and the imaging lens 41b are held by the slide member 49a. The imaging lens 41a, the imaging lens 41b, and the lens adapter 43 are designed such that the pupil positions of the imaging lens 41a, the imaging lens 41b, and the lens adapter 43 are the installation positions of the electric diaphragm 37c. The slide member 49a is held slidably with respect to the frame 40a. In this example, the slide member 49a is driven by the imaging lens drive unit 42 to slide left and right in FIG. The left and right in FIG. 8 correspond to the front and back of the magnifying observation apparatus 100. Stop members 44a and 44b are provided at both ends of the frame 40a. As shown in FIG. 9, when the slide member 49a comes into contact with the stop member 44b and stops, the imaging lens 41a is positioned on the observation optical axis A1. As shown in FIG. 10, when the slide member 49a comes into contact with the stop member 44a and stops, the imaging lens 41b is positioned on the observation optical axis A1. The lens adapter 43 is held by the slide member 49b. The slide member 49b is held slidably with respect to the frame 40b. In this example, the slide member 49b is driven by the imaging lens driving unit 42 to slide to the left and right in FIG. The lens adapter 43 is used in combination with the imaging lens 41a. The lens adapter 43 is, for example, a lens for changing the magnification to double or the like. As shown in FIGS. 9 and 10, when the slide member 49b comes into contact with the stop member 44c and stops, the lens adapter 43 is separated from the observation optical axis A1. As shown in FIG. 11, when the slide member 49b comes into contact with the stop member 44d and stops, the lens adapter 43 is positioned on the observation optical axis A1.

FIG. 12 shows the imaging lens 41a, the imaging lens 41b, the frame 40a, and the stop members 44a and 44b when the head portion 22 is not tilted. Illustration of the slide member 49a is omitted. FIG. 13 shows the imaging lens 41a, the imaging lens 41b, the frame 40a, and the stop members 44a and 44b when the head portion 22 is tilted. As can be seen from FIGS. 12 and 13, the sliding directions of the imaging lenses 41a and 41b are parallel to the tilt axis. Therefore, even if the head portion 22 is tilted, the imaging lenses 41a and 41b are unlikely to slide. The same applies to the lens adapter 43 and the slide member 49b. Further, since the sliding direction and the vertical direction are orthogonal to each other, the gravity applied to the imaging lenses 41a and 41b does not change even if the head portion 22 is tilted. This means that the load of the motor that slides the slide member 49 is not affected by gravity.

Thus, the slide system has been described as the system for switching the imaging lens 41. In the slide system, since the imaging lens 41 and the lens adapter 43 are positioned by the stop member 44, the influence of backlash of the gear mechanism for sliding the slide member 49 is less likely to occur. A revolver system or the like may be adopted instead of the slide system.

The lens adapter 43 functions as a magnification conversion adapter. The imaging lenses 41a and 41b are held so that the focal positions of the imaging lenses 41a and 41b coincide with the light receiving surface of the CMOS sensor of the imaging unit 25.

In the slide system, three or more imaging lenses 41 may be held on the frame 40. However, when the positioning mechanism using the stop member 44 is adopted, the two imaging lenses 41 are held with respect to one frame 40. In order to realize the switching of the observation magnification in three steps or more by switching the imaging lens 41, the multi-stage of the frame 40 may be adopted. For example, two lens adapters 43 having different magnifications may be mounted on the frame 40b. The lens adapter 43 is designed so that the focus position when the imaging lens 41a is combined with the lens adapter 43 is also coincident with the light receiving surface of the CMOS sensor. As a result, even if the lens adapter 43 is arranged on the observation optical axis A1, no focus shift occurs.

<Objective lens>
14 and 15 show the relationship between the objective lens 23 and the mount 50. The objective lens 23 has a connecting portion 59. The connecting portion 59 is fitted or screwed to the mount 50 to fix the objective lens 23 to the revolver 21. As a method of fixing the connection portion 59 and the mount 50, there are, for example, a screw type and a bayonet type. In the screw type, an inner screw provided on the connection portion 59 and an outer screw provided on the mount 50 are screwed together. As shown in FIG. 15, the connecting portion 59 has a flange 75. The flange surface of the flange 75 is perpendicular to the optical axis. This makes it easier to position the optical axis of the objective lens 23 with respect to the observation optical axis A1. The flange 75 has a positioning hole 45 and an electronic contact 46. As shown in FIG. 14, the positioning pin 51 provided on the revolver 21 is inserted into the positioning hole 45, whereby the objective lens 23 is positioned with respect to the revolver 21. The electronic contact 46a is electrically connected to the electronic contact 46b on the revolver 21 side. The electronic contacts 46a and 46b include contacts for power supply and contacts for communication. The control board 47 receives a control signal from the CPU 61 via the electronic contacts 46a and 46b, and controls the motor 48 and the ring illumination 26 that drive the electric diaphragm 37a according to the control signal. The control board 47 may include a CPU, a communication circuit, a memory, a drive circuit that drives the light source, a drive circuit that drives the motor 48, and the like. When the communication circuit of the control board 47 receives the request for the identification information from the CPU 61, the communication circuit reads the identification information from the memory and sends it to the CPU 61. Thus, the memory stores the identification information of the objective lens 23 and the like. The electric diaphragm 37a includes a motor 48 and diaphragm blades.

<Coaxial epi-illumination>
FIG. 16 shows the arrangement of light sources in the coaxial incident illumination 27. The light source group 54a has a plurality of LEDs 53a, 53e, 53f, 53i, 53j, 53k, 53q for irradiating the observation object W with illumination light from the first illumination direction. The light source group 54c has a plurality of LEDs 53c, 53e, 53g, 53h, 53m, 53n, 53o for irradiating the observation object W with illumination light from the second illumination direction. The light source group 54b has a plurality of LEDs 53b, 53e, 53g, 53l, 53k, 53m for irradiating the observation object W with illumination light from the third illumination direction. The light source group 54d has a plurality of LEDs 53d, 53e, 53h, 53i, 53o, 53p, 53q for irradiating the observation object W with illumination light from the fourth illumination direction.

For example, in high magnification observation, only the LED 53e may be turned on. When the illumination light is deflected from the first illumination direction using the high-magnification objective lens 23, only the LED 53a may be turned on. When the illumination light is deflected from the second illumination direction using the high-magnification objective lens 23, only the LED 53c may be turned on. When the illumination light is deflected from the first illumination direction using the medium-magnification objective lens 23, the LEDs 53a and 53j may be turned on at the same time. When the illumination light is deflected from the second illumination direction using the medium-magnification objective lens 23, the LEDs 53c and 53n may be turned on at the same time.

By the way, the working distance of a low-magnification objective lens is long, and the working distance of a high-magnification objective lens is short. Therefore, by adopting the ring illumination 26 for the low-magnification objective lens 23a, surface observation and unevenness observation of the observation object W can be realized. On the other hand, if the ring illumination 26 is used for the high-magnification objective lens 23, dark-field observation is performed. Therefore, only the edge portion shines and it becomes difficult to obtain the reflected light from the surface. Therefore, by applying the coaxial epi-illumination 27 to the high-magnification objective lens 23, the surface observation of the observation object W is realized.

As described with reference to FIG. 4, the unevenness-enhanced image can be obtained by irradiating the illumination light from the two directions using the ring illumination 26. Therefore, even with respect to the coaxial epi-illumination 27, the unevenness-enhanced image can be obtained even with the high-magnification objective lens 23 by illuminating the illumination light from two directions. Biased illumination with coaxial epi-illumination 27 may be used to generate a de-haled viewing image. Depth composition using the coaxial epi-illumination 27 can also be realized.

<Ring lighting>
FIG. 17 shows the structure of the ring illumination 26 used in the low-magnification objective lens 23. The plurality of LEDs 55 are mounted on a ring-shaped substrate. The illumination light output from the LED 55 is condensed by the condenser lens 56, and is irradiated onto the observation target W via the illumination lens 57. A diffusion plate 58 may be adopted between the condenser lens 56 and the illumination lens 57. The LED 55 functions as a primary light source, while the diffuser plate 58 functions as a secondary light source. The illumination lens 57 functions as a relay lens that relays the illumination light from the secondary light source. Due to these, the ring illumination 26 realizes illumination close to Koehler illumination. Since the illumination lens 57 has a curvature only in the radial direction, a light amount loss may occur. Therefore, a toroidal lens may be adopted as the condenser lens 56 in order to have a curvature in the radial direction. This reduces the light amount loss.

FIG. 18 shows the structure of the ring illumination 26 used in the high-magnification objective lens 23. The plurality of LEDs 55 are mounted on a ring-shaped substrate. The illumination light output from the LED 55 is condensed by the condenser lens 56, and is irradiated onto the observation target W via the illumination lens 57 and the diffusion plate 58. In FIG. 18, the illumination lens 57 is composed of a mirror. With the high-magnification objective lens 23, the illumination light must be efficiently concentrated in a narrow field of view. In order to reduce the light amount loss, it is required to irradiate the observation object W with the light from the LED 55 as parallel light as much as possible. Therefore, the illumination light must be strongly refracted from the outer periphery of the objective lens 23 toward the visual field region. Therefore, a material having a high refractive index or a reflective optical system is used as the illumination lens 57. However, if such an optical component is adopted, the light source may be reflected in the visual field area. In order to solve this, the diffusion plate 58 is adopted.

In this way, the ring illumination 26 is designed according to the NA (numerical aperture) of the objective lens 23 and the field of view. The light guiding efficiency is improved by providing one condenser lens 56 for each LED 55.

<Automatic switching of lighting>
In the magnifying observation apparatus 100 having a plurality of types of illumination devices, the user needs to select the illumination device to be turned on. However, since an appropriate illumination device differs depending on the magnification of the objective lens 23, it may be difficult for the user to select an appropriate illumination device.

FIG. 19 is a flowchart showing automatic switching of lighting. In S21, the CPU 61 determines whether or not a rotation instruction (magnification switching instruction) of the revolver 21 is input from the console unit 3 or the like. When the rotation instruction is input, the CPU 61 controls the revolver driving unit 24 based on the rotation instruction, rotates the revolver 21, and proceeds to S22.

In S22, the CPU 61 acquires the identification information of the objective lens 23. For example, the CPU 61 may obtain the identification information held in the memory of the control board 47 by communicating with the control board 47 via the electronic contacts 46a and 46b. The identification information may be information indicating the model name of the objective lens 23, magnification information indicating the magnification of the objective lens 23, illumination information indicating the presence or absence or type of the illumination device, or the like. The CPU 61 may acquire corresponding magnification information and illumination information from the storage unit 67 based on the model name of the objective lens 23.

In S23, the CPU 61 selects illumination based on the identification information of the objective lens 23. For example, when the identification information directly or indirectly indicates that the objective lens 23 has the ring illumination 26, the CPU 61 selects the ring illumination 26 as the illumination device. When the identification information directly or indirectly indicates that the objective lens 23 does not have the ring illumination 26, the CPU 61 selects the coaxial incident illumination 27 as the illumination device. Directly means that the identification information obtained from the objective lens 23 includes information indicating the presence or absence of the ring illumination 26. Indirectly, the presence/absence information indicating the presence/absence of the ring illumination 26 is not included in the identification information obtained from the objective lens 23, but the presence/absence information associated with the identification information obtained from the objective lens 23 is stored in the storage unit. 67 and the like can be acquired.

In S24, the CPU 61 determines a light source to be turned on and the amount of illumination light of each light source to be turned on at the same time, based on the observation method selected by the user. The observation method may include, for example, surface observation and unevenness observation. In addition, the surface observation may include a mode (halation removal) for reducing whiteout due to surface reflection.

When the surface observation using the objective lens 23a is designated, the CPU 61 selects the ring illumination 26. Further, the CPU 61 selects to turn on the light source areas 140A to 140D at the same time, and determines the respective illumination light quantities of the light source areas 140A to 140D so that the total value of the illumination light quantities of the light source areas 140A to 140D becomes a predetermined light quantity. .. When halation removal is selected by the user, the CPU 61 lights the light source regions 140A to 140D one by one to generate four luminance images. The image processor 66 compares the brightness values of the four pixels at the same position in the four brightness images, and calculates the brightness value of the pixel at that position using the remaining three pixels excluding the pixel with the largest brightness value ( (Example: Average value calculation) In this case, since the light source regions 140A to 140D are turned on one by one, the CPU 61 determines the illumination light amount so that the respective illumination light amounts of the light source regions 140A to 140D become the predetermined light amount. When the unevenness observation is selected, the CPU 61 determines the illumination light amount so that the respective illumination light amounts of the light source regions 140A and 140C (or the light source regions 140B and 140D) used for the unevenness observation become a predetermined light amount.

When the objective lenses 23b and 23c are selected, the CPU 61 selects the coaxial incident illumination 27. In the surface observation, when the objective lens 23 with the highest magnification is selected, the CPU 61 may select only the LED 53e to light it. The CPU 61 controls the drive current flowing through the LED 53e so that the illumination light amount of the LED 53e becomes a predetermined amount. When the high-magnification objective lens 23 is selected in the unevenness observation, the CPU 61 selects the pair of LEDs 53a and 53c (or the pair of LEDs 53b and 53d) to light them.

When the surface observation is selected in the medium-magnification objective lens 23, the CPU 61 selects the LEDs 53a to 53i and controls the drive currents of the LEDs 53a to 53i so that the total light amount of these LEDs becomes a predetermined light amount. When unevenness observation is selected in the medium-magnification objective lens 23, the CPU 61 selects a pair of LEDs 53a and 53c (or a pair of LEDs 53b and 53d) to light them. Since the LEDs 53a and 53c are not turned on at the same time, the CPU 61 controls respective drive currents so that the respective light amounts of the LEDs 53a and 53c become a predetermined light amount.

When the surface observation is selected in the low-magnification objective lens 23 that does not have the ring illumination 26, the CPU 61 selects the LEDs 53a to 53q, and the drive currents of the LEDs 53a to 53q are adjusted so that the total light amount of the LEDs 53a to 53q becomes a predetermined light amount. To control. When unevenness observation is selected in the low-magnification objective lens 23, the CPU 61 selects and turns on a pair of LEDs 53a and 53j and LEDs 53c and 53n (or a pair of LEDs 53b and 53l and LEDs 53d and 53p). .. Since the LEDs 53a and 53j are turned on at the same time, the CPU 61 controls the drive currents of the LEDs 53a and 53j so that the total amount of light of the LEDs 53a and 53j becomes a predetermined amount of light. Similarly, since the LEDs 53c and 53n are turned on at the same time, the CPU 61 controls the drive currents of the LEDs 53c and 53n so that the total amount of light of the LEDs 53c and 53n becomes a predetermined amount of light.

Both the ring illumination 26 and the coaxial incident illumination 27 may be turned on depending on the type of the objective lens 23 and the observation method.

<Determination of aperture amount>
Metallurgical microscopes and biological microscopes employ infinity correction optics. The infinity correction optical system has an imaging lens with a fixed focal length (focal length ft) and a plurality of objective lenses with a fixed focal length (focal length fo) that can be switched by a revolver. The magnification M is calculated by dividing the focal length ft by the focal length fo. The plurality of objective lenses are designed so that the distances from the mounting portions to the focal positions are the same (parfocal distance). As a result, even if the objective lens is switched, no focus shift occurs.

Generally, the magnification M of the objective lens (eg, 5 times, 10 times, 100 times, etc.) indicates the observation magnification when these objective lenses are combined with an imaging lens provided in the microscope. For example, when an objective lens having a focal length fo of 18 mm is combined with an image forming lens (ft=180 mm) of a general microscope, the observation magnification becomes 10 times.

In such an optical system, a dedicated objective lens corresponding to the observation magnification is prepared. That is, an objective lens having a resolution and working distance according to the purpose of use is designed. Therefore, as many objective lenses as observation magnifications are required, which makes the microscope system large and expensive.

On the other hand, in a stereoscopic microscope, a zoom optical system that can change the magnification from 1 to 10 times is sometimes used as an imaging lens. As a result, a wide range of magnification can be covered by one objective lens. However, as the lens in the zoom lens moves due to the zoom operation, the diameter (aperture amount) of the aperture existing between the imaging optical system and the objective lens for resolution control is changed, and the numerical aperture (NA: Numerical Aperture) is changed. Generally, at low magnification (wide field of view), the diaphragm diameter is small, and at high magnification (narrow field), the diaphragm diameter is large. By combining a zoom lens with a plurality of objective lenses having different magnifications, an observation magnification of 1 to 100 may be covered. However, since the entrance pupil position of the imaging lens largely changes depending on the zoom magnification, it does not coincide with the exit pupil position of the objective lens. This causes a decrease in the amount of light (shading) and deterioration of telecentricity at the outer periphery of the visual field. In order to set an appropriate resolution according to the observation magnification, it is necessary to change the numerical aperture of the objective lens by controlling an electric diaphragm provided at a position corresponding to the exit pupil position of the objective lens. However, the exit pupil position differs depending on the design of the objective lens. A low-magnification objective lens has an exit pupil position outside the objective lens, and a high-magnification objective lens has an exit pupil position inside. Therefore, in the switching type in which a plurality of objective lenses are switched and used, NA control at a diaphragm position suitable for a plurality of objective lenses cannot be provided by a single diaphragm. Therefore, shading and deterioration of telecentricity may occur.

Therefore, in the present embodiment, an imaging lens group whose focal length can be changed is provided, and the focal length of the imaging lens is set based on the user's magnification designation instruction. Further, the motorized diaphragm, which is arranged at an appropriate position with respect to the objective lens, of the plurality of motorized diaphragms is controlled. The diaphragm amount of the motorized diaphragm is determined so as to be appropriate for the magnification of the objective lens. The motorized diaphragm is installed at a position corresponding to the aperture position (pupil position) in the optical design of the objective lens. As shown in FIG. 8, the electric diaphragm 37a is installed at the pupil position of the objective lens 23a. The electric diaphragm 37b is installed at the pupil position of the objective lens 23b. The electric diaphragm 37c is installed at the pupil position of the objective lens 23c. Since the imaging lens 41 can be designed so that the entrance pupil position of the imaging lens 41 is near the electric diaphragm 37c, it is useful for improving the image quality.

By the way, the aperture amount is determined according to the resolution desired by the user. Also, the resolution correlates with the numerical aperture NA. The CPU 61 may determine the diaphragm amount so that the optical resolution (image-side NAi) on the imaging unit 25 side becomes constant.
NAi=NAo/M (1)
Here, NAo is the NA on the objective lens side. M is an observation magnification. In this case, the aperture amount φ is calculated by the following equation.
φ=NAi/ft (2)
This means that the image side NAi becomes constant by controlling the diaphragm amount so that the pupil diameter is also doubled when the focal length is doubled.
Here, the image-side NAi can be determined as follows.
(I) The user directly specifies the resolution (image side NAi).
(Ii) The image-side NAi is calculated based on the number of pixels of the image pickup unit 25.
(Iii) Determine the image-side NAi based on the user's request for resolution and depth of field.
(Iv) The observation magnification is converted to the image-side NAi based on a table created in advance in consideration of the optical characteristics obtained according to each objective lens and each observation magnification.

The depth of field (depth of focus) is inversely proportional to the square of NAo. In a microscope, it is preferable that the depth of field is deep when searching a field of view at low magnification.

Example of Table FIG. 20 shows an example of a table for converting the observation magnification M to the image side NAi. The table C1 is a table that outputs a constant image-side NAi without depending on the observation magnification M. The table C2 is a table that prioritizes depth on the low magnification side to reduce the image-side NAi, and prioritizes resolution on the high magnification side to increase the image-side NAi. The table C3 outputs a constant image-side NAi up to a certain magnification, but gradually decreases the image-side NAi when the magnification exceeds a certain magnification. In the high-magnification objective lens 23, NAo is theoretically 0.95 or less. This means that the pupil diameter cannot be increased as the magnification increases. The table C3 may be adopted depending on the characteristics of the objective lens 23.

Imaging Control Section FIG. 21 is a diagram illustrating the imaging control section 62. The objective lens recognition unit 81 acquires the identification information of the objective lens 23 by communicating with the objective lens 23, and recognizes the objective lens 23 based on the identification information. The UI unit 65 receives the observation magnification M through the magnification selection unit 73, and receives either the depth priority table 84 or the resolution priority table 85 through the table selection unit 78. Note that the UI unit 65 may receive an input from the image side NAi, or may receive a user request for resolution and depth of field.

The imaging lens determination unit 82 determines the focal length ft of the imaging lens 41 based on the observation magnification M input through the UI unit 65 and the focal length fo of the objective lens 23 recognized by the objective lens recognition unit 81. Further, the imaging lens determination unit 82 controls the imaging lens driving unit 42 so that the imaging lens 41 having the obtained focal length ft is located on the observation optical axis A1. The imaging lens determination unit 82 acquires the focal lengths ft of the imaging lenses 41a and 41b and the lens adapter 43 by referring to the imaging lens information 86 stored in the storage unit 67. The aperture amount determination unit 83 determines the aperture amount φ based on the observation magnification M accepted by the UI unit 65 and the user's preference (depth priority/field resolution priority). For example, if the user's preference is depth priority, the aperture amount determination unit 83 refers to the depth priority table 84 stored in the storage unit 67 and determines the image-side NAi corresponding to the input observation magnification M. Further, the diaphragm amount φ is determined from the image side NAi and the focal length ft of the imaging lens 41. If the user's preference is resolution priority, the aperture amount determination unit 83 refers to the resolution priority table 85 held in the storage unit 67, determines the image side NAi corresponding to the input observation magnification M, and further, , The aperture amount φ is determined from the image side NAi and the focal length ft of the imaging lens 41. The aperture amount determination unit 83 sets the aperture amount φ to the electric aperture 37 corresponding to the objective lens 23 recognized by the objective lens recognition unit 81.

● Digital zoom Since the image pickup unit 25 and the image processor 66 are adopted, digital zoom can be easily realized. The number of pixels of the display unit 2 (eg, 2 megapixels) is smaller than the number of pixels of the imaging unit 25 (eg, 10 megapixels). When the user instructs to display the entire field of view on the display unit 2, the image processor 66 may digitally reduce the image and display the image on the display unit 2. In this case, since the observation visual field changes, the diaphragm amount determining unit 83 may continuously reduce the diaphragm amount as the visual field becomes narrow. Thereby, continuous switching of the field of view and change of the resolution such as switching of the magnification of the zoom lens may be realized.

-Seamless magnification change The observation magnification M is realized by a combination of the focal length of the imaging lens 41 and the focal length of the objective lens 23. However, since the number of the image forming lenses 41 and the number of the objective lenses 23 are finite, there is an observation magnification M that cannot be realized depending on the combination of the focal length of the image forming lenses 41 and the objective lens 23. In this case, the image processor 66 may digitally enlarge/reduce the image acquired by the imaging unit 25 so that the image having the observation magnification M designated by the user is displayed on the display unit 2. As a result, seamless magnification change may be realized.

The image processor 66 is acquired by using the imaging lens 41a during the switching period from the start to the completion of switching the imaging lens 41a having the first focal length to the imaging lens 41b having the second focal length. An image of the observation magnification by the imaging lens 41b may be pseudo-generated based on the image and displayed on the display unit 2, or an animation indicating enlargement/reduction may be displayed.

When the combination of the objective lens 23 and the imaging lens 41 is changed, the brightness of the image changes. Therefore, the CPU 61 calculates the amount of change in the brightness of the image from the diaphragm amount φ, the focal length of the objective lens 23, and the focal length of the imaging lens 41, and corrects the illumination light amount so as to compensate for the amount of change. Good.

● Coaxial epi-illumination diaphragm When using the objective lens 23 with a small exit pupil diameter, or in the case of narrowing the electric diaphragm of the objective lens 23 for wide-field observation and depth-first observation, use the coaxial epi-illumination 27 for illumination. There is. In this case, since the coaxial epi-illumination 27 irradiates the illumination light to the outside of the pupil diameter, unnecessary stray light is generated by the light reflected by the electric diaphragm of the objective lens 23. Such stray light reduces the contrast of the image.

Therefore, as shown in FIG. 8, an electric diaphragm 37d may be provided as an aperture diaphragm of the coaxial incident illumination 27. The imaging control unit 62 controls the electric diaphragm 37d to control the light flux diameter of the coaxial epi-illumination 27 to be substantially the same as the exit pupil diameter in the current observation state. As a result, stray light caused by the coaxial epi-illumination 27 is less likely to occur, and the image contrast is improved. The exit pupil diameter in the current observation state is the exit pupil system of the objective lens 23 arranged on the observation optical axis A1. The diaphragm amount of the electric diaphragm 37d is determined according to the diaphragm amount of the objective lens 23 arranged on the observation optical axis A1, such as the diaphragm amounts of the motorized diaphragms 37a, 37b, and 37c.

<Summary>
As described with reference to FIG. 1 and the like, the head unit 22 functions as an optical system including an objective lens and an imaging lens. The mounting table 30 is an example of an XY stage that can move relative to the optical system in at least the X and Y directions. The detection unit 68 functions as a detection unit that detects the relative movement of the XY stage with respect to the optical system. The ring illumination 26 functions as an illumination unit that illuminates the observation object W placed in the visual field of the optical system with illumination light from different directions. The imaging unit 25 receives light from the observation object W via the optical system and generates a brightness image of the observation object W. The Z-direction drive unit 28 functions as a changing unit that changes the focus position of the optical system along the optical axis A1 of the optical system. The control unit 60 functions as a control unit that controls the illumination unit, the imaging unit, and the changing unit. The display unit 2 functions as a display unit that displays an observation image that is an image of the observation object W. The image processor 66 (i) irradiates the observation target with illumination light from the first illumination direction by controlling the illumination unit, controls the changing unit and the imaging unit, and controls a plurality of different units. A plurality of first luminance images are acquired by imaging the observation object at each of the in-focus positions, and (ii) the illumination unit is controlled to control the optical axis of the observation object with respect to the first illumination direction. By irradiating the observation object with illumination light from the second illumination direction that is symmetrical with respect to, and controlling the changing unit and the imaging unit to image the observation object at each of a plurality of different in-focus positions. Acquiring a plurality of second luminance images, and (iii) depth combination and unevenness enhancement of the plurality of first luminance images and the plurality of second luminance images enhances the unevenness of the surface of the observation target and captures the image. It functions as an image generation unit that generates an unevenness-enhanced image with a wider depth of field than a single luminance image that can be acquired by the unit. The display unit 2 displays the embossed image as the observation image. This provides a depth-combined unevenness-enhanced image.

The display unit 2 displays a moving image (live image) of the observation target object W acquired by the imaging unit 25 as an observation image while the detection unit 68 detects the relative movement of the XY stage. When the detection unit 68 detects the stop of the relative movement of the XY stage, the display unit 2 displays the unevenness-enhanced image generated by the image generation unit after the relative movement of the XY stage is stopped as the observation image. As a result, the user can move the XY stage while confirming the relationship between the visual field range of the imaging unit 25 and the observation target object W. Further, since the user can immediately see the depth-combined unevenness-enhanced image when the XY stage is stationary, the user can efficiently observe the observation object W.

The detection unit 68 may be configured to further detect a change in the magnification of the optical system. The display unit 2 displays the moving image of the observation target object W acquired by the imaging unit 25 as the observation image while the detection unit 68 detects the relative movement of the XY stage. Further, when the detection unit 68 detects that the relative movement of the XY stage is stopped and the magnification of the optical system is changed, the display unit 2 stops the relative movement of the XY stage and changes the magnification as an observation image. The unevenness-enhanced image generated by the image generation unit may be displayed later.

As shown in FIGS. 5 and 6, the display unit 2 may have a display area for a moving image and a display area for a concave-convex emphasized image.

The detection unit 68 may detect that the focus adjustment of the objective lens 23 by manual or auto focus is completed. When the magnification of the objective lens 23 is changed, the imaging control unit 62 controls the Z direction drive unit 28 to execute auto focus. Therefore, the concave-convex emphasized image may be generated with the magnification changed and the completion of the focus adjustment of the objective lens 23 as a trigger.

The UI unit 65 may further display a separate window for displaying a navigation image on the display unit 2 separately from the user interface 70. The navigation image is, for example, an image of the observation object W acquired using the objective lens 23 having a low magnification. When the user designates the observation site in the navigation image with the pointer 74, the UI unit 65 converts the designated position in the navigation image into the coordinate position of the mounting table 30, and moves the mounting table 30 to the position. As a result, it becomes possible to easily fit the observation site within the visual field range.

The depth stacking unit 33 creates a first depth stacking image by depth stacking a plurality of first brightness images, and a depth stacking process that creates a second depth stacking image by depth stacking a plurality of second brightness images. Function as a department. The unevenness emphasizing unit 34 functions as an emphasized image generation unit that generates an unevenness emphasized image based on the difference in brightness between the first depth combined image and the second depth combined image.

The depth synthesizing unit 33 analyzes a plurality of pixels having the same pixel position in each of the plurality of first luminance images, and determines the pixel with the highest degree of focusing among the plurality of pixels as the focused pixel at the pixel position. The selection may be performed to generate the first depth composite image including the in-focus pixels at each of a plurality of pixel positions. Note that the focus degree may be obtained for each pixel area including a plurality of adjacent pixels. The depth synthesizing unit 33 analyzes a plurality of pixels having the same pixel position in the plurality of second luminance images, and determines the pixel with the highest degree of focus among the plurality of pixels as the focus pixel at the pixel position. The selection may be performed to generate a second depth composite image including in-focus pixels at each of a plurality of pixel positions.

The mounting table 30 is an example of an XY stage on which the observation object W is mounted and which is movable in at least the X direction and the Y direction. The mounting table drive unit 29 is an example of a drive unit that drives the XY stage. As described in relation to S12, the CPU 61 may function as a detection unit that detects that the XY stage has moved and then stopped. The CPU 61 and the image processor 66 may execute the generation of the unevenness-enhanced image again when the detection unit detects that the XY stage is stationary after moving. This allows the user to save the trouble of explicitly instructing the generation of the unevenness-enhanced image.

When the CPU 61 detects that the XY stage is moving, the CPU 61 may be configured to display the moving image (live image) acquired by the imaging unit 25 on the display unit 2. When the CPU 61 detects that the XY stage is stationary, the CPU 61 may cause the image processor 66 to again generate the unevenness-enhanced image and display the unevenness-enhanced image on the display unit 2.

The coloring unit 36 may function as a color combining unit that acquires color information from the color image of the observation object W acquired by the imaging unit 25 and colorizes the unevenness-enhanced image. This makes it easier for the user to understand the relationship between the unevenness and the surface color.

The image processor 66 acquires a plurality of sub-luminance images each having a different exposure time when generating the first luminance image, and performs HDR processing on the plurality of sub-luminance images to generate the first luminance image. Good. Similarly, the image processor 66 acquires a plurality of sub-luminance images each having a different exposure time when generating the second luminance image, and performs a HDR process on the plurality of sub-luminance images to generate the second luminance image. May be. By applying the HDR processing in this way, it is possible to reduce whiteout and underexposure and obtain a depth-combined unevenness-enhanced image.

The height image generation unit 35 obtains the height of the surface of the observation target for each pixel by integrating each pixel of the unevenness-enhanced image, and generates a height image having the height as each pixel. Good. Further, the height image generation unit 35 may generate a color height image by coloring each pixel of the height image according to the height of each pixel. This makes it difficult for the crater illusion to occur, and allows the user to more accurately distinguish between the concave shape and the convex shape.

The mouse 4, the console unit 3, and the CPU 61 may function as a selection unit that selects the illumination direction of the illumination unit. The image processor 66 irradiates the observation target W with illumination light from a third illumination direction different from the first illumination direction and the second illumination direction by controlling the illumination unit, and the changing unit. The plurality of third luminance images may be acquired by controlling the image capturing unit and capturing the observation target object at each of a plurality of different focus positions. The image processor 66 irradiates the observation object with illumination light from a fourth illumination direction that is symmetrical with respect to the third illumination direction with respect to the third illumination direction by controlling the illumination unit. You may acquire a some 4th brightness|luminance image by controlling a change part and an image pick-up part, and image|photographing an observation target object in each of a plurality of different focus positions, respectively. Further, the image processor 66 outputs a plurality of first luminance images, the unevenness-enhanced image corresponding to the illumination direction selected by the selection unit among the first illumination direction, the second illumination direction, the third illumination direction and the fourth illumination direction. Alternatively, it may be generated using a plurality of brightness images corresponding to the illumination direction selected by the selection unit among the plurality of second brightness images, the plurality of third brightness images, and the plurality of fourth brightness images. The display unit 2 may display the unevenness-enhanced image corresponding to the illumination direction selected by the selection unit.

The unevenness emphasizing unit 34 synthesizes a pair of brightness images having the same in-focus position from the plurality of first brightness images and the plurality of second brightness images based on the difference in brightness, and then combines each of the plurality of focus positions. A plurality of sub unevenness-enhanced images in which unevenness is emphasized may be generated. The depth synthesis unit 33 may function as a depth synthesis image generation unit that generates a depth-synthesized unevenness-enhanced image by depth-synthesizing a plurality of sub-unevenness-enhanced images. As described above, the order of the embossing and the depth stacking may be first.

The illumination unit may be a ring illumination 26 arranged around the objective lens 23. The illumination unit may be an illumination light source provided inside the head unit 22 that illuminates the observation object W with illumination light through the objective lens 23.

As shown in FIG. 8, the objective lenses 23a to 23c, the imaging lenses 41a and 41b, and the like form an optical system of the magnifying observation apparatus 100. The revolver 21 functions as a lens selection unit that selectively arranges the first objective lens and the second objective lens in the observation optical path (observation optical axis A1) of the optical system. The ring illumination 26 is an example of a first illumination unit that illuminates the observation object with illumination light without passing through the first objective lens. The coaxial epi-illumination 27 functions as a second illuminating unit that illuminates the observation object with illumination light passing through the second objective lens. The light source region 140A of the ring illumination 26 functions as a first light source that illuminates the observation object with illumination light from the first illumination direction. The light source region 140D functions as a second light source that illuminates the observation object with illumination light from the second illumination direction. The LED 53a of the coaxial epi-illumination 27 functions as a third light source that irradiates the observation object with illumination light in the first illumination direction. The LED 53d functions as a fourth light source that illuminates the observation object with illumination light from the second illumination direction.

The CPU 61 selectively uses the first illumination unit and the second illumination unit according to the objective lens 23 arranged in the observation optical path. Since the illumination device is automatically selected according to the objective lens 23 arranged in the observation optical path, the convenience of the user who uses the magnifying observation device 100 is improved.

For example, the CPU 61 illuminates the observation object with illumination light from the first illumination direction by turning on the first light source when the first objective lens is arranged in the observation optical path, and controls the imaging unit 25. Then, the first luminance image is acquired by imaging the observation object. The CPU 61 illuminates the observation object with illumination light from the second illumination direction by turning on the second light source, and controls the imaging unit 25 to capture an image of the observation object to acquire the second luminance image. .. The CPU 61 may use the image processor 66 to generate a first observation image based on the first luminance image and the second luminance image and display the first observation image on the display unit 2. When the second objective lens is arranged in the observation optical path, the CPU 61 illuminates the observation object with illumination light from the first illumination direction by turning on the third light source, and controls the imaging unit 25. The third luminance image is acquired by imaging the observation target. The CPU 61 illuminates the observation object with illumination light from the second illumination direction by turning on the fourth light source, and controls the imaging unit 25 to capture an image of the observation object to acquire a fourth brightness image. .. The image processor 66 generates a second observation image based on the third luminance image and the fourth luminance image.

The CPU 61 illuminates the observation object with illumination light from the first illumination direction by turning on the first light source and the third light source when the first objective lens is arranged in the observation optical path, and the imaging unit 25. The first brightness image may be acquired by controlling the image pickup device to image the observation target. Further, the CPU 61 illuminates the observation object with the illumination light from the second illumination direction by turning on the second light source and the fourth light source, and controls the imaging unit to image the observation object. A brightness image may be acquired. The image processor 66 may be configured to generate a first observation image based on such a first luminance image and a second luminance image. In this way, the partial illumination by the ring illumination 26 and the partial illumination by the coaxial epi-illumination 27 may be combined.

The half mirror 38 is arranged in the observation optical path and functions as a half mirror that guides the illumination light from the third light source and the illumination light from the fourth light source to the second objective lens. By adopting such a half mirror 38, the coaxial epi-illumination 27 may be realized. Here, the light source of the coaxial epi-illumination 27 may be provided inside the head portion 22 or outside the head portion 22.

The CPU 61 (illumination control unit 64) controls the light amount of the light sources that are turned on at the same time among the first light source, the second light source, the third light source, and the fourth light source, by controlling the light amount of the light sources that are turned on at the same time. The amount of illumination light with which an object is irradiated may be maintained at a predetermined amount.

As shown in FIG. 8, the mounts 50a to 50c are examples of a first mount to which a first objective lens is attached and a second mount to which a second objective lens is attached. The CPU 61 recognizes the first objective lens by obtaining the lens identification information from the first objective lens via the first mount, and the lens identification information from the second objective lens via the second mount. Two objectives may be recognized. The CPU 61 functions as a lens recognition unit. As shown in FIG. 19, the CPU 61 may control lighting/non-lighting of the first light source, the second light source, the third light source, and the fourth light source based on the lens identification information. The lens identification information of the first objective lens may include information indicating that the first illumination unit is arranged around the lens barrel of the first objective lens.

The image processor 66 may generate the embossed image according to the procedure described above. The unevenness-enhanced image may be an unevenness-enhanced image with a wide (deep) depth of field. The image processor 66 emphasizes the unevenness on the surface of the observation object by performing depth synthesis and unevenness emphasis on the plurality of first luminance images and the plurality of second luminance images, and a single image that can be acquired by the imaging unit 25. The unevenness-enhanced image having a wider depth of field than that of the luminance image may be generated as the first observation image and the second observation image. In this manner, the ring illumination 26 and the coaxial incident illumination 27 may be used to generate an unevenness-enhanced image with a wide depth of field.

The illumination direction selection unit 72 is an example of a direction selection unit that selects the illumination direction in the observation image. The first illuminator (eg, ring illuminator 26) includes a fifth light source (light source region 140B) that irradiates the observation target with illumination light from the third illumination direction, and an observation target from the fourth illumination direction. A sixth light source (light source region 140D) that emits illumination light may be included. The second illumination unit (coaxial epi-illumination 27) illuminates the observation object with illumination light from the third illumination direction (eg, LED 53b) and illuminates the observation object from the fourth illumination direction. An eighth light source (LED 53d) that emits light may be included. The CPU 61 irradiates the observation object with illumination light from the first illumination direction by turning on the first light source when the first objective lens is arranged in the observation optical path, and controls the imaging unit to perform observation. The first brightness image is acquired by imaging the target object, and the illumination light is emitted from the second illumination direction to the observation target object by turning on the second light source, and the observation unit is controlled by controlling the imaging unit. Acquiring a second luminance image by imaging, illuminating the observation object with illumination light from the third illumination direction by turning on the fifth light source, and controlling the imaging unit to image the observation object. The fifth light intensity image is acquired with, and the sixth light source is turned on to illuminate the observation object with illumination light from the fourth illumination direction, and the imaging unit is controlled to image the observation object. A brightness image may be acquired. Further, when the second objective lens is arranged in the observation optical path, the CPU 61 illuminates the observation object with the illumination light from the first illumination direction by turning on the third light source, and controls the imaging unit. The third luminance image is acquired by imaging the observation target, and the fourth light source is turned on to illuminate the observation target with illumination light from the second illumination direction, and the imaging unit is controlled to control the observation target. To obtain the fourth luminance image, and by turning on the seventh light source, illuminate the observation object with illumination light from the third illumination direction, and control the imaging unit to image the observation object. The seventh luminance image is acquired by illuminating the observation object with illumination light from the fourth illumination direction by turning on the eighth light source, and the imaging unit is controlled to image the observation object. An eight-luminance image may be acquired. The image processor 66 uses the first brightness image and the second brightness as the observation image corresponding to the illumination direction selected by the direction selection unit from among the first illumination direction, the second illumination direction, the third illumination direction, and the fourth illumination direction. A plurality of brightness images corresponding to the illumination direction selected by the direction selection unit among the image, the third brightness image, the fourth brightness image, the fifth brightness image, the sixth brightness image, the seventh brightness image, and the eighth brightness image. It may be generated by using.

As shown in FIG. 8, the slide member 49a selects either the first image forming lens (example: image forming lens 41a) or the second image forming lens (example: image forming lens 41b) and arranges it in the observation optical path. Functions as the first selection unit. The revolver 21 functions as a second selection unit that selects either the first objective lens (example: objective lens 23a) or the second objective lens (example: objective lens 23b) and arranges it in the observation optical path. As shown in FIG. 21, the objective lens recognition unit 81 functions as a recognition unit that recognizes the objective lens selected by the second selection unit. The magnification selection unit 73 functions as a magnification selection unit that selects the magnification of the optical system. The motorized diaphragms 37a, 37b, 37c are examples of diaphragms arranged in the observation optical path. The imaging lens determination unit 82 determines the imaging lens based on the magnification of the optical system selected by the magnification selection unit and the objective lens recognized by the recognition unit. The imaging control unit 62 and the imaging lens determination unit 82 first select so that the imaging lens determined by the imaging lens determination unit 82 out of the first imaging lens and the second imaging lens is arranged in the observation optical path. It functions as a control unit that controls the unit. In this way, since the imaging lens corresponding to the observation magnification designated or selected by the user is arranged in the observation optical path, the convenience for the user is improved.

The electric diaphragm 37a is an example of a first variable diaphragm arranged at the pupil position of the first objective lens. The motorized diaphragm 37c is an example of a second variable diaphragm arranged at the pupil position of the second objective lens. The imaging control unit 62 controls the first variable diaphragm when the objective lens recognized by the recognition unit is the first objective lens, and controls the second variable lens when the objective lens recognized by the recognition unit is the second objective lens. Control the aperture. In this way, the electric diaphragm 37 suitable for the objective lens 23 arranged on the observation optical axis A1 is selectively controlled.

As shown in FIG. 8, the first objective lens may include a first variable diaphragm. This is an arrangement suitable when the pupil position of the first objective lens exists inside the first objective lens. The second variable diaphragm is arranged in the observation optical path outside the second objective lens. This is an arrangement suitable when the pupil position of the second objective lens is outside the second objective lens.

The tables illustrated in FIGS. 20 and 21 are examples of tables showing the relationship between the magnification of the optical system and the aperture amount. The aperture amount determination unit 83 functions as an aperture determination unit that determines the aperture amount corresponding to the magnification of the optical system selected by the magnification selection unit by referring to the table. The imaging control unit 62 controls the diaphragm so that the diaphragm amount is determined by the diaphragm determination unit.

The depth priority table 84 is an example of a first table that prioritizes depth, and the resolution priority table 85 is an example of a second table that prioritizes resolution. The aperture amount determination unit 83 may use a table selected by the user from the first table and the second table. As shown in FIG. 5, the user may select one of the tables through the table selection unit 78. In this way, the table is selected according to the user's preference, and the aperture stop is appropriately determined based on the selected table.

As shown in FIGS. 8 to 13, the slide member 49a functions as a first slide member that slides the first imaging lens and the second imaging lens in the direction orthogonal to the observation optical path. The first slide member is slidably held with respect to the first frame (eg, frame 40a). When the first end portion of the first slide member in the direction orthogonal to the observation optical path comes into contact with the first stop member (for example, stop member 44a) provided on the first frame and stops, the second imaging lens moves. It is placed in the observation light path. When the second end portion of the first slide member in the direction orthogonal to the observation optical path comes into contact with the second stop member (example: 44b) provided on the first frame and stops, the first imaging lens causes the observation optical path to move. Is located in. Thereby, the first image forming lens and the second image forming lens will be accurately positioned with respect to the observation optical path.

The lens adapter 43 is an example of a third imaging lens that can be arranged in series with the observation optical path together with the first imaging lens. The first selection unit may include a second slide member (eg, slide member 49b) that slides the third imaging lens in a direction orthogonal to the observation optical path. The first selection unit arranges only the first imaging lens in the observation optical path among the first imaging lens, the second imaging lens and the third imaging lens, or only the second imaging lens in the observation optical path. Alternatively, the first imaging lens and the third imaging lens may be arranged in the observation optical path. This makes it possible to switch the observation magnification in three steps. As shown in FIG. 13, the direction orthogonal to the observation optical path (sliding direction) is parallel to the tilt axis of the magnifying observation apparatus 100. As a result, the load on the motor that slides the imaging lens 41 is less likely to be affected by the tilt of the head portion 22. Furthermore, if the sliding direction is orthogonal to the vertical direction, the load applied to the motor that slides the imaging lens 41 is less likely to be affected by gravity. Usually, a rotary revolver or a slider that moves in parallel at three positions is used. However, in the present embodiment, by adopting a form in which an optical adapter such as the lens adapter 43 is inserted, a two-stage pressing slider can be introduced. As a result, an inexpensive magnification switching mechanism that does not require positioning is realized.

The motorized diaphragm 37d is an example of a third variable diaphragm arranged between the light source and the half mirror. As a result, stray light caused by the illumination light is reduced, and the image contrast will be improved. Further, the electric diaphragm 37d may be controlled so as to change according to the diaphragm amounts of the diaphragms 37a, 37b, 37c on the objective lens side. This may further reduce stray light.

The second selection unit can be realized by the revolver 21. The revolver 21 may have a first mount (example: mount 50a) to which the first objective lens is attached and a second mount (example: mount 50b) to which the second objective lens is attached. As described with reference to FIGS. 14 and 15, the first mount and the second mount have a plurality of contacts (eg, electronic contacts 46b) for communicating with the recognition unit. The objective lens recognizing unit 81 is provided in the first objective lens through a plurality of contacts of the first mount and communicates with a communication unit (eg, the control board 47) to acquire the identification information of the first objective lens. One objective lens may be recognized. The objective lens recognition unit 81 recognizes the second objective lens by acquiring the identification information of the second objective lens by communicating with the communication unit provided in the second objective lens through the plurality of contacts of the second mount. May be. A slip ring may be adopted as the rotating shaft of the revolver 21. The slip ring is a signal transmission mechanism having a ring and a brush. As a result, even if the revolver 21 is rotated, the control substrate 47 of the objective lens connected to each mount and the objective lens recognition unit 81 can communicate with each other through the slip ring. Thus, the slip ring is an example of a plurality of rotatable contacts for the first mount and the second mount to communicate with the recognizer.

Claims (14)

A first imaging lens,
A second imaging lens,
A first selection unit that selects one of the first imaging lens and the second imaging lens and arranges it in the observation optical path;
A first objective lens,
A second objective lens,
A second selection unit that selects one of the first objective lens and the second objective lens and arranges it in the observation optical path;
A recognition unit for recognizing the objective lens selected by the second selection unit,
A magnification selection section for selecting the magnification of the optical system,
A diaphragm arranged in the observation optical path,
An imaging lens determination unit that determines an imaging lens based on the magnification of the optical system selected by the magnification selection unit and the objective lens recognized by the recognition unit;
A control unit that controls the first selection unit so that the imaging lens determined by the imaging lens determination unit of the first imaging lens and the second imaging lens is arranged in the observation optical path. A magnifying observation apparatus having. The diaphragm is
A first variable aperture arranged at the pupil position of the first objective lens;
A second variable aperture arranged at the pupil position of the second objective lens,
Have
The control unit is
When the objective lens recognized by the recognition unit is the first objective lens, the first variable diaphragm is controlled, and when the objective lens recognized by the recognition unit is the second objective lens, the second objective lens is controlled. The magnifying observation apparatus according to claim 1, wherein the magnifying observation apparatus is configured to control the variable diaphragm. The magnifying observation apparatus according to claim 2, wherein the first objective lens incorporates the first variable diaphragm. The magnifying observation apparatus according to claim 2 or 3, wherein the second variable diaphragm is arranged in an observation optical path outside the second objective lens. A table showing the relationship between the magnification of the optical system and the diaphragm amount,
An aperture determination unit that determines the aperture amount corresponding to the magnification of the optical system selected by the magnification selection unit by referring to the table,
The magnifying observation apparatus according to any one of claims 1 to 4, wherein the control unit controls the diaphragm so that the diaphragm amount is determined by the diaphragm determination unit. The table has a first table that prioritizes depth and a second table that prioritizes resolution.
The magnifying observation apparatus according to claim 5, wherein the aperture determination unit uses a table selected by a user from the first table and the second table. The first selection unit,
7. The first slide member for sliding the first image forming lens and the second image forming lens in a direction orthogonal to the observation light path, according to any one of claims 1 to 6. The magnifying observation device described. The first slide member is slidably held with respect to the first frame,
When the first end portion of the first slide member in the direction orthogonal to the observation light path comes into contact with the first stop member provided on the first frame and stops, the second imaging lens causes the observation light path to move. When the second end of the first slide member in the direction orthogonal to the observation optical path comes into contact with the second stop member provided on the first frame and stops, the first imaging lens Is arranged in the observation optical path, The magnifying observation apparatus according to claim 7, wherein The magnifying observation apparatus according to any one of claims 1 to 8, further comprising a third imaging lens that can be arranged in series with the observation optical path together with the first imaging lens. The first selection unit,
A second slide member for sliding the third imaging lens in a direction orthogonal to the observation optical path,
The first selecting unit arranges only the first image forming lens in the observation optical path among the first image forming lens, the second image forming lens, and the third image forming lens. 10. The configuration is such that only the image lens is arranged in the observation optical path, or the first imaging lens and the third imaging lens are arranged in the observation optical path. The magnifying observation device described. 11. The magnifying observation apparatus according to claim 7, wherein a direction orthogonal to the observation optical path is parallel to a tilt axis of the magnifying observation apparatus. A light source for irradiating the observation object with illumination light through the objective lens selected by the first selection unit,
A half mirror that guides the output light output from the light source to the objective lens;
12. The magnifying observation apparatus according to claim 1, further comprising a third variable diaphragm disposed between the light source and the half mirror. The second selection unit is a revolver,
The revolver is
A first mount to which the first objective lens is attached,
A second mount to which the second objective lens is attached,
Have
The first mount and the second mount have a plurality of contacts for communicating with the recognition unit,
The recognition unit acquires identification information of the first objective lens by communicating with a communication unit provided in the first objective lens via the plurality of contacts of the first mount, and the identification information based on the identification information. The identification information of the second objective lens is acquired by recognizing the first objective lens and communicating with the communication unit provided in the second objective lens through the plurality of contacts of the second mount, and the identification information is obtained. 13. The magnifying observation apparatus according to claim 1, wherein the second objective lens is recognized based on the. The second selection unit is a revolver,
The revolver is
A first mount to which the first objective lens is attached,
A second mount to which the second objective lens is attached,
Have
13. The expansion according to claim 1, wherein the first mount and the second mount are connected via a plurality of rotatable contacts for communicating with the recognition unit. Observation device.

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